CN106959175A - A kind of Grazing condition condenser type based on pyramid structure slides touch sensor - Google Patents
A kind of Grazing condition condenser type based on pyramid structure slides touch sensor Download PDFInfo
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- CN106959175A CN106959175A CN201710170984.1A CN201710170984A CN106959175A CN 106959175 A CN106959175 A CN 106959175A CN 201710170984 A CN201710170984 A CN 201710170984A CN 106959175 A CN106959175 A CN 106959175A
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- electrode
- lower floor
- printed circuit
- circuit board
- flexible printed
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
Abstract
Touch sensor is slided the invention discloses a kind of Grazing condition condenser type based on pyramid structure, it is to be printed with upper strata public electrode, lower floor's central electrode and four rectangle induction electrodes positioned at each side periphery of lower floor's central electrode respectively on upper and lower two flexible printed circuit board, common electrode layer and lower floor's central electrode are used to perceive tangential information and slide to feel information for perceiving tactile data, upper strata public electrode and 4 induction electrodes at the middle and upper levels for it；Dielectric layer is provided between two flexible printed circuit boards, the upper surface integrated molding of the dielectric layer has pyramid structure；PDMS hemispherical contacts are fixed with upper flexible printed circuit board.The Grazing condition condenser type of the present invention slides touch sensor, can differentiate less haptic force, while can realize the measurement to all directions shearing force again, substantially increase the mechanical sensitivity of sensor, realizes sensor and feels detection function in the sliding of shear direction.
Description
Technical field
The invention belongs to field of sensing technologies, and in particular to a kind of Grazing condition condenser type applied to artificial intelligence skin is slided
Touch sensor.
Background technology
Sliding touch sensor is grabbed as the effective means of intelligent robot sensing external environment for realizing to object
Take detection, during close to contact and the differentiation of sliding mode etc., play act foot in electronic skin research field light
The effect of weight.With the development in epoch, electronic skin has been applied to robot, touch detection, monitoring temperature, health medical treatment etc.
Field.
In the various applications of electronic skin, sensing tactile and sliding feel detection occupy extremely important status.Wiping, which is felt, to be passed
Sensor imitate human hand with contacting feeling, slide feel, heat feel etc. perceptional function, be machine human and environment directly act on it is required
Medium.Such as sliding touch sensor can control chucking power to prevent by the three-dimensional force information between inspecting manipuator and contact interface
Relative slip only occurs between target object and manipulator, final assist people completes crawl and operation task.Wherein slide
Signal is the feedback information for realizing the control of manipulator clamping power, is that robot completes high accuracy crawl and the crucial institute of operation task
.
Domestic and foreign scholars are measured in touch sensor three-dimensional force and sliding feel context of detection achieves important advance, but remain one
Fixed deficiency.Bao Zhenan of Stanford Univ USA et al. is filled to dielectric layer using hemispherical micro-structural, can delicately be examined very much
Ambient pressure is surveyed, but can not carry out sliding feel detection.South Korea Seoul national university Choong et al., it is proposed that one kind pyramid
Micro-structural is as the resistance-type touch sensor of dielectric layer, and the sensor is respectively provided with very high sensitivity in biaxial stretch-formed direction,
But range is smaller, and preparation technology is complex.And generally this kind of sensor with using rigid matrix during bionics skin more,
Lack due flexibility, be not suitable in the larger place application of joint of robot iso-curvature.
The content of the invention
It is an object of the invention to overcome the weak point present in above-mentioned existing all multisensors, propose a kind of based on gold
The Grazing condition condenser type of word tower structure slides touch sensor, with solve existing sensor can not in high precision, wide range while examine
Survey the problem of three-dimensional force and sliding feel.
The present invention adopts the following technical scheme that to solve technical problem：
Grazing condition condenser type of the present invention based on pyramid structure slides touch sensor, and its feature is：
Including upper flexible printed circuit board and lower flexible printed circuit board；
The surface printing of flexible printed circuit board has upper strata public electrode on described；
There are square lower floor's central electrode and equidistant position in the surface printing of the lower flexible printed circuit board
Four identical rectangle induction electrodes in each side periphery of lower floor's central electrode；Each induction electrode is with lower floor's central electrode
Center is that symmetric points are symmetrical two-by-two；
Dielectric layer is provided between flexible printed circuit board and lower flexible printed circuit board on described, the dielectric layer
Upper surface integrated molding has pyramid structure；The upper strata public electrode is contacted with the tower top of the pyramid structure, described
Lower floor's central electrode is contacted with the lower surface of the dielectric layer；
PDMS hemispherical contacts are fixed with by flexible cover sheet on flexible printed circuit board on described.
The length of long sides of each induction electrode be equal to lower floor's central electrode the length of side, the long side of each induction electrode with and its
The side of adjacent lower floor's central electrode is parallel.
The lower surface of the dielectric layer is by lower floor's central electrode and four induction electrode all standings；The upper strata public electrode
Positioned at the surface of lower floor's central electrode, and the upper strata public electrode is on lower flexible printed circuit board (6) surface
Orthographic projection by lower floor's central electrode all standing, by each induction electrode half mulching.
The dielectric layer is using PDMS as material.The upper flexible printed circuit board and the lower flexible printed circuit board it is soft
Property substrate is using polyimides as material.The flexible cover sheet uses silicon rubber material.
The upper strata public electrode pad of well format was provided with the flexible substrates of upper flexible printed circuit board, upper strata is public
Common electrode is led to after the public electrode pad of upper strata by enamel-covered wire, then drawn by signal wire；In lower flexible printed circuit board
Be provided with lower floor's central electrode pad of well format and the pad of each induction electrode in flexible substrates, lower floor's central electrode and
Each induction electrode is led to after respective pad by enamel-covered wire respectively, then is drawn by signal wire.This via mode can be with
Make wiring more flexible, it is easy to array.
Upper strata common electrode layer is used to perceive tactile data, 4 senses of upper strata public electrode and lower floor with lower floor's central electrode
Answering electrode is used to perceive tangential information and sliding feel information.
Compared with the prior art, beneficial effects of the present invention are embodied in：
1st, Grazing condition condenser type of the present invention based on pyramid structure slides touch sensor, with common touch sensor and pressure
Force snesor is compared, and can perceive haptic force, and can realize the measurement to all directions shearing force, improves the machinery of sensor
Sensitivity, while realizing the detection to sliding tactile data, improves the applicability of sensor；
2nd, Grazing condition condenser type of the present invention based on pyramid structure slides touch sensor, using FPCB (its flexible substrates
For polyimides) it is electrode layer, use PDMS for dielectric layer, be flexible material, compared with traditional sensors, with very good
Flexibility, make sensor can placing range it is wider；
3rd, Grazing condition condenser type of the present invention based on pyramid structure slides touch sensor, with general multilayer up-down structure power
Dependent sensor is compared, and by using the dielectric layer of pyramid structure, greatly improves the normal direction sensitivity and tangential spirit of sensor
Sensitivity；And the present invention by change dielectric layer proportioning, adjust pyramid structure inclination angle, thus it is possible to vary the sensor it is sensitive
Degree and range, have further expanded its application；
4th, Grazing condition cunning touch sensor preparation technology of the present invention based on pyramid structure is simple, easy to spread.
Brief description of the drawings
Fig. 1 is the vertical section structure chart that Grazing condition of the present invention based on pyramid structure slides touch sensor；
Fig. 2 is the fractionation stereogram that Grazing condition of the present invention based on pyramid structure slides touch sensor；
Fig. 3 is the three-dimensional system of coordinate figure that Grazing condition of the present invention based on pyramid structure slides touch sensor；
Fig. 4 is that Grazing condition of the present invention based on pyramid structure slides touch sensor and planar dielectric layer structure sensor
The curve relation figure of electric capacity-normal force；
Fig. 5 is that Grazing condition of the present invention based on pyramid structure slides touch sensor in the small dynamic response song of pressure effect
Line；
Fig. 6 is that Grazing condition of the present invention based on pyramid structure slides touch sensor and planar dielectric layer structure sensor
The curve relation figure of electric capacity-tangential force；
Fig. 7 is the collection cunning feel signal that Grazing condition of the present invention based on pyramid structure slides touch sensor；
Label in figure：1PDMS hemispherical contacts；2 flexible cover sheets；Flexible printed circuit board on 3；4 upper strata public electrodes；
5 dielectric layers；6 times flexible printed circuit boards；7 lower floor's central electrodes；8 first induction electrodes；9 second induction electrodes；10 the 3rd senses
Answer electrode；11 the 4th induction electrodes；4A upper stratas public electrode pad；7A lower floors central electrode pad；The induction electrodes of 8A first are welded
Disk；9A the second induction electrode pads；The induction electrode pads of 10A the 3rd；The induction electrode pads of 11A the 4th；12 enamel-covered wires.
Embodiment
Embodiment 1
As shown in Figure 1 and Figure 2, Grazing condition of the present embodiment based on pyramid structure, which slides touch sensor, includes upper flexible print
Printed circuit board 3 and lower flexible printed circuit board 6；
There is upper strata public electrode 4 in the surface printing of upper flexible printed circuit board 3；
There is square lower floor's central electrode 7 in the surface printing of lower flexible printed circuit board 6 and be equidistantly located at
Four identical rectangle induction electrode (the first induction electrodes 8 of each side periphery of lower floor's central electrode；Second induction electrode 9；3rd
Induction electrode 10；4th induction electrode 11)；Each induction electrode is symmetrical two-by-two by symmetric points of the center of lower floor's central electrode 7；
Dielectric layer 5, the upper table of dielectric layer 5 are provided between upper flexible printed circuit board 3 and lower flexible printed circuit board 6
Face integrated molding has pyramid structure；Upper strata public electrode 4 is contacted with the tower top of pyramid structure, lower floor's central electrode 7 with
The lower surface contact of the dielectric layer 5；In other words dielectric layer is by a plane layer and the pyramid structure on plane layer
Dimerous, increase pyramid structure layer can improve the resolving power of sensor, detect small tactile data, put down simultaneously
The presence of surface layer increases the normal direction range of sensor.
PDMS hemispherical contacts are fixed with by flexible cover sheet 2 on upper flexible printed circuit board 3.
Specifically, the length of long sides of each induction electrode be equal to lower floor's central electrode the length of side, the long side of each induction electrode with
The side of the lower floor central electrode adjacent with its is parallel.The lower surface of dielectric layer covers lower floor's central electrode and four induction electrodes entirely
Lid；Upper strata public electrode 4 is located at the surface of lower floor's central electrode 7, and upper strata public electrode 4 is in lower flexible printed circuit board 6
The orthographic projection on surface is by all standing of lower floor's central electrode 7, by each induction electrode along long side center line half mulching.
Specifically, the long 8mm of the base plane of dielectric layer 5, width 8mm, thickness are 1mm, pyramid structure disposed thereon
Bottom surface length of side 2mm, floor height are that 1mm, inclination angle are 45 °.The thickness of upper strata public electrode 4, lower floor's central electrode 7 and each induction electrode
It is 0.25mm, the thickness of the flexible substrates of flexible cover sheet and two flexible printed circuit boards is 0.25mm, PDMS hemisphericals
Contact radius is 4mm, and whole sensor height is 7.25mm.The size of lower floor's central electrode 7 is 5mm × 5mm, each induction electrode chi
Very little is 5mm × 1.5mm, and each induction electrode is 0.5mm, the chi of upper strata public electrode 4 with the spacing of lower floor's central electrode adjacent edge
Very little is 7.5mm × 7.5mm.
Specifically, being provided with the upper strata public electrode pad of well format in the flexible substrates of upper flexible printed circuit board
4A, upper strata public electrode 4 is led to after the public electrode pad 4A of upper strata by enamel-covered wire, then drawn by signal wire；In lower flexibility
The lower floor central electrode pad 7A of well format and the pad of each induction electrode were provided with the flexible substrates of printed circuit board (PCB)
(the first induction electrode pad 8A；Second induction electrode pad 9A；3rd induction electrode pad 10A；4th induction electrode pad
11A), lower floor's central electrode and each induction electrode are led to after respective pad by enamel-covered wire respectively, then are drawn by signal wire
Go out.This via mode can make wiring more flexible, it is easy to array.And based on FPCB technologies, each electrode and each pad system
Make on a flexible substrate, to enable each electrode and any flexural deformation of pad, with good flexibility.
Specifically, flexible cover sheet 2 is a thin layer silicon rubber being spun on flexible printed circuit board 3, for protecting
Upper flexible printed circuit board, conductive contact active force.Flexible cover sheet 2 is from Zhong Hao Chenguang Research Institute of Chemical Industry Co., Ltd
GD401 types silicon rubber is material, and the silicon rubber voluntarily can have after curing molding, and curing molding soft well at room temperature
Toughness.
Specifically, PDMS hemispherical contacts are to print the hemispherical that a radius is 8mm using 3D printing technique, will
Appropriate PDMS is poured into the mould, treats its curing molding, is removed from the molds molded contact layer.
Specifically, based on flexible printed circuit board (FPCB) technology, upper flexible printed circuit board 3 and lower flexible print circuit
The flexible substrates of plate 6 are using polyimides as material, and respective electrode layer is one layer of Copper Foil for being plated in flexible substrates polyimide surface.
Specifically, dielectric layer 5 is with PDMS (10:1) it is sensitive material.Inverted pyramid shape mould is printed using 3D printing technique
Tool, to ensure sensitivity and the stability of sensor, after PDMS two kinds of component mixing and stirrings, deaerates in vacuum chamber,
It is then injected into mould.The mould is placed on the lower floor's central electrode and induction electrode of lower flexible printed circuit board, makes mould
Tool is alignd with each electrode, and solution to be mixed is molded at room temperature, after solidifying 60 minutes under the conditions of 90 DEG C, mold removal, you can
Obtain the dielectric layer 5 of the pyramid structure of ideal form.
Dielectric layer, two flexible printed circuit boards, flexible cover sheet and PDMS hemisphericals contact are passed through into plasma
Processing is bonded together after 90 seconds.Ensure that filler distribution is uniform, form stable mechanical structure, it is ensured that mechanical performance.
Embodiment 2
As shown in figure 3, the three-dimensional system of coordinate figure that the Grazing condition based on pyramid structure slides touch sensor is built, wherein with
The center of lower floor's central electrode is origin, short transverse of the Z axis along sensor, and X-axis is along parallel to the first induction electrode and the 3rd
The direction on the long side of induction electrode, direction of the Y-axis edge parallel to the second induction electrode and the 4th long side of induction electrode.
The electric capacity of the present embodiment, which extracts to select, possesses I2Environment self-calibration function in C compatible types serial line interface and piece, up to
16 CDC precision, the AD7147-1 of 13 appearances of a street input, coordinate single-pole double-throw switch (SPDT) ADG734, can easily realize to multichannel
The collection of capacitance signal.
The mechanism that the present embodiment Grazing condition condenser type slides touch sensor detection tactile is as follows：When hemispherical contact is by outer
During boundary's normal force (along the power of Z-direction), between the upper strata public electrode 4 and lower floor's central electrode 7 of the upper and lower ends of dielectric layer 5
Spacing diminishes, while pyramid structure shape PDMS replaces partial air and causes effective dielectric constant to increase, so as to cause electric capacity
The increase of value.When sensor is extruded by different size of external force, between upper strata public electrode and lower floor's central electrode between
Different away from change, dielectric layer is also influenced to different extents, so that the change of capacitance is also different.Adopted by AD7147-1
Collect the capacitance signal between upper strata public electrode 4 and lower floor's central electrode 7, and be converted to data signal feeding microprocessor, i.e.,
The size of the normal force of effect on a sensor can be calculated.
To be contrasted, by structure of the dielectric layer in embodiment 1 by " base plane+pyramid ", 8mm × 8mm is changed to
× 2mm planar structure, remaining structure is identical, constitutes the sensor based on planar medium Rotating fields.
Sensor (pyramid) based on pyramid structure and the sensor (plane) based on planar medium Rotating fields
The relation curve of electric capacity-normal force (wherein C as shown in Figure 40For the original electricity between upper strata public electrode and lower floor's central electrode
Capacitance, Δ C is the variable quantity of electric capacity after applying power).As can be seen that when pressure is less than 3.6N, the biography based on pyramid structure
The sensitivity of sensor is 0.01kpa-1, and the transducer sensitivity based on planar medium Rotating fields is 0.0005kpa-1, therefore base
In pyramid structure sensor small-range section (0~3.6N) have higher sensitivity, preferably can differentiate and detect
Haptic force.In wide range section, the sensitivity of the two is suitable.When pressure is more than 3.6N, the sensor based on pyramid structure
Capacitance, which changes, to be tended to relax, and is due to that pyramid structure is extruded completely, now sensitivity drops to 0.0005kpa-1, still
The range increase of sensor.In order to have the function of small haptic force detection and larger pressure detecting, sensor of the invention knot concurrently
Structure combines two kinds of Dominant Facies of high sensitivity and wide range.
Feel that sensor distance applies and release normal force to the Grazing condition wiping of the present embodiment, its dynamic response is with recovering special
Property it is as shown in Figure 5, it can be seen that the sensor energy quick sensing acts on force information and has good repeatability.
Embodiment 3
It is as follows that the present embodiment Grazing condition condenser type slides the sliding mechanism felt of touch sensor detection：When hemispherical contact is by outer
During boundary's tangential force (three-dimensional force), upper strata public electrode and lower floor's central electrode can be produced strictly according to the facts because of the power along Z-direction first
Apply the capacitance variations described in example 2；Secondly, can be because along X-axis and Y direction between upper strata public electrode and 4 induction electrodes
Power and occur relative slip, relative area and relative dielectric constant change, and cause capacitance variations.By detecting that upper strata is public
Capacitance variations between electrode and 4 induction electrodes, you can obtain the tangential information of sensor.
Normal force in embodiment 2 is converted into tangential force (now certain along the normal force of Z-direction), remaining and implementation
Example 2 keeps identical, and the static normal force of research is under 2N states, the electric capacity between each induction electrode of upper strata public electrode and lower floor exists
Responsive state under different tangential forces, as a result (Fig. 6 show the tangential force along Y direction, now X-direction as shown in Figure 6
0) power be.In Fig. 6, C10、C20、C30、C40Respectively upper strata public electrode and the first induction electrode, the second induction electrode, the 3rd sense
Answer the original capacitance between electrode, the 4th induction electrode, Δ C1、ΔC2、ΔC3、ΔC4Corresponding capacitance respectively after applying power
Variable quantity.
In the case where static normal force is 2N states, apply tangential force, the mobile induction pyramid structure hair of upper strata public electrode
Raw tangential deformation is so as to cause the change of inductance capacitance.When applying along the positive tangential force of X-axis, in range section (0~4N),
Relative area increase between upper strata public electrode and the 4th induction electrode, spacing diminishes, and relative dielectric constant increase causes two
Electric capacity C between person4Increase；And the relative area between upper strata public electrode and the second induction electrode reduces, spacing diminishes, phase
To dielectric constant increase, C2Reduce；Hereafter change more slow.C1、C3It is basically unchanged.Similarly, when application being cut along Y-axis is positive
During to power, in range section (0~4N), C1Increase, C3Reduce, hereafter change more slow；C2、C4It is basically unchanged.
As can be seen from Figure 6, under static normal force is 2N states, when applying along the positive tangential force of Y-axis, C2And C4Change
Amount is very small.C1And C3In range section (0~4N), C1Increase, C3Reduce, the sensor based on pyramid structure it is sensitive
Spend for 0.0625kpa-1, hereafter change more slow, sensitivity declines；And the sensor based on planar medium Rotating fields is sensitive
Spend for 0.025kpa-1, contrast and understand, under equal conditions, the sensor based on pyramid structure is than based on planar dielectric layer
The sensor of structure is more sensitive.
Static normal force is extracted in under 2N states, the electric capacity C when gradually increasing along the positive tangential force of X-axis4Change,
As shown in Figure 7, before slip, when tangential force is gradually increased to 4N, electric capacity stablizes increase always.4N is increased in shearing force
When, there is obvious shake, frequency increase in capacitance signal, but then tends towards stability.After tangential force is more than 4N, electric capacity is substantially not
Become.
The exemplary embodiment of the present invention is the foregoing is only, is not intended to limit the invention, it is all the present invention's
Any modification, equivalent and improvement made within spirit and principle etc., should be included within the scope of the present invention.
Claims (6)
1. a kind of Grazing condition condenser type based on pyramid structure slides touch sensor, it is characterised in that：Including upper flexible printing
Circuit board (3) and lower flexible printed circuit board (6)；
The surface printing of flexible printed circuit board (3) has upper strata public electrode (4) on described；
There is square lower floor's central electrode (7) and equidistantly in the surface printing of the lower flexible printed circuit board (6)
Four identical rectangle induction electrodes positioned at each side periphery of lower floor's central electrode；Each induction electrode is with lower floor's central electrode
(7) center is that symmetric points are symmetrical two-by-two；
Dielectric layer (5) is provided between flexible printed circuit board (3) and lower flexible printed circuit board (6) on described, is given an account of
The upper surface integrated molding of matter layer (5) has pyramid structure；The upper strata public electrode (4) and the tower of the pyramid structure
Top contact, lower floor's central electrode (7) contacts with the lower surface of the dielectric layer (5)；
PDMS hemisphericals contact (1) is fixed with by flexible cover sheet (2) on flexible printed circuit board (3) on described.
2. Grazing condition condenser type according to claim 1 slides touch sensor, it is characterised in that：The long side of each induction electrode
The length of side be equal to lower floor's central electrode the length of side, each induction electrode it is long while the lower floor central electrode adjacent with its while put down
OK.
3. Grazing condition condenser type according to claim 1 or 2 slides touch sensor, it is characterised in that：The dielectric layer
Lower surface is by lower floor's central electrode and four induction electrode all standings；The upper strata public electrode (4) is located at the lower floor center
The surface of electrode (7), and orthographic projection of the upper strata public electrode (4) on lower flexible printed circuit board (6) surface will
Lower floor's central electrode (7) all standing, by each induction electrode half mulching.
4. Grazing condition condenser type according to claim 1 slides touch sensor, it is characterised in that：The dielectric layer (5) with
PDMS is material.
5. Grazing condition condenser type according to claim 1 slides touch sensor, it is characterised in that：The upper flexible printing electricity
The flexible substrates of road plate (3) and the lower flexible printed circuit board (6) are using polyimides as material.
6. Grazing condition condenser type according to claim 1 slides touch sensor, it is characterised in that：The flexible cover sheet
(2) silicon rubber material is used.
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| CN201710170984.1A CN106959175B (en) | 2017-03-21 | 2017-03-21 | A kind of sliding touch sensor of the Grazing condition condenser type based on pyramid structure |
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| CN201710170984.1A CN106959175B (en) | 2017-03-21 | 2017-03-21 | A kind of sliding touch sensor of the Grazing condition condenser type based on pyramid structure |
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| CN114674483A (en) * | 2022-04-08 | 2022-06-28 | 浙江大学 | Three-dimensional force flexible touch sensor with high tangential angle resolution |
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| CN115060406A (en) * | 2022-06-08 | 2022-09-16 | 北京工道风行智能技术有限公司 | Flexible ionization type three-dimensional force sensor and preparation method thereof |
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