CN113463096B - 一种绳轮表面TD-Cr/PVD-CrN耐磨涂层及其制备方法 - Google Patents

一种绳轮表面TD-Cr/PVD-CrN耐磨涂层及其制备方法 Download PDF

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CN113463096B
CN113463096B CN202110710111.1A CN202110710111A CN113463096B CN 113463096 B CN113463096 B CN 113463096B CN 202110710111 A CN202110710111 A CN 202110710111A CN 113463096 B CN113463096 B CN 113463096B
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万强
曹道成
伍世涛
孟亮
李善军
李晶
杨文达
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Huazhong Agricultural University
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Abstract

本发明公开一种绳轮表面TD‑Cr/PVD‑CrN耐磨涂层及其制备方法。该涂层依次由基体、渗Cr涂层和纳米CrN涂层组成,其中渗Cr涂层为高硬度耐磨层,CrN涂层为高硬度低摩擦涂层,其中渗Cr层为原位扩散反应生成,CrN层为物理气相沉积获得的纳米陶瓷层,实现TD扩散层原位合成高结合力与PVD涂层低摩擦的结合。制备方法为:首先采用TD处理技术制备高硬Cr涂层,经过抛光与清洗之后,然后进行辉光清洗与刻蚀,采用PVD沉积纳米CrN涂层。本发明利用TD渗Cr所得涂层与基体结合力优异、硬度高、涂层厚,并采用PVD技术制备CrN涂层进一步提高涂层硬度并降低摩擦系数,能够有效对渗Cr样品应力进行释放。所述涂层可大幅度提高绳轮的表面硬度、耐磨性以及涂层与绳轮表面之间的结合性能。

Description

一种绳轮表面TD-Cr/PVD-CrN耐磨涂层及其制备方法
技术领域
本发明属于金属表面涂层领域,具体涉及在绳轮表面TD渗Cr的基础上制备CrN的PVD涂层相结合,制备新型高硬度涂层。
背景技术
绳传动是依靠绳索与绳轮之间的摩檫力来传递动力和运动的机械传动,相较于链传动与齿轮传动,绳传动的结构更加简单,成本更加低廉,在用来传递超大功率的时候更加方便,具有运行时噪音低,刚度比较高,惯量比较小,运行较为稳定,维修保护成本较低等优点。除此之外,绳传动的抗拉强度很高,可以在较长距离运输和较大重量起降的场合下应用,例如山地果园运输机的动力运输系统或者电梯的运行系统。
由于绳传动的运行机理,绳轮作为绳传动的重要组成部分之一,必然会受到磨损,其中最容易发生的失效形式为塑性变形和微动磨损。这是由于在运转过程中所承接的绳受到的张力不匀衡,或是在安装时出现些许偏差,会导致绳与绳轮接触处受力更大,产生的不均匀磨损也会更大,表现在槽轮上便是此处的表面会发较大的塑性变形,从而影响绳轮的工作效率,甚至会造成严重的安全隐患,同样,该处的受力由于接近绳轮接触所能承受的最大力,会导致绳发生弹性滑动,进而引发严重的微动磨损,同样导致绳轮发生失效。
Cr是一种实际生产中公认的可有效改善钢铁性能的合金元素。添加该合金元素,不仅可提高钢铁力学性能(如硬度、强度等),而且可显著改善钢铁的耐磨性与耐蚀性,同时铬与钢铁中的碳形成的铬碳化合物颗粒细小,可均匀分布在钢铁中,对于细化组织,提高材料的塑性和韧性是非常有益的。因此采用TD渗Cr可以几乎不降低基体的韧性,被覆碳化物层的基体表面呈现出碳化物固有的性能,如高硬度、良好的耐磨性、抗氧化和抗腐蚀性,并且内部的强度与基体一致,与基体的结合力良好。
CrN涂层在1996年被采用电弧离子镀技术制备出来,实验测得该涂层导致基体表面硬度大幅增加,相较于其它材料的沉积涂层,具有硬度高,摩擦系数低的优点。此后,CrN涂层得到了迅猛的发展,其可以使用各种物理沉积技术制备,常见的有多弧离子镀、磁控溅射、空心阴极放电等,得到的涂层均匀,晶粒细小,使用性能良好。
目前国内对于绳轮的研究稍显不足,尤其是对于电梯和果园运输运输系统这类的,其工作内容与工作环境对绳轮本身的要求较高,这是因为一方面承受大的载荷,绳轮本体要求有高的强韧性;另一方面绳轮槽口与钢丝绳接触,又要求有高的耐磨性。对于该种绳轮,目前关于增强其耐磨性能的研究相对较少,常见的增强绳轮使用性能的方法有更换耐磨材料制作,以及采用表面改性技术得到需要的性能。采用耐磨材料制作绳轮会导致成本过高,而有些表面处理的工艺耗时较久,都存在了一定的缺陷。
发明内容
为了解决上述技术问题,本发明提供一种绳轮表面TD-Cr/PVD-CrN耐磨涂层及其制备方法。
本发明的制备方法首先利用TD表面处理技术,在绳轮表面制备一层50-120μm的渗Cr涂层,为了降低表面摩擦以及进一步提升表面硬度,在其表面使用电弧离子镀的方法制备一层CrN涂层。所制备的涂层具有高硬度、高耐磨性以及结合力强等特点。可以提高绳轮表面硬度与耐磨性能,采用PVD方法制备的CrN涂层虽然硬度会提高,但是与基体的结合性能较差,直接在绳轮表面制备Cr N的PVD涂层会达不到预期使用寿命以及使用性能,可以有效的减少因绳轮磨损导致的失效,延长绳轮的使用寿命,同时TD渗Cr涂层易于修复,可以减少维修带来的成本与能源损失。
本发明提供的技术方案如下:
第一方面,本发明提供一种绳轮表面TD-Cr/PVD-CrN耐磨涂层,所述涂层依次由基体、渗Cr涂层和纳米CrN涂层组成,其中渗Cr涂层为高硬度耐磨层,CrN涂层为高硬度低摩擦涂层。
进一步,所述基体为绳轮材料45钢。
进一步,所述渗Cr涂层厚度为50-120μm,CrN涂层厚度为2-8μm。
进一步,所述渗Cr涂层和纳米CrN涂层元素由C、N、Cr、Fe组成,其中Cr的含量不低于60wt%,Fe的含量不低于20wt%。
第二方面,本发明提供第一方面所述涂层的制备方法,包括以下步骤:
(1)将基体抛光后清洗;
(2)在基体表面利用TD处理技术制备渗Cr涂层;
(3)将渗Cr涂层进行辉光清洗和刻蚀清洗;
(4)在渗Cr涂层上沉积CrN涂层,经冷却后即得。
进一步,所述步骤(1)中,抛光至1000#~1200#,
厚度消减不超过10μm,抛光后进行超声波清洗。
进一步,所述步骤(2)中,TD处理的工艺参数为:500℃预热1h后,加热到960℃保温15h,然后随炉冷却至200℃。
进一步,所述步骤(2)中渗Cr涂层厚度为50-120μm。
进一步,所述步骤(3)中,辉光清洗条件为:温度100-300℃,气压为0.05-0.2Pa,偏压为-1000V;所述CrN涂层的刻蚀清洗条件为:气压0.56Pa,偏压500-600V,占空比50%。辉光清洗在真空条件下采用大的负偏压进行,大的偏压能够保证辉光释放离子具有很高的能量,大能量的离子撞击渗Cr涂层表面可以保证表面的污染物能够被清除,不仅如此,纯氩气的清洗可以避免绳轮表面氧化和被其他离子污染,刻蚀清理可以清除表面杂质。两者结合更有利于获得干净的表面,提高CrN涂层与渗Cr涂层的结合力。
进一步,所述步骤(4)中,PVD涂层的沉积条件为:N2气压为1.0-2.5Pa,基体脉冲偏压为70-200V,铬靶弧流为40-100A,转速为2-5rpm,沉积温度300-450℃,沉积时间为30-150分钟。
本发明的有益效果如下:
1、本发明采用TD处理与PVD结合的工艺,不仅可以提高涂层间的结合性能,还可以在渗Cr涂层提升硬度的基础上再提高一次硬度,最终得到高硬度,低摩擦,结合力强的涂层,以实现改善绳轮表面性能,扩大其使用范围,延长其使用寿命,并达到节约能源资源、降低成本的目的。
2、本发明采用辉光清洗与刻蚀清洗处理渗Cr表面,两者清洗方式结合可以提高CrN涂层与渗Cr涂层的结合力。
3、本发明采用沉积温度为300-450℃,在该温度下沉积一个小时,相当于在沉积的同时CrN涂层经过了一个小时的热处理;本发明将两个过程相结合,节省了防护涂层的沉积时间,提升生产效率。
4、本发明所制备的涂层具有高硬度的、耐磨性能和结合性能,并为CrN涂层与45钢表面结合力较差的问题提供了新的解决方案,大大提高了绳轮的工作性能与使用寿命,节能降耗并提升了工作效率。
附图说明
图1为涂层结构示意图;图1中,1-CrN涂层,2-渗Cr涂层,3-基体;
图2为沉积设备结构示意图;图2中,1-绳轮,2-Cr靶,3-炉门;
图3为涂层xrd图;
图4为涂层成分含量图;
图5为涂层纳米压痕图。
具体实施方式
以下结合具体实施例对本发明作进一步详细的说明,本发明的内容完全不限于本发明的内容。
本发明采用PVD方法制备CrN涂层的设备如图2所示,该设备由反应室、真空系统、冷却系统和控制系统等部分组成,其中反应室中有放置绳轮的工件夹,转速可调节,真空室中布有加热管,可以对真空室整体进行加热。真空系统主要由机械泵和分子泵组成,先用机械泵抽真空,然后再打开分子泵,两者结合真空最高可以达到1×10-3Pa。
实施例1
制备方法如下:
步骤1:首先对绳轮表面进行研磨并抛光至1000#~1200#,使用乙醇:丙酮=3:1~4:1的清洗剂经超声清洗后烘干;
步骤2:将处理好的绳轮与试样包覆入渗铬剂并放置渗铬罐中,然后用玻璃粉进行密封处理并将其放置电阻炉中;500℃预热1h后,加热到960℃保温15h,然后随炉冷却至200℃;出炉冷却至室温。
步骤3:将步骤2中所得的表面渗Cr的绳轮试样,放于丙酮溶液中进行5分钟超声清洗,然后采用去离子水清洗,然后利用无水乙醇脱水,并利用吹风机风干;将清洗之后的基体装入炉腔之中,将其放置于样品盘上,用浓度为99.99%的Ar离子在温度100℃,气压为0.05Pa,偏压为-1000V的条件下进行辉光清洗,接着在气压0.56Pa,偏压500V,占空比50%的情况下进行刻蚀清洗。停氩气,通氮气,氮气气压维持在2.5Pa,基体脉冲偏压为70V,铬靶弧流为40A,转速为2rpm,沉积温度400℃,沉积时间为30分钟,沉积PVD涂层厚度为2μm;沉积结束后,迅速关闭弧源电源,关闭脉冲偏压,停氮气,随炉冷却至50℃后取出样品。
实施例2
制备方法如下:
步骤1:首先对绳轮表面进行研磨并抛光至1000#~1200#,使用乙醇:丙酮=3:1~4:1的清洗剂经超声清洗后烘干;
步骤2:将处理好的绳轮与试样包覆入渗铬剂并放置渗铬罐中,然后用玻璃粉进行密封处理并将其放置电阻炉中;500℃预热1h后,加热到960℃保温15h,然后随炉冷却至200℃;出炉冷却至室温。
步骤3:将步骤2中所得的表面渗Cr的绳轮试样,放于丙酮溶液中进行5分钟超声清洗,然后采用去离子水清洗,然后利用无水乙醇脱水,并利用吹风机风干;将清洗之后的基体装入炉腔之中,将其放置于样品盘上,用浓度为99.99%的Ar离子在温度200℃,气压为0.2Pa,偏压为-1000V的条件下进行辉光清洗,接着在气压0.56Pa,偏压600V,占空比50%的情况下进行刻蚀清洗。停氩气,通氮气,氮气气压维持在1.0Pa,基体脉冲偏压为100V,铬靶弧流为60A,转速为3rpm,沉积温度300℃,沉积时间为70分钟,沉积PVD涂层厚度为4μm;沉积结束后,迅速关闭弧源电源,关闭脉冲偏压,停氮气,随炉冷却至50℃后取出样品。
实施例3
制备方法如下:
步骤1:首先对绳轮表面进行研磨并抛光至1000#~1200#,使用乙醇:丙酮=3:1~4:1的清洗剂经超声清洗后烘干;
步骤2:将处理好的绳轮与试样包覆入渗铬剂并放置渗铬罐中,然后用玻璃粉进行密封处理并将其放置电阻炉中;500℃预热1h后,加热到960℃保温15h,然后随炉冷却至200℃;出炉冷却至室温。
步骤3:将步骤2中所得的表面渗Cr的绳轮试样,放于丙酮溶液中进行5分钟超声清洗,然后采用去离子水清洗,然后利用无水乙醇脱水,并利用吹风机风干;将清洗之后的基体装入炉腔之中,将其放置于样品盘上,用浓度为99.99%的Ar离子在温度300℃,气压为0.1Pa,偏压为-1000V的条件下进行辉光清洗,接着在气压0.56Pa,偏压550V,占空比50%的情况下进行刻蚀清洗。停氩气,通氮气,氮气气压维持在2.0Pa,基体脉冲偏压为130V,铬靶弧流为80A,转速为4rpm,沉积温度450℃,沉积时间为110分钟,沉积PVD涂层厚度为6μm;沉积结束后,迅速关闭弧源电源,关闭脉冲偏压,停氮气,随炉冷却至50℃后取出样品。
实施例4
制备方法如下:
步骤1:首先对绳轮表面进行研磨并抛光至1000#~1200#,使用乙醇:丙酮=3:1~4:1的清洗剂经超声清洗后烘干;
步骤2:将处理好的绳轮与试样包覆入渗铬剂并放置渗铬罐中,然后用玻璃粉进行密封处理并将其放置电阻炉中;500℃预热1h后,加热到960℃保温15h,然后随炉冷却至200℃;出炉冷却至室温。
步骤3:将步骤2中所得的表面渗Cr的绳轮试样,放于丙酮溶液中进行5分钟超声清洗,然后采用去离子水清洗,然后利用无水乙醇脱水,并利用吹风机风干;将清洗之后的基体装入炉腔之中,将其放置于样品盘上,用浓度为99.99%的Ar离子在温度300℃,气压为0.15Pa,偏压为-1000V的条件下进行辉光清洗,接着在气压0.56Pa,偏压600V,占空比50%的情况下进行刻蚀清洗。停氩气,通氮气,氮气气压维持在2.5Pa,基体脉冲偏压为200V,铬靶弧流为100A,转速为5rpm,沉积温度450℃,沉积时间为150分钟,沉积PVD涂层厚度为8μm;沉积结束后,迅速关闭弧源电源,关闭脉冲偏压,停氮气,随炉冷却至50℃后取出样品。
实施例5
结构及性能分析:
图1为本发明设计的涂层结构示意图,从图中可以看出,该复合涂层由两种涂层组合,其中1为CrN高硬度低摩擦涂层;2为渗Cr高硬度、高结合力涂层。
图3为复合涂层的XRD图,从图中可以看出主要是由CrN相组成。
图4为复合涂层的EDS图,从图中可以看出该复合涂层表面Cr的成分占据了大多数。
图5为该复合涂层的纳米压痕图,其中可以得出在稳定磨损阶段其硬度在28GPa左右,具备高硬度的特性。
以上所述,仅为本发明较佳的具体实施方式,但本发明保护的范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内所做的任何修改,等同替换和改进等,均应包含在发明的保护范围之内。

Claims (5)

1.一种绳轮表面TD-Cr/PVD-CrN耐磨涂层,其特征在于,所述涂层依次由基体、渗Cr涂层和纳米CrN涂层组成,其中渗Cr涂层为高硬度耐磨层,CrN涂层为高硬度低摩擦涂层;所述基体为绳轮材料45钢;所述渗Cr涂层厚度为50-120μm;
所述耐磨涂层的制备方法,包括以下步骤:(1)将基体抛光至1000#~1200#,厚度消减不超过10μm,抛光后进行超声波清洗;
(2)在基体表面利用TD处理技术制备渗Cr涂层;
(3)将渗Cr涂层进行辉光清洗和刻蚀清洗;辉光清洗条件为:温度100-300℃,气压为0.05-0.2Pa,偏压为-1000V;所述CrN涂层的刻蚀清洗条件为:气压0.56Pa,偏压500-600V,占空比50%;
(4)在渗Cr涂层上沉积CrN涂层,经冷却后即得。
2.根据权利要求1所述的涂层,其特征在于:CrN涂层厚度为2-8μm。
3.根据权利要求1所述的涂层,其特征在于:所述渗Cr涂层和纳米CrN涂层主要由C、N、Cr、Fe组成,其中Cr的含量不低于60wt%,Fe的含量不低于20wt%。
4.根据权利要求1所述的涂层,其特征在于:所述制备方法步骤(2)中,TD处理的工艺参数为:500℃预热1h后,加热到960℃保温15h,然后随炉冷却至200℃。
5.根据权利要求1所述的涂层,其特征在于:所述制备方法步骤(4)中,PVD涂层的沉积条件为:N2气压为1.0-2.5Pa,基体脉冲偏压为70-200V,铬靶弧流为40-100A,转速为2-5rpm,沉积温度300-450℃,沉积时间为30-150分钟。
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000031821A (ko) * 1998-11-10 2000-06-05 이상율 크로마이징(chromizing)과 이온질화처리에 의한금속표면처리방법
CN103334106A (zh) * 2013-05-21 2013-10-02 中国船舶重工集团公司第七二五研究所 一种钛及钛合金球阀密封副和摩擦副的表面硬化处理方法
CN110055495A (zh) * 2019-05-31 2019-07-26 华南理工大学 一种CrFe+(Cr,Fe)N代铬镀层及其制备方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000031821A (ko) * 1998-11-10 2000-06-05 이상율 크로마이징(chromizing)과 이온질화처리에 의한금속표면처리방법
CN103334106A (zh) * 2013-05-21 2013-10-02 中国船舶重工集团公司第七二五研究所 一种钛及钛合金球阀密封副和摩擦副的表面硬化处理方法
CN110055495A (zh) * 2019-05-31 2019-07-26 华南理工大学 一种CrFe+(Cr,Fe)N代铬镀层及其制备方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
"Properties of tool steel after hybrid treatment connecting diffusion Chromizing with the PVD method";E. Kasprzycka et al.;《ARCHIVES OF METALLURGY AND MATERIALS》;20191231(第64期);第235-242页 *

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