CN112824270B - 搬送车 - Google Patents

搬送车 Download PDF

Info

Publication number
CN112824270B
CN112824270B CN202011304442.7A CN202011304442A CN112824270B CN 112824270 B CN112824270 B CN 112824270B CN 202011304442 A CN202011304442 A CN 202011304442A CN 112824270 B CN112824270 B CN 112824270B
Authority
CN
China
Prior art keywords
container
unit
workpiece
frame
vehicle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202011304442.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN112824270A (zh
Inventor
砂川武司
田中万平
中幸一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of CN112824270A publication Critical patent/CN112824270A/zh
Application granted granted Critical
Publication of CN112824270B publication Critical patent/CN112824270B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G35/00—Mechanical conveyors not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Dicing (AREA)
CN202011304442.7A 2019-11-20 2020-11-19 搬送车 Active CN112824270B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-210042 2019-11-20
JP2019210042A JP7366499B2 (ja) 2019-11-20 2019-11-20 搬送車

Publications (2)

Publication Number Publication Date
CN112824270A CN112824270A (zh) 2021-05-21
CN112824270B true CN112824270B (zh) 2024-06-21

Family

ID=75907790

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011304442.7A Active CN112824270B (zh) 2019-11-20 2020-11-19 搬送车

Country Status (3)

Country Link
JP (1) JP7366499B2 (ko)
KR (1) KR20210061923A (ko)
CN (1) CN112824270B (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102765573A (zh) * 2010-09-16 2012-11-07 株式会社大福 搬运装置
CN105083979A (zh) * 2014-05-22 2015-11-25 株式会社大福 搬运装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06132389A (ja) * 1992-06-19 1994-05-13 Hitachi Ltd 半導体ウエハ用容器
JPH06177244A (ja) 1992-12-01 1994-06-24 Disco Abrasive Syst Ltd ダイシングシステム
JP4538729B2 (ja) 2005-02-04 2010-09-08 株式会社ダイフク 搬送車
JP5278698B2 (ja) * 2009-09-04 2013-09-04 株式会社ダイフク カセット搬送装置
JP6304084B2 (ja) * 2015-03-16 2018-04-04 株式会社ダイフク 物品搬送設備及び検査用治具
JP6813367B2 (ja) * 2017-01-13 2021-01-13 株式会社ディスコ フレームユニット搬送システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102765573A (zh) * 2010-09-16 2012-11-07 株式会社大福 搬运装置
CN105083979A (zh) * 2014-05-22 2015-11-25 株式会社大福 搬运装置

Also Published As

Publication number Publication date
CN112824270A (zh) 2021-05-21
KR20210061923A (ko) 2021-05-28
JP2021082740A (ja) 2021-05-27
TW202121569A (zh) 2021-06-01
JP7366499B2 (ja) 2023-10-23

Similar Documents

Publication Publication Date Title
TWI816833B (zh) 搬送系統
TWI817000B (zh) 搬送系統
CN113492467A (zh) 切削装置、托盘以及搬送系统
CN112824269B (zh) 搬送车
CN112824270B (zh) 搬送车
CN112824271B (zh) 搬送车和搬送系统
JP7471742B2 (ja) 搬送車及び昇降ユニット
JP2021082739A (ja) カセット収容機構及び加工装置
CN112824268A (zh) 搬送车、搬送路以及搬送系统
CN112825304A (zh) 搬送路
JP7408234B2 (ja) 搬送車及び搬送システム
JP7423142B2 (ja) 搬送装置
JP7423143B2 (ja) 搬送車
TWI857178B (zh) 搬送車
TWI850491B (zh) 搬送車以及搬送系統
TWI856207B (zh) 搬送車、搬送路徑及搬送系統
TWI856209B (zh) 搬送路徑
JP7483311B2 (ja) 搬送システム

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant