CN104764481A - Full-compliancy capacitance and resistance dual mode proximate sense transducer - Google Patents
Full-compliancy capacitance and resistance dual mode proximate sense transducer Download PDFInfo
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Abstract
The invention discloses a full-compliancy capacitance and resistance dual mode proximate sense transducer. The full-compliancy capacitance and resistance dual mode proximate sense transducer is characterized in that a capacitance type proximate sense transducer body and a resistance type proximate sense transducer body are arranged on a compliant substrate in a spaced mode, and the capacitance type proximate sense transducer body and the resistance type proximate sense transducer body cooperate to perceive object proximity information in a segmented mode. According to the full-compliancy capacitance and resistance dual mode proximate sense transducer, the capacitance and resistance dual mode is utilized to cooperatively detect the object proximity information in a segmented mode, and therefore the accuracy of the transducer can be improved; all structures of the transducer have the compliancy, all leads are led to the same compliant substrate, and therefore the problems that the leads are tedious, not beautiful and not easy to maintain during array structure design are solved.
Description
Technical field
The invention belongs to field of sensing technologies, relate to a kind of double mode flexible proximity scnsor of capacitance-resistance being applied to artificial intelligence skin.
Background technology
Proximity scnsor has very important using value in robot, and robot relies on proximity scnsor can accurately perception external information, realizes and the good interaction of external environment.Measuring distance is proximity scnsor within zero point several millimeter to tens millimeters of scopes, and their effect between sense of touch and vision, and can supplement the deficiency of sense of touch and vision well in a lot of situation.Proximity scnsor plays an important role in intelligent robot, as realize target identification, location, tracking and motion in keep away barrier etc.Robot can degree of closeness between perception and target object by proximity scnsor, thus can complete without destroying close, collision free and realizing a series of actions of soft grasping, it compare vision system and haptic system more simple, apply also more extensive.
At present, can be realized by the proximity transducer of number of different types close to perception.Chang etc. devise a kind of quartz crystal oscillatory type proximity transducer with three-layer sandwich structure, it be better than capacitive proximity sensor close to perceived effect.Bartsch etc. study and develop a kind of low-power consumption vortex type proximity sense sensor being applicable to operation under rugged surroundings.Fericean etc. are studied for the application of microwave type proximity scnsor in industry, improve its hardware circuit.Um D etc. devises the perception in order to realize the three-dimensional shape for object, and by optimizing the staggered form arrangement of infrared type proximity scnsor array, the mode of this kind of novel array arrangement may be used for intelligent robot.Goeger etc. utilize capacitive induction principle, the double mode capacitive proximity sense sensor of new structure of design, can be used for robot mechanical arm and differentiate close to information, and it not only utilizes capacitance principle to measure close to information, but also can measure tactile data.Pan Wei etc. make use of infrared external reflection light intensity principle and have developed a kind of infrared tube that adopts as close to feeling that the anti-interference proximity transducer of probe realizes close to perception.The people such as Heng-Tze Cheng have developed the new-type non-contact gesture recognition system based on infrared type proximity scnsor that a kind of accuracy rate can reach 98%, its main method is by utilizing novel signal extraction, then carries out the three-dimension gesture of real-time monitoring, identification and object of classification by binary decision tree.The research of above-mentioned proximity scnsor is not object manipulator dermal application, all can not meet very well for the flexibility required by robot skin, scale integration, modularization, security and robustness etc.
Summary of the invention
The present invention is the weak point for avoiding existing for above-mentioned existing proximity scnsor, there is provided a kind of Grazing condition capacitance-resistance double mode proximity scnsor, aim to provide a kind of, capacitance-resistance double mode proximity scnsor of being easy to array simple for the artificial sensitive-skinned Grazing condition of intelligent robot, highly sensitive, stable performance, preparation technology.
The present invention is that technical solution problem adopts following technical scheme:
The double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention, its feature is: the double mode proximity scnsor of described Grazing condition capacitance-resistance is in a flexible substrates, be arranged at intervals with capacitive proximity sense sensor and resistance-type proximity scnsor, with described capacitive proximity sense sensor and resistance-type proximity scnsor segmenting cooperation perceptual object close to information;
Described capacitive proximity sense sensor is that the upper surface of flexible substrates is provided with compliant conductive bipolar electrode, described flexible substrates lower surface, be positioned at immediately below described compliant conductive bipolar electrode and be provided with for the compliant conductive electrode layer as screen layer;
Described resistance-type proximity scnsor is that compliant conductive bipolar electrode is provided with compliant conductive interdigital electrode described in the upper surface of flexible substrates, interval, is coated with responsive to temperature film at described compliant conductive interdigital electrode upper surface;
Be peripherally installed with ring-shaped shield electrode at described compliant conductive bipolar electrode, described flexible annular conductive electrode is for shielding the impact of described compliant conductive interdigital electrode on described compliant conductive bipolar electrode.
Grazing condition capacitance-resistance formula of the present invention is close to feeling sense sensor, and its feature is also: described responsive to temperature film take graphene nanometer sheet as material.Described flexible substrates take polyimide as material.
The lead design of the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention, in same polyimide flex substrate, can carry out electrode wiring flexibly, is convenient to arrayed configurations design.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention utilizes electric capacity and the double mode segmenting cooperation of resistance to detect close to information simultaneously, improves the degree of accuracy of sensor; Compared with other proximity scnsor, the relative merits that the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention utilizes electric capacity, resistance to exist separately on inspected object is close, cooperation detection is close to visual information, not only expanding close to feeling range, also improving the degree of accuracy in the range ability of place.
2, the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention take polyimide as substrate, its all structure all has good flexibility, and sensor can realize flexural deformation, can reliably be fitted on robot skin, the detection of the nearly information that achieves a butt joint, improves its surperficial adaptability.
3, the double mode proximity scnsor preparation technology of Grazing condition capacitance-resistance of the present invention is simple, is easy to array; Compared with other proximity scnsor, Grazing condition capacitance-resistance of the present invention double mode proximity scnsor institute leadedly all designs in same flexible substrates, occur when solving array structure design lead-in wire loaded down with trivial details, unsightly, the not difficult problem such as easy care; Simultaneously, double mode for Grazing condition capacitance-resistance of the present invention proximity scnsor array is lined up structure by polyimide flex substrate, and Spliced type array extension interface is reserved around array, be spliced into the sensitivity " skin " of different size and shape by FPC soft arranging wire more neatly, possess the features such as wearable row, expansibility, portability and easy care.
Accompanying drawing explanation
Fig. 1 is the vertical section structural drawing of the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention;
Fig. 2 is the fractionation stereographic map of the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention;
When Fig. 3 is the unit of plastic of 60 DEG C proximity scnsor double mode close to Grazing condition capacitance-resistance of the present invention, its electric capacity, resistance value and close to distance relation;
When Fig. 4 is the aluminium block of 30 DEG C proximity scnsor double mode close to Grazing condition capacitance-resistance of the present invention, its electric capacity, resistance value and close to distance relation;
Fig. 5 is Grazing condition capacitance-resistance of the present invention double mode proximity scnsor array structure schematic diagram;
Fig. 6 is the array leads schematic diagram of the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention;
Number in the figure: 1 responsive to temperature film; 2 compliant conductive interdigital electrodes; 3 flexible annular conductive electrodes; 4 compliant conductive bipolar electrodes; 5 flexible substrates; 6 compliant conductive electrode layers; 7 silicon rubber; 8 conductive silver glues; The double mode proximity scnsor unit of 9 capacitance-resistance; 10 Spliced type array extension sockets; 11 capacitance signal the first row sweep traces; 12 capacitance signal first row sweep traces; 13 resistance signal the first row sweep traces; 14 resistance signal first row sweep traces; 15 through holes.
Embodiment
As shown in Figure 1, the structure of the double mode proximity scnsor of the present embodiment Grazing condition capacitance-resistance is: in a flexible substrates 5, be arranged at intervals with capacitive proximity sense sensor and resistance-type proximity scnsor, with capacitive proximity sense sensor and resistance-type proximity scnsor segmenting cooperation perceptual object close to information;
Capacitive proximity sense sensor is that the upper surface of flexible substrates 5 is provided with compliant conductive bipolar electrode 4, flexible substrates 5 lower surface, be positioned at immediately below compliant conductive bipolar electrode 4 and be provided with for the compliant conductive electrode layer 6 as screen layer;
Resistance-type proximity scnsor be flexible substrates 5 upper surface, with compliant conductive bipolar electrode 4 be arranged at intervals with compliant conductive interdigital electrode 2, be coated with responsive to temperature film 1 at compliant conductive interdigital electrode 2 upper surface;
Be peripherally installed with flexible annular conductive electrode 3 at compliant conductive bipolar electrode 4, flexible annular conductive electrode 3 for shielded flexible conduction interdigital electrode 2 on the impact of compliant conductive bipolar electrode 4.Non-for compliant conductive bipolar electrode 4 close side shields by compliant conductive electrode layer 6, eliminates the impact of this side on capacitance detecting, improves the degree of accuracy of proximity test.
Based on flexible printed circuit board (FPCB) technology, flexible substrates 5 selects polyimide, compliant conductive bipolar electrode 4, flexible annular conductive electrode 3 and compliant conductive interdigital electrode 2 are all windowed process at the top layers of flexible substrates 5, compliant conductive electrode layer and screen layer 6 at the bottom of flexible substrates 5 and process of windowing, respectively as shown in compliant conductive bipolar electrode 4, flexible annular conductive electrode 3 and compliant conductive interdigital electrode 2, compliant conductive electrode layer 6 in Fig. 2.
Responsive to temperature film 1 selects the graphene nanometer sheet of Chengdu organic chemistry company limited, and as resistance-type in the double mode proximity scnsor of Grazing condition capacitance-resistance close to sensitive material, its thickness is at 4-20nm, and diameter is 5-10 μm, and the number of plies is less than 30 layers.
Conductive silver glue 8 selects the YC-02 type organosilicon conductive silver glue of the special tackifier company limited of Nanjing Heineken, YC-02 type organosilicon conductive silver glue first, second component can be solidified under room temperature after 10:1 Homogeneous phase mixing in mass ratio voluntarily, and has the advantages such as good electric conductivity, tensility and flexibility after solidification.
Resistance-type proximity scnsor manufacturing process is as shown in Figure 2: get a certain amount of graphene nanometer sheet powder and pour appropriate naphtha into, first within 30 minutes, within 2 hours, obtained with ultrasonic process the suspension of favorable dispersibility by mechanical raking again.Then between the compliant conductive interdigital electrode surperficial finger coating conductive silver glue 8, compliant conductive interdigital electrode, part (i.e. insulated part) coats silicon rubber 7 as bonding agent.Subsequently the graphene nanometer sheet suspension prepared before is dropped in compliant conductive interdigital electrode, finally thermal pretreatment is carried out to it: by drip have the flexible PCB of graphene nanometer sheet suspension to be placed in sweat box rapid temperature increases to 150 DEG C after take out and cool in atmosphere.
The concrete detection mechanism of the double mode proximity scnsor of the present embodiment Grazing condition capacitance-resistance is as follows: when the above-mentioned proximity scnsor of the object proximity with uniform temperature, along with distance is more and more nearer, above compliant conductive bipolar electrode, effective dielectric coefficient changes, by realizing close detection to the detection of its capacitance variations; Due to close to object with uniform temperature, close along with object, graphene nanometer sheet environment temperature is changed, and thus graphene nanometer sheet resistance sizes changes, by realizing close detection to the detection of its resistance variations.
Capacitive proximity sense sensor adopts the form of coplanar bipolar electrode, inspected object in-plant close to time, condenser type has fast, the highly sensitive feature of response, but its scope that can detect is smaller and change along with the design of electrode size and structure thereof and change.Resistance-type proximity scnsor then sensing range is larger, the graphene nanometer sheet film selected has the feature of highly sensitive, reproducible and anti-interference (humidity is little on its impact), but selected graphene nanometer sheet is slower as its response during proximity scnsor.Thus the two is combined and one, can effectively increase capacitive sensing range, the feature of resistance-type low-response can be made up again, thus realize the object proximity of cooperation detection higher than environment temperature more efficiently.
Fig. 3 is the change of the temperature unit of plastic that remains on 60 DEG C close to its electric capacity, resistance during described double mode proximity scnsor.Close to distance from 20.0m to 7.0mm time, capacitive proximity sense sensor cannot perception because being limited to electric field line transmission depth, thus resistance-type proximity scnsor perceptual object close in this segment distance; When close to distance at 7.0mm to 2.5mm time, capacitive proximity sense sensor and resistance-type proximity scnsor by collaborative perception object close to process; And in 2.5mm to 0mm, because resistance-type proximity scnsor changes not quite in this segment limit, thus in this segment distance, capacitive proximity sense sensor is close by perceptual object.Close to distance be in 7-2mm, electric capacity, resistance by while perceptual object close to process.Fig. 4 is the change of the temperature aluminium block that remains on 30 DEG C close to its electric capacity, resistance during double mode proximity scnsor of the present invention.When being 10-7mm close to distance, condenser type is still limited to the transmission depth of its electric field line cannot perception, thus resistance-type proximity scnsor perceptual object close in this segment distance; When close to distance in 2-0mm, because resistance-type proximity scnsor changes not quite in this segment limit, thus close by perceptual object of capacitive proximity sense sensor in this segment distance; Close to distance be in 7-2mm, electric capacity, resistance by while perceptual object close to process.So, just define electric capacity and the double mode collaborative perception object of resistance close to process.The double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention carrys out the close of perceptual object by by electric capacity and resistance two kinds of different modes, not only increase the perception range of conventional condenser proximity scnsor, also add the close precision of perception by double mode collaborative perception object proximity.Though Fig. 3 and Fig. 4 is the aluminium block of unit of plastic for 60 DEG C and 30 DEG C, for different temperatures different objects, all sectional, collaborative perception object close.
The double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention selects the AD7147-1 possessing I2C compatible type serial line interface and sheet environment self-calibration function when capacitance signal extracts, up to 16 CDC precision, the AD7147-1 of 13 appearance of a street inputs coordinates four-way single-pole double-throw switch (SPDT) ADG734 can more easily form capacitive array sensor signal acquiring system; Select Easy Drive TM technology when resistance signal extracts, there are 16 road single ended input or 8 road Differential Input, the TLC2495 of 16 analog to digital converters has 27 addresses and one for realizing synchronous global address two-wire system I2C interface.Meanwhile, chip adopts active ac shield technology, the flexible annular conductive electrode 3 of this shielded signal output terminal and capacitive proximity sense sensor and compliant conductive electrode layer 6 is connected, can effectively reduces the noise existed in sensor use procedure.
The double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention by coplanar bipolar electrode capacitor plate and resistance-type lead design in same flexible substrates, occur when solving array structure design lead-in wire loaded down with trivial details, unsightly, the not difficult problem such as easy care.Simultaneously, the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention is arranged in array structure by polyimide flex substrate, and Spliced type array extension interface is reserved around array, be spliced into the sensitivity " skin " of different size and shape by FPC soft arranging wire more neatly, possess the features such as wearable property, extensibility, portability and easy care.
The double mode proximity scnsor preparation of Grazing condition capacitance-resistance for array structure, can be designed to array structure by double mode for capacitance-resistance close to feel sensing unit on polyimide flex matrix.Copy single resistance-type close to feeling unit preparation method gradation global formation afterwards.
As shown in Figure 5, double mode for Grazing condition capacitance-resistance of the present invention proximity scnsor 8 is arranged in array structure (for 8 × 8 tactile sensing arrays).Flexible substrates 5 designs 8 × 8 capacitance-resistance double mode close to feeling sensor array, at all reserved Spliced type array extension socket 10 of the surrounding of flexible substrates 5, single array module flexibly, freely can be spliced into the bionics skin of different area, shape by FPC soft arranging wire.If damaged or malfunction occur a certain piece of artificial skin in actual applications, this block artificial skin can be easy to " take off ", transplant new " skin ".Not only reduce the use cost of artificial skin to a certain extent, turn improve the efficiency of field maintemance.Realize the functions such as wearable, portable, easy care truly.
When double mode for Grazing condition capacitance-resistance of the present invention proximity scnsor 9 is arranged in array structure, its wire laying mode is (double mode close to feeling sensor array for 2 × 2 capacitance-resistance) as shown in Figure 5, the two-plate of compliant conductive bipolar electrode 4 is at flexible substrates 5 (flexible substrates is sandwich construction) the same face and form array array structure, wherein compliant conductive bipolar plates 4 the same side pole plate of going together mutually of array is connected with corresponding row sweep trace, and compliant conductive bipolar electrode 4 opposite side pole plate is connected with respective column sweep trace; Compliant conductive interdigital electrode 2 forms another array array structure, and wherein compliant conductive interdigital electrode 2 same-side electrodes of going together mutually of array is connected with corresponding row sweep trace, and compliant conductive interdigital electrode 2 opposite side electrode is connected with respective column sweep trace.Such as, 2 × 2 capacitance-resistance are double mode to be all connected with capacitance signal the first row sweep trace 11 close to the left pole plate of the compliant conductive bipolar electrode 4 of the first row in feel sensor array, and the right pole plate of compliant conductive bipolar electrode 4 of first row is all connected with capacitance signal first row sweep trace 12; The left electrode of the compliant conductive interdigital electrode 2 of the first row is all connected with resistance signal the first row sweep trace 13, and the right electrode of compliant conductive interdigital electrode 2 of first row is all connected with resistance signal first row sweep trace 14.Capacitance-resistance is double mode, and close to feeling that the horizontal scanning line of sensor array is indicated by the solid line, column scan line is represented by dashed line, respectively at top layer and other layers of flexible substrates 5.The lead-in wire of compliant conductive bipolar electrode 4 pole plate is incorporated into the place layer of respective rank scanning line by similar through hole 15, thus meets Grazing condition capacitance-resistance proximity scnsor lead-in wire all in same flexible substrates 5, enormously simplify arrayed configurations wiring complexity.
Claims (4)
1. the double mode proximity scnsor of Grazing condition capacitance-resistance, is characterized in that:
The double mode proximity scnsor of described Grazing condition capacitance-resistance is arranged at intervals with capacitive proximity sense sensor and resistance-type proximity scnsor in a flexible substrates (5), with described capacitive proximity sense sensor and described resistance-type proximity scnsor segmenting cooperation perceptual object close to information.
2. the double mode proximity scnsor of Grazing condition capacitance-resistance according to claim 1, is characterized in that:
Described capacitive proximity sense sensor is that the upper surface of flexible substrates (5) is provided with compliant conductive bipolar electrode (4), the lower surface in described flexible substrates (5), is positioned at immediately below described compliant conductive bipolar electrode (4) and is provided with for the compliant conductive electrode layer (6) as screen layer;
Described resistance-type proximity scnsor is upper surface in flexible substrates (5), is arranged at intervals with compliant conductive interdigital electrode (2) with described compliant conductive bipolar electrode (4), is coated with responsive to temperature film (1) at described compliant conductive interdigital electrode (2) upper surface;
Be peripherally installed with flexible annular conductive electrode (3) described compliant conductive bipolar electrode (4), described flexible annular conductive electrode (3) is for shielding the impact of described compliant conductive interdigital electrode (2) on described compliant conductive bipolar electrode (4).
3. Grazing condition capacitance-resistance formula proximity scnsor according to claim 2, is characterized in that: described responsive to temperature film (1) take graphene nanometer sheet as material.
4. Grazing condition capacitance-resistance formula according to claim 1 and 2 is close to feeling sense sensor, it is characterized in that: described flexible substrates (5) take polyimide as material.
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| CN111458753A (en) * | 2020-04-07 | 2020-07-28 | 安徽大学 | Full-flexible coplanar spiral electrode proximity sensor and preparation method thereof |
| CN111906778A (en) * | 2020-06-24 | 2020-11-10 | 深圳市越疆科技有限公司 | Robot safety control method and device based on multiple perceptions |
| CN111982364A (en) * | 2020-08-25 | 2020-11-24 | 河南科技大学 | Wearable shoulder and back pressure flexible measuring device |
| CN114674466A (en) * | 2022-03-23 | 2022-06-28 | 中山大学 | Capacitance-piezoresistive dual-mode stress sensor of flexible conductive micron column and preparation method |
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| CN104764481B (en) | 2017-01-25 |
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