CN112770858B - Surface-coated cutting tool with hard coating layer exhibiting excellent chipping resistance - Google Patents

Surface-coated cutting tool with hard coating layer exhibiting excellent chipping resistance Download PDF

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CN112770858B
CN112770858B CN201980062729.2A CN201980062729A CN112770858B CN 112770858 B CN112770858 B CN 112770858B CN 201980062729 A CN201980062729 A CN 201980062729A CN 112770858 B CN112770858 B CN 112770858B
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CN112770858A (en
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石垣卓也
柳泽光亮
中村大树
本间尚志
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Mitsubishi Materials Corp
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523Pulsed gas flow or change of composition over time

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  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
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Abstract

The present invention provides a surface-coated cutting tool, wherein the surface of a tool substrate (100) is provided with an average layer thickness of 2.0-20.0 [ mu ] m and is composed of (Ti (1‑x) Al x )(C y N (1‑y) ) Represented by TiAlCN layer, average content of Al x avg Average content ratio y with C avg X is 0.60-0 avg ≤0.95、0.00≤y avg When the crystal grain diameter d of each crystal grain in the upper layer side region obtained by halving the TiAlCN layer in the layer thickness direction is calculated, the crystal grains (21) having a grain diameter of 0.01 [ mu ] m < d ] 0.20 [ mu ] m are present in an amount of 10 to 40 area% relative to the total area, and the crystal grains having a grain diameter of 0.01 [ mu ] m < d ] 0.20 [ mu ] m are present in the upper layer side region, and are adjacent to each other and connected, the average value of the maximum length of the respective regions in the direction parallel to the surface of the tool base body (100) is 5.0 [ mu ] m or less.

Description

Surface-coated cutting tool with hard coating layer exhibiting excellent chipping resistance
Technical Field
The present invention relates to a surface-coated cutting tool (hereinafter, sometimes referred to as a coated tool), which exhibits excellent cutting performance even when used for a long period of time because a hard coating layer has excellent chipping resistance even when used for high-speed intermittent cutting processing of cast iron, alloy steel, and the like.
The present application claims priority from patent application No. 2018-186044 of the japanese application at 28 of 9 in 2018 and patent application No. 2019-146495 of the japanese application at 8 of 2019, and the contents thereof are incorporated herein.
Background
Conventionally, a coated tool has been known which exhibits excellent wear resistance, and in which a ti—al composite carbonitride layer is formed as a hard coating layer by coating the surface of a tool base body (hereinafter, collectively referred to as a tool base body) composed of a tungsten carbide (hereinafter, referred to as WC) based cemented carbide, a titanium carbonitride (hereinafter, referred to as TiCN) based cermet, or a cubic boron nitride (hereinafter, referred to as cBN) based ultrahigh pressure sintered body by a physical vapor deposition method.
However, the conventional coating tools coated with the ti—al composite carbonitride layer are excellent in wear resistance, but are prone to abnormal wear such as chipping when used under high-speed intermittent cutting conditions, and various proposals have been made for improving the lubricity of the hard coating layer.
For example, patent document 1 describes a coating tool having Ti, which is a hard coating film of crystal grains having a face-centered cubic lattice (fcc) structure of 85% by volume or more and having a thickness of 1 to 16 μm formed on a substrate by CVD 1- x Al x C y N z A layer (x is more than or equal to 0.40 and less than or equal to 0.95, y is more than or equal to 0 and less than or equal to 0.10, and z is more than or equal to 0.85 and less than or equal to 1.15), wherein Ti of AlN with hexagonal crystal structure is precipitated on the crystal boundary of the layer 1-o Al o C p N q (0.95≤o≤1.00、0≤p≤0.10、0.85≤q≤1.15、o-x≥0.05)。
Patent document 2, for example, describes a hard skinA film coating tool, wherein the hard film comprises a plurality of grains and an amorphous phase between the grains, the grains respectively having Ti having fcc structure 1-x Al x N layer and Ti having fcc structure 1-y Al y N layers are alternately laminated to form a structure, the Ti is 1-x Al x The Al composition ratio x of the N layer satisfies the relation that x is more than or equal to 0 and less than 1, the Ti 1-y Al y The Al composition ratio y of the N layer satisfies the relation of 0 < y.ltoreq.1, the Al composition ratio x and the Al composition ratio y satisfy the relation of (y-x) not less than 0.2, and the amorphous phase contains carbide, nitride or carbonitride of at least one of Ti and Al.
Patent document 1: international patent publication No. 2017/016826
Patent document 2: japanese patent laid-open publication 2016-3368
Since the hard film described in patent documents 1 and 2 has a phase, such as hexagonal and amorphous phases, in the grain boundaries, which generally reduces the strength, chipping is likely to occur when the hard film is subjected to high-speed intermittent cutting with a higher load, and satisfactory cutting performance is hardly exhibited.
Disclosure of Invention
Accordingly, an object of the present invention is to provide a cutting tool which exhibits excellent cutting performance even when used for a long period of time because a hard coating layer has excellent chipping resistance even when used for high-speed intermittent cutting processing of cast iron, alloy steel, and the like.
The present inventors have studied intensively about improvement of chipping resistance of a composite nitride layer or a composite carbonitride layer of Ti and Al (hereinafter, the composite nitride layer or the composite carbonitride layer is also referred to as TiAlCN layer) as a hard coating layer, and as a result, have found the following new findings: if there are moderately small grains (microcrystals) between grains having a large grain size, the abrasion resistance imparted by the grains having a large grain size is maintained, and at the same time, the crack propagation during cutting is suppressed, and the chipping resistance is improved in high-speed intermittent cutting processing of cast iron, alloy steel, and the like.
The present invention has been completed based on this knowledge, and has the following aspects.
(1) A surface-coated cutting tool having a hard coating layer provided on a surface of a tool base, the surface-coated cutting tool comprising:
(a) The hard coating layer at least comprises a composite nitride layer or a composite carbonitride layer of Ti and Al with an average layer thickness of 2.0-20.0 mu m,
(b) When it is represented by the formula: (T) i(1-x) Al x )(C y N (1-y) ) When the composite nitride layer or the composite carbonitride layer is represented, the average content ratio x of Al in the total amount of Ti and Al is represented by avg Average content ratio y of C in total of C and N avg Respectively satisfy x is more than or equal to 0.60 avg ≤0.95、0.00≤y avg Not more than 0.05, wherein x avg 、y avg All are in the atomic ratio,
(c) In the composite nitride layer or the composite carbonitride layer, when the longitudinal section of the layer is observed, the area ratio of the grains having the NaCl-type face-centered cubic structure to the composite nitride layer or the composite carbonitride layer is 90% or more by area,
(d) When the crystal grain size d of each crystal grain having the NaCl face-centered cubic structure is obtained in the region on the upper layer side obtained by halving the composite nitride layer or the composite carbonitride layer into the upper layer side and the lower layer side in the layer thickness direction, crystal grains having a grain size d of 0.01 μm < d.ltoreq.0.20 μm are present in an area ratio of 10 to 40 area% with respect to the total area of the composite nitride layer or the composite carbonitride layer in the region on the upper layer side,
(e) Further, in the region on the upper layer side obtained by performing the halving, there are regions where crystal grains having a crystal grain diameter d of 0.01 μm < d.ltoreq.0.20 μm of each crystal grain of the NaCl face-centered cubic structure are connected adjacent to each other, and an average value L (dsum) of a maximum length L of the regions in a direction parallel to the tool base surface satisfies L (dsum). Ltoreq.5.0 μm.
(2) The surface-coated cutting tool according to (1), wherein,
the area ratio of the crystal grains having the NaCl face-centered cubic structure in the composite nitride layer or the composite carbonitride layer is 95 area% or more.
(3) The surface-coated cutting tool according to (1) or (2), wherein,
for each of the crystal grains constituting the composite nitride layer or the composite carbonitride layer, the crystal grain having a crystal grain diameter d of 0.20 μm < d is present in an area ratio of 30 area% or more with respect to the total area of the composite nitride layer or the composite carbonitride layer.
(4) The surface-coated cutting tool according to any one of (1) to (3), wherein,
when the inclination angle degree distribution is obtained by measuring the inclination angle formed by the normal line of {111} plane of the crystal grain having the NaCl-type face-centered cubic structure and the direction perpendicular to the tool base surface in the crystal grain constituting the composite nitride layer or the composite carbonitride layer, the highest peak value exists in the inclination angle zone in the range of 0 to 12 degrees, and the sum of degrees existing in the range of 0 to 12 degrees is 45% or more of the total degrees in the inclination angle degree distribution.
The hard coating layer of the coating tool of the present invention has excellent chipping resistance and exhibits excellent cutting performance when used for a long period of time.
Drawings
FIG. 1 is a schematic view of a longitudinal section (section perpendicular to the surface of a tool substrate) of a hard coating layer of the present invention, wherein crystal grains having a crystal grain diameter d of 0.01 μm < d.ltoreq.0.20 μm are marked as a fine grain structure, and crystal grains having a crystal grain diameter d of 0.20 μm < d are marked as a coarse grain structure. The shape or size of each tissue does not reflect the shape or size of the actual tissue as it is.
Detailed Description
Hereinafter, the cutting tool of the present invention will be described in more detail. In the description of the present specification and claims, when the numerical range is expressed as "to" the range, the range includes upper limit and lower limit values. The unit of the lower limit value is the same as the unit of the upper limit value.
Average layer thickness of the hard coat layer 20:
the hard coat layer 20 of the present invention comprises at least a composition formula: (Ti) (1-x) Al x )(C y N (1-y) ) The composite nitride layer or the composite carbonitride layer of Ti and Al is shown. The TiAlCN layer has high hardness and excellent wear resistance, and particularly, when the average layer thickness is 2.0-20.0 μm, the effect is remarkably exhibited. The reason is that if the average layer thickness is less than 2.0 μm, the wear resistance is not sufficiently ensured when used for a long period of time due to the thin layer thickness, whereas if the average layer thickness is more than 20.0 μm, crystal grains of the TiAlCN layer are liable to coarsen and chipping is liable to occur. The average layer thickness is more preferably 4.0 to 12.0. Mu.m.
Composition of TiAlCN layer:
the TiAlCN layer of the invention is formed by the following formula: (Ti) (1-x) Al x )(C y N (1-y) ) Expressed as the average content ratio x of Al in the total amount of Ti and Al avg And the average content y of C in the total amount of C and N avg (wherein x avg 、y avg All are atomic ratios) respectively satisfy x being more than or equal to 0.60 avg ≤0.95、0.00≤y avg Controlling the composition in a mode of less than or equal to 0.05.
The reason is that when Al is contained in the average proportion x avg If the amount is less than 0.60, the TiAlCN layer will have poor oxidation resistance, and thus the wear resistance will be insufficient when the alloy steel is subjected to high-speed intermittent cutting. On the other hand, if the average content ratio of Al is x avg If the amount of hexagonal crystals is more than 0.95, the amount of hexagonal crystals having a hardness difference increases, and the hardness decreases, so that the wear resistance decreases.
And the average content y of C component contained in TiAlCN layer avg Specified as 0.00.ltoreq.y avg As to the content of C, the hardness can be increased in a small amount, and the average content of C is y avg When the amount is not more than 0.05, the hardness can be improved while maintaining the chipping resistance. The Ti-Al composite nitride layer or the composite carbonitride layer (TiAlCN layer) referred to herein does not impair the above-described effects of the invention even if it contains a small amount of unavoidable impurities such as O and Cl.
Here the number of the elements to be processed is,average content x of Al in TiAlCN layer avg The analysis results of the auger electrons obtained by irradiating a sample having a cross section of a ground sample with an electron beam from the side of the longitudinal section by auger electron spectroscopy (Auger Electron Spectroscopy: AES) and performing five-line analysis in the layer thickness direction were averaged. And, regarding the average content ratio y of C avg Can be obtained by Secondary Ion Mass Spectrometry (SIMS). That is, in the sample in which the sample surface is polished, ion beams are irradiated from the surface side of the TiAlCN layer to a range of 70 μm×70 μm, and surface analysis by the ion beams and etching by the sputtering ion beams are alternately repeated, whereby concentration measurement is performed in the depth direction. First, the average of data obtained by measuring the TiAlCN layer at a distance of 0.1 μm or less from a position of 0.5 μm or more in the depth direction of the layer to a depth of at least 0.5 μm was obtained. Further, the results of repeated calculation at least at five portions of the sample surface are averaged to obtain an average C content y avg And the result was obtained.
Area ratio of grains having NaCl-type face centered cubic structure within TiAlCN layer:
in the TiAlCN layer, crystal grains having a NaCl face-centered cubic structure (sometimes referred to as cubic crystal grains) must be present, and when the longitudinal section of the layer is observed, the area ratio thereof is preferably at least 90 area%. Thus, the area ratio of the crystal grains having the NaCl face-centered cubic structure with high hardness becomes high and the hardness increases. The area ratio is more preferably 95 area% or more, and may be 100 area%.
In the region of the upper layer side obtained by halving the TiAlCN layer into the upper layer side and the bottom layer side in the layer thickness direction, the grain size to area ratio of the crystal grains having the NaCl face-centered cubic structure:
it is preferable that in the region of the upper layer side obtained by halving the TiAlCN layer into the upper layer side and the lower layer side in the layer thickness direction, crystal grains 21 having a crystal grain diameter d of 0.01 μm < d.ltoreq.0.20 μm per crystal grain having a face-centered cubic structure of NaCl are present. The reason is that the crystal grains 21 are present between the larger crystal grains 22 of 0.20 μm < d, and if the crystal grain diameter of the crystal grains 21 is 0.01 μm or less, the grain diameter is too small, and if it exceeds 0.20 μm, the crystal grains become large and the grain boundary is reduced, so that the chipping resistance is not improved.
The area ratio of the crystal grains 21 in the region on the upper layer side of the TiAlCN layer is preferably 10 to 40 area%. The reason is that if the amount of the metal particles is less than 10 area%, the crystal grains 21 are reduced, and crack propagation cannot be sufficiently suppressed, while if the amount of the metal particles is more than 40 area%, the crystal grains 21 are significantly detached during cutting, and the chipping resistance cannot be improved at any one side.
Regarding the crystal grains having the NaCl face-centered cubic structure in the region of the upper layer side obtained by halving the TiAlCN layer into the upper layer side and the bottom layer side in the layer thickness direction, the crystal grains 21 having the particle diameter d of 0.01 μm < d.ltoreq.0.20 μm are adjacent to each other and each region connected has an average value L (dsum) of the maximum length L in the direction parallel to the surface of the tool base 100:
in the region on the upper layer side obtained by halving the TiAlCN layer into the upper layer side and the lower layer side in the layer thickness direction, there are regions where crystal grains having a crystal grain diameter d of 0.01 μm < d.ltoreq.0.20 μm are connected adjacent to each other (regions formed only of crystal grains 21 having a grain diameter d of 0.01 μm < d.ltoreq.0.20 μm), and it is preferable that the average value L (dsum) of the maximum length L of the regions in the direction parallel to the surface of the tool base 100 satisfies 0.2 μm.ltoreq.l (dsum) 5.0 μm, respectively. The reason is that, if L (dsum) is larger than 5.0 μm, the crystal grains 21 are layered in a direction parallel to the surface of the tool base 100, and the improvement of the chipping resistance cannot be expected, and if L (dsum) is smaller than 0.2 μm, the aggregation of the crystal grains 21 is small or small, and the improvement of the chipping resistance cannot be expected. The maximum length L in each region is a maximum length obtained by connecting two different points on the grain boundary of the crystal grain defining the region.
The crystal grain size, the area ratio, and the maximum length L of the crystal grains having the NaCl-type face-centered cubic structure were measured as follows. In a vertical section of an upper layer side region obtained by bisecting the TiAlCN layer into an upper layer side and a lower layer side in the layer thickness direction, a range of a length obtained by bisecting an average layer thickness in the layer thickness direction by 100 μm in a direction parallel to the surface of the tool base 100 was set as a measurement range. The measurement range was polished, and the crystal structure of each crystal grain having the NaCl face-centered cubic structure was analyzed by electron back scattering diffraction, which was obtained by irradiating an electron beam having an acceleration voltage of 15kV at an incidence angle of 70 degrees to the polished surface with an irradiation current of 1nA and irradiating the electron beam at intervals of 0.01 μm, using an electron back scattering diffraction device. That is, when there is a difference in orientation of 5 degrees or more between adjacent measurement points (pixels), this is defined as a grain boundary, and a region surrounded by the grain boundary is defined as one crystal grain. However, all pixels adjacent to each other have a azimuth difference of 5 degrees or more, and pixels existing alone are not treated as crystal grains, but a region to which two or more pixels are connected is treated as a crystal grain. The crystal grain size is defined as the diameter of a circle having the same area as the defined crystal grains. The area ratio is a ratio of the sum of areas of the respective crystal grains to the area of the measurement range. In the above measurement range, each region where crystal grains having a crystal grain diameter d of 0.01 μm < d.ltoreq.0.20 μm are adjacent to each other and connected is designated, and the maximum length L in each region is obtained to calculate the average value L (dsum).
Regarding the crystal grains 22 having a NaCl face-centered cubic structure in the TiAlCN layer, the grain size d is 0.20 μm < d, and the area ratio of the crystal grains having an aspect ratio a of 2 to 20:
regarding the crystal grains 22 having a crystal grain diameter of 0.20 μm < d per crystal grain having a NaCl face-centered cubic structure, when the longitudinal section of the layer is observed, it is preferable that the crystal grains having an aspect ratio a of 2 to 20 exist at an area ratio of 30 to 90 area% with respect to the total area of the composite nitride layer or the composite carbonitride layer. The reason for this numerical range is that the abrasion resistance and chipping resistance of the layer can be improved by having a crystal grain with a proper aspect ratio a and area ratio. That is, the reason is that when the area ratio of the crystal grains having an aspect ratio a of less than 2 is large or when the area ratio of the crystal grains having an aspect ratio a is within a range but less than 30%, a sufficient columnar structure is not formed, and therefore, the equiaxed crystal having a small aspect ratio is caused to fall off, and as a result, a sufficient effect of improving the abrasion resistance is not exhibited, whereas when the area ratio of the crystal grains having an aspect ratio a of more than 20 is large, the crystal grains themselves cannot maintain the strength, and a sufficient effect of improving the chipping resistance is not exhibited. Further, even if the aspect ratio a is within the above range, if the area ratio is too high, the toughness of the TiAlCN layer itself is improved, but the peeling resistance with the base material is lowered, and as a result, the effect of improving the chipping resistance cannot be exerted.
In addition, regarding the aspect ratio a, when a longitudinal cross-section of the hard coating layer 20 was observed in a range of 100 μm in width and including the entire height of the hard coating layer 20 using a scanning electron microscope, the particle width w in the direction parallel to the substrate surface and the particle length l in the direction perpendicular to the substrate surface were measured from the side of the coating cross-section perpendicular to the surface of the tool substrate 100, and a=l/w was calculated.
Degree distribution of tilt angle between the normal line of {111} plane, which is the crystal surface of crystal grains having NaCl-type face-centered cubic structure, and the direction perpendicular to the surface of the tool base 100 in TiAlCN layer:
when measuring the tilt angle between the normal line of {111} plane, which is the crystal surface of the crystal grain having the NaCl-type face-centered cubic structure, in the TiAlCN layer and the direction perpendicular to the surface of the tool base 100, and dividing the measured tilt angle in the range of 0 to 45 degrees with respect to the normal line direction by 0.25 degree intervals, and calculating the tilt angle degree distribution by counting the degrees existing in each division, it is preferable that the highest peak exists in the tilt angle division in the range of 0 to 12 degrees, and the total of the degrees existing in the range of 0 to 12 degrees is a proportion of 45 to 90% of the total degrees in the tilt angle degree distribution. The reason for this is that if the grain size is within this range, the orientation of the crystal grains is aligned in the same direction within a predetermined range, and the strength of the grain boundaries is thereby improved, and as a result, both the wear resistance and the chipping resistance are improved. That is, the reason is that the abrasion resistance cannot be improved when the ratio is less than 45%, and the chipping resistance cannot be expected to be improved when the ratio exceeds 90%, and as a result, the effect of improving the cutting performance cannot be exhibited.
The inclination angle distribution is obtained as follows.
First, a vertical section (a section perpendicular to the surface of the tool base 100) of the hard coating layer 20 including a composite nitride layer or a composite carbonitride layer of Ti and Al having a NaCl-type face-centered cubic structure is set as a polished surface, and is set in a barrel of a field emission scanning electron microscope. In the polishing surface (cross-sectional polishing surface), for a layer thickness in a direction parallel to the surface of the tool substrate 100 by a length of 100 μm and in a direction perpendicular to the surface of the tool substrate 100, a range of a length equivalent to the layer thickness is set as a measurement range, an electron beam having an acceleration voltage of 15kV is irradiated at an irradiation current of 1nA at an incidence angle of 70 degrees to the polishing surface of the measurement range, and electron back scattering diffraction obtained by irradiating each crystal grain having a NaCl face-centered cubic structure existing in the measurement range of the cross-sectional polishing surface at intervals of 0.01 μm/step is measured at each measurement point (point at which the electron beam is irradiated), and an inclination angle formed by a normal line of a {111} plane, which is a crystal face of the crystal grain, and a normal line of the substrate surface (direction perpendicular to the substrate surface in the cross-sectional polishing surface) is measured at each measurement point.
Then, from the measurement result, the tilt angles in the range of 0 to 45 degrees among the measured tilt angles are divided at intervals of 0.25 degrees, and the degrees existing in the respective divisions are summed up, whereby the tilt angle degree distribution is obtained. From the obtained inclination angle degree distribution, the highest peak of the degrees existing in the range of 0 to 12 degrees was confirmed, and the ratio of the degrees existing in the range of 0 to 12 degrees to the degrees existing in the range of 0 to 45 degrees (total degrees in the inclination angle degree distribution) was obtained. In the inclination angle distribution chart, it is more preferable that the total of the degrees in the range of 0 to 12 degrees is 50% or more of the total degrees in the inclination angle degree distribution.
In addition, when the inclination angle degree distribution is obtained, in the case of ideal random orientation, the inclination angle degree is normalized to a predetermined value, and is not affected by the inclination angle formed by the normal direction of a certain crystal plane and the normal direction of the surface of the tool base 100.
Other layers:
the TiAlCN layer of the present invention has sufficient chipping resistance and wear resistance as the hard coat layer 20, but when a lower layer including a Ti compound layer composed of one or more of a carbide layer, a nitride layer, a carbonitride layer, a oxycarbonitride layer, and a oxycarbonitride layer and having a total average layer thickness of 0.1 to 20.5 μm is provided adjacent to the tool base 100, and/or when a layer including at least an aluminum oxide layer is provided on the TiAlCN layer with a total average layer thickness of 1.0 to 25.5 μm as an upper layer, the effects exerted by these layers are combined, more excellent wear resistance and thermal stability can be exerted.
Here, if the total average layer thickness of the lower layers is less than 0.1 μm, the effect of the lower layers cannot be fully exerted, whereas if it exceeds 20.5 μm, the crystal grains of the lower layers are liable to coarsen and chipping is liable to occur. Further, if the total average layer thickness of the upper layer including the alumina layer is less than 1.0 μm, the effect of the upper layer cannot be sufficiently exhibited, whereas if it exceeds 25.5 μm, crystal grains of the upper layer are liable to coarsen and chipping is liable to occur.
Tool base 100:
as such a tool base body, any of the conventionally known base materials can be used as long as the tool base body 100 does not hinder achievement of the object of the present invention. As examples, cemented carbide (including Co in addition to WC-based cemented carbide and WC, and alloys including carbonitrides of Ti, ta, nb, and the like), cermet (ceramics including TiC, tiN, tiCN and the like as main components), ceramics (titanium carbide, silicon nitride, aluminum oxide, and the like), or cBN sintered body is preferable. Of these various substrates, WC-based cemented carbide, cermet (TiCN-based cermet) and cBN sintered body are particularly preferably selected. The reason for this is that they are excellent in balance between hardness and strength at high temperature, and are excellent as a tool base of a cutting tool.
Film formation method (conditions):
the TiAlCN layer of the present invention can be obtained, for example, by the following method: to the tool base 100 or the carbide layer of Ti on the tool base 100 with a predetermined phase difference,At least one or more of the nitride layer, the carbonitride layer, the oxycarbide layer, and the oxycarbonitride layer is supplied with two kinds of reaction gases (reaction gas (1) and reaction gas (2)) composed of, for example, a gas group a and a gas group B, wherein the gas group a is composed of NH 3 、N 2 H and H 2 The gas group B consists of AlCl 3 、TiCl 4 、N 2 、C 2 H 4 H and H 2 Composition is prepared.
As an example of the gas composition of the reaction gas,% by volume (the sum of the gas group a and the gas group B is taken as a whole), the following reaction gas (1) and reaction gas (2) are used.
Reaction gas (1)
Gas group a: NH (NH) 3 :2.0~3.0%;N 2 :0.0~5.0%;H 2 :50~60%
Gas group B: alCl 3 :0.60~1.00%;TiCl 4 :0.10~0.40%;N 2 :2.0~10.0%;C 2 H 4 :0.0~3.0%;H 2 : residual of
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 650-850 DEG C
Supply cycle: 4.00 to 30.00 seconds
Gas supply time per cycle: 0.30 to 0.90 seconds
Phase difference between the supplies of gas group a and gas group B: 0.10 to 0.30 seconds
Reaction gas (2)
Gas group a: NH (NH) 3 :0.2~0.6%;N 2 :0.0~5.0%;H 2 :50~60%
Gas group B: alCl 3 :0.06~0.20%;TiCl 4 :0.01~0.06%;N 2 :2.0~10.0%;C 2 H 4 :0.0~0.5%;H 2 : residual of
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 650-850 DEG C
Supply cycle: 4.00 to 30.00 seconds
Gas supply time per cycle: 0.30 to 0.90 seconds
Phase difference between the supplies of gas group a and gas group B: 0.10 to 0.30 seconds
Phase difference between the reaction gas (1) and the reaction gas (2): 2.00 to 15.00 seconds
Examples
Next, examples will be described.
Here, as a specific example of the coated tool of the present invention, an example will be described in which the coated tool is applied to a cutting tool using WC-based cemented carbide as a tool base, but the same applies to a case where TiCN-based cermet or cBN-based ultra-high pressure sintered body is used as a tool base, and the same applies to a case of a drill or an end mill.
Example 1 >
WC powder, tiC powder, taC powder, nbC powder and Cr powder each having an average particle diameter of 1 to 3 μm are prepared as raw material powder 3 C 2 Powders and Co powders were prepared by mixing these raw material powders into the compositions shown in Table 1, adding paraffin wax, mixing the mixture with acetone for 24 hours by a ball mill, drying the mixture under reduced pressure, press-molding the mixture under a pressure of 98MPa into a compact of a predetermined shape, vacuum-sintering the compact under a vacuum of 5Pa at a predetermined temperature in the range of 1370 to 1470 ℃ for 1 hour, and thereafter, producing tool substrates A to C each having a blade shape of ISO standard SEEN1203 AFSN.
Next, a TiAlCN layer was formed on the surfaces of the tool substrates a to C by CVD using a CVD apparatus, and coating tools 1 to 11 according to the present invention shown in table 6 were obtained.
The film formation conditions are described in tables 2 and 3, but are substantially as follows. The% of the gas composition is the volume% (the sum of gas group A and gas group B is taken as a whole).
Reaction gas (1)
Gas group a: NH (NH) 3 :2.0~3.0%;N 2 :0.0~5.0%;H 2 :50~60%
Gas group B: alCl 3 :0.60~1.00%;TiCl 4 :0.10~0.40%;N 2 :2.0~10.0%;C 2 H 4 :0.0~3.0%;H 2 : residual of
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 650-850 DEG C
Supply cycle: 4.00 to 30.00 seconds
Gas supply time per cycle: 0.30 to 0.90 seconds
Phase difference between the supplies of gas group a and gas group B: 0.10 to 0.30 seconds
Reaction gas (2)
Gas group a: NH (NH) 3 :0.2~0.6%;N 2 :0.0~5.0%;H 2 :50~60%
Gas group B: alCl 3 :0.06~0.20%;TiCl 4 :0.01~0.06%;N 2 :2.0~10.0%;C 2 H 4 :0.0~0.5%;H 2 : residual of
Reaction atmosphere pressure: 4.5 to 5.0kPa
Reaction atmosphere temperature: 650-850 DEG C
Supply cycle: 4.00 to 30.00 seconds
Gas supply time per cycle: 0.30 to 0.90 seconds
Phase difference between the supplies of gas group a and gas group B: 0.10 to 0.30 seconds
Phase difference between the reaction gas (1) and the reaction gas (2): 2.00 to 15.00 seconds
In addition, in the coating tools 4 to 11 of the present invention, the lower layer and/or the upper layer shown in table 5 were formed under the film forming conditions shown in table 4.
For comparison purposes, the comparative coating tools 1 to 11 were manufactured by performing CVD on the surfaces of the tool substrates a to C under the conditions shown in tables 2 and 3, and forming a hard coating layer containing the TiAlCN layer shown in table 6 by vapor deposition. In addition, for comparative coating tools 4 to 11, the lower layer and/or the upper layer shown in table 5 were formed under the formation conditions shown in table 4.
In addition, the coating tools 1 to 11 according to the present invention and the comparative coating are described aboveThe average Al content x of the hard coating layers of the tools 1 to 11 was determined by the above method avg Average content y of N avg . The area ratio of the crystal grains of the NaCl face-centered cubic structure, the area ratio of the crystal grains with the aspect ratio A of 2 to 20, and the ratio of the degree existing in the range of 0 to 12 degrees for each degree distribution of the inclination angle of the normal line of the {111} plane were obtained. Then, the average value L (dsum) of the maximum length L in the direction parallel to the tool substrate surface, in which the area ratio of the crystal grains of NaCl face-centered cubic structure having 0.01 [ mu ] m < d ] and 0.20 [ mu ] m occupied by the upper layer side region of the TiAlCN layer was obtained. These results are summarized in Table 6.
Further, the coating tools 1 to 11 of the present invention were observed by using a scanning electron microscope and a suitable magnification (for example, 5000 times magnification), the longitudinal sections (sections in the direction perpendicular to the tool base surface) of the respective structural layers of the coating tools 1 to 11 were compared, the layer thicknesses at five points in the observation field were measured and the average layer thickness was obtained by averaging, and the region from the surface of the TiAlCN layer to half the length of the average layer thickness was set as the upper layer side region.
TABLE 1
Figure GDA0002990764780000101
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Figure GDA0002990764780000111
/>
Figure GDA0002990764780000121
TABLE 4
Figure GDA0002990764780000131
TABLE 5
Figure GDA0002990764780000132
/>
Figure GDA0002990764780000141
Next, with respect to the above-described coating tools 1 to 11 of the present invention and comparative coating tools 1 to 11, the following experiments of dry high-speed face milling and center cutting of alloy steel were performed in a state in which the tool steel tool tip portion having a tool diameter of 100mm was clamped by a fixing jig, and the flank wear width of the cutting edge was measured. The results of the cutting test are shown in table 7. In addition, since the comparative coating tools 1 to 11 have a lifetime due to chipping, the time until the lifetime is reached is shown.
Cutting test 1: dry high speed face milling, center cut cutting test
Diameter of cutter: 100mm of
Workpiece material: JIS SCM440 block material having width of 80mm and length of 400mm
Rotational speed: 1114min -1
Cutting speed: 350m/min
Depth cutting amount: 3.0mm
Feed amount: 0.3 mm/blade
Cutting time: 8 minutes
(typical cutting speed is 200 m/min)
TABLE 7
Figure GDA0002990764780000151
The cutting time (minutes) for reaching the life of the coated tool was compared, and the cutting time (minutes) for reaching the life due to chipping was represented.
Example 2 >
WC powder, tiC powder, zrC powder, taC powder, nbC powder and Cr powder each having an average particle diameter of 1 to 3 μm are prepared as raw material powder 3 C 2 The powder, tiN powder and Co powder were mixed with the raw material powders shown in table 8, and after paraffin was added, they were mixed with acetone for 24 hours by a ball mill, and dried under reduced pressure. Thereafter, a compact of a predetermined shape was press-formed at a pressure of 98MPa, and the compact was vacuum-sintered under a vacuum of 5Pa at a predetermined temperature in the range of 1370 to 1470 ℃ for 1 hour. After sintering, by applying R to the cutting edge: cutting edges of 0.07mm were ground to produce tool substrates α to γ made of WC-based cemented carbide each having a blade shape of ISO standard CNMG 120412.
Next, by the same method as in example 1, using a CVD apparatus under the conditions shown in tables 2 and 3, tiAlCN layers were formed on the surfaces of the tool substrates α to γ, and the coating tools 12 to 22 of the present invention shown in table 10 were obtained.
In addition, the coating tools 15 to 20 and 22 according to the present invention were formed with the lower layer and/or the upper layer shown in table 9 under the film forming conditions shown in table 4.
For comparison purposes, similar to example 1, a hard coating layer including the TiAlCN layer shown in table 10 was deposited on the surfaces of the tool substrates α to γ by the CVD method under the conditions shown in tables 2 and 3, thereby producing comparative coating tools 12 to 22.
In addition, the lower layer and/or the upper layer shown in table 9 were formed by the formation conditions shown in table 4 with respect to the comparative coating tools 15 to 20, 22.
In the same manner as in example 1, the average content x of Al was obtained by the above method for the hard coating layers of the coating tools 12 to 22 of the present invention and the comparative coating tools 12 to 22 avg Average content y of N avg . The area ratio of the crystal grains of the NaCl face-centered cubic structure, the area ratio of the crystal grains with the aspect ratio A of 2 to 20, and the ratio of the degree existing in the range of 0 to 12 degrees for each degree distribution of the inclination angle of the normal line of the {111} plane were obtained. And, it was found that the grains of NaCl face-centered cubic structure with 0.01 μm < d.ltoreq.0.20 μm were located in the region on the upper layer side of the TiAlCN layerThe ratio of the occupied area, the average value L (dsum) of the maximum length L in the direction parallel to the surface of the tool base body. These results are summarized in Table 10.
The average layer thickness and the upper layer side region were the same as in example 1.
TABLE 8
Figure GDA0002990764780000161
TABLE 9
Figure GDA0002990764780000171
/>
Figure GDA0002990764780000181
Next, the following dry high-speed intermittent cutting test was performed on the coating tools 12 to 22 of the present invention and the comparative coating tools 12 to 22 in a state where the various coating tools were fastened to the tip portion of the tool steel turning blade by the fixing jig, and the flank wear width of the cutting edge was measured. The results are shown in Table 11. Further, the comparative coating tools 12 to 22 have a lifetime due to chipping, and therefore the time until the lifetime is reached is shown.
Cutting test: dry high speed interrupted cutting process
Workpiece material: round bar with eight longitudinal grooves formed at equal intervals in JIS FCD600 length direction
Cutting speed: 300m/min
Depth cutting amount: 3.0mm
Feed amount: 0.3mm/rev
Cutting time: for 5 minutes
(typical cutting speed is 200 m/min)
TABLE 11
Figure GDA0002990764780000191
The cutting time (minutes) for reaching the life of the coated tool was compared, and the cutting time (minutes) for reaching the life due to chipping was represented.
As is clear from the results shown in tables 7 and 11, in all of the coated tools 1 to 22 of the present invention, the hard coating layer has excellent chipping resistance, and therefore, even when used for high-speed intermittent cutting processing of cast iron, alloy steel, and the like, chipping does not occur, and excellent wear resistance can be exhibited for a long period of time. In contrast, in the comparative clad tools 1 to 22, which do not satisfy one of the predetermined matters in the clad tool of the present invention, chipping occurs when the clad tool is used for high-speed intermittent cutting processing of cast iron, alloy steel, and the like, and the service life is achieved in a short period of time.
Industrial applicability
As described above, the coated tool of the present invention can be used as a coated tool for high-speed intermittent cutting processing other than cast iron and alloy steel, and can exhibit excellent wear resistance over a long period of time, and thus can sufficiently satisfy the requirements of high performance of cutting devices and labor saving, energy saving and cost reduction in cutting processing.

Claims (4)

1. A surface-coated cutting tool having a hard coating layer provided on a surface of a tool base, the surface-coated cutting tool comprising:
(a) The hard coating layer at least comprises a composite nitride layer or a composite carbonitride layer of Ti and Al with an average layer thickness of 2.0-20.0 mu m,
(b) When it is represented by the formula: (Ti) (1-x) Al x )(C y N (1-y) ) When the composite nitride layer or the composite carbonitride layer is represented, the average content ratio x of Al in the total amount of Ti and Al is represented by avg Average content ratio y of C in total of C and N avg Respectively satisfy x is more than or equal to 0.60 avg ≤0.95、0.00≤y avg Not more than 0.05, wherein x avg 、y avg All are in the atomic ratio,
(c) In the composite nitride layer or the composite carbonitride layer, when the longitudinal section of the layer is observed, the area ratio of the grains having the NaCl-type face-centered cubic structure to the composite nitride layer or the composite carbonitride layer is 90% or more by area,
(d) When the crystal grain size d of each crystal grain having the NaCl face-centered cubic structure is obtained in the region on the upper layer side obtained by halving the composite nitride layer or the composite carbonitride layer into the upper layer side and the lower layer side in the layer thickness direction, crystal grains having a grain size d of 0.01 μm < d.ltoreq.0.20 μm are present in an area ratio of 10 to 40 area% with respect to the total area of the composite nitride layer or the composite carbonitride layer in the region on the upper layer side,
(e) Further, in the region on the upper layer side obtained by performing the halving, there are regions where crystal grains having a crystal grain diameter d of 0.01 μm < d.ltoreq.0.20 μm of each crystal grain of the NaCl face-centered cubic structure are connected adjacent to each other, and an average value L (dsum) of a maximum length L of the regions in a direction parallel to the tool base surface satisfies L (dsum). Ltoreq.5.0 μm.
2. The surface coated cutting tool according to claim 1, wherein,
the area ratio of the crystal grains having the NaCl face-centered cubic structure in the composite nitride layer or the composite carbonitride layer is 95 area% or more.
3. The surface-coated cutting tool according to claim 1 or 2, wherein,
for each of the crystal grains constituting the composite nitride layer or the composite carbonitride layer, the crystal grain having a crystal grain diameter d of 0.20 μm < d is present in an area ratio of 30 area% or more with respect to the total area of the composite nitride layer or the composite carbonitride layer.
4. A surface-coated cutting tool according to any one of claim 1 to 3,
when the inclination angle degree distribution is obtained by measuring the inclination angle formed by the normal line of {111} plane of the crystal grain having the NaCl-type face-centered cubic structure and the direction perpendicular to the tool base surface in the crystal grain constituting the composite nitride layer or the composite carbonitride layer, the highest peak value exists in the inclination angle zone in the range of 0 to 12 degrees, and the sum of degrees existing in the range of 0 to 12 degrees is 45% or more of the total degrees in the inclination angle degree distribution.
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