CN112710393B - 光学测定装置、波长校正方法以及标准试样 - Google Patents

光学测定装置、波长校正方法以及标准试样 Download PDF

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Publication number
CN112710393B
CN112710393B CN202011149855.2A CN202011149855A CN112710393B CN 112710393 B CN112710393 B CN 112710393B CN 202011149855 A CN202011149855 A CN 202011149855A CN 112710393 B CN112710393 B CN 112710393B
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China
Prior art keywords
interference spectrum
wavelength
light
theoretical
wavelength correction
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Chinese (zh)
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CN112710393A (zh
Inventor
新家俊辉
井上展幸
大川内真
冈本宗大
川口史朗
水口勉
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Otsuka Electronics Co Ltd
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Otsuka Electronics Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/283—Investigating the spectrum computer-interfaced
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2859—Peak detecting in spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/32—Investigating bands of a spectrum in sequence by a single detector
    • G01J2003/323—Comparing line:background

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
CN202011149855.2A 2019-10-25 2020-10-23 光学测定装置、波长校正方法以及标准试样 Active CN112710393B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019194654A JP7382629B2 (ja) 2019-10-25 2019-10-25 光学測定装置および波長校正方法
JP2019-194654 2019-10-25

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CN112710393A CN112710393A (zh) 2021-04-27
CN112710393B true CN112710393B (zh) 2025-07-01

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JP (1) JP7382629B2 (https=)
KR (1) KR102859530B1 (https=)
CN (1) CN112710393B (https=)
TW (1) TWI872140B (https=)

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CN115372270A (zh) * 2021-05-20 2022-11-22 智谱科技有限公司 光谱整合校正方法及多光谱光谱仪
CN113514425B (zh) * 2021-09-14 2021-12-14 苏州高视半导体技术有限公司 一种平面等厚介质折射率的校准装置及校准方法
CN117990211B (zh) * 2022-11-02 2025-11-28 华为技术有限公司 光谱仪和电子设备
CN117249773B (zh) * 2023-11-08 2024-02-06 南通元激发科技有限公司 一种近退相干厚膜的膜层厚度及其折射率的测量方法
CN120558391A (zh) * 2025-07-31 2025-08-29 杭州高谱成像技术有限公司 一种基于薄膜干涉多峰特征的光谱定标方法及系统

Citations (1)

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CN109405752A (zh) * 2017-06-05 2019-03-01 大塚电子株式会社 光学测量装置及光学测量方法

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NZ300915A (en) * 1995-02-09 1998-12-23 Foss Electric As Method for standardizing a spectrometer generating an optical spectrum from a sample
JPH10122824A (ja) * 1996-10-24 1998-05-15 Dainippon Screen Mfg Co Ltd 膜厚測定方法
JP2001356050A (ja) * 2000-06-14 2001-12-26 Toray Ind Inc 分光方法及びフィルムの製造方法
EP1998155A1 (de) * 2007-05-30 2008-12-03 Roche Diagnostics GmbH Verfahren zur Wellenlängenkalibration eines Spektrometers
JP5328437B2 (ja) * 2009-03-25 2013-10-30 キヤノン株式会社 透過波面測定方法、屈折率分布測定方法、光学素子の製造方法、及び透過波面測定装置
JP5709372B2 (ja) * 2009-12-01 2015-04-30 キヤノン株式会社 校正手段、校正方法、及びプログラム
JP5947502B2 (ja) * 2011-08-11 2016-07-06 キヤノン株式会社 分光測色器、および画像形成装置
JP5721586B2 (ja) * 2011-08-12 2015-05-20 大塚電子株式会社 光学特性測定装置および光学特性測定方法
JP5484537B2 (ja) * 2012-09-03 2014-05-07 大塚電子株式会社 分光特性測定装置および分光特性測定方法
JP2014228281A (ja) * 2013-05-17 2014-12-08 コニカミノルタ株式会社 フーリエ変換型分光計およびフーリエ変換型分光計の校正方法
US9921104B2 (en) * 2016-06-11 2018-03-20 Kla-Tencor Corporation Simultaneous multi-angle spectroscopy
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EP3477252A1 (de) * 2017-10-25 2019-05-01 Unity Semiconductor GmbH Anordnung zur erfassung des oberflächenprofils einer objektoberfläche mittels interferometrischer abstandsmessung
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Publication number Publication date
JP7382629B2 (ja) 2023-11-17
TW202138747A (zh) 2021-10-16
KR102859530B1 (ko) 2025-09-12
TWI872140B (zh) 2025-02-11
CN112710393A (zh) 2021-04-27
JP2021067611A (ja) 2021-04-30
KR20210049679A (ko) 2021-05-06

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