TWI781180B - Article transport facility and article transport vehicle - Google Patents
Article transport facility and article transport vehicle Download PDFInfo
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- TWI781180B TWI781180B TW107119648A TW107119648A TWI781180B TW I781180 B TWI781180 B TW I781180B TW 107119648 A TW107119648 A TW 107119648A TW 107119648 A TW107119648 A TW 107119648A TW I781180 B TWI781180 B TW I781180B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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Abstract
物品搬送車具備支撐物品的支撐部、使支撐部在寬度方向上移動的驅動部、前方檢測部、及控制部,驅動部是使支撐部移動到突出位置與退回位置,前述突出位置是從物品搬送車朝寬度方向突出的位置,前述退回位置是由突出位置退回至物品搬送車側的位置,控制部在前方檢測部檢測到存在於第一檢測區的對象車的情況下,是使自身車以比第一設定速度低速的第二設定速度行走,在前方檢測部檢測到存在於第二檢測區的對象支撐部的情況下,是使自身車停止。The article transfer vehicle is provided with a supporting part that supports the article, a driving part that moves the supporting part in the width direction, a front detection part, and a control part. The driving part moves the supporting part to a protruding position and a retracted position. The position where the transport vehicle protrudes in the width direction, the retracted position is a position retracted from the protruding position to the side of the article transport vehicle, and the control unit causes the own vehicle to The vehicle travels at a second set speed lower than the first set speed, and stops the own vehicle when the front detection unit detects an object support unit present in the second detection area.
Description
發明領域 本發明是有關於一種沿著軌道行走並搬送物品之物品搬送車、及、具備有該物品搬送車的物品搬送設備。Field of the Invention The present invention relates to an article conveyance vehicle that travels along a rail to convey articles, and article conveyance equipment including the article conveyance vehicle.
發明背景 日本特開2009-35403號公報(專利文獻1)中揭示有使複數台物品搬送車沿著軌道行走,並在複數個移載對象處之間搬送物品的物品搬送設備之一例。該物品搬送設備是利用被設置於天花板之軌道(100)所懸吊的物品搬送車(200),以自動的方式搬運物品(520)(在先前技術中附加括號所示的符號為專利文獻1的符號)。物品搬送車(200)具備有懸吊物品(520)的支撐部(230)。物品搬送車(200)是如專利文獻1之圖2所示,不僅以支撐部(230)位於軌道(100)的正下方的狀態使支撐部(230)升降以移載物品(520),還能夠如專利文獻1之圖3所示,在支撐部(230)位於已朝正交於軌道(100)的延伸方向之寬度方向移動後之位置的狀態下使支撐部(230)升降以移載物品(520)。Background of the Invention Japanese Unexamined Patent Application Publication No. 2009-35403 (Patent Document 1) discloses an example of an article transfer facility that travels a plurality of article transfer vehicles along rails and transfers articles between a plurality of transfer destinations. This article conveying equipment utilizes an article conveying vehicle (200) suspended by a rail (100) installed on the ceiling to automatically convey articles (520) (symbols shown in parentheses in the prior art are
發明概要 課題、用以解決課題之手段 另外,在物品搬送設備中,雖然在大多數的情況下,具有軌道並行的部分,但為了提高空間使用效率等的目的,有時會將並行的軌道之間隔狹窄地設定成行走在並行軌道上之物品搬送車不會相接觸但可錯身而過的程度。如此,在並行軌道之間隔狹窄的情況下,若在位於一邊軌道上的1台物品搬送車使上述之支撐部朝寬度方向突出的狀態下,另外的物品搬送車在另一邊的軌道上行走時,會有支撐部與該另外的物品搬送車接觸的可能性。Summary of the Invention Problems, Means to Solve the Problems In addition, in most cases, article conveyance facilities have parallel rails. However, for the purpose of improving space utilization efficiency, etc., sometimes the parallel rails are separated. The interval is set so narrowly that the article transport vehicles running on the parallel rails can pass by without touching each other. In this way, when the distance between the parallel tracks is narrow, if one article transport vehicle on one side of the track has the above-mentioned support portion protruding in the width direction, when another article transport vehicle travels on the other side of the track , there is a possibility that the support portion will come into contact with the other article transport vehicle.
有鑒於上述背景,所期望的是提供一種可以抑制與其他的物品搬送車相接觸的物品搬送車、及、具備有該物品搬送車之物品搬送設備。In view of the above-mentioned background, it is desired to provide an article transport vehicle capable of suppressing contact with other article transport vehicles, and an article transport facility including the article transport vehicle.
有鑒於上述,物品搬送設備的特徵構成在於:使複數台物品搬送車沿著軌道行走並搬送物品, 將上下方向視角下相對於前述軌道之延伸方向正交的方向設為寬度方向,前述物品搬送車具備支撐物品之支撐部、使前述支撐部在前述寬度方向上移動之驅動部、前方檢測部、及控制部,前述驅動部是使前述支撐部移動到突出位置與退回位置,前述突出位置是從前述物品搬送車朝前述寬度方向突出的位置,前述退回位置是由前述突出位置退回至前述物品搬送車側的位置, 將複數台前述物品搬送車之中的一台即自身車行走中的前述軌道設為行走中軌道,並將相對於前述行走中軌道而並行之前述軌道設為對象軌道,將前述自身車沿著前述行走中軌道行走的軌跡設為行走軌跡,並將在前述在對象軌道上行走的其他的前述物品搬送車設為對象車,將該對象車的前述支撐部設為對象支撐部, 前述前方檢測部是檢測位於第一檢測區之前述對象車,並且檢測位於第二檢測區之前述對象支撐部, 前述第一檢測區是設定成相對於前述自身車在前方側且相對於前述行走軌跡在前述寬度方向的外側,前述第二檢測區是設定成相對於前述自身車在前方側且在前述行走軌跡內, 前述控制部是執行第一控制、第二控制與第三控制,前述第一控制是在前述前方檢測部在前述第一檢測區中未檢測到前述對象車且在前述第二檢測區中未檢測到前述對象支撐部的情況下,使前述自身車以第一設定速度行走的控制,前述第二控制是在前述前方檢測部檢測到存在於前述第一檢測區的前述對象車的情況下,使前述自身車以比前述第一設定速度更低速的第二設定速度行走的控制,前述第三控制是在前述前方檢測部檢測到存在於前述第二檢測區之前述對象支撐部的情況下,使前述自身車停止的控制。In view of the above, the characteristic structure of the article conveying equipment is: make a plurality of article conveying vehicles travel along the rails and convey the articles, the direction perpendicular to the extending direction of the above-mentioned rails from the perspective of the up and down direction is defined as the width direction, and the article conveying The vehicle is equipped with a supporting part for supporting an article, a driving part for moving the supporting part in the width direction, a front detection part, and a control part. The driving part moves the supporting part to a protruding position and a retreat position. From the position where the article transport vehicle protrudes toward the width direction, the retracted position is a position retracted from the projected position to the side of the article transport vehicle, and one of the plurality of article transport vehicles, that is, the self-vehicle that is running The track is set as the running track, and the aforementioned track parallel to the aforementioned running track is set as the target track, the track of the aforementioned self-vehicle walking along the aforementioned running track is set as the running track, and the track on the aforementioned target track is set as the target track. The other aforesaid article conveying vehicle that walks up is set as the target vehicle, and the aforementioned support portion of the target vehicle is set as the target support portion, and the aforementioned front detection portion detects the aforementioned target vehicle located in the first detection area, and detects that it is located in the second detection area. In the object supporting part of the area, the first detection area is set to be on the front side with respect to the own vehicle and on the outer side in the width direction with respect to the walking track, and the second detection area is set to be at the front side with respect to the own vehicle. On the front side and within the aforementioned walking track, the aforementioned control section executes first control, second control, and third control, and the aforementioned first control is that the aforementioned target vehicle is not detected in the aforementioned first detection area by the aforementioned front detection section and In the case where the object supporting part is not detected in the second detection area, the vehicle is controlled to run at the first set speed, and the second control is to detect the presence of the object support part in the first detection area by the front detection part. In the case of the target vehicle, the vehicle is controlled to travel at a second set speed lower than the first set speed, and the third control is performed when the front detection unit detects that it is present in the second detection area. In the case of the target supporting part, control to stop the vehicle itself.
根據此構成,在對象軌道上行走的對象車之對象支撐部已進入自身車的前方側之行走軌跡的情況下,可以藉由該已進入的支撐對象部進入第二檢測區,而以前方檢測部檢測支撐對象部。並且,在前方檢測部檢測到存在於第二檢測區之對象支撐部的情況下,因為藉由控制部執行第三控制而使自身車停止,所以可以防止自身車接觸到對象支撐部之情形。 又,在對象軌道上行走的對象車存在於自身車的前方側的情況下,可以藉由該對象車進入第一檢測區,而以前方檢測部檢測該對象車。並且,前方檢測部檢測到存在於第一檢測區之對象車的情況下,控制部是執行讓自身車以比第一設定速度低速的第二設定速度來行走的第二控制。因此,因為可以在對象車使對象支撐部朝向突出位置突出而使對象支撐部進入自身車的前方側的行走軌跡的情況中,於執行第三控制使自身車停止時讓制動距離變短,所以易於防止自身車接觸到對象支撐部之情形。 如此,根據本構成,可以提供一種能夠抑制物品搬送車與其他的物品搬送車接觸的物品搬送設備。According to this configuration, when the object support portion of the object vehicle running on the object track has entered the running track on the front side of the own vehicle, it can be detected in the front by the entered support object portion entering the second detection area. The part detects the supporting object part. In addition, when the front detection unit detects the target support in the second detection area, the control unit executes the third control to stop the own vehicle, so that the own vehicle can be prevented from touching the target support. Also, when a target vehicle running on the target track exists in front of the own vehicle, the target vehicle can be detected by the front detection unit when the target vehicle enters the first detection area. In addition, when the front detection unit detects the target vehicle present in the first detection area, the control unit executes a second control for causing the own vehicle to run at a second set speed lower than the first set speed. Therefore, in the case where the target vehicle protrudes the target support portion toward the protruding position so that the target support portion enters the running track on the front side of the own vehicle, the braking distance can be shortened when the own vehicle is stopped by executing the third control. It is easy to prevent the own vehicle from coming into contact with the target support. As described above, according to this configuration, it is possible to provide an article transport facility capable of suppressing contact between the article transport vehicle and other article transport vehicles.
又,有鑒於上述的物品搬送車的特徵構成之點在於具備:行走部,沿著軌道行走;支撐部,支撐物品;收容部,收容物品;驅動部,使前述支撐部在前述寬度方向上移動;及前方檢測部, 將自身車行走中的前述軌道設為行走中軌道,將前述自身車沿著前述行走中軌道行走的軌跡設為行走軌跡,且將在上下方向視角下相對於前述軌道的延伸方向正交的方向設為寬度方向, 前述驅動部是使前述支撐部在前述寬度方向上移動到突出位置與退回位置,前述突出位置是從前述收容部朝前述寬度方向突出的位置,前述退回位置是由前述突出位置退回至前述收容部側的位置,前述前方檢測部具有第一感測器、及第二感測器,前述第一感測器是檢測第一檢測區之其他的物品搬送車即第一對象車與第二檢測區之前述第一對象車的前述支撐部的感測器,前述第二感測器是檢測第三檢測區之其他的物品搬送車即第二對象車的感測器, 前述第一檢測區是設定成相對於前述自身車在前方側且相對於前述行走軌跡在前述寬度方向的外側,前述第二檢測區是設定成相對於前述自身車在前方側且在前述行走軌跡內,前述第三檢測區是與前述第二檢測區在上下方向上不同的區,且是設定成相對於前述自身車在前方側且在前述行走軌跡內。Also, in view of the above-mentioned characteristics of the article transport vehicle, it is provided with: a running part that travels along the rail; a support part that supports the article; a storage part that stores the article; and a drive part that moves the aforementioned support part in the aforementioned width direction. ; and the front detection unit, which sets the aforementioned track in which the self-vehicle is running as the running track, sets the track of the aforementioned self-vehicle traveling along the aforementioned running track as the running track, and sets the distance relative to the aforementioned track from the perspective of the up and down direction. The direction perpendicular to the extension direction is defined as the width direction, and the aforementioned driving portion moves the aforementioned supporting portion to a protruding position and a retracted position in the aforementioned width direction, the aforementioned protruding position is a position protruding from the aforementioned receiving portion toward the aforementioned width direction, and the aforementioned retracting The position is retracted from the protruding position to the position on the side of the accommodating part. The front detection part has a first sensor and a second sensor. The first sensor is used to detect other items conveyed in the first detection area. The vehicle is the first object vehicle and the sensor of the aforementioned support portion of the aforementioned first object vehicle in the second detection zone, and the aforementioned second sensor is to detect the other object transport vehicle in the third detection zone, that is, the second object vehicle In the sensor, the first detection area is set on the front side with respect to the self-vehicle and on the outside in the width direction with respect to the walking track, and the second detection area is set on the front side with respect to the self-vehicle and In the running track, the third detection area is a vertically different area from the second detection area, and is set on the front side with respect to the own vehicle and within the running track.
根據此構成,在對象軌道上行走的對象車之對象支撐部已進入自身車的前方側之行走軌跡的情況下,可以藉由該已進入的支撐對象部進入第二檢測區,而以第一感測器檢測出支撐對象部。因此,在第一感測器檢測到存在於第二檢測區之對象支撐部的情況下,變得可進行下述對應處理:藉由使自身車停止而防止自身車接觸到對象支撐部之情形等。 又,在對象軌道上行走的第一對象車存在於自身車的前方側的情況下,可以藉由該對象車進入第一檢測區,而以第一感測器檢測該對象車。因此,在第一感測器檢測到存在於第一檢測區之對象車的情況下,變得可進行下述對應處理:使自身車預先減速,以在對象支撐部已進入行走軌跡的情況下使自身車迅速地停止等。 又,在行走中軌道上行走的先行車存在於自身車的前方側的情況下,可以藉由該先行車進入第三檢測區,而以第二感測器檢測該先行車。並且,第二感測器檢測到存在於第三檢測區之第二對象車的情況下,變得可進行下述的對應處理:使自身車停止以防止自身車接觸到第二對象車之情形等。 此外,因為可以將前方檢測部的功能分配到第一感測器與第二感測器,所以比起藉由一個感測器進行第一檢測區、第二檢測區及第三檢測區的每一個的檢測之情況,可以做到例如將各感測器的功能簡化並且提高各感測器的檢測精度。 如此,根據本構成,可以藉由比較簡易的構成提供可以抑制與其他的物品搬送車接觸的物品搬送車。According to this configuration, when the object support portion of the object vehicle running on the object track has entered the running track on the front side of the own vehicle, the entered support object portion can enter the second detection area, and the first The sensor detects the supporting target portion. Therefore, in the case where the first sensor detects the object support part present in the second detection area, it becomes possible to perform corresponding processing of preventing the own vehicle from coming into contact with the object support part by stopping the own vehicle. Wait. Also, when the first target vehicle running on the target track exists in front of the own vehicle, the target vehicle can be detected by the first sensor when the target vehicle enters the first detection area. Therefore, in the case where the first sensor detects the target vehicle existing in the first detection area, it becomes possible to perform corresponding processing: the own vehicle is decelerated in advance so that when the target support part has entered the running track, it becomes possible to perform corresponding processing: Make one's own car stop quickly. Also, when the preceding vehicle running on the track is present in front of the own vehicle, the preceding vehicle can be detected by the second sensor when the preceding vehicle enters the third detection area. And, when the second sensor detects the second object vehicle existing in the third detection area, it becomes possible to perform the following corresponding processing: the own vehicle is stopped to prevent the own vehicle from touching the second object vehicle. Wait. In addition, since the function of the front detection section can be allocated to the first sensor and the second sensor, each of the first detection area, the second detection area, and the third detection area can be performed by one sensor. In the case of one detection, for example, the functions of each sensor can be simplified and the detection accuracy of each sensor can be improved. Thus, according to this structure, the article transport vehicle which can suppress contact with other article transport vehicles can be provided with a comparatively simple structure.
用以實施發明之形態 1.實施形態 根據圖式來說明物品搬送設備的實施形態。 如圖1所示,物品搬送設備是使複數台物品搬送車2沿著軌道1行走並搬送物品W。於物品搬送設備中,在對應於處理裝置的位置上具備有支撐物品W的移載對象處P,物品搬送車2是將物品W搬送至移載對象處P,並且從移載對象處P搬送物品W。再者,在本實施形態中,物品搬送車2是將收容倍縮光罩(光罩)的倍縮光罩傳送盒(Reticle Pod)作為物品W來搬送。Modes for Carrying Out the
物品搬送車2是朝預先設定的方向行走於軌道1上。再者,在圖1中是以箭頭顯示物品搬送車2的行走方向。又,為了容易理解物品搬送車2的行走方向,而以三角形的符號來表示物品搬送車2。軌道1具備有在上下方向Z視角下設置成直線狀的直線形狀的直線部4、及在上下方向Z視角下設置成曲線狀的曲線形狀的曲線部5。如圖2及圖3所示,軌道1是藉由左右一對的軌條部3所構成。以下,將沿著軌道1的方向稱為延伸方向X,將在上下方向Z視角下相對於延伸方向X正交的方向稱為寬度方向Y來進行說明。The article transfer
如圖1所示,軌道1具有並行區間G,該並行區間G是複數個直線部4於寬度方向Y上以第一設定間隔以下且第二設定間隔以上並行的區間。在並行區間G中,是將在寬度方向Y上並排的直線部4以平行狀設置於相同高度。第一設定間隔是設定為下述的間隔:在寬度方向Y上相鄰的一對直線部4之中的一邊的直線部4(對象軌道1B)上行走的物品搬送車2(對象車2B)在使支撐部26(對象支撐部26B)突出至突出位置的情況下,使支撐部26進入在另一邊的直線部4上行走之物品搬送車2(自身車2A)的軌跡(行走軌跡T)之間隔。又,第二設定間隔是設定為下述間隔:在一邊的直線部4上行走的物品搬送車2之軌跡與在另一邊的直線部4上行走的物品搬送車2的軌跡不重疊的間隔。As shown in FIG. 1 , the
其次,針對物品搬送車2進行說明。再者,在說明物品搬送車2時,將物品搬送車2行走的方向稱為前方側,將其相反側稱為後方側來進行說明。順帶一提,例如在物品搬送車2於軌道1的直線部4上行走的情況下,物品搬送車2的前後方向與軌道1的延伸方向X是成為相同的方向,物品搬送車2的左右方向與軌道1的寬度方向Y是成為相同的方向。Next, the
如圖2至圖4所示,物品搬送車2具備有在從天花板所懸吊支撐的軌道1上沿著該軌道1行走的行走部6、及位於軌道1的下方而被行走部6所懸吊支撐的本體部7。再者,圖2是沿著延伸方向X從前方朝向後方觀看物品搬送車2的前視圖,圖3是沿著延伸方向X從後方朝向前方觀看物品搬送車2的後視圖。又,圖4是沿著寬度方向Y觀看物品搬送車2的側視圖。As shown in FIGS. 2 to 4 , the
如圖4所示,行走部6具備有電動式的行走用馬達9、及被該行走用馬達9所旋轉驅動之左右一對的行走輪10。該左右一對的行走輪10是在軌道1(左右一對的軌條部3)的上表面滾動。又,如圖2及圖3所示,行走部6具備有以繞著沿上下方向Z的上下軸心的方式旋轉自如的左右一對的引導輪11。該左右一對的引導輪11是位於左右一對軌條部3之間,且在左右一對的軌條部3的相互相向的側面上滾動。行走部6是藉由引導輪11被一對軌條部3所引導,而使寬度方向Y上的位置受到限制,且藉由行走輪10被行走用馬達9所旋轉驅動,而沿著軌道1行走。As shown in FIG. 4 , the running
如圖2至圖4所示,本體部7具備有:支撐機構13,支撐物品W;升降操作機構14,支撐支撐機構13並且使支撐機構13升降移動;滑動操作機構15,使升降操作機構14移動至退回位置(參照圖2)及突出位置(參照圖3),其中該退回位置是行走部6的正下方的位置,該突出位置是從該退回位置朝左右方向移動後的位置;及蓋體16,在使支撐機構13位於上升高度且使升降操作機構14位於退回位置的狀態下,於支撐機構13所支撐的物品W之上方及前後方向X遮蓋。As shown in Figures 2 to 4, the
如圖3所示,支撐機構13具備有:升降體18,與傳送帶21的前端部連結;支撐爪19,姿勢變更自如成把持物品W的姿勢與解除對物品W之把持的姿勢;及支撐用馬達20(參照圖5),使支撐爪19變更姿勢。 升降操作機構14具備有捲繞有傳送帶21之捲繞體22、及旋轉驅動捲繞體22之升降用馬達23。升降操作機構14是藉由升降用馬達23的驅動而使捲繞體22旋轉,藉此使支撐機構13升降到上升高度、與比該上升高度低的下降高度。 滑動操作機構15具備有:滑動體24,支撐升降操作機構14並且在寬度方向Y上移動自如;及滑動用馬達25(參照圖5),使滑動體24相對於行走部6在寬度方向Y上移動。滑動操作機構15是藉由滑動用馬達25的驅動而使滑動體24在寬度方向Y上移動,藉此使滑動體24、升降操作機構14及支撐機構13移動到突出位置及退回位置,其中該突出位置是從物品搬送車2的蓋體16朝寬度方向Y突出的位置(參照圖3),該退回位置是由突出位置退回至物品搬送車2之蓋體16側的位置(參照圖2)。 再者,在物品搬送車2行走的情況下,支撐機構13是位於上升高度且位於退回位置。As shown in FIG. 3 , the
物品搬送車2,在對位於軌道1的正下方的移載對象處P進行搬送的情況下,是在使行走部6行走至對應於該移載對象處P的設定位置的狀態下,藉由升降操作機構14使支撐機構13從上升高度下降,並將物品W卸下至移載對象處P之後,藉由支撐機構13解除對物品W的把持。 移載對象處P除了設置於軌道1的正下方的情況以外,也有如圖1所示,從上下方向Z觀看相對於軌道1設定於在軌道1的寬度方向Y上錯開的位置上的情況。物品搬送車2在對像這樣在相對於軌道1的正下方於寬度方向Y上錯開之位置的移載對象處P進行搬送時,是在使行走部6行走至對應於該移載對象處P之設定位置的狀態下,如圖3所示,藉由滑動操作機構15使升降操作機構14突出至突出位置後,藉由升降操作機構14使支撐機構13從上升高度下降,並將物品W卸下至移載對象處P,之後,藉由支撐機構13解除對物品W的把持。再者,滑動體24、升降操作機構14及支撐機構13相當於支撐物品W的支撐部26,蓋體16相當於收容物品W的收容部。又,滑動用馬達25相當於使支撐部26在寬度方向Y上移動的驅動部。When the
物品搬送車2具備有前方檢測部S、反射體M及控制部H。其次,針對前方檢測部S、反射體M及控制部H進行說明。再者,如圖10及圖11所示,將物品搬送車2之一即自身車2A行走中的軌道1設為行走中軌道1A,並將相對於行走中軌道1A在寬度方向Y上並排而配置之軌道1設為對象軌道1B。又,將在對象軌道1B上行走的其他的物品搬送車2設為對象車2B(第一對象車),並將該對象車2B的支撐部26設為對象支撐部26B來進行說明。又,如圖9所示,將在行走中軌道1A中的存在於自身車2A的前方側的其他的物品搬送車2設為先行車2C(第二對象車)。又,將自身車2A沿著行走中軌道1A行走的軌跡設為行走軌跡T。The
如圖2至圖4所示,物品搬送車2具備有第一反射體M1與第二反射體M2以作為反射體M。 第一反射體M1是設置在物品搬送車2的朝向前方的前表面部及朝向後方的後表面部、和支撐部26的朝向前方的前表面部及朝向後方的後表面部的每一個上。若追加說明,即第一感測器S1是設置於蓋體16的前表面部,且第一反射體M1是設置於蓋體16的前表面部及後表面部、和滑動體24的前表面部及後表面部。 第二反射體M2是設置在物品搬送車2的朝向後方的後表面部上。若追加說明,即第二感測器S2是設置得比蓋體16的前表面部中的第一感測器S1更上方。第二反射體M2是設置得比蓋體16的後表面部中的第一反射體M1更上方。 如此,物品搬送車2中是在該物品搬送車2的朝向前方的前表面部及朝向後方的後表面部、與支撐部26的朝向前方的前表面部及朝向後方的後表面部的每一個上具備有第一反射體M1。As shown in FIGS. 2 to 4 , the
前方檢測部S具備有第一感測器S1及第二感測器S2,該第一感測器S1是檢測第一檢測區E1的對象車2B與第二檢測區E2的對象支撐部26B,該第二感測器S2是檢測第三檢測區E3及第四檢測區E4的先行車2C。前方檢測部S是藉由具備第一感測器S1與第二感測器S2,而檢測位於第一檢測區E1之對象車2B,並且檢測位於第二檢測區E2的對象支撐部26B,且進一步檢測位於第三檢測區E3及第四檢測區E4的先行車2C。The front detection part S is equipped with a first sensor S1 and a second sensor S2, and the first sensor S1 is to detect the
第一感測器S1是設置於物品搬送車2的朝向前方的前表面部,而朝向前方側投射檢測光,並檢測來自第一反射體M1的反射光,藉此檢測第一反射體M1(具備有第一反射體M1的對象車2B或對象支撐部26B)。第一感測器S1是在寬度方向Y上相對於行走部6之中央(位於軌道1之中央)而設置於偏向一側的位置。 第二感測器S2是設置於物品搬送車2的朝向前方的前表面部,而朝向前方側投射檢測光,並檢測來自第二反射體M2的反射光,藉此檢測第二反射體M2(具備有第二反射體M2的先行車2C)。第二感測器S2是設置成在寬度方向Y上與行走部6之中央(位於軌道1之中央)成為相同的位置。The first sensor S1 is provided on the front surface portion of the
如圖4所示,第一感測器S1是朝向前方側投射檢測光,第二感測器S2是在比第一感測器S1更高的位置,且朝向前方側投射檢測光。因此,第一感測器S1之檢測區E是位於第二感測器S2之檢測區E的從上下寬度朝下方偏離之處。亦即,第二感測器S2之檢測區E(第三檢測區E3及第四檢測區E4)與第一感測器S1之檢測區E(第一檢測區E1及第二檢測區E2)是在上下方向Z上不同的區。As shown in FIG. 4 , the first sensor S1 projects detection light toward the front side, and the second sensor S2 is at a higher position than the first sensor S1 and projects detection light toward the front side. Therefore, the detection area E of the first sensor S1 is located at a position where the detection area E of the second sensor S2 deviates downward from the upper and lower widths. That is, the detection area E (the third detection area E3 and the fourth detection area E4) of the second sensor S2 and the detection area E (the first detection area E1 and the second detection area E2) of the first sensor S1 are different areas in the vertical direction Z.
並且,在自身車2A與對象車2B位於相同高度的情況下,對象車2B的第一反射體M1是設置在可將自身車2A的第一感測器S1所投射之檢測光反射的高度,且設置在比可將自身車2A的第二感測器S2所投射之檢測光反射的高度更低的位置,對象車2A的第一反射體M1雖然會反射自身車2A的第一感測器S1之檢測光,但並不會反射自身車2A的第二感測器S2之檢測光。相對於此,在自身車2A與對象車2B位於相同高度的情況下,對象車2B的第二反射體M2是設置在比可以將自身車2A的第一感測器S1所投射的檢測光反射的高度更高的位置,且設置在可以將自身車2A的第二感測器S2所投射之檢測光反射的高度,對象車2B的第二反射體M2雖然不會反射自身車2A的第一感測器S1之檢測光,但會反射自身車2A的第二感測器S2之檢測光。 因此,自身車2A的第一感測器S1是形成為雖然會檢測對象車2B的第一反射體M1,但不會檢測對象車2B的第二反射體M2。又,自身車2A的第二感測器S2是形成為雖然會檢測對象車2B的第二反射體M2,但不會檢測對象車2B的第一反射體M1。In addition, when the
如圖6所示,第一感測器S1之檢測區E是形成為相對於自身車2A而形成於前方,並且相對於自身車2A而朝寬度方向Y的兩側擴大。第一感測器S1之檢測區E是將延伸方向X的長度設定為第一長度L1,並將寬度方向Y的長度設定為第二長度L2。第一感測器S1之檢測區E是區分成第二檢測區E2、與相對於該第二檢測區E2而設定於寬度方向Y之兩側的第一檢測區E1。 如圖6所示,第二檢測區E2的寬度方向Y之長度即第三長度L3,是比物品搬送車2的寬度方向Y之長度即第四長度L4更長。亦即,第二檢測區E2是相對於自身車2A而在前方側且將至少一部分設定於行走軌跡T內,並且以除了行走軌跡T的寬度方向Y之總寬度以外,還在行走軌跡T之左右兩側接續於行走軌跡T的狀態被設定。又,第二檢測區E2的延伸方向X的長度是設定為第一長度L1。 第一檢測區E1是第一感測器S1之檢測區E中的第二檢測區E2以外的部分,且是相對於自身車2A而在前方側且相對於行走軌跡T設定於寬度方向Y的外側。該第一檢測區E1是以從行走軌跡T間隔隔開的狀態而被設定。第二長度L2及第三長度L3是形成為在並行區間G中雖然將第一檢測區E1設定至對象車2B行走的軌跡內為止,但不將第二檢測區E2設定至對象車2B行走之軌跡內的長度。As shown in FIG. 6 , the detection area E of the first sensor S1 is formed in front of the
如圖7所示,第二感測器S2之檢測區E是形成為相對於自身車2A而形成於前方,並且相對於自身車2A而朝寬度方向Y的兩側擴大。第二感測器S2之檢測區E是將延伸方向X的長度設定為第五長度L5,並將寬度方向Y的長度設定為第六長度L6。第二感測器S2之檢測區E是區分為第三檢測區E3、與相對於該第三檢測區E3而設定於前方側的第四檢測區E4。 第三檢測區E3之延伸方向X的長度是設定為第七長度L7,且第四檢測區E4之延伸方向X的長度是設定為第八長度L8。第六長度L6是比第四長度L4更長,且比第二長度L2更短。又,第五長度L6是形成為在並行區間G中不將第三檢測區E3或第四檢測區E4設定到對象車2B行走之軌跡內的長度。並且,第五長度L5及第八長度L8是比第一長度L1更長,第七長度L7是比第一長度L1更短。As shown in FIG. 7 , the detection area E of the second sensor S2 is formed in front of the
第二感測器S2之檢測區E在自身車2A行走於直線部4的情況下,雖然是形成如上述之長度的形狀,但是在自身車2A行走於曲線部5的情況下,是成為如圖8所示,與在直線部4行走之情況的形狀不同的形狀。亦即,控制部H是構成為能夠依據物品搬送車2所具備的旋轉編碼器等的行走距離感測器之檢測資訊、或是檢測沿著軌道1設置之顯示位址資訊的顯示體的位址檢測感測器的檢測資訊,而可判定自身車2A是在軌道1的直線部4上行走或是在曲線部5上行走,並且可判定自身車2A的前方側的行走中軌道1A的形狀。並且,第二感測器S2是藉由控制部H的控制而配合自身車2A的前方側的行走中軌道1A的形狀,使第三檢測區E3的形狀及第四檢測區E4的形狀改變。又,第一感測器S1是藉由控制部H的控制,而在自身車2A位於曲線部5的情況下,將對象車2B及對象支撐部26B的檢測設為無效,且僅在自身車2A位於直線部4的情況下,才將對象車2B及對象支撐部26B的檢測設為有效。The detection area E of the second sensor S2 is formed in the shape of the above-mentioned length when the self-
如圖9所示,第二感測器S2是檢測於已進入第三檢測區E3或第四檢測區E4的情況下,先行車2C所具備的第二反射體M2。再者,自身車2A與先行車2C是朝向相同的方向,第二感測器S2是檢測先行車2C之蓋體16中的後表面部所具備的第二反射體M2。 如圖10所示,在對象車2B進入第一檢測區E1的情況下,第一感測器S1是檢測設置於對象車2B之蓋體16的第一反射體M1。再者,在自身車2A與對象車2B朝向相反的方向的情況下,第一感測器S1是檢測對象車2B之蓋體16中的前表面部所具備的第一反射體M1,在自身車2A與對象車2B朝向相同的方向的情況下,第一感測器S1是檢測對象車2B之蓋體16中的後表面部所具備的第一反射體M1。 又,如圖11所示,在對象支撐部26B進入第二檢測區E2的情況下,第一感測器S1是檢測對象支撐部26B所具備的第一反射體M1。再者,自身車2A與對象車2B朝向相反的方向的情況下,第一感測器S1是檢測對象支撐部26B之前表面部所具備的第一反射體M1,在自身車2A與對象車2B朝向相同的方向的情況下,第一感測器S1是檢測對象支撐部26B之後表面部所具備的第一反射體M1。As shown in FIG. 9 , the second sensor S2 detects the second reflector M2 of the preceding
如圖12的流程圖所示,在藉由第一感測器S1而於第一檢測區E1中檢測到反射體M的情況下、及藉由第二感測器S2而於第四檢測區E4中檢測到反射體M的情況下,控制部H會執行以比第一設定速度低速的第二設定速度來使自身車2A行走的減速控制。又,在藉由第一感測器S1於第二檢測區E2中檢測到反射體M的情況、及藉由第二感測器S2於第三檢測區E3中檢測到反射體M的情況下,控制部H會執行使自身車2A停止的停止控制。並且,在藉由第一感測器S1於第一檢測區E1及第二檢測區E2中未檢測到反射體M、且藉由第二感測器S2於第三檢測區E3及第四檢測區E4中未檢測到反射體M的情況下,控制部H會執行使自身車2A以第一設定速度行走的一般控制。As shown in the flowchart of FIG. 12 , when the reflector M is detected in the first detection area E1 by the first sensor S1 and in the fourth detection area by the second sensor S2 When the reflector M is detected in E4, the control part H executes the deceleration control which drives the
若列舉具體例來說明,即如圖9所示,當先行車2C(圖9所示的2台的先行車2C之中的前方側的先行車2C)侵入自身車2A的第二感測器S2的第四檢測區E4時,可藉由自身車2A的第二感測器S2檢測先行車2C的第二反射體M2。在藉由自身車2A的第二感測器S2於第四檢測區E4中檢測到反射體M的情況下,自身車2A的控制部H會執行使自身車2A以第二設定速度行走的減速控制。 又,如圖9所示,當先行車2C(圖9所示的2台的先行車2C之中的後方側的先行車2C)侵入自身車2A之第二感測器S2的第三檢測區E3時,可藉由自身車2A的第二感測器S2檢測先行車2C的第二反射體M2。在藉由自身車2A的第二感測器S2於第三檢測區E3中檢測到反射體M的情況下,自身車2A的控制部H會執行使自身車2A停止的停止控制。再者,像這樣,藉由第二感測器S2於第三檢測區E3中檢測到反射體M的情況下的停止控制,是相當於前方檢測部S檢測到存在於第三檢測區E3之先行車2C的情況下使自身車2A停止的第四控制。To illustrate with a specific example, as shown in FIG. 9 , when the preceding
又,如圖10所示,當對象車2B進入自身車2A之第一感測器S1的第一檢測區E1時,可藉由自身車2A的第一感測器S1檢測對象車2B的第一反射體M1。在藉由自身車2A的第一感測器S1於第一檢測區E1中檢測到反射體M的情況下,自身車2A的控制部H會執行減速控制,以使自身車2A以第二設定速度行走。再者,像這樣,藉由第一感測器S1於第一檢測區E1中檢測到反射體M的情況的減速控制,是相當於前方檢測部S檢測到存在於第一檢測區E1之對象車2B的情況下使自身車2A以第二設定速度行走的第二控制。 又,如圖11所示,當對象支撐部26B進入自身車2A之第一感測器S1的第二檢測區E2時,可藉由自身車2A的第一感測器S1檢測對象支撐部26B的第一反射體M1。在藉由自身車2A的第一感測器S1於第二檢測區E2中檢測到反射體M的情況下,自身車2A的控制部H會執行停止控制,以使自身車2A停止。再者,像這樣,藉由第一感測器S1於第二檢測區E2中檢測到反射體M之情況的停止控制,是相當於前方檢測部S檢測到存在於第二檢測區E2之對象支撐部26B的情況下使自身車2A停止的第三控制。Also, as shown in FIG. 10, when the
並且,在自身車2A之第一感測器S1的第一檢測區E1及第二檢測區E2中未檢測到反射體M,且在自身車2A之第二感測器S2的第三檢測區E3及第四檢測區E4中未檢測到反射體M的情況下,自身車2A的控制部H會執行使自身車2A以第一設定速度行走的一般控制。再者,一般控制是相當於第一控制,該第一控制是在前方檢測部S於第一檢測區E1中未檢測到對象車2B且於第二檢測區E2中未檢測到對象支撐部26B的情況下,使自身車2A以第一設定速度行走的控制。In addition, the reflector M is not detected in the first detection area E1 and the second detection area E2 of the first sensor S1 of the
2.其他的實施形態 其次,針對物品搬送設備及物品搬送車的其他的實施形態進行說明。2. Other Embodiments Next, other embodiments of the article transport facility and the article transport vehicle will be described.
(1)在上述實施形態中,前方檢測部S雖然具有第一感測器S1與第二感測器S2,但前方檢測部S亦可僅具有第一感測器S1與第二感測器S2之中的第一感測器S1。並且,亦可在前方檢測部S僅具有第一感測器S1的情況下,於第一感測器S1中具備第二感測器S2的功能。(1) In the above embodiment, although the front detection part S has the first sensor S1 and the second sensor S2, the front detection part S may only have the first sensor S1 and the second sensor The first sensor S1 among S2. Moreover, when the front detection part S has only the 1st sensor S1, the function of the 2nd sensor S2 may be provided in the 1st sensor S1.
(2)在上述實施形態中,第一檢測區E1、第二檢測區E2、第三檢測區E3及第四檢測區E4的形狀或大小亦可適當變更。具體而言,如例如圖13所示,亦可將第二檢測區E2的延伸方向X的長度L9設得比第一感測器S1之檢測區E的延伸方向X的長度L1更短,又,亦可將第二檢測區E2的寬度方向Y的長度L3設成與物品搬送車2的寬度方向Y的長度L4相同或是比其短。(2) In the above embodiment, the shapes or sizes of the first detection area E1 , the second detection area E2 , the third detection area E3 and the fourth detection area E4 can also be appropriately changed. Specifically, as shown in, for example, FIG. 13 , the length L9 of the extension direction X of the second detection area E2 can also be set to be shorter than the length L1 of the extension direction X of the detection area E of the first sensor S1. , the length L3 of the second detection area E2 in the width direction Y may also be set to be equal to or shorter than the length L4 of the
(3)在上述實施形態中,雖然僅在自身車2A位於直線部4的情況下才將第一感測器S1對於對象車2B及對象支撐部26B的檢測中設成有效,但亦可除了自身車2A位於直線部4的情況以外,還有位於曲線部5的情況也將第一感測器S1對於對象車2B及對象支撐部26B的檢測設成有效。在此情況下,亦可形成為使第一感測器S1之檢測區E的形狀因應於自身車2A前方側的行走中軌道1A的形狀而變形。(3) In the above-mentioned embodiment, although the first sensor S1 is set to be effective in the detection of the
(4)在上述實施形態中,雖然是將第一反射體M1設置在滑動操作機構15的滑動體24上,但亦可將第一反射體M1設置在支撐機構13的升降體18等,將第一反射體M1設置在支撐部26中的滑動體24以外之處。(4) In the above-mentioned embodiment, although the first reflector M1 is arranged on the sliding
(5)在上述實施形態中,雖然是將物品W設為倍縮光罩傳送盒,但是作為物品W,亦可為收容晶圓的前開式晶圓傳送盒(FOUP)等的其他的容器或是容器以外的搬送物。(5) In the above-mentioned embodiment, although the article W is a reticle pod, the article W may be another container such as a front-opening pod (FOUP) for accommodating wafers or It is transported goods other than containers.
(6)再者,上述之各實施形態中所揭示的構成,只要沒有發生矛盾,也可與其他的實施形態中所揭示的構成組合來應用。關於其他的構成,在本說明書中所揭示的實施形態在全部之點上均只不過是例示。從而,可在不脫離本發明的主旨之範圍內,適當地進行各種的改變。(6) Furthermore, the configurations disclosed in the above-mentioned embodiments can be applied in combination with the configurations disclosed in other embodiments as long as there is no contradiction. Regarding other configurations, the embodiments disclosed in this specification are merely examples in all points. Therefore, various changes can be appropriately made without departing from the scope of the present invention.
3.上述實施形態之概要 以下,針對在上述所說明之物品搬送車及物品搬送設備的概要進行說明。3. Outline of the above-mentioned embodiment Hereinafter, an outline of the article conveyance vehicle and article conveyance equipment described above will be described.
一種物品搬送設備,是沿著軌道使複數台物品搬送車行走並搬送物品,將在上下方向視角下相對於前述軌道的延伸方向正交的方向設為寬度方向,前述物品搬送車具備支撐物品之支撐部、使前述支撐部在前述寬度方向上移動之驅動部、前方檢測部、及控制部,前述驅動部是使前述支撐部移動到突出位置與退回位置,前述突出位置是從前述物品搬送車朝前述寬度方向突出的位置,前述退回位置是由前述突出位置退回至前述物品搬送車側的位置,將前述物品搬送車的一台自身車行走中的前述軌道設為行走中軌道,並將相對前述行走中軌道而並行之前述軌道設為對象軌道,將前述自身車沿著前述行走中軌道行走的軌跡設為行走軌跡,並將在前述對象軌道上行走的其他的前述物品搬送車設為對象車,將該對象車的前述支撐部設為對象支撐部,前述前方檢測部是檢測位於第一檢測區之前述對象車,並且檢測位於第二檢測區之前述對象支撐部,前述第一檢測區設定成是相對於前述自身車在前方側且相對於前述行走軌跡在前述寬度方向的外側,前述第二檢測區是設定成相對於前述自身車在前方側且在前述行走軌跡內,前述控制部是執行第一控制、第二控制與第三控制,前述第一控制是前述前方檢測部在前述第一檢測區中未檢測到前述對象車且在前述第二檢測區中未檢測到前述對象支撐部的情況下,使前述自身車以第一設定速度行走的控制,前述第二控制是在前述前方檢測部檢測到存在於前述第一檢測區的前述對象車的情況下,使前述自身車以比前述第一設定速度低速的第二設定速度行走的控制,前述第三控制是在前述前方檢測部檢測到存在於前述第二檢測區之前述對象支撐部的情況下,使前述自身車停止的控制。An article conveying device, in which a plurality of article conveying vehicles are moved along a rail to convey articles, the direction perpendicular to the extending direction of the rail is defined as the width direction from the perspective of the vertical direction, and the article conveying vehicle is provided with a support for the article. A supporting part, a driving part that moves the supporting part in the width direction, a front detection part, and a control part, the driving part moves the supporting part to a protruding position and a retracted position, and the protruding position is obtained from the article transport vehicle The position that protrudes toward the aforementioned width direction, the aforementioned retreat position is the position where the aforementioned protruding position is retreated to the side of the aforementioned article transport vehicle, the aforementioned track that is running on one of the aforementioned article transport vehicles is set as the running track, and the opposite The track parallel to the running track is set as a target track, the track of the self-vehicle traveling along the running track is set as a running track, and the other aforementioned article transport vehicles running on the target track are set as objects As for the vehicle, the aforementioned support portion of the object vehicle is used as an object support portion, the aforementioned front detection portion detects the aforementioned object vehicle located in the first detection area, and detects the aforementioned object support portion located in the second detection area, and the aforementioned first detection area The second detection area is set to be on the front side with respect to the self-vehicle and on the outer side in the width direction with respect to the travel track, the second detection area is set to be on the front side with respect to the self-vehicle and within the travel track, and the control unit The first control is to execute the first control, the second control and the third control. The first control is that the front detection unit does not detect the object vehicle in the first detection area and does not detect the object support in the second detection area. In the case of the above-mentioned part, the control to make the self-vehicle travel at the first set speed, the second control is to make the self-vehicle to travel at the first set speed In the control of traveling at a second set speed lower than the first set speed, the third control is to stop the own vehicle when the front detection unit detects the object support in the second detection area. control.
根據此構成,在對象軌道上行走的對象車之對象支撐部已進入自身車的前方側之行走軌跡的情況下,可以藉由該已進入的支撐對象部進入第二檢測區,而以前方檢測部檢測出支撐對象部。並且,在前方檢測部檢測到存在於第二檢測區之對象支撐部的情況下,因為藉由控制部執行第三控制而使自身車停止,所以可以防止自身車接觸到對象支撐部之情形。 又,在對象軌道上行走的對象車存在於自身車的前方側的情況下,可以藉由該對象車進入第一檢測區,而以前方檢測部檢測該對象車。並且,前方檢測部檢測到存在於第一檢測區之對象車的情況下,控制部是執行讓自身車以比第一設定速度低速的第二設定速度來行走的第二控制。因此,因為可以在對象車使對象支撐部朝向突出位置突出而使對象支撐部進入自身車的前方側的行走軌跡的情況中,於執行第三控制使自身車停止時讓制動距離變短,所以易於防止自身車接觸到對象支撐部之情形。 如此,根據本構成,可以提供一種能夠抑制物品搬送車與其他的物品搬送車接觸的物品搬送設備。According to this configuration, when the object support portion of the object vehicle running on the object track has entered the running track on the front side of the own vehicle, it can be detected in the front by the entered support object portion entering the second detection area. part to detect the supported part. In addition, when the front detection unit detects the target support in the second detection area, the control unit executes the third control to stop the own vehicle, so that the own vehicle can be prevented from touching the target support. Also, when a target vehicle running on the target track exists in front of the own vehicle, the target vehicle can be detected by the front detection unit when the target vehicle enters the first detection area. In addition, when the front detection unit detects the target vehicle present in the first detection area, the control unit executes a second control for causing the own vehicle to run at a second set speed lower than the first set speed. Therefore, in the case where the target vehicle protrudes the target support portion toward the protruding position so that the target support portion enters the running track on the front side of the own vehicle, the braking distance can be shortened when the own vehicle is stopped by executing the third control. It is easy to prevent the own vehicle from coming into contact with the target support. As described above, according to this configuration, it is possible to provide an article transport facility capable of suppressing contact between the article transport vehicle and other article transport vehicles.
在此,較理想的是,相對於前述自身車於前方側且在前述行走軌跡內設定第三檢測區,前述前方檢測部是檢測位於前述第三檢測區之其他的前述物品搬送車即先行車,前述控制部除了前述第一控制、前述第二控制及前述第三控制以外,還執行第四控制,前述第四控制是在前述前方檢測部檢測到存在於前述第三檢測區之前述先行車的情況下,使前述自身車停止的控制。Here, preferably, a third detection area is set on the front side with respect to the self-vehicle and within the travel track, and the front detection unit detects the preceding vehicle that is the other article transport vehicle located in the third detection area. , the control unit executes a fourth control in addition to the first control, the second control, and the third control, and the fourth control is performed when the front detection unit detects that the preceding vehicle exists in the third detection area. In the case of , control to stop the aforementioned own vehicle.
根據此構成,在行走中軌道上行走的先行車存在於自身車的前方側的情況下,可以藉由該先行車進入第三檢測區,而以前方檢測部檢測先行車。並且,因為在前方檢測部檢測到存在於第三檢測區之先行車的情況下,是藉由控制部執行第四控制而使自身車停止,所以可以抑制自身車接觸到先行車之情形。According to this configuration, when the preceding vehicle running on the running track exists in front of the own vehicle, the preceding vehicle can be detected by the front detection unit when the preceding vehicle enters the third detection area. Furthermore, since the control unit executes the fourth control to stop the own vehicle when the front detection unit detects the preceding vehicle existing in the third detection area, it is possible to suppress the own vehicle from coming into contact with the preceding vehicle.
又,較理想的是,前述前方檢測部具有第一感測器、及第二感測器,前述第一感測器是檢測前述第一檢測區的前述對象車與前述第二檢測區的前述對象支撐部的感測器,前述第二感測器是檢測前述第三檢測區的前述物品搬送車的感測器。Furthermore, preferably, the aforementioned front detection unit has a first sensor and a second sensor, and the aforementioned first sensor detects the aforementioned target vehicle in the aforementioned first detection zone and the aforementioned target vehicle in the aforementioned second detection zone. As for the sensor of the object supporting part, the second sensor is a sensor for detecting the object transport vehicle in the third detection area.
根據此構成,因為可以將前方檢測部的功能分配到第一感測器與第二感測器,所以比起藉由一個感測器來進行第一檢測區、第二檢測區及第三檢測區的每一個的檢測之情況,可以例如將各感測器的功能簡化並且提高各感測器的檢測精度。According to this configuration, since the function of the front detection unit can be allocated to the first sensor and the second sensor, it is better to perform the first detection area, the second detection area, and the third detection with one sensor. The detection of each zone can, for example, simplify the function of each sensor and improve the detection accuracy of each sensor.
又,較理想的是,前述軌道具有直線形狀的直線部與曲線形狀的曲線部,前述第二感測器是配合前述自身車的前方側的前述行走中軌道的形狀來改變前述第三檢測區的形狀,前述第一感測器是僅在前述自身車位於前述直線部的情況下,將前述對象車及前述對象支撐部的檢測設為有效。Also, preferably, the track has a straight line portion and a curved line portion, and the second sensor changes the third detection area in accordance with the shape of the running track on the front side of the vehicle. The first sensor is configured to enable detection of the target vehicle and the target support portion only when the self-vehicle is located on the straight line.
根據此構成,因為藉由配合自身車的前方側的行走中軌道的形狀來改變第三檢測區的形狀,而變得易於在自身車位於直線部的情況及位於曲線部的情況之二種情況中,藉由第二感測器適當地檢測先行車,所以變得易於防止自身車接觸到先行車之情形。 又,因為在曲線部中複數個軌道並行的情況較少,所以僅在該直線部中將由第一感測器所進行的檢測設成有效,藉此,針對第一感測器就不需要配合行走中軌道的形狀來改變第一檢測區或第二檢測區的形狀。因此,可以將第一感測器的功能簡化、或提高檢測精度。According to this configuration, since the shape of the third detection area is changed according to the shape of the running track on the front side of the own vehicle, it becomes easy to detect both the case where the own vehicle is located in a straight line and the case where it is located in a curved line. In this case, the preceding vehicle is properly detected by the second sensor, so it becomes easy to prevent the own vehicle from coming into contact with the preceding vehicle. Also, since it is rare for a plurality of rails to run parallel in a curved portion, the detection by the first sensor is enabled only in the straight portion, thereby eliminating the need for cooperation with the first sensor. The shape of the first detection area or the second detection area is changed according to the shape of the running track. Therefore, the function of the first sensor can be simplified or the detection accuracy can be improved.
又,較理想的是,前述第二檢測區的前述寬度方向的長度比前述物品搬送車的前述寬度方向的長度更長。Also, preferably, the length of the second detection area in the width direction is longer than the length of the article transport vehicle in the width direction.
根據此構成,在對象車使對象支撐部朝向自身車的行走軌跡而突出的情況下,可以藉由第一感測器在對象支撐部進入行走軌跡之前檢測出對象支撐部。因此,可以儘早檢測進入行走軌跡的對象支撐部並執行第三控制,而變得易於防止自身車接觸到對象支撐部之情形。According to this configuration, when the target vehicle protrudes the target support portion toward the running track of the own vehicle, the target support portion can be detected by the first sensor before the target support portion enters the running track. Therefore, it is possible to detect the target support portion entering the running track early and execute the third control, making it easy to prevent the own vehicle from coming into contact with the target support portion.
又,前述物品搬送車具備反射體,前述反射體是配置在前述物品搬送車的朝向前方的前表面部及朝向後方的後表面部、與前述支撐部的朝向前方的前表面部及朝向後方的後表面部的每一個上,前述前方檢測部是藉由檢測來自前述反射體的反射光來檢測前述物品搬送車及前述支撐部。In addition, the aforementioned article transport vehicle is equipped with a reflector, and the aforementioned reflector is arranged on the front surface portion facing forward and the rear surface portion facing backward of the article transport vehicle, and the front surface portion facing forward and the rear surface portion of the support portion facing backward. In each of the rear surface portions, the front detection portion detects the article transport vehicle and the support portion by detecting reflected light from the reflector.
根據此構成,自身車的前方檢測部變得易於適當地檢測具備有反射體的對象車或對象支撐部。又,藉由在物品搬送車或支撐部的前表面部或後表面部具備反射體,而變得易於在對象車與自身車朝相同方向行走的情況以及朝相反方向行走的情況之二種情況中,藉由自身車的前方檢測部適當檢測具備有反射體的對象車或對象支撐部。According to this structure, it becomes easy for the front detection part of own vehicle to detect the object vehicle or object support part equipped with the reflector suitably. In addition, by providing a reflector on the front surface or the rear surface of the article transport vehicle or the supporting part, it becomes easy to travel in the same direction as the object vehicle and the self-vehicle in both cases and in the opposite direction. In this method, the target vehicle or the target support unit equipped with the reflector is appropriately detected by the front detection unit of the own vehicle.
一種物品搬送車,具備:行走部,沿著軌道行走;支撐部,支撐物品;收容部,收容物品;驅動部,使前述支撐部移動;及前方檢測部,將自身車行走中的前述軌道設為行走中軌道,將前述自身車沿著前述行走中軌道行走的軌跡設為行走軌跡,且將在上下方向視角下相對於前述軌道的延伸方向正交的方向設為寬度方向,前述驅動部是使前述支撐部在前述寬度方向上移動到突出位置與退回位置,前述突出位置是從前述收容部朝前述寬度方向突出的位置,前述退回位置是由前述突出位置退回至前述收容部側的位置,前述前方檢測部具有第一感測器、及第二感測器,前述第一感測器是檢測第一檢測區之其他的物品搬送車即第一對象車、與第二檢測區之前述第一對象車的前述支撐部的感測器,前述第二感測器是檢測第三檢測區之其他的物品搬送車即第二對象車的感測器,前述第一檢測區是設定成相對於前述自身車在前方側且相對於前述行走軌跡在前述寬度方向的外側,前述第二檢測區是設定成相對於前述自身車在前方側且在前述行走軌跡內,前述第三檢測區是與前述第二檢測區在上下方向上不同的區,且是設定成相對於前述自身車在前方側且在前述行走軌跡內。An article conveying vehicle is provided with: a running part for walking along a rail; a supporting part for supporting an article; a storage part for storing the article; a driving part for moving the supporting part; is the running track, the track of the aforementioned self-vehicle walking along the aforementioned running track is set as the running track, and the direction perpendicular to the extending direction of the aforementioned track is set as the width direction when viewed from the vertical direction, and the aforementioned drive unit is The aforementioned supporting portion is moved to a protruding position and a retracted position in the aforementioned width direction, the aforementioned protruding position is a position protruding from the aforementioned receiving portion toward the aforementioned width direction, and the aforementioned retreating position is a position where the aforementioned protruding position is retracted to the side of the aforementioned accommodating portion, The aforementioned front detection unit has a first sensor and a second sensor, and the aforementioned first sensor detects other object transport vehicles in the first detection zone, that is, the first object vehicle, and the aforementioned first sensor in the second detection zone. The sensor of the aforementioned supporting portion of a target vehicle, the aforementioned second sensor is a sensor for detecting other object transport vehicles in the third detection zone, that is, the second target vehicle, and the aforementioned first detection zone is set to be relative to The aforementioned self-vehicle is on the front side and on the outer side in the width direction with respect to the aforementioned travel trajectory, the aforementioned second detection area is set to be on the front side with respect to the aforementioned own vehicle and within the aforementioned travel trajectory, and the aforementioned third detection area is set to be on the front side with respect to the aforementioned self-vehicle and within the aforementioned travel trajectory. The second detection area is a different area in the vertical direction, and is set so as to be on the front side with respect to the own vehicle and within the running track.
根據此構成,在對象軌道上行走的對象車之對象支撐部已進入自身車的前方側之行走軌跡的情況下,可以藉由該已進入的支撐對象部進入第二檢測區,而以第一感測器檢測出支撐對象部。因此,在第一感測器檢測到存在於第二檢測區之對象支撐部的情況下,變得可進行下述對應處理:藉由使自身車停止而防止自身車接觸到對象支撐部之情形等。 又,在對象軌道上行走的第一對象車存在於自身車的前方側的情況下,可以藉由該對象車進入第一檢測區,而以第一感測器檢測該對象車。因此,在第一感測器檢測到存在於第一檢測區之對象車的情況下,變得可進行下述對應處理:使自身車預先減速,且在對象支撐部進入行走區域的情況下使自身車迅速地停止等。 又,在行走中軌道上行走的先行車存在於自身車的前方側的情況下,可以藉由該先行車進入第三檢測區,而以第二感測器檢測該先行車。並且,第二感測器檢測到存在於第三檢測區之第二對象車的情況下,變得可進行下述的對應處理:使自身車停止以防止自身車接觸到第二對象車之情形等。 此外,因為可以將前方檢測部的功能分配到第一感測器與第二感測器,所以比起藉由一個感測器進行第一檢測區、第二檢測區及第三檢測區的每一個的檢測之情況,可以例如將各感測器的功能簡化並且提高各感測器的檢測精度。 如此,根據本構成,可以提供一種可以藉由比較簡易的構成來防止與其他的物品搬送車接觸的物品搬送車。 產業上之可利用性According to this configuration, when the object support portion of the object vehicle running on the object track has entered the running track on the front side of the own vehicle, the entered support object portion can enter the second detection area, and the first The sensor detects the supporting target portion. Therefore, in the case where the first sensor detects the object support part present in the second detection area, it becomes possible to perform corresponding processing of preventing the own vehicle from coming into contact with the object support part by stopping the own vehicle. Wait. Also, when the first target vehicle running on the target track exists in front of the own vehicle, the target vehicle can be detected by the first sensor when the target vehicle enters the first detection area. Therefore, when the first sensor detects the target vehicle existing in the first detection area, it becomes possible to perform corresponding processing of decelerating the own vehicle in advance and using the One's own car stops quickly. Also, when the preceding vehicle running on the track is present in front of the own vehicle, the preceding vehicle can be detected by the second sensor when the preceding vehicle enters the third detection area. And, when the second sensor detects the second object vehicle existing in the third detection area, it becomes possible to perform the following corresponding processing: the own vehicle is stopped to prevent the own vehicle from touching the second object vehicle. Wait. In addition, since the function of the front detection section can be allocated to the first sensor and the second sensor, each of the first detection area, the second detection area, and the third detection area can be performed by one sensor. In the case of one detection, for example, the functions of each sensor can be simplified and the detection accuracy of each sensor can be improved. In this way, according to this configuration, it is possible to provide an article transport vehicle capable of preventing contact with other article transport vehicles with a relatively simple structure. Industrial availability
本揭示之技術可以利用在沿著軌道行走並搬送物品的物品搬送車、以及具備有該物品搬送車的物品搬送設備上。The technique disclosed in the present disclosure can be applied to an article transport vehicle that travels along rails and transports articles, and an article transport facility equipped with the article transport vehicle.
1‧‧‧軌道1A‧‧‧行走中軌道1B‧‧‧對象軌道2‧‧‧物品搬送車2A‧‧‧自身車2B‧‧‧對象車(第一對象車)2C‧‧‧先行車(第二對象車)3‧‧‧軌條部4‧‧‧直線部5‧‧‧曲線部6‧‧‧行走部7‧‧‧本體部9‧‧‧行走用馬達10‧‧‧行走輪11‧‧‧引導輪13‧‧‧支撐機構14‧‧‧升降操作機構15‧‧‧滑動操作機構16‧‧‧蓋體(收容部)18‧‧‧升降體19‧‧‧支撐爪20‧‧‧支撐用馬達21‧‧‧傳送帶22‧‧‧捲繞體23‧‧‧升降用馬達24‧‧‧滑動體25‧‧‧滑動用馬達(驅動部)26‧‧‧支撐部26B‧‧‧對象支撐部E‧‧‧檢測區E1‧‧‧第一檢測區E2‧‧‧第二檢測區E3‧‧‧第三檢測區E4‧‧‧第四檢測區H‧‧‧控制部M‧‧‧反射體M1‧‧‧第一反射體M2‧‧‧第二反射體S‧‧‧前方檢測部S1‧‧‧第一感測器S2‧‧‧第二感測器T‧‧‧行走軌跡W‧‧‧物品X‧‧‧延伸方向Y‧‧‧寬度方向Z‧‧‧上下方向G‧‧‧並行區間P‧‧‧移載對象處L1‧‧‧第一長度L2‧‧‧第二長度L3‧‧‧第三長度L4‧‧‧第四長度L5‧‧‧第五長度L6‧‧‧第六長度L7‧‧‧第七長度L8‧‧‧第八長度L9‧‧‧長度1‧‧‧track 1A‧‧‧moving track 1B‧‧‧object track 2‧‧‧item handling vehicle 2A‧‧‧self vehicle 2B‧‧‧object vehicle (first object vehicle) 2C‧‧‧advanced vehicle ( Second object car) 3‧‧‧rail part 4‧‧‧straight line part 5‧‧‧curve part 6‧‧‧traveling part 7‧‧‧body part 9‧‧motor for traveling 10‧‧‧traveling wheel 11 ‧‧‧Guide wheel 13‧‧‧Supporting mechanism 14‧‧‧Elevating operating mechanism 15‧‧‧Sliding operating mechanism 16‧‧‧Cover body (accommodating part) 18‧‧‧Elevating body 19‧‧‧support claw 20‧‧ ‧Supporting motor 21‧‧‧Conveyor belt 22‧‧‧Winding body 23‧‧‧Motor for lifting 24‧‧‧Sliding body 25‧‧‧Sliding motor (drive unit) 26‧‧‧Supporting unit 26B‧‧‧ Object support part E‧‧‧detection area E1‧‧‧first detection area E2‧‧‧second detection area E3‧‧‧third detection area E4‧‧‧fourth detection area H‧‧‧control part M‧‧ ‧Reflector M1‧‧‧First reflector M2‧‧‧Second reflector S‧‧‧Forward detection part S1‧‧‧First sensor S2‧‧‧Second sensor T‧‧‧Traveling track W‧‧‧Item X‧‧‧Extension direction Y‧‧‧Width direction Z‧‧‧Up and down direction G‧‧‧Parallel section P‧‧‧Transfer object L1‧‧‧First length L2‧‧‧Second Length L3‧‧‧Third Length L4‧‧‧Fourth Length L5‧‧‧Fifth Length L6‧‧‧Sixth Length L7‧‧‧Seventh Length L8‧‧‧Eighth Length L9‧‧‧Length
圖1是物品搬送設備的平面圖。 圖2是物品搬送車的前視圖。 圖3是物品搬送車的後視圖。 圖4是物品搬送車的側視圖。 圖5是控制方塊圖。 圖6是顯示第一感測器之檢測區的平面圖。 圖7是顯示第二感測器之檢測區的平面圖。 圖8是顯示第二感測器之檢測區的平面圖。 圖9是顯示第三檢測區及第四檢測區中存在有先行車之狀態的平面圖。 圖10是顯示第一檢測區中存在有對象車之狀態的平面圖。 圖11是顯示第二檢測區中存在有對象支撐部之狀態的平面圖。 圖12是流程圖。 圖13是顯示另外的實施形態之第一感測器的檢測區的平面圖。Fig. 1 is a plan view of an article conveying device. Fig. 2 is a front view of the object handling vehicle. Fig. 3 is a rear view of the object handling vehicle. Fig. 4 is a side view of the article handling vehicle. Fig. 5 is a control block diagram. Fig. 6 is a plan view showing the detection area of the first sensor. Fig. 7 is a plan view showing the detection area of the second sensor. FIG. 8 is a plan view showing the detection area of the second sensor. Fig. 9 is a plan view showing a state where a preceding vehicle exists in a third detection area and a fourth detection area. Fig. 10 is a plan view showing a state where a target vehicle exists in the first detection area. Fig. 11 is a plan view showing a state where an object support exists in the second detection area. Fig. 12 is a flowchart. Fig. 13 is a plan view showing the detection area of the first sensor in another embodiment.
1‧‧‧軌道 1‧‧‧track
1A‧‧‧行走中軌道 1A‧‧‧Moving track
1B‧‧‧對象軌道 1B‧‧‧object track
2‧‧‧物品搬送車 2‧‧‧Item handling vehicle
2A‧‧‧自身車 2A‧‧‧Own car
2B‧‧‧對象車(第一對象車) 2B‧‧‧Target car (first target car)
3‧‧‧軌條部 3‧‧‧Rail Department
4‧‧‧直線部 4‧‧‧Straight line
18‧‧‧升降體 18‧‧‧lifting body
24‧‧‧滑動體 24‧‧‧Sliding body
26‧‧‧支撐部 26‧‧‧Support
26B‧‧‧對象支撐部 26B‧‧‧object support
E‧‧‧檢測區 E‧‧‧Detection area
E1‧‧‧第一檢測區 E1‧‧‧The first detection area
E2‧‧‧第二檢測區 E2‧‧‧The second detection area
M‧‧‧反射體 M‧‧‧reflector
M1‧‧‧第一反射體 M1‧‧‧first reflector
M2‧‧‧第二反射體 M2‧‧‧Second reflector
S‧‧‧前方檢測部 S‧‧‧Front detection unit
S1‧‧‧第一感測器 S1‧‧‧first sensor
T‧‧‧行走軌跡 T‧‧‧walking track
X‧‧‧延伸方向 X‧‧‧extension direction
Y‧‧‧寬度方向 Y‧‧‧width direction
G‧‧‧並行區間 G‧‧‧parallel interval
W‧‧‧物品 W‧‧‧item
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