CN102019614A - Mechanical arm mechanism used for picking and choosing wafer - Google Patents

Mechanical arm mechanism used for picking and choosing wafer Download PDF

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Publication number
CN102019614A
CN102019614A CN2009101901269A CN200910190126A CN102019614A CN 102019614 A CN102019614 A CN 102019614A CN 2009101901269 A CN2009101901269 A CN 2009101901269A CN 200910190126 A CN200910190126 A CN 200910190126A CN 102019614 A CN102019614 A CN 102019614A
Authority
CN
China
Prior art keywords
mechanical arm
arm
lowering
wafer
rotating shaft
Prior art date
Application number
CN2009101901269A
Other languages
Chinese (zh)
Inventor
温俊熙
Original Assignee
致茂电子(苏州)有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 致茂电子(苏州)有限公司 filed Critical 致茂电子(苏州)有限公司
Priority to CN2009101901269A priority Critical patent/CN102019614A/en
Publication of CN102019614A publication Critical patent/CN102019614A/en

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Abstract

The invention is suitable for the wafer detection technology field, and provides a mechanical arm mechanism used for picking and choosing wafer. The mechanical arm mechanism comprises a rotary apparatus, a rotary arm and two elevating gears; wherein the rotary apparatus is provided with a rotatable rotating shaft; the rotary arm which can rotate driven by the rotating shaft is arranged on the end portion of the rotating shaft and is extended towards both sides of the rotary apparatus; the two elevating gears are respectively arranged on two ends of the rotary arm, while are respectively connected with a vacuum chuck to drive the vacuum chucks to move vertically. The mechanical arm mechanism provided in the present invention can complete twice movements of the crystal grains in one actuating period, so achieves a higher efficiency than the present single mechanical arm; and greatly reduce the waiting time required for carrying. Moreover, when cooperated with a detection platform capable of rotating and displacing, the mechanical arm mechanism of the invention can simplify the motions needed by mechanical arm, reduce the motion time, and improve the detection efficiency.

Description

A kind of mechanical arm mechanism that is used for picking wafer
Technical field
The invention belongs to wafer detection technique field, relate in particular to a kind of mechanical arm mechanism that is used for picking wafer.
Background technology
Existing wafer detects needs the twice trace routine mostly, the first road trace routine earlier with the detector lens fast detecting of low range whether have more obviously, bigger flaw, by the wafer of the first road trace routine, implement the second road trace routine again and whether detect trickle flaw so that powerful detector lens is careful.When detection is carried out, wafer is positioned over earlier on the low range wafer detection platform, utilize this low range camera lens to detect at the crystal grain on the wafer one by one, after treating that crystal grain passes through the low range Shot Detection, again with a mechanical arm with vacuum cup, utilize vacuum suction to detect the crystal grain of finishing, crystal grain is transported to high magnification wafer detection platform place puts down, carry out the high magnification trace routine again.
The existing wafer mechanical arm of picking is all the single arm type mechanical arm, a kind of existing three axle robert arm for example shown in Figure 1, this mechanical arm 1 is axially arranged with displacement mechanism 2 at XYZ three on board, this mechanical arm 1 end has a vacuum cup 3 can vacuum suction target crystal grain.By this, this mechanical arm 1 utilizes this three axial displacement mechanism 2 to move to target crystal grain top, adsorb the target crystal grain with vacuum cup 3 from low range wafer detection platform 4, move to high magnification wafer detection platform 5 and put down target crystal grain, retract the carrying action that low range wafer detection platform 4 repeats crystal grain again.
Yet, the single carrying action cycle of existing machinery arm comprises X-axis, Y-axis and Z-direction and is moved to target crystal grain, vacuum cup and draws crystal grain, X-axis, Y-axis and Z-direction and be moved to another detection platform, put down and arrange crystal grain, so just can finish a crystal grain moves, transporting velocity is slower, and 3 tracks add that the required installing space of CD-ROM drive motor device is big; Moreover because of needs are precisely located, three axial displacement mechanism all need use stepper motor or servo motor, its manufacturing cost height.
Summary of the invention
The object of the present invention is to provide a kind of mechanical arm mechanism that is used for picking wafer, be intended to solve the problem that installing space is big and manufacturing cost is high that existing single arm type mechanical arm transporting velocity is slow, need.
The present invention is achieved in that a kind of mechanical arm mechanism that is used for picking wafer, and described mechanical arm mechanism comprises: a whirligig, a turning arm and two lowering or hoisting gears, wherein:
Described whirligig has a rotatable rotating shaft;
Described turning arm is arranged at described roller end, extends to described whirligig both sides, and described turning arm can be driven by described rotating shaft and rotate;
Described two lowering or hoisting gears are arranged at described turning arm two ends respectively, and described two lowering or hoisting gears link with a vacuum cup respectively, are used for driving described vacuum cup and produce the vertical lift action.
Wherein, described whirligig is a kind of motor of controlling its rotational angle.
Wherein, described turning arm is a horizontal body of rod, and its central authorities are provided with an axis hole, is used for perpendicular to described rotating shaft core direction and described rotating shaft affixed.
Wherein, this lowering or hoisting gear is a power cylinder device.
More specifically, the axle head of described lowering or hoisting gear is provided with an end seat, and the end of this end seat is used for being provided with described vacuum cup.
More specifically, described lowering or hoisting gear more includes the one stroke measurement mechanism, is used for returning the operating distance of described lowering or hoisting gear.
The present invention overcomes the deficiencies in the prior art, and the mechanical arm mechanism that provides can finish twice crystal grain and move in single actuation cycles, and efficient is higher than existing single mechanical arm, can significantly reduce the time of the required wait of carrying; Moreover the rotatable detection platform that reaches displacement of mechanical arm mechanism's collocation provided by the invention more can be simplified required action of mechanical arm and motion required time, improves detection efficiency.
Description of drawings
Fig. 1 is the three-dimensional appearance schematic diagram of existing machinery arm;
Fig. 2 is the mechanical arm mechanism three-dimensional appearance combination schematic diagram of the embodiment of the invention;
Fig. 3 is the mechanical arm mechanism three-dimensional appearance decomposing schematic representation of the embodiment of the invention;
Fig. 4 is the mechanical arm mechanism for implementing view of the embodiment of the invention;
Fig. 5 is the mechanical arm mechanism lowering or hoisting gear action schematic diagram of the embodiment of the invention.
The specific embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer,, the present invention is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
Various different objects are described in the ratio that is suitable for illustrating, size, deflection or displacement in the embodiment of the invention, but not are drawn in the ratio of actual component
As shown in Figures 2 and 3, the mechanical arm mechanism that can pick wafer fast for the embodiment of the invention comprises:
One whirligig 10, it has a rotatable rotating shaft 11, and this whirligig 10 is a kind of motor that can control its rotational angle, as stepper motor, servo motor or DC motor;
One turning arm 20, its end in this rotating shaft 11 is provided with a turning arm 20 that extends toward these whirligig 10 both sides, this turning arm 20 is a horizontal body of rod, and its central authorities are equipped with an axis hole 21 and can install for this rotating shaft 11, with affixed perpendicular to rotating shaft 11 axis directions and this rotating shaft 11;
Two lowering or hoisting gears 30, it can produce the lowering or hoisting gear 30 of vertical lift action for one of each setting in these turning arm 20 two ends, this lowering or hoisting gear 30 can be a power cylinder, for example pneumatic linear actuator or oil hydraulic cylinder etc., its cylinder body 31 is mounted on this turning arm 20, and its axle head 32 can stretch or retraction along the axis direction that is parallel to this rotating shaft 11; Wherein, this lowering or hoisting gear 30 more includes one stroke measurement mechanism 33, is used for returning the operating distance person of this lowering or hoisting gear 30;
Two end seats 40, it is axle head 32 each the end seat 40 that are provided with in each lowering or hoisting gear 30, this end seat 40 axially extends setting outward along this turning arm 20, and this end seat 40 can be mounted thereon for a vacuum cup 41; Wherein, this end seat 40 can be by adjusting its installation site, with reach change this vacuum cup 41 and rotating shaft 11 distances of shaft centers from purpose.
See also shown in Figure 4 again, it is for the mechanical arm mechanism for implementing view that can pick wafer fast of the embodiment of the invention, be provided with a low range wafer detection platform 51 and a high magnification wafer detection platform 52 in a board 50, can put fixing for wafer 60 to be detected on the detection platform, and respectively be provided with at least one detector lens 53 on corresponding each detection platform, this detector lens 53 can be done to detect one by one to the crystal grain 61 of wafer 60; Wherein, the mechanical arm mechanism of the embodiment of the invention can be arranged at 52 of this low range wafer detection platform 51 and high magnification wafer detection platform.
Wherein, this low range wafer detection platform 51 and high magnification wafer detection platform 52 can produce rotation rotation and radial translation action; Rotation by platform is rotated, and can be displaced to detector lens 53 belows one by one at the crystal grain on the same circumference 61 and detect; After 61 detections of the crystal grain on the same circumference were finished, the radial translation action of this platform was replaceable to different circumferential positions, so that the crystal grain on another circumference 61 is detected; So, this detector lens 53 can detect each crystal grain 61 on the wafer 60 one by one.
The mechanical arm mechanism of the embodiment of the invention can be arranged at 52 of this low range wafer detection platform 51 and high magnification wafer detection platform, the corresponding respectively top of being located at crystal grain detection completing place 54 and crystal grain position 55 to be detected of the vacuum cup 41 at its turning arm 20 two ends, when target crystal grain after finishing detection on the low range wafer detection platform 51, this low range wafer detection platform 51 is rotated so that target crystal grain enters crystal grain and is detected completing place 54, and makes next crystal grain enter the detection range of detector lens 53.As shown in Figure 5, at this moment, this lowering or hoisting gear 30 can drive this end seat 40 and descend with vacuum cup 41, and after fixing target crystal grain with vacuum suction, this lowering or hoisting gear 30 drives vacuum cup 41 once more and rises with target crystal grain.Utilizing this whirligig 10 to drive makes this turning arm 20 turn to 55 tops, crystal grain position to be detected of high magnification wafer detection platform 52, next crystal grain on the low range wafer detection platform 51 has also been finished detection at this moment, and rotate with platform and to enter this crystal grain and detect completing place 54, each lowering or hoisting gear 30 drives two vacuum cups 41 respectively and descends, and respectively target crystal grain is lowered into crystal grain position 55 to be detected, and detect completing place 54 absorption from crystal grain and fix next crystal grain, repeat above-mentioned lifting, rotation and absorption such as put down at action, can be carried to high magnification wafer detection platform 52 fast and detect again finishing the crystal grain of detection on this low range wafer detection platform 51.
The mechanical arm mechanism of the embodiment of the invention can finish moving of twice crystal grain 61 in single actuation cycles, efficient is higher than traditional single mechanical arm, can significantly reduce the time of the required wait of carrying; Moreover the rotatable detection platform that reaches displacement of collocation more can be simplified required action of mechanical arm and motion required time.
Moreover, because wafer 60 and crystal grain 61 itself is quite fragile, impaired breaking the easily when application of force is excessive, therefore in general, the absorption affinity of vacuum cup 41 only has the strength of 2~3 grams; And the lowering or hoisting gear 30 of the embodiment of the invention more includes one stroke measurement mechanism 33, to return the operating distance of this lowering or hoisting gear 30, correct adjustable height that can accurate control single vacuum sucker 41 avoids the mechanical arm action excessive, causes wafer 60 and crystal grain 61 impaired.
Because the height of each detection platform is subjected to the influence of installation site and wafer carrying instrument, the situation that vertical parallax might occur takes place, stroke measuring device 33 in the embodiment of the invention can measure the detection platform vertical parallax in advance before operation, to proofread and correct in the input control computer, when this two vacuum cup 41 is driven by lowering or hoisting gear 30, setting by stroke measuring device 33 can be calculated the platform vertical parallax into the stroke compensation rate, avoids the problem of detection platform vertical parallax really.
In addition, modularized design is adopted by the mechanical arm mechanism of the embodiment of the invention, machine at different size, this whirligig 10, turning arm 20, lowering or hoisting gear 30 and vacuum cup 41 can be shared same part, only need to change the end seat 40 of different size, promptly can adjust the distance in this vacuum cup 41 and rotating shaft 11 axle center.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of being done within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.

Claims (6)

1. a mechanical arm mechanism that is used for picking wafer is characterized in that, described mechanical arm mechanism comprises: a whirligig, a turning arm and two lowering or hoisting gears, wherein:
Described whirligig has a rotatable rotating shaft;
Described turning arm is arranged at described roller end, extends to described whirligig both sides, and described turning arm can be driven by described rotating shaft and rotate;
Described two lowering or hoisting gears are arranged at described turning arm two ends respectively, and described two lowering or hoisting gears link with a vacuum cup respectively, are used for driving described vacuum cup and produce the vertical lift action.
2. mechanical arm according to claim 1 mechanism is characterized in that described whirligig is a kind of motor of controlling its rotational angle.
3. mechanical arm according to claim 1 mechanism is characterized in that described turning arm is a horizontal body of rod, and its central authorities are provided with an axis hole, are used for perpendicular to described rotating shaft core direction and described rotating shaft affixed.
4. mechanical arm according to claim 1 mechanism is characterized in that this lowering or hoisting gear is a power cylinder device.
5. mechanical arm according to claim 4 mechanism is characterized in that the axle head of described lowering or hoisting gear is provided with an end seat, and the end of this end seat is used for being provided with described vacuum cup.
6. mechanical arm according to claim 4 mechanism is characterized in that described lowering or hoisting gear more includes the one stroke measurement mechanism, is used for returning the operating distance of described lowering or hoisting gear.
CN2009101901269A 2009-09-09 2009-09-09 Mechanical arm mechanism used for picking and choosing wafer CN102019614A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2009101901269A CN102019614A (en) 2009-09-09 2009-09-09 Mechanical arm mechanism used for picking and choosing wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2009101901269A CN102019614A (en) 2009-09-09 2009-09-09 Mechanical arm mechanism used for picking and choosing wafer

Publications (1)

Publication Number Publication Date
CN102019614A true CN102019614A (en) 2011-04-20

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CN2009101901269A CN102019614A (en) 2009-09-09 2009-09-09 Mechanical arm mechanism used for picking and choosing wafer

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105621089A (en) * 2014-11-28 2016-06-01 致茂电子(苏州)有限公司 Object fetching device
CN106006021A (en) * 2016-07-28 2016-10-12 苏州高通机械科技有限公司 Automatic material taking and feeding device
TWI555619B (en) * 2014-11-07 2016-11-01 致茂電子股份有限公司 Device for catching objects
TWI568556B (en) * 2015-07-09 2017-02-01 致茂電子股份有限公司 Device for catching electronic objects
CN108115442A (en) * 2018-01-23 2018-06-05 太仓市万丰塑料制品有限公司 A kind of multi-station milling machine fixture
CN108296822A (en) * 2018-01-23 2018-07-20 太仓市万丰塑料制品有限公司 A kind of automatic regulation type fraise jig
CN108326586A (en) * 2018-01-23 2018-07-27 太仓市万丰塑料制品有限公司 A kind of automatic adjustment of fraise jig and handling method
CN108858251A (en) * 2018-08-30 2018-11-23 东北大学 A kind of collision avoidance system of high-speed motion manipulator
CN110091172A (en) * 2019-05-24 2019-08-06 惠州金源精密自动化设备有限公司 Assembling mechanism and heat seal riveter

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI555619B (en) * 2014-11-07 2016-11-01 致茂電子股份有限公司 Device for catching objects
CN105621089A (en) * 2014-11-28 2016-06-01 致茂电子(苏州)有限公司 Object fetching device
CN105621089B (en) * 2014-11-28 2017-11-24 致茂电子(苏州)有限公司 Load-engaging device
TWI568556B (en) * 2015-07-09 2017-02-01 致茂電子股份有限公司 Device for catching electronic objects
CN106006021A (en) * 2016-07-28 2016-10-12 苏州高通机械科技有限公司 Automatic material taking and feeding device
CN108115442A (en) * 2018-01-23 2018-06-05 太仓市万丰塑料制品有限公司 A kind of multi-station milling machine fixture
CN108296822A (en) * 2018-01-23 2018-07-20 太仓市万丰塑料制品有限公司 A kind of automatic regulation type fraise jig
CN108326586A (en) * 2018-01-23 2018-07-27 太仓市万丰塑料制品有限公司 A kind of automatic adjustment of fraise jig and handling method
CN108858251A (en) * 2018-08-30 2018-11-23 东北大学 A kind of collision avoidance system of high-speed motion manipulator
CN108858251B (en) * 2018-08-30 2020-11-24 东北大学 Anti-collision system of high-speed moving manipulator
CN110091172A (en) * 2019-05-24 2019-08-06 惠州金源精密自动化设备有限公司 Assembling mechanism and heat seal riveter

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Application publication date: 20110420

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