CN113029213A - 具有隔离的光学编码器的机器人驱动器 - Google Patents

具有隔离的光学编码器的机器人驱动器 Download PDF

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Publication number
CN113029213A
CN113029213A CN202110250264.2A CN202110250264A CN113029213A CN 113029213 A CN113029213 A CN 113029213A CN 202110250264 A CN202110250264 A CN 202110250264A CN 113029213 A CN113029213 A CN 113029213A
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CN
China
Prior art keywords
housing
frame
aperture
seal
environmental
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202110250264.2A
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English (en)
Chinese (zh)
Inventor
D·普尔
M·霍塞克
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Persimmon Technologies Corp
Original Assignee
Persimmon Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Persimmon Technologies Corp filed Critical Persimmon Technologies Corp
Publication of CN113029213A publication Critical patent/CN113029213A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/22—Optical devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/245—Housings for sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24—Housings ; Casings for instruments
    • G01D11/26—Windows; Cover glasses; Sealings therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/1004—Structural association with clutches, brakes, gears, pulleys or mechanical starters with pulleys
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/19—Drive system for arm
    • Y10S901/23—Electric motor

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Studio Devices (AREA)
  • Optical Transform (AREA)
  • Manipulator (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
CN202110250264.2A 2016-03-21 2017-03-21 具有隔离的光学编码器的机器人驱动器 Pending CN113029213A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662310989P 2016-03-21 2016-03-21
US62/310,989 2016-03-21
CN201780001408.2A CN107534364B (zh) 2016-03-21 2017-03-21 具有隔离的光学编码器的机器人驱动器

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201780001408.2A Division CN107534364B (zh) 2016-03-21 2017-03-21 具有隔离的光学编码器的机器人驱动器

Publications (1)

Publication Number Publication Date
CN113029213A true CN113029213A (zh) 2021-06-25

Family

ID=59900683

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202110250264.2A Pending CN113029213A (zh) 2016-03-21 2017-03-21 具有隔离的光学编码器的机器人驱动器
CN201780001408.2A Active CN107534364B (zh) 2016-03-21 2017-03-21 具有隔离的光学编码器的机器人驱动器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201780001408.2A Active CN107534364B (zh) 2016-03-21 2017-03-21 具有隔离的光学编码器的机器人驱动器

Country Status (4)

Country Link
JP (2) JP6985933B2 (ja)
KR (2) KR20220134041A (ja)
CN (2) CN113029213A (ja)
WO (1) WO2017165401A1 (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1479077A (zh) * 2002-07-16 2004-03-03 ������������ʽ���� 可在绝对位置传感器中使用的改进的定标结构和方法
CN1531170A (zh) * 2003-02-10 2004-09-22 ��ǿ�ʽ 带有编码器的电动机
US20080156973A1 (en) * 2006-12-29 2008-07-03 Weng Fei Wong Photosensor array for optical encoder
CN102106062A (zh) * 2007-06-27 2011-06-22 布鲁克斯自动化公司 带有磁性转轴轴承的机器人驱动
CN103930363A (zh) * 2011-09-16 2014-07-16 柿子技术公司 具有被动转子的机器人驱动器

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JPS6132663U (ja) * 1984-07-30 1986-02-27 石川島播磨重工業株式会社 耐圧窓の取付構造
JPH06300587A (ja) * 1993-04-16 1994-10-28 Yaskawa Electric Corp 真空用光学式位置検出装置および方法
JP3431548B2 (ja) * 1999-02-10 2003-07-28 ソニー株式会社 ロボット装置及びその制御方法
US7575406B2 (en) 2002-07-22 2009-08-18 Brooks Automation, Inc. Substrate processing apparatus
JP2004163202A (ja) 2002-11-12 2004-06-10 Yaskawa Electric Corp 真空用位置検出器
JP4930050B2 (ja) * 2006-12-28 2012-05-09 日本精工株式会社 ダイレクトドライブモータ
KR101532060B1 (ko) * 2007-06-27 2015-06-26 브룩스 오토메이션 인코퍼레이티드 셀프 베어링 모터를 위한 위치 피드백
EP2116814B1 (de) 2008-05-09 2014-06-25 Siemens Aktiengesellschaft Messeinrichtung zur Ermittlung einer Lage und/oder einer Geschwindigkeit
US8000212B2 (en) * 2009-12-15 2011-08-16 Cymer, Inc. Metrology for extreme ultraviolet light source
EP2381222A1 (de) 2010-04-22 2011-10-26 Schneeberger Holding AG Führungssystem mit relativ zueinander bewegbaren Körpern und Vorrichtung zur Bestimmung einer Position mittels optischem Abtasten einer Massskala.
JP2013038964A (ja) * 2011-08-09 2013-02-21 Ulvac Japan Ltd 位置検出器および真空モータ
KR20230084597A (ko) * 2011-09-16 2023-06-13 퍼시몬 테크놀로지스 코포레이션 운송 장치 및 이를 포함하는 처리 장치
JP5806603B2 (ja) 2011-11-30 2015-11-10 株式会社Ｓｃｒｅｅｎホールディングス アライメント装置
JP6118102B2 (ja) 2012-12-21 2017-04-19 東京エレクトロン株式会社 基板位置検出装置及びこれを用いた基板処理装置、成膜装置
JP6132663B2 (ja) 2013-06-03 2017-05-24 レンゴー株式会社 胴膨れ防止段ボール箱
JP6300587B2 (ja) 2014-03-17 2018-03-28 オリンパス株式会社 超音波ステージ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1479077A (zh) * 2002-07-16 2004-03-03 ������������ʽ���� 可在绝对位置传感器中使用的改进的定标结构和方法
CN1531170A (zh) * 2003-02-10 2004-09-22 ��ǿ�ʽ 带有编码器的电动机
US20080156973A1 (en) * 2006-12-29 2008-07-03 Weng Fei Wong Photosensor array for optical encoder
CN102106062A (zh) * 2007-06-27 2011-06-22 布鲁克斯自动化公司 带有磁性转轴轴承的机器人驱动
CN103930363A (zh) * 2011-09-16 2014-07-16 柿子技术公司 具有被动转子的机器人驱动器

Also Published As

Publication number Publication date
KR20220134041A (ko) 2022-10-05
JP6985933B2 (ja) 2021-12-22
CN107534364B (zh) 2021-03-26
JP7455794B2 (ja) 2024-03-26
WO2017165401A1 (en) 2017-09-28
JP2022024140A (ja) 2022-02-08
KR20180125434A (ko) 2018-11-23
KR102447015B1 (ko) 2022-09-23
CN107534364A (zh) 2018-01-02
JP2019512663A (ja) 2019-05-16

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