JP2012150588A - Rail-guided truck system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect surely a mark placed on rails, in a rail-guided truck system.SOLUTION: A rail-guided truck system comprises rails 100 laid on or near a ceiling and a truck running along the rails. The truck comprises: a running part 210 running on a running surface part of the rails; a truck body part 220 suspended from the running part using a gap of the rails; a detection means 610 provided at one of the running part and the truck body part; and a reflection means 620 provided at the other of the running part and the truck body and reflecting a beam emitted from the detection means to the detection means. The rails comprises a mark part 630 protruding toward a gap side from the running surface part of a predetermined position to shut out a light path between the detection means and the reflection means.

Description

  The present invention relates to a technical field of a tracked bogie system that transports an object to be transported such as a container containing various substrates for manufacturing semiconductor devices along a track.

As this type of tracked carriage system, for example, a system having a suspended carriage that transports a transported object such as a front opening unified pod (FOUP) by traveling on a track laid on the ceiling (so-called OHT: Overhead Hoist Transport) )It has been known.
In such a tracked cart system, a technique has been proposed in which an information recording medium that records position information, control information, and the like is arranged at a predetermined position on a track and is read by a cart traveling on the track. For example, Patent Document 1 discloses a technique in which a barcode is disposed at a predetermined position on a track and a barcode reader is provided on a tracked moving body that travels on the track.

JP 2001-166825 A

  The barcode reading operation is performed, for example, when a mark indicating the presence of the barcode is detected. However, when the bar code is arranged at a position where the joint of the track or another member is interposed, chattering may occur in the sensor for detecting the mark, and accurate detection may not be performed. That is, the technique according to Patent Document 1 described above has a technical problem that information cannot be reliably read depending on the condition of the arrangement position of the information recording medium.

  The present invention has been made in view of, for example, the above-described problems, and an object thereof is to provide a tracked cart system that can reliably detect marks arranged on a track.

  In order to solve the above-described problems, the tracked carriage system of the present invention is laid at a ceiling or in the vicinity of the ceiling, has a traveling surface portion on both lower sides, and has a clearance between the traveling surface portions, and the track. A tracked bogie system comprising a bogie that travels along the track, the bogie traveling on the running surface portion of the track, and a bogie body suspended from the running portion using the gap A detecting means for irradiating light and detecting reflected light, and provided on the other of the traveling part and the cart body part, Reflection means for reflecting the light emitted from the detection means to the detection means, and the trajectory has a front surface so as to block an optical path between the detection means and the reflection means from a traveling surface portion at a predetermined position. And a mark portion projecting into the gap side.

  The tracked cart system of the present invention includes a track laid on or near the ceiling, and a cart supported and guided by the track. The track according to the present invention is particularly configured to have a running surface portion on both sides of the lower portion and a gap between the running surface portions.

  The cart according to the present invention has a traveling unit that travels on the traveling surface portion of the track. The traveling unit travels, for example, when a traveling roller rotates on the traveling surface unit. A carriage main body that is suspended using a gap between the tracks is attached to the traveling unit. The carriage main body is configured to be able to stack a transported object such as a FOUP or a reticle, and is configured to be able to transport the transported object when the traveling unit travels along the track.

  The cart according to the present invention further includes detection means provided on one of the traveling unit and the cart main body, and reflecting means provided on the other of the traveling unit and the cart main body. In other words, when the detecting means is provided in the traveling part, the reflecting means is provided in the cart main body, and when the detecting means is provided in the cart main body, the reflecting means is provided in the traveling part.

  The detecting means detects a mark portion described later by irradiating light and detecting reflected light. On the other hand, the reflecting means reflects the light emitted from the detecting means to the detecting means. The reflecting means is configured as a metallic plate member having a high reflectance, for example. However, the reflection means may not be made of metal as long as the reflection means is a member having a high reflectance (for example, a configuration in which a reflection tape is attached to a resin plate) may be used. The detecting means and the reflecting means are respectively provided on the traveling part and the carriage main body part so as to face each other with a gap between the tracks. Therefore, if there is nothing that blocks the optical path between the detection means and the reflection means, the detection means continues to detect the light reflected by the reflection means.

  Here, in particular, the track according to the present invention is provided with a mark portion that protrudes toward the gap from the traveling surface portion at a predetermined position so as to block the optical path between the detecting means and the reflecting means. The mark portion may be directly attached to the traveling surface portion, or may be attached to a member (for example, a guide wire plate for supporting the guide wire) attached to the traveling surface portion. The mark portion is configured as a member having a low reflectance as compared with the reflection means described above. For this reason, at a predetermined position where the mark portion is provided, the light emitted from the detection means does not enter the reflection means, and as a result, the reflected light is not detected by the detection means. The detecting means detects the presence of the mark portion when light is not detected in this way. That is, it is detected that the position where the carriage is traveling is a predetermined position.

  The “predetermined position” in the present invention is set as a position where the traveling position of the carriage should be detected, and is specifically set to correspond to a position where the traveling of the carriage is stopped. The A plurality of predetermined positions are typically set on the trajectory, and as many mark portions are arranged.

  As the reflection means described above, it is conceivable to use an orbit formed of aluminum or stainless steel having high reflectivity (that is, irradiate light from the detection means toward the orbit). Chattering occurs at positions where various members exist on the seam of the track or on the track, causing false detection. Further, if the shape of the trajectory changes, it is required to change the position of the detection means.

  However, in the present invention, as described above, the detection unit and the reflection unit are provided in each of the traveling unit and the carriage main body unit. Therefore, the mark portion can be detected without being affected by the seam in the orbit. That is, the mark portion can be reliably detected regardless of the state of the arrangement position of the mark portion.

  In one aspect of the tracked cart system according to the present invention, the cart is provided in either the traveling unit or the cart body unit, and information that performs a reading operation using the detection of the mark unit by the detection unit as a trigger. The track further includes an information recording medium that protrudes toward the gap from a running surface portion in the vicinity of the mark portion to a position where the information reading device can read.

  According to this aspect, the information reading means is provided in either the traveling unit or the cart main body of the cart. The information reading means performs a reading operation using the detection of the mark portion by the detecting means as a trigger. On the other hand, an information recording medium that records information that can be read by the information reading means is provided on the track. The information recording medium is provided so as to protrude from the traveling surface portion near the mark portion to the position where the information reading means can read the gap side. Specific examples of the information recording medium and the information reading means include a barcode and a barcode reader for reading the barcode.

  According to the configuration described above, when the mark portion is detected by the detection unit, the information recorded on the information recording medium is read by the information reading unit. Therefore, it is possible to perform an information reading operation at an appropriate timing. For example, detailed position information is recorded on the information recording medium. In this case, the traveling position of the carriage can be reliably detected with high accuracy.

  In another aspect of the tracked cart system according to the present invention, when the cart reads information recorded on the information recording medium by the information reading device, the cart controls the cart to run in a predetermined running pattern. It has further.

  According to this aspect, when information recorded on the information recording medium is read by the information reading means provided on the carriage, the carriage is controlled to run in a predetermined running pattern. That is, the cart that has read the information travels according to a preset travel pattern.

  The predetermined traveling pattern includes, for example, traveling stoppage or transfer operation after stopping. In this aspect, in particular, since the traveling in the predetermined traveling pattern is realized after reading the predetermined information, the positioning abnormality or the like hardly occurs, and the carriage can be accurately traveled to the target position and stopped. it can.

  The effect | action and other gain of this invention are clarified from the form for implementing invention demonstrated below.

It is a top view which shows the whole structure of a tracked bogie system. It is a front view which shows the structure of a trolley | bogie. It is a perspective view which shows the transfer operation | movement of a trolley | bogie. It is a perspective view which shows the horizontal transfer operation | movement of a trolley | bogie. It is sectional drawing at the time of seeing a mark sensor periphery in the advancing direction of a trolley | bogie. It is sectional drawing at the time of seeing a mark sensor periphery from the upper direction of a trolley | bogie. It is sectional drawing at the time of seeing a mark sensor periphery from the side of a trolley | bogie. It is a flowchart which shows operation | movement of a tracked bogie system. It is sectional drawing which shows the structure of a tracked bogie system which concerns on a comparative example.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, the overall configuration of the tracked cart system according to the present embodiment will be described with reference to FIG. FIG. 1 is a top view showing the overall configuration of the tracked cart system according to the embodiment.

  In FIG. 1, the tracked cart system according to the present embodiment includes a track 100, a cart 200, and a controller 300.

  The track 100 is laid on the ceiling, for example, and is made of a metal such as aluminum or stainless steel.

  A plurality of carts 200 are suspended on the track 100, and the carts 200 can transport the FOUP that is the object to be transported by traveling along the track 100.

  The carriage 200 has an on-vehicle controller 205. The on-board controller 205 receives a conveyance command from the controller 300 and controls the traveling of the carriage 200. The on-board controller 205 not only controls the traveling of the carriage 200 but also has a function of comprehensively controlling each device provided on the carriage 200.

  The controller 300 includes, for example, an arithmetic circuit, a memory, and the like, and is configured to be able to give a conveyance command to the carriage 200 via the on-vehicle controller 205.

  Although illustration is omitted here, a shelf (for example, a buffer or a port) for temporarily storing the FOUP and a semiconductor manufacturing apparatus are provided at a position along the track 100.

  Next, a more specific configuration of the carriage 200 will be described with reference to FIG. FIG. 2 is a front view showing the configuration of the carriage.

  In FIG. 2, the carriage 200 includes a traveling unit 210, a main body unit 220, a moving unit 230, an elevating unit 235, an elevating belt 240, and a gripping unit 250. In FIG. 2, for convenience of explanation, illustration of a mark sensor, a barcode reader, etc., which will be described later, is omitted.

  The carriage 200 travels along the track 100 while the traveling roller 215 rolls as the traveling unit 210 applies a propulsive force by, for example, a linear motor. A main body 220 which is an example of the “trolley main body” of the present invention is attached to the lower surface of the traveling unit 210 so as to hang.

  A moving part 230 is attached to the main body part 220. The moving unit 230 can move to the side of the track 100 (that is, the horizontal direction in the drawing). An elevating unit 235 is attached to the lower surface of the moving unit 230.

  A holding part 250 for holding the FOUP is attached to the lower surface of the elevating part 235 by an elevating belt 240. The gripping part 250 can be raised and lowered with respect to the main body part 220 by unwinding or winding up the lifting belt 240.

  Next, a FOUP transfer method using a carriage will be described with reference to FIGS. Here, FIGS. 3 and 4 are perspective views showing a method for transferring the FOUP of the bogie according to the embodiment.

  In FIG. 3, when the carriage 200 transfers the FOUP 400 on the port 510 located directly below the track 100, first, the carriage 200 travels on the track 100, above the FOUP 400 installed on the port 510. To stop.

  Subsequently, as shown in the drawing, the lifting belt 240 is unwound by the lifting and lowering portion 235, whereby the gripping portion 250 is lowered to the position of the FOUP 400. And the fine adjustment of the position of the holding part 250 and the FOUP 400 is performed, and the FOUP 400 is held.

  When the FOUP 400 is gripped, the elevating belt 240 is wound up, and the grip portion 250 and the gripped FOUP 400 are raised to the position of the main body portion 220. Then, the carriage 200 again travels on the track 100, and the FOUP 400 is conveyed.

  In FIG. 4, when the FOUP 400 is installed in a side buffer (temporary storage shelf) 520 at a position shifted to the side of the track 100, the moving unit 230 moves to the side of the track 100 and then moves up and down. The lifting belt 240 is unwound by the part 235, and the gripping part 250 is lowered to the position of the FOUP 400. By operating in this way, the FOUP 400 can be laterally transferred from the track unit 100.

  Next, a specific configuration around the traveling unit 210 in the carriage 200 will be described in detail with reference to FIGS. 5 to 7. FIG. 5 is a cross-sectional view of the mark sensor and its surroundings as viewed in the traveling direction of the carriage. FIG. 6 is a cross-sectional view when the periphery of the mark sensor is viewed from above the carriage, and FIG. 7 is a cross-sectional view when the periphery of the mark sensor is viewed from the side of the carriage.

  5 to 7, the cart 200 according to this embodiment is provided with a mark sensor 610 at a position facing the traveling unit 210 in the main body 220. The mark sensor 610 is an example of the “detecting means” in the present invention, and can detect the presence of a mark portion to be described later by irradiating light and detecting reflected light. The mark sensor 610 is connected to the mark sensor amplifier 615 as shown in FIG.

  On the other hand, a reflector 620 is provided at a position facing the mark sensor 610 in the traveling unit 210. The reflecting plate is an example of the “reflecting means” in the present invention, and is configured to include a metal having high reflectivity such as aluminum or stainless steel. However, the reflecting plate 620 may not be made of metal as long as it is a member having a high reflectance. The reflection plate 620 may have a configuration in which, for example, a reflection tape is attached to a resin plate. The reflector 620 reflects the light emitted from the mark sensor 610 to the mark sensor 610. Therefore, if there is no object that blocks the optical path between the mark sensor 610 and the reflection plate 620, the mark sensor 610 continues to detect the light reflected by the reflection plate 620.

  Here, in particular, at a predetermined position of the track 100 according to the present embodiment, from a traveling surface portion (more precisely, a guide wire plate 635 attached to the lower surface side of the traveling surface portion) on which the traveling roller 215 of the traveling portion 210 travels. A mark portion 630 that protrudes so as to block the optical path between the mark sensor 610 and the reflection plate 620 is provided. The mark part 630 is configured as a member having a low reflectance as compared with the above-described reflector 620. For this reason, at a predetermined position where the mark portion 630 is provided, the light emitted from the mark sensor 610 does not enter the reflecting plate 620, and as a result, the reflected light is not detected by the mark sensor 610. The mark sensor 610 detects the presence of the mark portion 630 when the reflected light is not detected in this way.

  The mark portion 630 is attached to a guide wire plate 635 that supports the guide wire. The guide wire is provided near the branch point and the junction of the track 100 and is used when the carriages 200 communicate with each other. The carriage 200 that has entered the area where the guide line is provided recognizes the presence of another carriage by communicating via the guide line. Thereby, it becomes possible to improve conveyance efficiency.

  A guide wire coil 660 for communicating with the guide wire (specifically, transmitting a signal to the guide wire or receiving a signal from the guide wire) is provided above the main body 220 of the carriage 200. The guide wire coil 660 is attached to the main body part 220 via the attachment part 670. As shown in FIG. 6, a total of four guide wire coils 660 are provided for each of the left and right pairs so as to correspond to each of the bogie shafts 281 and 282. The guide wire coil 660 is provided adjacent to the left and right sides of the connecting portion 800. This is because the guide wire and the guide wire coil 660 are arranged at positions that do not deviate from each other even during curve traveling. At this time, if the guide wire coil 660 is installed closer to the center of the bogie shafts 281 and 282, the range swung during the curve traveling becomes smaller. In addition, since the size of the guide wire coil 660 has a predetermined limit, it is preferable that the range swung around the curve traveling flow is small. Therefore, the induction wire coil 220 is preferably installed closer to the center of the bogie shafts 281 and 282.

  On the other hand, the guide wire plate 635 is provided so as to match the position where the guide wire coil 660 can be installed with the position in the width direction (that is, the direction intersecting the extending direction of the track 100). Specifically, as shown in FIG. 5, a part of the track 100 is provided so as to protrude from the lower side to the gap side. The mark part 630 mentioned above is affixed on the lower surface side of the protrusion part of such a guide wire plate 635. FIG. It should be noted that a plate having substantially the same shape as that of the guide wire plate 635 may be provided at a location where the guide wire plate 635 does not exist (that is, a location where there is no branch point or merging point and no guide wire needs to be provided). . In this way, the mark portion 630 can be suitably attached at any location on the track 100.

  The cart 200 according to the present embodiment is further provided with a barcode reader 640 in the vicinity of the mark sensor 610 in the main body 220. The barcode reader 640 is an example of the “information reading unit” of the present invention, and performs a reading operation when the mark unit 630 is detected by the mark sensor 610. As a result, the barcode 650 provided adjacent to the mark portion 630 on the guide wire plate 635 is read.

  The bar code 650 is an example of the “information recording medium” of the present invention, and for example, detailed position information in the track 100 is recorded. Further, as can be seen from FIGS. 6 and 7, the barcode 650 is provided on the front side as viewed in the traveling direction of the carriage 200 compared to the mark portion 630. As a result, the barcode 650 is detected later than the mark portion 630, and the reading operation corresponding to the detection of the mark portion 630 can be suitably performed.

  As shown in FIGS. 6 and 7, two traveling parts 210 are attached to the main body part 220 of the carriage 200 according to the present embodiment via bogie shafts 281 and 282 and a connecting part 800. The connection part 800 connects the bogie shafts 281 and 282 and the main body part 220 so as to be relatively rotatable. According to the connecting portion 800, a bogie structure in which the pair of traveling portions 210 can rotate with respect to the main body portion 220 can be configured. As described above, when a plurality of traveling units 210 are provided in one carriage 200, each member (that is, the mark sensor 610, the reflection plate 620, and the barcode reader 640) provided in the carriage 200 described above is 1 What is necessary is just to be provided in the one traveling part 210. FIG.

  Further, the positions of the mark sensor 610 and the reflection plate 620 may be interchanged. That is, the mark sensor 610 may be provided in the traveling unit 210, and the reflection plate may be provided in the main body unit 220. Further, a barcode reader 640 may be provided in the traveling unit 210. In this case, the barcode 650 is arranged to face the traveling unit side.

  Next, the operation of the tracked cart system according to the present embodiment will be described with reference to FIG. FIG. 8 is a flowchart showing the operation of the tracked cart system.

  8, in the tracked cart system according to the present embodiment, when the cart 200 travels, first, irradiation of light by the mark sensor 610 is started (step S01). Here, when the mark sensor 610 does not detect reflected light (step S02: NO), it is considered that there is something that blocks the optical path between the mark sensor 610 and the reflecting plate 620. Therefore, the mark part 630 is detected (step S03). On the other hand, if there is no mark portion 630 that blocks the optical path between the mark sensor 610 and the reflecting plate 620, the mark sensor 610 continues to detect the light reflected by the reflecting plate 620. Therefore, when the reflected light is detected (step S02: YES), the mark portion 630 is not detected.

  When the mark portion 630 is detected, the barcode reader 640 performs the barcode 650 reading operation (step S04). For example, detailed position information on the track 100 is stored in the barcode 650, and the information read by the barcode reader 640 is transmitted to the on-board controller 205 (see FIG. 1). The on-board controller stops the transport vehicle based on the read position information (step S05) and controls to perform the transfer operation (step S06). That is, the on-board controller 205 is an example of the “travel control unit” in the present invention.

  According to the series of controls described above, since detailed position information is read from the barcode 650, it is possible to prevent the stop position abnormality or the conveyance operation abnormality in the carriage 200 from occurring. Therefore, the conveyance efficiency in the system can be increased.

  Here, a particularly beneficial effect obtained by the tracked cart system according to the present embodiment will be described while looking at the difference from the comparative example shown in FIG. FIG. 9 is a cross-sectional view showing the configuration of the tracked cart system according to the comparative example.

  In FIG. 9, in the cart 200 according to the comparative example, the mark sensor 610 is provided so as to face the track 100. That is, the mark sensor 610 uses the surface of the track 100 or the surface of the guide wire plate 635 to which the mark portion 630 is attached as the reflecting plate 620. In this case, chattering may occur at the joint of the track 100 or at a position where various members exist on the track 100. Therefore, the mark portion 630 is erroneously detected. Further, if the shape of the track 100 changes, it is required to change the position of the mark sensor 610 and the light irradiation direction.

  In contrast, in the present embodiment, as described above, the mark sensor 610 and the reflection plate 620 are provided in each of the traveling unit 210 and the carriage main body 220. Therefore, the mark portion 630 can be detected without being affected by the seam or the like in the track 100. Therefore, the mark portion 630 can be detected with high accuracy, and the reading operation of the barcode 650 can be realized with certainty.

  As described above, according to the tracked cart system according to the present embodiment, since the mark arranged on the track can be detected with certainty, the information recording medium arranged on the track can be read at a suitable timing. It is. Therefore, it is possible to prevent an abnormality from occurring in the traveling control of the transport vehicle.

  The present invention is not limited to the above-described embodiments, and can be appropriately changed without departing from the spirit or concept of the invention that can be read from the claims and the entire specification, and a tracked carriage with such a change. The system is also included in the technical scope of the present invention.

  DESCRIPTION OF SYMBOLS 100 ... Track, 200 ... Carriage, 205 ... On-board controller, 210 ... Traveling part, 215 ... Traveling roller, 220 ... Main part, 230 ... Moving part, 235 ... Lifting part, 240 ... Lifting belt, 250 ... Gripping part, 281 , 282 ... Bogie shaft, 300 ... Controller, 400 ... FOUP, 510 ... Port, 520 ... Side buffer, 610 ... Mark sensor, 615 ... Mark sensor amplifier, 620 ... Reflector, 630 ... Mark part, 635, Guide wire plate 640 ... Bar code reader, 650... Bar code, 660... Induction wire coil, 670.

Claims (3)

A tracked cart system comprising a track that is laid on the ceiling or in the vicinity of the ceiling, has a running surface portion on both lower sides and has a gap between the running surface portions, and a cart that runs along the track. ,
The cart is
A traveling unit that travels on the traveling surface portion of the track;
A carriage main body suspended from the traveling part using the gap;
A detecting means that is provided on one of the traveling unit and the cart main body, and detects the reflected light while irradiating the light;
A reflection unit provided on the other of the traveling unit and the cart main body unit, and reflecting the light emitted from the detection unit to the detection unit;
The track has a mark portion that protrudes toward the gap so as to block an optical path between the detection means and the reflection means from a running surface portion at a predetermined position. The carriage further includes information reading means that is provided in either the traveling part or the carriage main body part, and that performs a reading operation using the detection of the mark part by the detection means as a trigger,
2. The information recording medium according to claim 1, wherein the track further includes an information recording medium that protrudes toward the gap from a traveling surface portion at a position near the mark portion to a position where the information reading unit can read. Tracked bogie system.   The carriage further comprises travel control means for causing the carriage to travel in a predetermined travel pattern when the information recorded on the information recording medium is read by the information reading means. 2. A tracked cart system according to 2.

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