TWI856209B - 搬送路徑 - Google Patents

搬送路徑 Download PDF

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Publication number
TWI856209B
TWI856209B TW109140130A TW109140130A TWI856209B TW I856209 B TWI856209 B TW I856209B TW 109140130 A TW109140130 A TW 109140130A TW 109140130 A TW109140130 A TW 109140130A TW I856209 B TWI856209 B TW I856209B
Authority
TW
Taiwan
Prior art keywords
transport path
transport
path
Prior art date
Application number
TW109140130A
Other languages
English (en)
Other versions
TW202120413A (zh
Inventor
中幸一
山木響子
Original Assignee
日商迪思科股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2019210050A external-priority patent/JP7471743B2/ja
Application filed by 日商迪思科股份有限公司 filed Critical 日商迪思科股份有限公司
Publication of TW202120413A publication Critical patent/TW202120413A/zh
Application granted granted Critical
Publication of TWI856209B publication Critical patent/TWI856209B/zh

Links

TW109140130A 2019-11-20 2020-11-17 搬送路徑 TWI856209B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019210050A JP7471743B2 (ja) 2019-11-20 2019-11-20 搬送路
JP2019-210050 2019-11-20

Publications (2)

Publication Number Publication Date
TW202120413A TW202120413A (zh) 2021-06-01
TWI856209B true TWI856209B (zh) 2024-09-21

Family

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100147181A1 (en) 2004-08-24 2010-06-17 Brooks Automation, Inc. Elevator-based tool loading and buffering system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100147181A1 (en) 2004-08-24 2010-06-17 Brooks Automation, Inc. Elevator-based tool loading and buffering system

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