TWM522414U - High-precision force-touch sensor with multilayered electrodes - Google Patents

High-precision force-touch sensor with multilayered electrodes Download PDF

Info

Publication number
TWM522414U
TWM522414U TW105202072U TW105202072U TWM522414U TW M522414 U TWM522414 U TW M522414U TW 105202072 U TW105202072 U TW 105202072U TW 105202072 U TW105202072 U TW 105202072U TW M522414 U TWM522414 U TW M522414U
Authority
TW
Taiwan
Prior art keywords
touch
sensing
electrode
layer
pressure
Prior art date
Application number
TW105202072U
Other languages
Chinese (zh)
Inventor
李祥宇
金上
林丙村
Original Assignee
速博思股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 速博思股份有限公司 filed Critical 速博思股份有限公司
Priority to TW105202072U priority Critical patent/TWM522414U/en
Publication of TWM522414U publication Critical patent/TWM522414U/en

Links

Description

具多層電極結構之高精確度觸壓感應裝置High-accuracy touch sensing device with multi-layer electrode structure

本創作係有關於一種感應裝置,特別是一種具多層電極結構之高精確度觸壓感應裝置。The present invention relates to an inductive device, and more particularly to a high-accuracy touch-sensing device having a multi-layer electrode structure.

輕薄短小的行動裝置帶動觸控顯示面板的潮流,且由於觸控的人機界面技術成熟與使用者對3D觸控的操作需求不斷提昇,壓力觸控的技術也隨之推陳出新。同時,機器人的廣汎應用於工業乃至逐漸深入辦公室、醫院與家庭,致人工觸覺裝置需求迅速成長。習知之觸覺控制應用如壓力觸控顯示面板將複數個微機電之壓力感測器置於顯示面板之邊緣或角落,藉以感測面板表面之觸碰壓力;或將複數個微機電之壓力感測器置於機器人之彷真皮膚內側以實現觸碰及壓力之偵測,不僅感測器成本高昂且配線之裝設與貼合不易。此外也有使用導電橡膠、導電海棉或含碳纖維之人造皮膚藉由量測其電流變化反推其阻抗變化與壓力值者,既耗電且精準度不高。並且前述都無法作物件近接之探測,故壓力觸控及人工觸覺裝置仍有改善之空間。The thin and short mobile device drives the trend of the touch display panel, and the demand for the human touch interface technology and the user's demand for the operation of the 3D touch are constantly increasing, and the pressure touch technology is also updated. At the same time, robots are widely used in industry and even in offices, hospitals and homes, and the demand for artificial haptic devices is growing rapidly. Conventional haptic control applications such as a pressure touch display panel place a plurality of MEMS pressure sensors on the edge or corner of the display panel to sense the touch pressure of the panel surface; or to sense a plurality of MEMS pressure sensors The device is placed inside the simulated skin of the robot to realize the detection of touch and pressure, which is not only costly but also difficult to install and fit the wiring. In addition, there are also artificial skins using conductive rubber, conductive sponge or carbon fiber to reverse the impedance change and pressure value by measuring the current change, which consumes electricity and has low precision. And the above is not able to detect the proximity of crop parts, so there is still room for improvement in pressure touch and artificial haptic devices.

為改善上述習知技術之缺點,本創作之目的在於提供一種具多層電極結構之高精確度觸壓感應裝置,以提高壓力觸控之精確度。In order to improve the shortcomings of the above-mentioned prior art, the aim of the present invention is to provide a high-accuracy touch-sensing device with a multi-layer electrode structure to improve the accuracy of pressure touch.

為達成本創作之上述目的,本創作之一種具多層電極結構之高精確度觸壓感應裝置,其包含:一上基板,該上基板包含一第一表面與相對於該第一表面的一第二表面;一第一電極層,該第一電極層係設置於該上基板之其中一個表面,該第一電極層包含複數個第一感應電極;一第二電極層,該第二電極層係相對於該第一電極層設置,且相較於該第一電極層更遠離該上基板,其包含複數個第二感應電極,該些第二感應電極係與該些第一感應電極呈一對一對應並與對應之第一感應電極兩兩電氣相連接形成複數個觸控感應電極;複數條觸控電極走線,每一條觸控電極走線係與一個觸控感應電極對應並電氣連接並與其它觸控感應電極呈電氣絕緣;一彈性介電材料層,該彈性介電材料層係設置於該第二電極層背對該上基板之一側,且該彈性介電材料層遇壓力時體積壓縮變形,並於除去壓力時回復原有的體積與形狀;及一第三電極層,該第三電極層係設置於該彈性介電材料層背對該上基板之一側,其包含至少一個壓力感應電極。In order to achieve the above object of the present invention, a high-accuracy touch sensing device having a multi-layer electrode structure comprises: an upper substrate, the upper substrate comprising a first surface and a first surface opposite to the first surface a second electrode layer, the first electrode layer is disposed on one surface of the upper substrate, the first electrode layer includes a plurality of first sensing electrodes, and a second electrode layer, the second electrode layer Provided with respect to the first electrode layer, and further away from the upper substrate than the first electrode layer, comprising a plurality of second sensing electrodes, and the second sensing electrodes are paired with the first sensing electrodes Correspondingly connected to the corresponding first sensing electrodes to form a plurality of touch sensing electrodes; a plurality of touch electrode traces, each touch electrode trace corresponding to a touch sensing electrode and electrically connected Electrically insulated from the other touch sensing electrodes; a layer of elastic dielectric material disposed on the side of the second electrode layer facing away from the upper substrate, and the layer of the elastic dielectric material is under pressure Compressing deformation and returning to the original volume and shape when the pressure is removed; and a third electrode layer disposed on the side of the elastic dielectric material facing away from the upper substrate, which comprises at least A pressure sensing electrode.

有關本創作的詳細說明及技術內容,請參閱以下的詳細說明和附圖說明如下,而附圖與詳細說明僅作為說明之用,並非用於限制本創作。The detailed description and technical contents of the present invention are described in the following detailed description and the accompanying drawings.

請參考圖1A,為依據本創作一實施例之具多層電極結構之高精確度觸壓感應裝置10之示意圖。該多層電極結構之高精確度觸壓感應裝置10(以下簡稱觸壓感應裝置10)包含一由上而下(以使用者手指或觸控筆接觸為上方作為參考方向)之上基板100、一第一電極層110、一第二電極層120、一絕緣層130、一彈性介電材料層200、第三電極層300,再者,此觸壓感應裝置10尚且包含複數條觸控電極走線150,係設置在上基板100及彈性介電材料層200之間。其中該上基板100具有一第一表面100a及一相對於該第一表面的第二表面100b,該第一電極層110係設置於該上基板100之其中一個表面(例如此實例所示之第二表面100b),且該第一電極層110包含複數之第一感應電極112,例如如圖1A所示之該些第一感應電極E11~E19,但是須知此圖所示僅為一側視圖,因此該些第一感應電極之數量及分布方式不限於此。該第二電極層120係設置於該第一電極層110背對該上基板100之一側,亦即相較於第一電極層110設置且更遠離上基板100。該第二電極層120包含複數第二感應電極122,該些第二感應電極122係與該些第一感應電極112呈一對一對應並與該對應之第一感應電極112兩兩電氣相連接,以形成複數個觸控感應電極160;該第一電極層110及該第二電極層120係將該絕緣層130夾置其間,換句話說,即該些第二感應電極122係透過絕緣層130中的層間連接電極(如圖所示V1~V9)連接到對應之第一感應電極112。Please refer to FIG. 1A , which is a schematic diagram of a high-accuracy touch sensing device 10 having a multi-layer electrode structure according to an embodiment of the present invention. The high-accuracy touch-sensing device 10 (hereinafter referred to as the touch-sensing device 10) of the multi-layer electrode structure comprises a substrate 100, a top-down substrate (with a user's finger or a stylus contact as a reference direction). a first electrode layer 110, a second electrode layer 120, an insulating layer 130, an elastic dielectric material layer 200, and a third electrode layer 300. Further, the touch sensing device 10 further includes a plurality of touch electrode traces. 150 is disposed between the upper substrate 100 and the layer of elastic dielectric material 200. The upper substrate 100 has a first surface 100a and a second surface 100b opposite to the first surface. The first electrode layer 110 is disposed on one surface of the upper substrate 100 (for example, the first example shown in this example) The second surface 100b), and the first electrode layer 110 includes a plurality of first sensing electrodes 112, such as the first sensing electrodes E11~E19 as shown in FIG. 1A, but it should be understood that the figure is only a side view. Therefore, the number and distribution of the first sensing electrodes are not limited thereto. The second electrode layer 120 is disposed on one side of the first electrode layer 110 opposite to the upper substrate 100 , that is, disposed opposite to the first electrode layer 110 and further away from the upper substrate 100 . The second electrode layer 120 includes a plurality of second sensing electrodes 122. The second sensing electrodes 122 are in one-to-one correspondence with the first sensing electrodes 112 and are electrically connected to the corresponding first sensing electrodes 112. a plurality of touch sensing electrodes 160 are formed. The first electrode layer 110 and the second electrode layer 120 are sandwiched between the insulating layers 130. In other words, the second sensing electrodes 122 are transparent to the insulating layer. The interlayer connection electrodes 130 (V1 to V9 as shown) are connected to the corresponding first sensing electrodes 112.

該些觸控電極走線150(如圖所示W1~W9)係與一個觸控感應電極160對應並電氣連接且與其它觸控感應電極呈電氣絕緣。在本實施例中,該些觸控電極走線150係與第一感應電極112共平面設置且在投影上(由觸壓感應裝置10上方觀之)被該些第二感應電極所遮罩。所以在此觸壓感應裝置10做壓力感測時,第一感應電極112可以有效遮蔽來自手指的電荷干擾,使壓力感測更為精確。該彈性介電材料層200遇壓力時體積壓縮變形,並於除去壓力時回復原有的體積與形狀。該第三電極層300係設置於該彈性介電材料層200背對該上基板100之一側,其包含至少一個壓力感應電極170(例如圖1A所示之第三電極層300包含兩個壓力感應電極170),且在下述各實施例中,雖然為了簡化圖面說明而並未繪出第三電極層300之詳細構造,但該第三電極層300皆包含至少一個壓力感應電極170;此外,該觸壓感應裝置10更包含一電容偵測電路50,此電容偵測電路50包含一電容激勵驅動電路52及一電容讀取電路54。The touch electrode traces 150 (W1 to W9 as shown) are corresponding to and electrically connected to one touch sensing electrode 160 and electrically insulated from other touch sensing electrodes. In this embodiment, the touch electrode traces 150 are coplanar with the first sensing electrodes 112 and are covered by the second sensing electrodes on the projection (viewed by the top of the touch sensing device 10). Therefore, when the touch sensing device 10 performs pressure sensing, the first sensing electrode 112 can effectively shield the charge interference from the finger, so that the pressure sensing is more accurate. The layer of elastic dielectric material 200 is compressively deformed in volume upon pressure and returns to its original volume and shape upon removal of pressure. The third electrode layer 300 is disposed on one side of the elastic dielectric material layer 200 facing away from the upper substrate 100, and includes at least one pressure sensing electrode 170 (for example, the third electrode layer 300 shown in FIG. 1A includes two pressures Inductive electrode 170), and in the following embodiments, although the detailed configuration of the third electrode layer 300 is not depicted for simplicity of illustration, the third electrode layer 300 includes at least one pressure sensing electrode 170; The touch sensing device 10 further includes a capacitance detecting circuit 50. The capacitance detecting circuit 50 includes a capacitive excitation driving circuit 52 and a capacitance reading circuit 54.

復參見圖1A,為說明本創作之具多層電極結構之高精確度觸壓感應裝置10用於觸覺感測之操作狀況。此電容激勵驅動電路52包含一訊號源520及一驅動器522,並依序或隨機將一觸控電容感應激勵訊號(stimulus signal)VT施加於選定之一觸控感應電極160(例如該第一感應電極E14與該第二感應電極E24)。此外電容激勵驅動電路52將此觸控電容感應激勵訊號VT送至一同相放大器56,該同相放大器56之增益值較佳為一,以產生與觸控電容感應激勵訊號VT同相位之輔助訊號(auxiliary signal)VT1,此輔助訊號VT1施加於相對的至少一個壓力感應電極170。由於在相對的至少一個壓力感應電極170施加與觸控電容感應激勵訊號VT同相位之訊號,等效上即可在對應選定該觸控感應電極160(E14,E24)與相對的至少一個壓力感應電極170之間產生沒有電壓差或是幾乎沒有電壓差的狀態,亦即不會有電容產生或是僅有微量電容產生(不至於影響觸控感測結果之微量電容),即可避免在偵測對應選定該觸控感應電極160之觸控操作時,因為彈性介電材料層200受壓翹曲而產生電容的干擾,同時亦阻絕了經由壓力感應電極170與接地點間電容並聯效應引發之干擾。Referring to FIG. 1A, a high-accuracy touch sensing device 10 having a multi-layer electrode structure of the present invention is used for the operational state of tactile sensing. The capacitive excitation driving circuit 52 includes a signal source 520 and a driver 522, and sequentially or randomly applies a touch capacitive sensing signal VT to the selected one of the touch sensing electrodes 160 (eg, the first sensing) Electrode E14 and the second sensing electrode E24). In addition, the capacitive excitation driving circuit 52 sends the touch capacitive induction excitation signal VT to a non-inverting amplifier 56. The gain value of the non-inverting amplifier 56 is preferably one to generate an auxiliary signal in phase with the touch capacitive sensing excitation signal VT ( The auxiliary signal VT1 is applied to the opposite at least one pressure sensing electrode 170. Since the signal of the same phase as the touch capacitive sensing excitation signal VT is applied to the opposite at least one pressure sensing electrode 170, the touch sensing electrode 160 (E14, E24) and the corresponding at least one pressure sensing can be equivalently selected. There is no voltage difference or almost no voltage difference between the electrodes 170, that is, no capacitance is generated or only a small amount of capacitance is generated (the micro capacitance that does not affect the touch sensing result) can be avoided. When the touch operation of the touch sensing electrode 160 is selected, the capacitive interference occurs due to the warpage of the elastic dielectric material layer 200, and the parallel connection between the pressure sensing electrode 170 and the grounding point is also prevented. interference.

同理,該輔助訊號(auxiliary signal)VT1亦可同時施加於該選定觸控感應電極160(E14,E24)周遭之觸控感應電極160,以消除該選定觸控感應電極與其周遭的觸控感應電極之間的雜散電容效應,並對該選定觸控感應電極上方的電力線產生聚集與頂高的效果,增強其近接感測之靈敏度。Similarly, the auxiliary signal VT1 can also be applied to the touch sensing electrodes 160 around the selected touch sensing electrodes 160 (E14, E24) to eliminate the selected touch sensing electrodes and their surrounding touch sensing. The stray capacitance effect between the electrodes and the effect of gathering and topping the power lines above the selected touch sensing electrodes enhances the sensitivity of the proximity sensing.

再者,於本創作中,觸覺感測(tactile sensing)包含使用者手指實際接觸上基板100之觸控感測(touch sensing)及使用者手指接近上基板100之近接感測(proximity sensing)。由於使用者手指實際接觸觸壓感應裝置10或是接近觸壓感應裝置10之時,都會影響觸壓感應裝置10內部第一感應電極相關的電容值,因此藉由感測電容值,都可以偵測是否有手指接觸或是近接。於下面說明書中,即以觸覺感測含括觸控感測及近接感測兩種操作。Moreover, in the present creation, tactile sensing includes touch sensing of the user's finger actually contacting the upper substrate 100 and proximity sensing of the user's finger approaching the upper substrate 100. When the user's finger actually touches the touch sensing device 10 or approaches the touch sensing device 10, the capacitance value associated with the first sensing electrode inside the touch sensing device 10 is affected, so by sensing the capacitance value, it is possible to detect Test for finger contact or proximity. In the following description, the touch sensing includes two operations of touch sensing and proximity sensing.

藉由圖1A所示之具多層電極結構之高精確度觸壓感應裝置10,可利用輔助訊號VT1減少或是完全消除彈性介電材料層200翹曲或是變形的影響。在電容偵測電路50之電容激勵驅動電路52將觸控電容感應激勵訊號VT施加於選定該觸控感應電極160後,電容偵測電路50之電容讀取電路54可在檢測點P讀取觸覺感應訊號Vc1,即可精確地判斷觸控位置。The high-accuracy touch sensing device 10 having a multi-layer electrode structure as shown in FIG. 1A can utilize the auxiliary signal VT1 to reduce or completely eliminate the effects of warpage or deformation of the elastic dielectric material layer 200. After the capacitive excitation driving circuit 52 of the capacitance detecting circuit 50 applies the touch capacitive sensing signal VT to the selected touch sensing electrode 160, the capacitance reading circuit 54 of the capacitance detecting circuit 50 can read the touch at the detecting point P. The sensing signal Vc1 can accurately determine the touch position.

請參考圖1B,為說明依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之示意圖,該具多層電極結構之高精確度觸壓感應裝置10(以下簡稱觸壓感應裝置10)用於觸覺感測之操作狀況之示意圖。圖1B所示實施例與圖1A所示者大致相同,此實施例中該電容激勵驅動電路52將送該訊號源520直接送至同相放大器56(不經過驅動器522),該同相放大器56之增益值較佳為一,以產生與觸控電容感應激勵訊號VT同相位之輔助訊號(auxiliary signal)VT1。由於在此實例中檢測點P與輔助訊號VT1分離,因此檢測結果不會受到輔助訊號VT1之影響。同樣地,可利用輔助訊號VT1減少或是完全消除介電材料層200翹曲或是變形的影響。在電容偵測電路50之電容激勵驅動電路52將觸控電容感應激勵訊號VT施加於選定該觸控感應電極160(E14,E24)後,電容偵測電路50之電容讀取電路54可在檢測點P讀取觸覺感應訊號Vc1,即可精確地判斷觸控位置。Please refer to FIG. 1B , which is a schematic diagram of a high-accuracy touch-sensing device 10 having a multi-layer electrode structure according to another embodiment of the present invention. The sensing device 10) is a schematic diagram of the operating conditions for tactile sensing. The embodiment shown in FIG. 1B is substantially the same as that shown in FIG. 1A. In this embodiment, the capacitive excitation driving circuit 52 sends the signal source 520 directly to the non-inverting amplifier 56 (without the driver 522), and the gain of the non-inverting amplifier 56. The value is preferably one to generate an auxiliary signal VT1 that is in phase with the touch capacitive induction excitation signal VT. Since the detection point P is separated from the auxiliary signal VT1 in this example, the detection result is not affected by the auxiliary signal VT1. Similarly, the auxiliary signal VT1 can be utilized to reduce or completely eliminate the effects of warpage or deformation of the dielectric material layer 200. After the capacitive excitation driving circuit 52 of the capacitance detecting circuit 50 applies the touch capacitive sensing signal VT to the selected touch sensing electrode 160 (E14, E24), the capacitance reading circuit 54 of the capacitance detecting circuit 50 can detect Point P reads the tactile sensing signal Vc1 to accurately determine the touch position.

請參考圖2A,為說明依據本創作之另一實施例之具多層電極結構之高精確度觸壓感應裝置10之示意圖,該具多層電極結構之高精確度觸壓感應裝置10用於壓力感測之操作狀況時,此電容激勵驅動電路52係將壓力電容感應激勵訊號Vp施加到第三電極層300之該壓力感應電極170,又將與壓力電容感應激勵訊號Vp同相之遮蔽訊號Vp1施加到非選定的觸控感應電極160(亦即非為選定第一感應電極E14之至少部份第一感應電極及相對應之第二感應電極E24之至少部份第二感應電極),以遮蔽來自手指操作之電容變化,提高壓力感測精確度。再者,係將一具有預定位準之對應激勵訊號Vcount施加到選定觸控感應電極160(E14,E24),以增強相對之壓力感應電極170的壓力感測靈敏度。電容偵測電路50之電容讀取電路54可在檢測點P讀取來自壓力感應電極170之壓力感應訊號Vc2,即可精確地判斷是否有按壓動作與壓力之大小。Please refer to FIG. 2A, which is a schematic diagram of a high-accuracy touch-sensing device 10 having a multi-layer electrode structure for a sense of pressure according to another embodiment of the present invention. When the operating condition is measured, the capacitive excitation driving circuit 52 applies the pressure-capacitance sensing excitation signal Vp to the pressure sensing electrode 170 of the third electrode layer 300, and applies the masking signal Vp1 in phase with the pressure-capacitance sensing excitation signal Vp. The non-selected touch sensing electrode 160 (ie, at least a portion of the first sensing electrode of the selected first sensing electrode E14 and at least a portion of the second sensing electrode of the corresponding second sensing electrode E24) is shielded from the finger The capacitance change of the operation improves the pressure sensing accuracy. Furthermore, a corresponding excitation signal Vcount having a predetermined level is applied to the selected touch sensing electrodes 160 (E14, E24) to enhance the pressure sensing sensitivity of the pressure sensing electrode 170. The capacitance reading circuit 54 of the capacitance detecting circuit 50 can read the pressure sensing signal Vc2 from the pressure sensing electrode 170 at the detecting point P, so as to accurately determine whether there is a pressing action and a pressure.

請參考圖2B,為說明依據本創作之另一實施例之具多層電極結構之高精確度觸壓感應裝置10之示意圖,且該具多層電極結構之高精確度觸壓感應裝置10係用於壓力感測之操作狀況。該具多層電極結構之高精確度觸壓感應裝置10類似圖2A所示之實施例,然而電容偵測電路50係具有一反相放大器59以取代直流參考訊號源53,換言之,此實施例之整合觸控與壓力感測之裝置10係由反相放大器59產生與壓力電容感應激勵訊號Vp反相之交變訊號,以作為對應激勵訊號Vconut;同樣地,也可增強相對之第二感應電極的壓力感測靈敏度。此外,此實施例之電容偵測電路50中用於產生遮蔽訊號Vp1之同相放大器56輸入係不連接到電容讀取電路54之輸入點,例如可直接連接到訊號源520,以避免來自電容讀取電路54輸入點之壓力感應訊號Vc2之影響。Please refer to FIG. 2B, which is a schematic diagram illustrating a high-accuracy touch sensing device 10 having a multi-layer electrode structure according to another embodiment of the present invention, and the high-accuracy touch sensing device 10 having a multi-layer electrode structure is used for The operating condition of pressure sensing. The high-accuracy touch-sensing device 10 having a multi-layer electrode structure is similar to the embodiment shown in FIG. 2A. However, the capacitance detecting circuit 50 has an inverting amplifier 59 instead of the DC reference signal source 53. In other words, this embodiment The device 10 for integrating touch and pressure sensing generates an alternating signal inverted by the inductive excitation signal Vp from the inverting amplifier 59 as a corresponding excitation signal Vconut; similarly, the second sensing electrode is also enhanced Pressure sensing sensitivity. In addition, the input of the non-inverting amplifier 56 for generating the masking signal Vp1 in the capacitance detecting circuit 50 of this embodiment is not connected to the input point of the capacitor reading circuit 54, for example, can be directly connected to the signal source 520 to avoid reading from the capacitor. Take the influence of the voltage sensing signal Vc2 at the input point of the circuit 54.

請參考圖3A,為依據本創作一實施例之具多層電極結構之高精確度觸壓感應裝置10之側視圖。此實施例大致與圖1A所示者類似,然在此實施例中,該些觸控電極走線150係與該些第二感應電極122共平面且呈一對一對應且電連接,並在投影上分別被該些第一感應電極112所遮罩。該些第二感應電極122係透過絕緣層130中的層間連接電極(如圖所示V1~V9)連接到對應之第一感應電極112,而個別電連接到對應之第一感應電極112,藉此也可以使每一觸控電極走線150電連接到對應之第一感應電極112。同樣地,由於觸控電極走線150在投影上被第一感應電極112所遮罩,所以在此觸壓感應裝置10做壓力感測時,第一感應電極112可以有效遮蔽來自手指的電荷干擾,使壓力感測更為精確。請參考圖3B,為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之側視圖,該具多層電極結構之高精確度觸壓感應裝置10與圖3A所示者類似,該具多層電極結構之高精確度觸壓感應裝置10更包含一第二基板400,該第二基板400係設置於該第三電極層300背對該介電材料層200之一側。請參考圖3C,為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之側視圖,該具多層電極結構之高精確度觸壓感應裝置10與圖3B所示者類似,其中該具多層電極結構之高精確度觸壓感應裝置10更包含一膠合層500,膠合層500係設置於該第三電極層300背對該該上基板100之一側。Please refer to FIG. 3A, which is a side view of a high-accuracy touch sensing device 10 having a multi-layer electrode structure according to an embodiment of the present invention. This embodiment is substantially similar to the one shown in FIG. 1A. However, in this embodiment, the touch electrode traces 150 are coplanar and one-to-one corresponding to the second sensing electrodes 122 and are electrically connected. The projections are respectively covered by the first sensing electrodes 112. The second sensing electrodes 122 are connected to the corresponding first sensing electrodes 112 through the interlayer connection electrodes (V1 to V9 in the figure) in the insulating layer 130, and are electrically connected to the corresponding first sensing electrodes 112, respectively. This can also electrically connect each touch electrode trace 150 to the corresponding first sensing electrode 112. Similarly, since the touch electrode trace 150 is covered by the first sensing electrode 112 on the projection, the first sensing electrode 112 can effectively shield the charge interference from the finger when the touch sensing device 10 performs pressure sensing. To make pressure sensing more accurate. Please refer to FIG. 3B, which is a side view of a high-accuracy touch-sensing device 10 having a multi-layer electrode structure according to another embodiment of the present invention. The high-accuracy touch-sensing device 10 having a multi-layer electrode structure is shown in FIG. 3A. Similarly, the high-accuracy touch-sensing device 10 having a multi-layer electrode structure further includes a second substrate 400 disposed on a side of the third electrode layer 300 facing away from the dielectric material layer 200. . Referring to FIG. 3C, a side view of a high-accuracy touch sensing device 10 having a multilayer electrode structure according to another embodiment of the present invention, the high-accuracy touch sensing device 10 having a multilayer electrode structure is shown in FIG. 3B. Similarly, the high-accuracy touch-sensing device 10 having a multi-layer electrode structure further includes a glue layer 500 disposed on a side of the third electrode layer 300 facing away from the upper substrate 100.

請參考圖4A,為依據本創作一實施例之具多層電極結構之高精確度觸壓感應裝置10之側視圖。此實施例大致與圖3A所示者類似,然在此實施例中,該觸控電極走線150係設置於該第一感應電極112與該第二感應電極122之間;且在絕緣層130之中,每一觸控電極走線150經由上方之第一層間連接電極132(如圖所示V11~V19)與一相對應之第一感應電極112電連接,且經由下方之第二層間連接電極134(如圖所示V21~V29)與一相對應之第二感應電極122電連接。該些觸控電極走線150係在投影上分別被對應之第一感應電極112及第二感應電極122所遮罩。所以在此觸壓感應裝置10做壓力感測時,第一感應電極112及第二感應電極122可以有效遮蔽來自手指的電荷干擾,使壓力感測更為精確。請參考圖4B,為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之側視圖,該具多層電極結構之高精確度觸壓感應裝置10與圖4A所示者類似,該具多層電極結構之高精確度觸壓感應裝置10更包含一第二基板400,該第二基板400係設置於該第三電極層300背對該介電材料層200之一側。請參考圖4C,為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之側視圖,該具多層電極結構之高精確度觸壓感應裝置10與圖4B所示者類似,其中該具多層電極結構之高精確度觸壓感應裝置10更包含一膠合層500,膠合層500係設置於該第三電極層300背對該上基板100之一側。Please refer to FIG. 4A, which is a side view of a high-accuracy touch sensing device 10 having a multilayer electrode structure in accordance with an embodiment of the present invention. This embodiment is substantially similar to that shown in FIG. 3A. However, in this embodiment, the touch electrode trace 150 is disposed between the first sensing electrode 112 and the second sensing electrode 122; and in the insulating layer 130. Each of the touch electrode traces 150 is electrically connected to a corresponding first sensing electrode 112 via the upper first interlayer connection electrode 132 (V11 to V19 as shown), and passes through the second interlayer below. The connection electrode 134 (V21 to V29 as shown) is electrically connected to a corresponding second sensing electrode 122. The touch electrode traces 150 are respectively covered by the corresponding first sensing electrodes 112 and second sensing electrodes 122 on the projection. Therefore, when the touch sensing device 10 performs pressure sensing, the first sensing electrode 112 and the second sensing electrode 122 can effectively shield the charge interference from the finger, so that the pressure sensing is more accurate. Please refer to FIG. 4B, which is a side view of a high-accuracy touch-sensing device 10 having a multi-layer electrode structure according to another embodiment of the present invention. The high-accuracy touch sensing device 10 having a multi-layer electrode structure is shown in FIG. 4A. Similarly, the high-accuracy touch-sensing device 10 having a multi-layer electrode structure further includes a second substrate 400 disposed on a side of the third electrode layer 300 facing away from the dielectric material layer 200. . Referring to FIG. 4C, a side view of a high-accuracy touch sensing device 10 having a multilayer electrode structure according to another embodiment of the present invention, the high-accuracy touch sensing device 10 having a multilayer electrode structure is shown in FIG. 4B. Similarly, the high-accuracy touch-sensing device 10 having a multi-layer electrode structure further includes a glue layer 500 disposed on a side of the third electrode layer 300 facing away from the upper substrate 100.

請參考圖5A,為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之側視圖,主要繪示該第一感應電極112、該第二感應電極122、該絕緣層130及該觸控電極走線150之疊合側視圖。參見圖5B,為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之俯視圖,主要繪示該第一電極層110之該些第一感應電極及該第二電極層120之第二感應電極呈一對一對應並電氣相連接,以形成複數個觸控感應電極(如本圖所示TE01~08、TE11~18、TE21~28、TE31~38),該些觸控電極走線150係電性連接至該電容偵測電路50及該些觸控感應電極。該具多層電極結構之高精確度觸壓感應裝置10更包含一走線遮蔽電極90,該走線遮蔽電極90係用於遮蔽該些觸控電極走線150,以防止該些觸控電極走線150受干擾而影響觸控靈敏度。5A is a side view of a high-accuracy touch-sensing device 10 having a multi-layer electrode structure according to another embodiment of the present invention, mainly showing the first sensing electrode 112, the second sensing electrode 122, and the insulating layer. A stacked side view of the layer 130 and the touch electrode trace 150. 5B is a top view of a high-accuracy touch-sensing device 10 having a multi-layer electrode structure according to another embodiment of the present invention, mainly showing the first sensing electrodes and the second electrodes of the first electrode layer 110. The second sensing electrodes of the layer 120 are in a one-to-one correspondence and are electrically connected to form a plurality of touch sensing electrodes (such as TE01~08, TE11~18, TE21~28, TE31~38 shown in the figure). The touch electrode traces 150 are electrically connected to the capacitance detecting circuit 50 and the touch sensing electrodes. The high-accuracy touch-sensing device 10 having a multi-layered electrode structure further includes a trace shielding electrode 90 for shielding the touch electrode traces 150 to prevent the touch electrodes from walking. Line 150 is disturbed and affects touch sensitivity.

圖6為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之觸覺操作訊號分布圖。主要繪示該具多層電極結構之高精確度觸壓感應裝置10於觸覺之操作時,觸控電容感應激勵訊號VT及輔助訊號VT1分布圖。其中該第一電極層110之該些第一感應電極及該第二電極層120之第二感應電極呈一對一對應並電氣相連接,以形成複數個觸控感應電極(如本圖所示之TE01~08、TE11~18、TE21~28、TE31~38)。FIG. 6 is a haptic operation signal distribution diagram of the high-accuracy touch sensing device 10 having a multilayer electrode structure according to another embodiment of the present invention. The high-accuracy touch-sensing device 10 with a multi-layer electrode structure is mainly used to sense the excitation signal VT and the auxiliary signal VT1 in the touch operation. The first sensing electrodes of the first electrode layer 110 and the second sensing electrodes of the second electrode layer 120 are in a one-to-one correspondence and electrically connected to form a plurality of touch sensing electrodes (as shown in the figure). TE01~08, TE11~18, TE21~28, TE31~38).

當該具多層電極結構之高精確度觸壓感應裝置10依序或隨機將一觸控電容感應激勵訊號VT施加於選定之一觸控感應電極TE14時;此時該電容偵測電路50亦將該觸控電容感應激勵訊號VT處理以產生與觸控電容感應激勵訊號VT同相位之輔助訊號VT1,此輔助訊號VT1施加於相對的至少一個壓力感應電極 (位在第三電極層300上)。由於在相對的至少一個壓力感應電極施加與觸控電容感應激勵訊號VT同相位之訊號,等效上即可在對應選定該觸控感應電極TE14與相對的至少一個壓力感應電極之間產生沒有電壓差或是幾乎沒有電壓差的狀態,亦即不會有電容產生或是僅有微量電容產生(不至於影響觸控感測結果之微量電容),即可避免在偵測對應選定該觸控感應電極TE14之觸控操作時,因為彈性介電材料層200受壓翹曲而產生電容的干擾,同時亦阻絕了經由壓力感應電極與接地點間電容並聯效應引發之干擾。同理,該輔助訊號VT1亦可同時施加於該選定觸控感應電極TE14周遭之觸控感應電極,以消除該選定觸控感應電極TE14與其周遭觸控感應電極之間的雜散電容效應,並對該選定觸控感應電極上方的電力線產生聚集與頂高的效果,增強其近接感測之靈敏度。When the high-accuracy touch sensing device 10 having the multi-layer electrode structure sequentially or randomly applies a touch capacitive sensing excitation signal VT to the selected one of the touch sensing electrodes TE14; the capacitance detecting circuit 50 will also The touch capacitor senses the excitation signal VT to generate an auxiliary signal VT1 that is in phase with the touch capacitive induction excitation signal VT. The auxiliary signal VT1 is applied to the opposite at least one pressure sensing electrode (located on the third electrode layer 300). Since the signal of the same phase as the touch capacitive sensing excitation signal VT is applied to the opposite at least one pressure sensing electrode, no voltage can be generated between the corresponding touch sensing electrode TE14 and the opposite at least one pressure sensing electrode. Poor or almost no voltage difference state, that is, no capacitance is generated or only a small amount of capacitance is generated (does not affect the touch capacitance of the touch sensing result), so as to avoid the corresponding touch sensing selected in the detection. During the touch operation of the electrode TE14, the capacitance of the elastic dielectric material layer 200 is caused by the pressure warpage, and the interference caused by the parallel connection effect between the pressure sensing electrode and the grounding point is also blocked. Similarly, the auxiliary signal VT1 can be simultaneously applied to the touch sensing electrodes around the selected touch sensing electrode TE14 to eliminate the stray capacitance effect between the selected touch sensing electrode TE14 and its surrounding touch sensing electrodes. The power line above the selected touch sensing electrode is concentrated and topped to enhance the sensitivity of the proximity sensing.

圖7為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置10之壓力偵測操作訊號分布圖。主要繪示該具多層電極結構之高精確度觸壓感應裝置10於壓力偵測之操作時,壓力電容感應激勵訊號Vp及遮蔽訊號Vp1分布圖。其中該第一電極層110之該些第一感應電極及該第二電極層120之第二感應電極呈一對一對應並電氣相連接,以形成複數個觸控感應電極(如本圖所示之TE01~08、TE11~18、TE21~28、TE31~38)。FIG. 7 is a diagram showing a pressure detecting operation signal distribution diagram of a high-accuracy touch sensing device 10 having a multilayer electrode structure according to another embodiment of the present invention. The high-precision touch-sensing device 10 having the multi-layer electrode structure mainly displays the pressure-capacitance sensing excitation signal Vp and the masking signal Vp1 during the pressure detecting operation. The first sensing electrodes of the first electrode layer 110 and the second sensing electrodes of the second electrode layer 120 are in a one-to-one correspondence and electrically connected to form a plurality of touch sensing electrodes (as shown in the figure). TE01~08, TE11~18, TE21~28, TE31~38).

當該電容感應電路50施加一用於壓力感測之壓力電容感應激勵訊號Vp於一對應選定的壓力感應電極(位在第三電極層300上)時,該電容偵測電路50處理該壓力電容感應激勵訊號Vp以產生同相放大之遮蔽訊號Vp1,將該遮蔽訊號Vp1施加到非選定之壓力感應電極,以遮蔽來自手指操作之電容變化,提高壓力感測精確度。再者,係將一具有預定位準之對應激勵訊號Vcount施加到選定觸控感應電極TE14,以增強相對之壓力感應電極的壓力感測靈敏度與施壓點的分辨精確度。When the capacitance sensing circuit 50 applies a pressure-capacitance induction excitation signal Vp for pressure sensing to a corresponding selected pressure sensing electrode (located on the third electrode layer 300), the capacitance detecting circuit 50 processes the pressure capacitor. The excitation signal Vp is induced to generate the in-phase amplified masking signal Vp1, and the masking signal Vp1 is applied to the unselected pressure sensing electrode to shield the capacitance change from the finger operation, thereby improving the pressure sensing accuracy. Furthermore, a corresponding excitation signal Vcount having a predetermined level is applied to the selected touch sensing electrode TE14 to enhance the sensitivity of the pressure sensing sensitivity and the pressing point of the pressure sensing electrode.

特別值得說明的是如圖5B、圖6與圖7所示,由於相對應的該等第一感應電極112與該等第二感應電極122在正投影上特意形成差排並與相鄰電極之對應電極部份交疊;因此,無論自操做方(上方)看向第三電極層(下方),或是自第三電極層看向操做方的手或物件,彼此都完全被該等觸控感應電極(TE01~08、TE11~18、TE21~28、TE31~38)完全遮罩,故其在作壓力偵測時可得到最佳之精確度。It is particularly worth mentioning that, as shown in FIG. 5B, FIG. 6 and FIG. 7 , the corresponding first sensing electrodes 112 and the second sensing electrodes 122 are intentionally formed on the orthographic projection and are adjacent to the adjacent electrodes. The corresponding electrode portions overlap; therefore, the hands or objects that look toward the third electrode layer (below) from the operation side (top) or from the third electrode layer are completely treated by the same The touch sensing electrodes (TE01~08, TE11~18, TE21~28, TE31~38) are completely covered, so they can get the best accuracy when performing pressure detection.

在上述各實施例中,該上基板係一高分子薄膜或一超薄玻璃,該上基板之厚度不大於500μm;該上基板係一耐曲撓材質基板且該上基板之厚度不大於500μm;該下基板係一高分子薄膜或一玻璃;該彈性介電材料層200係設置於該第二電極層背對該上基板之一側,該等觸控感應電極160與該等壓力感應電極170呈平形配置將該彈性介電材料層夾置其間,且該彈性介電材料層遇壓力時體積壓縮變形,並於除去壓力時回復原有的體積與形狀;此彈性膠質材料例如可為(但是不限於)聚二甲基矽氧烷(Polydimethylsiloxane,PDMS)材料、光學透明膠(Optical Clear Adhesive,OCA)。觸控電容感應激勵訊號VT及壓力電容感應激勵訊號Vp係一交變訊號,如一弦波,方波,三角波或梯形波;觸控電容感應激勵訊號VT及壓力電容感應激勵訊號Vp亦可為一電流源。對應感應激勵訊號Vcount係一直流參考訊號或一與壓力電容感應激勵訊號Vp反相位之交變訊號;該電容偵測電路係為一自電容偵測電路;該些觸控感應電極160與該些壓力感應電極係透明導電材料製造,如銦錫氧化物或銦鋅氧化物;該些觸控感應電極160與該些壓力感應電極係不透明導電材料製造,如石墨、金、銀、銅、鋁、錫、銦、鎢、鉬或上述之合金材料。In the above embodiments, the upper substrate is a polymer film or an ultra-thin glass, the upper substrate has a thickness of not more than 500 μm; the upper substrate is a flex-resistant material substrate and the thickness of the upper substrate is not more than 500 μm; The lower substrate is a polymer film or a glass; the elastic dielectric material layer 200 is disposed on one side of the second electrode layer facing the upper substrate, the touch sensing electrodes 160 and the pressure sensing electrodes 170 The elastic dielectric material layer is sandwiched therebetween in a flat configuration, and the elastic dielectric material layer is compressively deformed when subjected to pressure, and returns to the original volume and shape when the pressure is removed; the elastic gel material can be, for example, Not limited to) Polydimethylsiloxane (PDMS) material, Optical Clear Adhesive (OCA). The touch capacitor induction excitation signal VT and the pressure-capacitance induction excitation signal Vp are an alternating signal, such as a sine wave, square wave, triangle wave or trapezoidal wave; the touch capacitance induction excitation signal VT and the pressure capacitance induction excitation signal Vp can also be one Battery. Corresponding to the inductive excitation signal Vcount is a continuous flow reference signal or an alternating signal with the pressure capacitive sensing excitation signal Vp; the capacitance detecting circuit is a self-capacitance detecting circuit; the touch sensing electrodes 160 and the The pressure sensing electrodes are made of a transparent conductive material, such as indium tin oxide or indium zinc oxide; the touch sensing electrodes 160 and the pressure sensing electrodes are made of opaque conductive materials, such as graphite, gold, silver, copper, aluminum. , tin, indium, tungsten, molybdenum or alloy materials as described above.

請參考圖8,其係為本創作之一具體實例之自電容偵測電路之示意圖。該自電容偵測電路50'包含一電容激勵驅動電路52及一電容讀取電路54,以偵測電容讀取點P之電容變化值。該電容激勵驅動電路52包含一訊號源520、一驅動器522(包含第二阻抗522a及第三阻抗522b)。該電容讀取電路54包含一差動放大器540、一第一阻抗542及一第一電容544,以偵測一感應電極60上之電容變化,此感應電極60有附帶之第一雜散電容62及一第二雜散電容64。Please refer to FIG. 8 , which is a schematic diagram of a self-capacitance detecting circuit of one specific example of the present invention. The self-capacitance detecting circuit 50' includes a capacitive excitation driving circuit 52 and a capacitance reading circuit 54 for detecting a capacitance change value of the capacitance reading point P. The capacitor excitation driving circuit 52 includes a signal source 520 and a driver 522 (including a second impedance 522a and a third impedance 522b). The capacitor reading circuit 54 includes a differential amplifier 540, a first impedance 542 and a first capacitor 544 for detecting a change in capacitance on a sensing electrode 60. The sensing electrode 60 has a first stray capacitance 62 attached thereto. And a second stray capacitance 64.

該訊號源520電性連接至該第一阻抗542及該第二阻抗522a;該第一阻抗542電性連接至該第一電容544;該第一電容544電性連接至該差動放大器540之該第一輸入端540a;該第二阻抗522a電性連接至該差動放大器500之該第二輸入端540b;該感應電極60經由該自電容偵測電路50'之一接點而連接至該第二阻抗522a及該差動放大器540之該第二輸入端540b;該第一雜散電容62電性連接至該接腳;該第二雜散電容64電性連接至該感應電極60。The signal source 520 is electrically connected to the first impedance 542 and the second impedance 522a; the first impedance 542 is electrically connected to the first capacitor 544; the first capacitor 544 is electrically connected to the differential amplifier 540 The first input end 540a; the second impedance 522a is electrically connected to the second input end 540b of the differential amplifier 500; the sensing electrode 60 is connected to the one via the contact of the self-capacitance detecting circuit 50' The second impedance 522a and the second input end 540b of the differential amplifier 540; the first stray capacitance 62 is electrically connected to the pin; the second stray capacitance 64 is electrically connected to the sensing electrode 60.

在圖8所示之自電容偵測電路50'中,該感應電極60係感應手指或各類導體或物件之觸碰而接收一觸控訊號;該訊號源520係一週期性之輸入訊號至該第三阻抗522b,且該第一阻抗542之阻抗值等於該第二阻抗522a之阻抗值;該差動放大器540係依據該輸入訊號及該觸控訊號使得該輸出端540c輸出差動放大後之一觸控訊號,該第一電容544之電容值等於該第一雜散電容62及該第二雜散電容64並聯之電容值,當手指或各類導體或物件接近該感應電極60時,該第二雜散電容64之電容值會改變以使得該第一輸入端540a及該第二輸入端540b之電壓值不同,經由該差動放大器540差動放大之後,該輸出端540c輸出放大後之該觸控訊號,透過量測該差動放大器540之輸出變化,以分辨該感應電極60所產生之微量電容值改變,可以有效排除電路、電源等雜訊所造成的干擾,並量測到微量電容值改變。此外,此自電容偵測電路50'之更完整細節可參見同一申請人之發明I473001微量阻抗變化檢測裝置所揭露之自電容偵測電路技術。In the self-capacitance detecting circuit 50' shown in FIG. 8, the sensing electrode 60 senses a touch of a finger or various types of conductors or objects to receive a touch signal; the signal source 520 is a periodic input signal to The third impedance 522b, and the impedance value of the first impedance 542 is equal to the impedance value of the second impedance 522a; the differential amplifier 540 causes the output terminal 540c to output differential amplification according to the input signal and the touch signal. a touch signal, the capacitance of the first capacitor 544 is equal to the capacitance of the first stray capacitance 62 and the second stray capacitance 64 in parallel, when a finger or various types of conductors or objects approach the sensing electrode 60, The capacitance value of the second stray capacitance 64 is changed such that the voltage values of the first input end 540a and the second input end 540b are different. After the differential amplifier 540 is differentially amplified, the output end 540c is outputted after being amplified. The touch signal can measure the change of the output of the differential amplifier 540 to distinguish the change of the trace capacitance generated by the sensing electrode 60, thereby effectively eliminating interference caused by noises such as circuits and power supplies, and measuring the interference. Trace capacitance value change. In addition, for more details of the self-capacitance detecting circuit 50', refer to the self-capacitance detecting circuit technology disclosed in the same applicant's invention I473001 trace impedance change detecting device.

然以上所述者,僅為本創作之較佳實施例,當不能限定本創作實施之範圍,即凡依本創作申請專利範圍所作之均等變化與修飾等,皆應仍屬本創作之專利涵蓋範圍意圖保護之範疇。本創作還可有其它多種實施例,在不背離本創作精神及其實質的情況下,熟悉本領域的技術人員當可根據本創作作出各種相應的改變和變形,但這些相應的改變和變形都應屬於本創作所附的權利要求的保護範圍。綜上所述,當知本創作已具有產業利用性、新穎性與進步性,又本創作之構造亦未曾見於同類產品及公開使用,完全符合新型專利申請要件,爰依專利法提出申請。However, the above is only a preferred embodiment of the present invention, and the scope of the present invention cannot be limited, that is, the equal changes and modifications made by the scope of the patent application of the present invention should still be covered by the patent of the present invention. The scope of the scope is intended to protect. There may be other various embodiments of the present invention, and those skilled in the art can make various corresponding changes and modifications according to the present invention without departing from the spirit of the present invention, but the corresponding changes and modifications are It is intended to fall within the scope of the appended claims. In summary, when Zhiben's creation has industrial applicability, novelty and progressiveness, and the structure of this creation has not been seen in similar products and public use, it fully complies with the requirements of new patent applications and applies for patent law.

10‧‧‧具多層電極結構之高精確度觸壓感應裝置10‧‧‧High-precision touch-sensing device with multi-layer electrode structure

100‧‧‧上基板100‧‧‧Upper substrate

100a‧‧‧第一表面100a‧‧‧ first surface

100b‧‧‧第二表面100b‧‧‧ second surface

110‧‧‧第一電極層110‧‧‧First electrode layer

120‧‧‧第二電極層120‧‧‧Second electrode layer

112,E11~E19‧‧‧第一感應電極112, E11~E19‧‧‧ first sensing electrode

122,E21~E29‧‧‧第二感應電極122, E21~E29‧‧‧second sensing electrode

130‧‧‧絕緣層130‧‧‧Insulation

V1~V9‧‧‧層間連接電極V1~V9‧‧‧Interlayer connection electrode

132‧‧‧第一層間連接電極132‧‧‧First interlayer connection electrode

134‧‧‧第二層間連接電極134‧‧‧Second interlayer connection electrode

V11~V19‧‧‧第一層間連接電極V11~V19‧‧‧ first interlayer connection electrode

V21~V29‧‧‧第二層間連接電極V21~V29‧‧‧Second interlayer connection electrode

150‧‧‧觸控電極走線150‧‧‧Touch electrode trace

W1~W9‧‧‧觸控電極走線W1~W9‧‧‧Touch electrode trace

160‧‧‧觸控感應電極160‧‧‧Touch sensing electrode

170‧‧‧壓力感應電極170‧‧‧ Pressure sensing electrode

200‧‧‧彈性介電材料層200‧‧‧Elastic dielectric material layer

300‧‧‧第三電極層300‧‧‧ third electrode layer

400‧‧‧第二基板400‧‧‧second substrate

500‧‧‧膠合層500‧‧ ‧ glue layer

50‧‧‧電容偵測電路50‧‧‧Capacitance detection circuit

50'‧‧‧自電容偵測電路50'‧‧‧Self capacitance detection circuit

52‧‧‧電容激勵驅動電路52‧‧‧Capacitor excitation drive circuit

520‧‧‧訊號源520‧‧‧Signal source

522‧‧‧驅動器522‧‧‧ drive

54‧‧‧電容讀取電路54‧‧‧Capacitor reading circuit

56‧‧‧同相放大器56‧‧‧In-phase amplifier

59‧‧‧反相放大器59‧‧‧Inverting amplifier

Vc1‧‧‧觸覺感應訊號Vc1‧‧‧Tactile sensing signal

Vc2‧‧‧壓力感應訊號Vc2‧‧‧pressure sensing signal

VT‧‧‧觸控電容感應激勵訊號VT‧‧‧Touch Capacitance Induction Excitation Signal

VT1‧‧‧輔助訊號VT1‧‧‧Auxiliary signal

Vp‧‧‧壓力電容感應激勵訊號Vp‧‧‧Pressure capacitance induction excitation signal

Vp1‧‧‧遮蔽訊號Vp1‧‧‧ shadow signal

Vcount‧‧‧對應激勵訊號Vcount‧‧‧ corresponding incentive signal

TE01~08‧‧‧觸控感應電極TE01~08‧‧‧ touch sensing electrode

TE11~18‧‧‧觸控感應電極TE11~18‧‧‧ touch sensing electrode

TE21~28‧‧‧觸控感應電極TE21~28‧‧‧ touch sensing electrode

TE31~38‧‧‧觸控感應電極TE31~38‧‧‧ touch sensing electrode

90‧‧‧走線遮蔽電極90‧‧‧Wiring shield electrode

542‧‧‧第一阻抗542‧‧‧First impedance

522a‧‧‧第二阻抗522a‧‧‧second impedance

522b‧‧‧第三阻抗522b‧‧‧ third impedance

540‧‧‧差動放大器540‧‧‧Differential Amplifier

544‧‧‧第一電容544‧‧‧first capacitor

60‧‧‧感應電極60‧‧‧Induction electrode

62‧‧‧第一雜散電容62‧‧‧First stray capacitance

64‧‧‧第二雜散電容64‧‧‧Second stray capacitance

540a,540b‧‧‧輸入端540a, 540b‧‧‧ input

540c‧‧‧輸出端540c‧‧‧output

圖1A為依據本創作一實施例之具多層電極結構之高精確度觸壓感應裝置之示意圖。FIG. 1A is a schematic diagram of a high-accuracy touch sensing device having a multilayer electrode structure according to an embodiment of the present invention. FIG.

圖1B為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之示意圖。FIG. 1B is a schematic diagram of a high-accuracy touch sensing device having a multilayer electrode structure according to another embodiment of the present invention.

圖2A為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之示意圖。2A is a schematic diagram of a high-accuracy touch sensing device having a multilayer electrode structure in accordance with another embodiment of the present invention.

圖2B為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之示意圖。2B is a schematic diagram of a high-accuracy touch sensing device having a multilayer electrode structure in accordance with another embodiment of the present invention.

圖3A為依據本創作一實施例之具多層電極結構之高精確度觸壓感應裝置之側視圖。3A is a side elevational view of a high precision touch sensing device having a multilayer electrode structure in accordance with an embodiment of the present invention.

圖3B為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之側視圖。3B is a side elevational view of a high precision touch sensing device having a multilayer electrode structure in accordance with another embodiment of the present invention.

圖3C為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之側視圖。3C is a side elevational view of a high precision touch sensing device having a multilayer electrode structure in accordance with another embodiment of the present invention.

圖4A為依據本創作一實施例之具多層電極結構之高精確度觸壓感應裝置之側視圖。4A is a side elevational view of a high precision touch sensing device having a multilayer electrode structure in accordance with an embodiment of the present invention.

圖4B為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之側視圖。4B is a side elevational view of a high precision touch sensing device having a multilayer electrode structure in accordance with another embodiment of the present invention.

圖4C為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之側視圖。4C is a side elevational view of a high precision touch sensing device having a multilayer electrode structure in accordance with another embodiment of the present invention.

圖5A為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之側視圖。5A is a side elevational view of a high precision touch sensing device having a multilayer electrode structure in accordance with another embodiment of the present invention.

圖5B為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之俯視圖。5B is a top plan view of a high-accuracy touch sensing device having a multilayer electrode structure in accordance with another embodiment of the present invention.

圖6為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之觸覺操作訊號分布圖。FIG. 6 is a haptic operation signal distribution diagram of a high-accuracy touch-sensing device having a multilayer electrode structure according to another embodiment of the present invention.

圖7為依據本創作另一實施例之具多層電極結構之高精確度觸壓感應裝置之壓力偵測操作訊號分布圖。FIG. 7 is a diagram showing a pressure detecting operation signal distribution diagram of a high-accuracy touch sensing device having a multilayer electrode structure according to another embodiment of the present invention.

圖8係為本創作之一具體實例之自電容偵測電路之示意圖。FIG. 8 is a schematic diagram of a self-capacitance detecting circuit of one specific example of the present invention.

10‧‧‧具多層電極結構之高精確度觸壓感應裝置 10‧‧‧High-precision touch-sensing device with multi-layer electrode structure

100‧‧‧上基板 100‧‧‧Upper substrate

100a‧‧‧第一表面 100a‧‧‧ first surface

100b‧‧‧第二表面 100b‧‧‧ second surface

110‧‧‧第一電極層 110‧‧‧First electrode layer

120‧‧‧第二電極層 120‧‧‧Second electrode layer

112,E11~E19‧‧‧第一感應電極 112, E11~E19‧‧‧ first sensing electrode

122,E21~E29‧‧‧第二感應電極 122, E21~E29‧‧‧second sensing electrode

130‧‧‧絕緣層 130‧‧‧Insulation

V1~V9‧‧‧層間連接電極 V1~V9‧‧‧Interlayer connection electrode

150‧‧‧觸控電極走線 150‧‧‧Touch electrode trace

160‧‧‧觸控感應電極 160‧‧‧Touch sensing electrode

170‧‧‧壓力感應電極 170‧‧‧ Pressure sensing electrode

W1~W9‧‧‧觸控電極走線 W1~W9‧‧‧Touch electrode trace

200‧‧‧彈性介電材料層 200‧‧‧Elastic dielectric material layer

300‧‧‧第三電極層 300‧‧‧ third electrode layer

50‧‧‧電容偵測電路 50‧‧‧Capacitance detection circuit

52‧‧‧電容激勵驅動電路 52‧‧‧Capacitor excitation drive circuit

520‧‧‧訊號源 520‧‧‧Signal source

522‧‧‧驅動器 522‧‧‧ drive

54‧‧‧電容讀取電路 54‧‧‧Capacitor reading circuit

56‧‧‧同相放大器 56‧‧‧In-phase amplifier

Claims (16)

一種具多層電極結構之高精確度觸壓感應裝置,其包含: 一上基板,該上基板包含一第一表面與相對於該第一表面的一第二表面; 一第一電極層,該第一電極層係設置於該上基板之其中一個表面,該第一電極層包含複數個第一感應電極; 一第二電極層,該第二電極層係相對於該第一電極層設置,且相較於該第一電極層更遠離該上基板,其包含複數個第二感應電極,該些第二感應電極係與該些第一感應電極呈一對一對應並與對應之第一感應電極兩兩電氣相連接形成複數個觸控感應電極; 複數條觸控電極走線,每一條觸控電極走線係與一個觸控感應電極對應並電氣連接並與其它觸控感應電極呈電氣絕緣; 一彈性介電材料層,該彈性介電材料層係設置於該第二電極層背對該上基板之一側,且該彈性介電材料層遇壓力時體積壓縮變形,並於除去壓力時回復原有的體積與形狀;及 一第三電極層,該第三電極層係設置於該彈性介電材料層背對該上基板之一側,其包含至少一個壓力感應電極。A high-accuracy touch-sensing device with a multi-layer electrode structure, comprising: an upper substrate, the upper substrate comprising a first surface and a second surface opposite to the first surface; a first electrode layer, the first An electrode layer is disposed on one surface of the upper substrate, the first electrode layer includes a plurality of first sensing electrodes; a second electrode layer, the second electrode layer is disposed relative to the first electrode layer, and the phase The first sensing electrode is further away from the upper substrate, and includes a plurality of second sensing electrodes. The second sensing electrodes are in one-to-one correspondence with the first sensing electrodes and are corresponding to the corresponding first sensing electrodes. The two electrical electrodes are connected to form a plurality of touch sensing electrodes; the plurality of touch electrode wires are respectively connected to one touch sensing electrode and electrically connected and electrically insulated from the other touch sensing electrodes; a layer of elastic dielectric material disposed on a side of the second electrode layer facing away from the upper substrate, and the layer of elastic dielectric material is compressively deformed when subjected to pressure, and when pressure is removed Some recovery volume shape; and a third electrode layer, the third electrode layer disposed on the lines of the elastic layer of dielectric material on the back side of the substrate, the pressure sensor comprising at least one electrode. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,該複數條觸控電極走線為該些第一感應電極或該些第二感應電極所遮罩。The high-accuracy touch-sensing device with a multi-layer electrode structure as described in claim 1, wherein the plurality of touch electrode traces are covered by the first sensing electrodes or the second sensing electrodes. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,該複數條觸控電極走線為該些第一感應電極與該些第二感應電極所共同遮罩。The high-accuracy touch-sensing device with a multi-layer electrode structure as described in claim 1, wherein the plurality of touch electrode traces are shared by the first sensing electrodes and the second sensing electrodes. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,更包含: 一電容偵測電路,依序或隨機將一觸控電容感應激勵訊號施加於選定之該觸控感應電極,並自該觸控感應電極輸入一觸控感應訊號,作觸控偵測操作,並將與該觸控電容感應激勵訊號同相位之一輔助訊號施加於相對的至少一個壓力感應電極;該電容偵測電路將一壓力電容感應激勵訊號施加於該至少一個壓力感應電極並自該壓力感應電極輸入一壓力感應訊號,作壓力偵測操作;其於壓力偵測操作時又依序或隨機將一壓力對應激勵訊號施加於選定之該觸控感應電極。The high-accuracy touch-sensing device with a multi-layer electrode structure as described in claim 1, further comprising: a capacitance detecting circuit for sequentially or randomly applying a touch capacitive sensing excitation signal to the selected touch Controlling the sensing electrode, and inputting a touch sensing signal from the touch sensing electrode for performing a touch detection operation, and applying an auxiliary signal in phase with the touch capacitive sensing excitation signal to the opposite at least one pressure sensing electrode The capacitance detecting circuit applies a pressure capacitive sensing excitation signal to the at least one pressure sensing electrode and inputs a pressure sensing signal from the pressure sensing electrode for pressure detecting operation; A pressure corresponding excitation signal is randomly applied to the selected touch sensing electrode. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,該上基板係一高分子薄膜或一超薄玻璃,其厚度不大於500μm。A high-accuracy touch-sensing device having a multi-layer electrode structure according to the first aspect of the invention, wherein the upper substrate is a polymer film or an ultra-thin glass having a thickness of not more than 500 μm. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,該上基板係一耐曲撓材質基板,且其厚度不大於500μm。The high-precision touch-sensing device having a multi-layer electrode structure according to the first aspect of the invention, wherein the upper substrate is a flex-resistant material substrate and has a thickness of not more than 500 μm. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,更包含一下基板,該下基板係一高分子薄膜或一玻璃。The high-accuracy touch-sensing device with a multi-layer electrode structure as described in claim 1 further includes a lower substrate, which is a polymer film or a glass. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,更包含一膠合層設置於該第三電極層之背對該上基板的一側。The high-accuracy touch-sensing device with a multi-layer electrode structure according to claim 1, further comprising a glue layer disposed on a side of the third electrode layer facing away from the upper substrate. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,該些觸控感應電極、壓力感應電極係透明導電材料製造。The high-accuracy touch-sensing device with a multi-layer electrode structure as described in claim 1, wherein the touch-sensing electrodes and the pressure-sensing electrodes are made of a transparent conductive material. 如申請專利範圍第1項所述之具多層電極結構之高精確度觸壓感應裝置,該些觸控感應電極、壓力感應電極係不透明導電材料製造。The high-accuracy touch-sensing device with a multi-layer electrode structure as described in claim 1, wherein the touch-sensing electrodes and the pressure-sensing electrodes are made of an opaque conductive material. 如申請專利範圍第4項所述之具多層電極結構之高精確度觸壓感應裝置,該電容偵測電路係一自電容偵測電路。The high-accuracy touch-sensing device with a multi-layer electrode structure as described in claim 4, the capacitance detecting circuit is a self-capacitance detecting circuit. 如申請專利範圍第4項所述之具多層電極結構之高精確度觸壓感應裝置,該電容偵測電路於觸控偵測操作時更將與該觸控電容感應激勵訊號同相位之一反射訊號施加於該選定的觸控感應電極周遭之觸控感應電極。The high-precision touch-sensing device with a multi-layer electrode structure as described in claim 4, the capacitance detecting circuit is more reflective with one of the phase sensing signals of the touch capacitor during the touch detection operation. A signal is applied to the touch sensing electrodes surrounding the selected touch sensing electrode. 如申請專利範圍第4項所述之具多層電極結構之高精確度觸壓感應裝置,該電容偵測電路於壓力偵測操作時更將一與該壓力電容感應激勵訊號同相位之遮蔽訊號施加於該些非選定的觸控感應電極。The high-precision touch-sensing device with a multi-layer electrode structure as described in claim 4, the capacitance detecting circuit applies a masking signal in phase with the pressure-capacitance sensing excitation signal during the pressure detecting operation. For these non-selected touch sensing electrodes. 如申請專利範圍第4項所述之具多層電極結構之高精確度觸壓感應裝置,該觸控電容感應激勵訊號與該壓力電容感應激勵訊號係一交變訊號,該觸控電容感應激勵訊號亦可為一電流源。The high-precision touch-sensing device with a multi-layer electrode structure as described in claim 4, wherein the touch-capacitance sensing excitation signal and the pressure-capacitance sensing excitation signal are an alternating signal, and the touch capacitance sensing excitation signal It can also be a current source. 如申請專利範圍第14項所述之具多層電極結構之高精確度觸壓感應裝置,該壓力對應激勵訊號係一直流參考訊號或與該壓力電容感應激勵訊號反相位之一交變訊號。The high-precision touch-sensing device with a multi-layer electrode structure according to claim 14, wherein the pressure corresponds to the excitation signal, and the alternating reference signal or the phase of the anti-phase of the pressure-capacitance induced excitation signal is an alternating signal. 如申請專利範圍第15項所述之具多層電極結構之高精確度觸壓感應裝置,該直流參考訊號係一零電位訊號。The high-accuracy touch-sensing device with a multi-layer electrode structure as described in claim 15 is a zero-potential signal.
TW105202072U 2016-02-05 2016-02-05 High-precision force-touch sensor with multilayered electrodes TWM522414U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW105202072U TWM522414U (en) 2016-02-05 2016-02-05 High-precision force-touch sensor with multilayered electrodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105202072U TWM522414U (en) 2016-02-05 2016-02-05 High-precision force-touch sensor with multilayered electrodes

Publications (1)

Publication Number Publication Date
TWM522414U true TWM522414U (en) 2016-05-21

Family

ID=56510972

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105202072U TWM522414U (en) 2016-02-05 2016-02-05 High-precision force-touch sensor with multilayered electrodes

Country Status (1)

Country Link
TW (1) TWM522414U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI566150B (en) * 2016-02-05 2017-01-11 速博思股份有限公司 High-precision force-touch sensor with multilayered electrodes
TWI594161B (en) * 2016-05-26 2017-08-01 速博思股份有限公司 Integral device for sensing touch control and force
TWI622919B (en) * 2017-03-10 2018-05-01 宏碁股份有限公司 Electronic device and operation method for electronic device
WO2022104791A1 (en) * 2020-11-23 2022-05-27 原见精机股份有限公司 Contact sensor with failure detection mechanism

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI566150B (en) * 2016-02-05 2017-01-11 速博思股份有限公司 High-precision force-touch sensor with multilayered electrodes
US20170228065A1 (en) * 2016-02-05 2017-08-10 Superc-Touch Corporation Force-touch sensor with multilayered electrodes
US10156949B2 (en) * 2016-02-05 2018-12-18 Superc-Touch Corporation Force-touch sensor with multilayered electrodes
TWI594161B (en) * 2016-05-26 2017-08-01 速博思股份有限公司 Integral device for sensing touch control and force
CN107436708A (en) * 2016-05-26 2017-12-05 速博思股份有限公司 Integrated device for touch control and pressure sensing
TWI622919B (en) * 2017-03-10 2018-05-01 宏碁股份有限公司 Electronic device and operation method for electronic device
WO2022104791A1 (en) * 2020-11-23 2022-05-27 原见精机股份有限公司 Contact sensor with failure detection mechanism

Similar Documents

Publication Publication Date Title
TWI566150B (en) High-precision force-touch sensor with multilayered electrodes
KR102028783B1 (en) Device for capacitive detection with arrangement of linking tracks, and method implementing such a device
US8829926B2 (en) Transparent proximity sensor
TWI581170B (en) Force-touch sensing device with metal traces
JP6369805B2 (en) Touch sensor device, electronic device, and touch gesture detection program
TWI584185B (en) Integral sensing apparatus for touch and force sensing and method for the same
JP2012068893A (en) Display device
TWM520681U (en) Integral sensing apparatus for touch and pressure sensing
TWI703489B (en) Hovering and touch sensing apparatus with auxiliary capacitance excitation signal
TWI604352B (en) Capacitive type pressure sensor and method for the same
TWM522414U (en) High-precision force-touch sensor with multilayered electrodes
JP2003173238A (en) Touch sensor and display device with touch sensor
TWI703490B (en) Hovering and touch sensing apparatus
CN107045405B (en) Sensing device with pressure touch function
JP2013167953A (en) Touch panel and display device
TWM541607U (en) Sensing apparatus for touch and force sensing
TWI578206B (en) Integral sensing apparatus for touch and force sensing and method for the same
TWI609303B (en) Integral sensing apparatus for touch and pressure sensing and method for the same
JP7178972B2 (en) Touch panel and display device
TWI594161B (en) Integral device for sensing touch control and force
TWI604355B (en) Sensing apparatus for touch and force sensing
TWM537257U (en) Integral sensing apparatus for touch and force sensing
TWM522410U (en) Capacitive type pressure sensor
TWM534849U (en) Sensing device with pressure-tactile function
TWM538614U (en) Integral device for sensing touch control and force