CN113386465B - 流体输送系统的致动器 - Google Patents
流体输送系统的致动器 Download PDFInfo
- Publication number
- CN113386465B CN113386465B CN202110645695.9A CN202110645695A CN113386465B CN 113386465 B CN113386465 B CN 113386465B CN 202110645695 A CN202110645695 A CN 202110645695A CN 113386465 B CN113386465 B CN 113386465B
- Authority
- CN
- China
- Prior art keywords
- groove
- actuator
- grooves
- printhead
- radially extending
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000012530 fluid Substances 0.000 title abstract description 94
- 238000005086 pumping Methods 0.000 claims abstract description 70
- 239000010410 layer Substances 0.000 description 33
- 239000000758 substrate Substances 0.000 description 31
- 238000000034 method Methods 0.000 description 8
- 239000000976 ink Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000001174 ascending effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 229910017090 AlO 2 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000013060 biological fluid Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04533—Control methods or devices therefor, e.g. driver circuits, control circuits controlling a head having several actuators per chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17596—Ink pumps, ink valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04523—Control methods or devices therefor, e.g. driver circuits, control circuits reducing size of the apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14258—Multi layer thin film type piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14419—Manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14459—Matrix arrangement of the pressure chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662436276P | 2016-12-19 | 2016-12-19 | |
| US62/436,276 | 2016-12-19 | ||
| PCT/US2017/067016 WO2018118774A1 (en) | 2016-12-19 | 2017-12-18 | Actuators for fluid delivery systems |
| CN201780078592.0A CN110087886B (zh) | 2016-12-19 | 2017-12-18 | 流体输送系统的致动器 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780078592.0A Division CN110087886B (zh) | 2016-12-19 | 2017-12-18 | 流体输送系统的致动器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113386465A CN113386465A (zh) | 2021-09-14 |
| CN113386465B true CN113386465B (zh) | 2023-06-13 |
Family
ID=62557247
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110645695.9A Active CN113386465B (zh) | 2016-12-19 | 2017-12-18 | 流体输送系统的致动器 |
| CN201780078592.0A Active CN110087886B (zh) | 2016-12-19 | 2017-12-18 | 流体输送系统的致动器 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780078592.0A Active CN110087886B (zh) | 2016-12-19 | 2017-12-18 | 流体输送系统的致动器 |
Country Status (5)
| Country | Link |
|---|---|
| US (4) | US10406811B2 (enExample) |
| EP (2) | EP4282661A3 (enExample) |
| JP (3) | JP7050070B2 (enExample) |
| CN (2) | CN113386465B (enExample) |
| WO (1) | WO2018118774A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4282661A3 (en) | 2016-12-19 | 2024-06-05 | Fujifilm Dimatix, Inc. | Actuators for fluid delivery systems |
| JP7367396B2 (ja) | 2019-08-30 | 2023-10-24 | セイコーエプソン株式会社 | 圧電アクチュエーター、液体噴射ヘッド及び液体噴射装置 |
| JP7415488B2 (ja) | 2019-11-29 | 2024-01-17 | セイコーエプソン株式会社 | 圧電デバイス、液体噴射ヘッド及び液体噴射装置 |
| WO2022016332A1 (zh) * | 2020-07-20 | 2022-01-27 | 苏州美梦机器有限公司 | 物料输送装置、3d打印系统及送料方法 |
Family Cites Families (45)
| Publication number | Priority date | Publication date | Assignee | Title |
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| EP0095911B1 (en) * | 1982-05-28 | 1989-01-18 | Xerox Corporation | Pressure pulse droplet ejector and array |
| US4680595A (en) * | 1985-11-06 | 1987-07-14 | Pitney Bowes Inc. | Impulse ink jet print head and method of making same |
| US5255016A (en) * | 1989-09-05 | 1993-10-19 | Seiko Epson Corporation | Ink jet printer recording head |
| JP3366146B2 (ja) * | 1995-03-06 | 2003-01-14 | セイコーエプソン株式会社 | インク噴射ヘッド |
| JPH09104109A (ja) * | 1995-10-12 | 1997-04-22 | Sharp Corp | インクジェットヘッドおよびその製造方法 |
| JP3267151B2 (ja) * | 1996-04-12 | 2002-03-18 | ミノルタ株式会社 | 圧電振動部材およびその製造方法 |
| US6091182A (en) * | 1996-11-07 | 2000-07-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive element |
| US5814922A (en) | 1997-11-18 | 1998-09-29 | The Penn State Research Foundation | Annular piezoelectric transformer |
| CN1167550C (zh) * | 1999-09-16 | 2004-09-22 | 松下电器产业株式会社 | 墨水喷射头及其制造方法以及墨水喷射式记录装置 |
| US6554407B1 (en) * | 1999-09-27 | 2003-04-29 | Matsushita Electric Industrial Co., Ltd. | Ink jet head, method for manufacturing ink jet head and ink jet recorder |
| KR100537396B1 (ko) * | 1999-12-13 | 2005-12-19 | 후지 샤신 필름 가부시기가이샤 | 잉크젯 헤드 및 그 제조 방법 |
| JP4144810B2 (ja) * | 2000-06-21 | 2008-09-03 | 株式会社リコー | 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置 |
| JP3603828B2 (ja) * | 2001-05-28 | 2004-12-22 | 富士ゼロックス株式会社 | インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置 |
| JP2004209740A (ja) * | 2002-12-27 | 2004-07-29 | Canon Inc | 液体吐出ヘッド |
| JP3956964B2 (ja) * | 2003-09-25 | 2007-08-08 | ブラザー工業株式会社 | 液体移送装置及び圧電アクチュエータ |
| JP2005104040A (ja) * | 2003-09-30 | 2005-04-21 | Fuji Photo Film Co Ltd | インクジェットヘッド |
| KR101137643B1 (ko) | 2003-10-10 | 2012-04-19 | 후지필름 디마틱스, 인크. | 박막을 구비한 프린트 헤드 |
| US7176600B2 (en) * | 2003-12-18 | 2007-02-13 | Palo Alto Research Center Incorporated | Poling system for piezoelectric diaphragm structures |
| US7344228B2 (en) * | 2004-08-02 | 2008-03-18 | Fujifilm Dimatix, Inc. | Actuator with reduced drive capacitance |
| US7739777B2 (en) * | 2004-08-31 | 2010-06-22 | Brother Kogyo Kabushiki Kaisha | Method of manufacturing a liquid transporting apparatus |
| CN101124093A (zh) * | 2004-12-17 | 2008-02-13 | 富士胶卷迪马蒂克斯股份有限公司 | 打印头模块 |
| TWI343323B (en) * | 2004-12-17 | 2011-06-11 | Fujifilm Dimatix Inc | Printhead module |
| JP2007001051A (ja) * | 2005-06-21 | 2007-01-11 | Fuji Xerox Co Ltd | 液滴吐出ヘッド及び液滴吐出装置 |
| EP1910083A1 (en) | 2005-07-29 | 2008-04-16 | MVM Technologies, Inc. | Piezoelectric printhead |
| US7543918B2 (en) * | 2005-08-31 | 2009-06-09 | Brother Kogyo Kabushiki Kaisha | Liquid jetting head and method for producing the same |
| JP2007090871A (ja) * | 2005-08-31 | 2007-04-12 | Brother Ind Ltd | 液体吐出ヘッド及びその製造方法 |
| TWI294789B (en) * | 2005-11-29 | 2008-03-21 | Ind Tech Res Inst | Droplet ejecting head |
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-
2017
- 2017-12-18 EP EP23181876.6A patent/EP4282661A3/en active Pending
- 2017-12-18 JP JP2019532714A patent/JP7050070B2/ja active Active
- 2017-12-18 EP EP17885073.1A patent/EP3554841B1/en active Active
- 2017-12-18 CN CN202110645695.9A patent/CN113386465B/zh active Active
- 2017-12-18 WO PCT/US2017/067016 patent/WO2018118774A1/en not_active Ceased
- 2017-12-18 US US15/845,371 patent/US10406811B2/en active Active
- 2017-12-18 CN CN201780078592.0A patent/CN110087886B/zh active Active
-
2019
- 2019-09-04 US US16/560,284 patent/US10940688B2/en active Active
-
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- 2021-03-08 US US17/194,786 patent/US11498334B2/en active Active
-
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- 2022-03-28 JP JP2022051382A patent/JP7574238B2/ja active Active
- 2022-11-01 US US17/978,317 patent/US11794475B2/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| US20230050914A1 (en) | 2023-02-16 |
| US20200001607A1 (en) | 2020-01-02 |
| JP7574238B2 (ja) | 2024-10-28 |
| JP2022084871A (ja) | 2022-06-07 |
| US10940688B2 (en) | 2021-03-09 |
| US20210187949A1 (en) | 2021-06-24 |
| US11794475B2 (en) | 2023-10-24 |
| CN113386465A (zh) | 2021-09-14 |
| EP3554841A1 (en) | 2019-10-23 |
| CN110087886A (zh) | 2019-08-02 |
| CN110087886B (zh) | 2021-06-22 |
| EP4282661A2 (en) | 2023-11-29 |
| WO2018118774A9 (en) | 2019-07-04 |
| US11498334B2 (en) | 2022-11-15 |
| US20180170052A1 (en) | 2018-06-21 |
| WO2018118774A1 (en) | 2018-06-28 |
| EP4282661A3 (en) | 2024-06-05 |
| JP7050070B2 (ja) | 2022-04-07 |
| EP3554841B1 (en) | 2023-06-28 |
| JP2024180600A (ja) | 2024-12-26 |
| JP2020501945A (ja) | 2020-01-23 |
| US10406811B2 (en) | 2019-09-10 |
| EP3554841A4 (en) | 2019-12-18 |
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