CN113146871A - 基板把持机构及基板加工装置 - Google Patents

基板把持机构及基板加工装置 Download PDF

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Publication number
CN113146871A
CN113146871A CN202011622553.2A CN202011622553A CN113146871A CN 113146871 A CN113146871 A CN 113146871A CN 202011622553 A CN202011622553 A CN 202011622553A CN 113146871 A CN113146871 A CN 113146871A
Authority
CN
China
Prior art keywords
substrate
gripping
claw
lower claw
gripped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011622553.2A
Other languages
English (en)
Chinese (zh)
Inventor
成尾徹
三浦三雄
得永直
土屋智章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN113146871A publication Critical patent/CN113146871A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
    • B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/02—Moulds with adjustable parts specially for modifying at will the dimensions or form of the moulded article
    • B28B7/04—Moulds with adjustable parts specially for modifying at will the dimensions or form of the moulded article one or more of the parts being pivotally mounted
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
CN202011622553.2A 2020-01-23 2020-12-30 基板把持机构及基板加工装置 Pending CN113146871A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-009193 2020-01-23
JP2020009193A JP7098172B2 (ja) 2020-01-23 2020-01-23 基板把持機構および基板加工装置

Publications (1)

Publication Number Publication Date
CN113146871A true CN113146871A (zh) 2021-07-23

Family

ID=76878181

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011622553.2A Pending CN113146871A (zh) 2020-01-23 2020-12-30 基板把持机构及基板加工装置

Country Status (4)

Country Link
JP (1) JP7098172B2 (ja)
KR (1) KR20210095557A (ja)
CN (1) CN113146871A (ja)
TW (1) TW202130484A (ja)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1640256A (en) * 1925-09-11 1927-08-23 Shirley E Small Tool
JP4464961B2 (ja) * 2004-03-15 2010-05-19 三星ダイヤモンド工業株式会社 基板分断システム、基板製造装置、基板スクライブ方法および基板分断方法
JP2006297521A (ja) * 2005-04-19 2006-11-02 Kawamura Seiki Kk 板材の溝加工装置
JP2008166348A (ja) * 2006-12-27 2008-07-17 Olympus Corp 基板搬送装置
JP5471111B2 (ja) * 2009-07-21 2014-04-16 株式会社ニコン 反転装置および基板貼り合わせ装置
JP2011073875A (ja) * 2009-10-02 2011-04-14 Sharp Corp 搬送方法
JP6439379B2 (ja) * 2014-10-24 2018-12-19 三星ダイヤモンド工業株式会社 基板加工装置
JP2019064118A (ja) * 2017-09-29 2019-04-25 三星ダイヤモンド工業株式会社 基板加工装置
KR20190109841A (ko) * 2018-03-19 2019-09-27 한국미쯔보시다이아몬드공업(주) 자동 두께 제어 척

Also Published As

Publication number Publication date
JP2021115723A (ja) 2021-08-10
JP7098172B2 (ja) 2022-07-11
KR20210095557A (ko) 2021-08-02
TW202130484A (zh) 2021-08-16

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