CN113428593A - Article transport facility and article transport vehicle - Google Patents
Article transport facility and article transport vehicle Download PDFInfo
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- CN113428593A CN113428593A CN202110748991.1A CN202110748991A CN113428593A CN 113428593 A CN113428593 A CN 113428593A CN 202110748991 A CN202110748991 A CN 202110748991A CN 113428593 A CN113428593 A CN 113428593A
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- article transport
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
Abstract
In the present invention, an article transport vehicle (2) is provided with a support part (26) for supporting an article (W), a drive part for moving the support part (26) in a width direction (Y), a front detection part (S), and a control part, wherein the drive part moves the support part (26) to a protruding position and a retreating position, the protruding position is a position protruding from the article transport vehicle (2) in the width direction, the retreating position is a position retreating toward the article transport vehicle (2) side from the protruding position, and when the control unit detects the target vehicle (2B) existing in the first detection area (E1) by the front detection unit (S), the vehicle (2A) is caused to travel at a second set speed lower than the first set speed, when the front detection unit (S) detects that the target support unit (26B) is present in the second detection region (E2), the vehicle (2A) is stopped.
Description
Technical Field
The present invention relates to an article transport vehicle that transports an article while traveling along a track, and an article transport facility provided with the article transport vehicle.
Background
Jp 2009-35403 a (patent document 1) discloses an example of an article transport facility in which a plurality of article transport vehicles are made to travel along a rail to transport articles between a plurality of transfer target locations. The article transport facility automatically transports articles (520) by an article transport vehicle (200) suspended on a rail (100) provided on a ceiling (the reference numerals shown in parentheses in the background art are those in patent document 1). The article transport vehicle (200) is provided with a support part (230) for hanging an article (520). The article transport vehicle (200) can not only transfer an article (520) by lifting and lowering the support part (230) in a state where the support part (230) is positioned directly below the rail (100) as shown in fig. 2 of patent document 1, but also transfer an article (520) by lifting and lowering the support part (230) in a state where the support part (230) is positioned at a position moved in the width direction orthogonal to the extending direction of the rail (100) as shown in fig. 3 of patent document 1.
However, in the article transport facility, the rails often have parallel portions, but for the purpose of improving space utilization efficiency and the like, the intervals between the parallel rails may be set to be narrow to such an extent that the article transport vehicles traveling on the parallel rails can be shifted without coming into contact with each other. In this way, when the interval between the parallel tracks is narrow, if another article transport vehicle travels on the other track in a state where one article transport vehicle positioned on one track has the support portion projecting in the width direction, the support portion may come into contact with the other article transport vehicle.
Disclosure of Invention
In view of the above background, it is desirable to provide an article transport vehicle capable of suppressing contact with another article transport vehicle, and an article transport facility including the article transport vehicle.
In view of the above, an article transport facility is characterized in that a plurality of article transport vehicles are made to travel along a track to transport an article, and a direction orthogonal to an extending direction of the track when viewed from the top-bottom direction is defined as a width direction, the article transport vehicle comprising: a support portion that supports an article; a driving unit that moves the support unit in the width direction; a front detection unit; and a control unit that moves the support unit to a protruding position protruding from the article transport vehicle in the width direction and a retracted position retracted from the protruding position toward the article transport vehicle, the control unit setting the track on which the vehicle travels as one of the plurality of article transport vehicles as a traveling track, the track parallel to the traveling track as a target track, the track on which the vehicle travels along the traveling track as a traveling track, the other article transport vehicle traveling on the target track as a target vehicle, the support unit of the target vehicle as a target support unit, the front detection unit detecting the target vehicle located in a first detection area and the target support unit located in a second detection area, the first detection region is set on the front side with respect to the host vehicle and is set on the outer side in the width direction with respect to the travel locus, the second detection region is set on the front side with respect to the host vehicle and is set within the travel locus, and the control unit executes first control, second control, and third control, the first control being: the second control is a control of, when the front detection unit does not detect the target vehicle in the first detection area and does not detect the target support unit in the second detection area, causing the host vehicle to travel at a first set speed: the vehicle is caused to travel at a second set speed lower than the first set speed when the front detection unit detects the target vehicle existing in the first detection area, and the third control is control for stopping the vehicle when the front detection unit detects the target support unit existing in the second detection area.
According to this configuration, when the target support portion of the target vehicle traveling on the target track enters the traveling locus on the front side of the host vehicle, the entering support target portion enters the second detection region, and therefore the support target portion can be detected by the front detection portion. Further, when the front detection unit detects the target support unit existing in the second detection region, the control unit executes the third control to stop the vehicle, so that the vehicle can be prevented from contacting the target support unit. Further, when the target vehicle traveling on the target track is present on the front side of the host vehicle, the target vehicle enters the first detection area, and therefore the target vehicle can be detected by the front detection unit. When the front detection unit detects the target vehicle existing in the first detection area, the control unit executes a second control for causing the vehicle to travel at a second set speed lower than the first set speed. Therefore, in the case where the target vehicle protrudes the target support portion toward the protruding position and the target support portion enters the travel locus on the front side of the vehicle, the braking distance can be shortened when the vehicle is stopped by executing the third control, and therefore, it is easy to prevent the vehicle from coming into contact with the target support portion. In this way, according to the present configuration, it is possible to provide an article transport facility capable of suppressing contact between an article transport vehicle and another article transport vehicle.
In view of the above, the article transport vehicle is characterized by comprising: a traveling section that travels along a rail; a support portion that supports an article; a storage section that stores an article; a driving unit that moves the support unit in the width direction; and a front detection unit that takes the track on which the vehicle is traveling as an in-travel track, takes a track along which the vehicle travels as a travel track, and takes a direction orthogonal to an extending direction of the track as a width direction when viewed from the top-bottom direction, wherein the drive unit moves the support unit to a protruding position protruding from the storage unit in the width direction and a retracted position retracted from the protruding position to the storage unit side, and the front detection unit includes: a first sensor that detects a first object vehicle as another article transport vehicle in a first detection area and the support portion of the first object vehicle in a second detection area; and a second sensor that detects a second object vehicle as another article transport vehicle of a third detection area, the first detection area being set on a front side with respect to the vehicle and on an outer side in the width direction with respect to the travel locus, the second detection area being set on the front side with respect to the vehicle and within the travel locus, the third detection area being set on a different area from the second detection area in an up-down direction and being set on the front side with respect to the vehicle and within the travel locus.
According to this configuration, when the target support portion of the target vehicle traveling on the target trajectory enters the traveling trajectory on the front side of the host vehicle, the entering support target portion enters the second detection region, and therefore the support target portion can be detected by the first sensor. Therefore, when the first sensor detects the target support portion existing in the second detection region, it is possible to perform a measure such as stopping the vehicle and preventing the vehicle from coming into contact with the target support portion. Further, in a case where the first target vehicle traveling on the target track exists on the front side of the own vehicle, the target vehicle enters the first detection area, and therefore the target vehicle can be detected by the first sensor. Therefore, the following can be handled: when the first sensor detects the target vehicle present in the first detection area, the vehicle can be decelerated in advance, and when the target support portion enters the travel trajectory, the vehicle can be stopped promptly. Further, when a preceding vehicle traveling on the traveling track is present on the front side of the host vehicle, the preceding vehicle enters the third detection area, and therefore the preceding vehicle can be detected by the second sensor. When the second sensor detects the second target vehicle existing in the third detection area, it is possible to take measures such as stopping the vehicle and preventing the vehicle from coming into contact with the second target vehicle. Further, since the functions of the front detection unit can be assigned to the first sensor and the second sensor, the functions of the sensors can be simplified or the detection accuracy of the sensors can be improved, for example, as compared with a case where the first detection region, the second detection region, and the third detection region are detected by one sensor. As described above, according to the present configuration, it is possible to provide an article transport vehicle capable of suppressing contact with another article transport vehicle with a relatively simple configuration.
Drawings
Fig. 1 is a plan view of an article transport apparatus.
Fig. 2 is a front view of the article transport vehicle.
Fig. 3 is a rear view of the article transport vehicle.
Fig. 4 is a side view of the article transport vehicle.
Fig. 5 is a control block diagram.
Fig. 6 is a plan view showing the detection area of the first sensor.
Fig. 7 is a plan view showing the detection area of the second sensor.
Fig. 8 is a plan view showing the detection area of the second sensor.
Fig. 9 is a plan view showing a state where the preceding vehicle is present in the third detection area and the fourth detection area.
Fig. 10 is a plan view showing a state where the target vehicle is present in the first detection area.
Fig. 11 is a plan view showing a state where the object support portion is present in the second detection region.
Fig. 12 is a flowchart.
Fig. 13 is a plan view showing a detection area of a first sensor according to another embodiment.
Detailed Description
1. Detailed description of the preferred embodiments
Embodiments of the article transport apparatus are explained based on the drawings. As shown in fig. 1, the article transport apparatus moves a plurality of article transport vehicles 2 along a track 1 and transports an article W. The article transport facility includes a transfer target location P for supporting the article W at a position corresponding to the processing device, and the article transport vehicle 2 transports the article W to the transfer target location P and transports the article W from the transfer target location P. In the present embodiment, the article transport vehicle 2 transports a reticle pod accommodating a reticle (photomask) as an article W.
The article transport vehicle 2 travels in the track 1 in a predetermined direction. In fig. 1, the direction of travel of the article transport vehicle 2 is indicated by an arrow. In order to facilitate understanding of the traveling direction of the article transport vehicle 2, the article transport vehicle 2 is indicated by a triangular symbol. The rail 1 includes a linear portion 4 linearly provided when viewed in the vertical direction Z and a curved portion 5 having a curved shape when viewed in the vertical direction Z. As shown in fig. 2 and 3, the rail 1 is composed of a pair of right and left rail portions 3. Hereinafter, a direction along the track 1 will be referred to as an extending direction X, and a direction perpendicular to the extending direction X when viewed from the vertical direction Z will be referred to as a width direction Y.
As shown in fig. 1, the rail 1 has a parallel section G in which the plurality of straight portions 4 are arranged in parallel at first set intervals or less and at second set intervals or more in the width direction Y. In the parallel section G, the straight portions 4 arranged in the width direction Y are provided in parallel at the same height. The first setting interval is set to the following interval: when the support portion 26 (target support portion 26B) is projected to the projecting position by the article transport vehicle 2 (target vehicle 2B) traveling in one linear portion 4 (target track 1B) of the pair of linear portions 4 adjacent in the width direction Y, the support portion 26 enters the trajectory (traveling trajectory T) of the article transport vehicle 2 (host vehicle 2A) traveling in the other linear portion 4. Further, the second setting interval is set to the following interval: the trajectory of the article transport vehicle 2 traveling in one linear portion 4 does not overlap the trajectory of the article transport vehicle 2 traveling in the other linear portion 4.
Next, the article transport vehicle 2 will be explained. In the description of the article transport vehicle 2, the direction in which the article transport vehicle 2 travels will be referred to as the front side, and the side opposite to the front side will be referred to as the rear side. Incidentally, for example, in the case where the article transport vehicle 2 travels in the linear portion 4 of the track 1, the front-rear direction of the article transport vehicle 2 and the extending direction X of the track 1 are the same direction, and the left-right direction of the article transport vehicle 2 and the width direction Y of the track 1 are the same direction.
As shown in fig. 2 to 4, the article transport vehicle 2 includes: a traveling unit 6 that travels along the rail 1 suspended and supported from the ceiling on the rail 1; and a main body 7 which is positioned below the rail 1, is suspended from the traveling unit 6, and is supported thereby. Fig. 2 is a front view of the article transport vehicle 2 as viewed from the front to the rear in the extending direction X, and fig. 3 is a rear view of the article transport vehicle 2 as viewed from the rear to the front in the extending direction X. Fig. 4 is a side view of the article transport vehicle 2 as viewed in the width direction Y.
As shown in fig. 4, the traveling unit 6 includes an electric motor 9 for traveling and a pair of left and right traveling wheels 10 that are rotationally driven by the motor 9 for traveling. The pair of left and right traveling wheels 10 rotate on the upper surface of the track 1 (the pair of left and right track portions 3). As shown in fig. 2 and 3, the traveling unit 6 includes a pair of left and right guide wheels 11 that are rotatable about vertical axes extending in the vertical direction Z. The pair of left and right guide wheels 11 are positioned between the pair of left and right rail portions 3 and rotate on the side surfaces of the pair of left and right rail portions 3 that face each other. The guide wheels 11 are guided by the pair of rail portions 3, and the position of the traveling portion 6 in the width direction Y is regulated, and the traveling wheels 10 are rotationally driven by the traveling motor 9, and the traveling portion 6 travels along the rail 1.
As shown in fig. 2 to 4, the main body 7 includes: a support mechanism 13 for supporting the article W; a lifting operation mechanism 14 for supporting the support mechanism 13 and lifting and lowering the support mechanism 13; a slide operation mechanism 15 that moves the lift operation mechanism 14 to a retracted position (see fig. 2) directly below the traveling unit 6 and to a protruding position (see fig. 3) that moves in the left-right direction from the retracted position; and a cover 16 that covers the upper side and the front-rear direction X of the article W supported by the support mechanism 13 in a state where the support mechanism 13 is positioned at the raised height and the lift operation mechanism 14 is positioned at the retracted position.
As shown in fig. 3, the support mechanism 13 includes: a lifting body 18 connected to a distal end portion of the conveyor belt 21; a support claw 19 which can freely change the posture between the posture of holding the article W and the posture of releasing the holding of the article W; and a support motor 20 (see fig. 5) for changing the posture of the support claw 19. The elevation operation mechanism 14 includes a winding body 22 around which the conveyor belt 21 is wound, and an elevation motor 23 for rotationally driving the winding body 22. The elevation operation mechanism 14 rotates the winding body 22 by driving of the elevation motor 23, and elevates the support mechanism 13 to an elevated height and a lowered height lower than the elevated height. The slide operation mechanism 15 includes: a slider 24 that supports the lift operation mechanism 14 and is movable in the width direction Y; and a slide motor 25 (see fig. 5) for moving the slide body 24 in the width direction Y with respect to the traveling section 6. The slide operation mechanism 15 moves the slide body 24 in the width direction Y by driving the slide motor 25, and moves the slide body 24, the lift operation mechanism 14, and the support mechanism 13 to a protruding position (see fig. 3) protruding in the width direction Y from the cover 16 of the article transport vehicle 2, and a retracted position (see fig. 2) retracted to the cover 16 side of the article transport vehicle 2 from the protruding position. When the article transport vehicle 2 travels, the support mechanism 13 is located at the raised height and at the retracted position.
When the article transport vehicle 2 is transported to the transfer target location P located directly below the track 1, the support mechanism 13 is lowered from the raised height by the lift operation mechanism 14 in a state where the travel unit 6 is caused to travel to the set position corresponding to the transfer target location P, the article W is unloaded to the transfer target location P, and thereafter the holding of the article W by the support mechanism 13 is released. In addition to being provided directly below the rail 1, the transfer target location P may be set at a position displaced in the width direction Y of the rail 1 with respect to the rail 1 when viewed in the vertical direction Z, as shown in fig. 1. When the article transport vehicle 2 is transported to the transfer target location P at a position offset in the width direction Y with respect to the right below the track 1 in this manner, in a state where the travel unit 6 is caused to travel to the set position corresponding to the transfer target location P, as shown in fig. 3, the elevation operation mechanism 14 is caused to protrude to the protruding position by the slide operation mechanism 15, then the support mechanism 13 is caused to descend from the raised height by the elevation operation mechanism 14 to unload the article W to the transfer target location P, and then the holding of the article W by the support mechanism 13 is released. The slider 24, the lift operation mechanism 14, and the support mechanism 13 correspond to a support portion 26 for supporting the article W, and the cover 16 corresponds to a storage portion for storing the article W. The slide motor 25 corresponds to a driving unit that moves the support unit 26 in the width direction Y.
The article transport vehicle 2 includes a front detection unit S, a reflector M, and a control unit H. Next, the front detection unit S, the reflector M, and the control unit H will be explained. As shown in fig. 10 and 11, a track 1 on which the vehicle 2A, which is one of the article transport vehicles 2, travels is defined as a traveling track 1A, and a track 1 arranged in the width direction Y with respect to the traveling track 1A is defined as a target track 1B. The other article transport vehicle 2 traveling on the target track 1B will be described as a target vehicle 2B (first target vehicle), and the support 26 of the target vehicle 2B will be described as a target support 26B. As shown in fig. 9, the other article transport vehicle 2 existing on the front side of the own vehicle 2A on the traveling track 1A is set as a preceding vehicle 2C (second target vehicle). Further, a trajectory along which the host-vehicle 2A travels along the in-travel track 1A is taken as a travel trajectory T.
As shown in fig. 2 to 4, the article transport vehicle 2 includes a first reflector M1 and a second reflector M2 as reflectors M. The first reflectors M1 are attached to the front surface portion and the rear surface portion of the article transport vehicle 2 facing forward and rearward, and the front surface portion and the rear surface portion of the support portion 26 facing forward and rearward, respectively. To explain this, the first sensor S1 is attached to the front surface portion of the cover 16, and the first reflector M1 is attached to the front and rear surface portions of the cover 16 and the front and rear surface portions of the slider 24. The second reflector M2 is attached to the rear surface portion of the article transport vehicle 2 facing rearward. To explain further, the second sensor S2 is mounted on the front surface of the cover 16 above the first sensor S1. The second reflecting body M2 is fitted in the rear surface portion of the hood 16 at a position above the first reflecting body M1. In this way, the article transport vehicle 2 includes the first reflector M1 on the front surface portion and the rear surface portion of the article transport vehicle 2 facing forward and rearward, and on the front surface portion and the rear surface portion of the support portion 26 facing forward and rearward, respectively.
The front detection unit S includes: a first sensor S1 that detects the object vehicle 2B in the first detection area E1 and the object support 26B in the second detection area E2; and a second sensor S2 that detects the preceding vehicle 2C in the third detection area E3 and the fourth detection area E4. The front detection unit S includes the first sensor S1 and the second sensor S2, and detects the target vehicle 2B located in the first detection region E1, detects the target support unit 26B located in the second detection region E2, and detects the preceding vehicle 2C located in the third detection region E3 and the fourth detection region E4.
The first sensor S1 is provided on the front surface portion of the article transport vehicle 2 facing forward, and detects the first reflector M1 (the object vehicle 2B and the object support 26B including the first reflector M1) by projecting the detection light toward the front side and detecting the reflected light from the first reflector M. The first sensor S1 is provided at a position offset to one side with respect to the center of the traveling section 6 (position located at the center of the track 1) in the width direction Y. The second sensor S2 is provided on the front surface portion of the article transport vehicle 2 facing forward, and detects the second reflector M2 (the preceding vehicle 2C including the second reflector M2) by projecting the detection light toward the front side and detecting the reflected light from the second reflector M2. The second sensor S2 is provided so as to be located at the same position as the center of the traveling section 6 (the position located at the center of the track 1) in the width direction Y.
As shown in fig. 4, the first sensor S1 projects detection light toward the front side, and the second sensor S2 projects detection light toward the front side at a position higher than the first sensor S1. Therefore, the detection region E of the first sensor S1 is located at a position deviated downward from the vertical width of the detection region E of the second sensor S2. That is, the detection region E (the third detection region E3 and the fourth detection region E4) of the second sensor S2 is a region different from the detection region E (the first detection region E1 and the second detection region E2) of the first sensor S1 in the vertical direction Z.
When the host vehicle 2A and the target vehicle 2B are located at the same height, the first reflector M1 of the target vehicle 2B is disposed at a height that can reflect the detection light projected by the first sensor S1 of the host vehicle 2A and is disposed at a position lower than the height that can reflect the detection light projected by the second sensor S2 of the host vehicle 2A, and the first reflector M1 of the target vehicle 2B reflects the detection light of the first sensor S1 of the host vehicle 2A but does not reflect the detection light of the second sensor S2 of the host vehicle 2A. On the other hand, when the host vehicle 2A and the target vehicle 2B are located at the same height, the second reflector M2 of the target vehicle 2B is provided at a position higher than the height at which the detection light projected by the first sensor S1 of the host vehicle 2A can be reflected, and is provided at a height at which the detection light projected by the second sensor S2 of the host vehicle 2A can be reflected, and the second reflector M2 of the target vehicle 2B does not reflect the detection light of the first sensor S1 of the host vehicle 2A but reflects the detection light of the second sensor S2 of the host vehicle 2A. Therefore, the first sensor S1 of the host vehicle 2A serves as the first reflector M1 of the detection target vehicle 2B, but does not detect the second reflector M2 of the detection target vehicle 2B. The second sensor S2 of the host vehicle 2A serves as the second reflector M2 of the detection target vehicle 2B, but does not detect the first reflector M1 of the detection target vehicle 2B.
As shown in fig. 6, the detection area E of the first sensor S1 is formed forward of the host vehicle 2A and is formed so as to extend to both sides in the width direction Y with respect to the host vehicle 2A. The length of the detection region E of the first sensor S1 in the extending direction X is set to a first length L1, and the length in the width direction Y is set to a second length L2. The detection region E of the first sensor S1 is divided into a second detection region E2 and first detection regions E1 set on both sides in the width direction Y with respect to the second detection region E2. As shown in fig. 6, the third length L3, which is the length of the second detection region E2 in the width direction Y, is longer than the fourth length L4, which is the length of the article transport vehicle 2 in the width direction Y. That is, the second detection region E2 is set on the front side with respect to the host vehicle 2A and at least partially within the travel locus T, and is set in a state of being continuous with the travel locus T on both the left and right sides of the travel locus T, except for the entire width in the width direction Y of the travel locus T. Further, the length of the second detection region E2 in the extending direction X is set to the first length L1. The first detection region E1 is a portion of the detection region E of the first sensor S1 other than the second detection region E2, and is set on the front side with respect to the host vehicle 2A and on the outer side in the width direction Y with respect to the travel locus T. The first detection area E1 is set with an interval from the travel locus T. The second length L2 and the third length L3 are set to the following lengths: in the parallel section G, the first detection area E1 is set to be within the trajectory in which the subject vehicle 2B travels, but the second detection area E2 is not set to be within the trajectory in which the subject vehicle 2B travels.
As shown in fig. 7, the detection area E of the second sensor S2 is formed forward of the host vehicle 2A and is formed so as to extend to both sides in the width direction Y with respect to the host vehicle 2A. The length of the detection region E of the second sensor S2 in the extending direction X is set to the fifth length L5, and the length in the width direction Y is set to the sixth length L6. The detection region E of the second sensor S2 is divided into a third detection region E3 and a fourth detection region E4 set on the front side with respect to the third detection region E3. The length of the third sensing region E3 in the extending direction X is set to the seventh length L7, and the length of the fourth sensing region E4 in the extending direction X is set to the eighth length L8. The sixth length L6 is longer than the fourth length L4 and shorter than the second length L2. Further, the fifth length L5 is set to the following length: in the parallel section G, the third detection area E3 and the fourth detection area E4 are not set within the trajectory along which the object vehicle 2B travels. The fifth length L5 and the eighth length L8 are longer than the first length L1, and the seventh length L7 is shorter than the first length L1.
The detection region E of the second sensor S2 has a long shape as described above when the vehicle 2A travels in the straight portion 4, but has a shape different from that when the vehicle 2A travels in the straight portion 4 as shown in fig. 8 when the vehicle 2A travels in the curved portion 5. That is, the control unit H is configured to be able to determine whether the host vehicle 2A travels in the straight line portion 4 or the curved line portion 5 of the track 1 and to determine the shape of the traveling track 1A on the front side of the host vehicle 2A based on the detection information of the travel distance sensor such as the rotary encoder provided in the article transport vehicle 2 and the detection information of the address detection sensor that detects the display body indicating the address information provided along the track 1. The second sensor S2 changes the shape of the third detection region E3 and the shape of the fourth detection region E4 according to the shape of the traveling track 1A on the front side of the vehicle 2A under the control of the controller H. The first sensor S1 disables detection of the target vehicle 2B and the target support unit 26B when the own vehicle 2A is located in the curved portion 5, and enables detection of the target vehicle 2B and the target support unit 26B only when the own vehicle 2A is located in the straight portion 4, under the control of the control unit H.
As shown in fig. 9, when the preceding vehicle 2C enters the third detection area E3 and the fourth detection area E4, the second sensor S2 detects the second reflector M2 provided in the preceding vehicle 2C. The host vehicle 2A and the preceding vehicle 2C face in the same direction, and the second sensor S2 detects the second reflector M2 provided on the rear surface portion of the cover 16 of the preceding vehicle 2C. As shown in fig. 10, the first sensor S1 detects the first reflector M1 provided to the hood 16 of the subject vehicle 2B when the subject vehicle 2B enters the first detection region E1. Further, when the host vehicle 2A and the target vehicle 2B are directed in opposite directions, the first sensor S1 detects the first reflector M1 provided on the front surface portion of the cover 16 of the target vehicle 2B, and when the host vehicle 2A and the target vehicle 2B are directed in the same direction, the first sensor S1 detects the first reflector M1 provided on the rear surface portion of the cover 16 of the target vehicle 2B. As shown in fig. 11, when the object support portion 26B enters the second detection region E2, the first sensor S1 detects the first reflector M1 included in the object support portion 26B. Further, when the vehicle 2A and the target vehicle 2B are directed in opposite directions, the first sensor S1 detects the first reflector M1 provided on the front surface portion of the target support portion 26B, and when the vehicle 2A and the target vehicle 2B are directed in the same direction, the first sensor S1 detects the first reflector M1 provided on the rear surface portion of the target support portion 26B.
As shown in the flowchart of fig. 12, the control unit H executes deceleration control for causing the host vehicle 2A to travel at a second set speed lower than the first set speed when the reflector M is detected in the first detection region E1 by the first sensor S1 and when the reflector M is detected in the fourth detection region E4 by the second sensor S2. Further, the control unit H executes stop control for stopping the vehicle 2A when the reflector M is detected in the second detection region E2 by the first sensor S1 and when the reflector M is detected in the third detection region E3 by the second sensor S2. The controller H executes normal control for causing the host vehicle 2A to travel at the first set speed when the reflector M is not detected in the first detection region E1 and the second detection region E2 by the first sensor S1 and when the reflector M is not detected in the third detection region E3 and the fourth detection region E4 by the second sensor S2.
To explain this concrete example, as shown in fig. 9, if the preceding vehicle 2C (the preceding vehicle 2C on the front side of the two preceding vehicles 2C shown in fig. 9) enters the fourth detection region E4 of the second sensor S2 of the host vehicle 2A, the second reflector M2 of the preceding vehicle 2C is detected by the second sensor S2 of the host vehicle 2A. The control unit H of the host vehicle 2A performs deceleration control for causing the host vehicle 2A to travel at the second set speed when the reflector M is detected in the fourth detection region E4 by the second sensor S2 of the host vehicle 2A. Further, as shown in fig. 9, if the preceding vehicle 2C (the preceding vehicle 2C on the rear side of the two preceding vehicles 2C shown in fig. 9) enters the third detection region E3 of the second sensor S2 of the host vehicle 2A, the second reflector M2 of the preceding vehicle 2C is detected by the second sensor S2 of the host vehicle 2A. The control unit H of the host vehicle 2A executes stop control for stopping the host vehicle 2A when the reflector M is detected in the third detection region E3 by the second sensor S2 of the host vehicle 2A. The stop control in the case where the reflector M is detected in the third detection region E3 by the second sensor S2 corresponds to the fourth control in which the front detector S stops the host vehicle 2A when detecting the preceding vehicle 2C existing in the third detection region E3.
Further, as shown in fig. 10, if the subject vehicle 2B enters the first detection area E1 of the first sensor S1 of the host vehicle 2A, the first reflector M1 of the subject vehicle 2B is detected by the first sensor S1 of the host vehicle 2A. When the reflector M is detected in the first detection region E1 by the first sensor S1 of the host vehicle 2A, the control unit H of the host vehicle 2A performs deceleration control so that the host vehicle 2A travels at the second set speed. The deceleration control in the case where the reflector M is detected in the first detection region E1 by the first sensor S1 corresponds to the second control in which the front detector S causes the host vehicle 2A to travel at the second set speed in the case where the target vehicle 2B present in the first detection region E1 is detected. Further, as shown in fig. 11, if the object support portion 26B enters the second detection region E2 of the first sensor S1 of the host vehicle 2A, the first reflector M1 of the object support portion 26B is detected by the first sensor S1 of the host vehicle 2A. The control unit H of the host vehicle 2A executes stop control so as to stop the host vehicle 2A when the reflector M is detected in the second detection region E2 by the first sensor S1 of the host vehicle 2A. The stop control in the case where the reflector M is detected in the second detection region E2 by the first sensor S1 in this manner corresponds to the third control in which the front detector S stops the vehicle 2A in the case where the object support portion 26B existing in the second detection region E2 is detected.
When the control unit H of the host vehicle 2A does not detect the reflector M in the first detection region E1 and the second detection region E2 of the first sensor S1 of the host vehicle 2A and does not detect the reflector M in the third detection region E3 and the fourth detection region E4 of the second sensor S2 of the host vehicle 2A, normal control is performed to cause the host vehicle 2A to travel at the first set speed. The normal control corresponds to a first control in which the front detection unit S causes the host vehicle 2A to travel at the first set speed when the target vehicle 2B is not detected in the first detection region E1 and when the target support unit 26B is not detected in the second detection region E2.
2. Other embodiments
Next, another embodiment of the article transport facility and the article transport vehicle will be described.
(1) In the above embodiment, the front sensing unit S has the first sensor S1 and the second sensor S2, but the front sensing unit S may have only the first sensor S1 of the first sensor S1 and the second sensor S2. When the front detection unit S includes only the first sensor S1, the first sensor S1 may have the function of the second sensor S2.
(2) In the above embodiment, the shapes and sizes of the first detection region E1, the second detection region E2, the third detection region E3, and the fourth detection region E4 may be changed as appropriate. Specifically, for example, as shown in fig. 13, the length L9 in the extending direction X of the second detection region E2 may be shorter than the length L1 in the extending direction X of the detection region E of the first sensor S1, or the length L3 in the width direction Y of the second detection region E2 may be the same as the length L4 in the width direction Y of the article transport vehicle 2 or shorter than the length L4 in the width direction Y of the article transport vehicle 2.
(3) In the above-described embodiment, the detection of the target vehicle 2B and the target support portions 26B by the first sensor S1 is enabled only when the vehicle 2A is located in the straight portion 4, but the detection of the target vehicle 2B and the target support portions 26B by the first sensor S1 may be enabled also when the vehicle 2A is located in the curved portion 5, in addition to the case where the vehicle 2A is located in the straight portion 4. In this case, the shape of the detection area E of the first sensor S1 may be deformed in accordance with the shape of the traveling track 1A on the front side of the host vehicle 2A.
(4) In the above embodiment, the first reflector M1 is provided on the slider 24 of the slide operating mechanism 15, but the first reflector M1 and the like may be provided on the vertically movable body 18 of the support mechanism 13, and the first reflector M1 may be provided at a position other than the slider 24 in the support portion 26.
(5) In the above embodiment, the article W is a reticle Pod, but the article W may be another container such as a Front Opening Unified Pod (FOUP) that stores wafers, or a transport object other than a container.
(6) The structure disclosed in each of the above embodiments can be combined with the structure disclosed in the other embodiments as long as no contradiction occurs. With respect to other structures, all aspects of the embodiments disclosed in the present specification are merely examples. Therefore, various changes can be made as appropriate within a scope not departing from the gist of the present disclosure.
3. Summary of the above embodiments
The outline of the article transport vehicle and the article transport facility described above will be described below.
An article transport facility transports an article by moving a plurality of article transport vehicles along a track, the article transport vehicles having a width direction orthogonal to an extending direction of the track when viewed from the top-bottom direction, the article transport vehicles comprising: a support portion that supports an article; a driving unit that moves the support unit in the width direction; a front detection unit; and a control unit that moves the support unit to a protruding position protruding from the article transport vehicle in the width direction and a retracted position retracted from the protruding position toward the article transport vehicle, the control unit setting the track on which the vehicle travels as one of the article transport vehicles as a track in progress, the track parallel to the track in progress as a target track, the track on which the vehicle travels along the track in progress as a travel track, the other article transport vehicle traveling on the target track as a target vehicle, the support unit of the target vehicle as a target support unit, the front detection unit detecting the target vehicle located in a first detection area and the target support unit located in a second detection area, the first detection region is set on the front side with respect to the host vehicle and is set on the outer side in the width direction with respect to the travel locus, the second detection region is set on the front side with respect to the host vehicle and is set within the travel locus, and the control unit executes first control, second control, and third control, the first control being: the second control is a control of, when the front detection unit does not detect the target vehicle in the first detection area and does not detect the target support unit in the second detection area, causing the host vehicle to travel at a first set speed: the vehicle is caused to travel at a second set speed lower than the first set speed when the front detection unit detects the target vehicle existing in the first detection area, and the third control is control for stopping the vehicle when the front detection unit detects the target support unit existing in the second detection area.
According to this configuration, when the target support portion of the target vehicle traveling on the target track enters the traveling locus on the front side of the host vehicle, the entering support target portion enters the second detection region, and therefore the support target portion can be detected by the front detection portion. Further, when the front detection unit detects the target support unit existing in the second detection region, the control unit executes the third control to stop the vehicle, so that the vehicle can be prevented from contacting the target support unit. Further, when the target vehicle traveling on the target track is present on the front side of the host vehicle, the target vehicle enters the first detection area, and therefore the target vehicle can be detected by the front detection unit. When the front detection unit detects the target vehicle existing in the first detection area, the control unit executes a second control for causing the vehicle to travel at a second set speed lower than the first set speed. Therefore, in the case where the target vehicle protrudes the target support portion toward the protruding position and the target support portion enters the travel locus on the front side of the vehicle, the braking distance can be shortened when the vehicle is stopped by executing the third control, and therefore, it is easy to prevent the vehicle from coming into contact with the target support portion. In this way, according to the present configuration, it is possible to provide an article transport facility capable of suppressing contact between an article transport vehicle and another article transport vehicle.
Here, it is preferable that a third detection area is set in the travel locus at a front side of the vehicle, the front detection unit detects a preceding vehicle as another article transport vehicle located in the third detection area, and the control unit executes a fourth control of stopping the vehicle when the front detection unit detects the preceding vehicle existing in the third detection area, in addition to the first control, the second control, and the third control.
According to this configuration, when the preceding vehicle traveling on the traveling track is present on the front side of the host vehicle, the preceding vehicle enters the third detection area, and therefore the preceding vehicle can be detected by the front detection unit. Further, when the front detection unit detects a preceding vehicle existing in the third detection area, the control unit executes the fourth control to stop the vehicle, so that contact between the vehicle and the preceding vehicle can be suppressed.
Further, it is preferable that the front detection unit includes: a first sensor that detects the object vehicle in the first detection area and the object support in the second detection area; and a second sensor that detects the article transport vehicle in the third detection area.
According to this configuration, since the functions of the front detection unit can be assigned to the first sensor and the second sensor, for example, the functions of the sensors can be simplified or the detection accuracy of the sensors can be improved, compared to a case where the first detection region, the second detection region, and the third detection region are detected by one sensor.
Preferably, the track has a linear portion having a linear shape and a curved portion having a curved shape, the second sensor changes the shape of the third detection area in accordance with the shape of the traveling track on the front side of the host vehicle, and the first sensor enables detection of the target vehicle and the target support portion only when the host vehicle is located at the linear portion.
According to this configuration, since the shape of the third detection area is changed in accordance with the shape of the traveling track on the front side of the host vehicle, it is easy to appropriately detect the preceding vehicle by the second sensor both when the host vehicle is located in the straight line portion and when the host vehicle is located in the curved line portion, and therefore it is easy to prevent the host vehicle from coming into contact with the preceding vehicle. Further, since the plurality of tracks are rarely parallel in the curved portion, the first sensor does not have to change the shape of the first detection region or the second detection region depending on the shape of the track during travel by validating the detection by the first sensor only in the straight portion. Therefore, the function of the first sensor can be simplified or the detection accuracy can be improved.
Preferably, the length of the second detection area in the width direction is longer than the length of the article transport vehicle in the width direction.
According to this configuration, when the target vehicle causes the target support portion to protrude toward the travel path of the host vehicle, the target support portion can be detected by the first sensor before the target support portion enters the travel path. Therefore, the third control can be executed by detecting the target support portion entering the travel locus in advance, and it is easy to prevent the vehicle from coming into contact with the target support portion.
Further, it is preferable that the article transport vehicle includes reflectors which are disposed on a front surface portion and a rear surface portion of the article transport vehicle which face forward and rearward, and a front surface portion and a rear surface portion of the support portion which face forward and rearward, respectively, and the front detection portion detects the article transport vehicle and the support portion by detecting reflected light from the reflectors.
With this configuration, the front detection unit of the host vehicle can easily and appropriately detect the target vehicle and the target support unit that include the reflector. Further, since the object transport vehicle and the support portion are provided with the reflectors on the front surface portion and the rear surface portion thereof, it is easy to appropriately detect the object vehicle and the object support portion provided with the reflectors by the front detection portion of the host vehicle in both cases where the object vehicle and the host vehicle travel in the same direction and where the object vehicle and the host vehicle travel in the opposite direction.
The article transport vehicle is provided with: a traveling section that travels along a rail; a support portion that supports an article; a storage section that stores an article; a driving unit for moving the support unit; and a front detection unit that takes the track on which the vehicle is traveling as an in-travel track, takes a track along which the vehicle travels as a travel track, and takes a direction orthogonal to an extending direction of the track as a width direction when viewed from the top-bottom direction, wherein the drive unit moves the support unit in the width direction to a protruding position protruding from the housing unit in the width direction and a retracted position retracted from the protruding position to the housing unit side, and the front detection unit includes: a first sensor that detects a first object vehicle as another article transport vehicle in a first detection area and the support portion of the first object vehicle in a second detection area; and a second sensor that detects a second object vehicle as another article transport vehicle of a third detection area, the first detection area being set on a front side with respect to the vehicle and on an outer side in the width direction with respect to the travel locus, the second detection area being set on the front side with respect to the vehicle and within the travel locus, the third detection area being set on a different area from the second detection area in an up-down direction and being set on the front side with respect to the vehicle and within the travel locus.
According to this configuration, when the target support portion of the target vehicle traveling on the target trajectory enters the traveling trajectory on the front side of the host vehicle, the entering support target portion enters the second detection region, and therefore the support target portion can be detected by the first sensor. Therefore, when the first sensor detects the target support portion existing in the second detection region, it is possible to perform a measure such as stopping the vehicle and preventing the vehicle from coming into contact with the target support portion. Further, in a case where the first target vehicle traveling on the target track exists on the front side of the own vehicle, the target vehicle enters the first detection area, and therefore the target vehicle can be detected by the first sensor. Therefore, the following can be handled: when the first sensor detects the target vehicle present in the first detection area, the vehicle can be decelerated in advance, and when the target support unit enters the travel area, the vehicle can be stopped promptly. Further, when a preceding vehicle traveling on the traveling track is present on the front side of the host vehicle, the preceding vehicle enters the third detection area, and therefore the preceding vehicle can be detected by the second sensor. When the second sensor detects the second target vehicle existing in the third detection area, it is possible to take measures such as stopping the vehicle and preventing the vehicle from coming into contact with the second target vehicle. Further, since the functions of the front detection unit can be assigned to the first sensor and the second sensor, the functions of the sensors can be simplified or the detection accuracy of the sensors can be improved, for example, as compared with a case where the first detection region, the second detection region, and the third detection region are detected by one sensor. In this way, according to the present configuration, it is possible to provide an article transport vehicle that can prevent contact with another article transport vehicle with a relatively simple configuration.
The technology according to the present disclosure can be used for an article transport vehicle that transports an article while traveling along a track, and an article transport facility provided with the article transport vehicle.
Description of the reference numerals
1, track; 1A, a track in the process of traveling; 1B object track; 2, an article transport vehicle; 2A, the vehicle; 2B object vehicle (first object vehicle); 2C preceding vehicle (second object vehicle); 4 a straight line part; 5 a curved part; 16 cover body (accommodating part); 25 a sliding motor (driving unit); 26 a support portion; 26B object support part; e1 first detection zone; e2 second detection zone; e3 third detection zone; an H control unit; an M reflector; s a front detection unit; s1 a first sensor; s2 second sensor; a T travel track; a W article; the direction of X extension; the Y width direction; z up and down direction.
Claims (8)
1. An article transport apparatus that transports an article by moving a plurality of article transport vehicles along a track, characterized in that,
the direction perpendicular to the extending direction of the track is taken as the width direction when viewed from the vertical direction,
the article transport vehicle includes: a support portion that supports an article; a driving unit that moves the support unit in the width direction; a front detection unit; and a control part for controlling the operation of the motor,
the driving unit moves the support unit to a protruding position protruding from the article transport vehicle in the width direction and a retracted position retracted to the article transport vehicle side from the protruding position,
the track on which the vehicle travels, which is one of the plurality of article transport vehicles, is defined as a traveling track, the track parallel to the traveling track is defined as a target track, a track along which the vehicle travels along the traveling track is defined as a traveling track, the other article transport vehicles traveling on the target track are defined as target vehicles, and the support sections of the target vehicles are defined as target support sections,
the front detection unit detects the object vehicle located in a first detection area and detects the object support unit located in a second detection area,
the first detection area is set on the front side with respect to the host vehicle and on the outer side in the width direction with respect to the travel locus,
the second detection area is set on the front side of the vehicle and within the travel path,
the control unit executes a first control, a second control and a third control,
the first control is the following control: the front detection unit makes the vehicle travel at a first set speed when the object vehicle is not detected in the first detection area and the object support unit is not detected in the second detection area,
the second control is the following control: when the front detection unit detects the target vehicle existing in the first detection area, the vehicle is caused to travel at a second set speed lower than the first set speed,
the third control is control to stop the vehicle when the front detection unit detects the target support unit existing in the second detection area.
2. The article transport apparatus according to claim 1,
setting a third detection area in the travel path at a front side of the vehicle,
the front detection unit detects a preceding vehicle as another article transport vehicle located in the third detection area,
the control unit executes, in addition to the first control, the second control, and the third control, a fourth control of stopping the host vehicle when the front detection unit detects the preceding vehicle present in the third detection region.
3. The article transport apparatus according to claim 2,
the front detection unit includes:
a first sensor that detects the object vehicle in the first detection area and the object support in the second detection area; and
and a second sensor that detects the article transport vehicle in the third detection area.
4. The article transport apparatus according to any one of claims 1 to 3,
the length of the second detection area in the width direction is longer than the length of the article transport vehicle in the width direction.
5. The article transport apparatus according to claim 2,
the third detection area is set in an area different from the second detection area in the vertical direction, and is set in the travel locus on the front side with respect to the host vehicle.
6. The article transport apparatus according to claim 3,
a fourth detection area is set in the travel locus on the front side of the third detection area,
the second sensor also detects the preceding vehicle, which is another article transport vehicle located in the fourth detection area,
the control unit executes deceleration control for causing the host vehicle to travel at a second set speed when the second sensor detects the preceding vehicle existing in the fourth detection area.
7. The article transport apparatus according to claim 6,
the length of the fourth detection region in the extending direction is longer than the length of the third detection region in the extending direction.
8. The article transport apparatus according to claim 7,
the fourth detection region is a region different from the second detection region in the vertical direction.
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| CN201810668806.6A CN109110361B (en) | 2017-06-26 | 2018-06-26 | Article transport facility and article transport vehicle |
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| CN113428593B CN113428593B (en) | 2023-03-28 |
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| KR102501706B1 (en) * | 2019-03-22 | 2023-02-17 | 무라다기카이가부시끼가이샤 | Transport vehicle system |
| KR102303109B1 (en) * | 2019-07-05 | 2021-09-15 | 세메스 주식회사 | Apparatus for controlling transporter and system having the apparatus |
| CN110296716A (en) * | 2019-07-29 | 2019-10-01 | 广东联城住工装备信息科技有限公司 | Rail travel garage journey detection system |
| KR102316936B1 (en) * | 2019-11-07 | 2021-10-25 | 세메스 주식회사 | Vehicle and method of controlling velocity of vehicle |
| JP7327174B2 (en) * | 2020-01-14 | 2023-08-16 | 株式会社ダイフク | Goods transport equipment |
| CN116620802B (en) * | 2023-07-19 | 2023-10-24 | 中建安装集团有限公司 | Transportation method utilizing indoor construction intelligent material transportation system |
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- 2018-06-25 KR KR1020180072727A patent/KR102463268B1/en active IP Right Grant
- 2018-06-26 CN CN201810668806.6A patent/CN109110361B/en active Active
- 2018-06-26 CN CN202110748991.1A patent/CN113428593B/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| CN109110361A (en) | 2019-01-01 |
| TW201904833A (en) | 2019-02-01 |
| TWI781180B (en) | 2022-10-21 |
| JP6693481B2 (en) | 2020-05-13 |
| CN113428593B (en) | 2023-03-28 |
| CN109110361B (en) | 2021-12-24 |
| KR102463268B1 (en) | 2022-11-03 |
| KR20190001553A (en) | 2019-01-04 |
| JP2019006567A (en) | 2019-01-17 |
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