CN112223107A - Chemical mechanical polishing device and chemical mechanical polishing method - Google Patents
Chemical mechanical polishing device and chemical mechanical polishing method Download PDFInfo
- Publication number
- CN112223107A CN112223107A CN202011097406.8A CN202011097406A CN112223107A CN 112223107 A CN112223107 A CN 112223107A CN 202011097406 A CN202011097406 A CN 202011097406A CN 112223107 A CN112223107 A CN 112223107A
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- Prior art keywords
- fixedly connected
- box
- box body
- soaking
- lead screw
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/14—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by liquid or gas pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/22—Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
Abstract
The invention relates to the technical field of chemical mechanical grinding, and discloses a chemical mechanical grinding device which comprises a box body, wherein a conveying device is arranged on the right side of the bottom of the inner wall of the box body, the conveying device is composed of a conveying belt and a support, a clamping device is arranged above the interior of the box body, the clamping device is composed of a first sliding block, a clamping jaw and a first lead screw, a soaking mechanism is arranged in the middle of the box body, the soaking mechanism is composed of a base and a soaking box, a tool clamp is arranged in the soaking box, a transmission mechanism is arranged at the top of the box body, a grinding mechanism is arranged above the soaking box, and chemical grinding liquid medicine is filled in a water tank fixedly connected to the. According to the invention, materials to be ground are placed on the conveying device, then the conveying device rotates forwards to move the materials to the left side of the conveying device, then the clamping jaws on the clamping device work to clamp the materials, and the hydraulic push rod II works to move the clamping jaws upwards to enable the materials to ascend.
Description
Technical Field
The invention relates to the technical field of chemical mechanical polishing, in particular to a chemical mechanical polishing device and a chemical mechanical polishing method.
Background
In chemical mechanical polishing (cmp), wafer fabrication, with the upgrading of process technology and the shrinking of wire and gate dimensions, the requirement of Lithography (lithograph) technology on the flatness (Non-uniformity) of the wafer surface is higher and higher, and IBM corporation developed the introduction of CMOS products in 1985 and successfully applied to the 64MB DRAM production in 1990. Since 1995, CMP technology has rapidly developed and has been used in the semiconductor industry in large numbers. Chemical mechanical polishing (cmp) is also called chemical mechanical polishing (cmp), and the principle of cmp is a processing technology combining chemical corrosion and mechanical removal, and the only technology in mechanical processing can achieve global surface planarization.
The prior art has the problems of incomplete function and inconvenient use, and the ground materials cannot be automatically conveyed out of the equipment.
Disclosure of Invention
The present invention provides a chemical mechanical polishing apparatus and a chemical mechanical polishing method, which can solve the above problems.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a chemical machinery grinder, includes the box, conveyer is installed on the right side of box inner wall bottom, conveyer comprises conveyer belt and support, the device is got to the inside top of box is installed to press from both sides, press from both sides to get the device and comprise slider one, clamping jaw and lead screw one, the mid-mounting of box has soaking mechanism, soaking mechanism has base and steeping tank to constitute, soaking box's internally mounted has frock clamp, drive mechanism is installed at the top of box, soaking box's top is equipped with grinds the mechanism, chemical grinding liquid medicine is equipped with in soaking box's the left side fixedly connected with water tank, the water tank passes through the pipeline and is connected with the steeping tank.
Preferably, the box door is installed at the right end of the box body, the box door is installed in an opposite mode, one end of the box door is hinged to the right side of the box body through a hinge column, and the conveying device can move horizontally to the outside of the box body, so that materials can be placed conveniently.
Preferably, support fixed connection is in the bottom of conveyer belt, the shape of support is right trapezoid, the bottom fixedly connected with slide of support, the lower surface of slide and the inner wall bottom sliding connection of box, the left side fixedly connected with hydraulic pressure push rod one of slide, hydraulic pressure push rod one passes through lug fixed connection in the inner wall bottom of box.
Preferably, the clamping jaw is installed in the bottom of the first sliding block, a limiting block at the top of the first sliding block is connected with a limiting groove at the top of the inner wall of the box in a sliding mode, a hydraulic push rod II is fixedly connected between the top of the clamping jaw and a groove at the bottom of the first sliding block, two ends of the first lead screw are fixedly connected with bearings I at two ends of the inner wall of the box, two ends of the first lead screw are in transmission connection with the bearings, and one side of the first sliding block is connected with the first lead screw through a lead screw nut.
Preferably, step motor one is installed to the right-hand member of lead screw one, step motor one passes through the inner wall side fixed connection of connecting plate and box, the right-hand member of lead screw one and the equal fixedly connected with belt pulley one in left end of step motor one, two pass through belt drive connection between the belt pulley one.
Preferably, steeping box fixed connection is at the top of base, install two movable rods between the bottom of base and the steeping box, two the middle part of movable rod is articulated mutually, two it has hydraulic push rod three, two to articulate between the movable rod the upper and lower both ends of movable rod have all opened the slide opening, two in the bottom of steeping box and the inner wall bottom of base the both ends fixedly connected with traveller of movable rod, traveller and slide opening sliding connection, frock clamp's bottom fixedly connected with hydraulic push rod two, hydraulic push rod two's bottom fixedly connected with bottom plate, bottom plate fixed connection is in the inner wall bottom of steeping box.
Preferably, drive mechanism includes step motor two, two fixed connection of step motor are in the inner wall bottom of box, lead screw two is installed at the top of box, the both ends of lead screw two are at the top fixedly connected with bearing two of box, the both ends of lead screw two are rotated with bearing two and are connected, the left end of lead screw two and the equal fixedly connected with belt pulley two of the left end of step motor two, two the belt pulley two passes through two transmission connections of belt.
Preferably, the grinding mechanism comprises a second sliding block, the second sliding block is positioned at the top of the box body and is connected with the second lead screw through a lead screw nut, the bottom of the second sliding block penetrates into the box body and is fixedly connected with a fixed block, two ends of the lower surface of the second sliding block are fixedly connected with rollers, the roller is connected with a rolling groove at the top of the box body, a movable plate is arranged below the fixed block, the bottom of the fixed block is fixedly connected with a limiting rod, four corners of the movable plate are connected with the limiting rods in a sliding manner, a hydraulic push rod IV is fixedly connected between the movable plate and the fixed block, a third stepping motor is fixedly connected in the groove at the bottom of the fixed block, the bottom of the third stepping motor is fixedly connected with a rotating shaft, the bottom of pivot is connected with the bearing three rotations in fly leaf middle part, the below of fly leaf is equipped with the grinding miller, the bottom of pivot and the top fixed connection of grinding miller.
A chemical mechanical polishing method comprises the following steps:
s1, placing the material to be ground on the conveying device, enabling the conveying device to rotate forward to move the material to the left side of the conveying device, enabling the clamping jaws on the clamping device to work to clamp the material, enabling the hydraulic push rod II to work to move the clamping jaws upwards to enable the material to ascend;
s2, when the material is clamped by the clamping device and ascends, the first stepping motor rotates to drive the first lead screw to rotate, then the clamping device moves leftwards under the action of the lead screw nut and then moves to the upper part of the tool clamp, and the tool clamp firmly clamps the material to perform the next procedure;
s3, the three hydraulic push rods stretch out and draw back to enable the movable rods to move inwards, the two movable rods move to enable the soaking box to ascend, and the two hydraulic push rods in the soaking box control the height of the tool clamp, so that materials can conveniently obtain proper working height;
s4, the second stepping motor drives the second screw rod to rotate, so that the grinding mechanism can horizontally move left and right, the third stepping motor on the grinding mechanism drives the grinding wheel to rotate, and the fourth hydraulic push rod drives the movable plate to descend or ascend, so that the grinding wheel can be extruded with materials, and the grinding effect is achieved.
The invention provides a chemical mechanical polishing device and a chemical mechanical polishing method. The method has the following beneficial effects:
1. according to the invention, materials to be ground are placed on the conveying device, then the conveying device rotates forwards to move the materials to the left side of the conveying device, then the clamping jaws on the clamping device work to clamp the materials, and the hydraulic push rod II works to move the clamping jaws upwards to enable the materials to ascend.
2. According to the invention, the first stepping motor rotates to drive the first screw rod to rotate, then the clamping device moves leftwards under the action of the screw rod nut and then moves to the upper part of the tool clamp, and the tool clamp firmly clamps materials, so that the next process is conveniently carried out.
3. According to the invention, the movable rods move inwards through the expansion of the hydraulic push rod III, the two movable rods move to lift the soaking box, and the hydraulic push rod II in the soaking box controls the height of the tool clamp, so that materials can conveniently obtain a proper working height.
4. The second screw rod is driven to rotate by the second stepping motor, so that the grinding mechanism can horizontally move left and right, the third stepping motor on the grinding mechanism drives the grinding wheel to rotate, the fourth hydraulic push rod drives the movable plate to descend or ascend, the grinding wheel can be extruded with materials, the grinding effect is achieved, and the chemical grinding agent in the soaking box can be finally ground by chemical machinery.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a top view of the present invention;
FIG. 3 is a block diagram of the grinding mechanism of the present invention;
FIG. 4 is a right side view of the present invention;
FIG. 5 is a view showing the construction of the gripping apparatus of the present invention;
FIG. 6 is a block diagram of the transmission of the present invention;
FIG. 7 is a structural view of the steeping mechanism of the present invention.
In the figure: 1 box body, 2 box doors, 3 conveying devices, 301 conveying belts, 302 supports, 303 sliding plates, 304 hydraulic push rod I, 4 clamping devices, 401 sliding block I, 402 clamping jaws, 403 hydraulic push rod I, 404 lead screw I, 405 bearing I, 406 stepping motor I, 407 belt pulley I, 408 belt I, 5 soaking mechanisms, 501 bases, 502 soaking boxes, 503 movable rods, 504 sliding columns, 505 sliding holes, 506 hydraulic push rod III, 507 tooling clamps, 508 bottom plates, 509 hydraulic push rod II, 6 transmission mechanisms, 601 stepping motor II, 602 lead screw II, 603 bearing II, 604 belt pulley II, 605 belt II, 7 grinding mechanisms, 701 sliding block II, 702 lead screw II, 703 rollers, 704 movable plates, 705 limiting rods, 706 hydraulic push rod IV, 707 grinding wheels, 708 stepping motor III, 709 rotating shafts, 710 bearing III and 8 water tanks.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the invention.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
As shown in fig. 1 to 7, the present invention provides a technical solution: the utility model provides a chemical mechanical grinding device, the power distribution box comprises a box body 1, conveyer 3 is installed on the right side of 1 inner wall bottom of box, conveyer 3 comprises conveyer belt 301 and support 302, the device 4 is got to the top of 1 inside of box is installed and is got, it is by slider 401 to get the device 4 to get, clamping jaw 402 and lead screw 404 are constituteed, the mid-mounting of box 1 has soaking mechanism 5, soaking mechanism 5 has base 501 and soaking box 502 to constitute, the internally mounted of soaking box 502 has frock clamp 507, drive mechanism 6 is installed at the top of box 1, the top of soaking box 502 is equipped with grinding mechanism 7, chemical grinding liquid medicine is equipped with in the left side fixedly connected with water tank 8 of soaking box 502, water tank 8 passes through the pipeline and is connected with soaking box.
Chamber door 2 is installed to the right-hand member of box 1, and the installation of 2 oppositions of chamber door, and the right side of chamber door 2 through hinge post and box 1 is articulated, makes conveyer 3 can translate to the outside of box 1 to conveniently place the material.
The clamping jaw 402 is installed at the bottom of the first sliding block 401, a limiting block at the top of the first sliding block 401 is in sliding connection with a limiting groove at the top of the inner wall of the box body 1, a second hydraulic push rod 403 is fixedly connected between the top of the clamping jaw 402 and a groove at the bottom of the first sliding block 401, two ends of the first lead screw 404 are fixedly connected with first bearings 405 at two ends of the inner wall of the box body 1, two ends of the first lead screw 404 are in transmission connection with the first bearings 405, and one side of the first sliding block 401 is connected with the first.
The right end of the first screw rod 404 is provided with a first stepping motor 406, the first stepping motor 406 is fixedly connected with the side face of the inner wall of the box body 1 through a connecting plate, the right end of the first screw rod 404 and the left end of the first stepping motor 406 are fixedly connected with a first belt pulley 407, and the two first belt pulleys 407 are in transmission connection through a first belt 408.
Soaking case 502 fixed connection is at the top of base 501, install two movable rods 503 between the bottom of base 501 and the soaking case 502, the middle part of two movable rods 503 is articulated each other, it has hydraulic push rod three 506 to articulate between two movable rods 503, the upper and lower both ends of two movable rods 503 have all opened slide opening 505 in the bottom of soaking case 502 and the inner wall bottom of base 501, the both ends fixedly connected with traveller 504 of two movable rods 503, traveller 504 and slide opening 505 sliding connection, the bottom fixedly connected with hydraulic push rod two 509 of frock clamp 507, the bottom fixedly connected with bottom plate 508 of hydraulic push rod two 509, bottom plate 508 fixed connection is in the inner wall bottom of soaking case 502.
The transmission mechanism 6 comprises a second stepping motor 601, the second stepping motor 601 is fixedly connected to the bottom of the inner wall of the box body 1, a second lead screw 602 is installed at the top of the box body 1, two ends of the second lead screw 602 are fixedly connected with a second bearing 603 at the top of the box body 1, two ends of the second lead screw 602 are rotatably connected with the second bearing 603, the left end of the second lead screw 602 and the left end of the second stepping motor 601 are fixedly connected with a second belt pulley 604, and the two second belt pulleys 604 are in transmission connection through a second belt 605.
The grinding mechanism 7 comprises a second sliding block 701, the second sliding block 701 is located at the top of the box body 1 and is connected with a second lead screw 602 through a lead screw nut, the bottom of the second sliding block 701 penetrates through the inside of the box body 1 and is fixedly connected with a fixed block 702, two ends of the lower surface of the second sliding block 701 are fixedly connected with rollers 703, the rollers 703 are connected with a rolling groove at the top of the box body 1, a movable plate 704 is arranged below the fixed block 702, a limiting rod 705 is fixedly connected at the bottom of the fixed block 702, four corners of the movable plate 704 are slidably connected with the limiting rod 705, a hydraulic push rod four 706 is fixedly connected between the movable plate 704 and the fixed block 702, a third stepping motor 708 is fixedly connected in a bottom groove of the fixed block 702, a rotating shaft 709 is fixedly connected at the bottom of the third stepping motor 708, the bottom of the rotating shaft 709 is rotatably connected with.
A chemical mechanical polishing method comprises the following steps:
s1, placing the material to be ground on the conveying device 3, enabling the conveying device to rotate forward to move the material to the left side of the conveying device 3, enabling the clamping jaws 402 on the clamping device 4 to work to clamp the material, enabling the hydraulic push rods 403 to work to move the clamping jaws 402 upwards, and enabling the material to ascend;
s2, when the material is clamped by the clamping device 4 and ascends, the first stepping motor 506 rotates to drive the first screw rod 404 to rotate, then the clamping device 4 moves leftwards under the action of the screw rod nut and then moves to the upper part of the tool clamp 507, and the tool clamp 507 clamps the material firmly to perform the next process;
s3, the hydraulic push rod III 506 stretches to enable the movable rods 503 to move inwards, the two movable rods 503 move to enable the soaking box 502 to ascend, and the hydraulic push rod II 509 in the soaking box 502 controls the height of the tool clamp 507, so that materials can conveniently obtain proper working height;
s4, the second stepping motor 601 drives the second lead screw 602 to rotate, so that the grinding mechanism 7 can translate left and right, the third stepping motor 708 on the grinding mechanism 7 drives the grinding wheel 707 to rotate, and the fourth hydraulic push rod 706 drives the movable plate 704 to descend or ascend, so that the grinding wheel 707 can extrude with the material to achieve the grinding effect.
When the grinding device is used, materials to be ground are placed on the conveying device 3, the conveying device rotates forwards to move the materials to the left side of the conveying device 3, the clamping jaws 402 on the clamping devices 4 work to clamp the materials, the hydraulic push rods 403 work to move the clamping jaws 402 upwards, the stepping motors 506 rotate to drive the screw rods 404 to rotate, the clamping devices 4 move leftwards under the action of the screw nuts and then move to the positions above the tool clamps 507, the tool clamps 507 clamp the materials firmly, the hydraulic push rods three 506 stretch to move the movable rods 503 inwards, the two movable rods 503 move to lift the soaking box 502, the hydraulic push rods two 509 inside the soaking box 502 control the height of the tool clamps 507, and therefore the materials can conveniently obtain proper working height, the stepping motors two 601 drive the screw rods two 602 to rotate to enable the grinding mechanism 7 to move leftwards and rightwards, and a third stepping motor 708 on the grinding mechanism 7 drives a grinding wheel 707 to rotate, a fourth hydraulic push rod 706 drives a movable plate 704 to descend or ascend, so that the grinding wheel 707 can be extruded with materials to achieve the grinding effect, and the chemical grinding agent in the soaking box 502 can finally achieve the chemical mechanical grinding effect.
In conclusion, the material to be ground is placed on the conveying device 3, then the conveying device rotates forwards to move the material to the left side of the conveying device 3, then the clamping jaws 402 on the clamping device 4 work to clamp the material, the hydraulic push rods 403 work to move the clamping jaws 402 upwards to lift the material, the stepping motor I506 rotates to drive the screw rod I404 to rotate, then the clamping device 4 moves leftwards under the action of the screw rod nut and then moves to the upper side of the tool clamp 507, the tool clamp 507 clamps the material firmly, the next process is facilitated, the movable rods 503 move inwards through the extension and retraction of the hydraulic push rods III 506, the two movable rods 503 move to lift the soaking box 502, and the hydraulic push rods II 509 in the soaking box 502 control the height of the tool clamp 507, so that the material can obtain a proper working height, the second screw 602 is driven to rotate by the second stepper motor 601, so that the grinding mechanism 7 can horizontally move left and right, the third stepper motor 708 on the grinding mechanism 7 drives the grinding wheel 707 to rotate, and the fourth hydraulic push rod 706 drives the movable plate 704 to descend or ascend, so that the grinding wheel 707 can be extruded with materials to achieve the grinding effect, and the chemical grinding agent of the device of the soaking box 502 can finally achieve the chemical mechanical grinding effect.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a chemical mechanical polishing device, includes box (1), its characterized in that: the right side of the bottom of the inner wall of the box body (1) is provided with a conveying device (3), the conveying device (3) consists of a conveying belt (301) and a bracket (302), a clamping device (4) is arranged above the inner part of the box body (1), the clamping device (4) consists of a first sliding block (401), a clamping jaw (402) and a first screw rod (404), the middle part of the box body (1) is provided with a soaking mechanism (5), the soaking mechanism (5) is composed of a base (501) and a soaking box (502), a tool clamp (507) is arranged inside the soaking box (502), a transmission mechanism (6) is arranged at the top of the box body (1), the chemical grinding device is characterized in that a grinding mechanism (7) is arranged above the soaking box (502), a chemical grinding liquid medicine is filled in a water tank (8) fixedly connected to the left side of the soaking box (502), and the water tank (8) is connected with the soaking box (502) through a pipeline.
2. A chemical mechanical polishing apparatus as recited in claim 1, wherein: the refrigerator door is characterized in that a refrigerator door (2) is installed at the right end of the refrigerator body (1), the refrigerator door (2) is installed in an opposite mode, and one end of the refrigerator door (2) is hinged to the right side of the refrigerator body (1) through a hinge column.
3. A chemical mechanical polishing apparatus as recited in claim 1, wherein: support (302) fixed connection is in the bottom of conveyer belt (301), the shape of support (302) is right trapezoid, the bottom fixedly connected with slide (303) of support (302), the lower surface of slide (303) and the inner wall bottom sliding connection of box (1), the left side fixedly connected with hydraulic push rod (304) of slide (303), hydraulic push rod (304) are through lug fixed connection in the inner wall bottom of box (1).
4. A chemical mechanical polishing apparatus as recited in claim 1, wherein: the clamping jaw (402) is installed in the bottom of a first sliding block (401), a limiting block at the top of the first sliding block (401) is connected with a limiting groove at the top of the inner wall of the box body (1) in a sliding mode, a second hydraulic push rod (403) is fixedly connected between the top of the clamping jaw (402) and a groove at the bottom of the first sliding block (401), two ends of a first lead screw (404) are fixedly connected with a first bearing (405) at two ends of the inner wall of the box body (1), two ends of the first lead screw (404) are in transmission connection with the first bearing (405), and one side of the first sliding block (401) is connected with the first lead screw (404) through a.
5. A chemical mechanical polishing apparatus as set forth in claim 4, wherein: the right end of the first lead screw (404) is provided with a first stepping motor (406), the first stepping motor (406) is fixedly connected with the side face of the inner wall of the box body (1) through a connecting plate, the right end of the first lead screw (404) and the left end of the first stepping motor (406) are fixedly connected with a first belt pulley (407), and the first belt pulley (407) is in transmission connection with the second belt pulley (408).
6. A chemical mechanical polishing apparatus as recited in claim 1, wherein: the soaking tank (502) is fixedly connected to the top of the base (501), two movable rods (503) are installed between the bottom of the base (501) and the soaking tank (502), the middle parts of the two movable rods (503) are hinged with each other, a hydraulic push rod III (506) is hinged between the two movable rods (503), the upper end and the lower end of each movable rod (503) are provided with a sliding hole (505) at the bottom of the soaking tank (502) and the bottom of the inner wall of the base (501), two ends of each movable rod (503) are fixedly connected with a sliding column (504), the sliding column (504) is connected with a sliding hole (505) in a sliding manner, the bottom of the tool clamp (507) is fixedly connected with a second hydraulic push rod (509), the bottom of the second hydraulic push rod (509) is fixedly connected with a bottom plate (508), and the bottom plate (508) is fixedly connected to the bottom of the inner wall of the soaking box (502).
7. A chemical mechanical polishing apparatus as recited in claim 1, wherein: the transmission mechanism (6) comprises a second stepping motor (601), the second stepping motor (601) is fixedly connected to the bottom of the inner wall of the box body (1), a second lead screw (602) is installed at the top of the box body (1), two ends of the second lead screw (602) are fixedly connected with a second bearing (603) at the top of the box body (1), two ends of the second lead screw (602) are rotatably connected with the second bearing (603), the left end of the second lead screw (602) and the left end of the second stepping motor (601) are fixedly connected with a second belt pulley (604), and the second belt pulley (604) is in transmission connection through the second belt (605).
8. The chemical mechanical polishing apparatus as recited in claim 7, wherein: the grinding mechanism (7) comprises a second sliding block (701), the second sliding block (701) is located at the top of the box body (1) and is connected with a second lead screw (602) through a lead screw nut, the bottom of the second sliding block (701) penetrates into the box body (1) and is fixedly connected with a fixed block (702), two ends of the lower surface of the second sliding block (701) are fixedly connected with rollers (703), the rollers (703) are connected with a rolling groove at the top of the box body (1), a movable plate (704) is arranged below the fixed block (702), a limiting rod (705) is fixedly connected with the bottom of the fixed block (702), four corners of the movable plate (704) are slidably connected with the limiting rod (705), a fourth hydraulic push rod (706) is fixedly connected between the movable plate (704) and the fixed block (702), and a third stepping motor (708) is fixedly connected in a groove at the bottom of, the bottom of the third stepping motor (708) is fixedly connected with a rotating shaft (709), the bottom of the rotating shaft (709) is rotatably connected with a third bearing (710) in the middle of the movable plate (704), a grinding wheel (707) is arranged below the movable plate (704), and the bottom of the rotating shaft (709) is fixedly connected with the top of the grinding wheel (707).
9. A chemical mechanical polishing method is characterized by comprising the following steps:
s1, placing the materials to be ground on the conveying device (3), enabling the conveying device to rotate forward to move the materials to the left side of the conveying device (3), enabling the clamping jaws (402) on the clamping device (4) to work to clamp the materials, enabling the hydraulic push rod II (403) to work to move the clamping jaws (402) upwards, and enabling the materials to ascend;
s2, when the material is clamped by the clamping device (4) and ascends, the stepping motor I (506) rotates to drive the screw rod I (404) to rotate, then the clamping device (4) moves leftwards under the action of the screw rod nut and then moves to the upper part of the tool clamp (507), and the tool clamp (507) clamps the material firmly to perform the next procedure;
s3, the hydraulic push rod III (506) stretches to enable the movable rods (503) to move inwards, the two movable rods (503) move to enable the soaking box (502) to ascend, and the hydraulic push rod II (509) in the soaking box (502) controls the height of the tool clamp (507), so that materials can conveniently obtain proper working height;
s4, the second stepping motor (601) drives the second lead screw (602) to rotate, so that the grinding mechanism (7) can translate left and right, the third stepping motor (708) on the grinding mechanism (7) drives the grinding wheel (707) to rotate, and the fourth hydraulic push rod (706) drives the movable plate (704) to descend or ascend, so that the grinding wheel (707) can be extruded with materials, and the grinding effect is achieved.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011097406.8A CN112223107A (en) | 2020-10-14 | 2020-10-14 | Chemical mechanical polishing device and chemical mechanical polishing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011097406.8A CN112223107A (en) | 2020-10-14 | 2020-10-14 | Chemical mechanical polishing device and chemical mechanical polishing method |
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| CN112223107A true CN112223107A (en) | 2021-01-15 |
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Cited By (1)
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| CN112917350A (en) * | 2021-02-02 | 2021-06-08 | 黄河水利职业技术学院 | Device and method for removing mechanically resistant coatings |
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Application publication date: 20210115 |