1344931 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於堆疊起重機或高架行駛車輛、地 的有軌台車等系統。 【先前技術】 有軌台車系統，已知是可利用線性感應馬達（ 使有軌台車行駛在無塵室內等。有軌台車系統是被 以高速長距離行駛有軌台車，並且停止位置的精度 用線性感應馬達（LIM )是無法解決停止位置的精 將其取代成線性同步馬達（LSM )時，則成本會增 執行上的困難。例如線性同步馬達（LSM )的控制 有可檢測出台車位於的線性感測器，但於整個長距 路徑設有線性感測器時，其成本會明顯增加許多。 【發明內容】 [發明欲解決之課題] 該發明的課題是以單純的系統就能夠使有軌台 長距離、高速、高精度搬運。該發明中追加的課題 接觸從固定側供電至台車的線性感應馬達（LIM ) 線圈，藉此防止灰塵產生使有軌台車系統成爲更加 系統。於該發明中追加的課題是使用台車的線性同 (LSM )的磁鐵列本身，就能夠在停止點附近開始 步馬達（LSM )的同步控制。該發明中追加的課題 上行駛 LIM ) 要求能 高。使 度，若 加造成 是需要 離行駛 車達到 是以非 的一次 潔淨的 步馬達 線性同 是可使 -4- (2) (2)1344931 有軌台車正確並且以高加減速停止在停止點。該發明中 追加的課題是可提供有軌台車和固定側設備的具體性配 置。 [用以解決課題之手段] 該發明的有軌台車系統是一種可使有軌台車沿著行車 軌道行駛的系統，其特徵爲，於固定側將線性感應馬達的 二次導體配置在停止點間的同時，將線性同步馬達的一次 線圏設置在停止點附近，在有軌台車設有線性同步馬達的 磁鐵列和線性感應馬達的一次線圈，又於固定側設有可算 出相對於停止點的有軌台車位置，以控制線性同步馬達用 的同步馬達控制手段。 最好是於固定側設有以非接觸對有軌台車供應電源用 的供電軌道之同時，在有軌台車設有以非接觸從上述供電 軌道接收電源用的電源接收手段。 最好是在停止點附近於固定側設有可磁性檢測出有軌 台車線性同步馬達磁鐵列上磁鐵位置的磁性感測器，根據 所算出的磁鐵位置，以同步馬達控制手段對線性同步馬達 的一次線圈進行控制。 最好是於有軌台車設有控制線性感應馬達用的感應馬 達控制手段’同時在停止點附近，由上述感應馬達控制手 段控制線性感應馬達，並且由同步馬達控制手段控制線性 同步馬達，利用線性感應馬達和線性同步馬達雙方使有軌 台車加減速’並且從上述停止點起在指定距離內使線性感 -5- (3) (3)1344931 應馬達停止，只由線性同步馬達使有軌台車停止在停止點 〇 最好是於固定側設有左右一對的行車軌道，同時在該 左右的行車軌道間將線性感應馬達的二次導體和線性同步 馬達的一次線圏左右方向位置錯開形成配置，有軌台車設 有左右的行車輪以左右的行車軌道支撐的同時，設有被支 撐在左右任一行車軌道側面的導輥，將有軌台車定位在左 右方向，並且在左右的行車輪間配置有線性感應馬達的一 次線圈和線性同步馬達的磁鐵列。 [發明效果] 該發明的有軌台車系統是以線性同步馬達執行有軌台 車停止在停止點的停止，因此能夠使有軌台車正確停止在 停止點。此外，停止點間是以線性感應馬達保持著有軌台 車的速度行駛，因此例如於停止點間不必設置線性同步馬 達的一次線圈。線性感應馬達是將一次線圈設置在有軌台 車，因此即使是行車距離長的狀況只要於固定側設有鋁板 等二次導體即可。因此，整體而言，能以高速行駛，並且 能以高精度停止在停止點之無塵潔淨的系統是可單純地設 置。此外，於停電時等，即使有軌台車的現在位置不明， 但利用線性感應馬達就能夠重新開始行駛有軌台車。 在固定側設有能以非接觸供電至有軌台車的供給軌道 ，同時在有軌台車設有能以非接觸從上述供電軌道接收電 源的電源接收手段時，就能夠防止來自於供電部的灰塵， -6- (4) 1344931 能夠形成爲更加潔淨的系統。 此外，在停止點附近於固定側設有能以磁性檢測出有 軌台車線性同步馬達磁鐵列上磁鐵位置的磁性感測器，根 據所算出的磁鐵位置，以同步馬達手段控制線性同步馬達 的一次線圈時，利用線性同步馬達的磁鐵列本身是可檢測 出磁鐵的位置，因此就能夠控制線性同步馬達。 再加上，在有軌台車設有控制線性感應馬達用的感應 | 馬達控制手段，同時在停止點附近，由上述感應馬達控制 手段控制線性感應馬達，並且由同步馬達控制手段控制線 性同步馬達，利用線性感應馬達和線性同步馬達雙方使有 . 軌台車加減速，並且從上述停止點起在指定距離內使線性 • 感應馬達停止，只由線性同步馬達使有軌台車停止在停止 點時，能夠以比單只靠線性同步馬達輸出還大的加減速度 使有軌台車加減速。此外，停止位置的精度是由線性同步 馬達來決定，因此能夠使有軌台車正確停止在停止點。 φ 在固定側設有左右一對的行車軌道，於該左右的行車 軌道間將線性感應馬達的二次導體和線性同步馬達的一次 線圈左右方向位置錯開形成配置，於有軌台車設有左右的 行車輪以左右的行車軌道支撐的同時，設有左右任一行車 軌道側面所支撐的導輕，將有軌台車定位在左右方向，並 且於左右的行車輪間配置線性感應馬達的一次線圈和線性 同步馬達的磁鐵列時，來自於線性同步馬達或線性感應馬 達運作在有軌台車朝左右方向的力矩是由導輥支撐著，因 此能夠保持有軌台車的左右方向位置。接著，線性同步馬 (5) 1344931 達或，線f生感應馬達是可盡量配置在接近有軌台車的左右方 向中心位置的位置’因此能夠使來自於該等作用在有勒台 車上的力矩變小° 【實施方式】 [發明之最佳實施形態] 以下，是表示本發明實施用的最佳實施例。 [實施例] 第1圖至第8圖是圖不實施例和其變形例。圖中》圖號 / 2爲有軌台車系統’於此是指無塵室內對收容有複數片液 • 晶基板的匣盒進行搬運的系統。圖號4、5爲行車軌道，圖 號6爲非接觸供給用的供電軌道，圖號8爲線性感應馬達（ LIM )的二次導體，圖號10爲線性同步馬達（LSM )的一 次線圈。圖號1 2爲ABS線性感測器，可檢驗出相對於停 φ 靠站14停止位置的堆疊起重機20絕對位置，圖號16爲控制 部，可控制有軌台車系統2的全體。此外，圖號1 8爲停靠 站控制部，是利用ABS線性感測器12等的訊號，對線性 同步馬達的一次線圈1 0進行控制。 圖號20爲堆疊起重機，圖號22爲昇降台，是沿著桅桿 24昇降，利用滑行叉等移載手段26，對收容有液晶基板的 匣盒28進行移載。圖號30爲機上的起重機控制部。於停靠 站14、14間設有未圖示的存放架，也可在存放架的棚保管 著匣盒28。 -8 - (6) (6)1344931 於此有軌台車雖是圖示著堆疊起重機20，但也可將其 取代成採用高架行駛車輛，或其他地上行駛的有軌台車等 。此外’行車軌道4、5的全長例如爲1〇〇〜5〇〇m程度，堆 疊起重機20的常態穩定行駛速度例如爲分速1〇〇〜3 〇〇m程 度。於此圖示著於行車軌道4、5的左右兩端設有—對停靠 站14' 14的例子，但停靠站14的數量是可爲任意的數量。 停靠站14是指堆疊起重機20載置物品時停靠的場所，可以 是處理裝置或檢查裝置等的載置埠，或可以是移載往其他 搬運裝置時的移載點等。線性同步馬達的一次線圈1 〇是針 對每個停靠站14設置在其附近，於第1圖的停靠站14、14 間配置有存放架等的狀況時，對應存放架的各棚設有一次 線圏10。二次導體8於此是設置在堆疊起重機2 0的整個行 駛路徑全長’但在停靠站1 4附近也可只利用線性同步馬達 而不設有二次導體8。再加上，停靠站14的ABS線性感測 器12行駛方向中心是成爲堆疊起重機20的目標停止位置， 即是成爲停止點。 如第2圖等所示，沿著一方的行車軌道4設有通訊軌道 32。此外，非接觸供電用的供電軌道6，例如是配置在行 車軌道4、5的左右方向外側。相對於此二次導體8或一次 線圈1 〇，是於行車軌道4、5間錯開左右方向的位置形成配 置。另外，例如是針對每個一次線圈1 0設置磁鐵位置感測 器34，構成可檢測出被設置在堆疊起重機20的磁鐵列48上 的各個磁鐵位置。磁鐵位置感測器34例如是形成爲下述等 構成：將線圈沿著複數個行駛方向形成配置，利用流動在 -9- (7) (7)1344931 線圈的電流是根據與磁鐵列4 8的磁鐵之間的位置關係產生 變化來檢測出磁鐵位置。或也可利用霍爾元件等來檢測出 磁鐵列48的磁鐵。ABS線性感測器12是從停止位置開始在 指定範圍內檢測出堆疊起重機20的位置，對一次線圈10進 行控制的伺服機構36是採用磁鐵位置感測器34的訊號直到 能夠利用線性感測器1 2的絕對位置訊號P爲止，在能夠利 用線性感測器1 2的訊號P時，依據訊號對一次線圈1 0進行 控制。 如第3圖等所示，於堆疊起重機20的台車40設有前後 左右的行車輪44，由行車軌道4、5支撐著堆疊起重機20的 重量。因是在行車軌道4側配置有通訊軌道32，所以是利 用行車軌道5的左右兩側面來引導台車40，由導輥46引導 台車40的左右方向位置。此外，於左右的行車輪間設有線 性感應馬達的一次線圏42，同時設有線性同步馬達的磁鐵 列48。磁鐵列48在此是永久磁鐵列，但也可採用電磁鐵列 。圖號50爲被檢測板，是採用可沿著行駛方向產生形狀變 化的磁性體板，或是採用已搭載有永久磁鐵列的板狀體等 ，以做爲線性感測器1 2檢測出相對於停靠站停止位置的台 車4〇絕對位置用。例如線性感測器1 2的檢測範圍，是針對 目標停止位置在±5 00mm程度範圍內。圖號52爲非接觸式 電源接收部，接收來自於供電軌道6的非接觸供電，利用 電源PW使一次線圈42或昇降台、移載手段等動作。另， 供電軌道6中的供電線也可兼爲通訊線使用。圖號54爲編 碼器，是做爲檢測行車輪44的旋轉數，算出相對於目標停 -10- (8) (8)1344931 止位置的槪算現在位置用。圖號56爲通訊部’是以非接觸 進行通訊軌道32上所設置的複數通訊線之間的無線通訊。 第4圖中圖示著相對於台車4〇的固定側設備的配置。 在左右的行車軌道4、5的外側配置著供電軌道ό和ABS線 性感測器1 2，在行車軌道4、5之間設有二次導體8和一次 線圈10。由於二次導體8和一次線圏10 —起配置在台車40 的左右方向中心部是有困難，因此就會有來自於線性问步 馬達或線性感應馬達使有軌台車40朝左右方向旋轉的力矩 運作。爲了使該力矩變小，將二次導體8或—次線圈10相 對於台車40配置在左右方向中心部附近。接著’以行車軌 道5左右側面支撐著左右導輥46、46來抵消該力矩。其次 ，行車軌道4是兼作爲通訊軌道32的支撐用，於通訊軌道 32的上部設有通訊部56，以進行有軌台車系統控制部等之 間的通訊。 第5圖中圖示著ABS線性感測器I2的構造，被檢測板 5 〇例如是形成爲沿著行駛方向配列有複數個永久磁鐵60〜 63，該等永久磁鐵60〜63的每1個永久磁鐵彼此極性反轉 形成配置。於線性感測器1 2沿著行駛方向配置有複數個線 圈，利用各線圈66的阻抗是根據與永久磁鐵60〜63之間的 位置關係產生變化，藉此檢測出相對於目標停止位置的絕 對位置。當堆疊起重機20的目標停止位置精度例如爲土 lmm程度時，線性感測器12只要以精度0.1mm程度檢測出 絕對位置即可。線性感測器1 2能夠以永久磁鐵60〜63的尺 寸1/256〜1/1 〇〇〇程度誤差來檢測出絕對位置，因此例如 -11 - (9) 1344931 將行駛方向長度爲20〜100mm程度的永久磁鐵沿著 方向配置時，能夠檢測出堆疊起重機20在目標停止位 側5 00mm的絕對位置。圖號64爲磁屏蔽，是使用鋁 等導體，目的是要阻斷來自於一次線圈1〇、4 2等的磁 響。 第2圖中只圖示著磁鐵位置感測器34的位置並未 其構造，但其構造例如可形成爲和線性感測器1 2相同 如是對磁鐵列48成相向地將檢測用的線圈複數個沿著 方向配置，利用線圏的阻抗是根據與磁鐵列的各個磁 間的位置關係產生變化來檢測出磁鐵位置。該狀況下 在磁鐵列4 8各個磁鐵的尺寸較大，並且來自於附近的 線圏1 〇等的磁性干擾較大，所以檢測精度例如就场 1mm程度。因此，當堆疊起重機20停止在停靠站時 止精度即使低但還是可接受的狀況下，可利用磁鐵位 測器34來進行全停止控制，不需要線性感測器：2。此 以磁鐵位置感測器34是可簡便檢測出相對於一次線圈 磁鐵列上的磁鐵位置，針對磁鐵位置使流往一次線圈 電流成爲同步地控制線性同步馬達。 第6圖中圖示著實施例中對目標停止位置的停止 。堆疊起重機在停靠站以外的區間是由線性感應馬達 成以一定速度行駛，於接近停靠站時例如從l〇m附近 使用線性感應馬達和線性同步馬達雙方進行減速控制 可控制線性感應馬達的起重機控制部賦予有相對於編 所算出位置的速度目標模式’將線性感應馬達反饋控 行駛 置兩 或銅 場影 圖示 。例 行駛 鐵之 ，因 —次 匕爲土 的停 置感 外， 10的 10的 控制 控制 開始 。於 碼器 制成 -12- (10) (10)1344931 可消除來自於目標模式的速度差。針對線性同步馬達是以 磁鐵位置感測器檢測出磁鐵列上的磁鐵位置’以伺服機構 36控制一次線圈（使其同步於磁鐵位置藉此達到減速。其 結果，使用2個馬達即線性感應馬達和線性同步馬達，能 以大的減速度從常態穩定行駛速度減速成分速1〇〜50m程 度的速度。 當減速達到該程度時，堆疊起重機就進入可由 ABS 線性感測器檢測出絕對位置的範圍，於此使線性感應馬達 慢慢停止的同時，將線性同步馬達的控制從磁鐵位置感測 器轉換成來自於ABS線性感測器的全閉控制，使堆疊起 重機在目標位置停止。該等結果，使堆疊起重機能夠從常 態穩定行駛速度以短時間減速成停止，並且停止精度是由 AB S線性感測器和線性同步馬達決定，因此例如是能夠以 ±lmm程度的精度停止在目標位置。 堆疊起重機從停靠站起動出發時，例如利用線性同步 馬達和線性感應馬達雙方以大的加速度起動，在沒有線性 同步馬達一次線圈的區間，只利用線性感應馬達，在停靠 站間對線性感應馬達進行驅動使堆疊起重機以一定速度行 駿。 實施例是可獲得下述效果：（1 )只要在停靠站1 4附 近設有線性同步馬達的一次線圈1 0及線性感測器1 2即可。 (2)可提高停止或起動出發時的加減速度，並且停止精 度高，再加上能以定速行駛在停靠站間。（3 )由於是進 行非接觸供電因此灰塵少，此外可將經由非接觸供電所獲 -13- (11) (11)1344931 得的電力利用在線性感應馬達或昇降台 '移載手段的動作 等。（4 )由於是以磁鐵位置感測器檢測出堆疊起重機上 設置的磁鐵列來使線性同步馬達動作，因此能夠使線性感 測器1 2的配置範圍變小。（5 )能夠使來自於線性感應馬 達或線性同步馬達運作在堆疊起重機上的旋轉力盡量變小 ，並且可由導輥針對該等旋轉力來保持著堆疊起重機的左 右方向位置。 第7圖中圖示著堆疊起重機的變形例，例如桅桿24高 度爲30m以上時，設有上部軌道70和上部台車72，停靠站 附近是於上述軌道7 0設有線性同步馬達的一次線圈74或 ABS線性感測器、磁鐵位置感測器。於上部台車72設荀線 性同步馬達的磁鐵列，例如不設有線性感應馬達。如此一 來，就能夠使上下台車40、72的連結線保持成垂直狀態下 的停止或起動變容易，能夠使堆疊起重機停止時的上部台 車72的振盪變小。除此之外雖然還殘留有以上下台車40、 72爲節形成的振盪模式，但該振盪是較容易衰減。因此即 使是機身高的堆疊起重機，還是能夠使停止後振盪逐漸衰 減至移載物品時的等待時間變短。 第8圖是表示可使來自於線性感應馬達或線性同步馬 達的磁性干擾變小的AB S線性感測器變形例。在此是以 鋁或銅等導體屏蔽76來圍住線圈66，與永久磁鐵60等形成 相向。在停靠站附近堆疊起重機的速度是較低，從線圈66 方向看永久磁鐵60幾乎是停止不動。因此線圈66和永久磁 鐵60之間即使存在著導體屏蔽76，但線圈66和永久磁鐵60 -14 - (12) (12)1344931 是可通過導體屏蔽7 6形成磁性結合’線圈6 6能以例如磁鐵 尺寸1/256或1 /1 02 4等分解能檢測出永久磁鐵60的位置。 相對於此來自於線性馬達一次線圈的磁場是被屏蔽在導體 屏蔽7 6形成渦流不會影響到線圈6 6。 【圖式簡單說明】 第1圖爲實施例有軌台車系統平面圖。 第2圖爲表示實施例中停靠站附近的固定側設備配置 平面圖。 第3圖爲實施例中有軌台車即堆疊起重機的底面圖。 第4圖實施例中停靠站附近的堆疊起重機和固定側設 備的正面圖。 第5圖爲實施例中ABS線性感測器和被檢測板的平剖 圖。 第6圖爲表示實施例中堆疊起重機往停靠站停靠時的 停止控制圖。 第7圖爲實施例有軌台車系統的要部側面圖。 第8圖爲變形例ABS線性感測器和被檢測板的平剖圖 【主要兀件符號說明】 2 :有軌台車系統 4、5 :行車軌道 6 :供電軌道 -15- (13) (13)1344931 8 :二次導體 1 〇 : —次線圈 12 : ABS線性感測器 14 :停靠站 1 6 :控制部 1 8 :停靠站控制部 20 :堆疊起重機 22 :昇降台 2 4 :桅桿 26 :移載手段 28 :匣盒 3 〇 :起重機控制部 3 2 :通訊軌道 34 =磁鐵位置感測器 3 6 :伺服機構 40 :台車 4 2 :—次線圏 4 4 :行車輪 46 :導輥 4 8 :磁鐵列 5 〇 :被檢測板 52 :非接觸式電源接收部 5 4 :編碼器 56 :通訊部 -16- (14) (14)1344931 60〜63 :永久磁鐵 64 :磁屏蔽 66 :線圈 70 :上部軌道 72 :上部台車 74 :—次線圏 76 :導體屏蔽 C :控制訊號 T :通訊資料 enc:編碼器資料 PW :電源 P =絕對位置訊號1344931 (1) EMBODIMENT OF THE INVENTION [Technical Field] The present invention relates to a stacking crane or an overhead traveling vehicle, a railroad trolley, and the like. [Prior Art] A rail-type trolley system is known to be capable of using a linear induction motor (to make a railcar drive in a clean room, etc. The railcar system is used to drive a railcar at a high speed and long distance, and the accuracy of the stop position is used. When the linear induction motor (LIM) is unable to solve the stop position and replace it with a linear synchronous motor (LSM), the cost will increase. For example, the linear synchronous motor (LSM) control can detect that the trolley is located. The line sensor is used, but when the line sensor is provided over the long distance path, the cost thereof is significantly increased. [Explanation] [The subject of the invention] The subject of the invention is to enable a track by a simple system. The long distance, high speed, and high-precision transport of the platform. The additional problem in the invention is to contact the linear induction motor (LIM) coil that is supplied from the fixed side to the trolley, thereby preventing the generation of dust and making the railcar system more systematic. The additional problem is to start the synchronous control of the step motor (LSM) near the stop point by using the linear (LSM) magnet train itself of the trolley. . LIM with the subject invention additionally) requirements can be high. If the degree is increased, it is necessary to get off the vehicle. The motor is linear. The linear motor is the same as the -4- (2) (2) 1344493 rail trolley and stops at the stop point with high acceleration and deceleration. An additional problem in the invention is to provide a specific configuration of the railcar and the fixed side equipment. [Means for Solving the Problem] The railroad car system of the present invention is a system for driving a railcar along a roadway, characterized in that the secondary conductor of the linear induction motor is disposed between the stop points on the fixed side. At the same time, the primary winding of the linear synchronous motor is arranged near the stopping point, the magnet train of the linear synchronous motor and the primary coil of the linear induction motor are arranged on the rail trolley, and the fixed side is provided with the calculation of the stop point. Rail trolley position to control synchronous motor control for linear synchronous motors. Preferably, the power supply rail for supplying power to the railroad trolley is provided on the fixed side, and the railroad trolley is provided with a power receiving means for receiving power from the power supply rail in a non-contact manner. Preferably, a magnetic sensor capable of magnetically detecting the position of the magnet on the linear synchronous motor magnet train of the trolley is provided on the fixed side near the stop point, and the synchronous motor control means is applied to the linear synchronous motor according to the calculated magnet position. The primary coil is controlled. Preferably, the railcar is provided with an induction motor control means for controlling the linear induction motor 'at the same time near the stop point, the linear induction motor is controlled by the above-mentioned induction motor control means, and the linear synchronous motor is controlled by the synchronous motor control means, using linearity Both the induction motor and the linear synchronous motor make the railcar accelerate and decelerate' and make the line sexy within a specified distance from the above stop point. -5 (3) (3) 1344493 The motor should be stopped, and the linear synchronous motor only makes the trolley. Stopping at the stop point, it is preferable to provide a pair of left and right lanes on the fixed side, and to dislocate the secondary conductor of the linear induction motor and the linear sync motor in the left and right direction between the left and right lanes. The railcar is provided with left and right row wheels supported by the left and right road tracks, and is provided with guide rollers supported on the sides of any of the left and right lanes, positioning the railcars in the left and right direction, and between the left and right rows of wheels A primary coil of a linear induction motor and a magnet array of a linear synchronous motor. [Effect of the Invention] The railroad car system of the present invention performs the stop of the railroad car stop at the stop point by the linear synchronous motor, so that the railcar can be correctly stopped at the stop point. Further, the stop point is driven by the linear induction motor at the speed of the railcar, so that it is not necessary to provide a primary coil of the linear synchronous motor, for example, between the stop points. Since the linear induction motor is provided with a primary coil in a railcar, even if the distance is long, a secondary conductor such as an aluminum plate may be provided on the fixed side. Therefore, as a whole, a system that can travel at a high speed and can be cleaned at a stop point with high precision can be simply set. In addition, in the event of a power outage, even if the current position of the railcar is unknown, the linear induction motor can restart the railcar. A supply rail capable of supplying power to the railcar in a non-contact manner is provided on the fixed side, and when the railcar is provided with a power receiving means capable of receiving power from the power supply rail in a non-contact manner, dust from the power supply portion can be prevented , -6- (4) 1344931 can be formed into a cleaner system. Further, a magnetic sensor capable of magnetically detecting the position of the magnet on the linear synchronous motor magnet train of the railroad trolley is provided on the fixed side near the stop point, and the linear synchronous motor is controlled by the synchronous motor means according to the calculated magnet position. In the case of a primary coil, the magnet array using the linear synchronous motor itself can detect the position of the magnet, so that the linear synchronous motor can be controlled. In addition, the railcar is provided with an induction motor control means for controlling the linear induction motor, and at the same time, near the stop point, the linear induction motor is controlled by the above-mentioned induction motor control means, and the linear synchronous motor is controlled by the synchronous motor control means. The linear induction motor and the linear synchronous motor are used to accelerate and decelerate the railcar, and the linear induction motor is stopped within a specified distance from the above stop point, and only when the linear synchronous motor stops the railcar at the stop point, The railcar is accelerated and decelerated by a larger acceleration/deceleration than the linear synchronous motor output alone. In addition, the accuracy of the stop position is determined by the linear synchronous motor, so that the rail car can be stopped at the stop point correctly. φ A pair of left and right lanes are provided on the fixed side, and the secondary conductor of the linear induction motor and the primary coil of the linear synchronous motor are arranged in a left-right direction between the left and right lanes, and are arranged on the railroad car. While the traveling wheel is supported by the left and right running rails, the guiding light supported by the side of any left and right driving rails is provided, the railing trolley is positioned in the left and right direction, and the primary coil and the linearity of the linear induction motor are arranged between the left and right rows of wheels. When the magnet row of the motor is synchronized, the torque from the linear synchronous motor or the linear induction motor operating in the left-right direction of the railcar is supported by the guide roller, so that the position of the railcar in the left-right direction can be maintained. Then, the linear synchronous horse (5) 1344931 reaches or the line f-sense induction motor can be placed as close as possible to the center position of the railroad car in the left-right direction. Therefore, the torque from the action on the trolley can be changed. [Embodiment] [Best Embodiment of the Invention] Hereinafter, a preferred embodiment for carrying out the invention will be described. [Embodiment] Figs. 1 to 8 are diagrams showing an embodiment and a modification thereof. In the figure, the figure number / 2 is a rail car system. This refers to a system in which a cassette containing a plurality of liquid crystal substrates is transported in a clean room. Figure 4 and Figure 5 show the track of the vehicle, Figure 6 shows the power supply track for non-contact supply, Figure 8 shows the secondary conductor of the linear induction motor (LIM), and Figure 10 shows the primary winding of the linear synchronous motor (LSM). The figure No. 1 2 is an ABS line sensor which can check the absolute position of the stacking crane 20 with respect to the stop position of the stop φ station 14, and the figure 16 is the control unit, and can control the entirety of the rail system 2 . Further, reference numeral 18 is a stop station control unit that controls the primary coil 10 of the linear synchronous motor by using a signal such as the ABS line sensor 12 or the like. Fig. 20 is a stacking crane, and Fig. 22 is a lifting table, which is moved up and down along the mast 24, and the cassette 28 containing the liquid crystal substrate is transferred by a transfer means 26 such as a sliding fork. Figure 30 is the crane control unit on board. A storage rack (not shown) is provided between the docking stations 14 and 14, and the cassette 28 can be stored in the storage rack. -8 - (6) (6) 1349331 Although the stacking crane 20 is shown in the railroad car, it can be replaced by an overhead traveling vehicle or other railcars that travel on the ground. Further, the total length of the traveling rails 4, 5 is, for example, about 1 〇〇 to 5 〇〇m, and the normal steady traveling speed of the stacking crane 20 is, for example, a speed of 1 〇〇 to 3 〇〇m. Here, an example in which the parking stations 14' 14 are provided at the left and right ends of the traveling rails 4, 5 is shown, but the number of the docking stations 14 can be any number. The docking station 14 is a place where the stacking crane 20 is parked when the article is placed, and may be a loading device such as a processing device or an inspection device, or may be a transfer point when transferring to another transport device. The primary coil 1 线性 of the linear synchronous motor is disposed in the vicinity of each of the docking stations 14 , and when the storage racks are disposed between the docking stations 14 and 14 in FIG. 1 , the sheds of the corresponding storage racks are provided with a primary line.圏10. The secondary conductor 8 is here provided for the entire length of the entire traveling path of the stacking crane 20, but it is also possible to use only the linear synchronous motor and the secondary conductor 8 in the vicinity of the docking station 14. Further, the center of the traveling direction of the ABS line sensor 12 of the docking station 14 is the target stopping position of the stacking crane 20, that is, it becomes a stopping point. As shown in Fig. 2 and the like, a communication track 32 is provided along one of the traveling tracks 4. Further, the power supply rail 6 for contactless power supply is disposed, for example, on the outer side in the left-right direction of the traveling rails 4, 5. The secondary conductor 8 or the primary coil 1 相对 is arranged at a position shifted in the left-right direction between the traveling rails 4 and 5. Further, for example, a magnet position sensor 34 is provided for each of the primary coils 10, and each of the magnet positions provided on the magnet array 48 of the stacking crane 20 can be detected. The magnet position sensor 34 is configured, for example, in such a manner that the coil is arranged along a plurality of traveling directions, and the current flowing through the coil of -9-(7) (7) 1344493 is based on the column with the magnet column 48. The positional relationship between the magnets changes to detect the position of the magnet. Alternatively, the magnet of the magnet array 48 may be detected by a Hall element or the like. The ABS line sensor 12 detects the position of the stacking crane 20 within a specified range from the stop position, and the servo mechanism 36 that controls the primary coil 10 uses the signal of the magnet position sensor 34 until the line sensor can be utilized. When the absolute position signal P of 1 2 is used, when the signal P of the line sensor 12 can be used, the primary coil 10 is controlled according to the signal. As shown in Fig. 3 and the like, the trolley 40 of the stacking crane 20 is provided with front and rear traveling wheels 44, and the weight of the stacking crane 20 is supported by the traveling rails 4, 5. Since the communication rail 32 is disposed on the side of the traveling rail 4, the cart 40 is guided by the left and right side faces of the traveling rail 5, and the guide roller 46 guides the position of the bogie 40 in the left-right direction. Further, a primary winding 42 of the wire should be provided between the left and right rows of wheels, and a magnet array 48 of a linear synchronous motor is provided. The magnet array 48 is here a permanent magnet array, but an electromagnet array can also be used. Fig. 50 is a detection plate, and is a magnetic plate that can change in shape along the traveling direction, or a plate-like body in which a permanent magnet array is mounted, and the like, and detects the relative position as a line sensor 12 The 4th position of the trolley at the stop position of the stop station is used. For example, the detection range of the line sensor 12 is in the range of ±500 mm for the target stop position. Reference numeral 52 denotes a non-contact power source receiving unit that receives contactless power supply from the power supply rail 6, and operates the primary coil 42, the lifting platform, the transfer means, and the like by the power source PW. In addition, the power supply line in the power supply rail 6 can also be used as a communication line. The reference numeral 54 is an encoder, and is used to detect the number of rotations of the row wheel 44, and calculates the current position of the position relative to the target stop -10- (8) (8) 1344493. Numeral 56 is the communication unit' which performs wireless communication between the plurality of communication lines provided on the communication track 32 in a non-contact manner. The configuration of the fixed side device with respect to the carriage 4〇 is illustrated in Fig. 4 . A power supply rail ό and an ABS line sensor 12 are disposed outside the left and right road tracks 4, 5, and a secondary conductor 8 and a primary coil 10 are provided between the road tracks 4, 5. Since it is difficult to arrange the secondary conductor 8 and the primary winding 10 in the center portion of the trolley 40 in the left-right direction, there is a torque from the linear motion sensor or the linear induction motor to rotate the railcar 40 in the left-right direction. Operation. In order to reduce the torque, the secondary conductor 8 or the secondary coil 10 is disposed in the vicinity of the center portion in the left-right direction with respect to the carriage 40. Then, the left and right guide rolls 46, 46 are supported by the left and right sides of the road track 5 to cancel the moment. Next, the traveling rail 4 serves as a support for the communication rail 32, and a communication portion 56 is provided on the upper portion of the communication rail 32 to perform communication between the railcar system control unit and the like. The structure of the ABS line sensor I2 is shown in Fig. 5, and the detected plate 5 is formed, for example, such that a plurality of permanent magnets 60 to 63 are arranged along the traveling direction, and each of the permanent magnets 60 to 63 is arranged. The permanent magnets are reversed in polarity to form a configuration. The line sensor 1 2 has a plurality of coils arranged along the traveling direction, and the impedance of each coil 66 is changed in accordance with the positional relationship with the permanent magnets 60 to 63, thereby detecting the absolute position with respect to the target stop position. position. When the target stop position accuracy of the stacking crane 20 is, for example, about 1 mm, the line sensor 12 can detect the absolute position with an accuracy of 0.1 mm. The line sensor 1 2 can detect the absolute position with a size of 1/256 to 1/1 永久 of the permanent magnets 60 to 63, so for example, -11 - (9) 1344931 will have a running direction length of 20 to 100 mm. When the permanent magnet of the degree is arranged along the direction, the absolute position of the stacking crane 20 on the target stop side of 500 mm can be detected. Figure 64 is a magnetic shield using a conductor such as aluminum to block the magnetic current from the primary coils 1〇, 4 2, and so on. In the second drawing, only the position of the magnet position sensor 34 is not shown. However, the configuration may be formed, for example, in the same manner as the line sensor 12, as in the case where the magnet array 48 is opposed to each other. Arranged along the direction, the impedance of the coil is detected by changing the positional relationship between the respective magnets of the magnet array to detect the position of the magnet. In this case, the size of each of the magnets in the magnet array 48 is large, and the magnetic interference from the nearby coil 1 or the like is large, so the detection accuracy is, for example, about 1 mm. Therefore, when the stacking crane 20 is stopped at the docking station, the accuracy is low, but it is acceptable, the magnet position detector 34 can be used for the full stop control, and the line sensor is not required: 2. The magnet position sensor 34 can easily detect the position of the magnet on the magnet array of the primary coil, and control the linear synchronous motor so that the current flowing to the primary coil is synchronized with respect to the position of the magnet. The stop of the target stop position in the embodiment is illustrated in Fig. 6. The stacking crane is driven by a linear induction motor at a certain speed outside the docking station. When approaching the docking station, for example, a linear induction motor and a linear synchronous motor are used for deceleration control near the l〇m to control the crane control of the linear induction motor. The part is given a speed target mode with respect to the calculated position. The linear induction motor feedback control is set to two or copper field diagrams. For example, the driving control of the iron, because of the sense of stoppage of the soil, the control of 10 10 begins. The code is made -12- (10) (10) 1344493 to eliminate the speed difference from the target mode. For the linear synchronous motor, the position of the magnet on the magnet array is detected by the magnet position sensor. The servo coil 36 controls the primary coil (to synchronize the position of the magnet to achieve the deceleration. As a result, two motors, that is, a linear induction motor are used. And the linear synchronous motor can decelerate the speed of the component speed from 1 to 50 m from the normal steady running speed with a large deceleration. When the deceleration reaches this level, the stacking crane enters the range where the absolute position can be detected by the ABS line sensor. In this way, the linear induction motor is slowly stopped, and the control of the linear synchronous motor is converted from the magnet position sensor into a fully closed control from the ABS line sensor, so that the stack crane stops at the target position. The stacking crane can be decelerated to a stop in a short time from the normal steady traveling speed, and the stopping accuracy is determined by the AB S line sensor and the linear synchronous motor, so that, for example, it can be stopped at the target position with an accuracy of about ±1 mm. When the crane starts from the docking station, for example, using a linear synchronous motor and a linear induction horse Both sides start with a large acceleration. In the section where there is no linear synchronous motor primary coil, only the linear induction motor is used, and the linear induction motor is driven between the docking stations to make the stacking crane run at a certain speed. The embodiment can obtain the following effects. (1) The primary coil 10 and the linear sensor 1 2 of the linear synchronous motor may be provided in the vicinity of the docking station 14. (2) The acceleration/deceleration at the time of stopping or starting the starting can be improved, and the stopping accuracy is high. In addition, it can travel at a fixed speed between stops. (3) Since there is no contact power supply, there is less dust, and the electric power obtained by non-contact power supply - 13-(11) (11)1344931 can be utilized online. The action of the motor or the lifting table's transfer means, etc. (4) Since the magnet position sensor detects the magnet array provided on the stacking crane to operate the linear synchronous motor, the line sensor 1 2 can be made. The configuration range is reduced. (5) The rotational force from the linear induction motor or the linear synchronous motor operating on the stacking crane can be made as small as possible, and can be targeted by the guide roller. The rotation force is used to maintain the position of the stacking crane in the left-right direction. Fig. 7 shows a modification of the stacking crane. For example, when the height of the mast 24 is 30 m or more, the upper rail 70 and the upper trolley 72 are provided, and the vicinity of the docking station is The track 70 is provided with a primary coil 74 of an linear synchronous motor or an ABS line sensor, a magnet position sensor. The upper trolley 72 is provided with a magnet array of a linear synchronous motor, for example, a linear induction motor is not provided. It is possible to make it easier to stop or start the connection line of the upper and lower carriages 40 and 72 in a vertical state, and it is possible to reduce the oscillation of the upper carriage 72 when the stacking crane is stopped. In addition, the above-described lower vehicle 40 remains. 72 is an oscillation mode formed by the knot, but the oscillation is relatively easy to attenuate. Therefore, even a stacking crane having a high fuselage can shorten the waiting time when the oscillation after the stop is gradually attenuated to the transferred article. Fig. 8 is a view showing a modification of the AB S line sensor which can reduce the magnetic interference from the linear induction motor or the linear synchronous motor. Here, the coil 66 is surrounded by a conductor shield 76 such as aluminum or copper, and faces the permanent magnet 60 and the like. The speed at which the crane is stacked near the docking station is low, and the permanent magnet 60 is almost stopped as seen from the direction of the coil 66. Therefore, even if there is a conductor shield 76 between the coil 66 and the permanent magnet 60, the coil 66 and the permanent magnet 60 - 14 - (12) (12) 1344931 can form a magnetic bond through the conductor shield 76. Decomposition of the magnet size 1/256 or 1/1 02 4 can detect the position of the permanent magnet 60. Relative to this, the magnetic field from the linear motor primary coil is shielded from the conductor shield 76 to form a eddy current that does not affect the coil 66. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of a rail system of an embodiment. Fig. 2 is a plan view showing the arrangement of the fixed side devices in the vicinity of the docking station in the embodiment. Fig. 3 is a bottom plan view of the railing trolley, i.e., the stacking crane, in the embodiment. A front view of the stacking crane and fixed side equipment near the stop in the embodiment of Fig. 4. Fig. 5 is a plan sectional view showing the ABS line sensor and the board to be tested in the embodiment. Fig. 6 is a view showing the stop control when the stacking crane is stopped at the docking station in the embodiment. Figure 7 is a side elevational view of the main part of the rail system of the embodiment. Fig. 8 is a plan sectional view of a modified ABS line sensor and a test board [Description of main components] 2: Rail trolley system 4, 5: Driving track 6: Power supply track -15- (13) (13 1344493 8 : Secondary conductor 1 〇: - Secondary coil 12 : ABS line sensor 14 : Stop station 1 6 : Control unit 1 8 : Stop station control unit 20 : Stacking crane 22 : Lift table 2 4 : Mast 26 : Transfer method 28: cassette 3 〇: crane control unit 3 2 : communication track 34 = magnet position sensor 3 6 : servo mechanism 40 : trolley 4 2 : - secondary line 圏 4 4 : line wheel 46 : guide roller 4 8 : Magnet column 5 〇: Detected plate 52 : Non-contact power receiving unit 5 4 : Encoder 56 : Communication unit - 16 - (14) (14) 1344493 60 to 63 : Permanent magnet 64 : Magnetic shield 66 : Coil 70: Upper track 72: Upper trolley 74: - Secondary line 圏 76: Conductor shield C: Control signal T: Communication data enc: Encoder data PW: Power supply P = Absolute position signal