CN104764481B - Full-compliancy capacitance and resistance dual mode proximate sense transducer - Google Patents

Full-compliancy capacitance and resistance dual mode proximate sense transducer Download PDF

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Publication number
CN104764481B
CN104764481B CN201510163579.8A CN201510163579A CN104764481B CN 104764481 B CN104764481 B CN 104764481B CN 201510163579 A CN201510163579 A CN 201510163579A CN 104764481 B CN104764481 B CN 104764481B
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China
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resistance
capacitance
proximity
compliant conductive
electrode
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CN201510163579.8A
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Chinese (zh)
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CN104764481A (en
Inventor
黄英
邱世华
刘彩霞
刘平
张玉刚
郭小辉
马阳洋
汪卫华
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合肥工业大学
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Abstract

The invention discloses a full-compliancy capacitance and resistance dual mode proximate sense transducer. The full-compliancy capacitance and resistance dual mode proximate sense transducer is characterized in that a capacitance type proximate sense transducer body and a resistance type proximate sense transducer body are arranged on a compliant substrate in a spaced mode, and the capacitance type proximate sense transducer body and the resistance type proximate sense transducer body cooperate to perceive object proximity information in a segmented mode. According to the full-compliancy capacitance and resistance dual mode proximate sense transducer, the capacitance and resistance dual mode is utilized to cooperatively detect the object proximity information in a segmented mode, and therefore the accuracy of the transducer can be improved; all structures of the transducer have the compliancy, all leads are led to the same compliant substrate, and therefore the problems that the leads are tedious, not beautiful and not easy to maintain during array structure design are solved.

Description

A kind of double mode proximity scnsor of Grazing condition capacitance-resistance

Technical field

The invention belongs to field of sensing technologies, it is related to a kind of capacitance-resistance being applied to artificial intelligence's skin double mode soft Property proximity scnsor.

Background technology

Proximity scnsor has critically important using value in robot, and robot relies on proximity scnsor permissible Accurate perception external information, realizes the good interaction with external environment.Measurement distance is in the several millimeter of zero point to tens millimeters Within the scope of for proximity scnsor, their effect, and in many cases can be fine between tactile and vision Ground supplements the deficiency of tactile and vision.Proximity scnsor plays an important role in intelligent robot, such as realizes target and knows Not, avoidance in positioning, tracking and motion etc..Robot can be perceived and target object between by proximity scnsor Degree of closeness, such that it is able to complete a series of actions no destroying close, collision free and realizing soft grasping, it compares and regards More simple for feel system and haptic system, application is also than wide.

At present, can be realized by the proximity transducer of number of different types close to perception.Chang etc. devises a kind of tool Have the quartz crystal oscillatory type proximity transducer of three-layer sandwich structure, it close to perceived effect be better than capacitive proximity sense Device.Bartsch etc. studies and develops a kind of low-power consumption vortex type proximity being applied to operation under adverse circumstances and feels sensor. The application that fericean etc. is directed to microwave type proximity scnsor in industry is studied, and improves its hardware circuit.um d Etc. the perception devising to realize the three-dimensional shape for object, by optimizing infrared type proximity scnsor array Staggered form is arranged, and the mode of this kind of new array arrangement can be used for intelligent robot.Goeger etc. utilizes capacitive induction former Reason, the double mode capacitive proximity of new structure of design feels sensor, can be used for robot mechanical arm and differentiates close to information, it is not Measure close to information merely with capacitance principle, but also tactile data can be measured.Pan Wei etc. make use of infrared external reflection light intensity former Reason have developed a kind of employing infrared tube and realizes close to perception as close to the anti-interference proximity transducer feeling probe.heng-tze Cheng et al. have developed a kind of accuracy rate can reach 98% new-type contactless based on infrared type proximity scnsor Gesture recognition system, its main method is by using new signal extraction, then is supervised in real time by binary decision tree The three-dimension gesture of control, identification and object of classification.The research of above-mentioned proximity scnsor not object manipulator dermal application, for Flexibility required by robot skin, scale integration, modularity, safety and robustness etc. all can not meet very well.

Content of the invention

The present invention is for avoiding the weak point existing for above-mentioned existing proximity scnsor, providing a kind of Grazing condition electricity The double mode proximity scnsor of appearance-resistance, it is desirable to provide a kind of for intelligent robot manually sensitive-skinned Grazing condition, sensitive Degree height, stable performance, preparation process is simple, it is easy to the double mode proximity scnsor of capacitance-resistance of array.

The present invention is to solve technical problem to adopt the following technical scheme that

The double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention, its feature is: described Grazing condition electric capacity-electricity Hindering double mode proximity scnsor is to be arranged at intervals with capacitive proximity in flexible substrates to feel that sensor and resistance-type are close Feel sensor, feel sensor and resistance-type proximity scnsor segmenting cooperation perceptual object close to letter with described capacitive proximity Breath;

Described capacitive proximity feels that sensor is the upper surface of flexible substrates to be provided with compliant conductive bipolar electrode, described The lower surface of flexible substrates, be located at described compliant conductive bipolar electrode underface be provided with for the compliant conductive as screen layer Electrode layer;

Described resistance-type proximity scnsor is to arrange in the upper surface of flexible substrates, the described compliant conductive bipolar electrode in interval There is compliant conductive interdigital electrode, be coated with temperature sensitive thin film in described compliant conductive interdigital electrode upper surface;

It has been peripherally installed with ring-shaped shield electrode in described compliant conductive bipolar electrode, described flexible annular conductive electrode is used for Shield the impact to described compliant conductive bipolar electrode for the described compliant conductive interdigital electrode.

Close to feeling sensor, its feature lies also in Grazing condition capacitance-resistance formula of the present invention: described temperature sensitive thin film with Graphene nanometer sheet is material.Described flexible substrates are with polyimides as material.

The lead design of the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention is in same polyimide flex base Bottom, flexibly can carry out electrode wiring, be easy to arrayed configurations design.

Compared with the prior art, the present invention has the beneficial effect that:

1st, the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention utilizes electric capacity and the double mode segmentation of resistance simultaneously Cooperation detection, close to information, improves the degree of accuracy of sensor;Compared with other proximity scnsor, the Grazing condition electricity of the present invention The pluses and minuses that the double mode proximity scnsor of appearance-resistance is individually present on detection object is close using electric capacity, resistance, work in coordination with inspection Survey close to feel information, not only expand close to feeling range, also improve the degree of accuracy in the range ability of place.

2nd, the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention is with polyimides as substrate, its all structure It is respectively provided with good flexibility, sensor can achieve flexural deformation, can reliably be fitted on robot skin, achieve a butt joint nearly letter The detection of breath, improves its surface adaptability.

3rd, the double mode proximity scnsor preparation process is simple of Grazing condition capacitance-resistance of the present invention is it is easy to array;With it Its proximity scnsor is compared, and the Grazing condition capacitance-resistance double mode proximity scnsor institute of the present invention is leaded all to be designed Same flexible substrates, occur when solving array structure design lead loaded down with trivial details, unsightly, the not difficult problem such as easy care;Meanwhile, poly- In acid imide flexible substrates, double mode for Grazing condition capacitance-resistance of the present invention proximity scnsor array is lined up structure, and in battle array Reserved Spliced type array extension interface around row, can more neatly be spliced into different size and shape by fpc soft arranging wire Sensitive " skin ", possesses the features such as wearable row, expansibility, portability and easy care.

Brief description

Fig. 1 is the vertical section structure chart of the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention;

Fig. 2 is the fractionation axonometric chart of the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention;

Fig. 3 be 60 DEG C unit of plastic close to Grazing condition capacitance-resistance of the present invention double mode proximity scnsor when, its electricity Hold, resistance value with close to distance relation;

Fig. 4 be 30 DEG C aluminium block close to Grazing condition capacitance-resistance of the present invention double mode proximity scnsor when, its electric capacity, Resistance value with close to distance relation;

Fig. 5 is Grazing condition capacitance-resistance of the present invention double mode proximity scnsor array structure schematic diagram;

Fig. 6 is the array leads schematic diagram of the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention;

In figure label: 1 temperature sensitive thin film;2 compliant conductive interdigital electrodes;3 flexible annular conductive electrodes;4 compliant conductives Bipolar electrode;5 flexible substrates;6 compliant conductive electrode layers;7 silicone rubber;8 conductive silver glues;9 capacitance-resistance are double mode to be sensed close to feel Device unit;10 Spliced type array extension sockets;11 capacitance signal the first horizontal scanning lines;12 capacitance signal first row scan lines; 13 resistance signal the first horizontal scanning lines;14 resistance signal first row scan lines;15 through holes.

Specific embodiment

As shown in figure 1, the structure of the double mode proximity scnsor of the present embodiment Grazing condition capacitance-resistance is: flexible one Capacitive proximity is arranged at intervals with substrate 5 and feels sensor and resistance-type proximity scnsor, sensor is felt with capacitive proximity With resistance-type proximity scnsor segmenting cooperation perceptual object close to information;

Capacitive proximity feels that sensor is the upper surface of flexible substrates 5 to be provided with compliant conductive bipolar electrode 4, in flexible base The lower surface at bottom 5, be located at compliant conductive bipolar electrode 4 underface be provided with for the compliant conductive electrode layer 6 as screen layer;

Resistance-type proximity scnsor be flexible substrates 5 upper surface and compliant conductive bipolar electrode 4 be arranged at intervals with soft Property conductive interdigital electrode 2, be coated with temperature sensitive thin film 1 in compliant conductive interdigital electrode 2 upper surface;

It has been peripherally installed with flexible annular conductive electrode 3 in compliant conductive bipolar electrode 4, flexible annular conductive electrode 3 is used for The shielded flexible conduction impact to compliant conductive bipolar electrode 4 for the interdigital electrode 2.Compliant conductive electrode layer 6 is by compliant conductive bipolar electrode 4 A non-close side shield, eliminates the impact to capacitance detecting for this side, improves the degree of accuracy of proximity test.

Based on flexible printed circuit board (fpcb) technology, flexible substrates 5 select polyimides, compliant conductive bipolar electrode 4, soft Property ring shaped conductive electrode 3 and compliant conductive interdigital electrode 2 all in the top layer of flexible substrates 5 and the process that opens a window, compliant conductive electrode Layer be screen layer 6 in the bottom of flexible substrates 5 and the process that opens a window, respectively as in Fig. 2 compliant conductive bipolar electrode 4, flexible annular lead Shown in electrode 3 and compliant conductive interdigital electrode 2, compliant conductive electrode layer 6.

Temperature sensitive thin film 1 selects the graphene nanometer sheet of Chengdu organic chemistry company limited, as Grazing condition electric capacity-electricity , close to sensitive material, in 4-20nm, a diameter of 5-10 μm, the number of plies is less than its thickness to hinder resistance-type in double mode proximity scnsor 30 layers.

Conductive silver glue 8 selects the yc-02 type organosilicon conductive silver glue of Nanjing Heineken spy adhesive company limited, yc-02 type Can voluntarily solidify under room temperature after the uniform mixing of organosilicon conductive silver glue first, second component 10:1 in mass ratio, and have good after solidification The advantages of electric conductivity well, tensility and flexibility.

Resistance-type proximity scnsor manufacturing process is as shown in Figure 2: takes a certain amount of graphene nanometer sheet powder to pour into suitable Amount Petroleum, first passes through mechanical agitation 30 minutes and is obtained within 2 hours with supersound process the suspension of favorable dispersibility.Then soft Property conductive interdigital electrode surface coat part (i.e. insulated part) between conductive silver glue 8, the finger of compliant conductive interdigital electrode and coat silicon Rubber 7 is as binding agent.Subsequently the graphene nanometer sheet preparing before suspension is dropped in compliant conductive interdigital electrode, Afterwards it is carried out with the pre-heat treatment: by drip the flexible PCB having graphene nanometer sheet suspension be placed in sweat box be brought rapidly up to Take out after 150 DEG C and cool down in atmosphere.

The concrete detection mechanism of the double mode proximity scnsor of the present embodiment Grazing condition capacitance-resistance is as follows: when having one During the above-mentioned proximity scnsor of object proximity of constant temperature degree, increasingly nearer with distance, effectively it is situated between above compliant conductive bipolar electrode Electrostrictive coefficient changes, by realizing close detection to the detection of its capacitance variations;Certain due to carrying close to object Temperature, with object close to so that graphene nanometer sheet environment temperature changes, thus graphene nanometer sheet resistance sizes Change, by close detection can be realized to the detection of its resistance variations.

Capacitive proximity feels sensor in the form of coplanar bipolar electrode, when detection object is in-plant close, electric capacity Formula has the characteristics that response is fast, sensitivity is high, but its scope that can detect is smaller and with electrode size and its structure Design changes and changes.Then detection range is larger for resistance-type proximity scnsor, and the graphene nanometer sheet thin film of selection has spirit The feature of sensitivity high, reproducible and anti-interference (humidity affects little on it), but selected graphene nanometer sheet is as close to feel During sensor, its response is slower.Thus the two is combined and one, can effectively increase capacitive detection range, again can be more Mend the feature of resistance-type low-response, thus more efficiently realizing the object proximity that cooperation detection is higher than ambient temperature.

Fig. 3 for temperature be maintained at 60 DEG C of unit of plastic close to described double mode proximity scnsor when its electric capacity, resistance Change.Close to distance from 20.0m to 7.0mm when, capacitive proximity feel sensor cannot because being limited to electric field line transmission depth Perception, thus close in this segment distance internal resistance formula proximity scnsor perceptual object;When close to distance in 7.0mm extremely During 2.5mm, capacitive proximity feel sensor and resistance-type proximity scnsor by collaborative perception object close to process;And In 2.5mm to 0mm, because resistance-type proximity scnsor changes less in this segment limit, thus condenser type in this segment distance Proximity scnsor is close by perceptual object.Close to distance for, in 7-2mm, electric capacity, resistance are close by perceptual object simultaneously Process.Fig. 4 for temperature be maintained at 30 DEG C of aluminium block close to the double mode proximity scnsor of the present invention when its electric capacity, resistance change Change.Close to distance for 10-7mm when, the transmission depth that condenser type is still limited by its electric field line cannot perceive, thus this segment distance Internal resistance formula proximity scnsor perceptual object close;When close to distance in 2-0mm, due to resistance-type proximity scnsor Change less in this segment limit, thus in this segment distance, capacitive proximity feels that sensor is close by perceptual object;Close Distance is for, in 7-2mm, electric capacity, resistance are by perceptual object simultaneously close to process.So, it is the formation of electric capacity double mode with resistance Collaborative perception object close to process.The double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention will be by electric capacity and electricity Two kinds of different modes of resistance carry out the close of perceptual object, not only increase the perception range of conventional condenser proximity scnsor, also The close precision of perception be increased by double mode collaborative perception object proximity.Though Fig. 3 and Fig. 4 be for 60 DEG C unit of plastic with For 30 DEG C of aluminium block, but for different temperatures different objects, all sectional, collaborative perception object close.

The double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention when capacitance signal extracts from possess i2c and The ad7147-1 of environment self-calibration function in appearance type serial line interface and piece, up to 16 cdc precision, 13 appearances of a street inputs Ad7147-1 cooperation four-way single-pole double-throw switch (SPDT) adg734 can more easily constitute capacitive array sensor signal acquiring system; Select easy drive tm technology when resistance signal extracts, there are 16 road single ended input or 8 road Differential Input, 16 moduluses The tlc2495 of transducer has 27 addresses and one to be used for realizing synchronous global address two-wire system i2c interface.Meanwhile, chip Using active ac shield technology, this shielded signal outfan and capacitive proximity are felt the flexible annular conductive electrode of sensor 3 and compliant conductive electrode layer 6 be connected, can be effectively reduced sensor use process present in noise jamming.

Coplanar bipolar electrode capacitor plate is drawn by the double mode proximity scnsor of Grazing condition capacitance-resistance of the present invention with resistance-type Line designs in same flexible substrates, occur when solving array structure design lead loaded down with trivial details, unsightly, the not difficult problem such as easy care. Meanwhile, double mode for Grazing condition capacitance-resistance of the present invention proximity scnsor is arranged in array by polyimide flex substrate Structure, and reserve Spliced type array extension interface around array, more neatly can be spliced into different big by fpc soft arranging wire The little sensitivity " skin " with shape, possesses the features such as wearable property, extensibility, portability and easy care.

For the Grazing condition capacitance-resistance double mode proximity scnsor preparation of array structure, can be in polyimide flex It is designed to array structure by double mode for capacitance-resistance close to feel sensing unit on matrix.Copy single resistance-type afterwards close to feel Unit preparation method gradation global formation.

As shown in figure 5, by double mode for Grazing condition capacitance-resistance of the present invention proximity scnsor 8 be arranged in array structure (with As a example 8 × 8 tactile sensing arrays).The double mode close feel sensor array of design 8 × 8 capacitance-resistance in flexible substrates 5, soft Property substrate 5 surrounding all reserve Spliced type array extension socket 10, by fpc soft arranging wire can by single array module flexibly, Freely it is spliced into the bionics skin of different area, shape.If in actual applications a certain piece of artificial skin occur damaged or Malfunction, can be easy to, by this block artificial skin " taking off ", transplant new " skin ".Not only reduce to a certain extent The use cost of artificial skin, improves the efficiency of on-site maintenance again.Realize wearable, transplantation, Yi Wei truly The functions such as shield.

When double mode for Grazing condition capacitance-resistance of the present invention proximity scnsor 9 is arranged in array structure, its wire laying mode As shown in Figure 5 (taking the double mode sensor array close to feel of 2 × 2 capacitance-resistance as a example), the two-plate of compliant conductive bipolar electrode 4 exists Flexible substrates 5 (flexible substrates are multiple structure) the same face simultaneously constitutes ranks array structure, the wherein flexibility mutually gone together of array Conductive bipolar plate 4 the same side pole plate and corresponding horizontal scanning line are connected, compliant conductive bipolar electrode 4 opposite side pole plate and corresponding column scan Line is connected;Compliant conductive interdigital electrode 2 constitutes another ranks array structure, the wherein interdigital electricity of the compliant conductive mutually gone together of array Pole 2 same-side electrodes and corresponding horizontal scanning line are connected, another lateral electrode of compliant conductive interdigital electrode 2 and respective column scan line phase Even.For example, 2 × 2 capacitance-resistance are double mode equal close to the left pole plate feeling the compliant conductive bipolar electrode 4 of the first row in sensor array Be connected with capacitance signal the first horizontal scanning line 11, the right pole plate of compliant conductive bipolar electrode 4 of first row all with capacitance signal first row Scan line 12 is connected;The left electrode of the compliant conductive interdigital electrode 2 of the first row is all connected with resistance signal the first horizontal scanning line 13, The right electrode of compliant conductive interdigital electrode 2 of first row is all connected with resistance signal first row scan line 14.Capacitance-resistance is double mode Indicated by the solid line close to the horizontal scanning line feeling sensor array, column scan line is represented by dashed line, respectively in the top layer of flexible substrates 5 With other layers.The lead of compliant conductive bipolar electrode 4 pole plate is incorporated into the place layer of respective rank scanning line by similar through hole 15, Thus meeting Grazing condition capacitance-resistance proximity scnsor lead all in same flexible substrates 5, enormously simplify arrayed configurations Wiring complexity.

Claims (3)

1. a kind of double mode proximity scnsor of Grazing condition capacitance-resistance it is characterised in that:
The double mode proximity scnsor of described Grazing condition capacitance-resistance is to be arranged at intervals with condenser type in flexible substrates (5) With described capacitive proximity, proximity scnsor and resistance-type proximity scnsor, feel that sensor and described resistance-type pass close to feel Sensor segmenting cooperation perceptual object is close to information;
Described capacitive proximity feels that sensor is the upper surface of flexible substrates (5) to be provided with compliant conductive bipolar electrode (4), in institute The lower surface stating flexible substrates (5), the underface being located at described compliant conductive bipolar electrode (4) are provided with for as screen layer Compliant conductive electrode layer (6);
Described resistance-type proximity scnsor is to be spaced in the upper surface of flexible substrates (5) and described compliant conductive bipolar electrode (4) It is provided with compliant conductive interdigital electrode (2), be coated with temperature sensitive thin film in described compliant conductive interdigital electrode (2) upper surface (1);
It has been peripherally installed with flexible annular conductive electrode (3) in described compliant conductive bipolar electrode (4), the conductive electricity of described flexible annular Pole (3) is used for shielding the impact to described compliant conductive bipolar electrode (4) for the described compliant conductive interdigital electrode (2).
2. the double mode proximity scnsor of Grazing condition capacitance-resistance according to claim 1 it is characterised in that: described temperature Degree sensitive thin film (1) is with graphene nanometer sheet as material.
3. the double mode proximity scnsor of Grazing condition capacitance-resistance according to claim 1 it is characterised in that: described soft Property substrate (5) is with polyimides as material.
CN201510163579.8A 2015-04-08 2015-04-08 Full-compliancy capacitance and resistance dual mode proximate sense transducer CN104764481B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107677296A (en) * 2017-09-25 2018-02-09 合肥工业大学 A kind of Grazing condition is close to touch-pressure sensation sensor

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CN105067016B (en) * 2015-08-19 2017-05-31 东南大学 Integrated Temperature Humidity Sensor and preparation method thereof
CN107014896B (en) * 2017-03-28 2020-04-03 中国人民解放军国防科学技术大学 Integrated electromagnetic capacitor planar array sensor and preparation method thereof
CN109163824A (en) * 2018-10-10 2019-01-08 北京理工大学 A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function

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JPH07117432B2 (en) * 1991-12-17 1995-12-18 三菱重工業株式会社 Method of manufacturing composite sensor
JP2013096846A (en) * 2011-11-01 2013-05-20 Seiko Epson Corp Detection device, electronic apparatus and robot
CN102589759B (en) * 2012-02-20 2013-10-23 浙江大学 Bionic flexible touch sense sensing array based on piezoresistive type and capacitance type combination
CN102692294B (en) * 2012-05-29 2014-04-16 上海丽恒光微电子科技有限公司 Composite pressure transducer and formation method thereof
CN103743503B (en) * 2013-12-31 2015-08-19 浙江大学 Based on the flexible 3 D force-touch sensor of pressure resistance type and capacitive combination
CN104316224B (en) * 2014-11-04 2016-06-29 浙江大学 The three-dimensional force tactile sensing unit combined based on electric capacity with pressure sensitive elastomer

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CN107677296A (en) * 2017-09-25 2018-02-09 合肥工业大学 A kind of Grazing condition is close to touch-pressure sensation sensor
CN107677296B (en) * 2017-09-25 2019-11-08 合肥工业大学 A kind of Grazing condition is close to-touch-pressure sensation sensor

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