CN113155344A - Flexible electronic skin device with touch information perception function - Google Patents
Flexible electronic skin device with touch information perception function Download PDFInfo
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- CN113155344A CN113155344A CN202110098482.9A CN202110098482A CN113155344A CN 113155344 A CN113155344 A CN 113155344A CN 202110098482 A CN202110098482 A CN 202110098482A CN 113155344 A CN113155344 A CN 113155344A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/22—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a non-linear resistance, e.g. thermistor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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Abstract
The invention discloses a flexible electronic skin device with a touch information perception function, which comprises a first substrate, a second substrate and a third substrate, wherein the first substrate is provided with a plurality of planar electrodes; a second substrate provided with a plurality of planar electrodes, wherein the ratio of the number of the planar electrodes on the first substrate to the number of the planar electrodes on the second substrate is 1: 3; a dielectric layer disposed between the first substrate and the second substrate, the dielectric layer being a flexible elastomeric dielectric material; the temperature-sensitive thin-film resistor is elastic, covers the first substrate and serves as a contact layer when the flexible electronic skin device interacts with the environment, any one of the planar electrodes on the second substrate is partially overlapped with the three planar electrodes opposite to the first substrate on the first substrate to form a unit group, the unit group comprises three capacitors distributed in a shape like a Chinese character 'pin', and the flexible electronic skin device can detect the stress size and direction of the contact surface and the stress position, sense the temperature of a contact object or the environment and judge whether the surface contact object slides or not.
Description
Technical Field
The invention relates to the technical field of touch sensing, in particular to a flexible electronic skin device with a touch information sensing function.
Background
In recent years, with the progress of science and technology, intelligent robot technology capable of interacting with human beings has been unprecedentedly developed. The perception capability is given to the robot, so that the robot can acquire external environment information like life species, and the key of the intelligent robot technology development is. The touch sense is one of the most important perception abilities of the human body, and the human body is in contact with an external object through the skin to perceive information such as texture, temperature, sliding and the like of the object.
Current manipulators feel little to no tactile information compared to the large amount of contact feedback available from the human hand. The robot surface is covered with a layer of fully flexible thin film sensor with data processing capability, and the thin film sensor is used as an electronic skin of the robot to realize human body-like touch function, so that the robot is endowed with more intelligent sensing capability. The electronic skin covered on the surface of the robot can provide timely tactile feedback in the process of interaction between the electronic skin and the outside, and the sensing comprises information such as the magnitude and direction of acting force applied to the surface of the robot by an object, the stress position, the temperature of the surface of the contact object, the sliding of the object on the contact surface and the like. When a robot performs a grabbing task in an unstructured environment, accurate tactile feedback is critical to whether the grabbing task can be successfully completed. At the same time, the flexible electronic skin of the robot surface can also provide more reliable safety and comfort when it interacts with humans.
Disclosure of Invention
The invention aims to design a flexible electronic skin device with a touch information perception function, which can be covered on the surface of a robot to be used as an electronic skin to endow the robot with touch perception capability and integrates three-dimensional force signal detection, temperature detection and sliding touch perception functions.
The invention is realized by the following technical scheme: a flexible electronic skin device with tactile information sensing function comprises
A first substrate provided with a plurality of planar electrodes;
the second substrate is provided with a plurality of planar electrodes, and the ratio of the number of the planar electrodes on the first substrate to the number of the planar electrodes on the second substrate is 1: 3;
a dielectric layer disposed between the first substrate and the second substrate, the dielectric layer being a flexible elastomeric dielectric material;
the temperature-sensitive thin-film resistor has elasticity, covers the first substrate and is used as a contact layer when the flexible electronic skin device interacts with the environment.
In order to further realize the invention, the following arrangement mode is adopted: the planar electrode on the first substrate is arranged between the dielectric layer and the setting surface of the first substrate, and the planar electrode on the second substrate is arranged between the dielectric layer and the setting surface of the second substrate.
The cross section of the flexible electronic skin device is observed from the side surface, and the flexible electronic skin device comprises a second substrate comprising a plurality of planar electrodes, a dielectric layer, a first substrate comprising a plurality of planar electrodes and a thin film temperature-sensitive resistor from bottom to top in sequence.
In order to further realize the invention, the following arrangement mode is adopted: any one of the planar electrodes on the second substrate is partially overlapped with the three planar electrodes opposite to the planar electrodes on the first substrate to form a unit group, and the unit group comprises three capacitors distributed in a shape like a Chinese character 'pin'; when the flexible electronic skin interacts with the outside, the relative change of three capacitors (also called three-dimensional force sensing unit group capacitors) forming one unit group (also called three-dimensional force sensing unit group) reflects the stress magnitude and direction at the position, and the position of the unit group generating signals reflects the position applied by stress (contact force); the resistance value of the temperature-sensitive film resistor at the unit group reflects the temperature information of the contact surface, the continuous wavelet transformation is carried out on the time domain signal curve with the change of the resistance value to obtain the time frequency curve of the resistor signal, and whether the contact surface object slides or not can be judged by analyzing the time frequency curve.
When the flexible skin device is observed from the top, any one planar electrode in the first substrate positioned on the upper layer can be partially overlapped with three planar electrodes corresponding to the second substrate positioned on the lower layer, and the overlapped parts form three capacitors with the same size and are in a linear symmetry 'pin' shape.
A "pin" shaped overlapping part forms a unit group, and partial areas of three plane electrodes positioned on the second substrate in the unit group exceed the overlapping area.
When a normal force perpendicular to the surface is applied on top of the flexible skin device, the three capacitances constituting the cell group increase in equal proportion.
When a shear force is applied on top of the flexible skin device, the three capacitance values that make up the cell group increase or decrease differentially.
When force in any direction is applied to the flexible skin device, the planar electrode at the stress position of the first substrate moves horizontally or vertically relative to the corresponding planar electrode in the second substrate, the direction and the size of the shearing force are reflected by measuring the change of the overlapping area of the planar electrodes in the first substrate and the second substrate, and the size of the normal force is reflected by measuring the change of the distance between the overlapping areas of the planar electrodes in the first substrate and the second substrate.
The position of the cell group where the signal change is detected is the position where the external force is applied.
In order to further realize the invention, the following arrangement mode is adopted: the temperature-sensitive thin film resistor, the first substrate, the dielectric layer and the second substrate have stretchability, the thicknesses of the first substrate and the second substrate are both larger than that of the temperature-sensitive thin film resistor, and the Young modulus of the first substrate and the Young modulus of the second substrate are both larger than that of the temperature-sensitive thin film resistor; the dielectric layer has the largest thickness and the smallest Young modulus, and can concentrate deformation caused by external force to the maximum extent.
In order to further realize the invention, the following arrangement mode is adopted: the substrate materials of the first substrate and the second substrate are PDMS films generated by mixing and curing of a main agent and a cross-linking agent in a mass ratio of 5:1, preferably, the substrate materials of the first substrate and the second substrate are configured by the main agent and the cross-linking agent in a mass ratio of 5:1-10:1 (preferably, 5: 1) and are spin-coated with the cured PDMS films; the planar electrode is prepared from a silver nanowire and graphene mixed material by adopting a template spraying method; the dielectric layer is a PDMS film which is generated by mixing and curing a main agent and a cross-linking agent in a mass ratio of 20:1, preferably, the dielectric layer is a PDMS film which is prepared by mixing the main agent and the cross-linking agent in a mass ratio of 15:1-20:1 (preferably, 20: 1) and by a mould injection molding method; the temperature-sensitive film resistor is prepared by mixing PEDOT, PSS (PH1000) and graphene powder, and preferably, the temperature-sensitive film resistor is prepared by a mixed precursor consisting of PEDOT, PSS (PH1000) and graphene powder by adopting a spraying method.
In order to further realize the invention, the following arrangement mode is adopted: the dielectric layer is internally provided with a porous structure, and the porous structure is formed by the following specific steps: when the dielectric layer is prepared, nano-scale to micro-scale soluble particles (such as salt, sugar and the like) are filled, and the dielectric layer is put into a corresponding solvent after being solidified to form a film, so that the filled soluble particles are removed, and the formed porous structure can be used for introducing air.
In order to further realize the invention, the following arrangement mode is adopted: the resistance value of the temperature-sensitive film resistor does not change obviously under the action of (uniform) pressure, and the resistance value is increased (obviously) under the action of tensile force.
The resistance of the temperature-sensitive thin-film resistor as the electronic skin contact surface decreases with increasing temperature.
When the temperature-sensitive film resistor is placed in the air, the temperature of the temperature-sensitive film resistor is consistent with the ambient temperature, and the measured resistance value can reflect the ambient temperature. When the temperature-sensitive film resistor is contacted with an external object, the temperature of the temperature-sensitive film resistor is gradually consistent with the surface temperature of the object under the action of thermal convection, and the temperature of the contacted object can be reflected by measuring the change of the resistance value of the temperature-sensitive film resistor.
And performing continuous wavelet transformation on the resistance value change curve of the temperature-sensitive film resistor, and obtaining a time-frequency curve of the resistance signal according to a transformation result. The temperature-sensitive film resistor meets the condition that when an object on the contact surface is statically placed on the surface of the temperature-sensitive film resistor, namely the shearing force of the object on the contact surface is equal to the static friction force, the time-frequency curve of a resistance signal does not have a high-frequency signal.
When the object slides on the electronic skin contact surface, the tangential component of the acting force of the object on the contact surface is gradually larger than the maximum static friction force of the object and the contact surface, the surface friction value jumps at the moment of sliding, and an obvious high-frequency signal appears on a time-frequency curve of a temperature-sensitive thin-film resistor time-domain signal curve after continuous wavelet transformation.
In order to further realize the invention, the following arrangement mode is adopted: the raised microstructures can be formed on the surfaces of the first substrate and the second substrate by a template transfer method, so that the sensitivity of the substrate under weak force is improved.
In order to further realize the invention, the following arrangement mode is adopted: the template adopted by the template transfer printing method is a photoetching silicon template, frosted glass or silk fabric.
Compared with the prior art, the invention has the following advantages and beneficial effects:
when the electronic skin is contacted with an external object, the electronic skin can detect the magnitude and the direction of the contact force, the stress position and the temperature of the surface of the object in real time, and generates a slip signal feedback in time when the object slides on the surface of the electronic skin. The magnitude, the direction and the stress position of the contact force are realized by capacitors arranged in a unit group in a delta shape, temperature and slippage signals are generated by a layer of flexible stretchable temperature-sensitive film resistor, time domain signals of the temperature-sensitive film resistor can reflect temperature changes under the condition of no external force or static force, time-frequency curves are obtained by performing continuous wavelet transformation on the time domain signals, and frequency components of the time-frequency curves can reflect whether a contact object on the surface of the electronic skin slips or not. .
The invention designs a flexible electronic skin device which can simultaneously sense the size and direction of three-dimensional force, stress position, contact surface temperature and slippage information of an object on a contact surface by combining a capacitance signal formed by overlapping parts of a planar electrode of a first substrate and a planar electrode of a corresponding second substrate, a time domain signal and a frequency domain signal of a top layer temperature-sensitive film resistor. Compared with the prior similar invention, the invention has more comprehensive touch perception function, simple preparation method, low cost, no pollution in the preparation process and wide application prospect in the field of machine touch.
Drawings
FIG. 1 is an exploded view of the present invention.
Fig. 2 is a top plan view of the present invention.
Fig. 3 is a schematic cross-sectional view of the present invention.
FIG. 4 illustrates the change in capacitance of a three-dimensional set of force-sensing cells when a tangential force in the positive x-direction is applied to the electronic skin-contacting surface.
FIG. 5 illustrates the change in capacitance of a three-dimensional set of force-sensing cells when a tangential force in the positive y-axis direction is applied to the electronic skin-contacting surface.
The temperature-sensitive thin film resistor comprises a 1-temperature-sensitive thin film resistor, a 2-first substrate, a 3-dielectric layer, a 4-second substrate and a 5-plane electrode.
Detailed Description
The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the embodiments of the present invention will be described in detail and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are part of the embodiments of the present invention, but not all of them. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.
In the description of the present invention, it is to be understood that the terms etc. indicate orientations or positional relationships based on those shown in the drawings, only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
It is worth noting that: in the present application, when it is necessary to apply the known technology or the conventional technology in the field, the applicant may have the situation that the known technology or/and the conventional technology is not specifically described in the text, but the technical means is not specifically disclosed in the text, and the present application is considered to be not in compliance with the twenty-sixth third clause of the patent law.
The noun explains:
PDMS: polydimethylsiloxane.
PEDOT PSS (PH 1000): poly (3, 4-ethylenedioxythiophene) polystyrene sulfonate (type PH 1000).
Example 1:
a flexible electronic skin device with touch information perception function is a flexible device which can be covered on the surface of a robot to be used as electronic skin to endow the electronic skin with touch perception capability, integrates three-dimensional force signal detection, temperature detection and sliding touch perception functions, and particularly adopts the following setting modes as shown in figures 1-4: comprises that
A first substrate 2 provided with a plurality of planar electrodes 5;
a second substrate 4 provided with a plurality of planar electrodes 5, and the ratio of the number of planar electrodes 5 on the first substrate 2 to the number of planar electrodes 5 on the second substrate 4 is 1: 3;
a dielectric layer 3 disposed between the first substrate 2 and the second substrate 4, the dielectric layer being a flexible and elastic dielectric substance;
the temperature-sensitive thin-film resistor 1 has elasticity, covers the first substrate 2, and is used as a contact layer when the flexible electronic skin device interacts with the environment.
In the setting, the planar electrode 5 on the first substrate 2 is disposed between the dielectric layer 3 and the setting surface of the first substrate 2, and the planar electrode 5 on the second substrate 4 is disposed between the dielectric layer 3 and the setting surface of the second substrate 4.
The cross section of the flexible electronic skin device is observed from the side surface, and the flexible electronic skin device comprises a second substrate comprising a plurality of planar electrodes, a dielectric layer, a first substrate comprising a plurality of planar electrodes and a thin film temperature-sensitive resistor from bottom to top in sequence.
Example 2:
the present embodiment is further optimized based on the above embodiment, and the same parts as those in the foregoing technical solution will not be described herein again, as shown in fig. 1 to 4, in order to further better implement the present invention, the following setting manner is particularly adopted: any one of the planar electrodes 5 on the second substrate 4 is partially overlapped with the three planar electrodes 5 opposite to the planar electrodes on the first substrate 2 to form a unit group, and the unit group comprises three capacitors distributed in a shape like a Chinese character pin; when the flexible electronic skin interacts with the outside, the relative change of three capacitors (also called three-dimensional force sensing unit group capacitors) forming one unit group (also called three-dimensional force sensing unit group) reflects the stress magnitude and direction at the position, and the position of the unit group generating signals reflects the position applied by stress (contact force); the resistance value of the temperature-sensitive film resistor 1 at the unit group reflects the temperature information of the contact surface, continuous wavelet transformation is carried out on a time domain signal curve with the change of the resistance value to obtain a time frequency curve of the resistance signal, and whether the contact surface object slides or not can be judged by analyzing the time frequency curve.
When the flexible skin device is observed from the top, any one of the planar electrodes 5 in the first substrate 2 on the upper layer can be partially overlapped with three corresponding planar electrodes 5 in the second substrate 4 on the lower layer, and the overlapped parts form three capacitors with the same size and are in a linear symmetry shape like a Chinese character 'pin'.
One overlapping portion in the shape of a Chinese character 'pin' forms a unit group, and partial areas of three planar electrodes 5 positioned on the second substrate 4 in the unit group exceed the overlapping area.
When a normal force perpendicular to the surface is applied on top of the flexible skin device, the three capacitances constituting the cell group increase in equal proportion.
When a shear force is applied on top of the flexible skin device, the three capacitance values that make up the cell group increase or decrease differentially.
When a force in any direction is applied to the flexible skin device, the planar electrode 5 at the position where the first substrate 2 is stressed moves horizontally or vertically relative to the corresponding planar electrode 5 in the second substrate 4, the direction and the magnitude of the shearing force are reflected by measuring the change of the overlapping area of the planar electrodes 5 in the first substrate 2 and the second substrate 4, and the magnitude of the normal force is reflected by measuring the change of the distance between the overlapping areas of the planar electrodes 5 in the first substrate 2 and the second substrate 4.
The position of the cell group where the signal change is detected is the position where the external force is applied.
Example 3:
the present embodiment is further optimized based on any of the above embodiments, and parts that are the same as the above technical solutions will not be described herein again, as shown in fig. 1 to 4, in order to further better implement the present invention, the following setting modes are particularly adopted: the temperature-sensitive thin film resistor 1, the first substrate 2, the dielectric layer 3 and the second substrate 4 are all stretchable, the thicknesses of the first substrate 2 and the second substrate 4 are both larger than that of the temperature-sensitive thin film resistor 1, and the Young modulus of the first substrate 2 and the Young modulus of the second substrate 4 are both larger than that of the temperature-sensitive thin film resistor 1; in the temperature-sensitive thin-film resistor 1, the first substrate 2, the dielectric layer 3 and the second substrate 4, the thickness of the dielectric layer 3 is the largest, the Young modulus is the smallest, and deformation caused by external force can be concentrated to the largest extent.
Example 4:
the present embodiment is further optimized based on any of the above embodiments, and parts that are the same as the above technical solutions will not be described herein again, as shown in fig. 1 to 4, in order to further better implement the present invention, the following setting modes are particularly adopted: the substrate materials of the first substrate 2 and the second substrate 4 are PDMS films formed by mixing and curing a main agent and a cross-linking agent in a mass ratio of 5:1, preferably, the substrate materials of the first substrate 2 and the second substrate 4 are prepared by the main agent and the cross-linking agent in a mass ratio of 5:1-10:1 (preferably, 5: 1) and are spin-coated with the cured PDMS films; the planar electrode 5 is prepared from a silver nanowire and graphene mixed material by adopting a template spraying method; the dielectric layer 3 is a PDMS film which is prepared by mixing and solidifying a main agent and a cross-linking agent in a mass ratio of 15:1-20:1, preferably, the dielectric layer 3 is a PDMS film which is prepared by mixing the main agent and the cross-linking agent in a mass ratio of 20:1 and adopting a mold injection molding method; the temperature-sensitive thin film resistor 1 is prepared by mixing PEDOT: PSS (PH1000) and graphene powder, and preferably, the temperature-sensitive thin film resistor 1 is prepared by a mixed precursor composed of PEDOT: PSS (PH1000) and graphene powder by adopting a spraying method.
Preferably, the dielectric layer 3 further has a porous structure inside, and the porous structure is specifically formed by: when the dielectric layer 3 is prepared, nano-scale to micro-scale soluble particles (such as salt, sugar, polystyrene microspheres and the like) are filled, and the solidified film is placed into a corresponding solvent to remove the filled soluble particles, so that the formed porous structure can be used for introducing air and enhancing the force sensing performance of the electronic skin device.
Example 5:
the present embodiment is further optimized based on any of the above embodiments, and parts that are the same as the above technical solutions will not be described herein again, as shown in fig. 1 to 4, in order to further better implement the present invention, the following setting modes are particularly adopted: the resistance value of the temperature-sensitive film resistor 1 does not change obviously under the action of (uniform) pressure, and the resistance value is increased (obviously) under the action of tensile force.
When the temperature-sensitive thin-film resistor is applied, when the electronic skin works under the action of external force, the temperature and the external force simultaneously affect the resistance value of the temperature-sensitive thin-film resistor 1, so that strain compensation needs to be carried out on the resistance signal of the temperature-sensitive thin-film resistor 1 according to a capacitance signal generated by the delta-shaped unit group, and more accurate temperature information is obtained.
The resistance of the temperature-sensitive thin-film resistor as the electronic skin contact surface decreases with increasing temperature.
When the temperature-sensitive film resistor 1 is placed in the air, the temperature is consistent with the ambient temperature, and the measured resistance value can reflect the ambient temperature. When the temperature-sensitive film resistor 1 is contacted with an external object, the temperature of the temperature-sensitive film resistor is gradually consistent with the surface temperature of the object under the action of thermal convection, and the temperature of the contacted object can be reflected by measuring the change of the resistance value of the temperature-sensitive film resistor.
And (3) performing Continuous Wavelet Transform (CWT) on the resistance value change curve (i.e. time domain signal) of the temperature-sensitive thin-film resistor 1, and obtaining a time frequency curve of the resistance signal according to the transform result. The temperature-sensitive film resistor 1 meets the requirement that when an object on a contact surface is statically placed on the surface of the temperature-sensitive film resistor, namely the shearing force of the object on the contact surface is equal to the static friction force, a time-frequency curve of a resistance signal does not have a high-frequency signal.
Before the object slides on the electronic skin contact surface, the tangential component of the acting force of the object on the contact surface is gradually larger than the maximum static friction force of the object and the contact surface, the surface friction value jumps at the moment of sliding, and an obvious high-frequency signal appears on a time-frequency curve of a time-domain signal curve of the temperature-sensitive thin-film resistor 1 after Continuous Wavelet Transform (CWT).
Example 6:
the present embodiment is further optimized based on any of the above embodiments, and parts that are the same as the above technical solutions will not be described herein again, as shown in fig. 1 to 4, in order to further better implement the present invention, the following setting modes are particularly adopted: the template transfer method can be adopted to generate the convex microstructures on the surfaces of the first substrate and the second substrate so as to increase the sensitivity of the microstructures under weak force.
The template adopted by the template transfer printing method is a photoetching silicon template, frosted glass or silk fabric.
Example 7:
referring to the device structure diagram, the plan view and the cross section diagram shown in fig. 1 to 3, the flexible electronic skin device in the embodiment is composed of a second substrate 4 containing 27 planar electrodes 5, a first substrate 2 containing 9 planar electrodes 5, a dielectric substance (dielectric layer 3) arranged between the first substrate 2 and the second substrate 4, and a temperature-sensitive thin film resistor 1 arranged above the first substrate 2. Any one of the planar electrodes 5 in the first substrate and the corresponding three planar electrodes 5 in the second substrate 4 may form a "pin" shaped three-dimensional force sensing unit group. The temperature-sensitive film resistor 1 is used as a contact layer of the flexible electronic skin and the outside, senses temperature information and judges whether a contact object on the surface of the flexible electronic skin device slides on the surface.
The preparation process of the flexible electronic skin device comprises the following steps:
step 1: preparing one part of PDMS precursor with the mass ratio of the main agent to the cross-linking agent being 5:1 and 20:1 respectively.
Step 2: respectively preparing the two precursors into films and curing the films for 2 hours at the temperature of 80 ℃, preparing the precursors with the configuration ratio of 5:1 by adopting a spin coating method, forming the films to be thinner and using the films as substrates of a first substrate and a second substrate; the precursor with the configuration ratio of 20:1 is prepared by adopting an injection molding method, and the formed film is thicker and is used as a dielectric layer 3;
and step 3: depositing the mixed dispersion liquid of the silver nanowires and the graphene on the first substrate 2 and the second substrate 4 by adopting a template spraying method to serve as a planar electrode 5;
and 4, step 4: aligning the first substrate 2, the second substrate 4 and the dielectric layer 3 after the planar electrode 5 is deposited under a microscope, and attaching the substrates by impressing;
and 5: mix PEDOT: PSS (PH1000) with graphene (powder) at a ratio of 10:1, mixing and fully stirring to obtain a uniform dispersion liquid, and depositing the uniform dispersion liquid above a first substrate 2 by a spraying method;
step 6: and (4) annealing the sample obtained in the step (5) at 160 ℃ for 2 hours to obtain the complete electric flexible electronic skin device.
Assuming that initial capacitance values of three-dimensional force sensing unit groups of the three-dimensional force sensing unit groups are respectively C1, C2 and C3, under the action of any static external force, the change rates of the three capacitance values relative to the initial values are respectively delta C1, delta C2 and delta C3. By epsilon0Denotes the vacuum dielectric constant,. epsilonrThe relative dielectric constant of the dielectric substance is represented, S represents the overlapping area of capacitor plates, d represents the distance between the plates, and the capacitance calculation formula is as follows:
when a certain unit group is acted by a force vertical to the surface of the electronic skin, three capacitances S of the component unit group are unchanged, d is reduced, and therefore the three capacitance values of the unit group are increased in equal proportion, wherein delta C1 is delta C2 is delta C3, and the Z direction is the moment; when a shear force in the positive x-axis direction is applied to the contact surface of the e-skin, as shown in fig. 4, when C1 is unchanged, C2 decreases, C3 increases, δ C1 is 0, δ C2 is- δ C3; when a force in the positive y-axis direction acts on the electronic skin surface, as shown in fig. 5, C1 increases, C2 decreases, C3 decreases, and δ C1 ═ δ C2 ═ δ C3; when a static force F (Fx, Fy, Fz) in any direction is applied to the electronic skin surface, the values of C1, C2, and C3 are respectively changed to C1 ', C2 ', and C3 ', and it can be inferred that the sensitivities (δ Fx, δ Fy, δ Fz) of the three-dimensional force sensing can be respectively expressed as:
therefore, the capacitance array composed of the first substrate 2, the second substrate 4 and the dielectric layer 3 can be used for sensing three-dimensional force information.
When an object is placed on the surface of an electronic skin statically, the temperature-sensitive film resistor 1 of the contact surface outputs a resistance signal which changes along with the change of the surface temperature. When the shearing force applied by the object to the electronic skin contact surface is increased and gradually larger than the maximum static friction force, or the normal pressure is reduced, so that the maximum static friction force of the contact surface is gradually smaller than the shearing force applied by the object on the electronic skin contact surface, the object slides on the surface of the electronic skin. At the moment when the object is turned from a static state to a sliding state, high-frequency vibration occurs in the material of the temperature-sensitive thin-film resistor 1 due to sudden change of the surface shear force signal, and the output signal generates high-frequency vibration along with the high-frequency vibration. And (3) performing continuous wavelet transformation on the resistance signal, wherein the sampling frequency can be 10kHz, and obtaining time-frequency information (time-frequency curve) of the resistance signal. A significantly higher high frequency signal than under static force can be observed at the instant before the slip occurs. Since the strain affects the resistance of the temperature-sensitive thin-film resistor 1, strain compensation must be performed on the temperature-sensitive resistor signal according to the response characteristics of the temperature-sensitive thin-film resistor 1 under different external forces when analyzing data. Therefore, the (elastic) thin film temperature-sensitive resistor 1 is used as the contact surface of the electronic skin, and the time-domain signal and the time-frequency signal of the (elastic) thin film temperature-sensitive resistor can be respectively used for detecting the temperature information of the contact surface and the slippage information of an object on the surface of the electronic skin.
Through the embodiment, the flexible electronic skin which realizes the touch perception function in the process of interacting with the outside can be applied to not only industrial intelligent manufacturing, but also medical services, such as intelligent operation, pathological diagnosis and the like.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and any simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are within the scope of the present invention.
Claims (9)
1. A flexible electronic dermal device with tactile information perception, characterized by: comprises that
A first substrate (2) provided with a plurality of planar electrodes (5);
a second substrate (4) provided with a plurality of planar electrodes (5), and the ratio of the number of planar electrodes (5) on the first substrate (2) to the number of planar electrodes (5) on the second substrate (4) is 1: 3;
a dielectric layer (3) interposed between the first substrate (2) and the second substrate (4);
the temperature-sensitive thin-film resistor (1) covers the first substrate (2) and is used as a contact layer when the flexible electronic skin device interacts with the environment.
2. A flexible electronic dermatological device with tactile-information perceiving function according to claim 1, wherein: the planar electrode (5) on the first substrate (2) is arranged between the dielectric layer (3) and the arrangement surface of the first substrate (2), and the planar electrode (5) on the second substrate (4) is arranged between the dielectric layer (3) and the arrangement surface of the second substrate (4).
3. A flexible electronic dermatological device with tactile-information perceiving function according to claim 2, wherein: any one of the planar electrodes (5) on the second substrate (4) is partially overlapped with the three planar electrodes (5) opposite to the planar electrodes on the first substrate (2) to form a unit group, and the unit group comprises three capacitors distributed in a shape like a Chinese character pin; when the flexible electronic skin interacts with the outside, the relative change of three capacitors forming a unit group reflects the stress magnitude and direction at the position, and the position of the unit group generating signals reflects the position applied by the stress; the resistance value of the temperature-sensitive thin-film resistor (1) reflects the temperature information of the contact surface, continuous wavelet transformation is carried out on a time domain signal curve with the change of the resistance value to obtain a time frequency curve of a resistance signal, and whether the contact surface object slides or not can be judged by analyzing the time frequency curve.
4. A flexible electronic skin device with a tactile information perception function according to any one of claims 1 to 3, wherein: the temperature-sensitive thin film resistor (1), the first substrate (2), the dielectric layer (3) and the second substrate (4) are all stretchable, and the dielectric layer (3) is largest in thickness and smallest in Young modulus.
5. A flexible electronic skin device with a tactile information perception function according to any one of claims 1 to 3, wherein: the substrate materials of the first substrate (2) and the second substrate (4) are used as main agents and cross-linking agents, and the main agents and the cross-linking agents are mixed and cured to form a PDMS film in a mass ratio of 5:1-10: 1; the planar electrode (5) is prepared from a silver nanowire and graphene mixed material by adopting a template spraying method; the dielectric layer (3) is a PDMS film which is generated by mixing a main agent and a cross-linking agent in a mass ratio of 15:1-20: 1; the temperature-sensitive film resistor (1) is prepared by mixing PEDOT (PEDOT-PSS) (PH1000) and graphene powder.
6. A flexible electronic skin device with a tactile information perception function according to any one of claims 1 to 3, wherein: the dielectric layer (3) is internally provided with a porous structure, and the porous structure is formed by the following specific steps: and filling nano-scale to micron-scale soluble particles when the dielectric layer (3) is prepared, and putting the dielectric layer into a corresponding solvent after the dielectric layer is solidified into a film to remove the filled soluble particles, thus obtaining the dielectric layer.
7. A flexible electronic skin device with a tactile information perception function according to any one of claims 1 to 3, wherein: the resistance value of the temperature-sensitive film resistor (1) is not obviously changed under the action of pressure, and is increased under the action of tensile force.
8. A flexible electronic skin device with a tactile information perception function according to any one of claims 1 to 3, wherein: the raised microstructures can be generated on the surfaces of the first substrate and the second substrate by adopting a template transfer method so as to increase the sensitivity of the microstructures under weak force.
9. A flexible electronic dermatological device with tactile-information perceiving function according to claim 8, wherein: the template adopted by the template transfer printing method is a photoetching silicon template, frosted glass or silk fabric.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114136505A (en) * | 2021-12-09 | 2022-03-04 | 福州京东方光电科技有限公司 | Sensor, detection circuit thereof and electronic skin |
| CN114441461A (en) * | 2021-12-16 | 2022-05-06 | 之江实验室 | Proximity sense-contact sense sensor based on micro-nano optical fiber |
| CN114489338A (en) * | 2022-01-25 | 2022-05-13 | 同济大学 | Multilayer electronic skin structure |
| CN114536355A (en) * | 2022-01-26 | 2022-05-27 | 浙江大学 | Expandable and reconfigurable multi-stage perception flexible robot skin |
Citations (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0381187A2 (en) * | 1989-02-01 | 1990-08-08 | Wacoh Corporation | Force detector using resistance elements |
| CN101059380A (en) * | 2007-02-16 | 2007-10-24 | 中国科学院上海微系统与信息技术研究所 | Flexible capacitance type touch sensor production method |
| CN101082523A (en) * | 2007-06-27 | 2007-12-05 | 中国科学院上海微系统与信息技术研究所 | Method for making flexibility temperature sensor |
| CN102565600A (en) * | 2012-02-21 | 2012-07-11 | 电子科技大学 | Method for determining and testing ohmic contact between black silicon material and metal electrode |
| CN102589759A (en) * | 2012-02-20 | 2012-07-18 | 浙江大学 | Bionic flexible touch sense sensing array based on piezoresistive type and capacitance type combination |
| CN102713546A (en) * | 2009-10-14 | 2012-10-03 | 国立大学法人东北大学 | Sheet-like tactile sensor system |
| CN103743503A (en) * | 2013-12-31 | 2014-04-23 | 浙江大学 | Flexible three-dimensional force touch sensor based on piezoresistive and capacitive combination |
| CN104215363A (en) * | 2014-09-05 | 2014-12-17 | 浙江大学 | Soft tactile-slip sensation composite sensing array based on pressure-sensitive conductive rubber |
| CN104236764A (en) * | 2014-09-29 | 2014-12-24 | 合肥工业大学 | Capacitive slide tactile sensor |
| CN104251751A (en) * | 2014-09-26 | 2014-12-31 | 中国科学院半导体研究所 | Multi-sense organ integrated electronic skin and manufacturing method thereof |
| CN104897317A (en) * | 2015-06-18 | 2015-09-09 | 西安电子科技大学 | Flexible tactile sense-pressure sense sensor based on bionic structure |
| KR20160125564A (en) * | 2015-04-21 | 2016-11-01 | 성균관대학교산학협력단 | Fabricating multi force sensor possible to detect a proximity |
| CN106352927A (en) * | 2016-09-29 | 2017-01-25 | 中国科学院重庆绿色智能技术研究院 | Graphene-distributed multi-physical-quantity sensor array system |
| CN106959175A (en) * | 2017-03-21 | 2017-07-18 | 合肥工业大学 | A kind of Grazing condition condenser type based on pyramid structure slides touch sensor |
| WO2018144772A1 (en) * | 2017-02-03 | 2018-08-09 | The Regents Of The University Of California | Enhanced pressure sensing performance for pressure sensors |
| KR101884395B1 (en) * | 2017-03-13 | 2018-08-30 | 재단법인 나노기반소프트일렉트로닉스연구단 | Capacitive pressure sensor comprising ionic liquid and graphene, and method for manufacturing of the same |
| CN109115376A (en) * | 2018-09-28 | 2019-01-01 | 清华大学深圳研究生院 | A kind of condenser type pliable pressure sensor and preparation method thereof |
| CN109163824A (en) * | 2018-10-10 | 2019-01-08 | 北京理工大学 | A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function |
| CN109655170A (en) * | 2019-01-14 | 2019-04-19 | 清华大学 | Flexible thin film sensor and detection device |
| CN109870254A (en) * | 2019-03-01 | 2019-06-11 | 厦门大学 | A kind of sliding touch sensor of the condenser type of high sensitivity |
| CN110132561A (en) * | 2019-05-15 | 2019-08-16 | 中北大学 | A kind of blade stress towards extreme environment/strain dynamic test method |
| CN110987029A (en) * | 2019-12-17 | 2020-04-10 | 华中科技大学 | Multifunctional flexible sensor and preparation method and application thereof |
| CN111337152A (en) * | 2020-02-26 | 2020-06-26 | 京东方科技集团股份有限公司 | Electronic skin and electronic equipment |
| CN111366274A (en) * | 2020-04-07 | 2020-07-03 | 安徽大学 | Full-flexible capacitive three-dimensional force touch sensor |
| CN111537115A (en) * | 2020-04-27 | 2020-08-14 | 西安交通大学 | Piezoresistive flexible three-dimensional force sensor array and preparation method thereof |
| CN111552381A (en) * | 2020-04-23 | 2020-08-18 | 中国科学院半导体研究所 | Capacitive pressure sensor, preparation method thereof and piano gloves |
| CN112004874A (en) * | 2018-01-01 | 2020-11-27 | 罗地亚经营管理公司 | Pressure sensing layer and device including the same |
-
2021
- 2021-01-25 CN CN202110098482.9A patent/CN113155344B/en active Active
Patent Citations (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0381187A2 (en) * | 1989-02-01 | 1990-08-08 | Wacoh Corporation | Force detector using resistance elements |
| CN101059380A (en) * | 2007-02-16 | 2007-10-24 | 中国科学院上海微系统与信息技术研究所 | Flexible capacitance type touch sensor production method |
| CN101082523A (en) * | 2007-06-27 | 2007-12-05 | 中国科学院上海微系统与信息技术研究所 | Method for making flexibility temperature sensor |
| CN102713546A (en) * | 2009-10-14 | 2012-10-03 | 国立大学法人东北大学 | Sheet-like tactile sensor system |
| CN102589759A (en) * | 2012-02-20 | 2012-07-18 | 浙江大学 | Bionic flexible touch sense sensing array based on piezoresistive type and capacitance type combination |
| CN102565600A (en) * | 2012-02-21 | 2012-07-11 | 电子科技大学 | Method for determining and testing ohmic contact between black silicon material and metal electrode |
| CN103743503A (en) * | 2013-12-31 | 2014-04-23 | 浙江大学 | Flexible three-dimensional force touch sensor based on piezoresistive and capacitive combination |
| CN104215363A (en) * | 2014-09-05 | 2014-12-17 | 浙江大学 | Soft tactile-slip sensation composite sensing array based on pressure-sensitive conductive rubber |
| CN104251751A (en) * | 2014-09-26 | 2014-12-31 | 中国科学院半导体研究所 | Multi-sense organ integrated electronic skin and manufacturing method thereof |
| CN104236764A (en) * | 2014-09-29 | 2014-12-24 | 合肥工业大学 | Capacitive slide tactile sensor |
| KR20160125564A (en) * | 2015-04-21 | 2016-11-01 | 성균관대학교산학협력단 | Fabricating multi force sensor possible to detect a proximity |
| CN104897317A (en) * | 2015-06-18 | 2015-09-09 | 西安电子科技大学 | Flexible tactile sense-pressure sense sensor based on bionic structure |
| CN106352927A (en) * | 2016-09-29 | 2017-01-25 | 中国科学院重庆绿色智能技术研究院 | Graphene-distributed multi-physical-quantity sensor array system |
| WO2018144772A1 (en) * | 2017-02-03 | 2018-08-09 | The Regents Of The University Of California | Enhanced pressure sensing performance for pressure sensors |
| KR101884395B1 (en) * | 2017-03-13 | 2018-08-30 | 재단법인 나노기반소프트일렉트로닉스연구단 | Capacitive pressure sensor comprising ionic liquid and graphene, and method for manufacturing of the same |
| CN106959175A (en) * | 2017-03-21 | 2017-07-18 | 合肥工业大学 | A kind of Grazing condition condenser type based on pyramid structure slides touch sensor |
| CN112004874A (en) * | 2018-01-01 | 2020-11-27 | 罗地亚经营管理公司 | Pressure sensing layer and device including the same |
| CN109115376A (en) * | 2018-09-28 | 2019-01-01 | 清华大学深圳研究生院 | A kind of condenser type pliable pressure sensor and preparation method thereof |
| CN109163824A (en) * | 2018-10-10 | 2019-01-08 | 北京理工大学 | A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function |
| CN109655170A (en) * | 2019-01-14 | 2019-04-19 | 清华大学 | Flexible thin film sensor and detection device |
| CN109870254A (en) * | 2019-03-01 | 2019-06-11 | 厦门大学 | A kind of sliding touch sensor of the condenser type of high sensitivity |
| CN110132561A (en) * | 2019-05-15 | 2019-08-16 | 中北大学 | A kind of blade stress towards extreme environment/strain dynamic test method |
| CN110987029A (en) * | 2019-12-17 | 2020-04-10 | 华中科技大学 | Multifunctional flexible sensor and preparation method and application thereof |
| CN111337152A (en) * | 2020-02-26 | 2020-06-26 | 京东方科技集团股份有限公司 | Electronic skin and electronic equipment |
| CN111366274A (en) * | 2020-04-07 | 2020-07-03 | 安徽大学 | Full-flexible capacitive three-dimensional force touch sensor |
| CN111552381A (en) * | 2020-04-23 | 2020-08-18 | 中国科学院半导体研究所 | Capacitive pressure sensor, preparation method thereof and piano gloves |
| CN111537115A (en) * | 2020-04-27 | 2020-08-14 | 西安交通大学 | Piezoresistive flexible three-dimensional force sensor array and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 刘海: "柔性压力传感器三维打印制造方法研究", 《CNKI》 * |
| 李世彬等: "气体压强对非晶硅薄膜光学特性的影响", 《光电子.激光》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114136505A (en) * | 2021-12-09 | 2022-03-04 | 福州京东方光电科技有限公司 | Sensor, detection circuit thereof and electronic skin |
| CN114441461A (en) * | 2021-12-16 | 2022-05-06 | 之江实验室 | Proximity sense-contact sense sensor based on micro-nano optical fiber |
| CN114441461B (en) * | 2021-12-16 | 2024-04-02 | 之江实验室 | Proximity sense-contact sense sensor based on micro-nano optical fiber |
| CN114489338A (en) * | 2022-01-25 | 2022-05-13 | 同济大学 | Multilayer electronic skin structure |
| CN114489338B (en) * | 2022-01-25 | 2024-03-29 | 同济大学 | Multilayer electronic skin structure |
| CN114536355A (en) * | 2022-01-26 | 2022-05-27 | 浙江大学 | Expandable and reconfigurable multi-stage perception flexible robot skin |
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