CN108981980A - A kind of nanoscale rotary table microstructure pressure sensor and preparation method thereof - Google Patents
A kind of nanoscale rotary table microstructure pressure sensor and preparation method thereof Download PDFInfo
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- CN108981980A CN108981980A CN201810415778.7A CN201810415778A CN108981980A CN 108981980 A CN108981980 A CN 108981980A CN 201810415778 A CN201810415778 A CN 201810415778A CN 108981980 A CN108981980 A CN 108981980A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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Abstract
The invention discloses a kind of preparation method of nanoscale rotary table microstructure pressure sensor, doubled via porous anodic alumina template is fixed on smooth substrate by (1) using doubled via porous anodic aluminium oxide as template；(2) Ag nano wire is uniformly coated on the doubled via porous anodic alumina template, Ag nano wire described in wherein at least one penetrates into or enters in the hole of doubled via porous anodic alumina template；(3) PDMS is uniformly then coated on doubled via porous anodic alumina template；(4) solidify, demould, obtain the PDMS of nanoscale rotary table micro-nano structure；(5) Ag nano wire is uniformly coated on the face that the PDMS of the nanoscale rotary table micro-nano structure has nanoscale rotary table micro-nano structure；(6) it is packaged face-to-face using the PET for being coated with tin indium oxide, and prepares extraction electrode.Sensor of the invention response sensitivity is high, and structural stability is good, long service life.
Description
Technical field
The invention belongs to pressure sensor technique fields, and in particular to a kind of nanoscale rotary table microstructure pressure sensor and
Preparation method.
Background technique
Porous anodic aluminium oxide has a wide range of applications in nanometer synthesis and nanometer technique field.AAO template has rule
Porous structure then, in intimate accurate six sides solid matter periodic arrangement, cylindricality duct is parallel to each other, the period of solid matter and duct
Aperture is all adjustable controllable and dielectric constant with higher etc., the excellent spy of this unique porous structure and aluminium oxide
Property, so that AAO has become the ideal carrier of assemble nanometer ordered composite structure.
Sensor is a very important field in current scientific development, it can be in medical treatment & health, smart home, ring
The fields such as border protection, safety in production, national defence play positive effect.Therefore, high-performance sensors are always scientific research personnel's effort
Target.Wherein, the wearable pressure sensor that can be used for medical treatment & health field is even more to get more and more people's extensive concerning.It can wear
It is soft, light, comfortable to wear the requirement of formula pressure sensor, and meeting these requirements is usually electroconductive organic film, such as PDMS,
PET etc..Organic film is usually nonconducting, in order to obtain good electric property, can be mixed in PDMS metal nanometer line,
Carbon nanotube, graphene etc..
Even if the sensitivity of device does not still reach requirement, therefore also needs in this way, being still unable to satisfy actual needs
Further increase the sensitivity of device.In order to realize the purpose, people attempt to introduce various micro-structures in PDMS, such as replicate
The micro-structure of silk, the micro-structure of lotus leaf, nanoscale inverted pyramid structure, nano-pillar, the long strip array of nanometer etc..Wherein, multiple
The micro-structure of throwing silk fabric, there is problems for the micro-structure of lotus leaf: micro-structure is excessively coarse, and homogeneity is poor, device sensitivity
It also needs to further increase.And the sensitivity of the long strip array of nanoscale inverted pyramid structure, nano-pillar, nanometer is inadequate, it is also necessary to
It further increases.
Summary of the invention
In view of the problems of the existing technology, the present invention provides a kind of nanoscale rotary table microstructure pressure sensor and its
Preparation method.The present invention prepares nanoscale rotary table micro-nano structure using template, and improves to the coating of Ag nano wire, from
And improve the homogeneity, stability and sensitivity of pressure sensor.
The invention adopts the following technical scheme:
A kind of preparation method of nanoscale rotary table microstructure pressure sensor, comprising the following steps:
(1) doubled via porous anodic alumina template is fixed on for template with doubled via porous anodic aluminium oxide (AAO)
On smooth substrate；
(2) Ag nano wire is uniformly coated on the doubled via porous anodic alumina template, described in wherein at least one
Ag nano wire penetrates into or enters in the hole of doubled via porous anodic alumina template；
(3) it is then uniformly coated on doubled via porous anodic alumina template PDMS (dimethyl silicone polymer)；
(4) solidify, demould, obtain the PDMS of nanoscale rotary table micro-nano structure；
(5) it is uniformly coated on the face that the PDMS of the nanoscale rotary table micro-nano structure has nanoscale rotary table micro-nano structure
Ag nano wire；
(6) use the PET (polyethylene terephthalate) for being coated with tin indium oxide (ITO) for electrode, described in two pieces
Electrode is sealed in such a way that ito surface is to ITO using the PDMS of coating Ag nano wire in the teamed step of sandwich mode (5)
Dress, and extraction electrode is prepared, obtain the nanoscale rotary table microstructure pressure sensor.
Further, the doubled via porous anodic aluminium oxide with a thickness of 0.1-100 microns.
It is further preferred that the doubled via porous anodic aluminium oxide with a thickness of 10-60 microns.
Further, the positive aperture of the doubled via porous anodic aluminium oxide is 200-360nm, and reverse side aperture is 100-
320nm, hole center spacing are 125-450nm.
Further, the material of the substrate is Si, Al2O3, one of glass or a variety of.
Further, the diameter of the Ag nano wire is 10-150nm.In some embodiments, the Ag nano wire is straight
Diameter is 10-40nm.In some embodiments, the diameter of the Ag nano wire is 40-70nm.In some embodiments, the Ag
The diameter of nano wire is 70-90nm.In some embodiments, the diameter of the Ag nano wire is 90-110nm.In some implementations
In example, the diameter of the Ag nano wire is 110-130nm.In some embodiments, the diameter of the Ag nano wire is 130-
150nm。
It is further preferred that the diameter of the Ag nano wire is 50-100nm.
Further, doubled via porous anodic alumina template is fixed on from edge using mightiness belt in step (1)
On smooth substrate.
Further, at least Ag nano wire described in half penetrates into or enters doubled via porous anodic aluminium oxide in step (2)
In the hole of template.
Further, PDMS described in step (3) with a thickness of 2-100 microns.
It is further preferred that PDMS described in step (3) with a thickness of 10-50 microns.
Further, PDMS is uniformly coated using coating machine in step (3).
A kind of micro- knot of nanoscale rotary table that the preparation method according to nanoscale rotary table microstructure pressure sensor is prepared
Structure pressure sensor.
Beneficial effects of the present invention:
(1) Ag nano wire of the invention enters in micro-nano structure, once micro-nano structure deforms, can generate rapidly
Electrical response substantially increases the sensitivity of response device；
(2) the preparation method simple process of nanoscale rotary table microstructure pressure sensor of the invention, high production efficiency, at
This is cheap, is suitble to large-scale industrial production application；
(3) present invention is mutually twisted encapsulation by nanoscale rotary table, substantially increases the sensitivity of device；
(4) frustum cone structure stability of the invention is good, is conducive to the service life for improving pressure sensor.
Detailed description of the invention
Fig. 1 is the schematic diagram of doubled via porous anodic alumina template；
Fig. 2 is the schematic diagram of nanoscale rotary table micro-nano structure；
Fig. 3 is the side schematic view of nanoscale rotary table micro-nano structure pressure sensor；
Fig. 4 is the side schematic view for the pressure sensor that nanoscale rotary table is mutually twisted encapsulation；
Fig. 5 is tensile deformation-resistance variations of nanoscale rotary table microstructure pressure sensor prepared by the embodiment of the present invention 1
Rate curve.
Specific embodiment
In order to preferably explain the present invention, it is described further now in conjunction with following specific embodiments, but the present invention is unlimited
In specific embodiment.
Embodiment 1
A kind of preparation method of nanoscale rotary table microstructure pressure sensor, comprising the following steps:
It (1) is that (Fig. 1 is doubled via porous anodic alumina template to template using doubled via porous anodic aluminium oxide (AAO)
Schematic diagram), doubled via porous anodic alumina template is fixed on Si substrate from edge using mightiness belt；The thickness of AAO
It is 40 microns, positive aperture is 310nm, and reverse side aperture is 250nm, and hole center spacing is 450nm；
(2) Ag nano wire is uniformly coated on the doubled via porous anodic alumina template, keeps part Ag nanometers described
Line penetrates into or enters in the hole of doubled via porous anodic alumina template, and the diameter of Ag nano wire is 80nm；
(3) PDMS is uniformly then coated on doubled via porous anodic alumina template using coating machine, with a thickness of 30
Micron；
(4) solidify, demould, obtain the PDMS of nanoscale rotary table micro-nano structure, Fig. 2 is showing for nanoscale rotary table micro-nano structure
It is intended to；
(5) it is uniformly coated on the face that the PDMS of the nanoscale rotary table micro-nano structure has nanoscale rotary table micro-nano structure
Ag nano wire；
(6) it uses the PET for being coated with tin indium oxide (ITO) to be packaged in such a way that ito surface is to ITO for electrode, and prepares
Extraction electrode obtains the nanoscale rotary table microstructure pressure sensor.
Fig. 3 be nanoscale rotary table micro-nano structure pressure sensor side schematic view (wherein 11 be PET, and 12 be indium oxide
Tin, 13 be PDMS, and 14 be Ag nano wire, and 15 be extraction electrode；Or after PDMS rotary table is mutually twisted, using being coated with indium oxide
The PET of tin is packaged, and prepares extraction electrode, can be obtained the nanoscale rotary table microstructure pressure sensor of structural integrity
(Fig. 4 is the side schematic view for the pressure sensor that nanoscale rotary table is mutually twisted encapsulation, wherein 11 be PET, 12 be indium oxide
Tin, 13 be PDMS, and 14 be Ag nano wire, and 15 be extraction electrode).Fig. 5 is the micro- knot of nanoscale rotary table prepared by the embodiment of the present invention 1
Extraordinary linear variability law is presented in the tensile deformation of structure pressure sensor-resistance change rate curve, the two, and slope is
0.35, show that sensor has preferable sensibility.
Embodiment 2
A kind of preparation method of nanoscale rotary table microstructure pressure sensor, comprising the following steps:
(1) with doubled via porous anodic aluminium oxide (AAO) for template, using mightiness belt from edge by the porous sun of doubled via
Pole alumina formwork is fixed on Al2O3On substrate；AAO with a thickness of 1 micron, positive aperture is 200nm, and reverse side aperture is
100nm, hole center spacing are 400nm；
(2) Ag nano wire is uniformly coated on the doubled via porous anodic alumina template, keeps part Ag nanometers described
Line penetrates into or enters in the hole of doubled via porous anodic alumina template, and the diameter of Ag nano wire is 50nm；
(3) PDMS is uniformly then coated on doubled via porous anodic alumina template using coating machine, it is micro- with a thickness of 2
Rice；
(4) solidify, demould, obtain the PDMS of nanoscale rotary table micro-nano structure；
(5) it is uniformly coated on the face that the PDMS of the nanoscale rotary table micro-nano structure has nanoscale rotary table micro-nano structure
Ag nano wire；
(6) it uses the PET for being coated with tin indium oxide (ITO) to be packaged in such a way that ito surface is to ITO for electrode, and prepares
Extraction electrode obtains the nanoscale rotary table microstructure pressure sensor.
Embodiment 3
A kind of preparation method of nanoscale rotary table microstructure pressure sensor, comprising the following steps:
(1) with doubled via porous anodic aluminium oxide (AAO) for template, using mightiness belt from edge by the porous sun of doubled via
Pole alumina formwork is fixed on the glass substrate；AAO with a thickness of 100 microns, positive aperture is 360nm, and reverse side aperture is
320nm, hole center spacing are 450nm；
(2) Ag nano wire is uniformly coated on the doubled via porous anodic alumina template, keeps part Ag nanometers described
Line penetrates into or enters in the hole of doubled via porous anodic alumina template, and the diameter of Ag nano wire is 150nm；
(3) PDMS is uniformly then coated on doubled via porous anodic alumina template using coating machine, with a thickness of 50
Micron；
(4) solidify, demould, obtain the PDMS of nanoscale rotary table micro-nano structure；
(5) it is uniformly coated on the face that the PDMS of the nanoscale rotary table micro-nano structure has nanoscale rotary table micro-nano structure
Ag nano wire；
(6) it uses the PET for being coated with tin indium oxide (ITO) to be packaged in such a way that ito surface is to ITO for electrode, and prepares
Extraction electrode obtains the nanoscale rotary table microstructure pressure sensor.
Above is only a specific embodiment of the present invention, it is not intended to limit the scope of the invention, all utilizations
The equivalent transformation that the present invention makees, is applied directly or indirectly in other relevant technical fields, similarly includes of the invention
Among scope of patent protection.
Claims (10)
1. a kind of preparation method of nanoscale rotary table microstructure pressure sensor, which comprises the following steps:
(1) using doubled via porous anodic aluminium oxide as template, doubled via porous anodic alumina template is fixed on to smooth base
On plate；
(2) Ag nano wire is uniformly coated on the doubled via porous anodic alumina template, Ag described in wherein at least one receives
Rice noodles penetrate into or enter in the hole of doubled via porous anodic alumina template；
(3) PDMS is uniformly then coated on doubled via porous anodic alumina template；
(4) solidify, demould, obtain the PDMS of nanoscale rotary table micro-nano structure；
(5) Ag is uniformly coated on the face that the PDMS of the nanoscale rotary table micro-nano structure has nanoscale rotary table micro-nano structure to receive
Rice noodles；
(6) it uses the PET for being coated with tin indium oxide for electrode, two pieces of electrodes is used into the teamed step of sandwich mode (5)
The PDMS of middle coating Ag nano wire, is packaged, and prepare extraction electrode, obtains the nanoscale rotary table microstructure pressure sensing
Device.
2. the preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1, which is characterized in that described
Doubled via porous anodic aluminium oxide with a thickness of 0.1-100 microns.
3. the preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1, which is characterized in that described
The positive aperture of doubled via porous anodic aluminium oxide is 200-360nm, and reverse side aperture is 100-320nm, and hole center spacing is
125-450nm。
4. the preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1, which is characterized in that described
The material of substrate is Si, Al2O3, one of glass or a variety of.
5. the preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1, which is characterized in that described
The diameter of Ag nano wire is 10-150nm.
6. the preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1, which is characterized in that step
(1) doubled via porous anodic alumina template is fixed on smooth substrate from edge using mightiness belt in.
7. the preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1, which is characterized in that step
(2) at least Ag nano wire described in half penetrates into or enters in the hole of doubled via porous anodic alumina template in.
8. the preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1, which is characterized in that step
(3) PDMS described in a thickness of 2-100 microns.
9. the preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1, which is characterized in that step
(3) PDMS is uniformly coated using coating machine in.
10. a kind of preparation method of nanoscale rotary table microstructure pressure sensor according to claim 1 to 9
The nanoscale rotary table microstructure pressure sensor being prepared.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110093602A (en) * | 2019-05-21 | 2019-08-06 | 哈尔滨工业大学 | A method of silver nano line array is prepared using capillary wetting action |
| CN111704799A (en) * | 2020-06-11 | 2020-09-25 | 淮北师范大学 | Preparation method and application of PDMS and AAO double-layer embedded template for polymer film patterning |
| US11236912B2 (en) * | 2019-01-08 | 2022-02-01 | Whirlpool Corporation | Component for cooking appliance |
| CN114224307A (en) * | 2021-11-15 | 2022-03-25 | 深圳信息职业技术学院 | Flexible sensing array assembly, manufacturing method and pulse condition monitoring system |
| CN115805375A (en) * | 2022-11-22 | 2023-03-17 | 厦门大学 | Pressure sensor with interlocking integrated microstructure and manufacturing method thereof |
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