CN107515065A - Sensor and the method for determining force direction - Google Patents

Sensor and the method for determining force direction Download PDF

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Publication number
CN107515065A
CN107515065A CN201610430526.2A CN201610430526A CN107515065A CN 107515065 A CN107515065 A CN 107515065A CN 201610430526 A CN201610430526 A CN 201610430526A CN 107515065 A CN107515065 A CN 107515065A
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China
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mfrac
msub
mrow
msubsup
matrix
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宋明鑫
肖华
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ZTE Corp
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ZTE Corp
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Priority to CN201610430526.2A priority Critical patent/CN107515065A/en
Priority to PCT/CN2016/092364 priority patent/WO2017215086A1/en
Publication of CN107515065A publication Critical patent/CN107515065A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/165Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/146Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

The invention provides a kind of sensor and the method for determining force direction.Wherein, the sensor includes matrix and pole plate, including:Cambered surface cavity matrix, in the top crown of the one or more pairs of single electrode electric capacity of the inwall scattering device of the cambered surface cavity matrix;Common ground matrix, the public bottom crown of the pair of or multipair single electrode electric capacity is set in the inwall of the common ground matrix;Wherein, the top crown forms capacitor with the public bottom crown.By the present invention, solves the problems, such as the direction that the touch sensor in correlation technique can not recognize haptic force.

Description

Sensor and the method for determining force direction
Technical field
The present invention relates to sensor field, in particular to a kind of sensor and the method for determining force direction.
Background technology
Tactile is as one of five big sense organ of people, the undertaker key player in the mankind are to things cognition course.Tactile skill Art is to realize the important component of haptic interaction, can strengthen the visual experience of user by haptic technology, such as, by pressure sensitivity Touch controllable function is applied to mobile phone games industry, solves the drawbacks of current mobile phone touch can not realize the action such as " gently stepping on the gas ", leads to The authenticity and feeling of immersion of manipulation feel and vision can be lifted by crossing haptic interaction.Conventional human's mode is often simply based on X, Y-axis coordinate is manipulated, and in order to extend man-machine interaction mode, abundant Consumer's Experience, establish more preferable man-machine interaction relation, is needed It is increasingly introducing the interactive operation of Z axis depth, i.e. three-dimension interaction.The touch sensor of single direction is only capable of realizing to haptic force Size is characterized, and can not but recognize the direction of haptic force.
As the concept such as " haptic interaction ", " pressure sensitivity touch-control " is gradually introduced the consumption electronic products such as mobile phone, tablet personal computer Research and development in, touch sensor turns into one of study hotspot both domestic and external.
For above mentioned problem present in correlation technique, at present it is not yet found that the solution of effect.
The content of the invention
The embodiments of the invention provide a kind of sensor and the method for determining force direction, at least to solve in correlation technique Touch sensor can not recognize the problem of direction of haptic force.
According to one embodiment of present invention, there is provided a kind of sensor, including matrix and pole plate, including:Cambered surface cavity Matrix, in the top crown of the one or more pairs of single electrode electric capacity of the inwall scattering device of the cambered surface cavity matrix;Common ground base Body, the public bottom crown of the pair of or multipair single electrode electric capacity is set in the inwall of the common ground matrix;Wherein, it is described Top crown forms capacitor with the public bottom crown.
Alternatively, the single electrode electric capacity is two pairs.
Alternatively, the cambered surface cavity matrix is hemi-spherical cavities matrix, and the top crown is class eighth ball face shape The curved surface electrode of shape.
Alternatively, the cambered surface cavity matrix is hemi-spherical cavities matrix, the common ground matrix is and the hemisphere The circle of the radiuses such as shape.
Alternatively, the radius of the public bottom crown is less than the radius of the common ground matrix.
Alternatively, in the pair of or multipair single electrode electric capacity top crown, gap be present between adjacent top crown.
Alternatively, in the case where the top crown is even number, the top crown of the pair of or multipair single electrode electric capacity One or more pairs of differential capacitance devices are formed with the public bottom crown, wherein the quantity of the top crown is the differential type electricity Twice of the quantity of container.
Alternatively, the medium between the top crown and the public bottom crown is air.
Optionally, the material of the cambered surface cavity matrix and/or the common ground matrix is dimethyl silicone polymer PDMS。
According to another embodiment of the invention, there is provided a kind of method for determining force direction, using the embodiment Sensor, including:Receive three-dimensional force F;The direction of the F is determined using the sensor.
Alternatively, when the sensor includes capacitor C1, C2, C3 and C4, determine the F's using the sensor Direction includes:
Output capacitance values of the F in three-dimensional component is calculated by below equationWith
Wherein, X, Y, Z are Spatial Dimension, and described C1, C2, C3 and C4 initial capacitance are respectivelyWith Exporting change amount in the presence of the F is respectively Δ C1、ΔC2、ΔC3With Δ C4
By described inWithDirection corresponding to middle maximum is defined as the direction of the F.
Pass through the present invention, cambered surface cavity matrix, in the one or more pairs of lists of inwall scattering device of the cambered surface cavity matrix The top crown of electrode capacitance;Common ground matrix, the pair of or multipair single electricity is set in the inwall of the common ground matrix The public bottom crown of electrode capacitance;Wherein, the top crown forms capacitor with the public bottom crown.Due in cambered surface cavity base The top crown of the one or more pairs of single electrode electric capacity of inwall scattering device of body, is formed with this and the bottom crown on common ground matrix One or more pairs of single electrode electric capacity, and scattering device passes through the electricity of all directions in multiple all directions of cambered surface cavity matrix The change of appearance is respectively induced the stress of all directions, therefore the touch sensor solved in correlation technique can not recognize haptic force The problem of direction, the effect for the tactilely-perceptible for realizing three-dimensional force is reached.
Brief description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, forms the part of the application, this hair Bright schematic description and description is used to explain the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the dimensional structure diagram of sensor according to embodiments of the present invention;
Fig. 2 is the flow chart of the method for determination force direction according to embodiments of the present invention;
Fig. 3 is the differential capacitance formula 3 D force-touch sensor top view of the embodiment of the present invention;
Fig. 4 is differential capacitance formula 3 D force-touch sensor side view according to embodiments of the present invention;
Fig. 5 is the differential capacitance formula 3 D force-touch sensor normal direction stress diagram of the embodiment of the present invention;
Fig. 6 is the tangential stress diagram of differential capacitance formula 3 D force-touch sensor of the embodiment of the present invention.
Embodiment
Describe the present invention in detail below with reference to accompanying drawing and in conjunction with the embodiments.It should be noted that do not conflicting In the case of, the feature in embodiment and embodiment in the application can be mutually combined.
It should be noted that term " first " in description and claims of this specification and above-mentioned accompanying drawing, " Two " etc. be for distinguishing similar object, without for describing specific order or precedence.
Embodiment 1
A kind of sensor is provided in the present embodiment, and Fig. 1 is the stereochemical structure of sensor according to embodiments of the present invention Schematic diagram, as shown in figure 1, sensor includes:
Cambered surface cavity matrix 1, in the upper pole of the one or more pairs of single electrode electric capacity of the inwall scattering device of cambered surface cavity matrix 1 Plate 2;
Common ground matrix 4, the public lower pole of one or more pairs of single electrode electric capacity is set in the inwall of common ground matrix 4 Plate 3;
Wherein, top crown forms capacitor with public bottom crown.
Pass through the present embodiment, cambered surface cavity matrix, in the one or more pairs of single electricity of the inwall scattering device of cambered surface cavity matrix The top crown of electrode capacitance;Common ground matrix, the public affairs of one or more pairs of single electrode electric capacity are set in the inwall of common ground matrix Use bottom crown;Wherein, top crown forms capacitor with public bottom crown.Due to the inwall scattering device one in cambered surface cavity matrix Pair or multipair single electrode electric capacity top crown, one or more pairs of single electrodes electricity are formed with this and the bottom crown on common ground matrix Hold, and scattering device is respectively induced respectively by the change of the electric capacity of all directions in multiple all directions of cambered surface cavity matrix The stress in individual direction, therefore solve the problems, such as the direction that the touch sensor in correlation technique can not recognize haptic force, to reach Realize the effect of the tactilely-perceptible of three-dimensional force.
As shown in figure 1, single electrode electric capacity is two pairs.Corresponding, the top crown 2 of single electrode electric capacity is also two pairs.But it is More sensitive effect is realized, and realizes the effect for the power (such as southeastern direction, direction northwest) for perceiving multiple directions, single electricity The number of electrode capacitance can also be more right, such as four pairs, eight equities.
Optionally, cambered surface cavity matrix is hemi-spherical cavities matrix, and top crown is the curved surface of class eighth ball face shape Electrode.Hemispherical can be the regularly or irregularly or hemispheric shape of class.
Cambered surface cavity matrix is hemi-spherical cavities matrix, and common ground matrix is the circle with the radius such as hemispherical.Or The radius of public bottom crown is less than the radius of common ground matrix.
Optionally, can be by curved surface top crown two in order to prevent that short circuit each other occurs between each side of curved surface top crown two Side dimension has reduced, to form gap.In the top crown of multiple single electrode electric capacity, between existing between adjacent top crown Gap.
Optionally, in the case where top crown is even number, the top crown of multiple single electrode electric capacity and public bottom crown structure Into multiple differential capacitance devices, the quantity of wherein top crown is twice of the quantity of differential capacitance device.Such as 4 top crown groups Into 2 pairs of differential capacitance devices.
Optionally, the medium between top crown and public bottom crown is air.
Optionally, the material of cambered surface cavity matrix and/or common ground matrix is polydimethylsiloxane.
Through the above description of the embodiments, those skilled in the art can be understood that according to above-mentioned implementation The method of example can add the mode of required general hardware platform to realize by software, naturally it is also possible to by hardware, but a lot In the case of the former be more preferably embodiment.Based on such understanding, technical scheme is substantially in other words to existing The part that technology contributes can be embodied in the form of software product, and the computer software product is stored in a storage In medium (such as ROM/RAM, magnetic disc, CD), including some instructions to cause a station terminal equipment (can be mobile phone, calculate Machine, server, or network equipment etc.) method that performs each embodiment of the present invention.
Embodiment 2
A kind of method for determining force direction is additionally provided in the present embodiment, and this method is used to realize above-described embodiment and excellent Embodiment is selected, had carried out repeating no more for explanation.Although the method described by following examples is preferably come with software Realize, but hardware, or the realization of the combination of software and hardware is also what may and be contemplated.
Fig. 2 is the flow chart of the method for determination force direction according to embodiments of the present invention, as shown in Fig. 2 the device includes:
Step S201, receive three-dimensional force F;
Step S203, F direction is determined using sensor.
Optionally, when sensor includes capacitor C1, C2, C3 and C4, the direction for determining F using sensor includes:
S11, output capacitance values of the F in three-dimensional component is calculated by below equationWith
Wherein, X, Y, Z are Spatial Dimension, and C1, C2, C3 and C4 initial capacitance are respectivelyWithIn F In the presence of exporting change amount be respectively Δ C1、ΔC2、ΔC3With Δ C4
S12, willWithDirection corresponding to middle maximum is defined as F direction.
Embodiment 3
The present embodiment is according to an alternative embodiment of the invention, for this programme to be described in detail:
The present embodiment proposes a kind of differential capacitance formula three-dimensional force flexible touch sensation sensor structure, the shape master of the electric capacity There are the top crown of certain radian shape and the bottom crown of common ground to form, the present embodiment lists the upper pole of spherical shape Plate, its dimensional structure diagram as shown in figure 1, the three-dimensional force flexible touch sensation sensor structure mainly by dome-type cavity matrix (1), the curved surface top crown (2) of four single electrode electric capacity, circular common ground bottom crown and circular common ground bottom crown matrix Etc. (4) four parts are formed.
The structure of the sensor of the present embodiment includes:Dome-type cavity matrix (1) inwall sets four class eighth balls The curved surface electrode of face shape, the curved surface top crown (2) as four single electrode capacitors.Meanwhile in order to prevent on each curved surface Between side short circuit each other occurs for pole plate (2) two, has reduced the side dimension of curved surface top crown (2) two in design, with Form gap.Another base of four curved surface top crowns is in same circular common ground bottom crown matrix (4) one side;
Four curved surface top crowns (2) and circular common ground bottom crown (3) collectively form (or two pairs of four curved surface capacitors Differential capacitance device), using air as medium between bottom crown on capacitor;
Dome-type cavity matrix (1) is identical with the radius of circular common ground bottom crown matrix (4), and both are formed after bonding Stereoeffect is presented in dome-type cavity body, whole condenser type 3 D force-touch sensor;
Optionally, in order to prevent four curved surface Top electrodes (2) from pole plate short circuit occurs with circular common ground bottom crown (3), In design, circle common ground bottom crown (3) radius is slightly less than the radius of circular common ground bottom crown matrix (4).
The curved surface top crown (2) of the present embodiment and circular common ground bottom crown (3) the composition quick capacitor cell of power, in three-dimensional Under power effect, the upper bottom crown spacing of four curved surface capacitors and effective polar plate area change, so as to cause four curved surfaces Capacitor capacity output changes, and is believed by handling the extraneous three-dimensional force that applies of the change parsing of output capacitance of sensor Breath.
The differential capacitance formula 3 D force-touch sensor structure that the present embodiment proposes mainly has the upper of certain radian shape The bottom crown of pole plate and common ground is formed, the top crown of the spherical shape of the present embodiment, including dome-type cavity matrix (1), the curved surface top crown (2) of four single electrode electric capacity, circular common ground bottom crown and circular common ground bottom crown matrix Etc. (4) four parts are formed.The curved surface electricity of four class eighth ball face shapes set by dome-type cavity matrix (1) inwall Pole, the curved surface top crown (2) as four single electrode capacitors.Four curved surface top crowns (2) and infrabasal plate circle common ground Electrode bottom crown (3) collectively forms four curved surface capacitors (C1, C2, C3 and C4), is air dielectric between upper bottom crown.
Fig. 3 is the differential capacitance formula 3 D force-touch sensor top view of the embodiment of the present invention.As shown in Figure 3.
In order to prevent that short circuit each other occurs between each side of curved surface top crown (2) two, in design by curved surface top crown (2) Two side dimensions have reduced, to form gap.Another base of four curved surface top crowns is in same circular common ground Bottom crown matrix (4) one side;Equally, in order to prevent four curved surface Top electrodes (2) and circular common ground bottom crown (3) from pole occurs Plate short circuit, in design, circle common ground bottom crown (3) radius is slightly less than the half of circular common ground bottom crown matrix (4) Footpath.Dome-type cavity matrix (1) is identical with the radius of circular common ground bottom crown matrix (4), and both form hemisphere after bonding Stereoeffect is presented in type cavity body, whole condenser type 3 D force-touch sensor;Fig. 4 is difference according to embodiments of the present invention Dynamic formula condenser type 3 D force-touch sensor side view, as shown in figure 4, compared with conventional condenser three-dimensional force sensor structure, Electric capacity curved surface top crown (2) is directly integrated in dome-type contact inwall by the structure that the present embodiment proposes, forms space multistory knot Structure.Under normal force effect, dome-type cavity matrix (1) is compressed, and the pole plate spacing of four capacitors reduces, output capacitance value Increase, Fig. 5 is the differential capacitance formula 3 D force-touch sensor normal direction stress diagram of the embodiment of the present invention, and sensor mechanism is such as Shown in Fig. 5.Similarly, under tangential force effect, dome-type cavity deforms upon, effective polar plate area hair of four curved surface capacitors Changing, so that two electric capacity output capacitance increases, two other output capacitance reduce, two pairs of differential configurations are formed, it is cut To power stress diagram as shown in fig. 6, Fig. 6 be the embodiment of the present invention differential capacitance formula 3 D force-touch sensor tangentially by Power schematic diagram, improve tangential tactility.
A kind of preparation method of differential capacitance formula three-dimensional force flexible touch sensation sensor is present embodiments provided, can be based on 3D printing technique and fluid forming technique.Dome-type cavity matrix (1) and circular common ground bottom crown matrix (4) are with PDMS For material, not heat release, amount of contraction small and good radiation resistance when the transparent elastomer with toughness can be achieved, and solidifying Energy.Four curved surface top crowns (2) and circular common ground bottom crown (3) at room temperature may be used using organosilicon conductive silver glue as material Voluntarily solidify, and there is good electric conductivity, tensility and flexibility after solidifying.
After the differential capacitance formula three-dimensional force flexible touch sensation sensor being fabricated to, it is assumed that four curved surface electric capacity respectively with C1, C2, C3 and C4 represent that touch sensor is that initial capacitance is in non-stressWith(four initial capacitances in theory Value is equal), in three-dimensional forceUnder effect, the exporting change amount of four electric capacity is Δ C1、ΔC2、ΔC3With Δ C4, Then under three-dimensional force F effects each component force cause corresponding capacitance sensor output capacitance value (With) meet formula (1- 3) relation in:
Pass through demarcationWithWith three-dimensional force component FX、FYAnd FZBetween relation, you can be finally inversed by three-dimensional force letter Breath, so as to realize three-dimensional force tactilely-perceptible function.
Condenser type 3 D force-touch sensor structure is carried out in this example using 3D printing technique to prepare, if it is desired to further Size sensor is reduced, integration is lifted, MEMS technology (Microfabrication Process) can be selected.Meanwhile electricity The high conductivity materials such as graphene can also be selected by holding pole plate.In order to further lifted electric capacity initial value so as to back end signal at Reason, the flexible material of high-k can be filled in dome-type cavity, such as, carbon composite material filling sponge etc..Separately Outside, can be according to tactilely-perceptible range ability, the appropriate thickness and Young's modulus for adjusting dome-type cavity matrix.
A kind of differential capacitance formula three-dimensional force flexible touch sensation sensor that the present embodiment proposes, the shape of electric capacity mainly have one The bottom crown of the top crown and common ground of determining radian shape is formed, and this patent lists the top crown of spherical shape, its structure Feature is that the curved surface top crown of four single electrode electric capacity is integrated in into dome-type cavity inner wall, forms stereoeffect, more has Beneficial to the tactilely-perceptible of three-dimensional force, meanwhile, differential structure is designed as, improves the detection sensitivity of tangential force.Capacitor is Single electrode mode of operation, overall structure possess good integration, and the contact conductor of four curve Top electrodes can pass through dome-type Cavity matrix leads to circular common ground bottom crown matrix, so as in same plane, be easy to battle array with circular common ground bottom crown Rowization design.Differential capacitance formula 3 D force-touch sensor integrally possesses flexibility characteristics, has in wearable, bionics skin field Standby wide application prospect.
Obviously, those skilled in the art should be understood that above-mentioned each module of the invention or each step can be with general Computing device realize that they can be concentrated on single computing device, or be distributed in multiple computing devices and formed Network on, alternatively, they can be realized with the program code that computing device can perform, it is thus possible to they are stored Performed in the storage device by computing device, and in some cases, can be with different from shown in order execution herein The step of going out or describing, they are either fabricated to each integrated circuit modules respectively or by multiple modules in them or Step is fabricated to single integrated circuit module to realize.So, the present invention is not restricted to any specific hardware and software combination.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the invention, for the skill of this area For art personnel, the present invention can have various modifications and variations.Within the spirit and principles of the invention, that is made any repaiies Change, equivalent substitution, improvement etc., should be included in the scope of the protection.

Claims (11)

1. a kind of sensor, including matrix and pole plate, it is characterised in that including:
Cambered surface cavity matrix, in the upper pole of the one or more pairs of single electrode electric capacity of the inwall scattering device of the cambered surface cavity matrix Plate;
Common ground matrix, the common ground matrix inwall set it is the pair of or multipair single electrode electric capacity it is public under Pole plate;
Wherein, the top crown forms capacitor with the public bottom crown.
2. sensor according to claim 1, it is characterised in that the single electrode electric capacity is two pairs.
3. sensor according to claim 2, it is characterised in that the cambered surface cavity matrix is hemi-spherical cavities matrix, The top crown is the curved surface electrode of class eighth ball face shape.
4. sensor according to claim 1, it is characterised in that the cambered surface cavity matrix is hemi-spherical cavities matrix, The common ground matrix is the circle with the radius such as the hemispherical.
5. sensor according to claim 4, it is characterised in that the radius of the public bottom crown is less than described public connect The radius of ground matrix.
6. sensor according to claim 1, it is characterised in that the top crown of the pair of or multipair single electrode electric capacity In, gap be present between adjacent top crown.
7. sensor according to claim 1, it is characterised in that described in the case where the top crown is even number The top crown of one or more pairs of single electrode electric capacity forms one or more pairs of differential capacitance devices, wherein institute with the public bottom crown The quantity for stating top crown is twice of the quantity of the differential capacitance device.
8. sensor according to claim 1, it is characterised in that Jie between the top crown and the public bottom crown Matter is air.
9. sensor according to claim 1, it is characterised in that the cambered surface cavity matrix and/or the common ground The material of matrix is polydimethylsiloxane.
A kind of 10. method for determining direction, using the sensor described in power 1 to 9 any one of power, it is characterised in that including:
Receive three-dimensional force F;
The direction of the F is determined using the sensor.
11. according to the method for claim 10, it is characterised in that include capacitor C1, C2, C3 and C4 in the sensor When, the direction for determining the F using the sensor includes:
Output capacitance values of the F in three-dimensional component is calculated by below equationWith
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<mrow> <msub> <mover> <mi>C</mi> <mo>~</mo> </mover> <mi>Y</mi> </msub> <mo>=</mo> <mfrac> <mn>1</mn> <mn>4</mn> </mfrac> <mo>&amp;lsqb;</mo> <mo>-</mo> <mfrac> <mrow> <msub> <mi>&amp;Delta;C</mi> <mn>1</mn> </msub> </mrow> <msubsup> <mi>C</mi> <mn>1</mn> <mn>0</mn> </msubsup> </mfrac> <mo>+</mo> <mfrac> <mrow> <msub> <mi>&amp;Delta;C</mi> <mn>2</mn> </msub> </mrow> <msubsup> <mi>C</mi> <mn>2</mn> <mn>0</mn> </msubsup> </mfrac> <mo>+</mo> <mfrac> <mrow> <msub> <mi>&amp;Delta;C</mi> <mn>3</mn> </msub> </mrow> <msubsup> <mi>C</mi> <mn>3</mn> <mn>0</mn> </msubsup> </mfrac> <mo>-</mo> <mfrac> <mrow> <msub> <mi>&amp;Delta;C</mi> <mn>4</mn> </msub> </mrow> <msubsup> <mi>C</mi> <mn>4</mn> <mn>0</mn> </msubsup> </mfrac> <mo>&amp;rsqb;</mo> <mo>&amp;times;</mo> <mo>&amp;lsqb;</mo> <mfrac> <mn>1</mn> <mrow> <mn>1</mn> <mo>+</mo> <msub> <mover> <mi>C</mi> <mo>~</mo> </mover> <mi>Z</mi> </msub> </mrow> </mfrac> <mo>&amp;rsqb;</mo> <mo>;</mo> </mrow>
<mrow> <msub> <mover> <mi>C</mi> <mo>~</mo> </mover> <mi>Z</mi> </msub> <mo>=</mo> <mfrac> <mn>1</mn> <mn>4</mn> </mfrac> <mo>&amp;lsqb;</mo> <mfrac> <mrow> <msub> <mi>&amp;Delta;C</mi> <mn>1</mn> </msub> </mrow> <msubsup> <mi>C</mi> <mn>1</mn> <mn>0</mn> </msubsup> </mfrac> <mo>+</mo> <mfrac> <mrow> <msub> <mi>&amp;Delta;C</mi> <mn>2</mn> </msub> </mrow> <msubsup> <mi>C</mi> <mn>2</mn> <mn>0</mn> </msubsup> </mfrac> <mo>+</mo> <mfrac> <mrow> <msub> <mi>&amp;Delta;C</mi> <mn>3</mn> </msub> </mrow> <msubsup> <mi>C</mi> <mn>3</mn> <mn>0</mn> </msubsup> </mfrac> <mo>+</mo> <mfrac> <mrow> <msub> <mi>&amp;Delta;C</mi> <mn>4</mn> </msub> </mrow> <msubsup> <mi>C</mi> <mn>4</mn> <mn>0</mn> </msubsup> </mfrac> <mo>&amp;rsqb;</mo> <mo>;</mo> </mrow>
Wherein, X, Y, Z are Spatial Dimension, and described C1, C2, C3 and C4 initial capacitance are respectivelyWithInstitute The exporting change amount stated in the presence of F is respectively Δ C1、ΔC2、ΔC3With Δ C4
By described inWithDirection corresponding to middle maximum is defined as the direction of the F.
CN201610430526.2A 2016-06-16 2016-06-16 Sensor and the method for determining force direction Pending CN107515065A (en)

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CN201610430526.2A CN107515065A (en) 2016-06-16 2016-06-16 Sensor and the method for determining force direction
PCT/CN2016/092364 WO2017215086A1 (en) 2016-06-16 2016-07-29 Sensor and method for determining force direction

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CN111751038A (en) * 2020-07-06 2020-10-09 安徽大学 High-sensitivity capacitive flexible three-dimensional force touch sensor based on bionic mushroom structure
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CN113252228B (en) * 2021-04-15 2022-09-30 安徽大学 High-sensitivity capacitive flexible three-dimensional force touch sensor based on flexible elastic curved beam
CN114674483A (en) * 2022-04-08 2022-06-28 浙江大学 Three-dimensional force flexible touch sensor with high tangential angle resolution

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