CN112831761A - Film forming apparatus - Google Patents

Film forming apparatus Download PDF

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Publication number
CN112831761A
CN112831761A CN202110002323.4A CN202110002323A CN112831761A CN 112831761 A CN112831761 A CN 112831761A CN 202110002323 A CN202110002323 A CN 202110002323A CN 112831761 A CN112831761 A CN 112831761A
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CN
China
Prior art keywords
protective sheet
electronic component
component
sheet
cooling plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202110002323.4A
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Chinese (zh)
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CN112831761B (en
Inventor
西垣寿
铃木端生
吉村浩司
神戸优
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority claimed from JP2018190780A external-priority patent/JP7320932B2/en
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of CN112831761A publication Critical patent/CN112831761A/en
Application granted granted Critical
Publication of CN112831761B publication Critical patent/CN112831761B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Supply And Installment Of Electrical Components (AREA)

Abstract

The invention provides a film forming apparatus and a component peeling apparatus, which can prevent residue from remaining on an electronic component and peel the electronic component from a sheet. The electronic component whose electrode exposed surface is adhered to the adhesive surface of the protective sheet is put into a film forming apparatus. The film forming apparatus includes a film forming section and a peeling section. The film formation processing unit forms a film of the film forming material on the electronic component. The peeling section peels the electronic component from the protective sheet after the film is formed by the film forming section. The peeling processing part comprises: a mounting table for supporting the electronic component stuck to the protective sheet; a chuck for holding an end portion of the protective sheet, relatively moving the protective sheet with respect to the mounting table, and continuously peeling the protective sheet toward an opposite end of the end portion; and a fixing portion fixing a position of the electronic component.

Description

Film forming apparatus
The present application is a divisional application entitled "film forming apparatus and part peeling apparatus" filed on 2018, 11/09/original application No. 201811329890.5.
Technical Field
The present invention relates to a film forming apparatus for forming a film on an electronic component attached to a protective sheet, and a component peeling apparatus for peeling the electronic component on which the film is formed from the protective sheet.
Background
Many electronic components such as semiconductor devices are mounted in wireless communication devices such as mobile phones. The electronic components are transported from the processing apparatus to the processing apparatus for undergoing various processes. As a representative example of the treatment, formation of an electromagnetic wave shielding film is cited. In order to prevent the influence on the communication characteristics, the electromagnetic wave shielding film suppresses the influence of electromagnetic waves on the inside and outside, such as leakage of electromagnetic waves to the outside. In general, an electronic component is formed by forming an outer shape with a sealing resin, and conductive electromagnetic wave shielding films are provided on the top surface and side surfaces of the sealing resin in order to shield electromagnetic waves (see patent document 1).
As a method for forming an electromagnetic wave shielding film, a plating method is known. However, since the plating method requires wet steps such as a pretreatment step, a plating treatment step, and a post-treatment step such as water washing, an increase in the manufacturing cost of the electronic parts cannot be avoided. Therefore, sputtering as a dry step is attracting attention. In the sputtering method, an inert gas is introduced into a vacuum chamber in which a target is disposed, and a direct-current voltage is applied. Then, the ions of the inert gas turned into plasma collide with the target of the film forming material, and the particles ejected from the target are deposited on the electronic component. The deposited layer becomes an electromagnetic wave shielding film.
A film forming apparatus for implementing a sputtering method includes: the apparatus includes a cylindrical chamber having a vacuum chamber therein, a turntable accommodated in the chamber and having a rotation shaft coaxial with the chamber, and a film forming position defined in the chamber. The electronic component is placed on the rotary table, and the rotary table is rotated in the circumferential direction, whereby the electronic component reaches the film formation position, and the electromagnetic wave shielding film is formed. In this manner, the electronic components are also transferred by rotation in the processing apparatus.
In such transportation of electronic components inside and outside the apparatus, the electronic components may be subjected to inertial force due to acceleration, deceleration, rotation, or the like, and may be turned upside down or may fall off from the film formation position. Therefore, the electronic component is stuck to the adhesive film, and is subjected to conveyance and formation of an electromagnetic wave shielding film (see patent document 2). The electronic part can be held in place by adhesion forces that resist inertial forces.
Conventionally, an electronic component attached to an adhesive film is peeled off from the adhesive film using a top-up device (see patent document 3). As shown in fig. 29, the jack-up device includes a pin body 8 movable in the axial direction. An adhesive film 9 to which an electronic component 60 is attached is provided at the tip of the pin body 8. The pin body 8 is pushed up against the adhesive film 9 from the side opposite to the side to which the electronic component 60 is adhered. The pin 8 deforms the adhesive film 9 into a mountain shape having a vertex of the electronic component 60 to be peeled. Therefore, the adhesion area of the electronic component 60 to the adhesive film 9 is reduced, and the electronic component 60 is peeled off from the adhesive film 9.
[ Prior art documents ]
[ patent document ]
Patent document 1: international publication No. 2013/035819
Patent document 2: japanese patent laid-open No. 6-97268
Patent document 3: japanese patent laid-open No. Hei 1-321650
Disclosure of Invention
[ problems to be solved by the invention ]
As shown in fig. 30, the plurality of electronic components 60 are attached to the adhesive film 9 with a gap. From the viewpoint of production efficiency, the intervals between the electronic components 60 stuck on the adhesive film 9 are narrow. Therefore, if one electronic part 60 is pushed upward, the strain of the adhesive film 9 also spreads to the adhesion region of the adjacent electronic part 60. Then, while the object to be peeled is being pushed upward, a part of the adjacent electronic component 60 may be peeled off from the adhesive film 9 to form a peeled portion 91.
When the peeling of the object to be peeled is completed, the pin 8 retreats in the axial direction, and therefore the deflection of the adhesive film 9 is eliminated. Then, the adhesive film 9 is attached again to the peeling portion 91, and a reattachment portion 92 of the adhesive film 9 is generated in the electronic component 60. Fig. 31 is a photograph showing the electrode 602 after the adhesive film 9 is attached to the electronic component 60 again and peeled off. As shown in fig. 31, when the adhesive film 9 is attached again, a residue 93 of the adhesive film 9 may be generated in the electrode 602. The residue 93 of the adhesive film 9 may be burned and carbonized at the time of reflow (reflow) when the electronic component 60 is packaged, and may cause a connection failure or the like.
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a film forming apparatus and a component peeling apparatus capable of preventing residues from remaining on an electronic component and peeling off a film-formed electronic component from a sheet.
[ means for solving problems ]
In order to achieve the above object, the present invention provides a film forming apparatus for an electronic component in which an electrode exposed surface is bonded to an adhesive surface of a protective sheet, the film forming apparatus including: a film formation processing unit that forms a film on the electronic component with a film forming material; and a peeling section configured to peel off the electronic component from the protective sheet after the film is formed by the film forming section; wherein the peeling treatment section includes: a mounting part that supports the electronic component that has been stuck to the protective sheet; a chuck which grips an end portion of the protective sheet, moves relative to the placement portion, and continuously peels the protective sheet toward an opposite end of the end portion; and a fixing portion that fixes a position of the electronic component when the electronic component is peeled off from the protective sheet.
The method may further include: and a guide portion protruding toward an end of the protective sheet, wherein the chuck is located at a protruding destination of the guide portion before the chuck grips the end of the protective sheet, and the guide portion faces the chuck and guides the end of the protective sheet toward the chuck.
The method may further include: and a sheet stopper which moves along the protective sheet together with the chuck and forms a base point of peeling.
The sheet stopper may be positioned near a projection destination of the guide portion when the guide portion is projected, and may hold an end portion of the protective sheet peeled off by the guide portion together with the guide portion, and may guide the protective sheet to the chuck.
The sheet stopper may be a roller having an axis orthogonal to a moving direction of the sheet stopper.
The fixing portion may be: and a component stopper which follows the sheet stopper by keeping a distance less than the length of the electronic component, and presses the electronic component to float up.
The component stopper may be: and a cylindrical roller having an axis orthogonal to the moving direction of the component stopper and capable of rotating.
The fixing portion may be provided on the mounting portion and may fix the electronic component to the mounting surface.
In order to achieve the above object, the present invention provides a component peeling apparatus for peeling an electronic component, which is formed by adhering an electrode exposed surface to an adhesive surface of a protective sheet and forming a film of a film forming material, from the protective sheet, the component peeling apparatus including: a mounting part for supporting the electronic component stuck on the protective sheet; a chuck which grips an end portion of the protective sheet, moves relative to the placement portion, and continuously peels the protective sheet toward an opposite end of the end portion; and a fixing portion that fixes a position of the electronic component when the electronic component is peeled off from the protective sheet.
[ Effect of the invention ]
According to the present invention, it is possible to prevent residues from remaining on the electronic component and to peel off the electronic component having completed the film formation from the protective sheet.
Drawings
Fig. 1 is a side view showing an electronic component subjected to a film formation process.
Fig. 2 is a side view showing a state of an electronic component subjected to a film formation process.
Fig. 3 is an exploded perspective view showing a state of an electronic component when subjected to a film formation process.
Fig. 4 is a transition diagram showing a process flow of film formation of an electronic component.
FIG. 5 is a block diagram showing the structure of a film forming apparatus.
Fig. 6 is a schematic diagram showing the structure of the embedding processing section.
Fig. 7 (a) to (g) are transition diagrams schematically showing states of the embedding processing portion in the respective steps.
Fig. 8 is an enlarged view of the electronic components embedded in the processing portion.
Fig. 9 is a schematic view showing a structure of the board mounting portion.
Fig. 10 (a) to (e) are transition diagrams schematically showing states of the board mounting portion in respective steps.
Fig. 11A and 11B are schematic views showing the structure of the film formation processing section.
Fig. 12 is a schematic diagram showing a structure of the plate releasing portion.
Fig. 13 (a) to (e) are transition diagrams schematically showing states of the plate releasing portion in the respective steps.
Fig. 14 is a schematic diagram showing another structure of the plate releasing portion.
Fig. 15 is a schematic diagram showing still another structure of the plate releasing portion.
Fig. 16 is a schematic diagram showing the structure of the peeling treatment section.
Fig. 17 is a view showing the upper surface of the part-embedded sheet in the peeling treatment section.
Fig. 18 (a) to (f) are transition diagrams schematically showing the state of the peeling treatment section in each step.
Fig. 19 is a schematic view showing a state of preventing the electronic component from floating up.
Fig. 20 is a photograph of the electrode taken after the electronic component is peeled from the protective sheet by the peeling section.
Fig. 21 is a plan view showing another mode of the part-embedded sheet in the peeling processing section.
Fig. 22 is a plan view showing still another embodiment in which the part embedded sheet is separated in the separation processing part.
Fig. 23 is a plan view showing still another embodiment of the part-embedded sheet in the peeling processing section.
Fig. 24 is a plan view of a peeling treatment unit according to another embodiment.
Fig. 25 is a partially enlarged perspective view of the peeling treatment portion at the end of the protective sheet held by the cartridge.
Fig. 26 is a view for explaining recovery of the protective sheet.
Fig. 27 is a sectional view including a mounting table and a discharge table when transferring an electronic component onto a discharge tray.
FIG. 28 is a block diagram showing another configuration of a film forming apparatus.
Fig. 29 is a schematic diagram showing a structure of a conventional ceiling apparatus.
Fig. 30 is a schematic view showing the top of an electronic component in a conventional top loading apparatus.
Fig. 31 is a photograph showing the appearance of an electrode after the adhesive film is again attached to an electronic component and peeled off.
[ description of symbols ]
1: embedding treatment part
11: top part
111: inner space
112: flat surface
113: air hole
114: air pressure supply hole
115: o-shaped ring
12: placing table
121: inner space
122: flat surface
123: air hole
124: air pressure supply hole
125: push rod insertion hole
13: push rod
14: closed space
2: board mounting part
21: top part
211: inner space
212: flat surface
213: air hole
214: air pressure supply hole
215: o-shaped ring
22: placing table
221: opening of the container
222: edge part
223: air pressure supply hole
224: push rod insertion hole
23: push rod
24 a: closed space
24 b: closed space
3: film formation processing section
31: chamber
311: processing position
312: film formation position
32: sampling chamber
33: partition part
34: rotary table
35: surface treatment part
36: sputtering source
361: target
4: plate releasing part
41: top part
411: inner space
412: flat surface
413: air hole
414: air pressure supply hole
415: o-shaped ring
42: placing table
421: opening of the container
422: edge part
423: air pressure supply hole
424: push rod insertion hole
43: push rod
44: clamping block
45: closed space
5: peeling treatment part
51: placing table
511: flat surface
512: inner space
513: air hole
514: air pressure supply hole
515: guide part insertion hole
52: clamping head
52a, 52 b: plate-like body
521: lifting mechanism
53: guide part
54: sheet stopper
55: part stopper
60: electronic component
60 a: peeling off the beginning
601: exposed surface of electrode
602: electrode for electrochemical cell
603: the top surface
604: side surface
605: electromagnetic wave shielding film
61: protective sheet
611: adhesive surface
612: non-adhesive surface
613: outer frame area
614: middle frame area
615: region of arrangement of parts
62: frame structure
621: guide part insertion hole
622: incision
63: cooling plate
631: push rod insertion hole
632: air hole
64: adhesive sheet
65: part non-carrying sheet
66: part-mounted sheet
67: part-embedded sheet
68: part mounting plate
7: film forming apparatus
71: transfer part
73: conveying part
74: control unit
75: pneumatic circuit
8: pin body
80: base seat
80 a: opening of the container
81: sheet feeding table
81 a: rotating mechanism
811 a: rotating shaft
82: platform
821: driving part
822: guide piece
83: discharge table
831: discharge tray
83 a: rotating mechanism
833 a: rotating shaft
83 b: cylindrical member
84: rotating mechanism
85: rotating arm
85 a: suction cup
86: plate-like body
9: adhesive film
91: peeled part
92: reattachment site
93: residue of rice
94: gap
H2: height
H1: height (thickness)
R: region(s)
Detailed Description
(electronic Components)
Fig. 1 is a side view showing an electronic component subjected to a film formation process. As shown in fig. 1, an electromagnetic wave shielding film 605 is formed on the surface of the electronic component 60. The electronic component 60 is a Surface-mount component such as a semiconductor chip, a diode, a transistor, a capacitor, or a Surface Acoustic Wave (SAW) filter. A semiconductor chip is an Integrated Circuit such as an Integrated Circuit (IC) or a Large Scale Integrated Circuit (LSI) in which a plurality of electronic elements are Integrated. The electronic component has a substantially rectangular parallelepiped shape such as a Ball Grid Array (BGA), a Land Grid Array (LGA), a Small Outline Package (SOP), a Quad Flat Package (QFP), a Wafer Level Package (WLP), and the like, and one surface thereof is an electrode exposed surface 601. The electrode exposed surface 601 is a surface where the electrode 602 is exposed and is connected to the package substrate while facing the package substrate. The electrode 602 is an electrode called a ball bump or a solder ball bump, and is formed by mounting solder (solder ball) having a spherical shape with a diameter of several tens μm to several hundreds μm on a pad electrode.
The electromagnetic wave shielding film 605 shields electromagnetic waves. The electromagnetic wave shielding film 605 is made of, for example, Al, Ag, Ti, Nb, Pd, Pt, Zr, or the like. The electromagnetic wave shielding film 605 may be made of a magnetic material such as Ni, Fe, Cr, or Co. Further, a film of SUS, Ni, Ti, V, Ta, or the like may be formed as an underlayer of the electromagnetic wave shielding film 605, and a film of SUS, Au, or the like may be formed as an outermost protective layer.
The electromagnetic wave shielding film 605 is formed on the top surface 603 and the side surface 604 of the electronic component 60, that is, on the outer surface other than the electrode exposed surface 601. The top surface 603 is the surface opposite to the electrode exposed surface 601. The side surface 604 is an outer peripheral surface that connects the top surface 603 and the electrode exposed surface 601 and extends at a different angle from the top surface 603 and the electrode exposed surface 601. The electromagnetic wave shielding film 605 may be formed at least on the top surface 603 in order to obtain a shielding effect of blocking electromagnetic waves. There is an out-of-figure ground pin on side 604. The electromagnetic wave shielding film 605 on the side surface is also formed for grounding the electromagnetic wave shielding film 605. In addition, the electronic component 60 may be referred to as an electronic component 60 including the electromagnetic wave shielding film 605 in a state where the electromagnetic wave shielding film 605 is formed. The top surface 603 and the side surface 604 are referred to as only the top surface 603 and the side surface 604, regardless of whether the electromagnetic wave shielding film 605 is formed or the electromagnetic wave shielding film 605 is not formed. That is, the surface of the electromagnetic wave-shielding film 605 formed on the top surface 603 of the electronic part 60 is also referred to as the top surface 603, and the surface of the electromagnetic wave-shielding film 605 formed on the side surface 604 is also referred to as the side surface 604.
(during film formation treatment)
Fig. 2 is a side view showing a state of the electronic component subjected to the film formation process. Fig. 3 is an exploded perspective view showing a state of the electronic component when the film formation process is performed. As shown in fig. 2 and 3, the electrode 602 of the electronic component 60 is embedded in the protective sheet 61 in advance, and the electrode exposed surface 601 is closely attached to the protective sheet 61. By embedding the electrode 602 in the protective sheet 61, particles of the electromagnetic wave shielding film 605 are prevented from reaching the electrode 602 during film formation. Further, by the close contact between the electrode exposed surface 601 and the protective sheet 61, the space between the electrode exposed surface 601 and the protective sheet 61 for particles of the electromagnetic wave shielding film 605 to enter is also lost, and the possibility that the particles of the electromagnetic wave shielding film 605 reach the electrode 602 is reduced.
The protective sheet 61 is a heat-resistant synthetic resin such as Polyethylene naphthalate (PEN) or Polyimide (PI). One surface of the protective sheet 61 is an adhesive surface (adhesive layer) 611 having flexibility for allowing the electrode 602 to sink and adhesiveness for allowing the electrode exposed surface 601 to adhere to the surface. As the adhesive surface 611, various materials having adhesiveness, such as silicone-based or acrylic-based resins, urethane resins, and epoxy resins, can be used.
The adhesive surface 611 is divided into an outer frame region 613 extending inward from the end of the protective sheet 61 by a predetermined distance, an inner frame region 614 extending inward from the inner periphery of the outer frame region 613 by a predetermined distance, and a component arrangement region 615 located inward of the inner frame region 614. The electronic parts 60 are pasted in the part arrangement area 615. A frame-shaped frame 62 is attached to the outer frame area 613. The middle frame region 614 is a region where warpage of the protective sheet 61 is generated, and neither the frame 62 nor the electronic part 60 is stuck. The opposite surface of the adhesive surface 611 is a non-adhesive surface 612. The regions of the non-adhesive surface 612 corresponding to the outer frame region 613, the middle frame region 614, and the component arrangement region 615 are also referred to simply as the outer frame region 613, the middle frame region 614, and the component arrangement region 615.
The protective sheet 61 is adhered to the cooling plate 63 via an adhesive sheet 64. The cooling plate 63 is made of metal such as SUS, ceramic, resin, or other material having high thermal conductivity. The cooling plate 63 is a heat radiation passage for radiating heat of the electronic components to suppress excessive heat storage. Both surfaces of the adhesive sheet 64 have adhesiveness, and the protective sheet 61 and the cooling plate 63 are improved in adhesiveness, and a heat transfer area to the cooling plate 63 is secured.
A height H1 from the surface of the component arrangement region 615 to the upper end surface of the frame 62 is higher than a height H2 from the surface of the component arrangement region 615 to the top surface 603 of the electronic component 60 (see fig. 4). For convenience, the height H1 may be referred to as the thickness H1, but the meaning is the same. In short, if a flat plate is placed on the frame 62, the top surface 603 of the electronic component 60 does not reach the flat plate.
A guide insertion hole 621 is formed through one end of the frame 62. The guide insertion hole 621 has an elongated opening of an ellipse, a rectangle, a circle, or the like along the end of the frame 62, and is formed through the surface of the frame 62 to be adhered to the protective sheet 61 and the opposite exposed surface thereof. That is, for example, when the rod-shaped member is inserted into the guide insertion hole 621 and the end portion of the protective sheet 61 is pressed (see fig. 18 (a) to (f)), the end portion of the protective sheet 61 is peeled off from the frame 62.
A push rod (pusher) insertion hole 631 is formed in the cooling plate 63 and the adhesive sheet 64. The push rod insertion hole 631 is not aligned with the guide portion insertion hole 621 and is formed at a position blocked by the frame 62. A plurality of push rod insertion holes 631 penetrate in the following manner: when, for example, a rod-like member is inserted into the pusher insertion hole 631 and the frame 62 is pushed up by the front end of the rod-like member, the frame 62 is raised in parallel as a whole. For example, if the frame 62 is a rectangular frame, the pusher insertion holes 631 are located at the four corners or further at the center of each side. From the viewpoint of maintaining the parallelism of the frames 62, the rod-like member preferably has a rectangular distal end surface, that is, a thin plate shape, a cross-sectional L-shape, or the like, but is not limited thereto, and may have a circular distal end surface. The push rod insertion hole 631 has a rectangular shape, an L shape, or a circular shape, correspondingly.
Further, many fine air holes 632 are formed in the cooling plate 63 and the adhesive sheet 64 in the range of the part arrangement region 615 where the protective sheet 61 is adhered. The air hole 632 has a minute cylindrical shape or a slit shape, for example. The air holes 632 are provided so as to uniformly apply negative pressure or positive pressure to at least the part arrangement region 615 of the protective sheet 61 stuck to the cooling plate 63 through the air holes 632.
(film formation Process flow)
In the film formation process, the electronic component 60 separated into individual pieces with the electromagnetic wave shielding film 605 formed thereon is obtained through a component mounting step, a component embedding step, a board mounting step, a film formation step, a board removing step, and a component peeling step.
Fig. 4 is a diagram showing a flow of a film forming process of an electronic component. As shown in fig. 4, in the component mounting step, the electronic components 60 are arranged in the component arrangement region 615 in a state where the electrode exposed surfaces 601 of the electronic components 60 are opposed to the component non-mounting sheet 65 in which the frame 62 is adhered to the protective sheet 61. The state in which the frame 62 is attached to the protective sheet 61 and the electronic components 60 are arranged but the electrodes 602 are not embedded is referred to as a component mounting sheet 66.
In the component embedding step, the electrode 602 is embedded in the protective sheet 61 with respect to the component placement sheet 66, and the electrode exposed surface 601 is brought into close contact with the protective sheet 61. The state in which the electrode 602 is embedded in the protective sheet 61 regardless of whether the electromagnetic wave shielding film 605 is formed or not is referred to as a part-embedded sheet 67. In the board mounting step, the component-embedded sheet 67 is brought into close contact with the cooling plate 63 via the adhesive sheet 64. The state in which the cooling plate 63 is mounted is referred to as a component mounting plate 68.
In the film formation step, particles of the electromagnetic wave shielding film 605 are deposited from the top surface 603 side of the electronic component 60, and the electromagnetic wave shielding film 605 is formed on the electronic component 60. At this time, the electrode 602 of the electronic component 60 is buried in the protective sheet 61, and the electrode exposed surface 601 is closely attached to the protective sheet 61, thereby preventing particles of the electromagnetic wave shielding film 605 from adhering to the electrode 602.
In the plate removing step, the cooling plate 63 is removed, and the shape of the component-embedded piece 67 is restored. Then, in the part peeling step, the electronic part 60 and the frame 62 are peeled off from the protective sheet 61, and the protective sheet 61 and the electronic parts 60 and the frame 62 are separated. The film formation process is terminated in the above manner.
(film Forming apparatus)
Fig. 5 shows a film deposition apparatus that is responsible for the component embedding step, the board mounting step, the film deposition step, the board removing step, and the component peeling step in the above film deposition process flow. As shown in fig. 5, the film forming apparatus 7 includes: an embedding processing section 1, a plate mounting section 2, a film formation processing section 3, a plate releasing section 4, and a peeling processing section 5. The units are connected by a conveying unit 73, and components necessary for each step are input and the components that have been processed in each step are discharged. The conveying unit 73 may be, for example, a conveyor, or a conveying table movable along a linear track by a ball screw or the like.
The film forming apparatus 7 houses a control Unit 74 such as a computer or a microcomputer, which includes a Central Processing Unit (CPU), a Read Only Memory (ROM), a Random Access Memory (RAM), and a signal transmission circuit, and controls the timing of the operation of each of the constituent elements included in the embedded Processing Unit 1, the board mounting Unit 2, the film forming Processing Unit 3, the board removing Unit 4, and the peeling Processing Unit 5. Further, an air pressure circuit 75 is housed to supply positive pressure or negative pressure to the embedding process section 1, the board mounting section 2, the film formation process section 3, the board release section 4, and the peeling process section 5. The control unit 74 also controls the solenoid valve in the pneumatic circuit 75 to switch between generating negative pressure, releasing negative pressure, generating positive pressure, and releasing positive pressure.
(embedding treatment section)
The embedding process portion 1 responsible for the component embedding step will be described. Fig. 6 is a schematic diagram showing the structure of the embedding processing section 1. The component mounting piece 66 is put into the embedded part 1. The protective sheet 61 is attracted to the electronic component 60 while being embedded in the processing portion 1 to block the electronic component 60, and the protective sheet 61 is pressed against the electronic component 60. Thus, the embedding processing unit 1 causes the electrode 602 of the electronic component 60 to sink into the protective sheet 61, and further causes the electrode exposed surface 601 to adhere to the protective sheet 61.
As shown in fig. 6, the embedding part 1 includes a top part 11 and a mounting table 12. The top 11 and the table 12 are a block having an internal space 111 and an internal space 121. The top portion 11 is disposed to face the mounting table 12, and has a flat surface 112 and a flat surface 122 parallel to each other on the facing sides. The flat surfaces (112, 122) have the same size and shape as the component mounting sheet 66 or are wider than the component mounting sheet 66. The position of the mounting table 12 is not moved. On the other hand, the top portion 11 is liftable with respect to the mounting table 12. The top 11 is at least close to the mounting table 12 to the distance of the thickness H1 of the frame 62 of the component mounting sheet 66.
On this mounting table 12, a component mounting sheet 66 is placed. The flat surface 122 of the mounting table 12 serves as a mounting surface for the component mounting sheet 66. The flat surface 122 includes an anti-slip member having adhesive force. Further, a large number of air holes 123 extending to the internal space 121 are formed through the flat surface 122 of the table 12. The penetration range of the air hole 123 is the same size and shape as the inside of the frame 62 of the component mounting piece 66, or at least the same size and shape as the component arrangement region 615. When the component placement piece 66 has been placed on the placement table 12, the penetration position of the air hole 123 is a position facing the area inside the frame 62 or a position facing the component arrangement area 615.
An air pressure supply hole 124 is formed in the internal space 121 of the table 12 at a position different from the flat surface 122. The air pressure supply hole 124 is connected to an air pressure circuit 75 including a compressor, a negative pressure supply pipe, a positive pressure supply pipe, and the like, which are not shown. Therefore, positive pressure or negative pressure is selectively generated in the air hole 123 by the air pressure supply hole 124 and the internal space 121.
Further, a pusher insertion hole 125 penetrating the table 12 is opened in the flat surface 122 of the table 12. The push rod insertion hole 125 is disposed outside the penetration range of the air hole 123. In detail, when the component mounting piece 66 is mounted, the penetration position of the pusher insertion hole 125 is a position blocked by the frame 62 avoiding the guide insertion hole 621 of the frame 62. The push rod 13 is inserted into this push rod insertion hole 125. The pusher 13 can be retracted from the flat surface 122 of the table 12. The push rods 13 are provided with such rigidity, number and arrangement intervals that the component mounting pieces 66 are separated from the mounting table 12 when they protrude from the push rod insertion holes 125, and can be lifted and supported in parallel. For example, if the frame 62 has a rectangular outer shape, rods are arranged corresponding to the corners of the frame 62.
Then, a plurality of air holes 113 to the inner space 111 are also formed through the flat surface 112 of the top 11. The penetration range of the air holes 113 is the same size and shape as the inside of the frame 62 of the component mounting piece 66, or at least the same size and shape as the component arrangement region 615, and extends over the entire component arrangement region 615. When the component placement piece 66 is placed on the placement table 12, the penetration position of the air hole 113 is a position facing the area inside the frame 62 or a position facing the component arrangement area 615.
An air pressure supply hole 114 penetrates the inner space 111 of the ceiling portion 11 at a position different from the flat surface 112. The pneumatic pressure supply hole 114 is connected to a pneumatic circuit 75 including a compressor, a negative pressure supply pipe, and the like, not shown. Therefore, a negative pressure is generated in the air hole 113 through the air pressure supply hole 114 and the internal space 111.
Further, an O-ring 115 surrounding the penetration range of the air hole 113 is provided on the flat surface 112 of the top part 11 along the frame 62 of the component mounting piece 66 placed on the mounting table 12.
Fig. 7 (a) to (g) show the flow of the operation of the embedding processing unit 1. Fig. 7 (a) to (g) are transition diagrams schematically showing the state of the embedded part 1 in each step. First, as shown in fig. 7 (a), the component mounting piece 66 is put into the embedding processing portion 1. The top portion 11 is sufficiently separated from the mounting table 12, and the push rod 13 first projects its tip from the flat surface 122 of the mounting table 12. When the parts loading piece 66 is thrown in, the frame 62 of the parts loading piece 66 is aligned with the push rod 13, and the parts loading piece 66 is supported on the push rod 13.
Then, as shown in fig. 7 (b), the plunger 13 is retracted into the plunger insertion hole 125. Thereby, the component placement piece 66 is lowered onto the flat surface 122 of the placement table 12. Further, the top portion 11 is moved toward the mounting table 12. The frame 62 of the component mounting sheet 66 is sandwiched between the flat surface 112 of the top portion 11 and the flat surface 122 of the mounting table 12. A height H1 from the surface of the component arrangement region 615 to the upper end surface of the frame 62 is higher than a height H2 from the surface of the component arrangement region 615 to the top surface 603 of the electronic component 60. Therefore, when the frame 62 has been sandwiched, the top surface 603 of the electronic part 60 does not reach the flat surface 112 of the top 11. Therefore, the component arrangement region 615 carrying the electronic component 60 is enclosed in the sealed space 14 surrounded by the flat surface 112 of the top portion 11, the protective sheet 61, and the frame 62 and sealed by the O-ring 115.
When the component arrangement region 615 is sealed in the sealed space 14, as shown in fig. 7 (c), a negative pressure is generated in the air holes 123 of the mounting table 12, and the protective sheet 61 is attracted to the flat surface 122. Then, as shown in fig. 7 (d), negative pressure is also generated in the air holes 113 of the top part 11, and the closed space 14 in which the component arrangement region 615 is enclosed is decompressed. That is, both air holes (113, 123) of the top part 11 and the mounting table 12 function as decompression parts. The degree of decompression is preferably equal to the pressure reached by both air holes (113, 123) and close to vacuum. The reason why the negative pressure is generated first in the air hole 123 of the mounting table 12 is that: by first sucking the protective sheet 61 onto the mounting table 12, it is possible to suppress the pressure on the lower side of the protective sheet 61 from becoming excessively high with respect to the pressure on the upper side in the process of reducing the pressure in the sealed space 14, and thus to suppress the electronic component 60 from rapidly protruding toward the flat surface 112 of the ceiling portion 11.
When the decompression is completed, as shown in fig. 7 (e), the air holes 123 of the table 12 are gradually changed from the negative pressure to the positive pressure while the negative pressure of the top 11 side is maintained, and the air holes 123 of the table 12 are changed to the positive pressure. The electronic component 60 and the protective sheet 61 are slowly sucked upward toward the flat surface 112 of the top 11 and are also slowly pushed upward. The electronic component 60 is pressed and blocked by the flat surface 112 of the top portion 11. On the other hand, since the adhesive surface 611 of the protective sheet 61 has flexibility, the protective sheet is further attracted toward the flat surface 112 even after the electronic component 60 has been blocked, and is further pushed upward toward the flat surface 112.
Then, the electrode 602 of the electronic component 60 is embedded in the protective sheet 61, more specifically, the adhesive surface 611 of the protective sheet 61, and the electrode exposed surface 601 of the electronic component 60 is closely attached to the protective sheet 61. At this time, the flat surface 112 of the top portion 11 includes a part arrangement region 615, and the part arrangement region 615 is made flat. In other words, the part arrangement region 615 is not bent. Therefore, insufficient embedding of the electrode 602 or insufficient adhesion of the electrode exposed surface 601 is prevented from occurring at the end of the component arrangement region 615.
The process of adhering the electrode exposed surface 601 to the protective sheet 61 is performed under a reduced pressure environment, and air is not present in the sealed space or is very little. Therefore, the possibility of air bubbles entering between the electrode exposed surface 601 and the protective sheet 61 is low.
Fig. 8 is an enlarged view of the electronic components 60 embedded in the processing portion 1. As shown in fig. 8, the positive pressure generated in the stage 12 pushes up at least the part arrangement area 615 of the protective sheet 61 uniformly. Then, in each gap between the adjacent electronic components 60, the protective sheet 61 having flexibility is pushed further toward the flat surface 112 of the top portion 11 without being blocked by the electronic components 60. Then, the adhesive surface 611 of the protective sheet 61 rises until it reaches the lower portion of the side surface of the electronic component 60, and the protective sheet 61 is also in close contact with the lower portion of the side surface of the electronic component 60. Therefore, particles of the electromagnetic wave shielding film 605 can be more reliably prevented from entering between the electrode exposed surface 601 and the protective sheet 61.
When the electrode 602 of the electronic component 60 is embedded in the protective sheet 61 and the electrode exposed surface 601 of the electronic component 60 and the lower portion of the side surface are in close contact with the protective sheet 61, the pusher 13 moves in the axial direction along the pusher insertion hole 125 and emerges from the flat surface 122 of the mounting table 12 again as shown in fig. 7 (f). At the same time, the top portion 11 is moved away from the table 12 at a speed equal to the forward speed of the pusher 13. Finally, as shown in fig. 7 (g), the top portion 11 is further separated from the mounting table 12 by stopping the pusher 13, thereby releasing the sandwiching of the component embedded piece 67. Thereby, the electronic component 60 embedded in the embedding processing unit 1 is completely embedded in the protective sheet 61.
The negative pressure on the top portion 11 side and the positive pressure on the mounting table 12 side may be released during a period from completion of the adhesion of the electrode exposed surface 601 of the electronic component 60 to the protective sheet 61 in fig. 7 (e) to the raising of the top portion 11 in fig. 7 (g). The negative pressure on the top portion 11 side is preferably released immediately before the top portion 11 is raised in fig. 7 (g), because the electronic component 60 can be stably held on the protective sheet 61 when the push rod 13 is raised in fig. 7 (f).
In this way, the top portion 11 and the mounting table 12 serve as a fixing portion for sandwiching the component mounting sheet 66 by sandwiching the frame 62 from both sides. The top 11, the protective sheet 61, and the frame 62 form a sealed space 14 in which the component arrangement region 615 is sealed. The O-ring 115 improves the sealing of the sealed space 14 by sealing. Further, the air hole 113 of the ceiling 11 serves as a decompression section for decompressing the sealed space 14.
The flat surface 122 of the mounting table 12 serves as a mounting surface for the component mounting sheet 66. The air holes 123 opened in the flat surface 122 of the mounting table 12 serve as a collision preventing member that prevents the electronic component 60 from protruding toward the flat surface 112 of the top portion 11 by generating a negative pressure at first when the sealed space 14 is depressurized, and a pressing member that presses the component arrangement region 615 against the flat surface 112 of the top portion 11 by interacting with the negative pressure of the top portion 11 by the positive pressure and embeds the electrodes 602 of the electronic component 60.
The flat surface 112 of the top portion 11 serves as a flattening member for flattening the component arrangement region 615 to enhance the embedding effect of the electrode 602 and the adhesion effect of the electrode exposed surface 601. The air holes 113 opened in the flat surface 112 of the top portion 11 serve as a suction member that presses the component arrangement region 615 against the flat surface 112 of the top portion 11 by a negative pressure interacting with a positive pressure of the mounting table 12 to embed the electrodes 602 of the electronic component 60, and a side surface lower portion covering member that attracts the protective sheet 61 upward into the gap between the electronic components 60 by a positive pressure of the mounting table 12 to closely adhere the protective sheet 61 to the side surface lower portion of the electronic component 60.
In this way, the embedding processing unit 1 embeds the electrode 602 of the electronic component 60 in the adhesive surface 611 of the protective sheet 61, but has a pressure reducing unit that reduces the pressure in the space including the electronic component 60 and the component arrangement region 615. After the pressure is reduced, the electronic component 60 and the protective sheet 61 are pressed against each other. Accordingly, air bubbles do not enter between the electrode exposed surface 601 of the electronic component 60 and the protective sheet 61 and become insufficient in adhesion, and a gap is less likely to be formed between the electrode exposed surface 601 of the electronic component 60 and the protective sheet 61, whereby a situation in which particles of the electromagnetic wave shielding film 605 adhere to the electrode 602 can be avoided.
The embedding part 1 includes a flat surface 112 of the top part 11. The flat surface 112 is located on the side opposite to the protective sheet 61 across the electronic component 60 and faces the electronic component 60. The pressure between the mounting table 12 and the protective sheet 61, i.e., the space on the opposite side of the protective sheet 61 from the flat surface 112, is relatively higher than the pressure in the space between the protective sheet 61 and the flat surface 112. Thereby, the electronic component 60 and the protective sheet 61 are directed to the flat surface 112, and the flat surface 112 serves as a stopper to press the electronic component 60 and the protective sheet 61 against each other. Therefore, the part arrangement region 615 of the protective sheet 61 is flat, and the electrode exposed surface 601 of the electronic part 60 and the protective sheet 61 are pressed against each other in a state in which they are parallel to each other. Therefore, the room for entry of bubbles is further lost.
The embedding unit 1 further includes a mounting table 12, i.e., a mounting surface (flat surface 122) located on the opposite side of the flat surface 112 with the protective sheet 61 interposed therebetween. Air holes 123 that open onto the mounting surface and generate negative pressure during the decompression of the sealed space 14 to separate the protective sheet 61 from the flat surface 112 are formed in the mounting table 12. This can prevent the electronic component 60 from being damaged by the electronic component rapidly protruding toward the flat surface 112 during the decompression of the sealed space 14.
Further, although the air holes 113 of the top 11 and the air holes 123 of the mounting table 12 for pressing the electronic component 60 and the protective sheet 61 against each other are used as the decompression section, the 3 rd air hole may be separately formed in the sealed space 14, and the decompression may be performed by generating a negative pressure in the 3 rd air hole.
The air hole 123 on the mounting table 12 side is turned to generate a positive pressure after the pressure in the sealed space 14 is reduced, and the protective sheet 61 is further pressed against the electronic component 60 blocked by the flat surface 112. Thus, the protective sheet 61 rises together with the adhesive surface 611 in the gap between the electronic components 60, and the lower part of the side surface of the electronic components 60 may be covered with the protective sheet 61. Therefore, the gap between the electrode exposed surface 601 and the protective sheet 61 can be reliably prevented. Even in an electronic component such as an SOP or QFP having a thin plate-like electrode at the lower portion of the side surface, the protective sheet 61 covers the electrode 602, and the deposition of particles of the electromagnetic wave shielding film 605 can be prevented, and the film forming apparatus 7 can be applied.
In addition, the action mechanism of the top 11 and the action mechanism of the push rod 13 can be applied to the existing mechanisms, and the present invention is not limited by the mechanism of the mechanisms.
For example, a ball screw whose shaft extends in a direction from the top portion 11 toward the table 12 and a rail guide extending in a direction from the top portion 11 toward the table 12 are connected to the top portion 11. The top 11 moves along the guide rail toward the mounting table in accordance with the rotation direction of the screw shaft. The ball screw and the rail guide are extended so that the top portion 11 approaches the mounting table 12 to a distance of a thickness H1 of the frame 62 of the component mounting piece 66.
In addition, the rear end portion of the push rod 13 becomes a cam follower (cam follower). The cam follower follows the circumferential surface of the oval cam. The camshaft is supported by the rotary motor to be rotatable in the circumferential direction. When the cam is rotated by driving the rotary motor, the cam follower raises the bulging portion of the cam, the push rod 13 is pushed upward, and the tip end of the push rod 13 protrudes from the insertion hole.
Further, as a method of fixing the component mounting sheet 66, the frame 62 is sandwiched between the top 11 and the mounting table 12, the closed space 14 is formed by the top 11, the protective sheet 61 and the frame 62, and both positive pressure and negative pressure are selectively generated in the air hole 123 of the mounting table 12, but the method is not limited thereto. For example, one or both of the top portion 11 and the mounting table 12 may be formed in a cup shape, and the component mounting piece 66 may be accommodated in an internal space formed by the top portion 11 and the mounting table 12. It may be a block body that is sandwiched between the frames 62 from both sides, and the component-mounted piece 66 is held by the block body. In this case, the height of the frame 62 is not limited. Both a through-hole for generating a negative pressure and a through-hole for generating a positive pressure may be formed in the flat surface 122 of the mounting table 12.
(Board mounting part)
Next, the board mounting portion 2 responsible for the board mounting step will be described. Fig. 9 is a schematic diagram showing the structure of the board mounting portion 2. The component embedded sheet 67 produced by the embedding part 1 and the cooling plate 63 to which the adhesive sheet 64 is previously attached are put into the board mounting part 2. The board mounting portion 2 presses the component-embedded piece 67 against the blocked cooling plate 63, and sucks the component-embedded piece 67 to the cooling plate 63, thereby bringing the component-embedded piece 67 into close contact with the cooling plate 63 via the adhesive sheet 64.
As shown in fig. 9, the board mounting portion 2 includes a top portion 21 and a mounting table 22. The top 21 is disposed opposite to the mounting table 22. The position of the table 22 is not moved. On the other hand, the top portion 21 is liftable with respect to the mounting table 22. The top 21 is at least close to the mounting table 22 to a distance of a thickness H1 of the frame 62 of the component embedded piece 67.
The top 21 is a block having an internal space 211, and has a flat surface 212 on a surface facing the table 22. The mounting table 22 has a bottomed cup shape. The opening 221 of the table 22 faces the top 21. The flat surface 212 of the top 21 has the same size and shape as the component-embedded piece 67 or is wider than the component-embedded piece 67. On the other hand, the opening 221 of the mounting table 22 has an area included in the part arrangement region 615 or more and the middle frame region 614 or less. The edge 222 of the table 22 surrounding the opening 221 has a width equal to or greater than the width of the frame 62.
In this mounting table 22, the edge portion 222 supports the cooling plate 63, and the opening 221 is closed by the cooling plate 63. The surface of the cooling plate 63 opposite to the surface to which the adhesive sheet 64 is bonded is in contact with the edge 222. Further, the component embedded sheet 67 is placed on the cooling plate 63 so as to face the adhesive sheet 64. An air pressure supply hole 223 penetrates the bottom of the mounting table 22. The pneumatic pressure supply hole 223 is connected to a pneumatic circuit 75 including a compressor, a negative pressure supply pipe, and the like, not shown. Therefore, negative pressure is generated in the air holes 632 of the cooling plate 63 placed so as to close the openings 221.
Further, a pusher insertion hole 224 that penetrates the table 22 is provided through the edge portion 222 of the table 22. The insertion position of the pusher insertion hole 224 is the same as the pusher insertion hole 631 of the cooling plate 63, and when the component embedded piece 67 is placed on one side, the insertion hole is blocked by the frame 62 while avoiding the guide insertion hole 621 of the frame 62. The push rod 23 is inserted into this push rod insertion hole 224. The push rod 23 can penetrate the mounting table 22, the cooling plate 63 and the adhesive sheet 64.
The push rods 23 are provided with such rigidity, number and arrangement intervals that the component embedded pieces 67 are separated from the cooling plate 63 and can be supported in parallel in a state of protruding from the cooling plate 63. For example, if the frame 62 has a rectangular outer shape, the frame is arranged as a bar corresponding to each corner of the frame 62. The push rod insertion holes 224 are also provided corresponding to the number and positional relationship of the push rods 23.
Then, a plurality of air holes 213 to the inner space 211 are formed through the flat surface 212 of the top 21. The penetration range of the air hole 213 is the same size and shape as the inside of the frame 62 of the component-embedded piece 67, or at least the same size and shape as the component arrangement region 615. When the component-embedded piece 67 has been placed on the mounting table 22, the penetration position of the air hole 213 is a position covered by the component arrangement region 615 (see fig. 10 (a)).
An air pressure supply hole 214 penetrates the internal space 211 of the top 21 at a position different from the flat surface 212. The air pressure supply hole 214 is connected to an air pressure circuit 75 including a compressor, a positive pressure supply pipe, a negative pressure supply pipe, and the like, which are not shown. Therefore, the air pressure supply hole 214 and the internal space 211 selectively generate positive pressure and negative pressure in the air hole 213.
Further, an O-ring 215 surrounding the penetration range of the air hole 213 is provided on the flat surface 212 of the top 21 along the frame 62 of the component embedding piece 67 placed on the mounting table 22.
Fig. 10 (a) to (e) show the flow of the operation of the board mounting portion 2. Fig. 10 (a) to (e) are transition diagrams schematically showing the states of the board mounting portion 2 in the respective steps. First, as shown in fig. 10 (a), the top portion 21 is separated from the mounting table 22. The cooling plate 63 is mounted on the mounting table 22 in advance. The push rod 23 is first passed through the cooling plate 63 and the adhesive sheet 64 and projected toward the top portion 21. In this state, the frame 62 of the component-embedded piece 67 is aligned with the push rod 23, and the component-embedded piece 67 is supported by the push rod 23. Then, the top 21 is lowered toward the push rod 23, and the frame 62 of the component embedding piece 67 is sandwiched by the top 21 and the push rod 23.
At this time, a height H1 from the surface of the component arrangement region 615 to the upper surface of the frame 62 is higher than a height H2 from the surface of the component arrangement region 615 to the top surface 603 of the electronic component 60. Therefore, when the frame 62 has been sandwiched, the top surface 603 of the electronic part 60 does not reach the flat surface 212 of the top 21. Therefore, at least the component arrangement region 615 is enclosed in the closed space 24a formed by the top portion 21, the protective sheet 61, and the frame 62 and sealed by the O-ring 215.
When the component arrangement region 615 is sealed in the closed space 24a, negative pressure is generated in the flat surface 212 of the top portion 21. The electronic component 60 is adsorbed on the flat surface 212. The part-embedded sheet 67 generates strain in the middle frame region 614, and the entire region of the part arrangement region 615 is attracted to the flat surface 212 in a following flat state. Therefore, the component arrangement region 615 is not bent as much as the bending, and the embedded electrode 602 is not detached from the protective sheet 61. Further, the flat surface 212 of the top portion 21 is preferably formed with a negative pressure by gradually decreasing the pressure so as not to cause the electronic component 60 to rapidly protrude toward the flat surface 212.
Then, as shown in fig. 10 (b), the pusher 23 and the top 21 are lowered toward the table 22 at the same speed. Further, the region of the frame 62 where the part embedding sheet 67 is embedded is brought into contact with the adhesive sheet 64 on the cooling plate 63. Further, the top 21 is moved toward the mounting table 22, whereby the area of the frame 62 is adhered to the adhesive sheet 64. At this stage, the negative pressure of the top portion 21 is maintained, and the component-embedded part 67 is attracted to the flat surface 212 of the top portion 21, so that the component arrangement region 615 is not in contact with the adhesive sheet 64.
Here, when negative pressure is not generated in the top 21, the part-embedded sheet 67 contacts the adhesive sheet 64 in the presence of air. Then, there is a fear that air bubbles enter between the part-embedded sheet 67 and the adhesive sheet 64. When the air bubbles enter, the heat transfer area reaching the cooling plate 63 decreases, and the heat radiation effect of the electronic component 60 during film formation decreases. However, in this board mounting portion 2, the component-embedded piece 67 is raised in a direction away from the adhesive sheet 64 in an atmosphere where air exists, and therefore entry of air bubbles is prevented.
When the frame 62 is closely attached to the adhesive sheet 64, the non-adhesive surface 612 of the protective sheet 61 and the adhesive sheet 64 side of the cooling plate 63 are enclosed in the sealed space 24b formed by the protective sheet 61, the cooling plate 63, and the frame 62. When the sealed space 24b is formed, as shown in fig. 10 (c), a negative pressure is generated in the mounting table 22 while maintaining the negative pressure of the ceiling portion 21. The air holes 632 of the cooling plate 63 and the air holes 632 of the adhesive sheet 64 reduce the pressure in the sealed space 24b between the cooling plate 63 provided with the adhesive sheet 64 and the protective sheet 61. At this time, the negative pressure generated in the mounting table 22 is preferably set to a value slightly closer to the atmospheric pressure than the negative pressure generated in the top portion 21, and the suction of the electronic component 60 to the top portion 21 can be maintained.
When the pressure reduction of the sealed space 24b between the cooling plate 63 provided with the adhesive sheet 64 and the protective sheet 61 is completed, the negative pressure of the top 21 is gradually changed to the positive pressure while the negative pressure of the mounting table 22 is maintained, as shown in fig. 10 (d). The component-embedded piece 67 is gradually sucked and lowered toward the adhesive sheet 64, and the component-embedded piece 67 is pressed downward, so that the component-embedded piece 67 is pressed against the adhesive sheet 64 adhered to the cooling plate 63. The component embedded sheet 67 is attached to the cooling plate 63 via the adhesive sheet 64.
Finally, as shown in fig. 10 (e), by moving top portion 21 away from mounting table 22, the sandwiching of part embedded sheet 67 with adhesive sheet 64 and cooling plate 63 overlapped is released. Thus, the component mounting plate 68 including the electronic component 60, the protective sheet 61, the adhesive sheet 64, and the cooling plate 63 is completed. The positive pressure generated in the top portion 21 and the negative pressure generated in the table 22 may be released during the period of separating the top portion 21 from the table 22.
That is, the top portion 21, the push rod 23, and the table 22 serve as a driving portion for bringing the component-embedded piece 67 and the cooling plate 63 close to each other. The top 21 and the mounting table 22 serve as a fixing portion for sandwiching the component embedded piece 67 and the cooling plate 63, and also serve as a pressing portion for pressing the frame 62 and the cooling plate 63 to be in close contact with each other. The air pressure supply hole 223 of the mounting table 22 serves as a decompression unit for decompressing the sealed space 24b between the component embedded piece 67 and the cooling plate 63. The air hole 213 of the top portion 21 serves as a decompression portion for decompressing the sealed space 24a between the flat surface 212 of the top portion 21 and the component embedded piece 67.
The flat surface 212 of the top portion 21 serves as a spacer member for preventing air bubbles from entering between the component embedded piece 67 and the cooling plate 63 by generating a negative pressure prior to the pressure reduction between the component embedded piece 67 and the cooling plate 63, and serves as a pressing member for bringing the component embedded piece 67 into close contact with the cooling plate 63 by the interaction of the positive pressure and the suction by the negative pressure of the mounting table 22. The mounting table 22 serves as an adsorbing member for causing the embedded-part piece 67 to closely contact the cooling plate 63 by the negative pressure and the pressing action of the positive pressure by the top portion 21.
In this way, the board mounting portion 2 sticks the protective sheet 61, in which the electrode 602 of the electronic component 60 is embedded, to the cooling plate 63. The board mounting portion 2 has a decompression portion for decompressing a space between the component arrangement region 615 and the cooling plate 63. After the pressure reduction by the pressure reducing section, the protective sheet 61 and the cooling plate 63 are pressed against each other. This prevents air bubbles from entering between the protective sheet 61 and the cooling plate 63, and ensures a sufficient heat transfer area to the cooling plate 63.
The board mounting portion 2 has an air hole 213 on the flat surface 212 of the top portion 21, i.e., on the opposite side of the protective sheet 61 from the cooling plate 63, for sucking up the protective sheet 61 by negative pressure to separate the cooling plate 63 from the protective sheet 61. The air hole 213 maintains a negative pressure until the pressure reduction between the component-embedded piece 67 and the cooling plate 63 by the pressure reduction portion is completed. This prevents the protective sheet 61 from being stuck to the cooling plate 63 in a state where the pressure reduction is not completed, and thus, it is possible to further reduce the possibility that air bubbles enter between the protective sheet 61 and the cooling plate 63, and to sufficiently secure a heat transfer area to the cooling plate 63.
Further, before the air hole 213 opened in the flat surface 212 of the top portion 21 descends from the pusher 23 and the top portion 21 comes into contact with the mounting table 22 via the frame 62 of the component embedding piece 67, that is, before the component embedding piece 67 and the cooling plate 63 approach each other, negative pressure is generated at the latest before a space between the cooling plate 63 provided with the adhesive sheet 64 and the protective sheet 61 is formed. This prevents the protective sheet 61 from being erroneously stuck to the cooling plate 63 before the push rod 23 provided with the protective sheet 61 (the component-embedded sheet 67) starts to descend.
In addition, the board mounting portion 2 has a flat surface 212 of the top portion 21. The flat surface 212 is located on the opposite side of the cooling plate 63 via the protective sheet 61 and faces the electronic component 60. Air holes 213 for separating the cooling plate 63 from the protective sheet 61 are opened in the flat surface 212 before the pressure reduction between the component embedded piece 67 and the cooling plate 63 is completed. Thus, the protective sheet 61 is not bent or deflected by the pressure difference between the front and back surfaces of the protective sheet 61 during the pressure reduction process, the protective sheet 61 can be flattened, and the electronic component 60 can be prevented from being peeled off from the protective sheet 61 during the board mounting process.
The air hole 213 on the top 21 side is switched from generating negative pressure to generating positive pressure after the pressure reduction between the part embedded piece 67 and the cooling plate 63, and presses the protective sheet 61 against the cooling plate 63. That is, the air hole 213 serves as a partition between the protective sheet 61 and the cooling plate 63, a decompression portion, and a pressing member for the protective sheet 61 and the cooling plate 63. However, the functions of the isolation, pressure reduction, and close contact members may be realized by the air holes which are independent of each other.
For example, as in the present embodiment, the air holes 632 are provided in the cooling plate 63. The board mounting portion 2 includes a mounting table 22 on which the cooling plate 63 is mounted and which generates negative pressure. The protective sheet 61 may be sucked onto the cooling plate 63 through the mounting table 22 on which the cooling plate 63 is mounted and the air holes 632 of the cooling plate 63.
The mechanism of the operation of the top 21 and the mechanism of the operation of the push rod 23 are not limited to the mechanism, as long as the conventional mechanisms are used.
For example, a ball screw whose shaft extends in the direction from the top 21 toward the table 22 and a guide rail guide extending in the direction from the top 21 toward the table 22 are connected to the top 21. In this case, the top 21 moves along the guide rail toward the table 22 in accordance with the rotation direction of the screw shaft. The ball screw and the rail guide are extended so that the top 21 approaches the mounting table 22 by a distance equal to the thickness H1 of the frame 62 of the component-embedded piece 67.
In addition, the rear end portion of the push rod 23 becomes a cam follower. The cam follower follows the circumferential surface of the oval cam. The camshaft is supported by the rotary motor to be rotatable in the circumferential direction. When the cam is rotated by driving the rotary motor, the cam follower raises the bulging portion of the cam, and the push rod 23 is pushed upward.
Further, as a method of forming the sealed space 24a and the sealed space 24b, the top portion 21 and the mounting table 22 may be formed without using the component embedded pieces 67 and the cooling plate 63 as parts of forming members. For example, one or both of the top portion 21 and the mounting table 22 may be formed into a cup shape, and the top portion 21 and the mounting table 22 may be accommodated in a single space formed by the top portion 21 and the mounting table 22 so as to include the component embedded piece 67 and the cooling plate 63, and the front and back of the component embedded piece 67 may be divided by the top portion 21 and the mounting table 22. In this case, however, the ceiling portion 21 is preferably a side wall that extends toward the mounting table 22 while standing on the flat surface 212 surrounding the opening of the air hole 213. The side wall is in close contact with the flat surface of the mounting table 22 to form a sealed space. The O-ring 215 is first placed on the end face of the side wall.
(film formation processing section)
Next, the film formation processing section 3 responsible for the film formation step will be described. Fig. 11A and 11B are schematic views showing the structure of the film formation processing section 3. The film formation processing section 3 forms the electromagnetic wave shielding film 605 on each electronic component 60 on the component mounting board 68 by sputtering. As shown in fig. 11A and 11B, the film formation processing section 3 includes a chamber 31 and a sampling chamber 32. The chamber 31 is a cylindrical vacuum chamber whose diameter is expanded in a radial direction of the chamber than in an axial direction. The chamber 31 is divided into a plurality of fan-shaped regions by partitions 33 extending in the radial direction. The processing position 311 and the film formation position 312 are allocated to a part of the fan-shaped region.
The partition 33 extends from the top surface toward the bottom surface of the chamber 31 but does not reach the bottom surface. The turntable 34 is provided in the bottom surface side space where the partition 33 is not provided. The turntable 34 has a disk shape coaxial with the chamber 31 and rotates in the circumferential direction. The component mounting plate 68 loaded into the chamber 31 from the sampling chamber 32 is placed on the turntable 34, and revolves around the processing position 311 and the film forming position 312 while revolving on a circular track.
In order to maintain the position of the component mounting plate 68 with respect to the rotary table 34, a holding member for holding the component mounting plate 68, such as a groove, a hole, a protrusion, a jig, a holder, a mechanical chuck, or an adhesive chuck, is provided on the rotary table 34.
The surface treatment unit 35 is provided at the treatment position 311. The surface treatment portion 35 is introduced with a process gas such as argon, and the process gas is converted into plasma by applying a high-frequency voltage, thereby generating electrons, ions, radicals, and the like. For example, the surface treatment unit 35 is a cylindrical electrode having an opening on the turntable 34 side, and a Radio Frequency (RF) power source applies a high Frequency voltage.
At the film formation position 312, a target 361 constituting the sputtering source 36 is provided, and a sputtering gas as an inert gas such as argon gas is introduced. The sputtering source 36 applies electric power to the target 361 to turn the sputtering gas into plasma, and the generated plasma collides with the target to eject particles. The target 361 contains the material of the electromagnetic wave-shielding film 605. That is, the particles of the electromagnetic wave shielding film 605 are ejected from the target 361, and the ejected particles of the electromagnetic wave shielding film 605 are deposited on the electronic component 60 on the turntable 34.
The film forming positions 312 are provided at two locations, for example. The target materials at the respective film formation positions 312 may be the same material, or different materials may be used to form the electromagnetic wave shielding film 605 in a stacked state. As a power source for applying power to the sputtering source 36 at each film formation position 312, a known power source such as a Direct Current (DC) power source, a DC pulse power source, or an RF power source can be used. The power supply for applying power to the sputtering sources 36 may be provided for each sputtering source 36, or a common power supply may be switched by a switch for use.
In the film formation processing unit 3, the electromagnetic wave shielding film 605 is formed on the electronic component 60 by etching the electronic component 60 or cleaning and roughening the surface by ashing at the processing position 311 to improve the adhesion of the electromagnetic wave shielding film 605 to the electronic component 60 and by depositing particles of the target 361 on the electronic component 60 at the film formation position 312. Since the electrode 602 is embedded in the protective sheet 61 and the electrode exposed surface 601 is in close contact with the protective sheet 61, particles of the electromagnetic wave shielding film 605 are prevented from adhering to the electrode 602, and particles of the electromagnetic wave shielding film 605 are prevented from entering between the electrode exposed surface 601 and the protective sheet 61. Further, the heat of the electronic component 60 is conducted to the cooling plate 63, and excessive heat storage of the electronic component 60 is suppressed.
The film formation processing section 3 forms a film on the electronic component 60 by using a sputtering method, but the film formation method is not limited thereto. For example, the film formation processing section 3 may form the electromagnetic wave shielding film 605 on the electronic component 60 by vapor deposition, spray coating, or the like.
(plate releasing part)
Next, the plate releasing section 4 responsible for the plate releasing step will be described. Fig. 12 is a schematic diagram showing the structure of the plate releasing portion 4. After the electromagnetic wave shielding film 605 is formed, the component mounting board 68 is put into the board releasing portion 4. As a first step for obtaining each electronic component 60, the board removing section 4 peels the component-embedded sheet 67 from the cooling board 63.
As shown in fig. 12, the plate releasing portion 4 includes a top portion 41 and a mounting table 42. The top portion 41 is disposed opposite to the mounting table 42. The position of the table 42 is not moved. On the other hand, the top portion 41 is liftable with respect to the mounting table 42. The top 41 is at least close to the mounting table 42 to the thickness H1 of the frame 62 of the component mounting plate 68.
The top 41 is a block having an internal space 411, and has a flat surface 412 on a surface facing the table 42. The mounting table 42 has a bottomed cup shape, and the opening 421 faces the top portion 41. The flat surface 412 of the top portion 41 has the same size and shape as the component mounting plate 68 or is wider than the component mounting plate 68. On the other hand, the opening 421 of the mounting table 42 has an area included in the component arrangement region 615 or more and the middle frame region 614 or less. The edge 422 of the mounting table 42 surrounding the opening 421 has a width equal to or larger than the width of the frame 62.
In the mounting table 42, the edge portion 422 supports the component mounting plate 68, and the opening 421 is closed by the component mounting plate 68. The cooling plate 63 side abuts on the edge 422. An air pressure supply hole 423 is formed through the bottom of the mounting table 42. The pneumatic pressure supply hole 423 is connected to a pneumatic circuit 75 including a compressor, a negative pressure supply pipe, and the like, not shown. Therefore, a positive pressure is generated in the air hole 632 of the component mounting plate 68 mounted while closing the opening 421.
Further, a plunger insertion hole 424 penetrating the mounting table 42 is provided in the edge portion 422 of the mounting table 42. The insertion position of the pusher insertion hole 424 is the same as the pusher insertion hole 631 of the cooling plate 63, and when the component mounting plate 68 is placed on one side, the insertion hole is blocked by the frame 62 while avoiding the guide insertion hole 621 of the frame 62. The push rod 43 is inserted through this push rod insertion hole 424. The pusher 43 is movable in the axial direction so that the tip thereof protrudes to a position higher than the frame 62 of the component mounting plate 68 placed on the mounting table 42.
The pusher 43 is provided with rigidity, quantity and positional relationship such that the component mounting plate 68 is separated from the cooling plate 63 by peeling the component mounting plate 68 off from the cooling plate 63 against the adhesive force of the adhesive sheet 64, and the component mounting plate 68 can be lifted in parallel and supported. For example, if the frame 62 has a rectangular outer shape, the frame is arranged as a bar corresponding to each corner of the frame 62. The push rod insertion holes 424 are also provided corresponding to the number and positional relationship of the push rods 43.
Further, a pair of clamp blocks 44 is disposed on both sides of the mounting table 42. The holding block 44 holds only the cooling plate 63 of the parts mounting plate 68 placed on the mounting table 42. That is, the pair of clamping blocks 44 are disposed at the same height as the cooling plate 63 mounted on the mounting table 42, and have the same thickness as the cooling plate 63. The clamp blocks 44 can be brought into contact with and separated from each other around the cooling plate 63. However, the holding block 44 is not moved in the direction in which the top portion 41 and the table 42 are aligned.
Then, a plurality of air holes 413 to the inner space 411 are formed through the flat surface 412 of the top 41. The penetration range of the air hole 413 is the same size and shape as the inner side of the frame 62 of the protective sheet 61, or at least the same size and shape as the component arrangement region 615. When the component mounting board 68 has been placed on the mounting table 42, the penetration position of the air hole 413 is a position covered by the component arrangement area 615.
An air pressure supply hole 414 is formed through the internal space 411 of the top 41 at a position different from the flat surface 412. The pneumatic pressure supply hole 414 is connected to a pneumatic circuit 75 including a compressor, a negative pressure supply pipe, and the like, which are not shown. Therefore, a negative pressure is generated in the air hole 413 by the air pressure supply hole 414 and the internal space 411.
Further, an O-ring 415 surrounding a penetration range of the air hole 413 is provided on the flat surface 412 of the top portion 41 along the frame 62 of the component mounting plate 68 placed on the mounting table 42.
Fig. 13 (a) to (e) show the flow of the operation of the plate releasing portion 4. Fig. 13 (a) to (e) are transition diagrams schematically showing the state of the plate releasing portion 4 in each step. First, as shown in fig. 13 (a), the top portion 41 is separated from the mounting table 42, and the push rod 43 is first inserted into the push rod insertion hole 424 of the mounting table 42. Then, the component mounting board 68 is placed on the mounting table 42. When the component mounting plate 68 is mounted, the cooling plate 63 is fixed by the clamp block 44.
Then, as shown in fig. 13 (b), the top portion 41 is lowered toward the mounting table 42, and the flat surface 412 of the top portion 41 is brought into contact with the frame 62 of the component mounting plate 68. At this time, a height H1 from the surface of the component arrangement region 615 to the upper surface of the frame 62 is higher than a height H2 from the surface of the component arrangement region 615 to the top surface 603 of the electronic component 60. Therefore, when the frame 62 has been sandwiched, the top surface 603 of the electronic part 60 does not reach the flat surface 412 of the top portion 41. Therefore, at least the component arrangement region 615 is enclosed in the closed space 45 formed by the top portion 41, the protective sheet 61, and the frame 62 and sealed by the O-ring 415.
When the component arrangement region 615 is sealed in the sealed space 45, as shown in fig. 13 (c), a negative pressure is generated in the top portion 41 and a positive pressure is generated in the mounting table 42. Thus, a force that is sucked upward toward the flat surface 412 of the top portion 41 and a force that is separated from the mounting table 42 and pushed upward toward the flat surface 412 of the top portion 41 act on the component arrangement region 615 inside the frame 62. By this upper suction force and upper thrust force, a force sufficient to peel off the part arrangement region 615 from the cooling plate 63 acts in the part arrangement region 615, and the part arrangement region 615 peels off from the cooling plate 63.
Since the protective sheet 61 is flat without strain at the time point when the component array region 615 is peeled off, the momentum of the component array region 615 toward the flat surface 412 of the top portion 41 is small, and the electronic component 60 is prevented from peeling off the protective sheet 61 or the electronic component 60 flies off the protective sheet 61. In the event that the parts arrangement region 615 is rapidly peeled off, the flat surface 412 of the top portion 41 is also controlled, and the electronic parts 60 are blocked by the flat surface 412, so that there is less fear that the electronic parts 60 are peeled off from the protective sheet 61 or fall off from the protective sheet 61.
In order to further enhance the effect of reducing the risk of peeling or falling off of the electronic component 60 from the protective sheet 61, it is preferable that the distance between the top surface 603 of the electronic component 60 and the flat surface 412 is extremely small in a state before the protective sheet 61 is peeled from the cooling plate 63. Therefore, the distance between the top surface 603 of the electronic component 60 and the flat surface 412 is preferably set to the minimum necessary distance for peeling the protective sheet 61 from the cooling plate 63. Further, a plurality of systems for generating positive pressure may be provided, such as dividing the space in the opening 421 of the mounting table 42 into a plurality of spaces so that the air holes 632 in which positive pressure acts gradually increase with respect to the air holes 632 in the cooling plate 63, for example, so that the air holes 632 in which positive pressure acts increase from one end portion of the cooling plate 63 to the other end portion thereof. With this arrangement, the component arrangement region 615 can be prevented from peeling off from the cooling plate 63 at a time, and the electronic component 60 can be suppressed from rapidly protruding toward the flat surface 412 of the top portion 41.
When the component arrangement region 615 is peeled off, the electronic component 60 abuts on the flat surface 412 of the top portion 41, and the protective sheet 61 bends only in the middle frame region 614, and at least the component arrangement region 615 is maintained flat. In other words, if the flat surface 412 of the top portion 41 is not present, the protective sheet 61 is bent so as to contain air. Thus, although there is a fear that the electronic component 60 may peel off from the protective sheet 61, the component arrangement region 615 is maintained flat, and therefore peeling of the electronic component 60 is suppressed.
When the component arrangement region 615 is detached from the cooling plate 63, the pusher 43 is brought into contact with the frame 62 through the pusher insertion hole 424 of the mounting table 42, the pusher insertion hole 631 of the cooling plate 63, and the pusher insertion hole 631 of the adhesive sheet 64, as shown in fig. 13 (d). Then, the pusher 43 is further advanced, and the top portion 41 is moved away from the table 42 at the same speed as the pusher 43. Since the cooling plate 63 is held by the holding block 44 and is not moved, the outer frame region 613 to which the frame 62 is attached is also peeled off from the cooling plate 63, and the protective sheet 61 is peeled off from the cooling plate 63 as a whole. At this time, the positive pressure of the mounting table 42 and the negative pressure of the top portion 41 are maintained. Therefore, the component arrangement region 615 hangs down toward the cooling plate 63 by its own weight and is prevented from being attached again.
Finally, as shown in fig. 13 (e), the holding of the component embedding piece 67 is released and the peeling of the protective sheet 61 from the cooling plate 63 is completed by stopping the pusher 43 and moving the top portion 41 so as to be further separated from the mounting table 42. The positive pressure of the table 42 and the negative pressure of the top 41 may be released during this period.
That is, the top 41 serves as a fixing portion of the frame 62 that is released from the component arrangement region 615 and is pressed into place. The air pressure supply hole 423 of the mounting table 42 serves as a positive pressure generating hole, and serves as a pressing member for pressing the component arrangement region 615 through the air hole 632 of the cooling plate 63 to peel off the component arrangement region 615 from the cooling plate 63 earlier than the frame 62. The air hole 413 of the top portion 41 becomes a negative pressure generating hole and becomes a suction part attracting the part arrangement area 615 to assist the peeling from the cooling plate 63.
The flat surface 412 of the top portion 41 serves as a stopper member for preventing the electronic component 60 from being peeled or separated from the protective sheet 61 when the component array region 615 is peeled, and also serves as a flattening member for flattening the protective sheet 61 to prevent the electronic component 60 from being peeled from the protective sheet 61. The pusher 43 becomes an upper top member for peeling the frame 62 off the cooling plate 63 after the part arrangement region 615 has been peeled off.
After the film forming step, the plate removing unit 4 removes the cooling plate 63. The plate releasing portion 4 includes a positive pressure generating hole, as an example, of the air pressure supply hole 423 of the mounting table 42, and a fixing portion, as an example, of the top portion 41. The positive pressure generating hole faces the cooling plate 63, is provided in a range including the part arrangement region 615, and causes positive pressure to be generated. The fixing portion presses a portion of the protective sheet 61, for example, the frame 62, which is separated from the component arrangement region 615, while the positive pressure generating hole presses the component arrangement region 615, and releases the pressing after the component arrangement region 615 is separated from the cooling plate 63.
Thus, the protective sheet 61 is kept flat when the component arrangement region 615 is peeled off, and therefore, a situation in which the component arrangement region 615 jumps due to the reaction of the protective sheet 61 returning to flat is avoided. Therefore, the electronic part 60 is suppressed from peeling off and falling off from the protective sheet 61.
The plate releasing portion 4 has a flat surface 412 of the top portion 41 separated from the protective sheet 61 on the top portion 41 side, i.e., on the side opposite to the cooling plate 63 with the protective sheet 61 interposed therebetween. While the component arrangement region 615 is pressurized, the flat surface 412 first presses the bulge portion of the component arrangement region 615. Thus, the component arrangement region 615 is flat, and the electronic component 60 is prevented from peeling off. In addition, even if the component arrangement region 615 jumps up, the flat surface 412 blocks the electronic component 60, and thus the electronic component 60 can be further prevented from peeling off and falling off from the protective sheet 61.
The plate releasing portion 4 has a negative pressure generating hole for generating a negative pressure so as to face the protective sheet 61. For example, the flat surface 412 of the top portion 41 is provided with an air hole 413 for generating a negative pressure. This air hole 413 attracts the protective sheet 61 with pressurization of the part arrangement area 615 by the air hole 632. Therefore, the protective sheet 61 can be peeled off from the cooling plate 63 with the pressing of the part arrangement region 615 being assisted, and a peeling error is less likely to occur.
In addition, the plate releasing portion 4 includes a push rod 43. After the component arrangement region 615 is separated from the cooling plate 63, the pusher 43 moves forward in the cooling plate 63 and pushes up the portion to be pressed, such as the frame 62, in a direction away from the cooling plate 63. Thus, after the part arrangement region 615 has been peeled off, the protective sheet 61 can be peeled off entirely. The fixing portion, which is exemplified by the top portion 41, may be separated from the protective sheet 61 as the push rod 43 advances when the pressing is released.
The mechanism of the top 41, the clamping block 44, and the push rod 43 may be any conventional mechanism, and the present invention is not limited to the mechanism.
For example, a ball screw whose shaft extends in the direction from the top portion 41 toward the mounting table 42 and a rail guide extending in the direction from the top portion 41 toward the mounting table 42 are connected to the top portion 41. In this case, the top portion 41 moves along the guide rail toward the mounting table 42 in accordance with the rotation direction of the screw shaft. The ball screw and the rail guide are extended so that the top portion 41 approaches the mounting table 42 to a distance of a thickness H1 of the frame 62 of the component mounting plate 68.
Further, the circumferential surfaces of the oval cams are brought into contact with the pair of holding blocks 44, respectively, on the outer sides of the holding blocks 44. The camshaft is supported by the rotary motor to be rotatable in the circumferential direction. When the rotary motor is driven to rotate the cam, and the bulging portion of the cam hits against the clamp block 44, the clamp block 44 is pushed away in the direction of the cooling plate 63, and clamps the cooling plate 63.
In addition, the rear end portion of the push rod 43 becomes a cam follower. The cam follower follows the circumferential surface of the oval cam. The camshaft is supported by the rotary motor to be rotatable in the circumferential direction. When the cam is rotated by driving the rotary motor, the cam follower raises the bulging portion of the cam, and the push rod 43 is pushed upward.
The plate removing section 4 causes the mounting table 42 to generate positive pressure, thereby peeling the protective sheet 61 from the cooling plate 63. The flat surface 412 of the top portion 41 has an additional function of flattening the peeled protective sheet 61, and the air holes 413 opened in the flat surface 412 of the top portion 41 also have an additional function of assisting the pressing by the mounting table 42. Therefore, as shown in fig. 14, the top portion 41 may have a square tubular shape in which the opening edge is brought into contact with the frame 62, and the flat surface 412 may be omitted. As shown in fig. 15, the air hole 413 may be omitted from the flat surface 412 of the top portion 41.
(peeling treatment section)
Finally, the peeling processing section 5 responsible for the part peeling step will be described. Fig. 16 is a schematic diagram showing the structure of the peeling unit 5. The component-embedded sheet 67 from which the cooling plate 63 is removed through the plate removing section 4 is fed into the peeling processing section 5, and as a final stage, the respective electronic components 60 are peeled from the protective sheet 61. When the separation processing unit 5 is separated from the film formation apparatus 7, it may be referred to as a separation processing apparatus.
As shown in fig. 16, the peeling section 5 includes: a mounting table 51 on which a component embedded piece 67 is mounted; a chuck 52 which holds the protective sheet 61 and continuously moves; a guide part 53 which hooks an end of the protective sheet 61 to make a chance that the chuck 52 grips the protective sheet 61; a sheet stopper 54 for making a peeling base point of the protective sheet; and a component stopper 55 for preventing the electronic component 60 from floating up.
The mounting table 51 has a flat surface 511 on which the component-embedded sheet 67 is mounted. The electronic component 60 is placed on the flat surface 511 by the component-embedded sheet 67 facing the flat surface, and the top surface 603 of the electronic component 60 is placed in contact with the placement surface with the protective sheet 61 facing upward. The flat surface 511 includes an anti-slip member having adhesion, and the barrier property of the electronic part 60 is improved. The outer peripheral region of the flat surface 511 is dug down by a depth corresponding to a height obtained by subtracting a height H2 from the surface of the component arrangement region 615 to the top surface 603 of the electronic component 60 from a height H1 from the surface of the component arrangement region 615 to the end surface of the frame 62, so that the frame 62 enters, and the electronic component 60 is placed on the flat surface 511 while the protective sheet 61 is kept flat.
The table 51 is a block having an internal space 512. A plurality of air holes 513 are formed in a region of the flat surface 511 of the mounting table 51 facing the component arrangement region 615. The air hole 513 communicates with the internal space 512 of the table 51. A pneumatic pressure supply hole 514 is formed through the inner space 512 of the stage 51 at a position different from the flat surface 511. The pneumatic pressure supply hole 514 is connected to a pneumatic circuit 75 including a compressor, a negative pressure supply pipe, and the like, not shown. Therefore, a negative pressure is generated in the air hole 513 by the air pressure supply hole 514 and the internal space 512. When the component embedded piece 67 is set, a guide insertion hole 515 that matches the guide insertion hole 621 of the frame 62 is provided at the edge of the mounting table 51.
The chucks 52 are a pair of blocks that face each other in gripping surfaces. The pair of blocks can be contacted and separated. The chuck 52 is supported by a moving device movable in the horizontal and vertical directions, and is continuously moved at an angle of attack of 45 degrees with respect to the flat surface 511 along the protective sheet 61 placed on the flat surface 511 of the mounting table 51. That is, the chuck 52 is separated from the mounting table 51 while moving vertically on the flat surface 511 of the mounting table 51. The continuous movement means that the movement is preferably performed at a constant speed without stopping the movement. The movement range of the chuck 52 is from the end of the protective sheet 61 where the opportunity of gripping has been made to the opposite end of this end. The direction of the longitudinal movement of the chuck 52 is a direction from the end of the protective sheet 61 where the opportunity of gripping has been made to the opposite end of this end. For example, as shown in fig. 17, the direction is a direction from an end portion of the protective sheet 61 on the side of the guide portion insertion hole 621 of the frame 62 to an opposite end thereof.
The sheet stopper 54 is a roller having a cylindrical shape intersecting the long axis of one side of the protective sheet 61 and capable of rotating axially. This transverse direction is a direction perpendicular to the moving direction of the chuck 52 (see fig. 17). The sheet stopper 54 may be formed of metal such as stainless steel. In addition, when the length of the transverse protective sheet 61 is about 200mm to 300mm, the diameter of the sheet stopper 54 may be set to 5mm to ten and several mm. In the present embodiment, a cylindrical body made of stainless steel having a diameter of 6mm is used.
The sheet stopper 54 is kept fixed in height with respect to the flat surface 511 of the mounting table 51, and vertically moves on the protective sheet 61 mounted on the mounting table 51 in a direction perpendicular to the longitudinal axis while maintaining the position directly below the chuck 52. The height at which the sheet stopper 54 is disposed matches the height at which the electronic component 60 other than the electrode 602 is combined with the protective sheet 61. That is, the sheet stopper 54 moves while pressing the non-adhesive surface 612 of the protective sheet 61. The degree of pressing is set to a degree that does not damage the electrode 602, does not rub the electrode 602, or does not crush the electrode 602. The moving range of the sheet stopper 54 is set with the edge of the guide portion 53, i.e., the edge of the guide portion insertion hole 621 of the frame 62 as a base point until the opposite end of the protective sheet 61.
The part stopper 55 is a roller having a cylindrical shape with a long axis crossing at least the entire part arrangement region 615 of the protective sheet 61 and capable of rotating around its axis. The component stopper 55 may be formed of metal such as stainless steel. The diameter of the component stopper 55 may be determined in consideration of the diameter of the sheet stopper 54 and the size of the electronic component 60, but may be arranged closer to the sheet stopper 54 if the diameter is set smaller than the sheet stopper 54. In the present embodiment, the sheet stopper 54 is formed of a cylindrical body made of stainless steel having the same diameter as the sheet stopper.
The component stopper 55 is disposed so as to be able to approach and separate from the sheet stopper 54. While the chuck 52 and the sheet stopper 54 are longitudinally moved on the mounting table 51, the component stopper 55 follows the sheet stopper 54 while keeping a fixed distance from each other. The fixed distance is less than the length of the electronic component 60 (the length in the moving direction of the component stopper 55) stuck to the protective sheet 61. When the chuck 52 and the sheet stopper 54 are positioned at the end of the table 51, the component stopper 55 is kept at a distance from the sheet stopper 54 in a manner of being positioned in a bank across the guide insertion hole 621.
The guide portion 53 is disposed at the same position as the shaft of the guide portion insertion hole 621 of the frame 62. The guide portion 53 is disposed in the guide portion insertion hole 515, and the front end thereof faces the guide portion insertion hole 621 of the frame 62. The guide portion 53 is movable in the axial direction, protrudes toward the end of the protective sheet 61, pushes up the end of the protective sheet 61 toward the chuck 52, and advances in the guide portion insertion hole 621 of the frame 62 before the end of the protective sheet 61 reaches the chuck 52. The guide 53 pushes up and peels off one side of the protective sheet 61. Therefore, the guide insertion hole 621 has a pin shape and is provided at a plurality of positions along one side of the protective sheet 61.
For example, as shown in fig. 17, the guide insertion holes 621 are formed at positions spaced apart from each other at equal intervals with respect to the center of one side of the frame 62. The guide portion 53 is provided corresponding to the guide portion insertion hole 621, and the guide portion 53 is formed in a circular bar shape. Then, the chuck 52 and the sheet stopper 54 are longitudinally moved in a direction orthogonal to one side of the frame 62, and the electronic component 60 is peeled off from the protective sheet 61.
Fig. 18 (a) to (f) show the flow of the operation of the peeling unit 5. Fig. 18 (a) to (f) are transition diagrams schematically showing the state of the peeling section 5 in each step. First, as shown in fig. 18 (a), the component embedded sheet 67 is placed on the mounting table 51 with the top surface 603 of the electronic component 60 in contact with the flat surface 511. That is, an inverting device for vertically inverting the component embedded piece 67 separated from the cooling plate 63 in the plate releasing portion 4 is provided between the plate releasing portion 4 and the peeling processing portion 5, and the component embedded piece 67 is placed on the mounting table 51 in an inverted state. Negative pressure is generated in the air holes 513 of the mounting table 51, and the electronic component 60 is sucked onto the flat surface 511. The sheet stopper 54 is moved to the edge of the guide insertion hole 621 of the frame 62, and the clip 52 is positioned immediately above the guide insertion hole 621 of the frame 62. The parts stopper 55 is first spaced apart from the sheet stopper 54, and the parts stopper 55 is first positioned further outside than the guide insertion hole 621 of the frame 62.
As shown in fig. 18 (b), the guide portion 53 is moved upward in the axial direction. The guide portion 53 moves within the guide portion insertion hole 621 of the frame 62 and reaches the end of the protect sheet 61 stuck on the frame 62. The guide portion 53 further advances to project the end of the protective sheet 61 in a direction away from the frame 62. This causes the end of the protective sheet 61 to start peeling off by the guide 53. When the guide portion 53 advances further, the end portion of the protective sheet 61 is sandwiched between the guide portion 53 and the sheet stopper 54 and is guided toward the chuck 52. Further, while the end portion of the protective sheet 61 is being guided by the guide portion 53, the chuck 52 may move toward the end portion of the protective sheet 61 to meet the end portion of the protective sheet 61.
As shown in fig. 18 (c), when the end of the protective sheet 61 reaches the chuck 52, the pair of blocks are closed, and the end of the protective sheet 61 is gripped by the chuck 52. When the chuck 52 grips the end of the protective sheet 61, as shown in fig. 18 (d), the guide portion 53 is sunk into the guide insertion hole 621 of the frame 62, and then the component stopper 55 is moved so that the component stopper 55 and the sheet stopper 54 are close to each other by a distance less than the length of the electronic component 60.
As shown in fig. 18 (e), the clip 52 and the sheet stopper 54 are moved along the protective sheet 61, and the clip 52 is lifted. Since the end of the protective sheet 61 is held by the chuck 52 and the sheet stopper 54 moves on the protective sheet 61, the protective sheet 61 is lifted by the chuck 52 with the sheet stopper 54 as a reference point, and the electronic component 60 is peeled off from the protective sheet 61 with the sheet stopper 54 as a reference point. When peeling is performed while the protective sheet 61 that has been peeled off is kept in a vertical state, for example, the speed components of the horizontal movement and the vertical movement of the chuck 52 may be kept the same. If the velocity components of the horizontal movement and the vertical movement are the same, even if the movement velocity changes, the peeling can be continuously performed without stopping unless the movement velocity changes, but the movement velocities of the horizontal movement and the vertical movement are preferably maintained at a constant velocity.
At this time, as shown in fig. 19, when the electronic component 60 is peeled off from the protective sheet 61 and only the end portion of the electronic component 60 is sandwiched between the sheet stopper 54 and the flat surface 511 of the mounting table 51, the electronic component 60 is lifted up so as to lift the peeling start end 60 a. However, the part stopper 55 follows the sheet stopper 54. The component stopper 55 presses the peeling start end 60a to be lifted. Therefore, the electronic component 60 is prevented from floating up, and the gap 94 between the electrode 602 and the protective sheet 61, which have been peeled off from the protective sheet 61, continues to exist, so that the electronic component 60 is maintained on the flat surface 511 of the mounting table 51 without being reattached. Further, since the sheet stopper 54 is a roller capable of rotating about its axis, it rotates when the electronic component 60 is pressed, and friction with the electronic component 60 is suppressed.
The sheet stopper 54 moves while pressing the non-adhesive surface 612 of the protective sheet 61. Therefore, before the peeling of the electronic component 60 is started and the state is reached where only the end portion of the electronic component 60 in the peeling process is sandwiched between the sheet stopper 54 and the flat surface 511 of the mounting table 51, the sheet stopper 54 is prevented from following the protective sheet 61 from which the electronic component 60 has been peeled. However, from the viewpoint of exerting the function of making the base point of peeling by the sheet stopper 54, the sheet stopper 54 does not necessarily move while pressing the non-adhesive surface 612 of the protective sheet 61. That is, the sheet stopper 54 may be moved at a position slightly separated from the protective sheet 61.
Further, as shown in (f) of fig. 18, when the collet 52 and the sheet stopper 54 have completely ruptured the component arrangement region 615 of the protective sheet 61, all the electronic components 60 are peeled off from the protective sheet 61 and arranged on the flat surface 511 of the mounting table 51. By recovering the electronic component 60, the electromagnetic wave shielding film 605 is formed in the film forming apparatus 7. The attack angle of the chuck 52 to separate the flat surface 511 of the mounting table 51 from the mounting table 51 is not limited to 45 degrees. The position of the chuck 52 may be fixed and the mounting table 51 may be continuously moved to peel off the protective sheet 61, or both the chuck 52 and the mounting table 51 may be movable. That is, the chuck 52 and the mounting table 51 may be moved relatively.
Fig. 20 is a photograph of the electrode 602 taken after the electronic component 60 is peeled from the protective sheet 61 by the peeling processing section 5. According to the peeling processing unit 5, the flatness of the protective sheet 61 is always maintained by the sheet stopper 54, and the protective sheet 61 is once peeled off, so that the protective sheet 61 is prevented from returning to the electronic component 60 and adhering again. The position of the electronic component 60 is fixed by the component stopper 55 and the air hole 513 of the mounting table 51, and the electronic component can be prevented from floating up as if it sticks up the protective sheet 61 and reattaches. As a result, as shown in fig. 20, no residue of the protective sheet 61 was observed on the electrode 602 of the electronic component 60.
After the film is formed by the film formation processing section 3 in this manner, the peeling processing section 5 peels the electronic component 60 from the protective sheet 61. The peeling unit 5 includes a mounting table 51, a chuck 52, and a fixing unit for fixing the position of the electronic component 60. The mounting table 51 supports the electronic component 60 which has been pasted on the protective sheet 61. The chuck 52 holds the end portion of the protective sheet 61, moves relative to the mounting table 51, and continuously peels the protective sheet off the end portion opposite to the end portion. When the electronic part 60 is peeled off from the protective sheet 61, the fixing portion fixes the position of the electronic part 60. This eliminates the re-adhesion of the electronic component 60 and the protective sheet 61 after once peeling off, and thus prevents the generation of the residue 93 of the protective sheet 61 in the electronic component 60.
The fixing portion is, for example, a component stopper 55 or a flat surface 511 of the mounting table 51 through which an air hole 513 is formed. The component stopper 55 follows the sheet stopper 54 by keeping a distance less than the length of the electronic component 60, and holds the electronic component 60 to float. The mounting table 51 sucks and holds the electronic component 60 to float. However, the mounting table 51 may not be sucked through the air holes 513 as long as it functions as a fixing portion. For example, the mounting table 51 may be an adhesive chuck, an electrostatic chuck, or a mechanical chuck as long as the electronic component 60 can be fixed thereto.
Further, a guide portion 53 protruding toward an end portion of the protective sheet 61 is included. The chuck 52 is located at the protruding destination of the guide portion 53 before the end of the protective sheet 61 is gripped. The guide portion 53 faces the chuck 52, and guides the end of the protective sheet 61 toward the chuck 52. This makes it possible to reduce the possibility of a mistake in peeling the electronic component 60 from the protective sheet 61, while making it possible to produce a chance of gripping the chuck 52.
Further, a sheet stopper 54 that moves along the protective sheet 61 together with the chuck 52 and makes a base point of peeling is included. The sheet stopper 54 is located near the protruding destination of the guide 53, and guides the end of the protective sheet 61 peeled off from the guide 53 toward the chuck 52 while holding the end together with the guide 53. This enables the chuck 52 to more reliably grip the end of the protective sheet 61, and the possibility of a failure in separating the electronic component 60 from the protective sheet 61 can be reduced.
Further, although the sheet stopper 54 has been described by taking a cylindrical body having an axis perpendicular to the moving direction of the sheet stopper 54 as an example, the sheet stopper may be a plate-like body or a block body as long as it can move while pressing the protective sheet 61. The component stopper 55 is also described by taking a cylindrical body having an axis orthogonal to the moving direction of the component stopper 55 as an example, but may be a plate-like body, a block body, or a brush. When the component stopper 55 is a cylindrical body, since it is a roller that can rotate about an axis, it rotates when the electronic component 60 is pressed, and friction with the electronic component 60 is suppressed.
The mechanism of the operation of the chuck 52, the mechanism of the operation of the sheet stopper 54, the mechanism of the operation of the component stopper 55, and the mechanism of the operation of the guide 53 may be any conventional mechanism, and the present invention is not limited to the mechanism.
For example, the following operation mechanism may be adopted in the chuck 52. That is, the two blocks are supported by the base, and the block on one side becomes positionally fixed with respect to the base. The block on the other side becomes movable relative to the block on one side. The oval cam abuts on the outside of the block which becomes movable. When the cam is rotated and the block hangs down in the long diameter range, the movable block is held by the cam and approaches the stationary block. Further, a compression spring is provided between the pair of blocks to urge the pair of blocks in a direction of increasing the interval therebetween. When the cam is rotated and the block hangs down in the short diameter range, the movable block is separated from the stationary block by the force applied by the compression spring.
Further, for example, a ball screw and a guide rail extending at an angle of 45 degrees with respect to the flat surface 511 of the mounting table 51 are disposed, and the base of the chuck 52 is fixed to a slider of the ball screw, and the guide rail is gripped. When the screw shaft of the ball screw is rotated by the motor, the chuck 52 moves along the guide rail from one end to the other end of the mounting table 51.
Further, with respect to the component stopper 55, a tension spring is interposed between the support component stopper 55 and the base of the sheet stopper 54, and is biased in a direction in which the component stopper 55 and the sheet stopper 54 are brought close to each other, and an elliptical cam is disposed between the support component stopper 55 and the base of the sheet stopper 54, and is biased in a direction in which the component stopper 55 and the sheet stopper 54 are separated from each other against the biasing force of the tension spring in a state in which the long diameter range of the cam is in contact with the base.
In addition, the rear end portion of the guide portion 53 becomes a cam follower. The cam follower follows the circumferential surface of the oval cam. The camshaft is supported by the rotary motor to be rotatable in the circumferential direction. When the cam is rotated by driving the rotation motor, the cam follower raises the bulging portion of the cam, and the guide portion 53 is pushed upward.
The insertion positions of the guide insertion holes 621 are set to positions spaced apart from each other at equal intervals with respect to the center of one side of the frame 62. This makes it easy to peel off the entire edge of the protective sheet 61. The guide portion 53 is provided corresponding to the guide portion insertion hole 621, and the guide portion 53 is formed in a circular bar shape. Then, the chuck 52 and the sheet stopper 54 are longitudinally cut in a direction orthogonal to one side of the frame 62, and the electronic component 60 is peeled off from the protective sheet 61. The peeling treatment section 5 is not limited to this, and various shapes of the guide insertion hole and the guide may be used, and various peeling directions may be used.
For example, as shown in fig. 21, a guide portion 53 having a long rectangular cross section such as an oval, rectangle, or the like at the tip along one side of the frame 62 may be used. According to this guide portion 53, the range in which the protective sheet 61 protrudes is increased, and therefore the protective sheet 61 is easily rolled up, and the end portion of the protective sheet 61 easily reaches the chuck 52. As shown in fig. 22, a cutout 622 including an arrangement region of the guide portion 53 may be formed in the frame 62 instead of the guide portion insertion hole 621. Further, as shown in fig. 23, the guide insertion hole 621 may be disposed at a corner of the frame 62, and the chuck 52 and the sheet stopper 54 may be moved diagonally with the corner of the frame 62 as a peeling start point to peel the protective sheet 61 along a diagonal line.
(peeling treatment section of another embodiment)
The peeling processing section 5 according to another embodiment will be described with reference to fig. 24 to 27. The same components and the same functions as those of the above-described embodiment are denoted by the same reference numerals, and detailed description thereof is omitted, and only portions different from the above-described embodiment will be described.
Fig. 24 is a plan view of the peeling unit 5 according to another embodiment. As shown in fig. 24, the peeling unit 5 of the present embodiment includes a base 80, a sheet supply table 81, a platform 82, a mounting table 51, a chuck 52, a guide portion 53, and a discharge table 83, and peels the protective sheet 61 by the vertical movement of the chuck 52 and the horizontal movement of the mounting table 51. The base 80 has a horizontal upper surface, and the members (81-83) are arranged in parallel in a region R on the base 80.
The sheet feeding table 81 is a rectangular plate-like body having a mounting surface on which the component embedded sheet 67 is mounted, and is configured to be vacuum-clampable. The part-embedded piece 67 is the part-embedded piece 67 provided with the cutout 622 in the frame 62 as shown in fig. 22.
This sheet feeding table 81 is configured in a rotatable manner. Here, the sheet feeding table 81 is connected to a rotating mechanism 81a having a rotating shaft 811a parallel to one side thereof, and is rotated 180 ° around this rotating shaft 811 a. That is, the front and back of the sheet feeding table 81 are inverted symmetrically with respect to the rotation axis 811 a.
The surface plate 82 is a plate-like body on which the mounting table 51 is mounted, and is provided at a position facing the inverted sheet feeding table 81. The platform 82 is configured to slide in a direction parallel to the rotation axis 811 a. Here, the table 82 is connected to a driving unit 821, and linearly moves along a pair of guides 822 provided in parallel with the rotation shaft 811a using the driving unit 821 as a driving source.
The mounting table 51 is mounted on the stage 82 and held by a vacuum chuck. In this state, since the stage 82 moves, the table 51 is fixed in position on the stage 82. The mounting table 51 has the same configuration as the mounting table 51 of the above embodiment, but is partially different. Hereinafter, different configurations will be mainly explained. That is, one end of the mounting table 51 is formed in a comb shape, and the comb-shaped portion is exposed from the surface plate 82 in a state of being mounted on the surface plate 82. Here, in the state shown in fig. 24, one end of the mounting table 51 is located on the opposite side of the chuck 52. The air pressure supply hole 514 is provided on a side surface of the mounting table 51 (see fig. 27).
The mounting table 51 is configured to be rotatable. Here, the mounting table 51 is rotatably and slidably connected to a rotation mechanism 83a having a rotation shaft 833a parallel to the rotation shaft 811 a. Specifically, a bearing is provided in the mounting table 51, and the rotary shaft 833a is inserted through the bearing. The table 51 is rotated 180 ° around the rotation axis 833a, and the front and back are symmetrically inverted with respect to the rotation axis 833 a. The table 51 moves linearly along the rotation axis 833a together with the table 82. That is, the rotation mechanism 83a has a driving unit for rotating the mounting table 51, but does not have a driving unit for linearly moving the mounting table 51, and the linear movement of the mounting table 51 is guided only by the rotation shaft 833 a.
The discharge table 83 is a plate-like body for discharging the electronic parts that have been peeled off from the protective sheet 61 of the part embedding sheet 67. A discharge tray 831 for collecting the electronic components 60 peeled from the protective sheet 61 of the component embedding sheet 67 is placed on the discharge table 83, and the discharge table 83 is configured to be capable of vacuum-holding the discharge tray 831. The discharge table 83 is formed to be larger than the discharge tray 831 by one turn. A cylindrical member 83b is provided in an outer peripheral region of the discharge table 83, i.e., a region between an outer edge of the discharge tray 831 and an outer edge of the discharge table 83. Here, the cylindrical members 83b are erected at four corners of the discharge table 83. The cylindrical member 83b has elasticity and sealing property, and is configured to allow pressure reduction through the inside of the cylinder. That is, through holes are provided at four corners of the discharge table 83, and the cylindrical members 83b are provided so that the through holes communicate with the inside of the cylinder. Specifically, the cylindrical member 83b is formed in a serpentine tube shape (see fig. 27). The cylindrical member 83b is formed to be longer than the thickness of the discharge tray 831, and when the discharge tray 831 is placed on the discharge table 83, the front end surface thereof is positioned higher than the upper surface of the discharge tray 831.
The discharge table 83 is rotatably provided at a position facing the mounting table 51 on the table 82. Here, the discharge table 83 is connected to a rotation mechanism 83a, rotates 180 ° around a rotation axis 833a, and reverses the front and back symmetrically with respect to the rotation axis 833 a. The rotation mechanism 83a rotates the mounting table 51 and the discharge table 83, but is configured to be able to rotate the two by 180 ° separately. The rotation mechanism 83a guides the mounting table 51 so as to be linearly movable, but rotates only the discharge table 83. The rotation mechanism 83a for rotating the mounting table 51 and the discharge table 83 is not limited to a single rotation mechanism, and may be provided separately.
The sheet feeding table 81 and the discharge table 83 sandwich the guide 822 of the deck 82, and are arranged along a direction orthogonal to the moving direction of the deck 82. Here, a rectangular region where the sheet feeding table 81 and the discharge table 83 are arranged, that is, a rectangular region indicated by a broken line in fig. 24 is referred to as a region R. The supply of the component embedded sheet 67 from the sheet supply table 81 to the mounting table 51 and the discharge of the electronic component 60 from the mounting table 51 to the discharge table 83, which will be described later, are performed in this region R.
An opening 80a is provided in the base 80. The opening 80a is provided at a position apart from the region R in the moving region of the stage 82. Here, it is provided in the central portion of the base 80.
The chuck 52 is disposed above the opening 80a and ascends and descends in the vertical direction, i.e., vertically with respect to the base 80. That is, the chuck 52 is provided with an elevating mechanism 521.
Fig. 25 is a partially enlarged perspective view of the peeling processing section 5 in which the chuck 52 grips the end of the protective sheet 61. The chuck 52 includes a pair of plate-like bodies (52a, 52b), and one end of the protective sheet 61 is sandwiched between the pair of plate-like bodies (52a, 52 b). That is, the facing surfaces of the pair of plate-like bodies (52a, 52b) on the distal end side serve as gripping surfaces for gripping the protective sheet 61. Further, the front end portion of the plate-like body 52b located on the region R side is formed in a comb shape. The pair of plate-like bodies (52a, 52b) are arranged perpendicularly to the base 80, one plate-like body 52a is fixedly provided to maintain its state, and the other plate-like body 52b is rotated about a fulcrum like scissors, thereby coming into contact with and separating from the one plate-like body 52 a.
The guide portion 53 is provided below the opening 80a, passes through the opening 80a, and obliquely advances and retreats with respect to the base 80 so as to be closer to the grip surface of the plate-like body 52a on one side as it ascends. The guide portion 53 is advanced and retracted by a drive mechanism not shown. The guide portion 53 is a plate-like body whose front end portion is formed in a comb shape, and the front end portion is arranged obliquely upward with respect to the base 80. The guide portion 53 has a distal end portion formed so as to face the grip surface of the plate-like body 52a in parallel or so as to slightly contact the grip surface in a state of having reached the rising end in the oblique advancing/retreating direction. By the guide portion 53 advancing obliquely upward through the opening 80a, the convex portion of the portion forming the comb shape enters the concave portion of the portion forming the comb shape provided at one end portion of the mounting table 51, and enters the concave portion of the plate-like body 52 b.
As shown in fig. 24, a rotation mechanism 84 having a rotation axis perpendicular to the base 80 is connected to the lifting mechanism 521. The rotating mechanism 84 is provided with a rotating arm 85 for discharging the protective sheet 61 peeled by the chuck 52. A suction cup 85a is provided at the front end of the rotating arm 85. The rotating arm 85 is rotated back and forth by the rotating mechanism 84 between the recovery position shown in the figure and the suction position of the protective sheet 61 as a position horizontally rotated by 180 ° from this position. In this suction position, the suction pad 85a is opposed to and held by the protective sheet 61 from which the electronic component 60 has been peeled. The plate-like bodies 86 are provided at positions facing the suction pads 85a at the suction position so as to be fixed in position relative to each other.
The operation of the peeling unit 5 having the above-described structure will be described. First, the electronic component 60 is placed on the sheet supply table 81 with the protective sheet 61 facing downward, and the component embedding sheet 67 is placed on the sheet supply table 81, and vacuum-clamped by the sheet supply table 81. In the region R, the table 51 is placed on the surface plate 82 so that one comb-shaped end portion is exposed from the surface plate 82.
In the state where the vacuum nipping is performed as described above, the sheet feeding table 81 is rotated by the rotating mechanism 81 a. By this rotation, the sheet feeding table 81 and the mounting table 51 sandwich the component embedded piece 67. At this time, the electronic component 60 is rotated and held so as not to be given an impact. By this rotation and clamping, one end of the protective sheet 61, i.e., the cut 622 of the frame 62 in which the parts are embedded in the sheet 67, is positioned above one end of the comb-like shape of the mounting table 51.
After the clamped component embedded piece 67 is released, the vacuum clamping of the sheet supply table 81 is released, and the sheet supply table 81 is rotated by the rotation mechanism 81a to be restored. Negative pressure is generated in the air hole 513 of the mounting table 51, and the electronic component 60 having the component embedding piece 67 is sucked to the flat surface 511. This suction is preferably performed before returning the sheet feeding table 81 to its original state.
Then, the table 82 on which the table 51 is placed is linearly moved along the guide 822 toward the side where the opening 80a is provided by the driving unit 821, and one end portion of the comb shape of the table 51 is stopped at a position above the opening 80 a. At this time, as shown in fig. 25, the comb-shaped portion of the mounting table 51 vertically faces the chuck 52.
In this state, first, the chuck 52 is lowered by the elevating mechanism. Further, as in the above-described embodiment, the sheet stopper 54 moves to just below the chuck 52, and the non-adhesive surface 612 of the protective sheet 61 is lightly pressed just below the chuck 52 (the state shown in fig. 25).
Thereafter, the guide portion 53 is obliquely raised. When the guide portion 53 is raised, the component stopper 55 is retracted to a position not contacting the guide portion 53, as in the above-described embodiment. The guide portion 53 passes through the opening 80a and advances obliquely upward, whereby the comb-shaped convex portion of the leading end portion of the guide portion 53 enters the comb-shaped concave portion of the mounting table 51, as shown in fig. 25. Further, the cut 622 of the frame 62 in which the part is embedded in the sheet 67 is positioned above one end portion of the comb shape of the mounting table 51, and thus one end portion of the protective sheet 61 is positioned above one end portion of the comb shape of the mounting table 51. Therefore, the one end portion of the protective sheet 61 is peeled off from the frame 62 by the front end portion of the guide portion 53 which advances obliquely upward, and the one end portion of the protective sheet 61 is rolled up with the sheet stopper 54 as a base point.
At this time, the tips of the pair of plate-like bodies (52a, 52b) of the chuck 52 are opened, and one end of the protective sheet 61 that has been rolled up is gripped between the gripping surface of the plate-like body 52a and the tip of the guide portion 53. Thereafter, the plate-like body 52b on the other side is closed. That is, since the convex portion of the comb-shaped portion of the plate-like body 52b provided at the distal end portion corresponds to the concave portion of the comb-shaped portion of the guide portion 53 provided at the distal end portion, the convex portion enters the concave portion, and one end portion of the protective sheet 61 is sandwiched between the plate-like body 52a and the distal end of the plate-like body 52b, whereby the protective sheet 61 is held.
When the protective sheet 61 is gripped by the chuck 52, the guide portion 53 is obliquely lowered and retreats to the lower side of the base 80. Further, the component stopper 55 moves from a position where contact with the guide portion 53 is avoided to a position where the length of the electronic component 60 is less than the length of the sheet stopper 54.
Subsequently, the protective sheet 61 is peeled off. That is, the chuck 52 is raised by the elevating mechanism 521 in a state where the one end portion of the protective sheet 61 is gripped, and the table 82 on which the loading table 51 is placed moves toward the region R along the guide 822. At this time, the chuck 52 is raised at the same speed as the movement of the table 82 and at a fixed speed, without stopping on the way. The operation at this time is performed in the same manner as the operations (d) to (f) in fig. 18 and the operation shown in fig. 19.
When the peeling of the protective sheet 61 is completed, the protective sheet 61 faces the plate-like body 86. As shown in fig. 26, the rotation arm 85 is rotated to the suction position by the rotation mechanism 84, the protective sheet 61 is sandwiched between the suction cup 85a at the tip of the rotation arm 85 and the plate-like body 86, and the protective sheet 61 is held by the suction cup 85 a. The surface of the plate-like body 86 facing the protective sheet 61 is provided with irregularities, so that the adhesive surface 611 of the protective sheet 61 does not adhere to the plate-like body 86. When the protective sheet 61 is held by the suction cup 85a, the grip by the chuck 52 is released.
After the protective sheet 61 is held, the rotation arm 85 is rotated in the reverse direction and returned to the original position, i.e., the recovery position. A recovery box, not shown, is provided below this recovery position, and the protective sheet 61 is recovered by releasing the holding of the protective sheet 61 and dropping the protective sheet 61 into the recovery box.
After the protective sheet 61 is peeled off, the electronic component 60 peeled off from the protective sheet 61 is sucked and held on the mounting table 51, and the frame 62 is supported on the mounting table 51. The stage 51 is positioned in the region R by the movement of the table 82. The discharge table 83 is rotated around the rotation shaft 833a by the rotation mechanism 83a in a state where the discharge tray 831 placed thereon is vacuum-sandwiched, and is opposed to the mounting table 51.
Here, since the tubular members 83b are erected at four corners of the discharge table 83, as shown in fig. 27, the front end of the tubular member 83b abuts on the mounting table 51, the discharge table 83 faces the mounting table 51, and the discharge tray 831 faces the frame 62 and the electronic component 60. At this time, a portion of the mounting table 51 on which the frame 62 is placed is dug down by one step, and as shown in the drawing, the upper surface of the frame 62 is at the same level as the upper surface of the electronic component 60 (electrode exposed surface 601).
In this state, the inside of the cylindrical member 83b is depressurized. When the inside of the serpentine tubular cylindrical member 83b is depressurized, the cylindrical member 83b contracts and the discharge table 83 approaches the mounting table 51. Thereby, the discharge tray 831 comes into contact with the frame 62 and the electronic component 60 on the mounting table 51. That is, the frame 62 and the electronic component 60 are sandwiched between the discharge tray 831 and the mounting table 51, and their positions are fixed.
Thereafter, the discharge table 83 is rotated by 180 ° around the rotation shaft 833a by the rotation mechanism 83a, and returned to the original position. At this time, the reduced pressure inside the cylindrical member 83b is maintained, and the mounting table 51 is vacuum-clamped by the cylindrical member 83 b. Therefore, the rotation mechanism 83a rotates the mounting table 51 together with the rotation of the discharge table 83. During this rotation, since the frame 62 and the electronic component 60 are sandwiched between the discharge tray 831 and the mounting table 51, the positional displacement of the electronic component 60 due to the rotation mechanism 83a can be suppressed.
After this rotation, the vacuum clamping of the mounting table 51 is released, and the pressure becomes positive. This makes it easy to transfer the electronic component 60 to the discharge tray 831. Further, the surface of the discharge tray 831 has adhesiveness, and positional displacement of the electronic component 60 during transfer can be suppressed. Then, the decompression of the cylindrical member 83b is stopped. Thereafter, the mounting table 51 is rotated by 180 ° by the rotation mechanism 83a and returned onto the stage 82. At this time, the frame 62 is supported only by the mounting table 52, and therefore remains on the discharge tray 831 together with the electronic component 60. Then, the vacuum clamping by the discharge tray 831 of the discharge table 83 is released, and the discharge tray 831 on which the electronic component 60 and the frame 62 are placed is conveyed by a conveyance mechanism, not shown. This completes one peeling operation. The empty discharge tray 831 is conveyed by a conveying mechanism, not shown, and is placed on the discharge table 83 and vacuum-clamped, and the component embedded sheet 67 is placed on the sheet supply table 81 by a conveying mechanism, not shown, so that the next peeling operation is started.
As described above, the peeling processing unit 5 of the present embodiment forms the tip end portion of one side (the plate-like body 52b) of the chuck 52, the tip end portion of the guide portion 53, and one end portion of the mounting table 51 into a comb shape, obliquely raises the guide portion 53, and passes the tip end portion through the concave portion of the comb-like portion of the one end portion of the mounting table 51 to peel and roll the protective sheet 61 from the frame 62, and is sandwiched between the guide portion 53 and the other side (the plate-like body 52a) of the chuck 52. Then, from this state, one side of the chuck 52 is closed. This enables the protective sheet 61 to be more securely held by the chuck 52.
That is, in the shape of the guide portion 53 of the peeling processing unit 5 of the above embodiment, the position of the upper end of the guide portion 53 is restricted so that the guide portion 53 does not interfere with the chuck 52. Therefore, the end portion of the protective sheet 61 that has been pushed up may be bent as if covering the front end of the guide portion 53 due to the flexibility of the protective sheet 61. In this state, there is a possibility that the grip of the protective sheet 61 by the chuck 52 fails. In contrast, in the peeling unit 5 according to the other embodiment in which one side of the guide portion 53 and the chuck 52 and one end portion of the mounting table 52 are formed in a comb shape, the guide portion 53 can be raised to a position closer to the chuck 52. Further, since the guide portion 53 is obliquely raised, the guide portion 53 is obliquely advanced with respect to the other side of the chuck 52, and thus the guide portion 53 in a state where the protective sheet 61 is rolled up can press and clamp the protective sheet 61 while bringing the protective sheet 61 close to the other side holding surface of the chuck 52. Further, since one side of the chuck 52 has a comb shape, even if one side of the chuck 52 performs a closing operation, the protective sheet 61 can be gripped without coming into contact with the guide portion 53 by passing through the comb-shaped portion of the guide portion 53.
Further, by providing the sheet supply table 81 and the discharge table 83, the loading of the component-embedded sheet 67 and the unloading of the electronic component 60 can be automated, and workability can be improved. In addition, in the subsequent step, for example, the electronic part 60 is packaged on the substrate of the smartphone. Therefore, in order to facilitate the holding of the electronic component 60 by the sealing device in the subsequent step, it is preferable to convey the electronic component to the subsequent step in a state where the top surface 603 on which the electromagnetic wave shielding film 605 is formed is upward. Since the sealing device is required to have a high degree of positioning accuracy, the electronic component 60 on the discharge tray 831 is also required to have a high degree of positioning accuracy. Therefore, it is desirable that the electronic components 60 are not displaced from the positions where the electronic components are arranged on the component non-mounting sheet 65 as much as possible.
Therefore, the discharge table 83 is provided with a tubular member 83b having elasticity and sealing property so as not to cause positional deviation when the electronic component 60 is transferred to the discharge tray 831. Further, by providing the surface of the discharge tray 831 with adhesiveness, positional deviation of the electronic component 60 when the electronic component 60 is transferred is suppressed, and positional deviation of the electronic component 60 when the electronic component is transported in a subsequent step is suppressed.
Further, since the rotation arm 85 and the rotation mechanism 84 are provided separately from the cartridge 52, the driving portion of the cartridge 52 can be made simple in structure, as compared with the structure in which the cartridge 52 is moved to the installation location of the recovery box after the protective sheet 61 has been peeled off.
The peeling processing unit 5 may be provided with a detection unit for detecting a tensile force when the chuck 52 peels off the protective sheet 61, and when the tensile force is equal to or greater than a predetermined value, the operation of the peeling processing unit 5 may be stopped by determining that the electronic component 60 is not peeled off the protective sheet 61. Therefore, the yield can be improved.
(other embodiments)
The present invention is not limited to the above-described embodiments, and includes the following embodiments. That is, as shown in fig. 28, the film deposition apparatus 7 may further include a transfer unit 71 that is responsible for the component placement step. The transfer unit 71 is responsible for the component mounting step of transferring the electronic component 60 from the tray on which the electronic component 60 before the film forming process is mounted onto the component non-mounting sheet 65. For example, the tray and the parts non-placement piece 65 may be arranged adjacent to each other, and the transfer unit 71 may be a robot that can move vertically and horizontally within a range including the tray and the parts non-placement piece 65. The front end of the arm of the robot is provided with, for example, a vacuum chuck. The transfer unit 71 generates a negative pressure on the tray to hold the electronic components 60, and releases the negative pressure in the component non-placement sheet 65 by vacuum breaking or opening the atmosphere, thereby arranging the electronic components 60 on the component non-placement sheet 65.
The film formation apparatus 7 is a system including the embedding process section 1, the plate mounting section 2, the film formation process section 3, the plate releasing section 4, and the peeling process section 5, but each of these sections may be configured as an independent apparatus and systematized. That is, the embedding processing unit 1 may be an independent embedding processing apparatus, the board mounting unit 2 may be an independent board mounting apparatus, the film formation processing unit 3 may be an independent film formation processing apparatus, the board release unit 4 may be an independent board release apparatus, and the peeling processing unit 5 may be an independent part peeling apparatus.
In the above embodiment, the height H1 from the surface of the component arrangement region 615 to the upper end surface of the frame 62 is set to be higher than the height H2 from the surface of the component arrangement region 615 to the top surface of the electronic component 60, but the height H1 is not limited thereto and may be lower than the height H2. In this case, the areas facing the component array area 615 on the top 11, the top 21, and the flat surface 112, the flat surface 212, and the flat surface 412 of the top 41 may be formed as recesses that are recessed by the difference between the allowable height H1 and the allowable height H2, so that the sealed space 14, the sealed space 24a, and the sealed space 45 can be formed.
In the peeling processing section 5, when the electronic component 60 is peeled from the protective sheet 61 having the component embedding sheet 67, the description has been given of the case where the frame 62 is peeled from the protective sheet 61 together with the electronic component 60, but the peeling processing section is not limited to this, and the electronic component 60 and the frame 62 may be peeled from the protective sheet 61 in separate steps. In short, the peeling processing section 5 and the component peeling device may have a function of peeling at least the electronic component 60 from the protective sheet 61.
Further, although the description has been given of the case where the frame 62 having the embedded parts 67 is supported on the mounting table 51, the present invention is not limited to this, and the frame 62 may be held on the mounting table 51 by a holding member such as a vacuum chuck, or a releasing member such as a peeling pin or a member for supplying a positive pressure may be provided to release the frame 62 from the mounting table 51.
While the embodiments and the modifications of the respective parts of the present invention have been described above, the embodiments and the modifications of the respective parts are presented as examples and are not intended to limit the scope of the present invention. These new embodiments can be implemented in other various forms, and various omissions, substitutions, and changes can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the scope of claims.

Claims (4)

1. A film forming apparatus for forming a film on an electronic component arranged on a protective sheet closely attached to a cooling plate, comprising:
a film formation processing unit that deposits a film formation material on the electronic component on the protective sheet in close contact with the cooling plate by sputtering to form a film; and
a plate removing section that removes the cooling plate after passing through the film formation processing section;
wherein the cooling plate has air holes penetrating the front and back surfaces thereof in a range including a region where the electronic components are arranged,
the plate releasing portion includes:
a mounting table having air holes facing the cooling plate and having positive pressure generating holes for generating positive pressure; and
and a fixing portion that presses a portion of the protective sheet that is separated from the area in which the electronic components are arranged, while the mounting table is pressing the area in which the electronic components are arranged through the positive pressure generating hole, and releases the pressing after the area in which the electronic components are arranged is separated from the cooling plate.
2. The film forming apparatus according to claim 1,
the plate releasing portion includes: a flat surface located on the opposite side of the cooling plate across the protective sheet and having been separated from the protective sheet,
the flat surface presses the raised portion of the protective sheet in the region where the electronic components are arranged first while the region where the electronic components are arranged is pressurized.
3. The film forming apparatus according to claim 2,
the plate releasing portion includes: a negative pressure generating hole that opens on the flat surface and generates a negative pressure,
the negative pressure generating hole attracts the protective sheet with pressurization of a region where the electronic parts are arranged by the positive pressure generating hole.
4. The film forming apparatus according to any one of claims 1 to 3,
the cooling plate has an insertion hole at a portion pressed by the fixing portion as a portion separated from a region where the electronic parts are arranged,
the plate releasing portion is provided with a push rod,
the pusher advances in the insertion hole of the cooling plate after the area where the electronic parts are arranged has been separated from the cooling plate, and pushes up the portion of the protective sheet pressed by the fixing portion in the direction of separating from the cooling plate,
the fixing portion is separated from the cooling plate as the push rod advances when the pressing is released.
CN202110002323.4A 2017-11-10 2018-11-09 Film forming apparatus Active CN112831761B (en)

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CN112795878A (en) 2021-05-14
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CN109763105A (en) 2019-05-17
CN113774320B (en) 2023-10-24
CN113774320A (en) 2021-12-10
CN112795877B (en) 2023-07-14
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CN112831761B (en) 2023-05-05
KR20190053796A (en) 2019-05-20

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