CN1126149C - 具有圆形的水平臂的自由滑动垂直架 - Google Patents

具有圆形的水平臂的自由滑动垂直架 Download PDF

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Publication number
CN1126149C
CN1126149C CN99803417A CN99803417A CN1126149C CN 1126149 C CN1126149 C CN 1126149C CN 99803417 A CN99803417 A CN 99803417A CN 99803417 A CN99803417 A CN 99803417A CN 1126149 C CN1126149 C CN 1126149C
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CN
China
Prior art keywords
horizontal
vertical
wafer
surface part
vertical component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN99803417A
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English (en)
Chinese (zh)
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CN1292148A (zh
Inventor
R·R·享斯特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Ceramics and Plastics Inc
Original Assignee
Saint Gobain Norton Industrial Ceramics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Norton Industrial Ceramics Corp filed Critical Saint Gobain Norton Industrial Ceramics Corp
Publication of CN1292148A publication Critical patent/CN1292148A/zh
Application granted granted Critical
Publication of CN1126149C publication Critical patent/CN1126149C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67306—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by a material, a roughness, a coating or the like

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN99803417A 1998-02-27 1999-02-19 具有圆形的水平臂的自由滑动垂直架 Expired - Lifetime CN1126149C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/031,887 US5931666A (en) 1998-02-27 1998-02-27 Slip free vertical rack design having rounded horizontal arms
US09/031,887 1998-02-27

Publications (2)

Publication Number Publication Date
CN1292148A CN1292148A (zh) 2001-04-18
CN1126149C true CN1126149C (zh) 2003-10-29

Family

ID=21861930

Family Applications (1)

Application Number Title Priority Date Filing Date
CN99803417A Expired - Lifetime CN1126149C (zh) 1998-02-27 1999-02-19 具有圆形的水平臂的自由滑动垂直架

Country Status (9)

Country Link
US (1) US5931666A (enExample)
EP (1) EP1064673B1 (enExample)
JP (1) JP2002505518A (enExample)
KR (1) KR100404032B1 (enExample)
CN (1) CN1126149C (enExample)
AU (1) AU3303199A (enExample)
CA (1) CA2318968C (enExample)
DE (1) DE69939648D1 (enExample)
WO (1) WO1999044222A1 (enExample)

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KR20000002833A (ko) * 1998-06-23 2000-01-15 윤종용 반도체 웨이퍼 보트
US6171400B1 (en) 1998-10-02 2001-01-09 Union Oil Company Of California Vertical semiconductor wafer carrier
US6196211B1 (en) 1999-04-15 2001-03-06 Integrated Materials, Inc. Support members for wafer processing fixtures
US6205993B1 (en) 1999-04-15 2001-03-27 Integrated Materials, Inc. Method and apparatus for fabricating elongate crystalline members
US6225594B1 (en) 1999-04-15 2001-05-01 Integrated Materials, Inc. Method and apparatus for securing components of wafer processing fixtures
US7055702B1 (en) * 2000-06-06 2006-06-06 Saint-Gobain Ceramics & Plastics, Inc. Slip resistant horizontal semiconductor wafer boat
US6450346B1 (en) 2000-06-30 2002-09-17 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing
WO2002003428A2 (en) 2000-06-30 2002-01-10 Integrated Materials, Inc. Silicon fixtures for supporting wafers during thermal processing and method of fabrication
US6455395B1 (en) * 2000-06-30 2002-09-24 Integrated Materials, Inc. Method of fabricating silicon structures including fixtures for supporting wafers
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US6727191B2 (en) * 2001-02-26 2004-04-27 Integrated Materials, Inc. High temperature hydrogen anneal of silicon wafers supported on a silicon fixture
JP3931578B2 (ja) * 2001-03-30 2007-06-20 信越半導体株式会社 気相成長装置
US6629994B2 (en) * 2001-06-11 2003-10-07 Advanced Cardiovascular Systems, Inc. Intravascular stent
US6835039B2 (en) * 2002-03-15 2004-12-28 Asm International N.V. Method and apparatus for batch processing of wafers in a furnace
US6582221B1 (en) 2002-07-19 2003-06-24 Asm International N.V. Wafer boat and method for treatment of substrates
US7256375B2 (en) * 2002-08-30 2007-08-14 Asm International N.V. Susceptor plate for high temperature heat treatment
US6939132B2 (en) * 2002-09-30 2005-09-06 Samsung Austin Semiconductor, L.P. Semiconductor workpiece apparatus
US7033126B2 (en) * 2003-04-02 2006-04-25 Asm International N.V. Method and apparatus for loading a batch of wafers into a wafer boat
DE602004025366D1 (de) * 2003-07-02 2010-03-18 Cook Inc Koaxialen Katheter
US7181132B2 (en) 2003-08-20 2007-02-20 Asm International N.V. Method and system for loading substrate supports into a substrate holder
US20050205502A1 (en) * 2004-03-18 2005-09-22 Brown Steven A Rails for semiconductor wafer carriers
US7520566B2 (en) * 2004-05-26 2009-04-21 Braun Seating Incorporated Stowable vehicle seat apparatus and method
US20060060145A1 (en) * 2004-09-17 2006-03-23 Van Den Berg Jannes R Susceptor with surface roughness for high temperature substrate processing
US20060065634A1 (en) * 2004-09-17 2006-03-30 Van Den Berg Jannes R Low temperature susceptor cleaning
US20060150906A1 (en) * 2005-01-07 2006-07-13 Selen Louis J M Wafer boat for reduced shadow marks
US7972703B2 (en) * 2005-03-03 2011-07-05 Ferrotec (Usa) Corporation Baffle wafers and randomly oriented polycrystalline silicon used therefor
JP5184040B2 (ja) * 2007-10-12 2013-04-17 コバレントマテリアル株式会社 縦型ウエハボート
US20110259840A1 (en) * 2010-04-23 2011-10-27 Advanced Semiconductor Engineering, Inc. Semiconductor package magazine
FI122720B (fi) 2010-07-13 2012-06-15 Tamturbo Oy Turbokompressorin säätöratkaisu
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
JP6770461B2 (ja) * 2017-02-21 2020-10-14 クアーズテック株式会社 縦型ウエハボート
KR102768950B1 (ko) * 2020-02-06 2025-02-19 삼성디스플레이 주식회사 기판용 카세트
KR102709165B1 (ko) * 2021-10-29 2024-09-24 솔믹스 주식회사 웨이퍼 보트

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3660886A (en) * 1969-02-20 1972-05-09 Ginori Ceramica Ital Spa Method of making firing setters for tiles and other ceramic articles
JPS6216516A (ja) * 1985-07-15 1987-01-24 Mitsubishi Electric Corp 半導体製造装置
US5169453A (en) * 1989-03-20 1992-12-08 Toyoko Kagaku Co., Ltd. Wafer supporting jig and a decompressed gas phase growth method using such a jig
GB9021873D0 (en) * 1990-10-09 1990-11-21 Groom Bryan Ltd Ware support apparatus
JP3204699B2 (ja) * 1990-11-30 2001-09-04 株式会社東芝 熱処理装置
JPH05102056A (ja) * 1991-10-11 1993-04-23 Rohm Co Ltd ウエハー支持具
JP3234617B2 (ja) * 1991-12-16 2001-12-04 東京エレクトロン株式会社 熱処理装置用基板支持具
JPH06163440A (ja) * 1992-11-16 1994-06-10 Shin Etsu Chem Co Ltd 半導体縦型拡散炉用治具
US5492229A (en) * 1992-11-27 1996-02-20 Toshiba Ceramics Co., Ltd. Vertical boat and a method for making the same
JP3245246B2 (ja) * 1993-01-27 2002-01-07 東京エレクトロン株式会社 熱処理装置
JPH07147258A (ja) * 1993-11-25 1995-06-06 Hitachi Ltd 半導体ウェハの熱処理装置
JP3316068B2 (ja) * 1993-12-01 2002-08-19 東京エレクトロン株式会社 熱処理用ボート
EP0826233A1 (en) * 1995-05-05 1998-03-04 Saint-Gobain Industrial Ceramics, Inc. Slip free vertical rack design
US5534074A (en) * 1995-05-17 1996-07-09 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
US5725101A (en) * 1995-06-26 1998-03-10 Kakizaki Manufacturing Co., Ltd. Thin-plate supporting container
JPH09251961A (ja) * 1996-03-15 1997-09-22 Toshiba Corp 熱処理用ボート
JPH09260296A (ja) * 1996-03-21 1997-10-03 Sumitomo Sitix Corp ウェーハ支持装置
JPH09306980A (ja) * 1996-05-17 1997-11-28 Asahi Glass Co Ltd 縦型ウエハボート
JPH10321543A (ja) * 1997-05-20 1998-12-04 Sumitomo Metal Ind Ltd ウェハ支持体及び縦型ボート

Also Published As

Publication number Publication date
DE69939648D1 (de) 2008-11-13
CN1292148A (zh) 2001-04-18
CA2318968C (en) 2004-07-20
EP1064673B1 (en) 2008-10-01
KR100404032B1 (ko) 2003-11-01
CA2318968A1 (en) 1999-09-02
US5931666A (en) 1999-08-03
JP2002505518A (ja) 2002-02-19
KR20010041263A (ko) 2001-05-15
WO1999044222A1 (en) 1999-09-02
EP1064673A1 (en) 2001-01-03
AU3303199A (en) 1999-09-15

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Granted publication date: 20031029