WO2023004752A1 - 一种周期性多层结构涂层带锯条及其制备方法和应用 - Google Patents

一种周期性多层结构涂层带锯条及其制备方法和应用 Download PDF

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WO2023004752A1
WO2023004752A1 PCT/CN2021/109610 CN2021109610W WO2023004752A1 WO 2023004752 A1 WO2023004752 A1 WO 2023004752A1 CN 2021109610 W CN2021109610 W CN 2021109610W WO 2023004752 A1 WO2023004752 A1 WO 2023004752A1
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saw blade
band saw
alcrn
crn
layer
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PCT/CN2021/109610
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English (en)
French (fr)
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张权
刘国跃
贾寓真
欧阳志勇
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湖南泰嘉新材料科技股份有限公司
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Priority to PCT/CN2021/109610 priority Critical patent/WO2023004752A1/zh
Publication of WO2023004752A1 publication Critical patent/WO2023004752A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source

Definitions

  • the invention relates to the field of preparation of coating materials for sawing band saw blades, in particular to a periodic multilayer structure coated band saw blade and its preparation method and application.
  • the hard coating prepared by physical vapor deposition (PVD) acts as a chemical barrier and a thermal barrier, which can effectively avoid the element diffusion and chemical reaction between the cutting tool and the processed material during the cutting process.
  • PVD hard coating has high hardness.
  • the advantages of high wear resistance and low friction coefficient can significantly reduce the wear of cutting tools, improve service life and cutting efficiency. By choosing a suitable coating material, the wear of cutting tools can be effectively reduced, excellent machining accuracy and surface quality can be obtained, the service life of cutting tools can be extended and processing efficiency can be improved.
  • the technical problem to be solved by the present invention is to provide a periodic multi-layer structure coated band saw blade with excellent hardness, toughness, wear resistance and friction reduction and sawing life, and its preparation method and application
  • a periodic multilayer structure coated band saw blade characterized in that: it includes a band saw blade substrate, and a CrN bonding layer, a CrN/AlCrN functional layer and an AlCrN top layer deposited on the band saw blade substrate in sequence; the CrN/AlCrN functional layer It is obtained by alternating deposition of CrN layer and AlCrN layer.
  • the thickness of the CrN bonding layer is 0.2 ⁇ m-0.5 ⁇ m
  • the thickness of the CrN/AlCrN functional layer is 1.0 ⁇ m-3.5 ⁇ m
  • the thickness of the AlCrN top layer is 0.5 ⁇ m-2.0 ⁇ m.
  • the modulation period of the CrN/AlCrN functional layer is 5 nm to 50 nm, and the modulation ratio is 1:1 to 1:4.
  • the two adjacent CrN layers and the AlCrN layer in the CrN/AlCrN functional layer are an alternating unit, and the sum of the thicknesses of the adjacent CrN layer and the AlCrN layer in each alternating unit is the modulation period, and the adjacent CrN layer and the AlCrN layer The ratio of the thicknesses of the layers is the modulation ratio.
  • the atomic percentages of the elements in the AlCrN top layer and the AlCrN layer in the CrN/AlCrN functional layer are: Al: 15.0-30.0 at.%, Cr: 20.0-30.0 at. % and N: 40.0-60.0 at. % ;
  • the atomic percentages of each element in the CrN layer in the CrN bonding layer and the CrN/AlCrN functional layer are Cr: 45.0-55.0 at.% and N: 45.0-55.0 at.%.
  • the tooth material of the band saw blade base is high-speed steel or hard alloy
  • the saw blade body of the saw blade base is spring steel
  • the present invention also provides a method for preparing any of the above-mentioned band saw blades with a periodic multilayer structure coating, comprising the following steps:
  • the pretreatment specifically includes: the band saw blade substrate is first subjected to sandblasting and passivation treatment, and then passed through an ultrasonic cleaning machine equipped with a metal cleaning agent solution at a speed of 1 to 10 m/min, and finally blown dry with nitrogen gas.
  • the revolution speed of the turret is set at 0.1 ⁇ 10.0rpm; when the temperature reaches 350°C ⁇ 550°C and the vacuum degree reaches 1.0 ⁇ 9.0 ⁇ 10 -3 Pa , enter Ar gas, adjust the air pressure to 0.3Pa ⁇ 3.0Pa, start the ion source, the power is 0.5kW ⁇ 10.0kW, the bias voltage of the workpiece support is -100V ⁇ -1000V, etch the surface of the band saw blade substrate, and the etching time is 25min ⁇ 90min.
  • the deposition parameters of the CrN bonding layer are: feed N2 gas, adjust the air pressure to 0.5Pa to 5.0 Pa, set the bias voltage to -30V to -250V, start the Cr arc target, and the target current is 60A to 200A , the deposition time of CrN bonding layer is 5min ⁇ 20min;
  • the deposition parameters of the CrN/AlCrN functional layer are as follows: first feed N2 gas, adjust the air pressure to 0.5Pa-5.0Pa, set the bias voltage to -60V--250V, and start the Cr and AlCr arc targets at the same time, Cr target current is 60A ⁇ 200A, AlCr arc target target current is 60A ⁇ 200A, and the deposition time of CrN/AlCrN functional layer is 30min ⁇ 60min;
  • the deposition parameters of the AlCrN top layer are: feed N2 gas, adjust the air pressure to 0.5Pa-5.0Pa, set the bias voltage to -60V--250V, start the AlCr arc target, and the target current is 60A-200A, AlCrN top layer deposition time is 15min ⁇ 45min.
  • the post-processing specifically includes: unfolding the coated band saw blade, and passing it through a dry sandblasting machine at a speed of 1-10 m/min, sandblasting the blade body of the band saw blade, and after sandblasting, the strip The saw blade is rewound.
  • the preparation of PVD hard coating usually needs to be carried out at a temperature range of 300°C to 500°C.
  • the residual compressive stress on the surface of the saw blade body will be partially released or even eliminated by annealing, resulting in a significant decrease in the fatigue resistance of the saw blade body and adversely affecting the sawing performance of the coated band saw blade.
  • the sawing performance of the band saw blade not only requires the saw teeth to have excellent wear resistance and red hardness, but also requires the saw blade body to have strength, toughness and fatigue resistance. Therefore, the coated band saw blade can improve the fatigue resistance of the saw blade body by introducing residual compressive stress on the surface of the saw blade body through sandblasting post-treatment.
  • the present invention also provides the application of the periodic multilayer structure coated band saw blade and the periodic multilayer structure coated band saw blade prepared by the above preparation method, and the periodic multilayer structure coated band saw blade is used for Sawing of thick-walled pipes and thick-walled steel components.
  • the thick-walled pipe mainly includes any one of oil pipelines, steam pipes and boiler furnaces, etc.
  • the thick-walled steel members mainly include I-beams, angle steels, channel steels and other special-shaped steel members. any kind.
  • the band saw blade with periodic multilayer structure coating described in this application is composed of a band saw blade substrate, a CrN bonding layer deposited on the outer surface of the band saw blade substrate, a CrN/AlCrN functional layer and an AlCrN top layer.
  • the CrN bonding layer can enhance the bonding force of the film base and provide support for the multilayer structure; in the CrN/AlCrN functional layer, by modulating the periodic changes in composition and structure, it can not only interrupt the continuous growth of columnar crystals in a single AlCrN or CrN coating, Realize grain refinement and make the coating structure dense; combined with material microstructure design, according to specific sawing conditions, the modulation period and modulation ratio can be flexibly adjusted, so that coherent or semi-coherent epitaxial growth occurs between different modulation layers, which can Provides excellent hardness and toughness and long sawing life, suitable for sawing conditions of thick-walled pipes and thick-walled steel components; AlCrN top layer provides excellent toughness, high temperature oxidation resistance and red hardness.
  • the method for preparing band saw blade coating of the present invention is physical vapor deposition method, and the hard coating prepared by physical vapor deposition (PVD) is used as chemical barrier and thermal barrier, can effectively avoid the elements between cutting tool and processed material in cutting process. Diffusion and chemical reaction, at the same time, PVD hard coating has the advantages of high hardness, high wear resistance and low friction coefficient, which can significantly reduce the wear of cutting tools, improve service life and cutting efficiency.
  • PVD physical vapor deposition
  • the beneficial effects of the present invention are as follows: 1. It can simultaneously have hardness and toughness and a longer sawing life; Fatigue resistance of the saw blade body; 3.
  • the preparation process of the present invention is simple, the operability is strong, and the synergistic improvement of sawing processing quality, cost and efficiency can be realized.
  • Fig. 1 is a schematic structural diagram of a band saw blade with a periodic multilayer structure coating according to the present invention.
  • Fig. 2 is a diagram of the ball-on-disk friction coefficient at 800°C of the furnace-coated high-speed steel sample block prepared in Example 1 and Comparative Example 1, which is the same material as the saw tooth of the band saw blade.
  • Fig. 3 is a comparison chart of the sawing life of the uncoated band saw blade and the coated band saw blade prepared in Example 1 with the same tooth profile when cutting P91 seamless thick-walled steel pipes of different sizes and specifications.
  • the invention provides a band saw blade with periodic multi-layer structure coating and its preparation method and application.
  • Those skilled in the art can learn from the content of this article and appropriately improve the process parameters to realize it.
  • all similar substitutions and modifications are obvious to those skilled in the art, and they all belong to the protection scope of the present invention.
  • the method and application of the present invention have been described through preferred embodiments, and relevant personnel can obviously make changes or appropriate changes and combinations to the method and application herein without departing from the content, spirit and scope of the present invention to realize and apply the present invention Invent technology.
  • a periodic multi-layer structure coated band saw blade comprising a band saw blade substrate (saw tooth material is high-speed steel), and a CrN bonding layer, a CrN/AlCrN functional layer, and an AlCrN top layer deposited sequentially on the outer surface of the band saw blade substrate; CrN/AlCrN
  • the modulation ratio of the functional layer is 1:3, and the modulation period is 10nm; the atomic percentages of each element in the CrN layer in the CrN bonding layer and the CrN/AlCrN functional layer are: Cr: 49.5 at.%, N: 50.5 at.
  • the atomic percentages of the elements in the AlCrN top layer and the AlCrN layer in the CrN/AlCrN functional layer are: Al: 23.0 at.%, Cr: 22.0 at.%, N: 55.0 at.%.
  • the band saw blade substrate After the band saw blade substrate is subjected to sandblasting and passivation treatment, it passes through an ultrasonic cleaning machine equipped with a metal cleaning agent solution at a speed of 4m/min, then rinses with deionized water, blows dry with nitrogen, and then puts it into a vacuum chamber on the workpiece turret, and set the revolution rate of the workpiece turret to 3rpm; turn on the heater to raise the temperature of the cavity to 450°C, and evacuate the cavity to make the vacuum degree higher than 3.0 ⁇ 10 -3 Pa; Ar gas, adjust the air pressure inside the chamber to 3.0Pa, set the ion source power to 5.0kW, set the bias voltage of the workpiece turret to -600V, etch the surface of the metal substrate, and the etching time is 40min;
  • the thickness of the CrN bonding layer on the surface of the furnace high-speed steel sample block is 0.4 ⁇ m
  • the thickness of the CrN/AlCrN functional layer is 3.4 ⁇ m
  • the thickness of the AlCrN top layer is 1.0 ⁇ m.
  • a coated band saw blade comprising a band saw blade substrate (saw blade material is high-speed steel), and a CrN bonding layer and an AlCrN functional layer deposited on the outer surface of the band saw blade substrate in sequence; the atomic percentage of each element of the CrN bonding layer is: Cr : 49.5 at.%, N: 50.5 at. %; the atomic percentages of each element in the AlCrN functional layer are: Al: 23.0 at. %, Cr: 22.0 at. %, N: 55.0 at. %.
  • the band saw blade substrate After the band saw blade substrate is subjected to sandblasting and passivation treatment, it passes through an ultrasonic cleaning machine equipped with a metal cleaning agent solution at a speed of 4m/min, then rinses with deionized water, blows dry with nitrogen, and then puts it into a vacuum chamber on the workpiece turret, and set the revolution rate of the workpiece turret to 3rpm; turn on the heater to raise the temperature of the cavity to 450°C, and evacuate the cavity to make the vacuum degree higher than 3.0 ⁇ 10 -3 Pa; Ar gas, adjust the air pressure inside the chamber to 3.0Pa, set the ion source power to 5.0kW, set the bias voltage of the workpiece turret to -600V, etch the surface of the metal substrate, and the etching time is 40min;
  • the thickness of the CrN bonding layer on the surface of the furnace high-speed steel sample block is 0.4 ⁇ m
  • the thickness of the AlCrN functional layer is 4.1 ⁇ m.
  • Table 1 shows the coating thickness, nano-indentation hardness, elastic modulus and H/E * ratio of Example 1 and Comparative Example 1 on the furnace-mounted high-speed steel sample block.
  • Table 1 shows the coating thickness, nano-indentation hardness, elastic modulus and H/E * ratio of Example 1 and Comparative Example 1 on the furnace-mounted high-speed steel sample block.
  • Table 1 shows the coating thickness, nano-indentation hardness, elastic modulus and H/E * ratio of Example 1 and Comparative Example 1 on the furnace-mounted high-speed steel sample block.
  • Fig. 2 is the ball-on-disk friction coefficient of the furnace-coated high-speed steel sample block prepared in Example 1 and Comparative Example 1 at a temperature of 800°C, the material of which is the same as that of the band saw blade.
  • the specific test conditions include that the material of the grinding ball is Al 2 O 3 , the diameter is 6mm, the wear scar radius is 2mm, the load is 5N, and the sample rotation speed is 20cm/s. Thanks to the synergistic improvement of the mechanical properties and toughness of the coating, the friction coefficient of Example 1 is significantly lower than that of Comparative Example 1, showing excellent anti-friction performance.
  • Fig. 3 is a comparison chart of the sawing life of the uncoated band saw blade and the coated band saw blade prepared in Example 1 with the same tooth profile when cutting P91 seamless thick-walled steel pipes of different sizes and specifications.
  • the sawing life of the coated band saw blade prepared in Example 1 for sawing P91 material seamless thick-walled steel pipes of different sizes and specifications is improved by more than 40%, which shows that the present invention
  • the nano-multilayer structure can realize the improvement of the sawing life of the coated band saw blade.
  • a periodic multi-layer structure coated band saw blade comprising a band saw blade substrate (saw tooth material is high-speed steel), and a CrN bonding layer, a CrN/AlCrN functional layer, and an AlCrN top layer deposited sequentially on the outer surface of the band saw blade substrate; CrN/AlCrN
  • the modulation ratio of the functional layer is: 1:1, and the modulation period is 15nm
  • the atomic percentage of each element in the CrN layer in the CrN bonding layer and the CrN/AlCrN functional layer is: Cr:50.1at.%, N:49.9at.%
  • the atomic percentages of the elements in the AlCrN top layer and the AlCrN layer in the CrN/AlCrN functional layer are: Al: 25.0 at.%, Cr: 25.0 at.%, N: 50.0 at.%.
  • the band saw blade substrate After the band saw blade substrate is subjected to sandblasting and passivation treatment, it passes through an ultrasonic cleaning machine equipped with a metal cleaning agent solution at a speed of 3m/min, rinses with deionized water, blows dry with nitrogen, and then puts it into a vacuum chamber on the workpiece turret, and set the revolution rate of the turret to 2rpm; turn on the heater to raise the temperature of the cavity to 450°C, and evacuate the cavity to make the vacuum degree higher than 5.0 ⁇ 10- 3 Pa; introduce Ar into the ion source Gas, adjust the air pressure inside the chamber to 3.0Pa, set the ion source power to 6.0kW, set the bias voltage of the workpiece turret to -800V, etch the surface of the metal substrate, and the etching time is 30min;
  • the thickness of the CrN bonding layer on the surface of the furnace high-speed steel sample block is 0.5 ⁇ m
  • the thickness of the CrN/AlCrN functional layer is 2.0 ⁇ m
  • the thickness of the AlCrN top layer is 0.8 ⁇ m.
  • a multi-coated band saw blade comprising a band saw blade substrate (the sawtooth material is cemented carbide), and a CrN bonding layer, a CrN/AlCrN functional layer, and an AlCrN top layer deposited on the outer surface of the band saw blade substrate in sequence; the CrN/AlCrN functional layer
  • the modulation ratio is 1:2, and the modulation period is 9nm; the atomic percentages of each element in the CrN layer in the CrN bonding layer and the CrN/AlCrN functional layer are: Cr: 50.4 at.%, N: 49.6 at.
  • AlCrN top layer AlCrN top layer
  • atomic percentages of the elements in the AlCrN layer in the CrN/AlCrN functional layer are: Al: 22.1 at.%, Cr: 26.8 at.%, N: 51.1 at.%.
  • the band saw blade substrate After the band saw blade substrate is subjected to sandblasting and passivation treatment, it passes through an ultrasonic cleaning machine equipped with a metal cleaning agent solution at a speed of 3m/min, rinses with deionized water, blows dry with nitrogen, and then puts it into a vacuum chamber on the workpiece turret, and set the revolution rate of the turret to 3rpm; turn on the heater to raise the temperature of the cavity to 550°C, and evacuate the cavity to make the vacuum degree higher than 4.0 ⁇ 10 -3 Pa; introduce Ar into the ion source Gas, adjust the air pressure inside the chamber to 2.0Pa, set the ion source power to 6.0kW, set the bias voltage of the workpiece support to -800V, etch the surface of the metal substrate, and the etching time is 30min;
  • Preparation of CrN/AlCrN functional layer in S3 first install the band saw blade obtained in S2 on the turntable, keep the air pressure and bias voltage constant, start the Cr target and the AlCr target at the same time, the target current of the AlCr target is 120A, and the target current of the Cr target is 80A, deposition time 30min;
  • the thickness of the CrN bonding layer on the surface of the furnace high-speed steel sample block is 0.3 ⁇ m
  • the thickness of the CrN/AlCrN functional layer is 1.9 ⁇ m
  • the thickness of the AlCrN top layer is 1.1 ⁇ m.
  • a multi-coated band saw blade comprising a band saw blade substrate (the sawtooth material is cemented carbide), and a CrN bonding layer, a CrN/AlCrN functional layer, and an AlCrN top layer deposited on the outer surface of the band saw blade substrate in sequence; the CrN/AlCrN functional layer
  • the modulation ratio is: 1:2, and the modulation period is 16nm; the atomic percentages of each element in the CrN layer in the CrN bonding layer and the CrN/AlCrN functional layer are: Cr: 50.6 at.%, N: 49.4 at.
  • the atomic percentages of the elements in the top layer and the AlCrN layer in the CrN/AlCrN functional layer are: Al: 20.2 at.%, Cr: 28.8 at.%, N: 51.0 at.%.
  • the band saw blade substrate After the band saw blade substrate is subjected to sandblasting and passivation treatment, it passes through an ultrasonic cleaning machine equipped with a metal cleaning agent solution at a speed of 4m/min, then rinses with deionized water, blows dry with nitrogen, and then puts it into a vacuum chamber on the workpiece turret, and set the revolution rate of the turret to 1.5rpm; turn on the heater to raise the temperature of the cavity to 550°C, and evacuate the cavity to make the vacuum degree higher than 1.0 ⁇ 10 -3 Pa; Ar gas, adjust the air pressure inside the chamber to 2.0Pa, set the ion source power to 4.0kW, set the bias voltage of the workpiece turret to -1000V, etch the surface of the metal substrate, and the etching time is 30min;
  • the thickness of the CrN bonding layer on the surface of the furnace high-speed steel sample block is 0.4 ⁇ m
  • the thickness of the CrN/AlCrN functional layer is 2.9 ⁇ m
  • the thickness of the AlCrN top layer is 1.5 ⁇ m.

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Abstract

提供了一种周期性多层结构涂层带锯条及其制备方法，包括带锯条基体，及依次沉积在带锯条基体外表面的CrN结合层、CrN/AlCrN功能层和AlCrN顶层；CrN/AlCrN功能层由CrN层和AlCrN层交替沉积所得，带锯条基体表面的周期性多层结构涂层由电弧离子镀技术制备；还提供了周期性多层结构涂层带锯条的应用，主要用于石油管道、蒸汽管道与锅炉炉体等厚壁管以及厚壁钢构件的锯切。通过周期性多层结构设计使涂层带锯条表现出优异的力学性能与良好的韧性，并显著提升锯切寿命。

Description

一种周期性多层结构涂层带锯条及其制备方法和应用 技术领域
本发明涉及带锯条锯切用涂层材料制备领域，尤其涉及一种周期性多层结构涂层带锯条及其制备方法和应用。
背景技术
目前加快交通强国与构建现代能源体系的建设已经迫在眉睫，其中核电建设、深海深层和非常规油气资源开发、特高压输电与高速铁路等多个基建领域均涉及多种难加工材料的运用与高效切削。诸如石油管道、蒸汽管道与锅炉炉体等厚壁管以及厚壁钢构件的下料通常是这些基建项目面临的第一道工序，而锯切则是一种常用的下料方式。带锯条凭借自身切削效率高、节材节能以及成本可控等优势，在金属原材料下料领域中广泛使用。
在厚壁管以及厚壁钢构件材料的实际锯切下料过程中，一方面由于锯切宽度变化较大，带锯条在锯切过程中承受的切削力与冲击载荷会发生急剧变化，容易发生崩齿或者开裂失效；另一方面厚壁管与厚壁钢构件的应用工况对其本身材料综合性能要求较高，导致锯切加工难度提升，锯齿磨损过快。在这两方面因素的共同作用下，带锯条的锯切寿命显著下降。
物理气相沉积(PVD)制备的硬质涂层作为化学屏障和热屏障，可以有效避免切削过程中切削工具与被加工材料间的元素扩散和化学反应，同时PVD硬质涂层又具备高硬度，高耐磨性以及低摩擦系数等优点，从而显著减少切削工具的磨损，提升服役寿命和切削效率。通过选择合适的涂层材料，可以有效降低切削工具的磨损，获得优异的加工精度与表面质量，延长切削工具的服役寿命以及提高加工效率。
目前国内涂层带锯条仍处于空白领域，厚壁管与厚壁钢构件的锯切下料作为典型的断续切削工况，对带锯条锯齿的耐磨性以及抗冲击载荷性能提出了更高的要求。通过PVD硬质涂层材料成分与微结构的设计与研究，制备出兼具优异硬度与韧性的周期性多层结构涂层，提升带锯条的锯切寿命，有望实现带锯条锯切加工质量、成本与效率的协同改善。
发明内容
针对现有技术不足，本发明所要解决的技术问题是，提供一种兼具优异的硬度、韧性、耐磨减摩以及锯切寿命的周期性多层结构涂层带锯条及其制备方法和应用
为解决上述技术问题，本发明所采用的技术方案是：
一种周期性多层结构涂层带锯条，其特征在于：包括带锯条基体，及依次沉积在带锯条基体上的CrN结合层、CrN/AlCrN功能层和AlCrN顶层；所述CrN/AlCrN功能层由CrN层和AlCrN层交替沉积所得。
进一步地，所述CrN结合层的厚度为0.2μm～0.5μm，CrN/AlCrN功能层的厚度为1.0μm～3.5μm，AlCrN顶层的厚度为0.5μm～2.0μm。
进一步地，所述CrN/AlCrN功能层的调制周期为5nm～50nm，调制比为1:1～1:4。CrN/AlCrN功能层中相邻的两个CrN层与AlCrN层为一个交替单元，而每一个交替单元中相邻CrN层与AlCrN层的厚度之和即为调制周期，而相邻CrN层与AlCrN层的厚度之比即为调制比。
进一步地，所述AlCrN顶层和CrN/AlCrN功能层中的AlCrN层的各元素原子百分比为：Al:15.0～30.0at.％，Cr:20.0～30.0at.％以及N:40.0～60.0at.％；CrN结合层和CrN/AlCrN功能层中的CrN层的各元素原子百分比为Cr:45.0～55.0at.％以及N:45.0～55.0at.％。
进一步地，所述带锯条基体的锯齿材料为高速钢或硬质合金，锯条基体的锯条体材料为弹簧钢。
基于同一发明构思，本发明还提供了上述任一种周期性多层结构涂层带锯条的制备方法，包括以下步骤：
S1：将带锯条基体进行预处理；
S2：在S1预处理所得的带锯条基体表面上，通过电弧离子镀沉积得CrN结合层；
S3：在S2所得的CrN结合层上，通过电弧离子镀多靶交替沉积方式得CrN/AlCrN功能层；
S4：在S3所得的CrN/AlCrN功能层上，通过电弧离子镀沉积得AlCrN顶层；
S5：将S4所得的周期性多层结构涂层带锯条进行后处理。
进一步地，S1中，所述预处理具体为：带锯条基体先经过喷砂钝化处理后，再以1～10m/min的速度通过装有金属清洗剂溶液的超声波清洗机，最后氮气吹干后绕卷置于涂层设备真空室内的工件转架上，并设置转架的公转速率为0.1～10.0rpm；当温度达到350℃～550℃，真空度达到1.0～9.0×10 -3Pa时，通入Ar气，调节气压至0.3Pa～3.0Pa，启动离子源，功率为0.5kW～10.0kW，工件支架偏压-100V～-1000V，对带锯条基体表面进行刻蚀，刻蚀时间为25min～90min。
进一步地，S2中，CrN结合层的沉积参数为：通入N 2气，调节气压至0.5Pa～5.0 Pa，设置偏压为-30V～-250V，启动Cr电弧靶，靶电流为60A～200A，CrN结合层的沉积时间为5min～20min；
进一步地，S3中，CrN/AlCrN功能层的沉积参数为：先通入N 2气，调节气压至0.5Pa～5.0Pa，设置偏压为-60V～-250V，同时启动Cr与AlCr电弧靶，Cr靶电流为60A～200A，AlCr电弧靶的靶电流为60A～200A，CrN/AlCrN功能层的沉积时间为30min～60min；
进一步地，S4中，AlCrN顶层的沉积参数为：通入N 2气，调节气压至0.5Pa～5.0Pa，设置偏压为-60V～-250V，启动AlCr电弧靶，靶电流为60A～200A，AlCrN顶层沉积时间为15min～45min。
进一步地，S5中，所述后处理具体为：将涂层带锯条展开，并以1～10m/min的速度通过干喷砂机，对带锯条的锯条体进行喷砂，喷砂后将带锯条重新绕卷。
PVD硬质涂层的制备通常需要在300℃～500℃温度范围中进行。在高温真空环境中，锯条体表面的残余压应力受到退火作用将会被部分释放甚至消除，导致锯条体的抗疲劳性能显著下降，对涂层带锯条的锯切性能产生不利影响。带锯条的锯切性能不仅需要锯齿具备优异的耐磨性与红硬性，还要求锯条体具有强韧性与抗疲劳性。因此涂层带锯条通过喷砂后处理在锯条体表面引入残余压应力，能够提升锯条体的抗疲劳性。
基于同一发明构思，本发明还提供了上述周期性多层结构涂层带锯条和上述制备方法制备的周期性多层结构涂层带锯条应用，所述周期性多层结构涂层带锯条用于厚壁管和厚壁钢构件的锯切。
进一步地，所述厚壁管主要包括石油管道、蒸汽管道与锅炉炉体等中的任意一种，所述厚壁钢构件主要包括工字钢、角钢、槽钢以及其他异型钢构件等中的任意一种。
本申请所述的周期性多层结构涂层带锯条，由带锯条基体，和依次沉积在带锯条基体外表面的CrN结合层，CrN/AlCrN功能层以及AlCrN顶层组成。CrN结合层可增强膜基结合力并为多层结构提供支撑；CrN/AlCrN功能层中通过调制成分与结构的周期性变化，不仅能够打断单一AlCrN或CrN涂层中柱状晶的连续生长，实现晶粒细化，使涂层结构致密；结合材料微结构设计，根据具体锯切工况，灵活调控调制周期与调制比，使不同调制层之间发生共格或半共格外延生长，能提供优异的硬度与韧性以及较长的锯切寿命，适用于厚壁管以及厚壁钢构件的锯切工况；AlCrN顶层则提供优异的韧性、高温抗氧化性以及红硬性。
并且本发明制备带锯条涂层的方法为物理气相沉积法，物理气相沉积(PVD)制 备的硬质涂层作为化学屏障和热屏障，可以有效避免切削过程中切削工具与被加工材料间的元素扩散和化学反应，同时PVD硬质涂层又具备高硬度，高耐磨性以及低摩擦系数等优点，从而显著减少切削工具的磨损，提升服役寿命和切削效率。
与现有技术相比，本发明的有益效果为：一、能同时兼具硬度与韧性以及较长的锯切寿命；二、锯条涂层通过喷砂在锯条体表面引入残余压应力，能够提升锯条体的抗疲劳性；三、本发明制备工艺简单，可操作性强，可实现锯切加工质量、成本与效率的协同改善。
附图说明
为了更清楚地说明本发明具体实施方式或现有技术中的技术方案，下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图是本发明的一些实施方式，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本发明所述周期性多层结构涂层带锯条结构示意图。
图2为实施例1和对比例1所制备的与带锯条锯齿材料相同的随炉涂层高速钢试样块在800℃下的球盘摩擦系数图。
图3为无涂层带锯条与相同齿形规格的实施例1所制备的涂层带锯条锯切不同尺寸规格P91材质无缝厚壁钢管的锯切寿命对比图。
具体实施方式
本发明提供了一种周期性多层结构涂层带锯条及其制备方法和应用，本领域技术人员可以借鉴本文内容，适当改进工艺参数实现。特别需要指出的是，所有类似的替换和改动对本领域技术人员来说是显而易见的，它们都属于本发明保护的范围。本发明的方法及应用已经通过较佳实施例进行了描述，相关人员明显能在不脱离本发明内容、精神和范围内对本文的方法和应用进行改动或适当变更与组合，来实现和应用本发明技术。
下面将结合实施例对本发明的实施方案进行详细描述。
实施例1
一种周期性多层结构涂层带锯条，包括带锯条基体(锯齿材质为高速钢)、及依次沉积在带锯条基体外表面的CrN结合层、CrN/AlCrN功能层、AlCrN顶层；CrN/AlCrN功能层的调制比为1:3，调制周期为10nm；CrN结合层和CrN/AlCrN功能层中的CrN层的各元素原子百分比为：Cr:49.5at.％，N:50.5at.％；所述AlCrN顶层和CrN/AlCrN功能层中的AlCrN层的各元素原子百分比为：Al:23.0at.％，Cr:22.0at.％，N:55.0at.％。
S1预处理：带锯条基体先经过喷砂钝化处理后，再以4m/min的速度通过装有金属清洗剂溶液的超声波清洗机，再使用去离子水漂洗，氮气吹干后装入真空室内的工件转架上，并设置工件转架的公转速率为3rpm；打开加热器将腔体升温至450℃，对腔体抽真空使真空度高于3.0×10 -3Pa；向离子源通入Ar气，调节腔室内部气压为3.0Pa，设置离子源功率为5.0kW，设置工件转架偏压-600V，对金属基体表面进行刻蚀，刻蚀时间为40min；
S2制备CrN结合层：将偏压调至-80V，关闭Ar气，通入N 2气，启动Cr靶，调节气压至4.0Pa，电弧靶的靶电流为80A，沉积时间为5min；调节沉积偏压为-150V，保持气压与靶电流参数不变，继续沉积10min，得CrN结合层；
S3制备CrN/AlCrN功能层：保持气压与偏压不变，同时启动Cr靶与AlCr靶，AlCr靶的靶电流为180A，Cr靶的靶电流为80A，沉积时间30min；
S4制备AlCrN顶层：关闭Cr靶，保持气压与偏压不变，调节AlCr靶电流为150A，沉积AlCrN顶层15min；
S5后处理：沉积完成后待真空室温度降至150℃以下，向真空室充气并取出涂层带锯条，随后对涂层带锯条进行喷砂后处理。
其中随炉高速钢样品块表面CrN结合层厚度为0.4μm，CrN/AlCrN功能层厚度为3.4μm，AlCrN顶层厚度为1.0μm。
表1实施例1和对比例1的随炉高速钢样品块表面涂层的厚度、硬度、弹性模量以及H/E *比值
Figure PCTCN2021109610-appb-000001
对比例1
一种涂层带锯条，包括带锯条基体(锯齿材质为高速钢)、及依次沉积在带锯条基体外表面的CrN结合层与AlCrN功能层；所述CrN结合层的各元素原子百分比为：Cr:49.5at.％，N:50.5at.％；所述AlCrN功能层中的各元素原子百分比为：Al:23.0at.％，Cr:22.0at.％，N:55.0at.％。
S1预处理：带锯条基体先经过喷砂钝化处理后，再以4m/min的速度通过装有金 属清洗剂溶液的超声波清洗机，再使用去离子水漂洗，氮气吹干后装入真空室内的工件转架上，并设置工件转架的公转速率为3rpm；打开加热器将腔体升温至450℃，对腔体抽真空使真空度高于3.0×10 -3Pa；向离子源通入Ar气，调节腔室内部气压为3.0Pa，设置离子源功率为5.0kW，设置工件转架偏压-600V，对金属基体表面进行刻蚀，刻蚀时间为40min；
S2制备CrN结合层：将偏压调至-80V，关闭Ar气，通入N 2气，启动Cr靶，调节气压至4.0Pa，电弧靶的靶电流为80A，沉积时间为5min；调节沉积偏压为-150V，保持气压与靶电流参数不变，继续沉积10min，得CrN结合层；
S3制备AlCrN功能层：关闭Cr靶，保持气压与偏压不变，调节AlCr靶电流为150A，沉积AlCrN顶层60min；
S4后处理：沉积完成后待真空室温度降至150℃以下，向真空室充气并取出涂层带锯条，随后对涂层带锯条进行喷砂后处理。
其中随炉高速钢样品块表面CrN结合层厚度为0.4μm，AlCrN功能层厚度为4.1μm。
表1为随炉高速钢试样块上实施例1和对比例1的涂层厚度、纳米压痕硬度、弹性模量以及H/E *比值。由表1可知，在涂层厚度相近的情况下，实施例1的硬度及H/E *比值相对于对比例1具有显著提升，这说明本发明所述的周期性多层结构能够使氮化物涂层实现兼具优异的硬度与韧性。
图2为实施例1和对比例1所制备的与带锯条锯齿材料相同的随炉涂层高速钢试样块在800℃温度下的球盘摩擦系数，具体测试条件包括对磨球材质为Al 2O 3，直径为6mm，磨痕半径为2mm，载荷为5N，样品旋转速率20cm/s。得益于涂层力学性能与韧性的协同改善，实施例1的摩擦系数较对比例1显著降低，表现出优异的减摩性能。
图3为无涂层带锯条与相同齿形规格的实施例1所制备的涂层带锯条锯切不同尺寸规格P91材质无缝厚壁钢管的锯切寿命对比图。由图可知，与未涂层的带锯条相比，实施例1制备的涂层带锯条锯切不同尺寸规格的P91材质无缝厚壁钢管的锯切寿命均提升40％以上，说明本发明所述纳米多层结构能够实现涂层带锯条锯切寿命的提升。
实施例2
一种周期性多层结构涂层带锯条，包括带锯条基体(锯齿材质为高速钢)、及依次沉积在带锯条基体外表面的CrN结合层、CrN/AlCrN功能层、AlCrN顶层；CrN/AlCrN功能层的调制比为：1:1，调制周期为15nm；CrN结合层和CrN/AlCrN功能层中的CrN层的各元素原子百分比为：Cr:50.1at.％，N:49.9at.％；所述AlCrN顶层和CrN/AlCrN 功能层中的AlCrN层的各元素原子百分比为：Al:25.0at.％，Cr:25.0at.％，N:50.0at.％。
S1预处理：带锯条基体先经过喷砂钝化处理后，再以3m/min的速度通过装有金属清洗剂溶液的超声波清洗机，再使用去离子水漂洗，氮气吹干后装入真空室内的工件转架上，并设置转架的公转速率为2rpm；打开加热器将腔体升温至450℃，对腔体抽真空使真空度高于5.0×10- 3Pa；向离子源通入Ar气，调节腔室内部气压为3.0Pa，设置离子源功率为6.0kW，设置工件转架偏压-800V，对金属基体表面进行刻蚀，刻蚀时间为30min；
S2制备CrN结合层：将偏压调至-100V，关闭Ar气，通入N 2气，启动Cr靶，调节气压至3.0Pa，电弧靶的靶电流为100A,沉积时间为7min；
S3制备CrN/AlCrN功能层：保持气压与偏压不变，同时启动Cr靶与AlCr靶，AlCr靶的靶电流为140A，Cr靶的靶电流为100A，沉积时间为30min；
S4制备AlCrN顶层：关闭Cr靶，保持气压与偏压不变，调节AlCr靶电流为120A，沉积时间为20min；
S5后处理：沉积完成后待真空室温度降至150℃以下，向真空室充气并取出涂层带锯条，随后对涂层带锯条进行喷砂后处理。
其中随炉高速钢样品块表面CrN结合层厚度为0.5μm，CrN/AlCrN功能层厚度为2.0μm，AlCrN顶层厚度为0.8μm。
实施例3
一种多涂层带锯条，包括带锯条基体(锯齿材质为硬质合金)、及依次沉积在带锯条基体外表面的CrN结合层、CrN/AlCrN功能层、AlCrN顶层；CrN/AlCrN功能层的调制比为1:2，调制周期为9nm；CrN结合层和CrN/AlCrN功能层中的CrN层的各元素原子百分比为：Cr:50.4at.％，N:49.6at.％；所述AlCrN顶层和CrN/AlCrN功能层中的AlCrN层的各元素原子百分比为：Al:22.1at.％，Cr:26.8at.％，N:51.1at.％。
S1预处理：带锯条基体先经过喷砂钝化处理后，再以3m/min的速度通过装有金属清洗剂溶液的超声波清洗机，再使用去离子水漂洗，氮气吹干后装入真空室内的工件转架上，并设置转架的公转速率为3rpm；打开加热器将腔体升温至550℃，对腔体抽真空使真空度高于4.0×10 -3Pa；向离子源通入Ar气，调节腔室内部气压为2.0Pa，设置离子源功率为6.0kW，设置工件支架偏压-800V，对金属基体表面进行刻蚀，刻蚀时间为30min；
S2制备CrN结合层：将偏压调至-100V，关闭Ar气，通入N 2气，启动Cr靶， 调节气压至3.0Pa，电弧靶的靶电流为80A，沉积时间为10min；
S3制备CrN/AlCrN功能层：先将S2所得带锯条安装在转架上，保持气压与偏压不变，同时启动Cr靶与AlCr靶，AlCr靶的靶电流为120A，Cr靶的靶电流为80A，沉积时间30min；
S4制备AlCrN顶层：关闭Cr靶，保持气压与偏压不变，调节AlCr靶电流为120A，沉积时间为30min；
S5后处理：沉积完成后待真空室温度降至150℃以下，向真空室充气并取出涂层带锯条，随后对涂层带锯条进行喷砂后处理。
其中随炉高速钢样品块表面CrN结合层厚度为0.3μm，CrN/AlCrN功能层厚度为1.9μm，AlCrN顶层厚度为1.1μm。
实施例4
一种多涂层带锯条，包括带锯条基体(锯齿材质为硬质合金)、及依次沉积在带锯条基体外表面的CrN结合层、CrN/AlCrN功能层、AlCrN顶层；CrN/AlCrN功能层的调制比为：1:2，调制周期为16nm；CrN结合层和CrN/AlCrN功能层中的CrN层的各元素原子百分比为：Cr:50.6at.％，N:49.4at.％；所述AlCrN顶层和CrN/AlCrN功能层中的AlCrN层的各元素原子百分比为：Al:20.2at.％，Cr:28.8at.％，N:51.0at.％。
S1预处理：带锯条基体先经过喷砂钝化处理后，再以4m/min的速度通过装有金属清洗剂溶液的超声波清洗机，再使用去离子水漂洗，氮气吹干后装入真空室内的工件转架上，并设置转架的公转速率为1.5rpm；打开加热器将腔体升温至550℃，对腔体抽真空使真空度高于1.0×10 -3Pa；向离子源通入Ar气，调节腔室内部气压为2.0Pa，设置离子源功率为4.0kW，设置工件转架偏压-1000V，对金属基体表面进行刻蚀，刻蚀时间为30min；
S2制备CrN结合层：将偏压调至-100V，关闭Ar气，通入N 2气，启动Cr靶，调节气压至2.0Pa，电弧靶的靶电流为80A,沉积时间为10min；
S3制备CrN/AlCrN功能层：保持气压与偏压不变，同时启动Cr靶与AlCr靶，AlCr靶的靶电流为130A，Cr靶的靶电流为90A，沉积时间35min；
S4制备AlCrN顶层：关闭Cr靶，保持气压与偏压不变，调节AlCr靶电流为150A，沉积时间为20min；
S5后处理：沉积完成后待真空室温度降至150℃以下，向真空室充气并取出涂层带锯条，随后对涂层带锯条进行喷砂后处理。
其中随炉高速钢样品块表面CrN结合层厚度为0.4μm，CrN/AlCrN功能层厚度为2.9μm，AlCrN顶层厚度为1.5μm。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (10)

  1. 一种周期性多层结构涂层带锯条，其特征在于：包括带锯条基体，及依次沉积在带锯条基体外表面CrN结合层、CrN/AlCrN功能层和AlCrN顶层；所述CrN/AlCrN功能层由CrN层和AlCrN层交替沉积所得。
  2. 根据权利要求1所述的周期性多层结构涂层带锯条，其特征在于，所述CrN结合层的厚度为0.2μm～0.5μm，CrN/AlCrN功能层的厚度为1.0μm～3.5μm，AlCrN顶层的厚度为0.5μm～2.0μm。
  3. 根据权利要求1所述的周期性多层结构涂层带锯条，其特征在于，所述CrN/AlCrN功能层的调制周期为5nm～50nm，调制比为1:1～1:4。
  4. 根据权利要求1所述的周期性多层结构涂层带锯条，其特征在于，所述AlCrN顶层和CrN/AlCrN功能层中的AlCrN层的各元素原子百分比为：Al:15.0～30.0at.％，Cr:20.0～30.0at.％以及N:40.0～60.0at.％；CrN结合层和CrN/AlCrN功能层中的CrN层的各元素原子百分比为Cr:45.0～55.0at.％以及N:45.0～55.0at.％。
  5. 根据权利要求1所述的周期性多层结构涂层带锯条，其特征在于，所述带锯条基体的锯齿材料为高速钢或硬质合金，锯条体基体的锯条体材料为弹簧钢。
  6. 根据权利要求1-5任一项所述周期性多层结构涂层带锯条的制备方法，其特征在于，包括以下步骤：
    S1：将带锯条基体进行预处理；
    S2：在S1预处理所得的带锯条基体表面上，通过电弧离子镀沉积得CrN结合层；
    S3：在S2所得的CrN结合层上，通过电弧离子镀多靶交替沉积方式得CrN/AlCrN功能层；
    S4：在S3所得的CrN/AlCrN功能层上，通过电弧离子镀沉积得AlCrN顶层；
    S5：将S4所得的周期性多层结构涂层带锯条进行后处理。
  7. 根据权利要求6所述的制备方法，其特征在于，S1中，所述预处理具体为：带锯条基体先经过喷砂钝化处理后，再以1～10m/min的速度通过装有金属清洗剂溶液的超声波清洗机，最后氮气吹干后绕卷置于涂层设备真空室内的工件转架上，并设置转架的公转速率为0.1～10.0rpm；当温度达到350℃～550℃，真空度达到1.0～9.0×10 -3Pa时，通入Ar气，调节气压至0.3Pa～3.0Pa，启动离子源，功率为0.5kW～10.0kW，工件支架偏压-100V～-1000V，对带锯条基体表面进行刻蚀，刻蚀时间为25min～90min。
  8. 根据权利要求6所述的制备方法，其特征在于：
    S2中，CrN结合层的沉积参数为：通入N 2气，调节气压至0.5Pa～5.0Pa，设置偏压为-30V～-250V，启动Cr电弧靶，靶电流为60A～200A，CrN结合层的沉积时间为5min～20min；
    S3中，CrN/AlCrN功能层的沉积参数为：通入N 2气，调节气压至0.5Pa～5.0Pa，设置偏压为-60V～-250V，同时启动Cr与AlCr电弧靶，Cr靶电流为60A～200A，AlCr电弧靶的靶电流为60A～200A，CrN/AlCrN功能层的沉积时间为30min～60min；
    S4中，AlCrN顶层的沉积参数为：通入N 2气，调节气压至0.5Pa～5.0Pa，设置偏压为-60V～-250V，启动AlCr电弧靶，靶电流为60A～200A，AlCrN顶层沉积时间为15min～45min。
  9. 根据权利要求6所述的制备方法，其特征在于：S5中，所述后处理具体为：将涂层带锯条展开，并以1～10m/min的速度通过干喷砂机，对带锯条的锯条体进行喷砂，喷砂后将带锯条重新绕卷。
  10. 如权利要求1-5任一项所述的周期性多层结构涂层带锯条或权利要求5-9任一项所述的制备方法制备而成的周期性多层结构涂层带锯条的应用，其特征在于，所述周期性多层结构涂层带锯条用于厚壁管和厚壁钢构件的锯切。
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