CN109163824A - A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function - Google Patents
A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function Download PDFInfo
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- CN109163824A CN109163824A CN201811179905.4A CN201811179905A CN109163824A CN 109163824 A CN109163824 A CN 109163824A CN 201811179905 A CN201811179905 A CN 201811179905A CN 109163824 A CN109163824 A CN 109163824A
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- 210000003491 Skin Anatomy 0.000 title claims abstract description 19
- 239000010410 layers Substances 0.000 claims abstract description 105
- 239000002184 metals Substances 0.000 claims abstract description 23
- 229910052751 metals Inorganic materials 0.000 claims abstract description 23
- 239000003990 capacitor Substances 0.000 claims abstract description 12
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- 125000000118 dimethyl group Chemical group data:image/svg+xml;base64,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 data:image/svg+xml;base64,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 [H]C([H])([H])* 0.000 claims description 7
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic means
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic means for measuring length, width or thickness
- G01B7/023—Measuring arrangements characterised by the use of electric or magnetic means for measuring length, width or thickness for measuring distance between sensor and object
Abstract
Description
Technical field
The present invention relates to the technical fields of robot collaborative perception, and in particular to one kind has tactile and close feel bimodulus sense Know the flexible electronic skin of function.
Background technique
The measure of extraneous personal protection is mainly isolated in robot by machine man-hour with personnel, but in intelligence In energy manufacturing process, robot and Collaboration is needed to work, therefore it is required that robot can constantly monitor extraneous personnel's distance Information is enable to respond quickly when operator surmounts safe distance to support personnel's safety, while in some crawl objects Occasion can be realized the monitoring to grasp force, to guarantee that target is not damaged.Robot relies on self-contained sensor The variation of detection system sensing external environment, electronic bio skin is the most important perceptive mode in addition to robotic vision system, Can the flexible electronic skin auxiliary robot of perception and range information realize tactile and close to feeling bimodulus perception, and then realize with External environment carries out safe and efficient interaction.Robot is had the disadvantage in that with electronic skin and is had a single function at present, can only realize certain The extraction of one single piece of information, it is difficult to realize the integrated of multiple functions；Degree of flexibility is inadequate, and the sensor rigidity of design is big, is not easy reality It is now bent, it is difficult to the covering of different area is realized by splicing.
Summary of the invention
In view of this, the present invention provides a kind of with tactile and approaches the flexible electronic skin of feel bimodulus perceptional function, With tactile and close to feel bimodulus perceptional function, and rigidity is little, is easily bent, and can realize covering for different area by splicing Lid.
A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function, the flexible electronic skin is multilayer Structure, is followed successively by top crown layer, middle dielectric layer and bottom crown layer from top to bottom, the top crown layer, middle dielectric layer and under Pole plate layer constitutes sensing unit；Pole plate base material be flexible material, surface cover metal film constitute electrode, top crown layer, in Between dielectric layer and bottom crown layer constitute tactile sensing unit and realize perception to power size, top crown layer is constituted close to feeling that sensing is single Member realizes the perception adjusted the distance；
The sensing unit array is arranged, and transversely or longitudinally the metal film of sensing unit is connected as one on same layer, It is communicated using same channel, corresponding analog switch is connected by lead and spreads out of signal；
Upper and lower pole plate layer is connected to capacitor acquisition chip by the analog switch, controls analog switch using microprocessor On-off realize signal acquisition and perceptual model switching；Top crown layer and the analog switch of bottom crown layer connection connect simultaneously When logical, it is in tactilely-perceptible mode, the analog switch of top crown layer is connected to, when the analog switch of bottom crown layer disconnects, in connecing It is close to feel perceptual model.
Further, the metal film is " ten " font, including long side and short side, and long side length is equal to single sensing unit Side length, can be spliced along long side extending direction；
Top crown layer is embedded in flexible base material lower surface by metal film and constitutes, and bottom crown layer is embedded in soft by metal film Property base material upper surface constitute, the metal film long side spatially orthogonal overlapping of top crown layer and bottom crown layer, lap For tactile sensing unit area.
Further, the top crown layer is equipped with convexity layer, and the convexity layer is by protrusion and dimethyl silicone polymer base Bottom material is constituted, and protrusion setting is in dimethyl silicone polymer base material upper surface, and the protrusion is located at tactile sensing unit Overlying regions.
Further, the middle dielectric layer is in tactile sensing unit area hollow out, rest part spin coating poly dimethyl silicon Oxygen alkane.
Further, the interlayer dielectric thickness is 120 microns~200 microns.
The utility model has the advantages that
1, the present invention is based on flat capacitor sensors to realize tactilely-perceptible, is realized based on plane formula capacitance sensor close Feel perception, realize tactile and close to the integrated of two kinds of perceptual models is felt, there is small in size, high sensitivity, low noise, low temperature The remarkable advantages such as drift, the simple, rapid dynamic response speed of structure, realize the monitoring to power and distance, so not only can be to people Machine interaction is more to protect together, is also effectively reduced the load of robot sensing's system；
Secondly, transversely or longitudinally sensing unit is communicated using same channel on same layer, reduce single sensing unit Signal lead, and the base material of electrode plate use flexible material, sensor rigidity is little, is easily bent, and can pass through spelling Connect the covering for realizing different area.
2, convexity layer is arranged on top crown layer in the present invention, and stress concentration can be enhanced, promote sensing unit sensitivity.
3, middle dielectric layer of the present invention does hollow processing on the corresponding position in tactile sensing unit area, can increase The deflection of upper and lower pole plate, further promotes sensing unit sensitivity.
4, middle dielectric layer of the present invention with a thickness of 120 microns~200 microns, interlayer dielectric thickness is excessive to will affect biography Feel the sensitivity of unit, thickness is too small, and upper and lower pole plate layer is easily connected, and cannot constitute flat capacitor sensor.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the explosive view of the single sensing unit of the present invention；
Fig. 3 is the perspective view of Fig. 2；
Fig. 4 is the multiplexing structure schematic diagram of top crown layer；
Fig. 5 is signal acquisition schematic diagram.
Wherein, 1- convexity layer, 2- top crown layer, 3- middle dielectric layer, 4- bottom crown layer.
Specific embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The present invention provides a kind of with tactile and the close flexible electronic skin for feeling bimodulus perceptional function, the flexible electronic Skin is four film structures, is followed successively by convexity layer 1, top crown layer 2, middle dielectric layer 3 and bottom crown layer 4 from top to bottom and constitutes biography Feel unit.As shown in Figure 1, being single sensing unit, flexible electronic skin includes 8x8 distributed sensing unit battle array in the present embodiment Column.
As shown in Figure 2 and Figure 3, top crown layer 2 is embedded in flexible base material lower surface by metal film and constitutes, metal film choosing With copper Cu, flexible base material uses polyimides PI, which is " ten " font, including long side and short side, long side length Equal to the side length of single sensing unit, can be spliced along long side extending direction.
Bottom crown layer 4 is embedded in flexible base material upper surface by metal film and constitutes, the metal film structures of bottom crown layer 4 with The metal film of top crown 2 is consistent, while the long side extending direction of the metal film long side extending direction of bottom crown layer 4 and top crown 2 It is orthogonal.Top crown layer 2 and the spatially orthogonal overlapping of the metal film of bottom crown layer 4 as a result, lap is tactile sensing Unit area.
Convexity layer 1 is arranged on top crown layer 2, is made of protrusion and base material, the base material of convexity layer 1 and centre 3 material of dielectric layer is consistent, is dimethyl silicone polymer, and protrusion is located above tactile sensing unit area, for enhancing stress It concentrates, promotes sensing unit sensitivity.
Top crown layer 2 is separated with bottom crown layer 4 by middle dielectric layer 3, top crown layer 2, middle dielectric layer 3 and bottom crown Layer 4 constitutes tactile sensing unit, and as flat capacitor sensor realizes the perception to power size, forms 64 tactile sensings altogether Unit.
For the sensitivity for further increasing sensing, engraved on middle dielectric layer 3 in the corresponding region in tactile sensing unit area Sky, rest part spin coating dimethyl silicone polymer, and middle dielectric layer 3 with a thickness of 120 microns~200 microns.
Top crown layer 2 is constituted close to the perception for feeling that sensing unit realization is adjusted the distance, as plane formula capacitance sensor.
For the signal lead for reducing single sensing unit, with transversely or longitudinally 8 sensing units for one in sensor array Group, using multiplexing structure, such as the strip structure in Fig. 4 dotted line frame, 8 top crown layers 2 are multiplexing structure, this 8 top crown layers 2 The metal film long side of sensing unit is connected as one, and constitutes bar shaped sensing unit, i.e., the biography in each bar shaped sensing unit structures Sense unit can be communicated by same channel；8 bottom crown layers 4 equally use multiplexing structure, 4 sensing unit of bottom crown layer Metal film long side be connected as one, the metal film longitudinal direction with 2 sensing unit of upper electrode plate is in spatial vertical.Bar shaped passes Sense unit connects corresponding analog switch by lead and spreads out of signal.
Upper and lower pole plate layer is connected to capacitor acquisition chip by analog switch, using microprocessor realize signal acquisition with And the switching of perceptual model.When the analog switch that top crown layer 2 and bottom crown layer 4 connect is connected to simultaneously, it is in tactilely-perceptible mould Formula, the analog switch connection of top crown layer 2 when the analog switch of bottom crown layer 4 disconnects, feel perceptual model in close.
When realizing tactilely-perceptible, upper and lower pole plate layer constitutes tablet type sensor；When realizing close feel perception, sensor array In upper electrode plate constitute plane formula sensor, pass through microprocessor and control analog switch array and realize two kinds of perceptual models Switching.
As shown in figure 5, being sequentially completed the detection of each bar shaped sensing unit information using the method that determinant scans, pass through The on-off of analog switch is controlled to complete gating and the disconnection of each bar shaped sensing unit.Under tactilely-perceptible mode, bottom crown layer 4 The analog switch of connection is connected to ground connection, and bottom crown layer 4 is used as receiving electrode, and top crown layer 2 is connected to the appearance of capacitor acquisition chip Property input terminal as excitation electrode, to complete the extraction of the unit information.After contacting with target object, contact load causes pole So as to cause capacitance variation, the variable quantity according to capacitor can complete the calibration of sensing unit capacitance and power for plate spacing variation To realize tactilely-perceptible.
Close to feeling under perceptual model, 8, upper layer sensing unit forms fringe field as excitation electrode, i.e. a bar shaped passes Feel unit and constitute one close to sensing unit, target object is connected to capacitor acquisition chip as receiving electrode, by excitation electrode Capacitive input terminal, receiving electrode ground connection complete the acquisition of signal.Using fringe field effects, when target object is close to two electrodes When, the effective dielectric constant above electrode changes, and the capacitive between object, excitation electrode and the earth changes, from And causing the variation of plane formula capacitance sensor capacitor, the variable quantity according to capacitor can complete sensing unit capacitance and distance Calibration to realize close to feel perception.
In conclusion the above is merely preferred embodiments of the present invention, being not intended to limit the scope of the present invention. All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention Within protection scope.
Claims (5)
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| CN201811179905.4A CN109163824A (en) | 2018-10-10 | 2018-10-10 | A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function |
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| CN201811179905.4A CN109163824A (en) | 2018-10-10 | 2018-10-10 | A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110987029A (en) * | 2019-12-17 | 2020-04-10 | 华中科技大学 | Multifunctional flexible sensor and preparation method and application thereof |
| CN111238545A (en) * | 2020-01-17 | 2020-06-05 | 腾讯科技（深圳）有限公司 | Sensor, intelligent device, sensing method and storage medium |
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| CN107677296A (en) * | 2017-09-25 | 2018-02-09 | 合肥工业大学 | A kind of Grazing condition is close to touch-pressure sensation sensor |
| CN108362428A (en) * | 2018-01-31 | 2018-08-03 | 北京他山科技有限公司 | A kind of capacitance-resistance combined type touch sensor, electronic skin and intelligent robot |
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| CN110987029A (en) * | 2019-12-17 | 2020-04-10 | 华中科技大学 | Multifunctional flexible sensor and preparation method and application thereof |
| CN110987029B (en) * | 2019-12-17 | 2020-11-24 | 华中科技大学 | Multifunctional flexible sensor and preparation method and application thereof |
| CN111238545A (en) * | 2020-01-17 | 2020-06-05 | 腾讯科技（深圳）有限公司 | Sensor, intelligent device, sensing method and storage medium |
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Application publication date: 20190108 |