CN113489303A - 一种集成米勒钳位电路的碳化硅功率半导体器件装置 - Google Patents

一种集成米勒钳位电路的碳化硅功率半导体器件装置 Download PDF

Info

Publication number
CN113489303A
CN113489303A CN202110821869.2A CN202110821869A CN113489303A CN 113489303 A CN113489303 A CN 113489303A CN 202110821869 A CN202110821869 A CN 202110821869A CN 113489303 A CN113489303 A CN 113489303A
Authority
CN
China
Prior art keywords
power semiconductor
semiconductor device
silicon carbide
mosfet power
miller clamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110821869.2A
Other languages
English (en)
Inventor
王志坤
杨书豪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guanghua Lingang Engineering Application Technology Research and Development Shanghai Co Ltd
Original Assignee
Guanghua Lingang Engineering Application Technology Research and Development Shanghai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guanghua Lingang Engineering Application Technology Research and Development Shanghai Co Ltd filed Critical Guanghua Lingang Engineering Application Technology Research and Development Shanghai Co Ltd
Priority to CN202110821869.2A priority Critical patent/CN113489303A/zh
Priority to PCT/CN2021/113603 priority patent/WO2023000424A1/zh
Publication of CN113489303A publication Critical patent/CN113489303A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/38Means for preventing simultaneous conduction of switches
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02MAPPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M1/00Details of apparatus for conversion
    • H02M1/08Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02BCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B70/00Technologies for an efficient end-user side electric power management and consumption
    • Y02B70/10Technologies improving the efficiency by using switched-mode power supplies [SMPS], i.e. efficient power electronics conversion e.g. power factor correction or reduction of losses in power supplies or efficient standby modes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Power Conversion In General (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

本发明提供了一种集成米勒钳位电路的碳化硅功率半导体器件装置。本发明将米勒钳位电路的高频MOSFET功率半导体器件集成在碳化硅功率半导体器件封装内部,大幅减小米勒钳位电路与碳化硅MOSFET功率半导体器件的封装杂散电感,实现碳化硅MOSFET功率半导体器件的桥臂串扰的有效抑制。

Description

一种集成米勒钳位电路的碳化硅功率半导体器件装置
技术领域
本申请涉及碳化硅功率半导体器件技术领域,具体涉及一种集成米勒钳位电路的碳化硅功率半导体器件装置。
背景技术
碳化硅MOSFET功率半导体器件由于高速开关,带来桥臂串扰,引起桥臂直通的危险,如图2所示。现有的方法是通过增加外置米勒钳位电路来抑制碳化硅MOSFET功率半导体器件的桥臂串扰,提高电路的可靠性,如图3所示。
现有方法通过增加外置米勒钳位电路来抑制碳化硅MOSFET功率半导体器件的桥臂串扰,但是由于碳化硅MOSFET功率半导体器件内部封装杂散电感以及器件内置门极驱动电阻的影响,米勒钳位电路的功能受到影响,难以实现碳化硅MOSFET功率半导体器件的桥臂串扰的有效抑制。
发明内容
为了解决上述技术问题,本发明提供了一种集成米勒钳位电路的碳化硅功率半导体器件装置,将米勒钳位电路的高频MOSFET功率半导体器件集成在碳化硅功率半导体器件封装内部,实现碳化硅MOSFET功率半导体器件的桥臂串扰的有效抑制。
本发明所采用的技术方案如下:
一种集成米勒钳位电路的碳化硅功率半导体器件装置,将米勒钳位电路的高频MOSFE的漏极和碳化硅MOSFET功率半导体器件的门极通过覆铜陶瓷基板互连,形成米勒钳位电路高频MOSFET功率半导体器件和碳化硅MOSFET功率半导体器件在同一个封装的集成。
进一步,米勒钳位电路的高频MOSFET功率半导体器件的驱动信号通过碳化硅MOSFET功率半导体器件的驱动电路提供。
进一步,将米勒钳位电路的高频MOSFET的源极和碳化硅MOSFET功率半导体器件的源极通过覆铜陶瓷基板互连。
通过本申请实施例,可以获得如下技术效果:
将米勒钳位电路的高频MOSFET功率半导体器件集成在碳化硅功率半导体器件封装内部,大幅减小米勒钳位电路与碳化硅MOSFET功率半导体器件的封装杂散电感,实现碳化硅MOSFET功率半导体器件的桥臂串扰的有效抑制。
附图说明
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍,显而易见地,下面描述中的附图是本申请的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。
图1为现有技术中碳化硅MOSFET功率半导体器件驱动电路示意图;
图2为现有技术中引起桥臂直通的危险的原理示意图;
图3为现有技术中通过增加外置米勒钳位电路来抑制桥臂串扰的原理示意图;
图4为本发明的碳化硅功率半导体器件装置的组成结构示意图。
具体实施方式
为使本申请实施例的目的、技术方案和优点更加清楚,下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本申请一部分实施例,而不是全部的实施例。基于本申请中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的全部其他实施例,都属于本申请保护的范围。
图4为本发明的碳化硅功率半导体器件装置的组成结构示意图。本发明将米勒钳位电路的高频MOSFET功率半导体器件集成在碳化硅功率半导体器件封装内部,大幅减小米勒钳位电路与碳化硅MOSFET功率半导体器件的封装杂散电感,实现碳化硅MOSFET功率半导体器件的桥臂串扰的有效抑制。米勒钳位电路的高频MOSFET功率半导体器件的驱动信号通过碳化硅MOSFET功率半导体器件的驱动电路提供。
在图4中,将米勒钳位电路的高频MOSFE的漏极和碳化硅MOSFET功率半导体器件的门极通过覆铜陶瓷基板互连,将米勒钳位电路的高频MOSFET的源极和碳化硅MOSFET功率半导体器件的源极通过覆铜陶瓷基板互连,形成米勒钳位电路高频MOSFET功率半导体器件和碳化硅MOSFET功率半导体器件在同一个封装的集成。
现有技术都是采用不分离的碳化硅MOSFET功率半导体器件,和米勒钳位电路的高频MOSFET器件,两者需要通过导线互连,导线将产生较大的引线电感,影响米勒钳位电路的性能,将导致碳化硅MOSFET桥臂串扰以及可靠运行。相比于现有技术,将米勒钳位电路的高频MOSFET功率半导体器件集成在碳化硅MOSFET功率半导体器件封装内部,从而有效减小米勒钳位电路与碳化硅MOSFET功率半导体器件的互连电感,实现碳化硅MOSFET功率半导体器件高频运行桥臂串扰的有效抑制,提高碳化硅MOSFET功率半导体器件运行可靠性。米勒钳位电路的高频MOSFET功率半导体器件的驱动信号通过碳化硅MOSFET功率半导体器件的驱动电路提供。

Claims (3)

1.一种集成米勒钳位电路的碳化硅功率半导体器件装置,其特征在于,
将米勒钳位电路的高频MOSFE的漏极和碳化硅MOSFET功率半导体器件的门极通过覆铜陶瓷基板互连,形成米勒钳位电路高频MOSFET功率半导体器件和碳化硅MOSFET功率半导体器件在同一个封装的集成。
2.根据权利要求1所述的装置,其特征在于,米勒钳位电路的高频MOSFET功率半导体器件的驱动信号通过碳化硅MOSFET功率半导体器件的驱动电路提供。
3.根据权利要求1所述的装置,其特征在于,将米勒钳位电路的高频MOSFET的源极和碳化硅MOSFET功率半导体器件的源极通过覆铜陶瓷基板互连。
CN202110821869.2A 2021-07-19 2021-07-19 一种集成米勒钳位电路的碳化硅功率半导体器件装置 Pending CN113489303A (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202110821869.2A CN113489303A (zh) 2021-07-19 2021-07-19 一种集成米勒钳位电路的碳化硅功率半导体器件装置
PCT/CN2021/113603 WO2023000424A1 (zh) 2021-07-19 2021-08-19 一种集成米勒钳位电路的碳化硅功率半导体器件装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110821869.2A CN113489303A (zh) 2021-07-19 2021-07-19 一种集成米勒钳位电路的碳化硅功率半导体器件装置

Publications (1)

Publication Number Publication Date
CN113489303A true CN113489303A (zh) 2021-10-08

Family

ID=77942539

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110821869.2A Pending CN113489303A (zh) 2021-07-19 2021-07-19 一种集成米勒钳位电路的碳化硅功率半导体器件装置

Country Status (2)

Country Link
CN (1) CN113489303A (zh)
WO (1) WO2023000424A1 (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111835183A (zh) * 2020-08-19 2020-10-27 巨风芯科技(深圳)有限公司 一种米勒钳位保护电路、驱动电路、芯片及智能igbt模块
CN112003595A (zh) * 2020-09-04 2020-11-27 山特电子(深圳)有限公司 用于并联的开关晶体管的米勒钳位装置及包括其的驱动器
CN112802841A (zh) * 2021-04-08 2021-05-14 成都蓉矽半导体有限公司 一种具有密勒钳位功能的功率mosfet
CN112838746A (zh) * 2019-11-25 2021-05-25 硅谷实验室公司 具有集成米勒钳位器的栅极驱动器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6973406B2 (ja) * 2016-11-24 2021-11-24 住友電気工業株式会社 半導体モジュール
US10122294B2 (en) * 2016-12-01 2018-11-06 Ford Global Technologies, Llc Active gate clamping for inverter switching devices with enhanced common source inductance
US11652478B2 (en) * 2016-12-16 2023-05-16 Wolfspeed, Inc. Power modules having an integrated clamp circuit and process thereof
DE102019200965A1 (de) * 2019-01-25 2020-07-30 Danfoss Silicon Power Gmbh Leistungsmodul, das eine aktive miller-clamp-funktion aufweist

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112838746A (zh) * 2019-11-25 2021-05-25 硅谷实验室公司 具有集成米勒钳位器的栅极驱动器
US20210159898A1 (en) * 2019-11-25 2021-05-27 Silicon Laboratories Inc. Gate driver with integrated miller clamp
CN111835183A (zh) * 2020-08-19 2020-10-27 巨风芯科技(深圳)有限公司 一种米勒钳位保护电路、驱动电路、芯片及智能igbt模块
CN112003595A (zh) * 2020-09-04 2020-11-27 山特电子(深圳)有限公司 用于并联的开关晶体管的米勒钳位装置及包括其的驱动器
CN112802841A (zh) * 2021-04-08 2021-05-14 成都蓉矽半导体有限公司 一种具有密勒钳位功能的功率mosfet

Also Published As

Publication number Publication date
WO2023000424A1 (zh) 2023-01-26

Similar Documents

Publication Publication Date Title
JP6909881B2 (ja) フェライトビーズを有するスイッチング回路
JP7157046B2 (ja) パワーモジュール
US10607978B2 (en) Semiconductor device and electronic apparatus
US9171837B2 (en) Cascode circuit
US9818686B2 (en) Semiconductor modules and methods of forming the same
JP5783997B2 (ja) 電力用半導体装置
US9941255B2 (en) Power semiconductor module
JP5925364B2 (ja) 電力用半導体装置
US11309884B1 (en) Switching circuits having drain connected ferrite beads
CN102939650A (zh) 半导体装置
JP2013125848A (ja) パワーモジュール半導体装置およびその製造方法
JP2020004929A (ja) 半導体装置
JPWO2014136252A1 (ja) 半導体装置
WO2023237064A1 (zh) 用于功率氮化镓hemt器件的4引脚to-247封装结构
US20230308027A1 (en) Low stray inductance busbar structure for power module
CN113489303A (zh) 一种集成米勒钳位电路的碳化硅功率半导体器件装置
US9030023B2 (en) Bond pad stack for transistors
EP2611033B1 (en) Gate driver with digital ground
Rogers et al. Performance comparison of state-of-the-art 300a/1700v si igbt and SiC mosfet power modules
US20100052140A1 (en) Package structure
TWI718250B (zh) 封裝結構
US20230369983A1 (en) Monolithic half-bridge die
US20230124581A1 (en) Transistor device structure with angled wire bonds
US20230215833A1 (en) Limiting Failures Caused by Dendrite Growth on Semiconductor Chips
CN112234030B (zh) 一种三相逆变功率芯片及其制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20211008

RJ01 Rejection of invention patent application after publication