CN216213332U

CN216213332U - Silicon wafer multi-section guide mechanism for wafer inserting machine

Info

Publication number: CN216213332U
Application number: CN202122697805.4U
Authority: CN
Inventors: 陈川南; 周裕吉
Original assignee: Wuxi Jingyuntong Technology Co Ltd
Current assignee: Wuxi Jingyuntong Technology Co Ltd
Priority date: 2021-11-05
Filing date: 2021-11-05
Publication date: 2022-04-05
Anticipated expiration: 2031-11-05

Abstract

The utility model discloses a silicon wafer multi-section guide mechanism for a wafer inserting machine, which comprises two groups of support rods, support blocks, rotating shafts, first belt wheels, a conveyor belt and first driving motors, wherein the two groups of support rods are arranged, more than two support blocks are uniformly and fixedly arranged at the top ends of the two groups of support rods, the rotating shafts are rotatably arranged in the support blocks, the first belt wheels are fixedly arranged on the annular side surfaces of the rotating shafts, the adjacent first belt wheels are connected through the conveyor belt, the first driving motor is fixedly arranged on one support block, and one end of each driving motor is fixedly connected with one rotating shaft. The gear drives the gear II to rotate so as to drive the screw rod to rotate, so that the pressure rod I and the pressure rod II move so as to pull the belt wheel and the guide belt downwards to move, meanwhile, the driving motor II can conveniently work through the hexagonal blocks and the hexagonal grooves to drive the round rod I to rotate, and the horizontal movement resetting of the sliding block I and the screw rod can be conveniently realized through the design of the spring.

Description

Silicon wafer multi-section guide mechanism for wafer inserting machine

Technical Field

The utility model relates to the technical field of wafer inserting machines, in particular to a multi-section silicon wafer guide mechanism for a wafer inserting machine.

Background

The silicon wafer inserting machine has the advantages that automatic material distribution, automatic feeding, automatic basket entering, automatic basket changing, full material alarming and other actions are realized in the using process of the silicon wafer inserting machine, after the silicon wafer inserting machine is used, the basic manual operation of silicon wafer inserting pieces can be realized, the manual operation is not needed in the wafer-by-wafer operation except for the material loading and unloading, the guiding plate and the guiding belt are needed to be used for guiding in the conveying process of the silicon wafers, and the position deviation of the silicon wafers is avoided.

The silicon wafer multi-section guide mechanism of the currently used wafer inserting machine has certain defects, the function of conveniently adjusting the vertical position of a guide belt is lacked, and when silicon wafers with different thicknesses are placed on a conveying belt, the guide belt cannot be attached to the silicon wafers and cannot guide the silicon wafers in time, so that the silicon wafer multi-section guide mechanism for the wafer inserting machine is very necessary.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the defects in the prior art, and provides a silicon wafer multi-section guide mechanism for a wafer inserting machine.

In order to achieve the purpose, the utility model adopts the following technical scheme:

a silicon wafer multi-section guide mechanism for a wafer inserting machine comprises support rods, support blocks, rotating shafts, a first belt wheel, a conveying belt, guide plates and a first driving motor, wherein the support rods are provided with two groups, more than two support blocks are uniformly and fixedly arranged at the top ends of the two groups of support rods, the rotating shafts are rotatably arranged in the support blocks, the first belt wheel is fixedly arranged on the annular side surface of each rotating shaft, the adjacent first belt wheels are connected through the conveying belt, the first driving motor is fixedly arranged on one support block, one end of each driving motor is fixedly connected with one rotating shaft, the guide plates are fixedly arranged at the top ends of the two support rods, an L-shaped frame is fixedly arranged on the two support rods, a second driving motor is fixedly arranged at the top end of the L-shaped frame, a first round rod is rotatably arranged at the bottom end of the second driving motor, and the first round rod is slidably arranged on the L-shaped frame, more than two round rods II are evenly and slidably arranged on the L-shaped frame, belt pulleys II are rotationally arranged on the annular side surfaces of the round rods I and the round rods II, the second belt wheels are connected through a guide belt, a rectangular groove is formed in the top end of the L-shaped frame, a first sliding block is slidably arranged in the rectangular groove, a screw rod is rotatably arranged at the top end of the first sliding block, a nut is arranged on the annular side surface of the screw rod, a second sliding block is fixedly arranged on the outer side of the nut, a first pressure lever is arranged on the upper side of the L-shaped frame, the top end of the second round rod is fixedly arranged at the bottom end of the first pressure lever, a square through hole is arranged at the top end of the pressure lever, the sliding block II is slidably arranged in the square through hole, and a first gear is fixedly installed on the annular side surface of the output shaft on the second driving motor, a second gear is fixedly installed on the annular side surface of the screw rod, and the annular side surface of the first gear is meshed with the annular side surface of the second gear.

Furthermore, a second pressure lever is fixedly mounted on the annular side face of the round rod, one end of the second pressure lever extends to the first round rod and is fixedly mounted on the first round rod, and the bottom end of the second pressure lever is attached to the top end of the second belt pulley.

Furthermore, two guide grooves are symmetrically formed in the square through hole, two square blocks are symmetrically and fixedly installed on the second sliding block, and the square blocks are installed in the guide grooves in a sliding mode.

Furthermore, a rotating cylinder is rotatably arranged on the annular side surface of the screw rod, and a holding rod is fixedly arranged on the annular side surface of the rotating cylinder.

Furthermore, a bearing is installed on the annular side face of the screw rod, and the outer side of the bearing is fixedly installed inside the first sliding block.

Further, the inside fixed mounting of rectangular channel has the guide arm, slidable mounting has slider one on the guide arm annular side, install the spring on the guide arm annular side, the spring both ends respectively fixed mounting on slider one and on the rectangular channel inner wall.

Furthermore, a hexagonal groove is formed in the bottom end of an output shaft on the second driving motor, a hexagonal block is fixedly mounted at the top end of the first round rod, and the hexagonal block is mounted inside the hexagonal groove.

Furthermore, a return spring is fixedly mounted in the middle of the top end of the hexagonal block, and the top end of the return spring is fixedly mounted at the top end of the hexagonal groove.

The utility model has the beneficial effects that:

1. the second gear is driven to rotate through the gear, the screw rod is driven to rotate, the first pressure rod and the second pressure rod are driven to move, the belt wheel and the guide belt are driven to move downwards, the holding rod and the rotating cylinder horizontally pull the screw rod to move, the screw rod moves to drive the first sliding block to move along the guide rod and stretch the spring, the screw rod moves to drive the second gear to move and engage with the first gear, the second gear rotates to drive the second gear to rotate, the screw rod rotates to enable the nut to move along the screw rod, the nut moves to drive the second sliding block to move downwards, the second sliding block moves downwards and drives the first pressure rod to move downwards through the guide groove and the square block, the first pressure rod moves downwards to drive the second circular rod to move downwards, the second circular rod is driven to move downwards, and the purpose of changing the vertical heights of the second belt wheel and the guide belt is achieved.

2. The round bar two-way moving reset device has the advantages that the round bar one is driven to rotate by the aid of the six-edge block and the six-edge groove, the round bar one is driven to move up and down by the aid of the design of the six-edge block and the six-edge groove, the round bar one is driven to rotate by the aid of the driving motor two-way driving, the round bar one is driven to rotate, one of the two belt wheels drives the other two belt wheels to rotate around the round bar two through the guide belt, and the round bar moves up and resets in two directions due to the design of the reset spring.

3. The design of the spring is convenient for the horizontal movement reset of the first sliding block and the screw rod, the first spring is stretched in the moving process of the first sliding block, the elastic force of the first spring is convenient for the horizontal movement reset of the first sliding block and the screw rod, the first gear is separated from the second gear, and the design of the guide rod improves the moving stability of the first sliding block.

Drawings

FIG. 1 is a schematic perspective view of a multi-stage silicon wafer guiding mechanism for a wafer inserting machine according to the present invention;

FIG. 2 is a schematic structural view of a guide belt of a multi-stage silicon wafer guide mechanism for a wafer inserting machine according to the present invention;

FIG. 3 is a schematic cross-sectional view of an L-shaped frame of a multi-stage silicon wafer guiding mechanism for an insert machine according to the present invention.

In the figure: 1. a support bar; 2. a support block; 3. a rotating shaft; 4. a first belt wheel; 5. a conveyor belt; 6. a guide plate; 7. driving a motor I; 8. an L-shaped frame; 9. a second driving motor; 10. a first round rod; 11. a second belt wheel; 12. a second round bar; 13. a guide belt; 14. a first gear; 15. a second gear; 16. a first sliding block; 17. a screw; 18. a second sliding block; 19. a first pressure lever; 20. a second pressure lever; 21. a guide bar; 22. a spring; 23. a guide groove; 24. a square block; 25. a holding rod; 26. the barrel is rotated.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. It should be noted that unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and their meaning in the context of this patent may be understood by those skilled in the art as appropriate.

Referring to fig. 1-3, a silicon wafer multistage guide mechanism for a wafer inserting machine comprises support rods 1, support blocks 2, a rotating shaft 3, belt wheels I4, a conveyor belt 5, guide plates 6 and a driving motor I7, wherein the support rods 1 are provided with two groups, more than two support blocks 2 are uniformly welded at the top ends of the two groups of support rods 1, the rotating shaft 3 is rotatably installed inside the support blocks 2 through bearings, the belt wheels I4 are installed on the annular side surfaces of the rotating shaft 3 through key connections, the adjacent belt wheels I4 are connected through the conveyor belt 5, the driving motor I7 is installed on one support block 2 through bolts, one end of the driving motor I7 is connected with one rotating shaft 3 through a coupler, the guide plates 6 are installed at the top ends of the two support rods 1 through bolts, the guide plates 6 are designed to facilitate guiding adjustment in the moving process of a silicon wafer, and position deviation of the silicon wafer in the moving process is avoided, the two support rods 1 are welded with L-shaped frames 8, the top ends of the L-shaped frames 8 are provided with driving motors II 9 through bolts, the bottoms of the driving motors II 9 are rotatably provided with round rod I10, the round rod I10 is slidably arranged on the L-shaped frames 8, more than two round rod II 12 are uniformly slidably arranged on the L-shaped frames 8, the annular side surface of the round rod I10 is welded with belt wheel II 11, the annular side surface of the round rod II 12 is rotatably provided with belt wheel II 11 through a bearing, the belt wheel II 11 are connected through a guide belt 13, the top end of the L-shaped frame 8 is provided with a rectangular groove, a slide block I16 is slidably arranged in the rectangular groove, the top end of the slide block I16 is rotatably provided with a screw rod 17 through a bearing, the annular side surface of the screw rod 17 is provided with a nut, the slide block II 18 is fixedly arranged on the outer side of the nut, the upper side of the L-shaped frame 8 is provided with a pressure rod I19, the top ends of the round rod II 12 are arranged at the bottom ends of the pressure rod I19 through screws, the top end of the first compression bar 19 is provided with a square through hole, the second sliding block 18 is slidably mounted in the square through hole, a first gear 14 is fixedly mounted on the annular side face of the output shaft on the second driving motor 9, a second gear 15 is fixedly mounted on the annular side face of the screw 17, and the annular side face of the first gear 14 is meshed with the annular side face of the second gear 15.

In the utility model, it should be noted that a second pressure lever 20 is fixedly installed on the annular side surface of a second round bar 12, one end of the second pressure lever 20 extends to the first round bar 10 and is fixedly installed on the first round bar 10, the bottom end of the second pressure lever 20 is attached to the top end of a second belt wheel 11, the design is convenient for the second round bar 12 to move and drive the second pressure lever 20 to move, the second pressure lever 20 moves and drives the first round bar 10 to move and further drive a guide belt 13 to move up and down, two guide grooves 23 are symmetrically formed in the square through hole, two blocks 24 are symmetrically and fixedly installed on a second slider 18, the blocks 24 are slidably installed in the guide grooves 23, the guide grooves 23 and the blocks 24 are designed to be convenient for the second slider 18 to slidably install in the square through hole, a rotating cylinder 26 is rotatably installed on the annular side surface of a screw rod 17, a holding rod 25 is fixedly installed on the annular side surface of the rotating cylinder 26, and the holding rod 25 and the rotating cylinder 26 are designed to be convenient for the screw rod 17 to horizontally pull, the bearing is arranged on the annular side face of the screw 17, the outer side of the bearing is fixedly arranged inside the first sliding block 16, and the screw 17 is connected with the first sliding block 16 conveniently in a rotating mode through the design.

Particularly, a guide rod 21 is fixedly arranged in the rectangular groove, a first slider 16 is slidably arranged on the annular side surface of the guide rod 21, a spring 22 is arranged on the annular side surface of the guide rod 21, two ends of the spring 22 are respectively fixedly arranged on the first slider 16 and the inner wall of the rectangular groove, the design of the guide rod 21 improves the moving stability of the first slider 16 in the rectangular groove, the design of the spring 22 is convenient for the horizontal moving reset of the first slider 16 and a screw 17, a hexagonal groove is arranged at the bottom end of an output shaft on a second driving motor 9, a hexagonal block is fixedly arranged at the top end of a first round rod 10 and is arranged in the hexagonal groove, a reset spring is fixedly arranged at the middle position of the top end of the hexagonal block, the top end of the reset spring is fixedly arranged at the top end of the hexagonal groove, the design of the hexagonal block and the hexagonal groove is convenient for the vertical movement of the first round rod 10, meanwhile, the second driving motor 9 is convenient for the first round rod 10 to work to drive the first round rod 10 to rotate, the first round rod 10 to drive one belt wheel 11 to rotate, one of the second belt wheels 11 drives the other second belt wheels 11 to rotate around the second round rod 12 through the guide belt 13, and the design of the return spring facilitates the upward movement and return of the second round rod 12.

The working principle is as follows: when the position of the guide belt 13 needs to be adjusted, the screw 17 is horizontally pulled by the holding rod 25 and the rotating cylinder 26 to move, the screw 17 moves to drive the first slider 16 to move along the guide rod 21 and stretch the spring 22, the screw 17 moves to drive the second gear 15 to move and be meshed with the first gear 14, when the second driving motor 9 starts to work, the second driving motor 9 works to rotate through the first hexagonal block and the first hexagonal groove Adon round rod 10, the first round rod 10 rotates to drive the first gear 14 to rotate, the first gear 14 rotates to drive the second gear 15 to rotate and further drive the screw 17 to rotate, the screw 17 rotates to enable the nut to move along the screw 17, the nut moves to drive the second slider 18 to move downwards, the second slider 18 moves downwards to drive the first pressing rod 19 to move downwards through the guide groove 23 and the square block 24, the first pressing rod 19 moves downwards to drive the second round rod 12 to move downwards, the second round rod 12 moves downwards to drive the second pressing rod 20 to move downwards, and then drive round bar 10 and remove downwards, realize changing the purpose of band pulley two 11 and the vertical height of guiding belt 13, round bar 10 moves down the in-process and drives six arris pieces and remove along six arris grooves, make driving motor two 9 still can be connected with round bar 10, make guiding belt 13 can lead the adjustment to the silicon chip of different specifications, 16 removal in-process at slider one stretch spring 22, the elasticity of spring 22 one is convenient for slider two 18 and screw rod 17 horizontal migration to reset, and then make gear one 14 separate with gear two 15.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.

Claims

1. A silicon wafer multi-section guide mechanism for a wafer inserting machine comprises support rods (1), support blocks (2), two groups of rotating shafts (3), belt wheel I (4), a conveyor belt (5), guide plates (6) and a driving motor I (7), wherein the support rods (1) are provided with two groups, more than two support blocks (2) are uniformly and fixedly installed at the top ends of the two groups of support rods (1), the rotating shafts (3) are rotatably installed inside the support blocks (2), the belt wheel I (4) is fixedly installed on the annular side surface of each rotating shaft (3), the adjacent belt wheel I (4) are connected through the conveyor belt (5), one driving motor I (7) is fixedly installed on one support block (2), one end of each driving motor I (7) is fixedly connected with one rotating shaft (3), the guide plates (6) are fixedly installed at the top ends of the two support rods (1), the novel bearing support is characterized in that L-shaped frames (8) are fixedly mounted on the two support rods (1), a driving motor II (9) is fixedly mounted at the top end of each L-shaped frame (8), a round rod I (10) is rotatably mounted at the bottom end of the driving motor II (9), the round rod I (10) is slidably mounted on the L-shaped frames (8), more than two round rods II (12) are uniformly slidably mounted on the L-shaped frames (8), belt pulleys II (11) are fixedly mounted on the annular side surfaces of the round rods I (10), belt pulleys II (11) are rotatably mounted on the annular side surfaces of the round rods II (12), the belt pulleys II (11) are connected through guide belts (13), a rectangular groove is formed in the top end of each L-shaped frame (8), a sliding block I (16) is slidably mounted inside the rectangular groove, a screw rod (17) is rotatably mounted at the top end of the first sliding block (16), and a nut is mounted on the annular side surface of the screw rod (17), and the outside fixed mounting of nut has slider two (18), depression bar (19) are installed to L type frame (8) upside, two (12) top fixed mounting of round bar are in depression bar one (19) bottom, square through hole has been seted up on depression bar one (19) top, slider two (18) slidable mounting is inside square through hole, fixed mounting has gear one (14) on the output shaft annular side on driving motor two (9), fixed mounting has gear two (15) on screw rod (17) annular side, and gear one (14) annular side meshes with gear two (15) annular side mutually.

2. The silicon wafer multi-section guiding mechanism for the wafer inserting machine as claimed in claim 1, wherein a second pressure lever (20) is fixedly mounted on the annular side surface of the second round bar (12), one end of the second pressure lever (20) extends to the first round bar (10) and is fixedly mounted on the first round bar (10), and the bottom end of the second pressure lever (20) is attached to the top end of the second belt wheel (11).

3. The silicon wafer multi-section guide mechanism for the wafer inserting machine as claimed in claim 1, wherein two guide grooves (23) are symmetrically formed in the square through hole, two blocks (24) are symmetrically and fixedly mounted on the second sliding block (18), and the blocks (24) are slidably mounted in the guide grooves (23).

4. The silicon wafer multi-stage guide mechanism for the wafer inserting machine is characterized in that a rotating cylinder (26) is rotatably arranged on the annular side surface of the screw rod (17), and a holding rod (25) is fixedly arranged on the annular side surface of the rotating cylinder (26).

5. The silicon wafer multi-section guide mechanism for the wafer inserting machine is characterized in that a bearing is installed on the annular side face of the screw rod (17), and the outer side of the bearing is fixedly installed inside the first sliding block (16).

6. The silicon wafer multi-section guiding mechanism for the wafer inserting machine is characterized in that a guide rod (21) is fixedly installed inside the rectangular groove, a first sliding block (16) is slidably installed on the annular side surface of the guide rod (21), a spring (22) is installed on the annular side surface of the guide rod (21), and two ends of the spring (22) are fixedly installed on the first sliding block (16) and the inner wall of the rectangular groove respectively.

7. The silicon wafer multi-section guide mechanism for the wafer inserting machine as claimed in claim 1, wherein a hexagonal groove is formed at the bottom end of the output shaft of the second driving motor (9), a hexagonal block is fixedly mounted at the top end of the first round rod (10), and the hexagonal block is mounted inside the hexagonal groove.

8. The silicon wafer multi-section guide mechanism for the wafer inserting machine as claimed in claim 7, wherein the top end of the hexagonal block is fixedly provided with a return spring at the middle position, and the top end of the return spring is fixedly arranged at the top end inside the hexagonal groove.