CN112786551B - 重布线层结构与半导体封装 - Google Patents

重布线层结构与半导体封装 Download PDF

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CN112786551B
CN112786551B CN201911281915.3A CN201911281915A CN112786551B CN 112786551 B CN112786551 B CN 112786551B CN 201911281915 A CN201911281915 A CN 201911281915A CN 112786551 B CN112786551 B CN 112786551B
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layer structure
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CN112786551A (zh
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杨吴德
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Nanya Technology Corp
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Abstract

本发明提供一种重布线层结构,包括第一接垫、第二接垫、第三接垫、第四接垫、第一开关元件、第二开关元件、第三开关元件与第四开关元件。第一接垫、第二接垫、第三接垫与第四接垫彼此分离。第一开关元件包括彼此分离的第一导体层与第二导体层。第二开关元件包括彼此分离的第三导体层与第四导体层。第三开关元件包括彼此分离的第五导体层与第六导体层。第四开关元件包括彼此分离的第七导体层与第八导体层。上述重布线层结构可有效地降低生产成本。

Description

重布线层结构与半导体封装
技术领域
本发明涉及一种半导体结构,尤其涉及一种重布线层(redistribution layer,RDL)结构与半导体封装。
背景技术
为了使电子产品设计实现轻薄、短小的特征,半导体封装技术不断进步以试图开发出体积更小、重量更轻、整合性更高以及在市场上竞争力更高的产品。举例来说,在一些产品中,如果封装需要多晶粒的堆叠,则通常需要多个不同的重布线层来提供连结。然而,由于不同的重布线层需要使用多个不同的光罩来进行制作,因此会造成生产成本提高。
发明内容
本发明提供一种重布线层结构与半导体封装,其可有效地降低生产成本。
本发明提出一种重布线层结构,包括第一接垫、第二接垫、第三接垫、第四接垫、第一开关元件、第二开关元件、第三开关元件与第四开关元件。第一接垫、第二接垫、第三接垫与第四接垫彼此分离。第一开关元件包括彼此分离的第一导体层与第二导体层。第一导体层耦接至第一接垫。第二导体层耦接至第三接垫。第二开关元件包括彼此分离的第三导体层与第四导体层。第三导体层耦接至第一接垫。第四导体层耦接至第四接垫。第三开关元件包括彼此分离的第五导体层与第六导体层。第五导体层耦接至第二接垫。第六导体层耦接至第三接垫。第四开关元件包括彼此分离的第七导体层与第八导体层。第七导体层耦接至第二接垫。第八导体层耦接至第四接垫。
依照本发明的一实施例所述,在上述重布线层结构中,还可包括第一导线、第二导线、第三导线、第四导线、第五导线、第六导线、第七导线与第八导线。第一导线耦接在第一导体层与第一接垫之间。第二导线耦接在第二导体层与第三接垫之间。第三导线耦接在第三导体层与第一接垫之间。第四导线耦接在第四导体层与第四接垫之间。第五导线耦接在第五导体层与第二接垫之间。第六导线耦接在第六导体层与第三接垫之间。第七导线耦接在第七导体层与第二接垫之间。第八导线耦接在第八导体层与第四接垫之间。
依照本发明的一实施例所述,在上述重布线层结构中,第一导线、第一导体层与第一接垫可为一体成形。第二导线、第二导体层与第三接垫可为一体成形。第三导线、第三导体层与第一接垫可为一体成形。第四导线、第四导体层与第四接垫可为一体成形。第五导线、第五导体层与第二接垫可为一体成形。第六导线、第六导体层与第三接垫可为一体成形。第七导线、第七导体层、第二接垫可为一体成形。第八导线、第八导体层与第四接垫可为一体成形。
依照本发明的一实施例所述,在上述重布线层结构中,还可包括第五接垫与第六接垫。第五接垫耦接至第三接垫。第六接垫耦接至第四接垫。
依照本发明的一实施例所述,在上述重布线层结构中,还可包括第九导线与第十导线。第九导线耦接在第三接垫与第五接垫之间。第十导线耦接在第四接垫与第六接垫之间。
依照本发明的一实施例所述,在上述重布线层结构中,第九导线、第三接垫与第五接垫可为一体成形。第十导线、第四接垫与第六接垫可为一体成形。
依照本发明的一实施例所述,在上述重布线层结构中,还可包括至少一个虚拟接垫。虚拟接垫可分离于第一接垫、第二接垫、第三接垫、第四接垫、第一开关元件、第二开关元件、第三开关元件与第四开关元件。
本发明提出一种半导体封装,包括第一晶粒、第二晶粒、第一重布线层结构与第二重布线层结构。第一重布线层结构设置在第一晶粒上。第二重布线层结构设置在第二晶粒上。第一重布线层结构与第二重布线层结构分别包括上述重布线层结构。第一重布线层结构与第二重布线层结构位于第一晶粒与第二晶粒之间且彼此耦接。
依照本发明的一实施例所述,在上述半导体封装中,第一重布线层结构的第三接垫可耦接至第二重布线层结构的第四接垫。第一重布线层结构的第四接垫可耦接至第二重布线层结构的第三接垫。
依照本发明的一实施例所述,在上述半导体封装中,还可包括第一导电连接件与第二导电连接件。第一导电连接件耦接在第一重布线层结构的第三导体层与第一重布线层结构的第四导体层之间。第二导电连接件耦接在第一重布线层结构的第五导体层与第一重布线层结构的第六导体层之间。
依照本发明的一实施例所述,在上述半导体封装中,还可包括第三导电连接件与第四导电连接件。第三导电连接件耦接在第二重布线层结构的第一导体层与第二重布线层结构的第二导体层之间。第四导电连接件耦接在第二重布线层结构的第七导体层与第二重布线层结构的第八导体层之间。
依照本发明的一实施例所述,在上述半导体封装中,还可包括第五导电连接件与第六导电连接件。第五导电连接件耦接在第一重布线层结构的第三接垫与第二重布线层结构的第四接垫之间。第六导电连接件耦接在第一重布线层结构的第四接垫与第二重布线层结构的第三接垫之间。
依照本发明的一实施例所述,在上述半导体封装中,重布线层结构还可包括第一导线、第二导线、第三导线、第四导线、第五导线、第六导线、第七导线与第八导线。第一导线耦接在第一导体层与第一接垫之间。第二导线耦接在第二导体层与第三接垫之间。第三导线耦接在第三导体层与第一接垫之间。第四导线耦接在第四导体层与第四接垫之间。第五导线耦接在第五导体层与第二接垫之间。第六导线耦接在第六导体层与第三接垫之间。第七导线耦接在第七导体层与第二接垫之间。第八导线耦接在第八导体层与第四接垫之间。
依照本发明的一实施例所述,在上述半导体封装中,第一导线、第一导体层与第一接垫可为一体成形。第二导线、第二导体层与第三接垫可为一体成形。第三导线、第三导体层与第一接垫可为一体成形。第四导线、第四导体层与第四接垫可为一体成形。第五导线、第五导体层与第二接垫可为一体成形。第六导线、第六导体层与第三接垫可为一体成形。第七导线、第七导体层、第二接垫可为一体成形。第八导线、第八导体层与第四接垫可为一体成形。
依照本发明的一实施例所述,在上述半导体封装中,重布线层结构还可包括第五接垫与第六接垫。第五接垫耦接至第三接垫。第六接垫耦接至第四接垫。
依照本发明的一实施例所述,在上述半导体封装中,重布线层结构还可包括第九导线与第十导线。第九导线耦接在第三接垫与第五接垫之间。第十导线耦接在第四接垫与第六接垫之间。
依照本发明的一实施例所述,在上述半导体封装中,第九导线、第三接垫与第五接垫可为一体成形。第十导线、第四接垫与第六接垫可为一体成形。
依照本发明的一实施例所述,在上述半导体封装中,重布线层结构还可包括至少一个虚拟接垫。虚拟接垫可分离于第一接垫、第二接垫、第三接垫、第四接垫、第一开关元件、第二开关元件、第三开关元件与第四开关元件。
依照本发明的一实施例所述,在上述半导体封装中,还可包括基底。第一晶粒与第二晶粒可堆叠在基底上。第二晶粒可位于第一晶粒与基底之间。
依照本发明的一实施例所述,在上述半导体封装中,还可包括包封体。包封体包封第一晶粒与第二晶粒。
基于上述,本发明所提出的重布线层结构包括第一开关元件、第二开关元件、第三开关元件与第四开关元件。因此,可通过将第一开关元件、第二开关元件、第三开关元件与第四开关元件分别设定为“开启状态(on state)”或“关闭状态(off state)”来决定接垫之间的耦接关系。如此一来,可以通过相同的重布线层结构来实现多种重布线层的接线方式。此外,在本发明所提出的半导体封装中,由于重布线层结构可用以实现多种重布线层的接线方式,所以第一晶粒与第二晶粒可通过具有相同重布线层布局图案(RDL layoutpattern)的第一重布线层结构与第二重布线层结构而彼此耦接,因此可有效地减少光罩的数量,且可降低生产成本。
为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并配合附图作详细说明如下。
附图说明
图1为本发明一实施例的重布线层结构的上视图;
图2为本发明一实施例的半导体封装的侧视图;
图3为图2中的设置在晶粒上的重布线层结构的上视图;
图4为将图3的其中一个晶粒进行翻转后的重布线层结构的示意图。
附图标记说明
10:半导体封装
100、100a、100b:重布线层结构
102a~102f:接垫
104a~104d:开关元件
106a~106h:导体层
108a~108j:导线
110a~110d:虚拟接垫
112a、112b:晶粒
114a~114f:导电连接件
116:基板
118a、118b:接合线
120:包封体
S1:第一面
S2:第二面
具体实施方式
图1为本发明一实施例的重布线层结构的上视图。
请参照图1,重布线层结构100包括接垫102a、接垫102b、接垫102c、接垫102d、开关元件104a、开关元件104b、开关元件104c与开关元件104d。重布线层结构100例如是重布线层布局图案。
接垫102a、接垫102b、接垫102c与接垫102d彼此分离。在本实施例中,接垫102a与接垫102b可用以作为晶粒接垫(die pad),且接垫102c与接垫102d可用以作为焊垫(solderpad),但本发明并不以此为限。此外,接垫102a与接垫102b例如是位于接垫102c与接垫102d之间,但本发明并不以此为限。所属技术领域技术人员可根据产品设计来调整接垫102a、接垫102b、接垫102c与接垫102d的设置方式。接垫102a~102d的材料例如是铜(Cu)、铝(Al)、镍(Ni)或金(Au)。
开关元件104a包括彼此分离的导体层106a与导体层106b。导体层106a耦接至接垫102a。导体层106b耦接至接垫102c。开关元件104b包括彼此分离的导体层106c与导体层106d。导体层106c耦接至接垫102a。导体层106d耦接至接垫102d。开关元件104c包括彼此分离的导体层106e与导体层106f。导体层106e耦接至接垫102b。导体层106f耦接至接垫102c。开关元件104d包括彼此分离的导体层106g与导体层106h。导体层106g耦接至接垫102b。导体层106h耦接至接垫102d。在本实施例中,用语“耦接(coupled)”可为“直接耦接(directlycoupled)”或“间接耦接(indirectly coupled)”。导体层106a~106h的材料例如是铜(Cu)、铝(Al)、镍(Ni)或金(Au)。
开关元件104a可用以决定接垫102a与接垫102c之间的耦接关系。开关元件104b可用以决定接垫102a与接垫102d之间的耦接关系。开关元件104c可用以决定接垫102b与接垫102c之间的耦接关系。开关元件104d可用以决定接垫102b与接垫102d之间的耦接关系。
以下,以开关元件104a为例来进行说明。当导体层106a与导体层106b未彼此耦接时,开关元件104a为“关闭状态”,且接垫102a与接垫102c未彼此耦接。当导体层106a与导体层106b通过导电连接件(如,焊球(solder ball))而彼此耦接时,开关元件104a为“开启状态”,且接垫102a与接垫102c彼此耦接。
此外,重布线层结构100还可包括导线108a、导线108b、导线108c、导线108d、导线108e、导线108f、导线108g与导线108h。导线108a耦接在导体层106a与接垫102a之间。导线108a、导体层106a与接垫102a可为一体成形。导线108b耦接在导体层106b与接垫102c之间。导线108b、导体层106b与接垫102c可为一体成形。导线108c耦接在导体层106c与接垫102a之间。导线108c、导体层106c与接垫102a可为一体成形。导线108d耦接在导体层106d与接垫102d。导线108d、导体层106d与接垫102d可为一体成形。导线108e耦接在导体层106e与接垫102b之间。导线108e、导体层106e与接垫102b可为一体成形。导线108f耦接在导体层106f与接垫102c之间。导线108f、导体层106f与接垫102c可为一体成形。导线108g耦接在导体层106g与接垫102b之间。导线108g、导体层106g与接垫102b可为一体成形。导线108h耦接在导体层106h与接垫102d之间。导线108h、导体层106h与接垫102d可为一体成形。导线108a~108h的材料例如是铜(Cu)、铝(Al)、镍(Ni)或金(Au)。
耦接至相同接垫的导线可为彼此分离或具有共用部分(shared portion)。以下,以导线108a、108c、108e、108g为例来进行说明。在本实施例中,导线108a与导线108c耦接至相同接垫102a且彼此分离,但本发明并不以此为限。在其他实施例中,耦接至相同接垫102a的导线108a与导线108c可具有共用部分。在本实施例中,导线108e与导线108g耦接至相同接垫102b且具有共用部分,但本发明并不以此为限。在其他实施例中,耦接至相同接垫102b的导线108e与导线108g可彼此分离。
此外,重布线层结构100还可包括接垫102e与接垫102f。接垫102e耦接至接垫102c。接垫102f耦接至接垫102d。接垫102e与接垫102f可用以作为接合垫(bond pad)。接垫102e与接垫102f的材料例如是铜(Cu)、铝(Al)、镍(Ni)或金(Au)。
另外,重布线层结构100还可包括导线108i与导线108j。导线108i耦接在接垫102c与接垫102e之间。导线108i、接垫102c与接垫102e可为一体成形。导线108j耦接在接垫102d与接垫102f之间。导线108j、接垫102d与接垫102f可为一体成形。导线108i与导线108j的材料例如是铜(Cu)、铝(Al)、镍(Ni)或金(Au)。
另一方面,重布线层结构100还可包括至少一个虚拟接垫。举例来说,重布线层结构100可包括虚拟接垫110a、虚拟接垫110b、虚拟接垫110c与虚拟接垫110d,但本发明并不以此为限。虚拟接110a~110d分离于接垫102a~102f、开关元件104a~104d与导线108a~108j。虚拟接垫110a~110d可用以支撑导电连接件(如,焊球)(未示出)。
基于上述,在上述实施例的重布线层结构100中,可通过将开关元件104a、开关元件104b、开关元件104c与开关元件104d分别设定为“开启状态(on state)”或“关闭状态(off state)”来决定接垫之间的耦接关系。如此一来,可以通过相同的重布线层结构100来实现多种重布线层的接线方式,因此可有效地减少光罩的数量,进而降低生产成本。
图2为本发明一实施例的半导体封装的侧视图。在图2中省略部分构件与符号,以清楚地说明导电连接件114a、114b、114e、114f以及耦接至导电连接件114a、114b、114e、114f的构件之间的配置关系。图3为图2中的设置在晶粒上的重布线层结构的上视图。图4为将图3的其中一个晶粒进行翻转后的重布线层结构的示意图。
请参照图1至图4,半导体封装10包括晶粒112a、晶粒112b、重布线层结构100a与重布线层结构100b。在本实施例中,上述重布线层结构100是以应用于半导体封装10为例来进行说明,但本发明并不以此为限。
重布线层结构100可应用于任何半导体封装10,以弹性地设计重布线层的接线方式。半导体封装10例如是双晶粒封装(dual die package,DDP),但本发明并不以此为限。在本实施例中,半导体封装10是以覆晶封装(flip chip package,FCP)为例来进行说明。
重布线层结构100a设置在晶粒112a上。重布线层结构100b设置在晶粒112b上。重布线层结构100a与重布线层结构100b分别包括上述重布线层结构100。亦即,重布线层结构100a与重布线层结构100b包括重布线层结构100的所有构件。重布线层结构100a的接垫102a与重布线层结构100a的接垫102b可耦接至晶粒112a。重布线层结构100b的接垫102a与重布线层结构100b的接垫102b可耦接至晶粒112b。此外,重布线层结构100中的各构件的材料、设置方式与功效已于上述实施例进行详尽地说明,于此不再说明。
重布线层结构100a与重布线层结构100b位于晶粒112a与晶粒112b之间且彼此耦接。举例来说,重布线层结构100a的接垫102c可耦接至重布线层结构100b的接垫102d,且重布线层结构100a的接垫102d可耦接至重布线层结构100b的接垫102c。
半导体封装10还可包括导电连接件114a、导电连接件114b、导电连接件114c、导电连接件114d、导电连接件114e、导电连接件114f、基板116、接合线118a、接合线118b与包封体120中的至少一者。导电连接件114a~114f例如是焊球、导电柱(conductive pillars)(如,铜柱(copper pillar))或其组合等。在本实施例中,导电连接件114a~114f是以焊球为例来进行说明,但本发明并不以此为限。
导电连接件114a耦接在重布线层结构100a的导体层106c与重布线层结构100a的导体层106d之间。藉此,在重布线层结构100a中,开关元件104b为“开启状态”,且接垫102a与接垫102d彼此耦接。导电连接件114b耦接在重布线层结构100a的导体层106e与重布线层结构100a的导体层106f之间。藉此,在重布线层结构100a中,开关元件104c为“开启状态”,且接垫102b与接垫102c彼此耦接。此外,在重布线层结构100a中,由于开关元件104a与开关元件104d为“关闭状态”,因此接垫102a与接垫102c未彼此耦接,且接垫102b与接垫102d未彼此耦接。
导电连接件114c耦接在重布线层结构100b的导体层106a与重布线层结构100b的导体层106b之间。藉此,在重布线层结构100b中,开关元件104a为“开启状态”,且接垫102a与接垫102c彼此耦接。导电连接件114d耦接在重布线层结构100b的导体层106g与重布线层结构100b的导体层106h之间。藉此,在重布线层结构100b中,开关元件104d为“开启状态”,且接垫102b与接垫102d彼此耦接。此外,在重布线层结构100b中,由于开关元件104b与开关元件104c为“关闭状态”,因此接垫102a与接垫102d未彼此耦接,且接垫102b与接垫102c未彼此耦接。
导电连接件114e耦接在重布线层结构100a的接垫102c与重布线层结构100b的接垫102d之间。导电连接件114f耦接在重布线层结构100a的接垫102d与重布线层结构100b的接垫102c之间。藉此,重布线层结构100a与重布线层结构100b可彼此耦接。
如此一来,重布线层结构100a的接垫102a与重布线层结构100b的接垫102a可彼此耦接,且重布线层结构100a的接垫102b与重布线层结构100b的接垫102b可彼此耦接。此外,由于重布线层结构100可用以实现多种重布线层的接线方式,所以晶粒112a与晶粒112b可通过具有相同重布线层布局图案的重布线层结构100a与重布线层结构100b而彼此耦接,因此可有效地减少光罩的数量,且可降低生产成本。
此外,重布线层结构100a的虚拟接垫110b可用以支撑导电连接件114c。重布线层结构100a的虚拟接垫110c可用以支撑导电连接件114d。重布线层结构100b的虚拟接垫110a可用以支撑导电连接件114a。重布线层结构100b的虚拟接垫110d可用以支撑导电连接件114b。
晶粒112a与晶粒112b可堆叠在基板116上。晶粒112b可位于晶粒112a与基板116之间,但本发明并不以此为限。此外,基板116可具有彼此相对的第一面S1与第二面S2。晶粒112a与晶粒112b可位于第一面S1上。基板116例如是封装基板(package substrate),如印刷电路板(printed circuit board,PCB)。
接合线118a与接合线118b可用以将重布线层结构100b耦接至基板116,但本发明并不以此为限。举例来说,接合线118a可耦接在重布线层结构100b的接垫102e与基板116之间,且接合线118b可耦接在重布线层结构100b的接垫102f与基板116之间。
包封体120包封晶粒112a与晶粒112b。因此,包封体120可用以保护晶粒112a与晶粒112b。包封体120包括模制化合物(molding compound)、树脂(如,环氧树脂(epoxy))或其组合等。
在本实施例中,半导体封装10是以包括一个重布线层结构100a与一个重布线层结构100b为例来进行说明,但本发明并不以此为限。在其他实施例中,半导体封装10可包括设置在晶粒112a上的多个重布线层结构100a与设置在晶粒112b上的多个重布线层结构100b。
在一些实施例中,半导体封装10还可包括所属技术领域所周知的其他构件(如,凸块下金属(under bump metallization,UBM)层(未示出)或位于基底116的第二面S2上的至少一个导电连接件(未示出)),于此不再说明。
基于上述,在上述实施例的半导体封装10中,由于重布线层结构100可用以实现多种重布线层的接线方式,所以晶粒112a与晶粒112b可通过具有相同重布线层布局图案的重布线层结构100a与重布线层结构100b而彼此耦接,因此可有效地减少光罩的数量,且可降低生产成本。
综上所述,在上述实施例的重布线层结构与半导体封装中,可通过相同的重布线层结构来实现多种重布线层的接线方式,因此可有效地减少光罩的数量,进而降低生产成本。
虽然本发明已以实施例揭示如上,然其并非用以限定本发明,任何所属技术领域中技术人员,在不脱离本发明的精神和范围内,当可作些许的更改与润饰,故本发明的保护范围当视权利要求所界定的为准。

Claims (18)

1.一种重布线层结构,包括:
彼此分离的第一接垫、第二接垫、第三接垫与第四接垫;
第一开关元件,包括彼此分离的第一导体层与第二导体层,其中所述第一导体层耦接至所述第一接垫,且所述第二导体层耦接至所述第三接垫;
第二开关元件,包括彼此分离的第三导体层与第四导体层,其中所述第三导体层耦接至所述第一接垫,且所述第四导体层耦接至所述第四接垫;
第三开关元件,包括彼此分离的第五导体层与第六导体层,其中所述第五导体层耦接至所述第二接垫,且所述第六导体层耦接至所述第三接垫;
第四开关元件,包括彼此分离的第七导体层与第八导体层,其中所述第七导体层耦接至所述第二接垫,且所述第八导体层耦接至所述第四接垫;
第五接垫,耦接至所述第三接垫;以及
第六接垫,耦接至所述第四接垫。
2.根据权利要求1所述的重布线层结构,还包括:
第一导线,耦接在所述第一导体层与所述第一接垫之间;
第二导线,耦接在所述第二导体层与所述第三接垫之间;
第三导线,耦接在所述第三导体层与所述第一接垫之间;
第四导线,耦接在所述第四导体层与所述第四接垫之间;
第五导线,耦接在所述第五导体层与所述第二接垫之间;
第六导线,耦接在所述第六导体层与所述第三接垫之间;
第七导线,耦接在所述第七导体层与所述第二接垫之间;以及
第八导线,耦接在所述第八导体层与所述第四接垫之间。
3.根据权利要求2所述的重布线层结构,其中
所述第一导线、所述第一导体层与所述第一接垫为一体成形,
所述第二导线、所述第二导体层与所述第三接垫为一体成形,
所述第三导线、所述第三导体层与所述第一接垫为一体成形,
所述第四导线、所述第四导体层与所述第四接垫为一体成形,
所述第五导线、所述第五导体层与所述第二接垫为一体成形,
所述第六导线、所述第六导体层与所述第三接垫为一体成形,
所述第七导线、所述第七导体层、所述第二接垫为一体成形,且
所述第八导线、所述第八导体层与所述第四接垫为一体成形。
4.根据权利要求1所述的重布线层结构,还包括:
第九导线,耦接在所述第三接垫与所述第五接垫之间;以及
第十导线,耦接在所述第四接垫与所述第六接垫之间。
5.根据权利要求4所述的重布线层结构,其中
所述第九导线、所述第三接垫与所述第五接垫为一体成形,且
所述第十导线、所述第四接垫与所述第六接垫为一体成形。
6.根据权利要求1所述的重布线层结构,还包括:
至少一个虚拟接垫,分离于所述第一接垫、所述第二接垫、所述第三接垫、所述第四接垫、所述第一开关元件、所述第二开关元件、所述第三开关元件与所述第四开关元件。
7.一种半导体封装,包括:
第一晶粒;
第二晶粒;
第一重布线层结构,设置在所述第一晶粒上;以及
第二重布线层结构,设置在所述第二晶粒上,其中
所述第一重布线层结构与所述第二重布线层结构分别包括如权利要求1所述的重布线层结构,且
所述第一重布线层结构与所述第二重布线层结构位于所述第一晶粒与所述第二晶粒之间且彼此耦接。
8.根据权利要求7所述的半导体封装,其中所述第一重布线层结构的所述第三接垫耦接至所述第二重布线层结构的所述第四接垫,且所述第一重布线层结构的所述第四接垫耦接至所述第二重布线层结构的所述第三接垫。
9.根据权利要求8所述的半导体封装,还包括:
第一导电连接件,耦接在所述第一重布线层结构的所述第三导体层与所述第一重布线层结构的所述第四导体层之间;以及
第二导电连接件,耦接在所述第一重布线层结构的所述第五导体层与所述第一重布线层结构的所述第六导体层之间。
10.根据权利要求9所述的半导体封装,还包括:
第三导电连接件,耦接在所述第二重布线层结构的所述第一导体层与所述第二重布线层结构的所述第二导体层之间;以及
第四导电连接件,耦接在所述第二重布线层结构的所述第七导体层与所述第二重布线层结构的所述第八导体层之间。
11.根据权利要求8所述的半导体封装,还包括:
第五导电连接件,耦接在所述第一重布线层结构的所述第三接垫与所述第二重布线层结构的所述第四接垫之间;以及
第六导电连接件,耦接在所述第一重布线层结构的所述第四接垫与所述第二重布线层结构的所述第三接垫之间。
12.根据权利要求7所述的半导体封装,其中所述重布线层结构还包括:
第一导线,耦接在所述第一导体层与所述第一接垫之间;
第二导线,耦接在所述第二导体层与所述第三接垫之间;
第三导线,耦接在所述第三导体层与所述第一接垫之间;
第四导线,耦接在所述第四导体层与所述第四接垫之间;
第五导线,耦接在所述第五导体层与所述第二接垫之间;
第六导线,耦接在所述第六导体层与所述第三接垫之间;
第七导线,耦接在所述第七导体层与所述第二接垫之间;以及
第八导线,耦接在所述第八导体层与所述第四接垫之间。
13.根据权利要求12所述的半导体封装,其中
所述第一导线、所述第一导体层与所述第一接垫为一体成形,
所述第二导线、所述第二导体层与所述第三接垫为一体成形,
所述第三导线、所述第三导体层与所述第一接垫为一体成形,
所述第四导线、所述第四导体层与所述第四接垫为一体成形,
所述第五导线、所述第五导体层与所述第二接垫为一体成形,
所述第六导线、所述第六导体层与所述第三接垫为一体成形,
所述第七导线、所述第七导体层、所述第二接垫为一体成形,且
所述第八导线、所述第八导体层与所述第四接垫为一体成形。
14.根据权利要求7所述的半导体封装,其中所述重布线层结构还包括:
第九导线,耦接在所述第三接垫与所述第五接垫之间;以及
第十导线,耦接在所述第四接垫与所述第六接垫之间。
15.根据权利要求14所述的半导体封装,其中
所述第九导线、所述第三接垫与所述第五接垫为一体成形,且
所述第十导线、所述第四接垫与所述第六接垫为一体成形。
16.根据权利要求7所述的半导体封装,其中所述重布线层结构还包括:
至少一个虚拟接垫,分离于所述第一接垫、所述第二接垫、所述第三接垫、所述第四接垫、所述第一开关元件、所述第二开关元件、所述第三开关元件与所述第四开关元件。
17.根据权利要求7所述的半导体封装,还包括:
基底,其中所述第一晶粒与所述第二晶粒堆叠在所述基底上,且所述第二晶粒位于所述第一晶粒与所述基底之间。
18.根据权利要求7所述的半导体封装,还包括:
包封体,包封所述第一晶粒与所述第二晶粒。
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