CN113739962A - Multi-mechanism fusion electronic skin and preparation method thereof - Google Patents

Multi-mechanism fusion electronic skin and preparation method thereof Download PDF

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CN113739962A
CN113739962A CN202111160090.7A CN202111160090A CN113739962A CN 113739962 A CN113739962 A CN 113739962A CN 202111160090 A CN202111160090 A CN 202111160090A CN 113739962 A CN113739962 A CN 113739962A
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electrode
elastic material
material layer
artificial leather
conductive elastic
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CN113739962B (en
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魏大鹏
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Chongqing Institute of Green and Intelligent Technology of CAS
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Chongqing Institute of Green and Intelligent Technology of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • DTEXTILES; PAPER
    • D06TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06NWALL, FLOOR, OR LIKE COVERING MATERIALS, e.g. LINOLEUM, OILCLOTH, ARTIFICIAL LEATHER, ROOFING FELT, CONSISTING OF A FIBROUS WEB COATED WITH A LAYER OF MACROMOLECULAR MATERIAL; FLEXIBLE SHEET MATERIAL NOT OTHERWISE PROVIDED FOR
    • D06N3/00Artificial leather, oilcloth or other material obtained by covering fibrous webs with macromolecular material, e.g. resins, rubber or derivatives thereof
    • DTEXTILES; PAPER
    • D06TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06NWALL, FLOOR, OR LIKE COVERING MATERIALS, e.g. LINOLEUM, OILCLOTH, ARTIFICIAL LEATHER, ROOFING FELT, CONSISTING OF A FIBROUS WEB COATED WITH A LAYER OF MACROMOLECULAR MATERIAL; FLEXIBLE SHEET MATERIAL NOT OTHERWISE PROVIDED FOR
    • D06N3/00Artificial leather, oilcloth or other material obtained by covering fibrous webs with macromolecular material, e.g. resins, rubber or derivatives thereof
    • D06N3/0002Artificial leather, oilcloth or other material obtained by covering fibrous webs with macromolecular material, e.g. resins, rubber or derivatives thereof characterised by the substrate
    • DTEXTILES; PAPER
    • D06TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
    • D06NWALL, FLOOR, OR LIKE COVERING MATERIALS, e.g. LINOLEUM, OILCLOTH, ARTIFICIAL LEATHER, ROOFING FELT, CONSISTING OF A FIBROUS WEB COATED WITH A LAYER OF MACROMOLECULAR MATERIAL; FLEXIBLE SHEET MATERIAL NOT OTHERWISE PROVIDED FOR
    • D06N2211/00Specially adapted uses
    • D06N2211/12Decorative or sun protection articles
    • D06N2211/28Artificial leather

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  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electronic Switches (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention discloses a multi-mechanism fused electronic skin and a preparation method thereof, wherein the multi-mechanism fused electronic skin comprises artificial leather and a conductive elastic material layer, wherein the artificial leather is positioned right above the conductive elastic material layer; the upper surface of the artificial leather is printed with a first electrode, the lower surface of the artificial leather is provided with a second electrode, and the lower surface of the conductive elastic material layer is printed with a third electrode; when an external object is used as an electrode to be close to the first electrode, capacitive coupling is generated, so that capacitive sensing is generated, and the sensor is in a proximity sensing mode; the first electrode, the artificial leather and the second electrode form a capacitor, and when the capacitor is pressed and deformed, the capacitance between the first electrode and the second electrode changes, so that the capacitor is in a light touch sensing mode of the sensor; when the external pressure continues to increase, the second electrode is extruded to compress the conductive elastic material layer, the contact resistance and the resistance of the conductive elastic material layer change, and the resistance value between the second electrode and the third electrode changes, so that the piezoresistive pressure sensing mode of the sensor is realized.

Description

Multi-mechanism fusion electronic skin and preparation method thereof
Technical Field
The invention relates to the technical field of sensors, in particular to a multi-mechanism fusion electronic skin and a preparation method thereof.
Background
In the future, the robot puts higher requirements on safe anti-collision by facing to application requirements of system intellectualization, scene diversification and collaborative complexity. Most of the intelligent obstacle avoidance technologies (or safe collision avoidance) adopted by the existing robots are visual and proximity, the function of realizing collision avoidance by only visual is faced with the largest technical problem of how to solve visual blind areas and the problem that the response is relatively slow and untimely, and the proximity collision avoidance technologies are faced with the problems of distance measurement, accurate calculation of collision risk degree and incapability of timely safe response.
Chinese patent (No. CN212254424U) discloses a flexible proximity sense and touch dual-mode sensor for a robot, which comprises a first layer of flexible film, an elastic dielectric medium and a second layer of flexible film, wherein a first electrode is printed on the first layer of flexible film through conductive ink, a second electrode is printed on the second layer of flexible film through conductive ink, and the first electrode on the first layer of flexible film and the second electrode on the second layer of flexible film form a capacitor as a proximity sense sensor; when the external object directly applies pressure to the sensor, the elastic dielectric medium generates elastic deformation to be used as the touch sensor. However, if the proximity sensor and the pressure sensor are designed according to the three-layer type, the possibility of mutual interference exists; and the pressure sensing comprises a light touch mode and a heavy pressure mode, and the two modes have different requirements on the accuracy of the sensor.
Disclosure of Invention
Aiming at the problem that a skin sensor in the prior art is single in working mechanism, the invention provides a multi-mechanism fusion electronic skin and a preparation method thereof.
In order to achieve the purpose, the invention provides the following technical scheme:
a multi-mechanism fused electronic skin comprises artificial leather and a conductive elastic material layer, wherein the artificial leather is positioned right above the conductive elastic material layer; the upper surface of the artificial leather is printed with a first electrode, the lower surface of the artificial leather is provided with a second electrode, and the lower surface of the conductive elastic material layer is printed with a third electrode;
when an external object is used as an electrode to be close to the first electrode, capacitive coupling is generated, so that capacitive sensing is generated, and the capacitive sensing mode is a proximity sensing mode of the sensor; the first electrode, the artificial leather and the second electrode form a capacitor, and when the capacitor is pressed and deformed, the capacitance between the first electrode and the second electrode changes, which is a light touch sensing mode of the sensor; when the external pressure continues to increase, the second electrode is extruded, so that the conductive elastic material layer is compressed, the contact resistance and the resistance of the conductive elastic material layer are changed, and the resistance value between the second electrode and the third electrode is changed, which is a piezoresistive pressure sensing mode of the sensor.
Preferably, an isolation layer is arranged between the conductive elastic material layer and the second electrode, and the isolation layer is made of a non-conductive and elastic material.
Preferably, the first electrode is a carbon nanomaterial electrode.
Preferably, the artificial leather has an upper surface made of synthetic resin and a lower surface made of fiber textile.
Preferably, the conductive elastic material layer is a silica gel/rubber elastic polymer filled with carbon black, graphene and carbon nanotubes.
The invention also provides a preparation method of the multi-mechanism fusion electronic skin, which is used for preparing the multi-mechanism fusion electronic skin as claimed in any one of claims 1 to 5, and comprises the following steps:
s1: according to the following steps of 1: 4 or 1: 5, selecting a first yarn with a first carbonization power and a second yarn with a second carbonization power according to the weight ratio;
s2: blending the first yarn and the second yarn to form a third yarn, and then weaving the third yarn to obtain a fiber woven fabric;
s3: coating synthetic resin on the first surface of the fiber textile, and curing to obtain the artificial leather, wherein the first surface of the artificial leather is the synthetic resin, and the second surface is the fiber textile surface;
s4: printing a first electrode on the first surface of the artificial leather, and then carrying out focusing carbonization on the fiber woven fabric surface of the artificial leather by using a focusing laser with first carbonization power, namely irradiating laser on an area needing carbonization only, thereby forming a second electrode;
s5: and printing a third electrode on the first surface of the conductive elastic material layer, and then placing the second surface of the conductive elastic material layer printed with the third electrode right below the second electrode to form the multi-mechanism fusion electronic skin.
Preferably, in S1, the second power > the first power.
Preferably, in S3, the number of layers of the synthetic resin is at least 2, and the thickness is 0.5mm to 2 mm.
Preferably, in S5, the third electrode covers at least a projection area of the second electrode on the conductive elastic material layer.
Preferably, an isolation layer is arranged between the third electrode and the second electrode, and the isolation layer is made of a non-conductive and elastic material.
In summary, due to the adoption of the technical scheme, compared with the prior art, the invention at least has the following beneficial effects:
(1) the sensor with multi-mechanism fusion sensing is designed, the practicability and the sensing range of the sensor are improved through multiple sensing modes of proximity sensing, light touch and piezoresistive pressure, the accuracy and the measuring range are high, the sensor can be used for working in different scenes, and meanwhile when the sensor collides, the buffering and energy absorption effects can be provided for both colliding parties, so that damage is reduced.
(2) The invention provides that the lower surface of the artificial leather is a fiber textile, the first yarn in the artificial leather is easy to carbonize, and the carbonization laser power of the first yarn is lower than that of the second yarn. The laser power is set as the first yarn carbonization power, so that the yarn carbonization device has the advantage of low laser power, and can avoid the problems caused by overhigh carbonization temperature (the synthetic resin layer is denatured to change the mechanical properties such as flexibility, tensile fracture and the like, and the film of the synthetic resin layer is deformed and shrunk integrally); the second yarns are not carbonized in the laser treatment process, and the overall mechanical properties of the carbonized fiber braided fabric can be kept not to be obviously changed.
(3) The sensor mechanism is a piezoresistive mechanism under heavy pressure, and particularly, a separated contact resistance response mechanism is superposed with a conductive filled bulk resistance response mechanism, so that the sensitivity of the sensor is improved, more importantly, the linearity of the mechanical response of the sensor can be improved, and the measurement precision of the device under heavy pressure is improved.
Description of the drawings:
fig. 1 is a schematic view of a multi-mechanism fused e-skin according to an exemplary embodiment of the present invention.
Fig. 2 is a schematic diagram of a method for preparing a multi-mechanism fused e-skin according to an exemplary embodiment of the invention.
Fig. 3 is a schematic view of a second electrode of a face of a fiber fabric according to an exemplary embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to examples and embodiments. It should be understood that the scope of the above-described subject matter is not limited to the following examples, and any techniques implemented based on the disclosure of the present invention are within the scope of the present invention.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience of description and for simplicity of description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be construed as limiting the present invention.
Example 1
As shown in figure 1, the invention provides a multi-mechanism fused electronic skin, which comprises an artificial leather 2 and a conductive elastic material layer 5, wherein the artificial leather 2 and the conductive elastic material layer 5 are overlapped up and down, namely the artificial leather 2 is positioned right above the conductive elastic material layer 5. A first electrode 1 is printed on the upper surface of the artificial leather 2; a second electrode is provided on the lower surface (fiber textile face 3 of the artificial leather) of the artificial leather 2; a third electrode 6 is arranged on the lower surface of the conductive elastic material layer 5, and an isolating layer 4 is arranged between the conductive elastic material layer 5 and the second electrode. The material of the isolation layer 4 is non-conductive and elastic material, such as rubber, silicon gel, etc. The conductive elastic material layer 5 is a silica gel/rubber elastic polymer filled with carbon black, graphene and carbon nanotubes.
In this embodiment, the isolation layer 4 has a hollow structure, and cannot shield the contact between the second electrode and the conductive elastic material layer 5, otherwise, the piezoresistive pressure sensing mode fails. The isolation layer 4 serves to isolate the second electrode from the conductive elastic material layer 5, so that the area of the isolation layer 4 can be adaptively adjusted according to the size of the second electrode and the conductive elastic material layer 5, as long as it is ensured that the second electrode and the conductive elastic material layer 5 are not in contact under a normal state (without external pressure). The isolation layer 4 is preferentially set as a temperature sensing isolation layer for sensing the external temperature.
When an external threat factor (specifically, a substance with a capacitive characteristic, such as a human body, a ferrous object, or the like) is close to the first electrode 1 as one electrode, capacitive coupling occurs, so that a change in capacitance is generated, which is a proximity sensing mode of the sensor. In this embodiment, the capacitance variation signal can be captured by a capacitance acquisition circuit connected to the sensor.
The first electrode 1, the artificial leather 2 and the second electrode form a capacitor, and when the capacitor is deformed by pressing, the capacitance changes with the decrease of the distance between the first electrode 1 and the second electrode, which is a light touch sensing mode of the sensor. In this embodiment, the capacitance change signal may be captured by a capacitance acquisition circuit connected to the sensor.
When the external pressure continues to increase, the second electrode is squeezed, so that the conductive elastic material layer is compressed, the contact resistance (namely, the resistance generated after the second electrode is in contact with the conductive elastic material layer) and the self resistance of the conductive elastic material layer are changed, so that the resistance value between the second electrode and the third electrode is changed, and the sensor is in a piezoresistive pressure sensing mode. In this embodiment, the resistance value change signal can be captured by connecting the resistance acquisition circuit with the sensor.
The conductive elastic material layer 5 is a silica gel/rubber elastic polymer filled with carbon black, graphene and carbon nanotubes, and the thickness is 3-5 mm. Therefore, the conductive elastic material layer 5 has the functions of elastic buffering and energy absorption, and can play the roles of absorbing/buffering impact force and protecting the sensor and the internal circuit when the electronic skin collides with the outside.
In this embodiment, the first electrode 1 is a carbon nanomaterial electrode, and collects a capacitance change signal by a capacitive coupling principle.
In this embodiment, the third electrode 6 is a bottom electrode array.
In this embodiment, the integration level of the electronic skin is high, and the electronic skin can be applied to various scenes (robot skin); because three induction modes (approach sensation, light touch sensation and piezoresistive pressure) are adopted, the working range is wide, and two characteristics of high precision and wide measuring range are simultaneously covered.
In this embodiment, the working principle of the proximity sense + light touch + piezoresistive pressure sensing mode is as follows: when external threat factors (particularly substances with capacitance characteristics, such as human bodies, iron objects and the like) approach, the approach sensing mode firstly works and captures capacitance coupling signals, and the circuit control module acquires capacitance change signals; the external threat factors are generated when continuing to approach and finally contacting with the sensor, a light touch sensing mode (sensing range: 0.01 g-50 g) starts to work, the circuit control module collects capacitance change signals, and compared with the proximity sensing mode, the circuit control module has a priority system control right, and meanwhile, corresponding control functions are set according to different touch modes, such as: two fingers are closed and slide leftwards to represent that the two fingers move leftwards, and a single finger slides leftwards to represent that the two fingers return to a superior instruction and the like; when the external threat factor continues to contact with the sensor, the pressure is increased, the piezoresistive pressure sensing mode (the sensing range is 20 g-100 Kg) starts to work, and the circuit control module acquires a resistance change signal.
As shown in fig. 2, in this embodiment, a method for preparing a multi-mechanism fused electronic skin is provided, which specifically includes the following steps:
s1: according to the following steps of 1: 4 or 1: 5, a first yarn having a first carbonization power and a second yarn having a second carbonization power are selected. For example, the first yarn may have a weight of 20% of the total weight of the selected yarn and the second yarn may have a weight of 80% of the total weight of the selected yarn.
In this embodiment, the ratio of the first yarn to the second yarn can be adjusted, thereby adjusting the conductivity of the fiber weave.
S2: and blending the first yarn and the second yarn to obtain a third yarn, and then weaving the third yarn to obtain the fiber woven fabric.
The first yarn carbonization laser power is a first carbonization power, the second yarn carbonization laser power is a second carbonization power, and the second carbonization power is greater than the first carbonization power, for example, the first carbonization power is 6W, and the second carbonization power is 50W. I.e. the first yarn is carbonized at a low power, which has little effect on the physical properties of the first yarn, and the second yarn is carbonized at a high power, which increases the conductivity of the second yarn, but also destroys its own physical properties. The carbonization time is 30-60 min.
S3: coating synthetic resin (or mixed plastic additive) on the first surface of the fiber textile, and curing to obtain the artificial leather, wherein the first surface of the artificial leather is synthetic resin, and the second surface is a fiber textile surface; and then, focusing and carbonizing the fiber woven fabric surface of the artificial leather by using a focusing laser and the first carbonization power, namely, irradiating the laser on the area (such as an array area) needing carbonization only, thereby forming an arrayed second electrode, as shown in fig. 3.
In this embodiment, the synthetic resin is usually printed in more than 2 layers, and the thickness of the synthetic resin reaches a certain requirement (for example, 0.5mm to 2mm), so that the electrode can be conveniently printed, and if the thickness of the synthetic resin is not enough, the surface of the conductive blended fiber artificial leather is easily damaged when the electrode is printed.
In this embodiment, the advantage of performing focusing carbonization on the fiber woven fabric surface of the artificial leather by using the first carbonization power is that the laser power is low, and the problems caused by the excessively high carbonization temperature, such as the change of the mechanical properties of the synthetic resin layer, such as flexibility, tensile fracture, and the like, and the deformation and shrinkage of the film of the synthetic resin layer, can be avoided; meanwhile, the second yarns cannot be carbonized in the focusing carbonization treatment process (the carbonization power of the focusing carbonization is smaller than the second power corresponding to the second yarns), so that the overall mechanical property of the second yarns in the carbonized fiber braided fabric cannot be obviously changed, and the conductivity of the artificial leather can be guaranteed.
In this embodiment, the power P of the focusing laser is within the range that the first carbonization power is not less than P and less than the second carbonization power, so that only the first yarn in the fiber textile is carbonized, and the second yarn is not carbonized.
S4: printing a first electrode on a first surface (a surface coated with synthetic resin) of the artificial leather, wherein a second surface of the artificial leather is a second electrode;
s5: and printing a third electrode on the first surface (lower surface) of the conductive elastic material layer, and then placing the second surface (upper surface) of the conductive elastic material layer printed with the third electrode right below the second electrode to form the multi-mechanism fusion electronic skin. The third electrode can cover at least the projection area of the second electrode, so that the precision of the piezoresistive pressure mode can be improved.
In this embodiment, the conductive elastic material layer and the second electrode are provided with an isolation layer (made of a non-conductive and elastic material, such as rubber or silicone), that is, the conductive elastic material layer can be fixed by the isolation layer and the artificial leather.
In this embodiment, the third electrode is a bottom electrode array. The isolating layer is used for isolating the conductive elastic material layer from the second electrode, namely separating a light touch sensing mode from a piezoresistive pressure sensing mode, wherein the piezoresistive pressure sensing mode does not work when the external pressure is within the working range (0.01 g-50 g) of the light touch sensing mode, and the piezoresistive pressure sensing mode starts to work when the external pressure is increased (20 g-100 Kg). The piezoresistive pressure sensing mode is specifically a superposition of a separated contact resistance response mechanism (namely resistance generated by contact between the second electrode and the conductive elastic material layer) and a self resistance response mechanism of the conductive elastic material layer, so that not only is the sensitivity of the electronic skin improved, but also more importantly, the linearity of mechanical response of the electronic skin can be improved, and further, the measurement precision of the device under heavy pressure is improved.
In this embodiment, the proximity sensing mode works before the external object touches the electronic skin; when an external object touches or collides with the electronic skin, the working priority of the electronic skin is a piezoresistive pressure sensing mode > a light touch sensing mode > a proximity sensing mode.
In the embodiment, the multi-mechanism fused electronic skin can be arranged on the skin of the robot, and has a multi-mechanism sensing mode (approach sensation, light touch sensation and piezoresistive pressure), so that the working range is wide, the precision is high, the measuring range is wide, and the sensing capability of the robot to the outside is improved.
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.

Claims (10)

1. A multi-mechanism fused electronic skin is characterized by comprising artificial leather and a conductive elastic material layer, wherein the artificial leather is positioned right above the conductive elastic material layer; the upper surface of the artificial leather is printed with a first electrode, the lower surface of the artificial leather is provided with a second electrode, and the lower surface of the conductive elastic material layer is printed with a third electrode;
when an external object is used as an electrode to be close to the first electrode, capacitive coupling is generated, so that capacitive sensing is generated, and the capacitive sensing mode is a proximity sensing mode of the sensor; the first electrode, the artificial leather and the second electrode form a capacitor, and when the capacitor is pressed and deformed, the capacitance between the first electrode and the second electrode changes, which is a light touch sensing mode of the sensor; when the external pressure continues to increase, the second electrode is extruded, so that the conductive elastic material layer is compressed, the contact resistance and the resistance of the conductive elastic material layer are changed, and the resistance value between the second electrode and the third electrode is changed, which is a piezoresistive pressure sensing mode of the sensor.
2. The multi-mechanism-fused e-skin of claim 1, wherein a separation layer is disposed between the conductive elastic material layer and the second electrode, and the separation layer is a non-conductive and elastic material.
3. The multi-mechanism-fused e-skin of claim 1, wherein the first electrode is a carbon nanomaterial electrode.
4. The multi-mechanism-fused electronic skin as claimed in claim 1, wherein the artificial leather has an upper surface of synthetic resin and a lower surface of fiber textile.
5. The multi-mechanism-fused e-skin of claim 1, wherein the conductive elastic material layer is a silicone rubber or a rubber elastic polymer filled with carbon black, graphene, carbon nanotubes.
6. A method for preparing a multi-mechanism fusion electronic skin, which is used for preparing the multi-mechanism fusion electronic skin as claimed in any one of claims 1 to 5, and comprises the following steps:
s1: according to the following steps of 1: 4 or 1: 5, selecting a first yarn with a first carbonization power and a second yarn with a second carbonization power according to the weight ratio;
s2: blending the first yarn and the second yarn to form a third yarn, and then weaving the third yarn to obtain a fiber woven fabric;
s3: coating synthetic resin on the first surface of the fiber textile, and curing to obtain the artificial leather, wherein the first surface of the artificial leather is the synthetic resin, and the second surface is the fiber textile surface;
s4: printing a first electrode on the first surface of the artificial leather, and then adopting a focusing laser to focus and carbonize the fiber woven fabric surface of the artificial leather, namely irradiating laser on an area needing carbonization only, thereby forming a second electrode;
s5: and printing a third electrode on the first surface of the conductive elastic material layer, and then placing the second surface of the conductive elastic material layer printed with the third electrode right below the second electrode to form the multi-mechanism fusion electronic skin.
7. The method for preparing multi-mechanism fused e-skin as claimed in claim 6, wherein in S4, the power P of the focusing laser is such that: the first carbonization power is less than or equal to P and less than the second carbonization power.
8. The method for preparing a multi-mechanism fused e-skin as claimed in claim 6, wherein in S3, the number of layers of the synthetic resin is at least 2 and the thickness is 0.5mm to 2 mm.
9. The method for preparing multi-mechanism fusion electronic skin as claimed in claim 6, wherein in S5, the third electrode covers at least a projection area of the second electrode on the conductive elastic material layer.
10. The method for preparing the multi-mechanism fusion electronic skin as claimed in claim 9, wherein a separation layer is disposed between the third electrode and the second electrode, and the separation layer is made of a non-conductive and elastic material.
CN202111160090.7A 2021-09-30 2021-09-30 Multi-mechanism fusion electronic skin and preparation method thereof Active CN113739962B (en)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
CN115824269A (en) * 2023-02-14 2023-03-21 四川大学 Single-mode, self-adaptive and multifunctional flexible mechanical hybrid sensor

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CN109238519A (en) * 2018-10-22 2019-01-18 河北工业大学 A kind of hybrid flexible touch sensation sensor
CN208736580U (en) * 2018-10-22 2019-04-12 河北工业大学 A kind of hybrid flexible touch sensation sensor
CN110954251A (en) * 2019-12-24 2020-04-03 哈尔滨工业大学 Pressure-capacitance and piezoresistive coupling proximity sensing and contact force sensor
CN111735561A (en) * 2020-07-29 2020-10-02 河北工业大学 Flexible proximity sense and touch sense dual-mode sensor for robot

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Publication number Priority date Publication date Assignee Title
CN105606270A (en) * 2016-01-19 2016-05-25 合肥工业大学 Composite capacitor-resistor type full-flexibility touch and pressure sensor
CN109238519A (en) * 2018-10-22 2019-01-18 河北工业大学 A kind of hybrid flexible touch sensation sensor
CN208736580U (en) * 2018-10-22 2019-04-12 河北工业大学 A kind of hybrid flexible touch sensation sensor
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115824269A (en) * 2023-02-14 2023-03-21 四川大学 Single-mode, self-adaptive and multifunctional flexible mechanical hybrid sensor
CN115824269B (en) * 2023-02-14 2023-04-28 四川大学 Single-mode, self-adaptive and multifunctional flexible mechanical hybrid sensor

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