CN111735561A - Flexible proximity sense and touch sense dual-mode sensor for robot - Google Patents
Flexible proximity sense and touch sense dual-mode sensor for robot Download PDFInfo
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- CN111735561A CN111735561A CN202010747725.2A CN202010747725A CN111735561A CN 111735561 A CN111735561 A CN 111735561A CN 202010747725 A CN202010747725 A CN 202010747725A CN 111735561 A CN111735561 A CN 111735561A
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- 230000005684 electric field Effects 0.000 claims abstract description 29
- 238000013459 approach Methods 0.000 claims abstract description 11
- 239000003990 capacitor Substances 0.000 claims description 25
- 230000004044 response Effects 0.000 claims description 13
- 230000009977 dual effect Effects 0.000 claims description 7
- 239000003292 glue Substances 0.000 claims description 4
- 230000000295 complement effect Effects 0.000 claims description 3
- 230000005489 elastic deformation Effects 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 229920002799 BoPET Polymers 0.000 claims description 2
- 229920002635 polyurethane Polymers 0.000 claims description 2
- 239000004814 polyurethane Substances 0.000 claims description 2
- 230000008447 perception Effects 0.000 abstract description 10
- 230000008859 change Effects 0.000 abstract description 8
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000007547 defect Effects 0.000 abstract description 3
- 239000007772 electrode material Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 33
- 238000010586 diagram Methods 0.000 description 9
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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Abstract
The invention discloses a flexible proximity perception and touch sense dual-mode sensor for a robot, which can realize proximity perception and touch sense dual-mode perception by combining two factors causing capacitance change, so that the sensor can realize dual-mode perception without adding other principle perception modules, and the manufacturing method is simple and reliable. And the defect that two changes are easy to be confused is overcome by adding the dielectric medium, the special electrode shape is designed, the sensitivity is greatly improved, and a new electrode manufacturing mode and an electrode material are used for printing the electrode on the flexible medium. The two principles that an external object approaches to influence the fringe electric field and the distance between polar plates influences the electric field are combined, the two changes have different changing trends and different changing orders of magnitude, and the approach feeling and the touch feeling are convenient to distinguish.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a flexible proximity sense and touch sense dual-mode sensor for a robot.
Background
Proximity sensing converts movement information and presence information of a test object into an electrical response without direct contact with the test object. Traditional proximity sensor is mainly based on principles such as infrared light, ultrasonic wave, magnetic induction, and is inflexible, and is usually bulky, is difficult to be applied to the wearable equipment that has high requirement to flexible can stretch.
The tactile perception can convert the force applied by the detection object into an electrical response when the detection object is in direct contact. The traditional touch perception sensor is mainly based on the principles of piezoresistance, piezoelectricity and the like, and the sensors are single-mode sensors, are difficult to combine with a proximity sensing and proximity principle sensor, and are applied to wearable equipment, intelligent robots and the like.
Currently in the field of flexible electronics, a variety of high sensitivity flexible pressure and proximity sensors have been reported, but there has been relatively little research into the combination of flexible proximity sensing and flexible pressure sensors. The proximity and pressure dual-mode sensing are combined, the proximity sensing is used as a complementary function of the pressure sensing, the detection mode of the common single-function touch sensor can be expanded, and the identification and the quick response of the accurate position of the proximity object are realized. And a proximity and touch dual-mode perception sensor based on capacitance measurement is easy to manufacture, and can detect a proximity object and perceive tactile pressure without being influenced by color and texture.
Disclosure of Invention
In order to solve the defects of the prior art, the invention provides a flexible proximity and touch dual-mode sensor for a robot. The sensor combines the flexible pressure sensor and the flexible proximity sensor, and overcomes the defects that the single-mode sensor cannot realize multiple functions and the accuracy is easily reduced by overlapping multiple single-mode sensors.
The technical scheme for solving the technical problems is as follows: the flexible proximity sense and touch sense dual-mode sensor for the robot is characterized by comprising a first layer of flexible film, an elastic dielectric medium and a second layer of flexible film, wherein a first electrode is printed on the first layer of flexible film through conductive ink, and a second electrode is printed on the second layer of flexible film through the conductive ink; the first layer of flexible film and the second layer of flexible film are respectively arranged on two sides of the elastic dielectric medium and are bonded into a whole by glue; the first electrode and the second electrode are two crossed and complementarily arranged patterned electrodes.
The first electrode on the first layer of flexible film and the second electrode on the second layer of flexible film form a capacitor, when an external object gradually approaches the sensor, the external object partially intercepts the fringe electric field of the capacitor, the electric field intensity of the capacitor is reduced, and the capacitance value is reduced, which is a proximity sense response mode of the sensor; when an external object directly applies pressure to the sensor, the elastic dielectric medium generates elastic deformation, the distance between the first electrode and the second electrode is reduced, the electric field intensity of the capacitor is enhanced, and the capacitance value is increased, which is a touch response mode of the sensor.
Compared with the prior art, the invention has the beneficial effects that: the invention can realize the dual-mode sensing of proximity perception and touch perception by combining two factors causing capacitance change, so that the sensor can realize the dual-mode sensing without adding other principle sensing modules, and the manufacturing method is simple and reliable. And overcome the shortcoming that two kinds of changes are easy to be confused through increasing the dielectric medium, designed special electrode shape and greatly increased sensitivity, used new electrode preparation mode and electrode material to print the electrode on the elastic dielectric medium. The two principles that an external object approaches to influence the fringe electric field and the distance between polar plates influences the electric field are combined, the two changes have different changing trends and different changing orders of magnitude, and the approach feeling and the touch feeling are convenient to distinguish.
Drawings
FIG. 1 is a schematic structural diagram of an embodiment of a dual-mode sensor according to the present invention;
FIG. 2 is a schematic diagram of the electric field of the dual-mode sensor of the present invention without the object approaching or applying pressure;
FIG. 3 is a schematic diagram of an electric field with an object in close proximity and no applied pressure for a dual mode sensor of the present invention;
FIG. 4 is a schematic diagram of the deformation of the first flexible film of the dual-mode sensor according to the present invention with applied pressure;
FIG. 5 is an equivalent schematic diagram of the proximity sensor proximity principle of the dual mode sensor of the present invention;
FIG. 6(a) is a schematic diagram of a spiral electrode arrangement and FIG. 6(b) is a schematic diagram of an interdigital electrode arrangement of a dual-mode sensor according to an embodiment of the present invention;
in the figure: 1-a first layer of flexible film; 3-a second layer of flexible film; 2-an elastomeric dielectric; 4-fringing electric field lines.
Detailed Description
Specific embodiments of the present invention are provided below and described in detail with reference to the accompanying drawings. The specific examples are only intended to illustrate the invention in further detail and do not limit the scope of protection of the claims of the present application.
The invention provides a flexible proximity and touch dual-mode sensor (referred to as a dual-mode sensor for short) for a robot, which is characterized by comprising a first layer of flexible film, an elastic dielectric medium and a second layer of flexible film, wherein a first electrode is printed on the first layer of flexible film through conductive ink, and a second electrode is printed on the second layer of flexible film through the conductive ink; the first layer of flexible film and the second layer of flexible film are respectively arranged on two sides of the elastic dielectric medium and are bonded into a whole by glue which can keep a stable structure in the air for a long time, such as polyurethane gel and the like. The first electrode and the second electrode are two patterned electrodes which are arranged in a crossed and complementary mode, the first electrode and the second electrode are in spiral shapes, interdigital shapes and the like, the area of a capacitor plate can be increased, the crossed area between the electrodes is as large as possible so as to improve the surface area of the plate, and the crossed position of the two electrodes is the position in the middle of an electrode gap so that electric field lines are uniform.
The first electrode on the first layer of flexible film and the second electrode on the second layer of flexible film form a capacitor, when an external object gradually approaches the sensor, the external object partially intercepts fringe electric field lines of the capacitor, the electric field intensity of the capacitor is reduced, and the capacitance value is reduced, which is a proximity sense response mode of the sensor; when an external object directly applies pressure to the sensor, the elastic dielectric medium generates elastic deformation, the distance between the first electrode and the second electrode is reduced, the electric field intensity of the capacitor is enhanced, and the capacitance value is increased, which is a touch response mode of the sensor.
And sealing and packaging the four surfaces of the elastic dielectric medium except for the surface adhered with the first layer of flexible film and the second layer of flexible film by using a sealing machine, so that the inside of the elastic dielectric medium is a stable space.
The first electrode and the second electrode form two electrodes of a capacitor and form a fringe electric field, when an external object approaches the capacitor, the fringe electric field of the capacitor is influenced, the strength is reduced, and the capacitance value is reduced, so that the electric response is generated to the approach of the external object.
When an external object touches the surface of the flexible film and applies pressure, the electric field intensity of the capacitor is increased and the capacitance value is increased along with the reduction of the distance between the first electrode and the second electrode, so that an electric response is generated to the touch pressure of the external object.
The first and second electrodes are generally spiral, interdigitated, or the like to increase the area of the capacitive plate and to spread the electric field lines to increase the contact distance. The patterned region can enhance the fringe field of the capacitor, improve the sensitivity of the flexible capacitive proximity sensor, and also can improve the area between the upper and lower electrodes and improve the sensitivity of touch pressure.
The first layer of flexible film and the second layer of flexible film are PI films, PET films and other film materials which are good in flexibility and insulativity and easy to adhere to corresponding conductive ink.
The elastic dielectric is a sponge, a gel, etc., and has a flexible and elastic medium, so that it can be bent, and the distance between the electrodes is changed at the time of tactile sensing to cause a change in capacitance. In addition, a dielectric constant greater than 3.6 is preferred to facilitate resolution of pressure and proximity sensing modes.
The conductive ink is selected to be conductive and flexible, such as Ag-graphene ink, so that the electrode is not damaged when the elastic dielectric is bent. And the conductive ink can keep stable property for a long time in the air, so that the quality of the electrode can be ensured.
The fringe electric field lines 4 of the first electrode on the first layer of flexible film 1, the finger and the first electrode generate capacitive coupling, the electric field intensity between the first electrode and the second electrode is reduced, the electric field intensity stored in the capacitor formed by the first electrode and the second electrode is reduced, and the capacitance Cm of the proximity sensor is reduced; meanwhile, the coupling capacitor Cs of the shunt part is connected with the proximity sensor capacitor Cm in series, and the total capacitance value is reduced; the shunt condition is more pronounced and the proximity sensor capacitance Cm changes more when the finger is closer to the first electrode. When a finger applies pressure to the first layer of flexible film 1 or the second layer of flexible film 3 to compress and deform the elastic dielectric 2, the capacitance between the first electrode and the second electrode is increased, and the purpose of pressure sensing is achieved; the capacitance change caused by the finger pressure is larger than the approximate capacitance change, and the larger the applied pressure is, the larger the deformation is, the larger the capacitance change is.
Examples
When the sensor is pressed, the distance d between the first layer of flexible film and the second layer of flexible film is reduced, the capacitance value is increased, the range of the sensible force is 1kPa-100kPa, the capacitance value changes along with the force, the larger the force is, the larger the capacitance value is, the linear relation (related to the elastic dielectric medium) is formed, and the capacitance value changes to be about several hundred picofarads. For the common parallel plate capacitor, because the electric field lines are concentrated between the two plates, the influence of the approaching object on the capacitor is less than 0.2pF, and the measurement is extremely difficult. In the case of a common dielectric medium, capacitance change caused by tactile pressure is tens of picofarads, and the influence of the picofarads on the change is large, so that two situations of approaching object separation and pressure increase are easy to confuse. Therefore, the invention has good sensitivity and high reliability under the condition of realizing dual modes of proximity sense and touch sense.
Fig. 3 is a schematic diagram of a proximity sensing response mode principle of a sensor constructed by using a planar thin film, in which an external object (e.g., a finger) approaches a fringe electric field line above an electrode on a side close to an interception part, and the external object and the electrode generate capacitive coupling, so that the electric field intensity of a capacitor formed by the two electrodes is reduced, and the capacitance is reduced. Fig. 4 is a schematic diagram of a tactile response mode principle of a sensor constructed by using a planar film, and when an external object presses the sensor, the elastic dielectric medium is compressed and deformed, so that the distance between the two electrodes is reduced, the electric field intensity between the two electrodes is enhanced, and the capacitance of the capacitor is increased.
The specific embodiments described herein are merely illustrative of the invention and do not limit the scope of the invention.
Nothing in this specification is said to apply to the prior art.
Claims (7)
1. A flexible approach sense and touch sense dual-mode sensor for a robot is characterized by comprising a first layer of flexible film, an elastic dielectric medium and a second layer of flexible film, wherein a first electrode is printed on the first layer of flexible film through conductive ink, and a second electrode is printed on the second layer of flexible film through conductive ink; the first layer of flexible film and the second layer of flexible film are respectively arranged on two sides of the elastic dielectric medium and are bonded into a whole by glue; the first electrode and the second electrode are two patterned electrodes which are arranged in a crossed and complementary manner;
the first electrode on the first layer of flexible film and the second electrode on the second layer of flexible film form a capacitor, when an external object gradually approaches the sensor, the external object partially intercepts fringe electric field lines of the capacitor, the electric field intensity of the capacitor is reduced, and the capacitance value is reduced, which is a proximity sense response mode of the sensor; when an external object directly applies pressure to the sensor, the elastic dielectric medium generates elastic deformation, the distance between the first electrode and the second electrode is reduced, the electric field intensity of the capacitor is enhanced, and the capacitance value is increased, which is a touch response mode of the sensor.
2. The dual mode flexible proximity and touch sensor of claim 1, wherein the first and second electrodes are spiral or interdigital in shape, and the intersection of the two electrodes is located in the middle of the electrode gap to make the electric field lines uniform.
3. The dual mode sensor of flexible proximity and touch for robot as claimed in claim 1, wherein the elastic dielectric is hermetically sealed on four sides except for the first and second flexible films, so that the elastic dielectric has a stable space inside.
4. The dual-mode flexible proximity and touch sensor for the robot as claimed in claim 1, wherein the first and second flexible films are PI films or PET films.
5. The dual mode sensor of flexible proximity and touch for a robot of claim 1, wherein said elastic dielectric is a sponge or gel with a dielectric constant greater than 3.6.
6. The dual-mode flexible proximity and touch sensor for robots according to claim 1, wherein the conductive ink is Ag-graphene ink.
7. The dual mode flexible proximity and touch sensor for robots according to claim 1, wherein said glue is polyurethane gel.
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Cited By (9)
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CN113418553A (en) * | 2021-06-11 | 2021-09-21 | 深圳大学 | Multi-modal sensor, preparation method thereof and intelligent device |
CN113654703A (en) * | 2021-09-26 | 2021-11-16 | 太原理工大学 | Flexible sensing array for mechanical arm sensing and preparation and application methods thereof |
CN113670484A (en) * | 2021-08-18 | 2021-11-19 | 吉林大学重庆研究院 | Flexible pressure sensor with complementary spiral structure, preparation method and application thereof |
CN113739962A (en) * | 2021-09-30 | 2021-12-03 | 中国科学院重庆绿色智能技术研究院 | Multi-mechanism fusion electronic skin and preparation method thereof |
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Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6469524B1 (en) * | 2000-08-25 | 2002-10-22 | Delphi Technologies, Inc. | System and method for interrogating a capacitive sensor |
US20060250142A1 (en) * | 2002-12-25 | 2006-11-09 | Hiroshi Abe | Electrostatic capacity detection type proximity sensor |
US20090146827A1 (en) * | 2007-11-30 | 2009-06-11 | Wuerstlein Holger | Anti-pinch sensor |
CN102003612A (en) * | 2009-08-31 | 2011-04-06 | 罗伯特.博世有限公司 | Sensor system for monitoring surroundings on a mechanical component and a method for activating and evaluating the sensor system |
CN102439851A (en) * | 2009-05-13 | 2012-05-02 | 辛纳普蒂克斯公司 | Capacitive sensor device |
US20140088764A1 (en) * | 2012-09-24 | 2014-03-27 | Naidu Prakash Crj | Tactile array sensor |
KR20160125565A (en) * | 2015-04-21 | 2016-11-01 | 성균관대학교산학협력단 | Film type tactile sensor possible to detect a proximity |
EP3166228A1 (en) * | 2015-11-05 | 2017-05-10 | Karlsruher Institut für Technologie | Sensor module, sensor system and method for capacitive and spatially resolved detection of approaching and contact, use of the sensor module |
CN107677296A (en) * | 2017-09-25 | 2018-02-09 | 合肥工业大学 | A kind of Grazing condition is close to touch-pressure sensation sensor |
CN109163824A (en) * | 2018-10-10 | 2019-01-08 | 北京理工大学 | A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function |
CN212254424U (en) * | 2020-07-29 | 2020-12-29 | 河北工业大学 | Flexible proximity sense and touch sense dual-mode sensor for robot |
-
2020
- 2020-07-29 CN CN202010747725.2A patent/CN111735561B/en active Active
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6469524B1 (en) * | 2000-08-25 | 2002-10-22 | Delphi Technologies, Inc. | System and method for interrogating a capacitive sensor |
US20060250142A1 (en) * | 2002-12-25 | 2006-11-09 | Hiroshi Abe | Electrostatic capacity detection type proximity sensor |
US20090146827A1 (en) * | 2007-11-30 | 2009-06-11 | Wuerstlein Holger | Anti-pinch sensor |
CN102439851A (en) * | 2009-05-13 | 2012-05-02 | 辛纳普蒂克斯公司 | Capacitive sensor device |
CN102003612A (en) * | 2009-08-31 | 2011-04-06 | 罗伯特.博世有限公司 | Sensor system for monitoring surroundings on a mechanical component and a method for activating and evaluating the sensor system |
US20140088764A1 (en) * | 2012-09-24 | 2014-03-27 | Naidu Prakash Crj | Tactile array sensor |
KR20160125565A (en) * | 2015-04-21 | 2016-11-01 | 성균관대학교산학협력단 | Film type tactile sensor possible to detect a proximity |
EP3166228A1 (en) * | 2015-11-05 | 2017-05-10 | Karlsruher Institut für Technologie | Sensor module, sensor system and method for capacitive and spatially resolved detection of approaching and contact, use of the sensor module |
CN107677296A (en) * | 2017-09-25 | 2018-02-09 | 合肥工业大学 | A kind of Grazing condition is close to touch-pressure sensation sensor |
CN109163824A (en) * | 2018-10-10 | 2019-01-08 | 北京理工大学 | A kind of flexible electronic skin with tactile and close feel bimodulus perceptional function |
CN212254424U (en) * | 2020-07-29 | 2020-12-29 | 河北工业大学 | Flexible proximity sense and touch sense dual-mode sensor for robot |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113418553A (en) * | 2021-06-11 | 2021-09-21 | 深圳大学 | Multi-modal sensor, preparation method thereof and intelligent device |
CN113418553B (en) * | 2021-06-11 | 2023-05-30 | 深圳大学 | Multi-mode sensor, preparation method thereof and intelligent device |
CN113670484A (en) * | 2021-08-18 | 2021-11-19 | 吉林大学重庆研究院 | Flexible pressure sensor with complementary spiral structure, preparation method and application thereof |
CN113654703A (en) * | 2021-09-26 | 2021-11-16 | 太原理工大学 | Flexible sensing array for mechanical arm sensing and preparation and application methods thereof |
CN113739962A (en) * | 2021-09-30 | 2021-12-03 | 中国科学院重庆绿色智能技术研究院 | Multi-mechanism fusion electronic skin and preparation method thereof |
CN113739962B (en) * | 2021-09-30 | 2023-10-20 | 中国科学院重庆绿色智能技术研究院 | Multi-mechanism fusion electronic skin and preparation method thereof |
CN113970395A (en) * | 2021-11-16 | 2022-01-25 | 浙江大学 | Flexible sensor with contact and non-contact sensing functions and manufacturing method thereof |
CN114460650A (en) * | 2021-12-30 | 2022-05-10 | 北京大学 | Interdigital capacitor assembly and sensing device |
CN114347063A (en) * | 2022-01-26 | 2022-04-15 | 浙江大学 | Multi-mode expandable interactive flexible robot skin |
CN114347063B (en) * | 2022-01-26 | 2023-12-19 | 浙江大学 | Multi-mode expandable interactive flexible robot skin |
WO2023201877A1 (en) * | 2022-04-20 | 2023-10-26 | 慕思健康睡眠股份有限公司 | Flexible sensor and intelligent mat |
CN114993524A (en) * | 2022-05-31 | 2022-09-02 | 中国工商银行股份有限公司 | Construction method of pressure sensor, processor and electronic equipment |
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