CN112904053A - Probe clamp and probe inserting and holding equipment - Google Patents
Probe clamp and probe inserting and holding equipment Download PDFInfo
- Publication number
- CN112904053A CN112904053A CN202110153656.7A CN202110153656A CN112904053A CN 112904053 A CN112904053 A CN 112904053A CN 202110153656 A CN202110153656 A CN 202110153656A CN 112904053 A CN112904053 A CN 112904053A
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- probe
- angle
- suction
- extension arm
- suction nozzle
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- 239000000523 sample Substances 0.000 title claims abstract description 119
- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 238000001179 sorption measurement Methods 0.000 claims description 14
- 239000003351 stiffener Substances 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 12
- 230000003014 reinforcing effect Effects 0.000 description 6
- 230000006872 improvement Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0425—Test clips, e.g. for IC's
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a probe clamp and a probe inserting and holding device, wherein the probe clamp comprises: a pose adjusting mechanism; the suction nozzle is arranged on the posture adjusting mechanism, and the posture adjusting mechanism is used for adjusting the position and the angle of the suction nozzle; the suction nozzle is used for adsorbing the probe; the pose adjusting mechanism comprises a first angle adjusting piece, a second angle adjusting piece and a bracket; the suction nozzle is arranged on the second angle adjusting piece, and the angle of the suction nozzle can be adjusted by the second angle adjusting piece; the second angle adjusting piece is arranged on the support, the support is arranged on the first angle adjusting piece, and the first angle adjusting piece can drive the support, the second angle adjusting piece and the suction nozzle to rotate together. The probe clamp can realize the suction of the probe in a pneumatic control mode, can automatically adjust the position and the angle of the probe, and is not easy to damage the probe in the grabbing and moving process of the probe.
Description
Technical Field
The invention relates to the field of wafer testing, in particular to a probe clamp and probe inserting equipment.
Background
In the semiconductor wafer testing stage, unpackaged chips on a wafer need to be tested, and probes are used in the testing process. The probe used on the probe card belongs to a high-precision probe, the equivalent diameter of the probe is generally within the range of 30-100 um, the probe is characterized by small size, is fragile and is easy to scratch or damage, but in order to carry out testing, the probe needs to be installed in a ceramic hole in the manufacturing process of the probe card, the installation process is complex, at present, a manufacturing factory still uses workers to clamp the probe, and then the probe is installed in the hole after posture adjustment.
It should be noted that the main disadvantages of manual operation are as follows: firstly, the clamping force is unstable, and the probe is easily scratched or damaged; secondly, the stability of manual operation is poor, and the needle is easy to damage in the transferring process; thirdly, the operator is easily fatigued and the needle-implanting efficiency is limited.
In view of the foregoing, there is a need for an improvement in existing probe gripping methods.
Disclosure of Invention
In view of the above technical problems, an object of the present invention is to provide a probe clamp and a probe inserting and holding apparatus, in which the probe clamp can suck the probe in a pneumatic control manner, and can automatically adjust the position and angle of the probe, so that the probe is not easily damaged during the grabbing and moving process of the probe.
In order to achieve the above object, an object of the present invention is to provide a probe holder including:
a pose adjusting mechanism;
the suction nozzle is arranged on the posture adjusting mechanism, and the posture adjusting mechanism is used for adjusting the position and the angle of the suction nozzle; the suction nozzle is used for adsorbing the probe.
Preferably, the posture adjustment mechanism includes a first angle adjustment member, a second angle adjustment member, and a bracket; the suction nozzle is arranged on the second angle adjusting piece, and the angle of the suction nozzle can be adjusted by the second angle adjusting piece; the second angle adjusting piece is mounted on the bracket, the bracket is mounted on the first angle adjusting piece, and the first angle adjusting piece can drive the bracket, the second angle adjusting piece and the suction nozzle to rotate together; the first angle adjusting piece is used for adjusting the angle of the suction nozzle in a first plane, the second angle adjusting piece is used for adjusting the angle of the suction nozzle in a second plane, and a preset included angle is formed between the first plane and the second plane.
Preferably, the bracket comprises a first extension arm and a second extension arm, the first extension arm is connected to the second extension arm, and a preset included angle is formed between the first extension arm and the second extension arm; the second angle adjustment member is mounted to the second extension arm, and the first extension arm is mounted to the first angle adjustment member.
Preferably, the bracket further comprises a corner reinforcing rib, the corner reinforcing rib is located at the junction of the first extension arm and the second extension arm, and one end of the corner reinforcing rib is connected to the first extension arm and the other end is connected to the second extension arm.
Preferably, the second angle adjuster is a second rotary motor, the suction nozzle is mounted to a power output shaft of the second rotary motor, and the second rotary motor is mounted to the second extension arm.
Preferably, the first angle adjuster is a first rotary motor, and the first extension arm is mounted to a power output shaft of the first angle adjuster.
Preferably, the suction nozzle comprises a suction pipe, a suction head and an inlet and outlet joint, the high end of the suction pipe is mounted on the power output shaft of the second rotary motor, the suction head is mounted on the low end of the suction pipe and is mounted on the side wall of the suction pipe, and the suction pipe is communicated with the inlet and outlet joint and the suction head; wherein the suction head is provided with an adsorption hole for adsorbing the probe.
Preferably, the joint of the suction head and the suction pipe is provided with a gap, and the gap forms an auxiliary adsorption hole.
Preferably, the number of the auxiliary adsorption holes is multiple, and the multiple auxiliary adsorption holes surround the periphery of the suction head.
According to another aspect of the present invention, the present invention further provides a probe holding apparatus comprising:
an apparatus main body;
the moving arm is arranged on the equipment main body, and the equipment main body can adjust the horizontal position and the vertical position of the moving end of the moving arm;
the probe holder according to any one of the above claims, wherein a posture adjustment mechanism of the probe holder is attached to the movable end of the movable arm.
Compared with the prior art, the probe clamp and the probe inserting and holding equipment provided by the invention have the following beneficial effects:
1. according to the probe clamp and the probe inserting and holding device provided by the invention, the probe clamp can realize the suction of the probe in a pneumatic control mode, and can automatically adjust the position and the angle of the probe, so that the probe is not easily damaged in the processes of grabbing and moving the probe;
2. according to the probe clamp and the probe inserting and holding equipment provided by the invention, the periphery of the adsorption hole of the suction nozzle of the probe clamp is also provided with the auxiliary adsorption hole, so that the adsorption area of the suction head can be increased through the auxiliary adsorption hole, and the adsorption efficiency and the adsorption stability of the probe are improved.
Drawings
The above features, technical features, advantages and modes of realisation of the present invention will be further described in the following detailed description of preferred embodiments thereof, which is to be read in connection with the accompanying drawings.
FIG. 1 is a perspective view of a first perspective of a probe fixture of a preferred embodiment of the present invention;
FIG. 2 is a perspective view of a probe fixture from a second perspective in accordance with a preferred embodiment of the present invention;
FIG. 3 is an exploded view of the probe holder of the preferred embodiment of the present invention;
FIG. 4 is a perspective view of a suction nozzle of the probe fixture of the preferred embodiment of the present invention;
fig. 5 is a bottom view of the probe holder of the preferred embodiment of the present invention.
The reference numbers illustrate:
the posture adjusting mechanism 1, a first angle adjusting piece 11, a second angle adjusting piece 12, a support 13, a first extension arm 131, a second extension arm 132, a corner reinforcing rib 133, a suction nozzle 2, a suction pipe 21, a high end portion 211, a low end portion 212, a suction head 22, a suction hole 220, an auxiliary suction hole 221 and an in-out joint 23.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following description will be made with reference to the accompanying drawings. It is obvious that the drawings in the following description are only some examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be derived from them without inventive effort.
For the sake of simplicity, only the parts relevant to the invention are schematically shown in the drawings, and they do not represent the actual structure as a product. In addition, in order to make the drawings concise and understandable, components having the same structure or function in some of the drawings are only schematically illustrated or only labeled. In this document, "one" means not only "only one" but also a case of "more than one".
It should be further understood that the term "and/or" as used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.
In this context, it is to be understood that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, in the description of the present application, the terms "first", "second", and the like are used only for distinguishing the description, and are not intended to indicate or imply relative importance.
Example 1
Referring to the accompanying drawings 1 to 5 of the specification, the probe clamp provided by the invention is illustrated, the probe clamp can realize the suction of the probe in a pneumatic control mode, can automatically adjust the position and the angle of the probe, and is not easy to damage the probe in the process of the grabbing and moving of the probe. The probe clamp provided by the invention can solve the technical problems that the clamping force is unstable in the manual taking and placing process of the probe, the probe is easy to scratch or damage, the stability of manual operation is poor, the probe is easy to damage in the transferring process, an operator is easy to fatigue, the needle planting efficiency is limited and the like.
Referring to the attached drawings 1 and 2 of the specification, specifically, the probe jig includes a posture adjustment mechanism 1 and a suction nozzle 2. The suction nozzle 2 is arranged on the posture adjusting mechanism 1, and the posture adjusting mechanism 1 is used for adjusting the position and the angle of the suction nozzle 2; the suction nozzle 2 is used for sucking a probe.
In the present invention, the probe can be sucked, that is, can be grasped, by the suction nozzle 2. The posture adjusting mechanism 1 can adjust the position and the angle of the suction nozzle 2, that is, can adjust the angle of the probe adsorbed by the suction nozzle 2, so as to adjust the probe to a proper position and angle.
In the using process of the adsorption probe provided by the invention, a probe to be grabbed is horizontally placed, the posture adjusting mechanism 1 and the suction nozzle 2 are adjusted to be above the probe through mechanical control, and the suction nozzle 2 is enabled to be opposite to the probe; then adjusting the suction nozzle 2 to a proper height, opening an electromagnetic valve, and ventilating the suction nozzle to suck the probe; after the suction nozzle 2 adsorbs the probe, the position and angle of the probe are adjusted to be proper by the posture adjusting mechanism 1.
Referring to fig. 1, 2, and 3 of the specification, further, the posture adjustment mechanism 1 includes a first angle adjustment member 11, a second angle adjustment member 12, and a bracket 13; the suction nozzle 2 is mounted on the second angle adjusting piece 12, and the angle of the suction nozzle 2 can be adjusted by the second angle adjusting piece 12; the second angle adjusting part 12 is mounted on the bracket 13, the bracket 13 is mounted on the first angle adjusting part 11, and the first angle adjusting part 11 can drive the bracket 13, the second angle adjusting part 12 and the suction nozzle 2 to rotate together; the first angle adjusting part 11 is used for adjusting the angle of the suction nozzle 2 in a first plane, the second angle adjusting part is used for adjusting the angle of the suction nozzle 2 in a second plane, and a preset included angle is formed between the first plane and the second plane.
It should be noted that the first angle adjusting part 11 can control the suction nozzle 2 to rotate in a first plane to adjust the angle of the suction nozzle 2 in the first plane; the second angle adjusting part 12 can control the bracket 13 and the second angle adjusting part 12 to rotate in the second plane so as to adjust the angle of the suction nozzle 2 in the second plane.
Preferably, the first plane is perpendicular to the second plane. Alternatively, the angle between the first plane and the second plane can also be other angles from 0 to 180 °, such as 45 ° or 135 °, and the specific angle between the first plane and the second plane should not be construed as limiting the invention.
Referring to the description of fig. 1, 2 and 3, the bracket 13 includes a first extension arm 131 and a second extension arm 132, the first extension arm 131 is connected to the second extension arm 132, and the first extension arm 131 and the second extension arm 132 have a predetermined included angle therebetween; the second angle adjusting member 12 is installed at the second extension arm 132, and the first extension arm 131 is installed at the first angle adjusting member 11.
Referring to fig. 3 of the specification, the included angle between the first extension arm 131 and the second extension arm 132 is 90 °. Optionally, the included angle between the first extension arm 131 and the second extension arm 132 is other angles of 0-180 °, such as 35 ° or 135 °. The size of the specific angle between the first extension arm 131 and the second extension arm 132 should not be construed as limiting the invention.
Preferably, the first extension arm 131 is parallel to the first plane and the second extension arm 132 is parallel to the second plane.
Referring to fig. 1, 2 and 3 of the specification, the bracket 13 further includes a corner stiffener 133, the corner stiffener 133 is located at a junction of the first extension arm 131 and the second extension arm 132, and one end of the corner stiffener 133 is connected to the first extension arm 131 and the other end is connected to the second extension arm 132.
It should be noted that the corner reinforcing ribs 133 are distributed in a triangular shape with the first extension arm 131 and the second extension arm 132, and the corner reinforcing ribs 133 can improve the connection strength between the first extension arm 131 and the second extension arm 132, so as to improve the connection stability.
Preferably, the second angle adjustment member 12 is a second rotary motor, the suction nozzle 2 is mounted to a power output shaft of the second rotary motor, and the second rotary motor is mounted to the second extension arm 132.
Alternatively, the first angle adjuster 11 and the second angle adjuster 12 can also be manual wheels, or other rotating control elements, and the specific types of the first angle adjuster 11 and the second angle adjuster 12 should not be construed as limiting the invention.
The second rotation motor is fixedly mounted to the second extension arm 132, and the second extension arm 132 can provide support for the second rotation motor. The suction nozzle 2 is mounted to the power take-off shaft of the second rotary motor, and when the rotation angle of the power take-off shaft of the second rotary motor changes, the angle of the suction nozzle 2 mounted to the power take-off shaft of the second rotary motor also changes accordingly.
Further, the first angle adjuster 11 is a first rotating motor, and the first extension arm 131 is mounted to a power output shaft of the first angle adjuster 11. When the first rotating motor works, the first rotating motor can drive the first extending arm 131, the second extending arm 132, the second angle adjusting member 12 and the suction nozzle 2 to rotate together in a first plane, so as to adjust the angle of the probe adsorbed by the suction nozzle 2 in the first plane.
Referring to fig. 4 and 5 of the specification, the suction nozzle 2 includes a suction pipe 21, a suction head 22, and an access joint 23, a high end portion 211 of the suction pipe 21 is mounted to a power output shaft of the second rotary motor, the suction head 22 is mounted to a low end portion 212 of the suction pipe 21, the access joint 23 is mounted to a side wall of the suction pipe 21, and the suction pipe 21 communicates with the access joint 23 and the suction head 22; wherein the suction head 22 has a suction hole 220 for sucking the probe.
The in-and-out joint 23 of the suction nozzle 2 is connected to an external pneumatic control device, and when air is sucked through the external pneumatic control device, the probe can be adsorbed to the adsorption hole 220 of the suction head 22; the probe can be disconnected from the tip 22 when the access connector 23 is inflated or the aspiration is stopped by the external pneumatic control device.
An electromagnetic valve is further arranged between the inlet and outlet joint 23 and the external pneumatic control equipment, and the electromagnetic valve can control the opening and closing of the pneumatic control equipment and the air supply direction of the pneumatic control equipment.
Referring to the description of fig. 4 and 5, the suction head 22 is connected with the suction pipe 21 with a gap, and the gap forms an auxiliary suction hole 221.
Preferably, the number of the auxiliary suction holes 221 is plural, and a plurality of the auxiliary suction holes 221 surround the suction head 22. It should be noted that, a plurality of the auxiliary suction holes 221 surround the periphery of the suction head 22, during the probe suction process, the plurality of the auxiliary suction holes 221 can suck the probe to the position of the suction head 22, and the suction holes 220 on the suction head 22 suck the probe to the suction holes 220. The auxiliary suction holes 221 and the suction holes 220 are matched with each other, so that the suction area of the suction head 22 can be increased, and the suction efficiency of the probe can be improved.
Alternatively, in other preferred embodiments of the present invention, the auxiliary suction holes 221 can also be formed on the bottom end surface of the suction head 22, i.e. on the same end surface as the suction holes 220, and surround the suction holes 220.
In the using process of the probe clamp provided by the invention, the probe is horizontally placed; then the probe clamp is moved to the position above the probe in a mechanical control mode, and the sucker 22 is positioned above the probe and is adjusted to the proper height; opening the electromagnetic valve, the suction head 22 sucks the probe through the air flow, and the probe is stably adsorbed to the adsorption hole 220 of the suction head 22; controlling the first angle adjusting piece 11 to rotate by 90 degrees so as to move the probe to a vertical plane; the second angle adjusting part 12 is controlled to rotate, and the angle of the probe is adjusted through visual recognition, so that the probe is perpendicular to the horizontal plane.
Example 2
According to another aspect of the present invention, there is further provided a probe inserting apparatus including an apparatus main body, a moving arm, and the probe holder described in embodiment 1 above. The movable arm is arranged on the equipment main body, and the horizontal position and the vertical position of the movable end of the movable arm can be adjusted by the equipment main body; the posture adjusting mechanism of the probe clamp is arranged at the movable end of the movable arm.
In the using process of the probe inserting and holding device provided by the invention, the position and the height of the probe clamp can be adjusted through the moving arm, so that the probe clamp can move to a proper height above a probe to be clamped.
It should be noted that the above embodiments can be freely combined as necessary. The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.
Claims (10)
1. The probe anchor clamps, its characterized in that includes:
a pose adjusting mechanism;
the suction nozzle is arranged on the posture adjusting mechanism, and the posture adjusting mechanism is used for adjusting the position and the angle of the suction nozzle; the suction nozzle is used for adsorbing the probe.
2. The probe holder of claim 1, wherein the attitude adjustment mechanism includes a first angle adjuster, a second angle adjuster, and a bracket; the suction nozzle is arranged on the second angle adjusting piece, and the angle of the suction nozzle can be adjusted by the second angle adjusting piece; the second angle adjusting piece is mounted on the bracket, the bracket is mounted on the first angle adjusting piece, and the first angle adjusting piece can drive the bracket, the second angle adjusting piece and the suction nozzle to rotate together; the first angle adjusting piece is used for adjusting the angle of the suction nozzle in a first plane, the second angle adjusting piece is used for adjusting the angle of the suction nozzle in a second plane, and a preset included angle is formed between the first plane and the second plane.
3. The probe holder of claim 2, wherein the support comprises a first extension arm and a second extension arm, the first extension arm being connected to the second extension arm and the first extension arm and the second extension arm having a predetermined included angle therebetween; the second angle adjustment member is mounted to the second extension arm, and the first extension arm is mounted to the first angle adjustment member.
4. The probe holder of claim 3, wherein the bracket further comprises a corner stiffener located at the junction of the first extension arm and the second extension arm, and wherein the corner stiffener is connected at one end to the first extension arm and at the other end to the second extension arm.
5. The probe holder of claim 2, wherein the second angle adjuster is a second rotary motor, the suction nozzle is mounted to a power output shaft of the second rotary motor, and the second rotary motor is mounted to the second extension arm.
6. The probe holder of claim 5, wherein the first angle adjuster is a first rotary motor, the first extension arm being mounted to a power take-off shaft of the first angle adjuster.
7. The probe holder of any one of claims 1 to 6, wherein the suction nozzle comprises a suction tube, a suction head, and an access joint, a high end portion of the suction tube is mounted to a power output shaft of the second rotary motor, the suction head is mounted to a low end portion of the suction tube, is mounted to a side wall of the suction tube, and the suction tube communicates with the access joint and the suction head; wherein the suction head is provided with an adsorption hole for adsorbing the probe.
8. The probe holder of claim 7, wherein the joint of the suction head and the pipette has a gap, the gap forming an auxiliary suction hole.
9. The probe holder of claim 8, wherein the number of the auxiliary suction holes is plural, and the plural auxiliary suction holes are formed around the circumference of the suction head.
10. A probe insertion device, comprising:
an apparatus main body;
the moving arm is mounted on the equipment main body, and the equipment main body can adjust the horizontal position and the vertical position of the movable end of the moving arm;
the probe fixture of any of claims 1-9, the probe fixture's pose adjustment mechanism being mounted to the movable end of the moving arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110153656.7A CN112904053A (en) | 2021-02-04 | 2021-02-04 | Probe clamp and probe inserting and holding equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110153656.7A CN112904053A (en) | 2021-02-04 | 2021-02-04 | Probe clamp and probe inserting and holding equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112904053A true CN112904053A (en) | 2021-06-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110153656.7A Pending CN112904053A (en) | 2021-02-04 | 2021-02-04 | Probe clamp and probe inserting and holding equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112904053A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116986310A (en) * | 2023-09-27 | 2023-11-03 | 武汉精毅通电子技术有限公司 | Cantilever probe transfer structure and processing method |
| CN117002951A (en) * | 2023-10-07 | 2023-11-07 | 武汉精毅通电子技术有限公司 | Transfer device of cantilever probe |
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| CN108724232A (en) * | 2017-04-17 | 2018-11-02 | 中华精测科技股份有限公司 | Micron fine needle suction device and use method thereof |
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| TWI668452B (en) * | 2018-07-04 | 2019-08-11 | 中華精測科技股份有限公司 | Vacuum pick-and-place device of micro needle and pin |
| CN110514881A (en) * | 2019-09-09 | 2019-11-29 | 上海泽丰半导体科技有限公司 | A kind of novel probe platform and PCB test method |
| TWM592969U (en) * | 2019-08-13 | 2020-04-01 | 頌欣機械有限公司 | Automatic probe pick-and-place apparatus and automatic probe pick-and-place machine |
| CN111398789A (en) * | 2020-04-28 | 2020-07-10 | 天津蓝鳍科技有限公司 | Probe card fine-tuning device, coupling device and method for photonic integrated chip test system |
| CN112234008A (en) * | 2020-09-03 | 2021-01-15 | 北京烁科精微电子装备有限公司 | Clamping and conveying mechanism for wafer and CMP polishing equipment |
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2021
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108724232A (en) * | 2017-04-17 | 2018-11-02 | 中华精测科技股份有限公司 | Micron fine needle suction device and use method thereof |
| TWI668452B (en) * | 2018-07-04 | 2019-08-11 | 中華精測科技股份有限公司 | Vacuum pick-and-place device of micro needle and pin |
| CN208575742U (en) * | 2018-07-07 | 2019-03-05 | 无锡鼎闰精密机械有限公司 | Testing probe template group quick-speed jigs |
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| CN110514881A (en) * | 2019-09-09 | 2019-11-29 | 上海泽丰半导体科技有限公司 | A kind of novel probe platform and PCB test method |
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| CN112234008A (en) * | 2020-09-03 | 2021-01-15 | 北京烁科精微电子装备有限公司 | Clamping and conveying mechanism for wafer and CMP polishing equipment |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116986310A (en) * | 2023-09-27 | 2023-11-03 | 武汉精毅通电子技术有限公司 | Cantilever probe transfer structure and processing method |
| CN116986310B (en) * | 2023-09-27 | 2023-12-29 | 武汉精毅通电子技术有限公司 | Cantilever probe transfer structure and processing method |
| CN117002951A (en) * | 2023-10-07 | 2023-11-07 | 武汉精毅通电子技术有限公司 | Transfer device of cantilever probe |
| CN117002951B (en) * | 2023-10-07 | 2023-12-12 | 武汉精毅通电子技术有限公司 | Transfer device of cantilever probe |
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