CN117002951A - Transfer device of cantilever probe - Google Patents
Transfer device of cantilever probe Download PDFInfo
- Publication number
- CN117002951A CN117002951A CN202311277929.4A CN202311277929A CN117002951A CN 117002951 A CN117002951 A CN 117002951A CN 202311277929 A CN202311277929 A CN 202311277929A CN 117002951 A CN117002951 A CN 117002951A
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- Prior art keywords
- needle
- cantilever
- pressing block
- probe
- adsorption head
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- 239000000523 sample Substances 0.000 title claims abstract description 103
- 238000012546 transfer Methods 0.000 title claims abstract description 53
- 238000003825 pressing Methods 0.000 claims abstract description 62
- 238000001179 sorption measurement Methods 0.000 claims abstract description 36
- 230000007423 decrease Effects 0.000 claims description 4
- 238000012545 processing Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 13
- 230000008569 process Effects 0.000 abstract description 13
- 238000010586 diagram Methods 0.000 description 7
- 239000002390 adhesive tape Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/041—Camera
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/042—Sensors
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a transfer device of a cantilever probe, and belongs to the technical field of probes. The transfer device comprises a transfer unit and a contact pin assembly, the contact pin assembly comprises an adsorption head, a needle pressing block and a swing table, the bottom of the adsorption head is of a conical structure, the bottom surface of the adsorption head is provided with arc grooves matched with needle bars of cantilever probes, two ends of the arc grooves extend along straight lines and penetrate the adsorption head, an adsorption channel is arranged in the adsorption head and communicated with the arc grooves, the bottom surface of the needle pressing block is used for propping against the outer walls of the needle bars of the cantilever probes, the adsorption head and the needle pressing block are arranged at intervals at the output end of the swing table, and the transfer unit is used for driving the swing table to translate and lift in space. The transfer device of the cantilever probe provided by the embodiment of the invention not only can realize automatic transfer of the cantilever probe, but also can regulate and control the inclination angle of the needle rod, and the connection position of the needle rod corresponding to the needle point is not easy to bend in the process of inserting the needle point.
Description
Technical Field
The invention belongs to the technical field of probes, and particularly relates to a transfer device of a cantilever probe.
Background
In the new type display, semiconductor and other electronic component modules, performance detection such as conduction is required in the manufacturing process, one end of a probe on a probe card is directly contacted with a golden finger on a product to be detected, the other end of the probe is contacted with a Pad point on a transfer PCB, and the probe is connected with a detection device through the transfer of the transfer PCB, so that a passage is formed for detection.
The probe card has various kinds, wherein the cantilever needle probe card has wider application, and the manufacturing process of the cantilever needle probe card commonly adopted in the industry at present is as follows: each cantilever-probe is manually transferred from the dial to a positioning station where the tip of the cantilever-probe is inserted into a positioning hole in a tip positioning membrane (with elasticity), and the shank of the cantilever-probe is placed on a bevel of a bevel wedge or on a double-sided adhesive tape to complete the oblique arrangement (the shank of the cantilever-probes of different layers have different inclination angles). Then, the plurality of needle bars can be fixed by brushing resin on the inclined surface of the inclined wedge block and drying. And finally, carrying out spot welding needle assembly on the cantilever probes and the PCB.
However, cantilever probes are extremely small in size, making manual transfer one by one and contact pin efficiency extremely low. In the process of inserting the needle, the inclination angle of the needle rod cannot be regulated and controlled, and the position of the needle point relative to the positioning hole is usually slightly error, so that the needle point is blocked, and the connecting position on the needle rod corresponding to the needle point is extremely easy to bend.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides a transfer device of a cantilever probe, which aims to realize automatic transfer of the cantilever probe, regulate and control the inclination angle of a needle rod and ensure that the connection position of the needle rod corresponding to the needle point is not easy to bend in the inserting process of the needle point.
The invention provides a transfer device of a cantilever probe, which comprises a transfer unit and a contact pin assembly, wherein the transfer unit comprises a first support, a second support and a first support;
the contact pin assembly comprises an adsorption head, a needle pressing block and a swing table, wherein the bottom of the adsorption head is of a conical structure, an arc-shaped groove matched with a needle rod of a cantilever probe is formed in the bottom surface of the adsorption head, two ends of the arc-shaped groove extend along a straight line and penetrate through the adsorption head, an adsorption channel is formed in the adsorption head and communicated with the arc-shaped groove, the bottom surface of the needle pressing block is used for propping against the outer wall of the needle rod of the cantilever probe, the adsorption head and the needle pressing block are arranged at intervals on the output end of the swing table so as to swing and adjust the inclination angle of the adsorption head, the needle pressing block and a horizontal plane, the needle pressing block is located between the adsorption head and the needle point of the cantilever probe, and the transfer unit is used for driving the swing table to translate and lift in space.
Optionally, the contact pin assembly further comprises a buffer member, the buffer member comprises a fixing plate, a buffer plate and a spring, the fixing plate is located at the output end of the swing table, the buffer plate is in sliding fit with the fixing plate in the vertical direction, the spring is vertically clamped between the fixing plate and the buffer plate, and the adsorption head and the needle pressing block are both located on the buffer plate.
Optionally, the fixing plate is provided with a vertically arranged sliding rail, the buffer plate is provided with a sliding block, and the sliding block is in sliding fit with the sliding rail.
Optionally, the buffer member further comprises a guide rod, the guide rod is fixed on the fixed plate, a guide hole is formed in the buffer plate, one end of the guide rod is movably inserted into the guide hole, and the spring is sleeved on the guide rod.
Optionally, the transfer unit includes support, X direction straight line module and Z direction straight line module, X direction straight line module is located on the support, X direction straight line module is used for driving Z direction straight line module removes along the X direction, Z direction straight line module is used for driving the pendulum platform goes up and down in the Z direction.
Optionally, the transfer device further includes a first camera, an image processor and a controller, the first camera is located on the swing table, the first camera is used for photographing the cantilever probe in the dial, the image processor is used for processing and analyzing photographs, the first camera, the image processor and the controller are electrically connected in sequence, and the controller is electrically connected with the X-direction linear module and the Z-direction linear module respectively.
Optionally, the transfer device further includes a position sensor, the position sensor is located on the swing table, the position sensor is used for sensing the height of the swing table in the Z direction, and the position sensor is electrically connected with the controller.
Optionally, the transferring device further includes a second camera, the second camera is used for photographing the cantilever probe on the adsorption head, the second camera is electrically connected with the image processor, and the controller is electrically connected with the swing table.
Optionally, the bottom surface of the needle pressing block is an arc surface, and a height adjusting sliding table is arranged at the output end of the swing table and used for adjusting the height of the needle pressing block in the vertical direction.
Optionally, the needle pressing block comprises a mounting block and a pre-pressing block, the pre-pressing block is mounted at the bottom of the mounting block, the bottom surface of the pre-pressing block is an arc surface, the mounting block is connected with the output end of the swing table, and the diameter of the mounting block in the horizontal direction gradually decreases from the mounting block to the direction of the pre-pressing block.
In general, the above technical solutions conceived by the present invention have the beneficial effects compared with the prior art including:
in the transferring device for the cantilever probe provided by the embodiment of the invention, firstly, the pin assembly is driven to horizontally move to the position right above the cantilever probe in the needle disc by the transferring unit in the transferring process of the cantilever probe. The transfer unit then drives the pin assembly horizontally downward such that the arcuate groove matches the shank of the corresponding cantilever probe (the arcuate groove and shank being of equal diameter). Then, the air extraction device is started, and the adsorption channel is vacuumized, so that the cantilever probe is adsorbed in the arc-shaped groove. Then, according to the position of the cantilever probe on the probe card, the inclination angle of the cantilever needle bar is determined, so that the adsorption head and the needle pressing block are swung to a proper angle through the swing table, and the inclination angle of the needle bar of the cantilever probe (namely, the included angle between the needle bar and the horizontal plane) is consistent with the inclination angle of the contact pin, and the regulation and control of the inclination angle of the needle bar (namely, the inclination angle alpha of the arc-shaped groove) is realized. Then, the transfer unit drives the contact pin assembly to horizontally move and descend, at the moment, the needle tip of the cantilever probe is inserted into the positioning hole on the needle tip positioning film, one end of the needle rod is adsorbed and fixed, and the other end, close to the needle tip, of the cantilever probe is pressed downwards through the needle pressing block to pre-press the needle rod, so that the connection position, corresponding to the needle tip, of the needle rod is not easy to bend in the inserting process. In addition, the needle bar of the cantilever probe is placed on the inclined plane of the inclined wedge block or the double-sided adhesive tape, so that the inclined arrangement of the needle bar is completed, and the automatic transfer of the cantilever probe is realized.
That is, the transfer device for the cantilever probe provided by the embodiment of the invention not only can realize automatic transfer of the cantilever probe, but also can regulate and control the inclination angle of the needle rod, and the connection position of the needle rod corresponding to the needle tip is not easy to bend in the process of inserting the needle tip.
Drawings
Fig. 1 is a schematic structural diagram of a transfer device for cantilever probe according to an embodiment of the present invention;
FIG. 2 is a schematic view of a pin assembly according to an embodiment of the present invention;
FIG. 3 is an enlarged view of a portion of a pin assembly provided by an embodiment of the present invention;
FIG. 4 is a schematic diagram of an embodiment of the present invention for use with an adsorption head;
fig. 5 is a schematic structural diagram of a needle pressing block according to an embodiment of the present invention;
fig. 6 is a partial enlarged view of a needle pressing block according to an embodiment of the present invention.
Like reference numerals denote like technical features throughout the drawings, in particular:
1. a transfer unit; 11. a bracket; 12. an X-direction linear module; 13. a Z-direction straight line module; 14. a mounting base; 15. a base; 2. a pin assembly; 21. an adsorption head; 211. an arc-shaped groove; 212. an adsorption channel; 22. a needle pressing block; 221. a mounting block; 2211. a notch; 222. pre-pressing blocks; 23. a swinging table; 24. a buffer member; 241. a fixing plate; 2411. a slide rail; 242. a buffer plate; 2421. a slide block; 25. a connecting block; 26. a height adjusting sliding table; 3. a first camera; 4. a position sensor; 100. a cantilever probe; 110. a needle bar; 120. a needle tip.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
Examples:
fig. 1 is a schematic structural diagram of a transfer device for cantilever probe according to an embodiment of the present invention, and as shown in fig. 1, the transfer device includes a transfer unit 1 and a pin assembly 2.
Fig. 2 is a schematic structural diagram of a pin assembly according to an embodiment of the present invention, and fig. 3 is a partial enlarged view of a pin assembly according to an embodiment of the present invention, where, as shown in fig. 2 and 3, the pin assembly 2 includes an adsorption head 21, a pin pressing block 22, and a swing table 23. Fig. 4 is a schematic diagram of an application of the suction head provided in the embodiment of the present invention, the bottom of the suction head 21 is in a conical structure, the bottom of the suction head 21 is provided with an arc-shaped groove 211 matched with the needle bar 110 of the cantilever probe 100, two ends of the arc-shaped groove 211 extend along a straight line and penetrate through the suction head 21, the suction head 21 is internally provided with a suction channel 212, the suction channel 212 is communicated with the arc-shaped groove 211, the bottom of the needle pressing block 22 is used for abutting against the outer wall of the needle bar 110 of the cantilever probe 100, the suction head 21 and the needle pressing block 22 are arranged on the output end of the swinging table 23 at intervals to swing and adjust the inclination angles of the suction head 21, the needle pressing block 22 and the horizontal plane, the needle pressing block 22 is located between the suction head 21 and the needle tip 120 of the cantilever probe 100, and the transferring unit 1 is used for driving the swinging table 23 to translate and lift in space.
In the transferring device for the cantilever probe provided by the embodiment of the invention, in the transferring process of the cantilever probe 100, firstly, the pin assembly 2 is driven by the transferring unit 1 to horizontally move to the position right above the cantilever probe 100 in the needle dial. Then, the transfer unit 1 drives the pin assembly 2 to be horizontally lowered so that the arc-shaped grooves 211 are matched with the needle bars 110 of the corresponding cantilever probes 100 (the arc-shaped grooves 211 are equal in diameter to the needle bars 110). Next, the suction device is activated, and the suction channel 212 is evacuated, so that the cantilever probe 100 is sucked into the arc-shaped recess 211. Then, according to the position of the cantilever probe 100 on the probe card, the inclination angle of the cantilever needle bar 110 is determined, so that the adsorption head 21 and the needle pressing block 22 are swung to a proper angle through the swing table 23, and the inclination angle of the needle bar 110 of the cantilever probe 100 (i.e. the included angle between the needle bar 110 and the horizontal plane) is consistent with the inclination angle during the needle insertion, thereby realizing the regulation and control of the inclination angle of the needle bar 110 (i.e. the inclination angle alpha of the arc-shaped groove 211). Then, the transfer unit 1 drives the pin assembly 2 to move horizontally and descend, at this time, the tip 120 of the cantilever probe 100 is inserted into the positioning hole on the positioning film of the tip 120, and one end of the needle bar 110 is adsorbed and fixed, and the other end close to the tip 120 is pressed with the needle bar 110 downward through the pressing pin block 22, so that the connection position of the tip 120 corresponding to the tip 120 on the needle bar 110 is not easy to bend in the inserting process. In addition, the needle bar 110 of the cantilever probe 100 is placed on the inclined surface of the inclined wedge or the double-sided adhesive tape, so that the inclined arrangement of the needle bar 110 is completed, and the automatic transfer of the cantilever probe 100 is realized.
That is, the transfer device for the cantilever probe provided by the embodiment of the invention not only can realize automatic transfer of the cantilever probe 100, but also can regulate and control the inclination angle of the needle bar 110, and the connection position of the needle bar 110 corresponding to the needle bar 120 is not easy to bend in the inserting process of the needle bar 120.
It will be readily appreciated that the tilt angle of the pins 110 of each cantilever-probe 100 on a cantilever-probe card is 10-15 deg., the tilt angles of the cantilever-probes 100 of each layer remain the same, while the tilt angles of the pins 110 of the cantilever-probes 100 of different layers are different. In the automatic transferring process of the cantilever probes 100 through the transferring device, the inclined angle of the needle bar 110 of each cantilever probe 100 can be conveniently and conveniently adjusted through the swinging table 23, and the precision and the reliability are higher.
Illustratively, the bottom of the suction head 21 is a tapered wedge, and the bottom surface thereof has a minimum dimension and diameter, which is not only convenient for processing the arc-shaped groove 211, but also can effectively avoid the interference of the bottom surface of the suction head 21 to other cantilever probes 100 during the transferring process. In addition, the cross section of the arc-shaped groove 211 may be a semicircular groove, increasing the contact area with the cantilever probe 100, thereby improving the stability of transportation.
Illustratively, the rotation center of the swing table 23 may be the junction of the needle bar 110 and the needle tip 120, so that the height of the needle bar 110 is not adjusted when the inclination angle of the needle bar 110 is adjusted, thereby controlling the consistency of the descending height of the needle bar 110 during the needle insertion without changing the stroke.
It should be noted that, one end of the needle rod 110 of the cantilever probe 100 is fixedly connected to one end of the needle tip 120, and the two forms a certain included angle.
The transfer device also comprises a mounting base 14, the output end of the transfer unit 1 is in transmission connection with the mounting base 14, and a swing table 23 is arranged on the mounting base 14. The bottom surface of the needle pressing block 22 may be an arc surface, and may be reliably contacted with the needle bar 110.
Referring again to fig. 3, the pin assembly 2 further includes a buffer member 24, the buffer member 24 includes a fixing plate 241, a buffer plate 242 and a spring, the fixing plate 241 is located at an output end of the swing table 23, the buffer plate 242 is slidably matched with the fixing plate 241 in a vertical direction, the spring is vertically clamped between the fixing plate 241 and the buffer plate 242, and the adsorption head 21 and the pin pressing block 22 are located on the buffer plate 242.
In the above embodiment, the buffer member 24 plays a role in buffering the suction head 21 and the needle pressing block 22, preventing hard contact between the suction head 21 and the needle pressing block 22 and the cantilever probe 100, and preventing the cantilever probe 100 from being bent.
Illustratively, when the suction head 21 and the presser finger 22 are in contact with the cantilever probe 100, the spring is gradually compressed, and the fixing plate 241 allows the continued downward movement, so that the buffer plate 242, the suction head 21 and the presser finger 22 do not generate a large downward force to bend the cantilever probe 100.
Illustratively, the suction head 21 is mounted on the buffer plate 242 through the connection block 25. In addition, the buffer plate 242 may have a height adjusting sliding table 26 thereon, where the height adjusting sliding table 26 is used to adjust the height of the needle pressing block 22 in the vertical direction, and the bottom surface of the needle pressing block 22 can just contact the needle bar 110 at the same time after the needle bar 110 is adsorbed, so as to implement pre-pressing of the needle bar 110, thereby reducing the requirement of direct installation precision of the needle pressing block 22.
Further, the fixing plate 241 is provided with a sliding rail 2411 arranged vertically, the buffer plate 242 is provided with a sliding block 2421, and the sliding block 2421 is in sliding fit with the sliding rail 2411. By the cooperation of the slide rail 2411 and the slide block 2421, the fixing plate 241 can be guided downward, and the swing of the buffer plate 242 can be avoided.
In addition, the buffer member 24 further includes a guide rod fixed to the fixing plate 241, the buffer plate 242 has a guide hole, one end of the guide rod is movably inserted into the guide hole, and the spring is sleeved on the guide rod.
It is easy to understand that the guide rod can play a role in guiding the compression of the spring, so that the problem that the spring is misplaced or distorted in the compression process is avoided.
In one implementation manner of the invention, the transferring unit 1 comprises a bracket 11, an X-direction linear module 12 and a Z-direction linear module 13, wherein the X-direction linear module 12 is positioned on the bracket 11, and the X-direction linear module 12 is used for driving the Z-direction linear module 13 to move along the X-direction, so that the movement of the contact pin assembly 2 in the X-direction can be realized; the Z-direction linear module 13 is used to drive the swing table 23 to lift in the Z-direction, so that the pin assembly 2 can lift in the Z-direction.
Illustratively, the support 11 may be a gantry that is mounted on the base 15. And, during the transportation, the dial is placed on the base 15 under the left end of the beam of the portal frame, and the positioning station is located on the base 15 under the right end of the beam of the portal frame, so that the plurality of cantilever probes 100 in the dial are transported to the positioning station through the transportation unit 1. At this time, the needle bars 110 of the plurality of cantilever probes 100 on the dial are sequentially arranged in parallel at intervals in the X direction.
In another implementation of the present invention, the transfer unit 1 may further include a Y-direction linear module for driving movement of the dial in the Y-direction, so that movement of the cantilever probe 100 in the X-direction, the Y-direction, and the Z-direction may be finally achieved.
With continued reference to fig. 1, the transfer device further includes a first camera 3, an image processor and a controller (not shown), where the first camera 3 is located on the swing table 23, the first camera 3 is used to photograph the cantilever probe 100 in the dial, the image processor is used to process and analyze the photograph, the first camera 3, the image processor and the controller are electrically connected in sequence, and the controller is electrically connected with the X-direction linear module 12 and the Z-direction linear module 13 respectively.
In the above embodiment, the gripping on the cantilever probe 100 at each position on the dial can be automatically achieved by the cooperation between the first camera 3, the image processor and the controller.
Illustratively, the cantilever-arm probes 100 in the dial are photographed by the first camera 3, and after being processed and analyzed by the image processor, the position information of the needle bar 110 can be obtained and transmitted to the controller, and the controller can control the X-direction linear module 12 and the Z-direction linear module 13 to move correspondingly, so that each cantilever-arm probe 100 can be automatically and sequentially grasped.
The first camera 3 is illustratively located on the mount 14.
Further, the transfer device further comprises a position sensor 4, the position sensor 4 is located on the swing table 23, the position sensor 4 is used for sensing the height of the swing table 23 in the Z direction, and the position sensor 4 is electrically connected with the controller.
In the above embodiment, the position sensor 4 can sense the descending height of the swing table 23, and when the Z-direction linear module 13 controls the descending displacement of the swing table 23 to exceed the threshold range, the position sensor 4 can transmit the position information of the swing table 23 to the controller, and the controller can control the Z-direction linear module 13 to stop, so as to avoid the suction head 21 and the needle pressing block 22 from crushing the cantilever probe 100.
The position sensor 4 may be a proximity switch, for example.
In this embodiment, the transferring device further includes a second camera (not shown) for photographing the cantilever probe 100 on the suction head 21, and the second camera is electrically connected to the image processor, and the controller is electrically connected to the swing table 23.
In the above embodiment, after the tilt angle of the needle bar 110 of the cantilever probe 100 is adjusted by the swing table 23, the second camera may photograph the cantilever probe 100 on the suction head 21, and the tilt angle of the needle bar 110 with respect to the horizontal plane may be obtained through analysis by the image processor, and the controller receives the tilt angle signal. When the tilt angle reaches a preset value, the controller does not control the swing table 23 to operate. When the inclination angle does not reach the preset value, the controller does not control the swing table 23 to work, and the second camera performs photographing again at this time, and the above steps are repeated until the inclination angle of the needle 110 reaches the preset value. That is, adjustment of the white balance 23 for correction can be achieved by the second camera.
Fig. 5 is a schematic structural diagram of a needle pressing block provided by the embodiment of the present invention, fig. 6 is a partial enlarged view of the needle pressing block provided by the embodiment of the present invention, and, as shown in conjunction with fig. 5 and 6, the needle pressing block 22 includes a mounting block 221 and a pre-pressing block 222, the pre-pressing block 222 is mounted at the bottom of the mounting block 221, the bottom surface of the pre-pressing block 222 is an arc surface, the mounting block 221 is connected with the output end of the swing table 23, and the diameter of the mounting block 221 in the horizontal direction gradually decreases from the mounting block 221 to the pre-pressing block 222.
In the above embodiment, the mounting block 221 functions to mount the needle pressing block 22, and the pre-pressing block 222 achieves pre-pressing limitation with the needle bar 110 through the arc-shaped surface of the bottom surface. In addition, the diameter of the bottom of the mounting block 221 gradually decreases from top to bottom, so that the quality of the mounting block 221 can be effectively reduced, interference can be avoided in the transferring process, and the phenomenon that the swing of the swing table 23 is not facilitated due to the overlarge quality of the needle pressing block 22 is avoided.
Illustratively, the bottom of the mounting block 221 has a stepped notch 2211.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. A transfer device of a cantilever probe, which is characterized by comprising a transfer unit and a contact pin assembly;
the contact pin assembly comprises an adsorption head, a needle pressing block and a swing table, wherein the bottom of the adsorption head is of a conical structure, an arc-shaped groove matched with a needle rod of a cantilever probe is formed in the bottom surface of the adsorption head, two ends of the arc-shaped groove extend along a straight line and penetrate through the adsorption head, an adsorption channel is formed in the adsorption head and communicated with the arc-shaped groove, the bottom surface of the needle pressing block is used for propping against the outer wall of the needle rod of the cantilever probe, the adsorption head and the needle pressing block are arranged at intervals on the output end of the swing table so as to swing and adjust the inclination angle of the adsorption head, the needle pressing block and a horizontal plane, the needle pressing block is located between the adsorption head and the needle point of the cantilever probe, and the transfer unit is used for driving the swing table to translate and lift in space.
2. The cantilever-probe transfer device of claim 1, wherein the pin assembly further comprises a buffer member comprising a fixed plate, a buffer plate and a spring, wherein the fixed plate is positioned at the output end of the swing table, the buffer plate is in sliding fit with the fixed plate in the vertical direction, the spring is vertically clamped between the fixed plate and the buffer plate, and the adsorption head and the pin pressing block are both positioned on the buffer plate.
3. The cantilever-probe transfer device of claim 2, wherein the fixed plate has a vertically disposed slide rail, and the buffer plate has a slider thereon, the slider being in sliding engagement with the slide rail.
4. The cantilever-probe transfer device of claim 2, wherein the buffer further comprises a guide rod, the guide rod is fixed on the fixed plate, the buffer plate is provided with a guide hole, one end of the guide rod is movably inserted into the guide hole, and the spring is sleeved on the guide rod.
5. The transfer device of the cantilever probe according to claim 1, wherein the transfer unit comprises a bracket, an X-direction linear module and a Z-direction linear module, the X-direction linear module is located on the bracket, the X-direction linear module is used for driving the Z-direction linear module to move along the X-direction, and the Z-direction linear module is used for driving the swing table to lift in the Z-direction.
6. The transfer device of a cantilever probe according to claim 5, further comprising a first camera, an image processor and a controller, wherein the first camera is located on the swing table, the first camera is used for photographing the cantilever probe in a dial, the image processor is used for processing and analyzing photographs, the first camera, the image processor and the controller are electrically connected in sequence, and the controller is electrically connected with the X-direction linear module and the Z-direction linear module respectively.
7. The cantilever-probe transfer apparatus of claim 6, further comprising a position sensor located on the pendulum platform for sensing the height of the pendulum platform in the Z-direction, the position sensor being electrically connected to the controller.
8. The cantilever-probe transfer apparatus of claim 6, further comprising a second camera for taking a picture of the cantilever probe on the suction head, the second camera being electrically connected to the image processor, the controller being electrically connected to the swing table.
9. The cantilever-probe transferring device according to any one of claims 1 to 8, wherein the bottom surface of the needle pressing block is an arc surface, and a height adjusting sliding table is arranged at the output end of the swing table and is used for adjusting the height of the needle pressing block in the vertical direction.
10. The cantilever-probe transferring device according to claim 9, wherein the needle pressing block comprises a mounting block and a pre-pressing block, the pre-pressing block is mounted at the bottom of the mounting block, the bottom surface of the pre-pressing block is an arc surface, the mounting block is connected with the output end of the swing table, and the diameter of the mounting block in the horizontal direction gradually decreases from the mounting block to the pre-pressing block.
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|---|---|---|---|
| CN202311277929.4A CN117002951B (en) | 2023-10-07 | 2023-10-07 | Transfer device of cantilever probe |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311277929.4A CN117002951B (en) | 2023-10-07 | 2023-10-07 | Transfer device of cantilever probe |
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| CN117002951A true CN117002951A (en) | 2023-11-07 |
| CN117002951B CN117002951B (en) | 2023-12-12 |
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