CN112722832B - Efficient loading and unloading system - Google Patents
Efficient loading and unloading system Download PDFInfo
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- CN112722832B CN112722832B CN202011459386.4A CN202011459386A CN112722832B CN 112722832 B CN112722832 B CN 112722832B CN 202011459386 A CN202011459386 A CN 202011459386A CN 112722832 B CN112722832 B CN 112722832B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/914—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems incorporating rotary and rectilinear movements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a high-efficiency feeding and discharging system, which comprises: the device comprises four groups of detection devices, wherein each of the four groups of detection devices is provided with a detection table, a discharge table is fixedly connected among the four groups of detection devices, and four groups of discharge discs matched with the detection tables in position are fixedly connected on the discharge table; and the feeding and discharging mechanical arm mechanism is used for simultaneously serving the four groups of detection equipment. This unloading system in high efficiency through having set up last unloading manipulator mechanism for the problem that traditional probe testboard work efficiency is low and extravagant manipulator resource has been solved, has improved work efficiency effectively, through having set up drive arrangement, makes elevating gear and rotary mechanism can part work again of simultaneous working, has effectively saved the waste of unnecessary power resource, through having set up rotary mechanism, makes the manipulator performance when going up unloading to the wafer optimize more, has improved the practicality effectively.
Description
Technical Field
The invention relates to the technical field of electrical parameter testing and classification of semiconductor discrete device GPP chips, in particular to a high-efficiency loading and unloading system.
Background
The polysilicon is dissolved and doped into the silicon crystal seed crystal, and then slowly pulled out to form cylindrical monocrystalline silicon. After the silicon crystal bar is ground, polished and sliced, a silicon wafer, namely a wafer, is formed. At present, domestic wafer production lines mainly adopt 8 inches and 12 inches, and the main processing modes of wafers are sheet processing and batch processing, namely 1 or more wafers are processed simultaneously. As semiconductor feature sizes become smaller, processing and measurement equipment becomes more advanced. The probe test bench is a measuring instrument used in the field of mechanical engineering, and is an instrument which can be used for detecting wafers at present.
In the invention, one set of manipulator serves four devices (or one device with four stations), and in the process of testing one device (or one station), the manipulator can utilize the idle time to execute feeding and discharging actions for other three devices (or other three stations of one device), thereby greatly saving the time and the space for placing the devices. Therefore, an efficient loading and unloading system is provided.
Disclosure of Invention
The invention aims to provide an efficient loading and unloading system to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: unloading system in high efficiency includes: the device comprises four groups of detection devices, wherein detection tables are arranged on the four groups of detection devices, a discharging table is fixedly connected among the four groups of detection devices, and four groups of discharging discs matched with the detection tables in position are fixedly connected on the discharging table; the feeding and discharging mechanical arm mechanism is used for simultaneously serving the four groups of detection equipment; the lifting device is used for lifting the feeding and discharging mechanical arm mechanism and detecting the wafer in a matching manner; the rotating mechanism is used for rotating the feeding and discharging mechanical arm mechanism and matching detection; and the driving device is used for driving the lifting device and the rotating mechanism to operate. The arrangement of the feeding and discharging mechanical arm mechanism, the lifting device, the rotating mechanism and the driving device enables the overall performance of the full-automatic probe test board in the detection of the wafer to be optimized.
Preferably, the driving device comprises a motor, a first rotating shaft, a first bevel gear, a second bevel gear, a limiting block and an induction device, the motor is installed between any two groups of adjacent detection equipment, the output end of the motor is fixedly connected with the first rotating shaft, a first sliding groove is formed in the first rotating shaft, the first rotating shaft is slidably connected with the first bevel gear and the second bevel gear, the limiting blocks matched with the first sliding groove are fixedly connected onto the first bevel gear and the second bevel gear, sliding grooves are formed in the first bevel gear and the second bevel gear, and the induction device is arranged between the sliding grooves. The driving device effectively saves unnecessary power resource waste.
Preferably, the induction device comprises a telescopic rod, induction rods and a console, two ends of the telescopic rod are respectively connected with sliding grooves in the first bevel gear and the second bevel gear in a rotating mode, the telescopic rod is connected with the induction rods in an installing mode, and the induction rods are connected with the console fixedly connected with four groups of detection equipment. The sensing device is used for controlling the lifting device and the rotating mechanism by the driving device.
Preferably, the lifting device comprises a third bevel gear, a protection box, a first threaded rod, a movable block and a sliding plate, the third bevel gear is meshed with the first bevel gear, the protection box fixedly connected with the detection device is arranged above the third bevel gear, one end of the first threaded rod is rotatably connected with the protection box, the other end of the first threaded rod is fixedly connected with the third bevel gear, a plurality of groups of movable blocks slidably connected with the protection box are in threaded connection with the first threaded rod, and the sliding plate slidably connected with four groups of detection devices is arranged above the protection box. The arrangement of the lifting device is effectively matched with the height adjustment of the manipulator when the manipulator operates the wafer.
Preferably, rotary mechanism includes second pivot, fourth bevel gear, gear post, brace table and gear sleeve, the one end and the control cabinet of second pivot rotate to be connected, fixedly connected with and the fourth bevel gear that second bevel gear meshing is connected in the second pivot, the other end fixedly connected with gear post of second pivot, swing joint has the brace table with multiunit movable block fixed connection in the second pivot, blowing platform sliding connection has the gear sleeve with gear post sliding connection, the last unloading manipulator mechanism of top fixedly connected with of gear sleeve. The rotating mechanism effectively improves the practicability.
Preferably, go up unloading manipulator mechanism and include rolling disc, first motor, action wheel, toothed belt, follow driving wheel, rack piece, manipulator, sucking disc and connecting device, the rolling disc is provided with two sets ofly, and sets up about being, the bottom and the gear sleeve top fixed connection of rolling disc are two sets of equal erection joint has two sets of first motors in the rolling disc, and is two sets of the equal fixedly connected with action wheel of output of first motor, the action wheel transmission is connected with the toothed belt, the toothed belt transmission is connected with rotates the follow driving wheel of being connected with the rolling disc, and is two sets of the meshing is connected with the rack piece with rolling disc sliding connection between the toothed belt, the one end of fixedly connected with manipulator on the rack piece, the other end fixedly connected with of manipulator is used for carrying out absorbent sucking disc to the wafer, and is two sets of be provided with connecting device between the rolling disc. The feeding and discharging mechanical arm mechanism effectively improves the working efficiency.
Preferably, the connecting device comprises a connecting ring, a second motor, a first gear and a second gear, one end of the connecting ring is fixedly connected with the rotating disc, the other end of the connecting ring is rotatably connected with the top rotating disc, the second motor is mounted on the rotating disc, the output end of the second motor is fixedly connected with the first gear, and the bottom of the top rotating disc is fixedly connected with the second gear which is in meshed connection with the first gear. The connecting device enables the two groups of mechanical arms to work simultaneously and independently.
Preferably, the second rotating shaft is made of a wear-resistant material. The second rotating shaft is more durable due to the wear-resistant material.
Preferably, the moving block and the supporting platform are both made of high-strength materials. The special material makes the machine more stable during operation.
Compared with the prior art, the invention has the beneficial effects that:
according to the probe test board, the problems that the traditional probe test board is low in working efficiency and wastes manipulator resources are solved by arranging the feeding and discharging manipulator mechanism, the working efficiency is effectively improved, the lifting device and the rotating mechanism can work simultaneously and separately by arranging the driving device, unnecessary waste of power resources is effectively saved, the performance of the manipulator is optimized when the manipulator carries out feeding and discharging on wafers by arranging the rotating mechanism, and the practicability is effectively improved.
Drawings
FIG. 1 is a schematic diagram of the novel overall structure of the present invention;
FIG. 2 is a schematic structural diagram of a driving device according to the present invention;
FIG. 3 is a schematic view of a portion of the support device of the present invention;
FIG. 4 is a schematic view of a portion of the rotary mechanism of the present invention;
FIG. 5 is another view of FIG. 4;
FIG. 6 is an enlarged view of area A in FIG. 2;
FIG. 7 is an enlarged view of area B of FIG. 3;
FIG. 8 is an enlarged view of area C of FIG. 4;
fig. 9 is an enlarged view of the area D in fig. 5.
In the figure: 1-a detection device; 2-detecting the platform; 3-a discharge table; 4-placing a tray; 5-a feeding and discharging manipulator mechanism; 6-a lifting device; 7-a rotating mechanism; 8-a drive device; 9-an electric motor; 10-a first rotating shaft; 11-a first runner; 12-a first bevel gear; 13-a second bevel gear; 14-a limiting block; 15-a sliding groove; 16-a sensing device; 17-a telescopic rod; 18-an induction bar; 19-a console; 20-a third bevel gear; 21-a protection box; 22-a first threaded rod; 23-a moving block; 24-a slide plate; 25-a second rotating shaft; 26-a fourth bevel gear; 27-gear column; 28-a support table; 29-gear sleeve; 30-a rotating disc; 31-a first motor; 32-a driving wheel; 33-a gear belt; 34-a driven wheel; 35-a rack block; 36-a robot arm; 37-a suction cup; 38-a connecting means; 39-a connecting ring; 40-a second motor; 41-a first gear; 42-second gear.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-9, the present invention provides a technical solution: unloading system in high efficiency includes: the device comprises four groups of detection equipment 1, wherein detection tables 2 are arranged on the four groups of detection equipment 1, a discharging table 3 is fixedly connected between the four groups of detection equipment 1, and four groups of discharging discs 4 matched with the detection tables 2 in position are fixedly connected on the discharging table 3; the feeding and discharging mechanical arm mechanism 5 is used for simultaneously serving the four groups of detection equipment 1; the lifting device 6 is used for lifting the feeding and discharging manipulator mechanism 5 and detecting the wafer in a matching manner; the rotating mechanism 7 is used for rotating the feeding and discharging manipulator mechanism 5 and performing matched detection on the rotating mechanism 7; and the driving device 8 is used for driving the lifting device 6 and the rotating mechanism 7 to operate. The feeding and discharging mechanical arm mechanism 5, the lifting device 6, the rotating mechanism 7 and the driving device 8 are arranged, so that the problems in the background art are effectively solved, the overall performance of the full-automatic probe test board is optimized, and the working efficiency is improved.
The driving device 8 comprises a motor 9, a first rotating shaft 10, a first bevel gear 12, a second bevel gear 13, a limiting block 14 and a sensing device 16, the motor 9 is installed between any two groups of adjacent detection devices 1, the output end of the motor 9 is fixedly connected with the first rotating shaft 10, a first sliding groove 11 is formed in the first rotating shaft 10, the first rotating shaft 10 is connected with the first bevel gear 12 and the second bevel gear 13 in a sliding mode, the limiting block 14 matched with the first sliding groove 11 is fixedly connected to the first bevel gear 12 and the second bevel gear 13, sliding grooves 15 are formed in the first bevel gear 12 and the second bevel gear 13, and the sensing device 16 is arranged between the sliding grooves 15. The motor 9 is turned on to drive the first rotating shaft 10 to rotate, and the first bevel gear 12 and the second bevel gear 13 on the first rotating shaft 10 rotate simultaneously with the first rotating shaft 10 due to the arrangement of the limiting block 14 and the first sliding groove 11, and can slide on the first rotating shaft 10.
The sensing device 16 comprises a telescopic rod 17, a sensing rod 18 and a console 19, two ends of the telescopic rod 17 are respectively rotatably connected with the sliding grooves 15 on the first bevel gear 12 and the second bevel gear 13, the telescopic rod 17 is connected with the sensing rod 18 in an installing mode, and the sensing rod 18 is connected with the console 19 fixedly connected with the four groups of detection devices 1. The telescopic rod 17 can be controlled by the arrangement of the console 19 through the induction rod 18, and as the telescopic rod 17 is rotationally connected with the sliding grooves 15 formed in the first bevel gear 12 and the second bevel gear 13, the console 19 can control the distance between the first bevel gear 12 and the second bevel gear 13 through the telescopic rod 17, and does not influence the simultaneous rotation of the first bevel gear 12 and the second bevel gear 13 and the first rotating shaft 10, and further control the connection between the first bevel gear 12 and the second bevel gear 13 and the lifting device 6 and the rotating mechanism 7.
The lifting device 6 comprises a third bevel gear 20, a protection box 21, a first threaded rod 22, a moving block 23 and a sliding plate 24, the third bevel gear 20 is meshed with the first bevel gear 12, the protection box 21 fixedly connected with the detection device 1 is arranged above the third bevel gear 20, the protection box 21 is rotatably connected with one end of the first threaded rod 22, the other end of the first threaded rod 22 is fixedly connected with the third bevel gear 20, a plurality of groups of moving blocks 23 in sliding connection with the protection box 21 are in threaded connection with the first threaded rod 22, and the sliding plate 24 in sliding connection with four groups of detection devices 1 is arranged above the protection box 21. When the first bevel gear 12 is engaged with the third bevel gear 20, the lifting device 6 operates, the third bevel gear 20 rotates, and the threaded rod is driven to rotate in the protective box 21, so that the heights of the multiple groups of moving blocks 23 can be further controlled through threaded connection between the first threaded rod 22 and the multiple groups of moving blocks 23.
Go up unloading manipulator mechanism 5 and include rolling disc 30, first motor 31, action wheel 32, gear belt 33, follow driving wheel 34, rack piece 35, manipulator 36, sucking disc 37 and connecting device 38, rolling disc 30 is provided with two sets ofly, and sets up about being, the bottom and the 29 top fixed connection of gear cover of rolling disc 30 are two sets of equal erection joint has two sets of first motors 31 in the rolling disc 30, and is two sets of the equal fixedly connected with action wheel 32 of first motor 31's output, action wheel 32 transmission is connected with gear belt 33, gear belt 33 transmission is connected with rotates the driven driving wheel 34 of being connected with rolling disc 30, and is two sets of the meshing is connected with rack piece 35 with rolling disc 30 sliding connection between the gear belt 33, fixedly connected with manipulator 36's one end on rack piece 35, manipulator 36's the other end fixedly connected with is used for carrying out absorbent sucking disc 37 to the wafer, and is two sets of being provided with connecting device 38 between the rolling disc 30. The rotating disc 30 is fixedly connected with the top of the gear sleeve 29, when the gear sleeve 29 rotates, the rotating disc 30 rotates simultaneously, the system controls two groups of first motors 31 in the rotating disc 30, the two groups of first motors 31 simultaneously drive two groups of driving wheels 32 to rotate on the rotating disc 30, the two groups of driven wheels 34 are driven to rotate on the rotating disc 30 through transmission connection of gear belts 33, when the two groups of gear belts 33 rotate, through meshing connection, the rack blocks 35 are controlled to move back and forth on the rotating disc 30, the manipulator 36 is further controlled to drive the suction cups 37 to adsorb wafers to work, and the working principle of the top rotating disc 30 is the same as that of the rotating disc 30.
The connecting device 38 comprises a connecting ring 39, a second motor 40, a first gear 41 and a second gear 42, one end of the connecting ring 39 is fixedly connected with the rotating disc 30, the other end of the connecting ring 39 is rotatably connected with the top rotating disc 30, the second motor 40 is mounted on the rotating disc 30, the output end of the second motor 40 is fixedly connected with the first gear 41, and the bottom of the top rotating disc 30 is fixedly connected with the second gear 42 engaged with the first gear 41. When two sets of the manipulators 36 are required to work simultaneously, the second motor is turned on, and the first gear 41 at the output end of the second motor is meshed with the second gear 42 to rotate, so that the top rotating disc 30 is further driven to rotate on the connecting ring 39.
The second rotating shaft 25 is made of wear-resistant material. The wear-resistant material can make the second rotating shaft 25 more durable, and the service life is prolonged.
The moving block 23 and the support table 28 are made of high-strength material. The special material of the moving block 23 and the supporting table 28 can make the whole device more durable, and avoid property loss.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. Unloading system on high efficiency, its characterized in that: the method comprises the following steps:
the device comprises four groups of detection devices (1), wherein detection tables (2) are arranged on the four groups of detection devices (1), discharge tables (3) are fixedly connected among the four groups of detection devices (1), and four groups of discharge discs (4) matched with the detection tables (2) in position are fixedly connected on the discharge tables (3);
the feeding and discharging mechanical arm mechanism (5) is used for simultaneously serving the four groups of detection equipment (1);
the lifting device (6) is used for lifting the feeding and discharging manipulator mechanism (5) and detecting the wafer in a matching manner;
the rotating mechanism (7), the said rotating mechanism (7) is used for rotating and cooperating with detecting the mechanical arm mechanism (5) of feeding and discharging;
the device comprises a driving device (8), the driving device (8) is used for driving a lifting device (6) and a rotating mechanism (7) to operate, the driving device (8) comprises a motor (9), a first rotating shaft (10), a first bevel gear (12), a second bevel gear (13), a limiting block (14) and a sensing device (16), the motor (9) is installed between any two groups of adjacent detection equipment (1), the output end of the motor (9) is fixedly connected with the first rotating shaft (10), a first sliding groove (11) is formed in the first rotating shaft (10), the first rotating shaft (10) is connected with the first bevel gear (12) and the second bevel gear (13) in a sliding manner, the first bevel gear (12) and the second bevel gear (13) are both fixedly connected with the limiting block (14) matched with the first sliding groove (11), sliding grooves (15) are both formed in the first bevel gear (12) and the second bevel gear (13), the sensing device (16) is arranged between the sliding grooves (15), the sensing device (16) comprises a telescopic rod (17), a sensing rod (18) and a control console (19), and two rotating ends of the telescopic rod (12) are respectively connected with the second bevel gear (13), the lifting device comprises a telescopic rod (17), an induction rod (18) and a control console (19), wherein the induction rod (18) is fixedly connected with four groups of detection devices (1), the lifting device (6) comprises a third bevel gear (20), a protection box (21), a first threaded rod (22), a moving block (23) and a sliding plate (24), the third bevel gear (20) is meshed with the first bevel gear (12), the protection box (21) fixedly connected with the detection devices (1) is arranged above the third bevel gear (20), the protection box (21) is rotatably connected with one end of the first threaded rod (22), the other end of the first threaded rod (22) is fixedly connected with the third bevel gear (20), a plurality of groups of moving blocks (23) slidably connected with the protection box (21) are in threaded connection with the first threaded rod (22), and the sliding plate (24) slidably connected with the four groups of detection devices (1) is arranged above the protection box (21);
rotary mechanism (7) include second pivot (25), fourth bevel gear (26), gear post (27), brace table (28) and gear sleeve (29), the one end and control cabinet (19) of second pivot (25) rotate to be connected, fixedly connected with and second bevel gear (13) meshing fourth bevel gear (26) of being connected on second pivot (25), the other end fixedly connected with gear post (27) of second pivot (25), swing joint has brace table (28) with multiunit movable block (23) fixed connection on second pivot (25), blowing platform (3) sliding connection have with gear post (27) sliding connection's gear sleeve (29), the top fixedly connected with of gear sleeve (29) goes up unloading manipulator mechanism (5).
2. The efficient loading and unloading system as recited in claim 1, wherein: last unloading manipulator mechanism (5) include rolling disc (30), first motor (31), action wheel (32), toothed belt (33), follow driving wheel (34), rack piece (35), manipulator (36), sucking disc (37) and connecting device (38), rolling disc (30) are provided with two sets ofly, and are setting from top to bottom, the bottom and the gear cover (29) top fixed connection of rolling disc (30), two sets of equal erection joint has two sets of first motor (31), two sets of in rolling disc (30) the equal fixedly connected with action wheel (32) of output of first motor (31), action wheel (32) transmission is connected with toothed belt (33), toothed belt (33) transmission is connected with rotates driven wheel (34) of being connected with rolling disc (30), and is two sets of meshing is connected with rack piece (35) of rolling disc (30) sliding connection between toothed belt (33), the one end of fixedly connected with manipulator (36) is gone up in rack piece (35), the other end fixedly connected with of manipulator (36) is used for carrying out absorbent sucking disc (37) to the wafer, and is provided with sucking disc (38) between two sets of rolling disc (30).
3. The efficient loading and unloading system as recited in claim 2, wherein: the connecting device (38) comprises a connecting ring (39), a second motor (40), a first gear (41) and a second gear (42), one end of the connecting ring (39) is fixedly connected with the bottom rotating disc (30), the other end of the connecting ring (39) is rotatably connected with the top rotating disc (30), the second motor (40) is installed on the bottom rotating disc (30), the first gear (41) is fixedly connected with the output end of the second motor (40), and the second gear (42) meshed with the first gear (41) is fixedly connected with the bottom of the top rotating disc (30).
4. The efficient loading and unloading system as recited in claim 1, wherein: the second rotating shaft (25) is made of wear-resistant materials.
5. The efficient loading and unloading system as recited in claim 1, wherein: the moving block (23) and the support platform (28) are both made of high-strength materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011459386.4A CN112722832B (en) | 2020-12-11 | 2020-12-11 | Efficient loading and unloading system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011459386.4A CN112722832B (en) | 2020-12-11 | 2020-12-11 | Efficient loading and unloading system |
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| CN112722832A CN112722832A (en) | 2021-04-30 |
| CN112722832B true CN112722832B (en) | 2023-03-28 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105436339A (en) * | 2015-12-16 | 2016-03-30 | 嵊州市银海机械有限公司 | Manipulator for stamping equipment |
| CN207103657U (en) * | 2017-08-30 | 2018-03-16 | 佛山市顺德区凯硕精密模具自动化科技有限公司 | A kind of biplate material testing agency |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102019614A (en) * | 2009-09-09 | 2011-04-20 | 致茂电子(苏州)有限公司 | Mechanical arm mechanism used for picking and choosing wafer |
| TWI435074B (en) * | 2011-06-29 | 2014-04-21 | Mpi Corp | Optical inspection device and optical inspection method |
| CN106463438B (en) * | 2014-01-28 | 2019-09-10 | 布鲁克斯自动化公司 | Substrate transport equipment |
| CN207282472U (en) * | 2017-09-13 | 2018-04-27 | 深圳市矽电半导体设备有限公司 | A kind of expansion crystalline substance ring automatic loading and unloading system of wafer detection equipment |
| CN208421164U (en) * | 2018-07-19 | 2019-01-22 | 珠海市运泰利自动化设备有限公司 | A kind of detection device of recyclable feeding |
| CN113058874A (en) * | 2021-04-09 | 2021-07-02 | 苏州普洛泰科精密工业有限公司 | Multichannel semiconductor wafer screening installation |
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2020
- 2020-12-11 CN CN202011459386.4A patent/CN112722832B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105436339A (en) * | 2015-12-16 | 2016-03-30 | 嵊州市银海机械有限公司 | Manipulator for stamping equipment |
| CN207103657U (en) * | 2017-08-30 | 2018-03-16 | 佛山市顺德区凯硕精密模具自动化科技有限公司 | A kind of biplate material testing agency |
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