CN218504541U

CN218504541U - Waxing manipulator

Info

Publication number: CN218504541U
Application number: CN202222254036.5U
Authority: CN
Inventors: 郑金龙; 杨小丽; 周铁军; 马金峰
Original assignee: Guangdong Vital Micro Electronics Technology Co Ltd
Current assignee: Guangdong Vital Micro Electronics Technology Co Ltd
Priority date: 2022-08-25
Filing date: 2022-08-25
Publication date: 2023-02-21
Anticipated expiration: 2032-08-25

Abstract

The utility model relates to the technical field of waxing of indium phosphide substrate wafers, and discloses a waxing manipulator which comprises a base, a hand arm part and a hand grip part; the hand grip part comprises a telescopic device, a supporting seat and a supporting rod; the telescopic device is provided with a first end and a second end, the first end is connected with the arm part, a first clamping part is fixed on the end surface of the second end, the first telescopic device is provided with a telescopic rod, and the extending end of the telescopic rod penetrates through the first clamping part; the supporting seat is connected with the extending end of the telescopic rod; one end of the supporting rod is connected with the supporting seat, the other end of the supporting rod extends towards the outer side direction from the supporting seat, the supporting rod is provided with a second clamping part, and the second clamping part is used for being correspondingly matched with the first clamping part to form a clamping jaw; the utility model discloses can be applicable to the wax equipment or the wafer adsorption equipment of dripping of installation multiple size of a dimension, application scope is wide, convenient to use.

Description

Waxing manipulator

Technical Field

The utility model relates to an indium phosphide substrate wafer waxing technical field, especially a waxing manipulator.

Background

At the bandwidth level of more than 100GHz, the indium phosphide-based radio frequency device has obvious advantages in the aspect of wireless transmission of a backhaul network and a point-to-point communication network, and an indium phosphide substrate is expected to become a mainstream substrate material of the radio frequency device in a 6G communication or even a 7G communication wireless transmission network in the future.

At present, in the waxing process of the indium phosphide substrate wafer, manual wax dripping is adopted, a worker firstly checks wafer information and starts inspection equipment, the selection procedure is carried out after preparation is completed, the time, the rotating speed and the pressure of each step are inspected, the wafer is placed on a vacuum chuck, and then the worker manually drips liquid wax on the surface of the wafer. In order to change manual waxing into automatic waxing, when the inventor modifies a wafer waxing device, the inventor finds that the existing mechanical arm is not suitable for mounting wax dripping equipment or wafer adsorption equipment with various sizes, has narrow application range and is inconvenient to use.

As in chinese patent [ publication No.: CN107379011B discloses a manipulator, including the arm and snatch the portion, this patent is through the arm remove the portion of snatching, snatchs the slide glass through the first sucking disc that snatchs on the portion, simultaneously owing to set up the second sucking disc in the portion of snatching, can also utilize the second sucking disc to grab and get the label, though the manipulator of this patent can snatch and remove the slide glass in a flexible way, but the manipulator of this patent is not suitable for installing the wax equipment or the wafer adsorption equipment that drips of multiple size. As another example, chinese patent [ publication No.: CN109605361B discloses a manipulator, including base, the arm that rotates with the base and is linked to each other, the wrist that rotates with the free end of arm and the gripper that rotates with the wrist and link to each other, though the manipulator of this patent can replace staff to realize getting in the high risk environment and get and transfer the material, but the manipulator of this patent is not suitable for installing the wax equipment or the wafer adsorption equipment of a plurality of sizes.

SUMMERY OF THE UTILITY MODEL

The utility model aims at: the waxing manipulator is suitable for being used for installing wax dropping equipment or wafer adsorption equipment with various sizes, and is wide in application range and convenient to use.

In order to achieve the above object, the present invention provides a waxing manipulator, including a base, a hand arm fixed on the base, and a gripper connected to the hand arm; the hand grip part comprises a telescopic device, a supporting seat and a supporting rod; the telescopic device is provided with a first end and a second end, the first end is connected with the arm part, a first clamping part is fixed on the end face of the second end, the telescopic device is provided with a telescopic rod, and the extending end of the telescopic rod penetrates through the first clamping part; the supporting seat is connected with the extending end of the telescopic rod; one end of the supporting rod is connected with the supporting seat, the other end of the supporting rod extends towards the outer side direction from the supporting seat, the supporting rod is provided with a second clamping part, and the second clamping part is used for being correspondingly matched with the first clamping part to form a clamping jaw; through the expansion bend drive the supporting seat is kept away from or is close to the arm portion, can correspond and change first clamping part with the relative distance of second clamping part to can pass through first clamping part with the second clamping part carries out the centre gripping to the wax equipment or the wafer adsorption equipment of dripping of multiple not unidimensional fixed, application scope is wide.

Preferably, the telescopic device is one of a cylinder, a hydraulic cylinder and an electric cylinder.

Preferably, the number of the supporting rods connected with the supporting seat is two; through locating two respectively on the bracing piece the second clamping part and locate one on the expansion bend terminal surface first clamping part can form three point centre gripping to this equipment when the fixed wax equipment or the wafer adsorption equipment of dripping of centre gripping, and the centre gripping is effectual.

Preferably, the support seat is provided with a through hole, and the through hole penetrates through the support seat from top to bottom; the through hole is used for passing through electric wires, air pipes, water pipes and other pipelines.

Preferably, the upper surface of the support seat is a plane, and the upper surface of the support seat is designed to be a plane so as to be adapted to a mounting plate of a wax dropping device or a base plate of a wafer adsorption device.

Preferably, the base comprises a driving motor and a mounting plate fixed at the upper end of the driving motor; the arm part is fixed on the upper surface of the mounting plate, and the driving motor can drive the mounting plate to rotate around a vertical central shaft of the driving motor; through driving motor reaches the mounting panel forms the revolving stage, for the arm portion provides a horizontal pivoted degree of freedom.

Preferably, the arm portion comprises at least three movable arms, which may provide at least two degrees of freedom.

Preferably, the arm part comprises a first movable arm, a second movable arm, a third movable arm, a fourth movable arm and a fifth movable arm which are connected in sequence; the first movable arm is fixed on the top of the base, a first vertical movable joint is arranged between the first movable arm and the second movable arm, a second vertical movable joint is arranged between the second movable arm and the third movable arm, a vertical rotating joint is arranged between the third movable arm and the fourth movable arm, and a horizontal rotating joint is arranged between the fourth movable arm and the fifth movable arm.

The vertical rotating joint enables the movable arm connected with the vertical rotating joint to form a vertical rotating degree of freedom; the up-down rotation joint, the horizontal rotation joint and the vertical rotation joint are all the prior art and are not described in detail herein.

Preferably, the telescopic device is connected to an outer side wall of the fifth movable arm.

More preferably, the number of the gripper portions connected to the outer side wall of the fifth movable arm is three.

More preferably, three of the gripping parts are distributed in an annular array around a central axis of the fifth movable arm.

Compared with the prior art, the utility model provides a, its beneficial effect lies in: through the expansion bend drive the supporting seat is kept away from or is close to the arm portion can correspond the change first clamping part with the relative distance of second clamping part to can pass through first clamping part with the second clamping part carries out the centre gripping to multiple not unidimensional wax equipment or wafer adsorption equipment of dripping and fixes, consequently, the utility model discloses can be applicable to and install multiple size of a dimensions wax equipment or wafer adsorption equipment of dripping, application scope is wide, convenient to use.

Drawings

Fig. 1 is a structural diagram of a waxing manipulator according to an embodiment of the present invention;

fig. 2 is a schematic view illustrating a connection between a fifth movable arm and a gripper according to an embodiment of the present invention;

fig. 3 is a grip provided in an embodiment of the present invention;

fig. 4 is a state diagram of the waxing manipulator provided by the embodiment of the present invention when the wax dropping device is installed;

fig. 5 is a state diagram of the waxing manipulator according to the embodiment of the present invention, when a wafer suction device is installed.

In the figure, 1, a base; 11. a drive motor; 12. mounting a plate;

2. a hand portion; 21. a first movable arm; 22. a second movable arm; 23. a third movable arm; 24. a fourth movable arm; 25. a fifth movable arm;

3. a grip portion; 31. a retractor; 32. a supporting seat; 33. a support bar; 311. a first clamping portion; 312. a telescopic rod; 331. a second clamping portion;

4. a wax dropping device; 41. a wax storage liquid bottle; 42. a wax dropping pipe; 43. installing a disc;

5. a wafer adsorption device; 5. a base plate; 5. and (4) vacuum chuck.

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In the description of the present invention, it should be understood that the terms "center", "upper", "lower", "vertical", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

As shown in fig. 1-3, an embodiment of the present invention provides a waxing manipulator, which includes a base 1, a hand arm 2 fixed on the base 1, and a hand grip 3 connected to the hand arm 2.

The gripper part 3 comprises a telescopic device 31, a supporting seat 32 and a supporting rod 33; the telescopic device has a first end and a second end, the first end is connected with the arm part 2, a first clamping part 311 is fixed on the end surface of the second end, the telescopic device 31 has a telescopic rod 312, and the extending end of the telescopic rod 312 passes through the first clamping part 311; the support base 32 is connected with the extending end of the telescopic rod 312; one end of the supporting rod 33 is connected with the supporting seat 32, the other end of the supporting rod is extended towards the outside direction from the supporting seat 32, the supporting rod 33 is provided with a second clamping portion 331, and the second clamping portion 331 is used for being correspondingly matched with the first clamping portion 311 to form a clamping jaw.

Based on the technical scheme, the telescopic device 31 drives the support seat 32 to be far away from or close to the arm part 2, so that the relative distance between the first clamping part 311 and the second clamping part 331 can be correspondingly changed, wax dropping equipment or wafer adsorption equipment with various sizes can be clamped and fixed through the first clamping part 311 and the second clamping part 331, and the application range is wide.

Preferably, the telescopic means 31 is an electric cylinder.

Preferably, the number of the support rods 33 connected to the support base 32 is two. Through locating two respectively on the bracing piece 33 the second clamping part 331, and locate one on the expansion bend 31 terminal surface first clamping part 311, can form three point centre gripping to this equipment when the fixed wax equipment or the wafer adsorption equipment of dripping of centre gripping, the centre gripping installation is effectual.

Preferably, the supporting seat 32 has a through hole 321, and the through hole 321 penetrates through the supporting seat 32 from top to bottom. The through hole 321 is designed to facilitate the passing of electric wires, air pipes, water pipes and other pipelines.

Preferably, the upper surface of the support seat 32 is a plane. The upper surface of the support base 32 is designed to be flat in order to be adapted to a mounting plate of a wax dropping apparatus or a base plate of a wafer suction apparatus.

Referring to fig. 1, the base 1 provided in the embodiment of the present invention includes a driving motor 11 and a mounting plate 12 fixed to an upper end of the driving motor 11; the arm part 2 is fixed to the upper surface of the mounting plate 12, and the driving motor 11 can drive the mounting plate 12 to rotate around the vertical central axis of the driving motor 11. The drive motor 11 and the mounting plate 12 form a rotary table, providing a degree of freedom for the arm 2 to rotate horizontally.

Referring to fig. 1 and 2, the arm part 2 provided by the embodiment of the present invention includes a first movable arm 21, a second movable arm 22, a third movable arm 23, a fourth movable arm 24, and a fifth movable arm 25 connected in sequence; first movable arm 21 is fixed in the top of base 1, first movable arm 21 with be equipped with first upper and lower freely movable joint between second movable arm 22, second movable arm 22 with be equipped with second upper and lower freely movable joint between third movable arm 23, third movable arm 23 with be equipped with vertical rotation joint between fourth movable arm 24, fourth movable arm 24 with be equipped with horizontal rotation joint between the fifth movable arm 25.

Preferably, said retractor 31 is attached to the outer side wall of said fifth movable arm 25.

Preferably, the number of the gripping portions 3 connected to the outer side wall of the fifth movable arm 25 is three. The three gripping parts 3 are distributed in an annular array around the central axis of the fifth movable arm 25. The wax dropping device or the wafer adsorption device with three different sizes can be correspondingly clamped and fixed.

For easy understanding, referring to fig. 4, the waxing manipulator according to the embodiment of the present invention is installed in a wax dropping device 4, and the wax dropping device 4 is installed on the handle portion 3. Drip wax equipment 4 including the storage wax liquid bottle 41, the wax dropping pipe 42 and the mounting disc 43 that from top to bottom connect gradually, mounting disc 43 be equipped with the wax dropping hole of dropping wax pipe 42 one-to-one, mounting disc 43 is fixed in on the clamping jaw.

For easy understanding, referring to fig. 5, in a state when the waxing manipulator according to the embodiment of the present invention installs the wafer adsorbing device, the fixed wafer adsorbing device 5 is installed on the gripper 3. The wafer suction apparatus 5 includes a base plate 51 and a plurality of vacuum suction pads 52 mounted on the base plate 51, and the base plate 51 is fixed to the chuck.

To sum up, the embodiment of the utility model provides a waxing manipulator, it has following beneficial effect:

(1) Adopt expansion bend 31, supporting seat 32 and bracing piece 33, and be in respectively the terminal surface of expansion bend 31 and the upper surface of bracing piece 33 set up first clamping part 311 and second clamping part 331, can be through corresponding the change first clamping part 311 with the relative distance of second clamping part 331 to the wax equipment or the wafer adsorption equipment of dripping of multiple not unidimensional of adaptation installation, application scope is wide, convenient to use.

(2) Adopt two bracing piece 33 can form three point clamping to this equipment when fixed wax equipment or the wafer adsorption equipment of dripping of centre gripping, and the centre gripping installation is effectual.

(3) By adopting the through hole 321, the electric wire, the air pipe, the water pipe and other pipelines can conveniently pass through.

(4) The support base 32 having a flat upper surface can be adapted to the mounting plate 43 of the wax dropping device 4 or the base plate 51 of the wafer suction device 5.

(5) The driving motor 11 and the mounting plate 12 form a rotary table, which can provide a degree of freedom for the arm part 2 to rotate horizontally.

(6) With the first movable arm 21, the second movable arm 22, the third movable arm 23, the fourth movable arm 24, and the fifth movable arm 25 connected in this order, four degrees of freedom can be provided.

(7) A first up-down movable joint is used between the first movable arm 21 and the second movable arm 22, which can provide a degree of freedom of up-down rotation.

(8) A second up-down movable joint is used between the second movable arm 22 and the third movable arm 23, which can provide a degree of freedom of up-down rotation.

(9) A vertical rotational joint is used between the third movable arm 23 and the fourth movable arm 24, which provides a vertical rotational degree of freedom.

(10) A horizontal rotational joint is used between the fourth movable arm 24 and the fifth movable arm 25 to provide a horizontal rotational degree of freedom.

(11) The three gripping handles 3 are connected to the outer side wall of the fifth movable arm 25, so that the waxing manipulator can simultaneously mount three wax dripping devices 4 or wafer adsorbing devices 5 with different sizes.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and replacements can be made without departing from the technical principle of the present invention, and these modifications and replacements should also be regarded as the protection scope of the present invention.

Claims

1. A waxing manipulator is characterized by comprising a base, an arm part fixed on the base and a grabbing part connected with the arm part; the hand grip includes:

the telescopic device is provided with a first end and a second end, the first end is connected with the arm part, a first clamping part is fixed on the end face of the second end, the telescopic device is provided with a telescopic rod, and the extending end of the telescopic rod penetrates through the first clamping part;

the supporting seat is connected with the extending end of the telescopic rod;

the bracing piece, the one end of bracing piece with supporting seat connection, just the other end of bracing piece by the outside direction of supporting seat extends, the bracing piece is equipped with the second clamping part, the second clamping part be used for with first clamping part corresponds the cooperation in order to form the clamping jaw.

2. The waxing manipulator according to claim 1, wherein the number of the support rods connected to the support base is two.

3. The waxing manipulator of claim 1, wherein the support base has a through hole extending therethrough from top to bottom.

4. The waxing manipulator of claim 1, wherein the upper surface of the support base is planar.

5. The waxing manipulator according to claim 1, wherein the base comprises a drive motor and a mounting plate fixed to the upper end of the drive motor; the arm portion is fixed in the upper surface of mounting panel, driving motor can drive the mounting panel is around driving motor's vertical center pin rotates.

6. The waxing robot of claim 1 or 5, wherein the arm portion comprises at least three movable arms.

7. The waxing manipulator according to claim 6, wherein the arm portion comprises a first movable arm, a second movable arm, a third movable arm, a fourth movable arm and a fifth movable arm connected in sequence; the first movable arm is fixed at the top of the base, a first upper movable joint and a first lower movable joint are arranged between the first movable arm and the second movable arm, a second upper movable joint and a second lower movable joint are arranged between the second movable arm and the third movable arm, a vertical rotating joint is arranged between the third movable arm and the fourth movable arm, and a horizontal rotating joint is arranged between the fourth movable arm and the fifth movable arm.

8. The waxing robot of claim 7, wherein the retractor is attached to an outside wall of the fifth moveable arm.

9. The waxing manipulator of claim 8, wherein the number of said gripper portions attached to the outside wall of said fifth moveable arm is three.