CN204286649U - A kind of bionic three-dimensional capacitance type touch sensor of tentacle structure - Google Patents

A kind of bionic three-dimensional capacitance type touch sensor of tentacle structure Download PDF

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Publication number
CN204286649U
CN204286649U CN201420697755.7U CN201420697755U CN204286649U CN 204286649 U CN204286649 U CN 204286649U CN 201420697755 U CN201420697755 U CN 201420697755U CN 204286649 U CN204286649 U CN 204286649U
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China
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silicon rubber
crown
electric capacity
tentacle
sensing unit
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CN201420697755.7U
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Chinese (zh)
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余建平
张玉良
邓小雷
李欣
周兆忠
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衢州学院
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Abstract

The utility model discloses a kind of bionic three-dimensional capacitance type touch sensor of tentacle structure.It is by flexible PCB substrate, and silicon rubber condenser type sense of touch sensing unit array combines; Flexible PCB substrate: comprise testing circuit conductive layer and interface circuit conductive layer; Silicon rubber condenser type sense of touch sensing unit array: bag silicon rubber electric capacity bottom crown, dielectric layer and silicon rubber electric capacity top crown; The bottom surface of silicon rubber electric capacity bottom crown is arranged on the interface circuit conductive layer upper surface of flexible PCB substrate, and silicon rubber condenser type sense of touch sensing unit array is made up of the silicon rubber condenser type sense of touch sensing unit that N × N structure is identical.Adopt the silicon rubber condenser type sense of touch sensing unit array of tentacle structure, can fit completely with the irregular surface of measurand, realize faint tactilely-perceptible; Each unit all has four centrosymmetric capacitive sensing cells, realizes X-Y-Z three-dimensional pressure sensing, and the feeling function that perfection realizes artificial limb is rebuild.

Description

A kind of bionic three-dimensional capacitance type touch sensor of tentacle structure

Technical field

The utility model relates to a kind of touch sensor, especially relates to a kind of bionic three-dimensional capacitance type touch sensor of tentacle structure.

Background technology

Skin is the maximum organ of human body, and the perception of sense of touch is again the most important function of skin.Along with the development of medical technology and intelligent robot technology, increasing patients with amputation achieves the self-care of daily life again by artificial limb, and reinvent tactilely-perceptible, accurate reproduction tactile data, be realize the step that artificial limb rebuilds human motion function key.

The tactilely-perceptible of artificial limb is the various physical messages being identified object by tactile sensing element, and the demand that the tactile sensing element therefore building a kind of similar human body skin realizes tactilely-perceptible just seems particularly important.In recent years, " tactile sensing device of robot's sensitive skin " has become tactile sensing device of robot's field of sensing technologies as the tactile sensing element that a class is novel and has studied a new focus.Tactile sensing device of robot's sensitive skin refers to large area, flexible miniature sensor array with data-handling capacity, can cover robotic surface, by sensor senses external environment condition.

In artificial limb's course of work, artificial limb surface need be fitted on arbitrary surface, and tactile sensing device of robot's sensitive skin must be designed to flexible structure, can repeatedly bend and stretch simultaneously.Therefore be not suitable for the sensitive-skinned manufacture of tactile sensing device of robot because of its too high stiffness coefficient at the bottom of traditional silicon wafer-based, there is the main material that good flexible multi-polymer material becomes manufacturing machine people tactile sensing skin gradually.

Summary of the invention

In order to solve Problems existing in background technology, the purpose of this utility model is the bionic three-dimensional capacitance type touch sensor providing a kind of tentacle structure.

The utility model solves the technical scheme that its technical matters adopts:

Sensor of the present utility model is from bottom to up successively by flexible PCB substrate, and silicon rubber condenser type sense of touch sensing unit array combines; Wherein:

1) flexible PCB substrate: be made up of testing circuit conductive layer and interface circuit conductive layer from bottom to up; Testing circuit conductive layer upper surface has testing circuit, and interface circuit conductive layer upper surface has interface circuit;

2) silicon rubber condenser type sense of touch sensing unit array: from bottom to up successively by silicon rubber electric capacity bottom crown, dielectric layer and silicon rubber electric capacity top crown composition; The bottom surface of silicon rubber electric capacity bottom crown is arranged on the interface circuit conductive layer upper surface of flexible PCB substrate, and silicon rubber condenser type sense of touch sensing unit array is made up of the silicon rubber condenser type sense of touch sensing unit that N × N number of structure is identical.

Described testing circuit conductive is polyimide, and testing circuit is 4 × N bar, and every bar has N check point.

Described interface circuit conductive is polyimide, be made up of N × N number of subelement, each subelement is made up of four circular interface circuits, and forms an annulus, the testing circuit of four circular direct connection detection circuit conductive layers of interface circuit lower surface, both electrical communication.

Described silicon rubber electric capacity bottom crown adopts silicon rubber as pole plate substrate, and upper surface has the four chip capacitor detecting electrodes that N × N group all surrounds annulus, and fan-shaped all in 75 ° of every sheet, parallel with one another in four chip capacitor detector electrode structure, electric going up is not communicated with mutually.

Described dielectric layer is clipped between silicon rubber electric capacity bottom crown and silicon rubber electric capacity top crown, and material is silicon rubber, and upper surface has N × N number of annular groove.

Described silicon rubber electric capacity top crown adopts silicon rubber as pole plate substrate, lower surface has N × N number of circular capacitor public electrode, N × N number of circular capacitor public electrode that N × N group on silicon rubber electric capacity bottom crown upper surface all surrounds on four chip capacitor detecting electrodes of annulus and silicon rubber electric capacity top crown lower surface forms four capacitive sensing cells respectively, forms shunt circuit.

Described inertia rubber tentacle structure is N × N number of, is installed on the upper surface of silicon rubber electric capacity top crown, and symmetrical with N × N number of circular capacitor public electrode axle center respectively, material is urethane rubber, and shape is column structure.

N number of number in N × N number of circular capacitor public electrode on N × N number of annular groove on 4N on described silicon rubber electric capacity bottom crown × N number of capacitance detecting electrode, dielectric layer, silicon rubber electric capacity top crown lower surface and the N of silicon rubber electric capacity top crown upper surface × N number of inertia rubber tentacle structure is equal, and one_to_one corresponding is arranged, form the silicon rubber condenser type sense of touch sensing unit that N × N number of structure is identical.

The beneficial effect that the utility model has is:

1) adopt the silicon rubber condenser type sense of touch sensing unit array of tentacle structure, can fit completely with the irregular surface of measurand, more efficientlyly realize faint tactilely-perceptible, improve and measure efficiency and measuring accuracy.

2) each silicon rubber condenser type sense of touch sensing unit all has four centrosymmetric capacitive sensing cells, effectively can realize X-Y-Z three-dimensional pressure sensing, except traditional Z-direction pressure, the shearing force in X-Y direction also can effectively be measured, and the feeling function that perfection realizes artificial limb is rebuild.

Accompanying drawing explanation

Fig. 1 is the utility model sensor construction schematic diagram.

Fig. 2 is the utility model sensor construction slice map.

Fig. 3 is the utility model flexible PCB substrate de-lamination figure.

Fig. 4 is the utility model testing circuit conductive layer vertical view.

Fig. 5 is the utility model interface circuit conductive layer vertical view.

Fig. 6 is the utility model silicon rubber condenser type sense of touch sensing unit array slice map.

Fig. 7 is the utility model silicon rubber condenser type sense of touch sensing unit structures schematic diagram.

Fig. 8 is the utility model silicon rubber condenser type sense of touch sensing unit cut-open view.

Fig. 9 is the utility model silicon rubber electric capacity bottom crown vertical view.

Figure 10 is the utility model dielectric layer vertical view.

Figure 11 is the utility model silicon rubber electric capacity top crown upward view.

In figure: 1, flexible PCB substrate, 2, silicon rubber condenser type sense of touch sensing unit array, 3, testing circuit conductive layer, 4, interface circuit conductive layer, 5, testing circuit, 6, interface circuit, 7, silicon rubber electric capacity bottom crown, 8, dielectric layer, 9, silicon rubber electric capacity top crown, 10, silicon rubber condenser type sense of touch sensing unit, 11, capacitance detecting electrode, 12, circular capacitor public electrode, 13, inertia rubber tentacle structure.

Embodiment

Below in conjunction with drawings and Examples, the utility model is described in further detail.

As shown in Figure 1, sensor of the present utility model is from bottom to up successively by flexible PCB substrate 1, and silicon rubber condenser type sense of touch sensing unit array 2 combines; Wherein:

As shown in Fig. 2, Fig. 3, Fig. 4, Fig. 5, flexible PCB substrate 1: be made up of testing circuit conductive layer 3 and interface circuit conductive layer 4 from bottom to up; The plating of testing circuit conductive layer 3 upper surface is processed with testing circuit 5, and the plating of interface circuit conductive layer 4 upper surface is processed with interface circuit 6.

As shown in Fig. 2, Fig. 6, Fig. 7, silicon rubber condenser type sense of touch sensing unit array 2: from bottom to up successively by silicon rubber electric capacity bottom crown 7, dielectric layer 8 and silicon rubber electric capacity top crown 9 form; The bottom surface of silicon rubber electric capacity bottom crown is arranged on interface circuit conductive layer 4 upper surface of flexible PCB substrate 1, according to measurement requirement, silicon rubber condenser type sense of touch sensing unit array 2 is made up of the silicon rubber condenser type sense of touch sensing unit 10 that N × N number of structure is identical, is 5 × 5 silicon rubber condenser type sense of touch sensing units in the present embodiment.

As shown in Figure 4, described testing circuit conductive layer 3 material is polyimide, and thickness is 50 μm, and testing circuit 5 is 4 × N bar, and every bar has N number of check point, and width is 10 μm.

As shown in Figure 5, described interface circuit conductive layer 4 material is polyimide, thickness is 50 μm, be made up of N × N number of subelement, each subelement is 10 μm by radius, and thickness is that the circular interface circuit 6 of 50 μm four is formed, and forms the annulus that a radius is 350 μm, the testing circuit 5 of four circular direct connection detection circuit conductive layers 3 of interface circuit 6 lower surface, makes both electrical communication.

As shown in Fig. 6, Fig. 9, described silicon rubber electric capacity bottom crown 7 adopts silicon rubber as pole plate substrate, and thickness is 200 μm, upper surface has the capacitance detecting electrode 11 that four sheet material that N × N group all surrounds annulus are copper, thickness is 35 μm, and fan-shaped all in 75 ° of every sheet, is expressed as T 1, T 2, T 3and T 4, surrounding an external diameter is 500 μm, and internal diameter is the annulus of 200 μm; Parallel with one another in four chip capacitor detecting electrode 11 structures, be not electrically above mutually communicated with.

As shown in Fig. 6, Figure 10, described dielectric layer 8 is clipped between silicon rubber electric capacity bottom crown 7 and silicon rubber electric capacity top crown 9, and material is silicon rubber, thickness is 40 μm, it is 600 μm that upper surface is processed with N × N number of external diameter, and internal diameter is 100 μm, and the degree of depth is the annular groove of 20 μm.

As shown in figure 11, described silicon rubber electric capacity top crown 9 adopts silicon rubber as pole plate substrate, and thickness is 200 μm, and the circular capacitor public electrode 12 of lower surface has N × N number of diameter to be 500 μm of materials be copper, thickness is 35 μm, is expressed as T 0; The four chip capacitor detecting electrodes 11 that N × N group on silicon rubber electric capacity bottom crown 7 upper surface all surrounds annulus form four capacitive sensing cells respectively with the N × N number of circular capacitor public electrode 12 on silicon rubber electric capacity top crown 9 lower surface, form shunt circuit.

As shown in Fig. 1, Fig. 6, Fig. 8, described inertia rubber tentacle structure 13 is N × N number of, is installed on the upper surface of silicon rubber electric capacity top crown 9, symmetrical with N × N number of circular capacitor public electrode 12 axle center respectively, material is urethane rubber, and shape is diameter 500 μm, is highly the column structure of 3mm.

N number of number in N × N number of circular capacitor public electrode 12 on N × N number of annular groove on 4N on described silicon rubber electric capacity bottom crown 7 × N number of capacitance detecting electrode 11, dielectric layer 8, silicon rubber electric capacity top crown 9 lower surface and the N of silicon rubber electric capacity top crown 9 upper surface × N number of inertia rubber tentacle structure 13 is equal, and one_to_one corresponding is arranged, form the silicon rubber condenser type sense of touch sensing unit 10 that N × N number of structure is identical.

Principle of work of the present utility model is:

Each silicon rubber condenser type sense of touch sensing unit 10 can realize the three-dimensional pressure sensing in X-Y-Z direction, when the shearing force in X-Y direction acts on inertia rubber tentacle structure 13, according to the difference of shearing force direction and size, there is corresponding change in four capacitive sensing cells electric capacitys of each silicon rubber condenser type sense of touch sensing unit 10, can realize the measurement of the shearing force in X-Y direction according to the difference change of electric capacity; When the pressure of Z-direction acts on inertia rubber tentacle structure 13, four capacitive sensing cells electric capacitys of each silicon rubber condenser type sense of touch sensing unit 10 produce identical change, can realize the measurement of Z-direction pressure according to the mean change of electric capacity.

As shown in Fig. 8, Fig. 9, Figure 11, if by four chip capacitor detecting electrode 11 (T on silicon rubber electric capacity bottom crown 7 1~ T 4) with silicon rubber electric capacity top crown 9 on a slice circular capacitor public electrode 12 (T 0) polar plate spacing be defined as g respectively 1, g 2, g 3and g 4.Then in measuring process, the shearing force F of X-direction xmake g 1and g 3produce the increase of equivalent, g 2and g 4produce the reduction of equivalent; The shearing force F of Y-direction ymake g 1and g 2produce the increase of equivalent, g 3and g 4produce the reduction of equivalent; The pressure F of Z-direction zmake g 1, g 2, g 3and g 4produce the reduction of equivalent.

Work as F x, F y, F zwhen acting on sensor simultaneously, F xthe changes delta g of polar plate spacing between the silicon rubber electric capacity bottom crown 7 caused and silicon rubber electric capacity top crown 9 xcan be expressed as:

Δg x = Δg 1 + Δg 3 2 - Δg 2 + Δg 4 2 - - - ( 1 )

Then shearing force F xcan be expressed as:

F x = k x Δg x = k x ( Δg 1 + Δg 3 2 - Δg 2 + Δg 4 2 ) - - - ( 2 )

K in formula xbe expressed as the coefficient of torsion of X-direction silicon rubber condenser type sense of touch sensing unit 10.

F ythe changes delta g of polar plate spacing between the silicon rubber electric capacity bottom crown 7 caused and silicon rubber electric capacity top crown 9 ycan be expressed as:

Δg y = Δg 1 + Δg 2 2 - Δg 3 + Δg 4 2 - - - ( 3 )

Then shearing force F ycan be expressed as:

F y = k y Δg y = k y ( Δg 1 + Δg 2 2 - Δg 3 + Δg 4 2 ) - - - ( 4 )

K in formula ybe expressed as the coefficient of torsion of Y-direction silicon rubber condenser type sense of touch sensing unit 10.

F zthe changes delta g of polar plate spacing between the silicon rubber electric capacity bottom crown 7 caused and silicon rubber electric capacity top crown 9 zcan be expressed as:

Δg z Δg 1 + Δg 2 + Δg 3 + Δg 4 4 - - - ( 5 )

Then shearing force F zcan be expressed as:

F z = k z Δg z = k z Δg 1 + Δg 2 + Δg 3 + Δg 4 4 - - - ( 6 )

K in formula zbe expressed as the coefficient of torsion of Z-direction silicon rubber condenser type sense of touch sensing unit 10.

Adopt the silicon rubber condenser type sense of touch sensing unit array 2 of inertia rubber tentacle structure 13, can fit completely with the irregular surface of measurand, realize X-Y-Z three-dimensional pressure sensing, effectively rebuild the feeling function of artificial limb, improve and measure efficiency and measuring accuracy.

Claims (8)

1. a bionic three-dimensional capacitance type touch sensor for tentacle structure, is characterized in that: this sensor is from bottom to up successively by flexible PCB substrate (1), and silicon rubber condenser type sense of touch sensing unit array (2) combines; Wherein:
1) flexible PCB substrate (1): be made up of testing circuit conductive layer (3) and interface circuit conductive layer (4) from bottom to up; Testing circuit conductive layer (3) upper surface has testing circuit (5), and interface circuit conductive layer (4) upper surface has interface circuit (6);
2) silicon rubber condenser type sense of touch sensing unit array (2): be made up of silicon rubber electric capacity bottom crown (7), dielectric layer (8) and silicon rubber electric capacity top crown (9) successively from bottom to up; The bottom surface of silicon rubber electric capacity bottom crown (7) is arranged on interface circuit conductive layer (4) upper surface of flexible PCB substrate (1), silicon rubber condenser type sense of touch sensing unit array (2) by n× nsilicon rubber condenser type sense of touch sensing unit (10) composition that individual structure is identical.
2. the bionic three-dimensional capacitance type touch sensor of a kind of tentacle structure according to claim 1, is characterized in that: described testing circuit conductive layer (3) material is polyimide, testing circuit (5) is 4 × nbar, every bar has ncheck point.
3. the bionic three-dimensional capacitance type touch sensor of a kind of tentacle structure according to claim 1, is characterized in that: described interface circuit conductive layer (4) material is polyimide, by n× nindividual subelement is formed, each subelement is made up of four circular interface circuits (6), and form an annulus, the testing circuit (5) of four circular direct connection detection circuit conductive layers (3) of interface circuit (6) lower surface, both electrical communication.
4. the bionic three-dimensional capacitance type touch sensor of a kind of tentacle structure according to claim 1, is characterized in that: described silicon rubber electric capacity bottom crown (7) adopts silicon rubber as pole plate substrate, and upper surface has n× ngroup all surrounds four chip capacitor detecting electrodes (11) of annulus, fan-shaped all in 75 ° of every sheet, parallel with one another in four chip capacitor detecting electrode (11) structures, electrically goes up and is not mutually communicated with.
5. the bionic three-dimensional capacitance type touch sensor of a kind of tentacle structure according to claim 1, it is characterized in that: described dielectric layer (8) is clipped between silicon rubber electric capacity bottom crown (7) and silicon rubber electric capacity top crown (9), material is silicon rubber, and upper surface has n × Nindividual annular groove.
6. the bionic three-dimensional capacitance type touch sensor of a kind of tentacle structure according to claim 1, is characterized in that: described silicon rubber electric capacity top crown (9) adopts silicon rubber as pole plate substrate, and lower surface has n× nindividual circular capacitor public electrode (12), on silicon rubber electric capacity bottom crown (7) upper surface n× nthe four chip capacitor detecting electrodes (11) that group all surrounds annulus are with on silicon rubber electric capacity top crown (9) lower surface n × Nindividual circular capacitor public electrode (12) forms four capacitive sensing cells respectively, forms shunt circuit.
7. the bionic three-dimensional capacitance type touch sensor of a kind of tentacle structure according to claim 1, is characterized in that: described inertia rubber tentacle structure (13) is n× nindividual, be installed on the upper surface of silicon rubber electric capacity top crown (9), respectively with n × Nindividual circular capacitor public electrode (12) axle center is symmetrical, and material is urethane rubber, and shape is column structure.
8. the bionic three-dimensional capacitance type touch sensor of a kind of tentacle structure according to claim arbitrary in claim 1 ~ 7, is characterized in that: on described silicon rubber electric capacity bottom crown (7) 4 n× non individual capacitance detecting electrode (11), dielectric layer (8) n × Non individual annular groove, silicon rubber electric capacity top crown (9) lower surface n × Nindividual circular capacitor public electrode (12) and silicon rubber electric capacity top crown (9) upper surface n× nin individual inertia rubber tentacle structure (13) nnumber is equal, and one_to_one corresponding is arranged, forms n× nsilicon rubber condenser type sense of touch sensing unit (10) that individual structure is identical.
CN201420697755.7U 2014-11-19 2014-11-19 A kind of bionic three-dimensional capacitance type touch sensor of tentacle structure CN204286649U (en)

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105105898A (en) * 2015-07-28 2015-12-02 安徽机电职业技术学院 Throat microphone device based on three-dimensional pressure detection and use method of throat microphone device
CN105172489A (en) * 2015-07-28 2015-12-23 安徽工程大学 Tire pressure detecting device based on circular ring contact type three-dimensional pressure sensors
CN106813811A (en) * 2017-01-20 2017-06-09 南京大学 A kind of high sensitivity capacitor type pliable pressure sensor
CN107247523A (en) * 2017-05-26 2017-10-13 清华大学 A kind of Fingertip tactile-sense interactive device of many arrays
CN107765686A (en) * 2017-09-04 2018-03-06 浙江大学 A kind of sensing device interacted for people with robot security
CN107847164A (en) * 2015-09-29 2018-03-27 苹果公司 Pressure measxurement designs
CN108036879A (en) * 2017-12-15 2018-05-15 广州智能装备研究院有限公司 A kind of condenser type flexible touch sensation sensor and its manufacture method
CN108433734A (en) * 2018-02-08 2018-08-24 浙江大学 A kind of discrete threshold values formula plantar pressure sensing device
CN108593153A (en) * 2018-04-17 2018-09-28 深圳东部世界仿生科技有限公司 A kind of pressure detection method and system, storage medium, mobile terminal
CN109163824A (en) * 2018-10-10 2019-01-08 北京理工大学 A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function
CN109813466A (en) * 2019-03-22 2019-05-28 重庆大学 Touch sensor with sliding perceptional function
WO2020181781A1 (en) * 2019-03-08 2020-09-17 吉林大学 Bionic array sensing element and preparation method thereof

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105172489A (en) * 2015-07-28 2015-12-23 安徽工程大学 Tire pressure detecting device based on circular ring contact type three-dimensional pressure sensors
CN105105898A (en) * 2015-07-28 2015-12-02 安徽机电职业技术学院 Throat microphone device based on three-dimensional pressure detection and use method of throat microphone device
US10646121B2 (en) 2015-09-29 2020-05-12 Apple Inc. Pressure measurement designs
CN107847164A (en) * 2015-09-29 2018-03-27 苹果公司 Pressure measxurement designs
CN106813811B (en) * 2017-01-20 2019-04-05 南京大学 A kind of capacitive pliable pressure sensor of high sensitivity
CN106813811A (en) * 2017-01-20 2017-06-09 南京大学 A kind of high sensitivity capacitor type pliable pressure sensor
CN107247523A (en) * 2017-05-26 2017-10-13 清华大学 A kind of Fingertip tactile-sense interactive device of many arrays
CN107765686A (en) * 2017-09-04 2018-03-06 浙江大学 A kind of sensing device interacted for people with robot security
CN107765686B (en) * 2017-09-04 2020-09-01 浙江大学 Sensing device for safe interaction between human and robot
CN108036879A (en) * 2017-12-15 2018-05-15 广州智能装备研究院有限公司 A kind of condenser type flexible touch sensation sensor and its manufacture method
CN108433734A (en) * 2018-02-08 2018-08-24 浙江大学 A kind of discrete threshold values formula plantar pressure sensing device
CN108593153A (en) * 2018-04-17 2018-09-28 深圳东部世界仿生科技有限公司 A kind of pressure detection method and system, storage medium, mobile terminal
CN109163824A (en) * 2018-10-10 2019-01-08 北京理工大学 A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function
WO2020181781A1 (en) * 2019-03-08 2020-09-17 吉林大学 Bionic array sensing element and preparation method thereof
CN109813466A (en) * 2019-03-22 2019-05-28 重庆大学 Touch sensor with sliding perceptional function

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