CN111366274A - Full-flexible capacitive three-dimensional force touch sensor - Google Patents
Full-flexible capacitive three-dimensional force touch sensor Download PDFInfo
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- CN111366274A CN111366274A CN202010264842.3A CN202010264842A CN111366274A CN 111366274 A CN111366274 A CN 111366274A CN 202010264842 A CN202010264842 A CN 202010264842A CN 111366274 A CN111366274 A CN 111366274A
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- G—PHYSICS
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
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Abstract
A full-flexible capacitive three-dimensional force touch sensor comprises a flexible cavity, a flexible substrate, a flexible electrode, a semicircular annular groove and a hemispherical contact, wherein the flexible electrode is led out through a lead and is grounded to form a common end, the flexible cavity is a cylindrical barrel, the flexible substrate is a circular plate, the flexible cavity is adhered to the flexible substrate, square flexible induction electrodes are in a 2 × 2 array structure and are adhered to the upper surface of the flexible substrate, a circular flexible public polar plate is adhered to the bottom surface of the hemispherical contact, the semicircular annular groove is adhered to the inner surface of the flexible cavity and surrounds the bottom of the hemispherical contact, the semicircular annular groove is adhered to the circular flexible public polar plate, an air layer is arranged between the circular flexible public polar plate and the square flexible induction electrodes, and the vertical projection area of the circular flexible public polar plate on the flexible substrate always comprises four areas of the square flexible induction electrodes.
Description
Technical Field
The invention relates to a fully flexible capacitive three-dimensional force touch sensor, and belongs to the field of sensors.
Background
With the rapid development of manufacturing technology, functional materials, integrated packaging technology and intelligent sensor technology, flexible electronic skin is always the focus of attention of researchers at home and abroad. The three-dimensional force touch sensor is used as an important component of electronic skin, can sense normal force and tangential force at the same time, and is widely applied to the fields of artificial skin, service robots, medical robots and the like. Traditional rigid metal, semiconductor, magnetic and fiber optic three-dimensional force tactile sensors are of critical importance in industrial production, smart assembly and application to micro-robotic based sophisticated manufacturing processes. However, the devices generally have the defects of poor flexibility, poor wearing comfort, low sensitivity and the like, so that the wide application of the devices in flexible electronic skins is limited.
Compared with the traditional touch sensor, the flexible three-dimensional force touch sensor attracts much attention with the advantages of unique flexibility and elasticity, high sensitivity, easy preparation and the like, and the performance requirements of the next generation of flexible wearable electronic products are met to the maximum extent.
At present, a plurality of conductive nano materials such as graphene nano sheets, carbon nanotubes, carbon black, silver nanowires, metal nanoparticles, liquid metal alloys and the like are increasingly used for flexible wearable devices. In particular, the complex manufacturing method and the possible liquid metal leakage are harmful to the flexible electrode. In addition, polydimethylsiloxane and silicone rubber have excellent electrical insulation and chemical stability, high elasticity, biocompatibility, moldability and other excellent properties, and are widely used in wearable electronic devices and stretchable electrode plates. While conductive nanomaterials and flexible plates provide a good infrastructure, the latest developments face significant challenges in manufacturing three-dimensional touch sensors from highly sensitive and flexible materials based on simple, efficient, low-cost fabrication processes.
In a related study abroad, Hidetoshi Takahashi et al, tokyo university, japan, made a piezoresistive three-dimensional force tactile sensor based on silicon piezoresistive effect. The sensor consists of two silicon cantilever beams with doped side walls and one silicon cantilever beam with doped upper surface, directional doping is adopted, and when three cantilever beams deform in the corresponding directions, the resistance changes, so that the sensor has the advantages of high measurement precision, high sensitivity and the like; however, since the silicon wafer is fragile, the performance of the sensor is greatly affected when a large force is applied.
The research on the flexible three-dimensional force touch sensor is also developed in China in many colleges and universities. The flexible three-dimensional force touch sensor is designed by using a force-sensitive conductive material based on piezoresistive effect, and when three-dimensional force is applied, effective information of the three-dimensional force applied to an object is obtained by detecting the change of the resistance value of the sensor; however, the piezoresistive sensor has low measurement accuracy and needs to be considered further.
In summary, at present, certain research is available on flexible three-dimensional force touch sensors at home and abroad. The three-dimensional force touch sensor has remarkable progress in various types of three-dimensional force touch sensors, such as piezoresistive type, piezoelectric type, photoelectric type, capacitance type and the like, and demonstrates the feasibility of the three-dimensional force touch sensor applied to electronic skin. The flexible three-dimensional force touch sensor based on the capacitor has the characteristics of high sensitivity, high resolution, small hysteresis, quick dynamic response and the like. However, the previous research focuses on the aspects of structural design, finite element simulation, performance characteristics and the like, and is lack of comprehensive verification combining theoretical modeling, finite element simulation and actual measurement, so that the design of a novel and efficient structure is particularly difficult.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention provides a fully flexible capacitive three-dimensional force touch sensor which is novel in structure, has higher detection sensitivity and faster response speed.
The technical scheme includes that the flexible electrode comprises a square flexible induction electrode and a round flexible public electrode plate, all the flexible electrodes are led out through leads and grounded to form a public end, the flexible cavity is a cylindrical barrel, the flexible substrate is a circular plate, the center of the circle of the lower surface of the flexible substrate is arranged at the center of the circle of the flexible cavity, the bottom of the flexible cavity is adhered to the upper surface of the flexible substrate, the four square flexible induction electrodes are arranged in a 2 × 2 array structure and adhered to the upper surface of the flexible substrate, the center of symmetry of the four square flexible induction electrodes is arranged at the center of the circle of the flexible substrate, the round flexible public electrode plate is adhered to the bottom surface of the hemispherical contact, the round flexible induction electrode plate is adhered to the bottom of the hemispherical contact and adhered to the inner surface of the flexible cavity together, the semi-circular groove is also adhered to the round flexible public electrode plate, a layer of an air layer is arranged between the round flexible induction electrode plate and the four square flexible induction electrodes, and meanwhile, the round flexible induction electrode plate is projected on the square flexible public induction electrode plate in a vertical area on the flexible substrate.
Compared with the prior art, the fully-flexible capacitive three-dimensional force touch sensor is an innovative structural form, the capacitors which are distributed in a space three-dimensional manner are formed by the square flexible sensing electrodes and the flexible electrodes of the round flexible common polar plates, air is used as a dielectric layer, and the distance between the polar plates is changed under the action of three-dimensional force, so that the dielectric constant is improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
Fig. 1 is a schematic view of the overall structure of one embodiment of the present invention.
Fig. 2 is an exploded view of the structure of one embodiment of the present invention.
FIG. 3 is a schematic diagram of the complete cross-sectional structure and dimensional parameters of an embodiment of the present invention.
FIG. 4 is a schematic diagram of the structure of a flexible substrate in one embodiment of the invention.
Fig. 5 is a schematic structural diagram of a square flexible sensing electrode according to an embodiment of the present invention.
Fig. 6 is a schematic diagram of a circular flexible common plate according to an embodiment of the present invention.
Fig. 7 is a schematic diagram of a hemisphere contact in one embodiment of the invention.
Fig. 8 is a schematic structural diagram of a mold of a flexible cavity in an embodiment of the invention.
Fig. 9 is a schematic structural view of a mold for a flexible substrate in an embodiment of the invention.
Fig. 10 is a schematic structural diagram of a die for a square flexible sensing electrode according to an embodiment of the present invention.
Fig. 11 is a schematic structural diagram of a mold for a circular flexible common plate in an embodiment of the invention.
Fig. 12 is a schematic structural view of a mold for the semicircular annular groove in the embodiment of the present invention.
FIG. 13 is a graph comparing normal force results for one embodiment of the present invention.
FIG. 14 is a graph of repeatability of one embodiment of the present invention.
FIG. 15 is a three-dimensional force loading graph of one embodiment of the present invention.
FIG. 16 is a graph of hysteresis characteristics for one embodiment of the present invention.
FIG. 17 is a graph of response time for one embodiment of the present invention.
In the figure: 1. the flexible induction electrode structure comprises a flexible cavity, 2 a flexible substrate, 3 a square flexible induction electrode, 4 a round flexible common polar plate, 5 a semicircular annular groove, 6 a hemispherical contact, 7 an air cavity.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, belong to the scope of the present invention.
Fig. 1 to 7 are schematic structural views illustrating a preferred embodiment of the present invention. As shown in fig. 2, the fully flexible capacitive three-dimensional force touch sensor of the present embodiment mainly includes a flexible cavity 1, a flexible substrate 2, a flexible electrode, a semicircular groove 5, and a hemispherical contact 6, and each part is integrated by using silicon rubber as an adhesive in a layer-by-layer assembly manner. Referring to fig. 1 to 3, the flexible chamber 1 of the present embodiment is a cylindrical cylinder having a bottom surface, the flexible substrate 2 is a circular plate (see fig. 4), the flexible substrate 2 is used as a bottom support, the bottom of the flexible chamber 1 is adhered to the upper surface of the flexible substrate 2, and the center of the circle of the lower surface of the flexible substrate 2 is located at the center of the circle of the flexible chamber 1. The square flexible induction electrode 3 is adhered to the upper surface of the flexible substrate 2 through silicon rubber, and the symmetrical center point of the square flexible induction electrode 3 is arranged at the center of the circle of the flexible substrate 2; the hemispherical contact 6 is hemispherical (see fig. 7), the round flexible common polar plate 4 is connected to the bottom surface of the hemispherical contact 6 through silicone rubber adhesive, and the symmetric center point of the round flexible common polar plate is arranged at the center of the circle of the bottom surface of the hemispherical contact 6; the semicircular annular groove 5 surrounds the bottom of the hemispherical contact 6 and is adhered through silicon rubber, the outer periphery of the semicircular annular groove 5 is directly adhered to the inner surface of the flexible cavity 1 through the silicon rubber, specifically, a circle of blocking step can be arranged on the inner side of the upper end of the flexible cavity 1 to serve as a position where the semicircular annular groove 5 is directly limited and connected, and finally the combination of the semicircular annular groove 5 and the hemispherical contact 6 serves as top cover; the semicircular annular groove 5 is also adhered to the circular flexible common polar plate 4; an air layer is used as a dielectric layer between the round flexible common polar plate 4 and the four square flexible induction electrodes 3, namely an air cavity 7 is formed; meanwhile, the vertical projection area of the circular flexible common plate 4 on the flexible substrate 2 needs to always contain four areas of the square flexible sensing electrodes 3.
In the embodiment, the flexible electrodes include square flexible sensing electrodes 3 and circular flexible common electrode plates 4, as shown in fig. 5, the number of the square flexible sensing electrodes 3 is four, and the four square flexible sensing electrodes 3 are arranged in a 2 × 2 array structure, as shown in fig. 6, the circular flexible common electrode plates 4 are circular, and all the flexible electrodes are respectively led out through leads and grounded to form a common end.
With reference to fig. 1-7, it can be seen that the whole fully flexible capacitive three-dimensional force touch sensor is a centrosymmetric pattern, the outer diameter of the flexible cavity 1 is the same as the diameter of the flexible substrate 2, and the radius of the flexible common electrode plate 4 plus the outer diameter of the semicircular annular groove 5 is equal to the radius of the flexible cavity 1; the difference between the radius of the flexible common polar plate 4 and the inner and outer diameters of the semi-circular groove 5 is equal to the radius of the hemispherical contact 6. The parameters are verified through simulation and experiments, namely the optimal performance of the touch sensor is ensured under comprehensive consideration.
In terms of material, the flexible cavity 1, the flexible substrate 2 and the semicircular annular groove 5 in the embodiment are all made of silicon rubber materials; the hemispherical contact 6 is made of polydimethylsiloxane (abbreviated as PDMS). The square flexible induction electrode 3 and the round flexible common electrode plate 4 which are used as flexible electrodes are both prepared from conductive composite materials of graphene/silver nanoparticles/silicon rubber (GNPs/AgNPs/SR), specifically, conductive phases of the graphene and the silver nanoparticles are uniformly dispersed in a silicon rubber matrix, the silver nanoparticles are uniformly dispersed on the surface of the graphene, and the graphene and the silver nanoparticles further construct a three-dimensional conductive network with high electrical stability.
The preparation process of the fully flexible capacitive three-dimensional force touch sensor provided by the embodiment of the invention is mainly based on a 3D printing technology and a silicone rubber fluid forming technology. Firstly, three-dimensional modeling software (such as SolidWorks, AutoCAD, 3D MAX, and the like) is used to design the dies of the flexible cavity 1, the flexible substrate 2, the square flexible sensing electrode 3, the circular flexible common plate 4, the semi-circular groove 5, and the hemispherical contact 6 in the fully flexible three-dimensional force touch sensor, and the die structure diagrams are respectively shown in fig. 8 to 12. Then, injecting the silicon rubber, Polydimethylsiloxane (PDMS), graphene/silver nanoparticles/silicon rubber (GNPs/AgNPs/SR) conductive composite materials into respective molds, placing the molds into a vacuum drying oven for curing at room temperature, and demolding after curing of each part. Finally, using silicon rubber as an adhesive, and assembling the flexible cavity 1, the flexible substrate 2, the square flexible induction electrode 3, the round flexible common polar plate 4, the semi-circular groove 5 and the hemispherical contact 6 layer by layer to obtain the fully flexible three-dimensional force touch sensor. More specifically, the sensor of the present invention proceeds as follows: firstly, analyzing distribution characteristics and structural parameters of a polar plate and regulation rules of electric field distribution characteristics of the polar plate under different normal force and tangential force effects by utilizing COMSOL finite element simulation software, gradually optimizing the polar plate structure, size parameters and the like, combining theoretical calculation and integrating multi-angle factors, and finally determining the polar plate structure, the size parameters and the like of the fully flexible three-dimensional force touch sensor, wherein good consistency of simulation results and theoretical calculation values is kept. After the structures and parameters of all parts of the all-flexible three-dimensional force touch sensor are determined, three-dimensional modeling software (such as SolidWorks, AutoCAD, 3DMAX and the like) is utilized to design a mould of a flexible cavity 1, a flexible substrate 2, a square flexible induction electrode 3, a round flexible common polar plate 4, a semi-circular groove 5 and a semi-sphere contact 6 of the all-flexible three-dimensional force touch sensor. After the mold is designed, the file format is converted, the molds are printed one by one in a 3D printer, and in order to prevent the molds from deforming in the processes of injecting materials and solidifying, each mold needs to be printed with multiple copies. After the mould is printed, need carry out the fine grinding with abrasive paper to the surface of mould to the flaw that prevents to appear in the 3D printing process causes the influence to sensor sample shaping. And respectively injecting the graphene/silver nano-particles/silicon rubber/polydimethylsiloxane (GNPs/AgNPs/SR/PDMS) conductive composite materials into respective molds, putting the molds into a vacuum drying oven, curing at room temperature, and demolding after the parts are cured. After all the components are cured and demoulded, silicon rubber is used as an adhesive, the flexible cavity 1, the flexible substrate 2, the square flexible induction electrode 3, the round flexible common polar plate 4, the semicircular annular groove 5 and the hemispherical contact 6 are assembled layer by layer from bottom to top, and finally the fully flexible three-dimensional force touch sensor is obtained.
Fig. 13-17 are graphs showing characteristics of the fully flexible three-dimensional force tactile sensor according to the present invention. And analyzing the distribution characteristics of the electric field of the polar plate under different normal force and tangential force by utilizing COMSOL finite element simulation software to obtain a working mechanism simulation diagram. The working principle of the embodiment of the invention is as follows:
four capacitors which are spatially distributed are formed by four square flexible induction electrodes 3 and a circular flexible common electrode plate 4, wherein the circular flexible common electrode plate 4 always comprises four regions of the square flexible induction electrodes 3 in a vertical projection region of the flexible substrate 2. When the hemispherical contact 6 is acted by normal force and tangential force, a part of the flexible common polar plates and the air cavity 7 exchange positions, the distance between the polar plates is changed, so that the dielectric constant between the polar plates is changed, further the change of capacitance value is realized, and a simulation curve, a theoretical calculation curve and an actual measurement curve when the normal force is applied are shown in fig. 13. The experiment was repeated, and the measurement was repeated to obtain the repeatability characteristic curves of the experiment 1 time, 10 times and 100 times, respectively, as shown in fig. 14. The magnitude and the direction of the external force can be sensed through the change of the four symmetrically distributed capacitance values; under the action of normal force, the round flexible common polar plate 4 is compressed upwards and expanded upwards in the tangential direction, the distance between the round flexible common polar plate and the four square flexible induction electrodes 3 is reduced, the dielectric constant is increased, and the four capacitance values are increased in the same trend; under the action of tangential force, the circular flexible common polar plate 4 deforms, the whole circular flexible common polar plate 4 is close to the excitation end far away from the stress direction, the distance between the two polar plates is reduced, the dielectric constant is changed, the corresponding capacitance value is also changed, and the three-dimensional force loading curve shown in fig. 15 is obtained. The hysteresis characteristics and response time curves of the present example are shown in FIGS. 16-17, respectively.
Compared with the prior art, the invention has the following advantages:
1. the invention belongs to a capacitive flexible three-dimensional force touch sensor, and has the advantages of high sensitivity and flexibility, quick dynamic response, low hysteresis and the like under the same acting force compared with the traditional three-dimensional force structure due to the unique design structure.
2. The sensor provided by the invention is made of a flexible material in the whole structure, overcomes the defects of difficult deformation, difficult conformal property, poor wearing comfort and the like existing when the traditional rigid sensor is used as an electronic skin, can be used as a flexible electronic skin to be applied to the fields of human-computer interaction, intelligent robots, rehabilitation medical treatment and the like, and provides technical support for improving the ability of the intelligent robot to perceive external environments.
3. The sensor is based on a 3D printing technology, a fluid forming process and a self-assembly process, has simple integral preparation flow and is suitable for mass production; meanwhile, the carbon-based conductive phase and the silicon rubber are adopted, the preparation material is low in price, and the preparation material can be applied to actual manufacturing, so that a feasible design idea is provided for the multifunctional electronic skin.
4. According to the invention, the circular flexible common electrode plate 4 and the square flexible induction electrode 3 form a capacitor which is spatially distributed, air is used as a dielectric layer, and under the action of three-dimensional force, the distance between the electrode plates is changed, so that the dielectric constant is improved.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiment according to the technical spirit of the present invention are included in the protection scope of the present invention.
Claims (6)
1. A fully flexible capacitive three-dimensional force touch sensor is characterized by mainly comprising a flexible cavity (1), a flexible substrate (2), flexible electrodes, a semicircular annular groove (5) and a hemispherical contact (6), wherein the flexible electrodes comprise a square flexible sensing electrode (3) and a circular flexible common electrode plate (4), all the flexible electrodes are led out through leads and are grounded to form a common end, the flexible cavity (1) is a cylindrical barrel, the flexible substrate (2) is a circular plate, the center of a circle of the lower surface of the flexible substrate (2) is arranged at the center of the circle of the flexible cavity (1), the bottom of the flexible cavity (1) is bonded to the upper surface of the flexible substrate (2), the four square flexible sensing electrodes (3) are arranged in a 2 × 2 array structure and are bonded to the upper surface of the flexible substrate (2), the symmetric center of the four square flexible sensing electrodes is arranged at the center of the flexible substrate (2), the circular flexible common electrode plate (4) is bonded to the bottom of the hemispherical contact (6), the circular flexible common electrode plate (4) is symmetrically arranged at the center of the hemispherical contact (6), the semicircular annular groove (6), the flexible sensing electrode (3) is bonded to the bottom of the hemispherical contact (4), and the flexible substrate (3) and the flexible common flexible sensing electrode (4) is bonded to the inner surface of the hemispherical contact (3) and the flexible substrate (4), and the flexible electrode layer of the flexible substrate (3).
2. The fully flexible capacitive three-dimensional force touch sensor according to claim 1, wherein: the adhesion adopts silicon rubber as an adhesive.
3. The fully flexible capacitive three-dimensional force touch sensor according to claim 1 or 2, wherein: the radius of the flexible common polar plate (4) and the outer diameter of the semi-circular groove (5) are equal to the radius of the flexible cavity (1); the difference between the radius of the flexible common polar plate (4) and the inner diameter and the outer diameter of the semi-circular groove (5) is equal to the radius of the hemispherical contact (6); the outer diameter of the flexible cavity (1) is consistent with the diameter of the flexible substrate (2).
4. The fully flexible capacitive three-dimensional force touch sensor according to claim 1, wherein: the hemispheroid contact (6) is made of polydimethylsiloxane.
5. The fully flexible capacitive three-dimensional force touch sensor according to claim 1 or 4, wherein: the flexible cavity (1), the flexible substrate (2) and the semicircular annular groove (5) are all made of silicon rubber materials.
6. The fully flexible capacitive three-dimensional force touch sensor according to claim 5, wherein: the flexible electrodes are all prepared from a conductive composite material of graphene/silver nanoparticles/silicone rubber.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111751038A (en) * | 2020-07-06 | 2020-10-09 | 安徽大学 | High-sensitivity capacitive flexible three-dimensional force touch sensor based on bionic mushroom structure |
| CN111947813A (en) * | 2020-08-10 | 2020-11-17 | 安徽大学 | Fully-flexible capacitive three-dimensional force touch sensor based on corrugated pipe microstructure |
| CN113155344A (en) * | 2021-01-25 | 2021-07-23 | 电子科技大学 | Flexible electronic skin device with touch information perception function |
| CN113218542A (en) * | 2021-02-25 | 2021-08-06 | 安徽大学 | High-sensitivity flexible three-dimensional force touch sensor and preparation method thereof |
| CN113483921A (en) * | 2021-05-21 | 2021-10-08 | 重庆大学 | Three-dimensional flexible touch sensor |
| CN114674467A (en) * | 2022-04-08 | 2022-06-28 | 福州大学 | Capacitive touch sensor |
| CN114674483A (en) * | 2022-04-08 | 2022-06-28 | 浙江大学 | Three-dimensional force flexible touch sensor with high tangential angle resolution |
| CN114839398A (en) * | 2022-04-27 | 2022-08-02 | 东南大学 | Capacitive flexible acceleration sensor and preparation method thereof |
| CN115014596A (en) * | 2022-07-16 | 2022-09-06 | 哈尔滨工业大学（深圳） | Piezoresistive flexible touch sensor and manufacturing method thereof |
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