CN112501554A - 一种滚动轴承耐磨膜层的制备方法 - Google Patents
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Abstract
本发明涉及一种滚动轴承耐磨膜层的制备方法,通过电子束物理气相沉积技术在轴承的表面上制备具有高硬度、高结合力、低摩擦系数的多层耐磨膜层。该膜层由耐磨材料和自润滑材料组成,其中耐磨材料的化学成分为氮化钛、氮化铬、碳氮化钛、碳氮铝钛等氮化物、碳氮化物的一种或几种组成,自润滑材料由二硫化钼、二硫化钨、类金刚石的一种或几种组成。膜层的总厚度为1‑10微米,膜层的微观结构为多层结构。膜层因高硬度材料的存在不仅硬度高,而且因自润滑材料的润滑特性使得膜层的摩擦系数又低,可降低到0.21以下,远远低于传统轴承的0.6以上的摩擦系数,从而提高轴承的使用寿命,降低运转时的阻力和振动噪音。
Description
技术领域
本发明涉及滚动轴承领域,具体是一种采用电子束物理气相沉积技术(EB-PVD),在滚动轴承表面上制备硬度高、结合力高、摩擦系数低的耐磨膜层的方法,从而提高轴承的使用寿命,降低运转时的阻力和振动噪音。
背景技术
轴承是机械传动中的关键支撑部件,其主要作用是支撑机械旋转体,降低其运动过程中的摩擦系数和噪音。轴承表面因机械部件高速转动过程中所形成摩擦而导致磨损失效。按运动元件摩擦性质的不同,轴承可分为滚动轴承和滑动轴承两大类。其中滚动轴承已经标准化、系列化,但与滑动轴承相比,它的运转速度高,径向尺寸、振动和噪声较大,价格也较高。为了提高轴承的耐磨性,满足特殊工况的要求,常常采用热处理或镀膜的方式提高轴承表面硬度,从而提高其服役寿命。
然而常见热处理技术受轴承本身材料的限制,轴承热处理后的硬度一般为800HV以下,而且表面的摩擦系数为0.6以上,不仅硬度提高有限,而且具有摩擦系数高的缺点,无法满足高端装备中苛刻工况的服役要求。
常规的磁控溅射、化学镀膜技术所获得的膜层的硬度虽然高些,但是膜层的结合力低,难于超过30N,厚度也一般难于超过1微米,膜层的沉积效率低,生产效率低下,成本高。
本发明为了解决现有方法制备的轴承表面膜层硬度低、膜层结合力低、难于制备厚膜层、生产效率低下的问题,提供了一种采用电子束物理气相沉积技术在轴承表面上制备耐磨膜层的方法。
发明内容
针对上述现有技术的不足之处,本发明提供了一种采用电子束物理气相沉积技术(EB-PVD),在滚动轴承表面上制备硬度高、结合力高、摩擦系数低的耐磨膜层的方法,从而提高轴承的使用寿命,降低运转时的阻力和振动噪音,以满足高端机械中苛刻工况的服役要求。
本发明的技术方案在于:通过电子束物理气相沉积技术(EB-PVD)在轴承的表面上制备具有高硬度、高结合力、低摩擦系数的多层耐磨膜层。该膜层由耐磨材料和自润滑材料组成,其中耐磨材料的化学成分为氮化钛(TiN)、氮化铬(CrN)、碳氮化钛(TiCN)、碳氮铝钛(TiAlCN)等氮化物、碳氮化物的一种或几种组成,自润滑材料由二硫化钼(MoS2)、二硫化钨(WS2)、类金刚石(DLC)的一种或几种组成。膜层的总厚度为1-10微米,膜层的微观结构为多层结构。
本发明采用电子束物理气相沉积技术(EB-PVD)制备耐磨膜层的步骤如下:
(1)轴承的固定:将轴承经过丙酮、超声波清洗后固定在夹具上,然后放入电子束物理气相沉积(EB-PVD)设备的真空室中;
(2)轴承预热:抽真空室到设定的真空度,开启电子束对轴承进行预热,到设定的预热温度后停止加热。
(3)沉积膜层:开启电子束对一种或两种靶材进行加热,并充入反应气体,将一种或两种靶材物质溅射沉积到轴承表面上,膜层达到设定厚度后关闭电子束。
(4)轴承冷却:在真空室内冷却后取出得到镀有耐磨膜层的轴承。
膜层制备过程中,轴承的预热温度为100-500℃,真空室的真空度保持为1×10-4Pa至1×10-4Pa。
本发明采用的电子束物理气相沉积技术,设备工作功率高达数十千瓦(功率大),而且膜层从基体向上生长的方式沉积,这不仅有利于提高膜层的结合力(可达60N以上),而且能提高膜层的沉积速度和生产效率(膜层的厚度可达10微米以上)。同时,基于本发明所采取的多层膜层设计理念,以及高硬度材料和自润滑材料的特性,所制备的膜层因高硬度材料的存在不仅硬度高,而且因自润滑材料的润滑特性使得膜层的摩擦系数又低,可降低到0.21以下,远远低于传统轴承的0.6以上的摩擦系数,从而提高轴承的使用寿命,降低运转时的阻力和振动噪音。
附图说明
图1多层耐磨膜层的扫描电镜照片。
图2多层耐磨膜层的光学显微镜照片(膜层厚度为4.4微米)。
图3多层耐磨膜层的平均摩擦系数为0.21。
图4多层耐磨膜层的光学显微镜照片(膜层厚度为3.9微米)。
图5多层耐磨膜层的光学显微镜照片(膜层厚度为6.1微米)。
图6多层耐磨膜层的扫描电镜照片(膜层厚度为10微米)。
具体实施方式
通过以下参照附图对本发明实施例的描述,本发明的上述以及其它目的、特征和优点将更为清楚。以下基于实施例对本发明进行描述,本领域普通技术人员应当理解,在此提供的附图都是为了说明目的,并且附图不一定是按比例绘制的。
除非上下文明确要求,否则整个说明书和权利要求书中的“包括”、“包含”等类似词语应当解释为包含的含义而不是排他或穷举的含义;也就是说,是“包括但不限于”的含义。
实施例1
本发明采用电子束物理气相沉积技术(EB-PVD)在轴承表面上制备耐磨膜层的步骤如下:
(1)轴承的固定:将轴承经过丙酮、超声波清洗后固定在夹具上,然后放入电子束物理气相沉积(EB-PVD)设备的真空室中。
(2)轴承预热:抽真空室到设定的真空度,开启电子束对轴承进行预热,到设定的预热温度后停止加热。
(3)沉积膜层:开启电子束对一种或两种靶材进行加热,并充入反应气体,将一种或两种靶材物质溅射沉积到轴承表面上,膜层达到设定厚度后关闭电子束。
(4)轴承冷却:在真空室内冷却后取出得到镀有耐磨膜层的轴承。
所述耐磨膜层,由耐磨材料和自润滑材料组成。其中耐磨材料的化学成分为氮化钛(TiN),自润滑材料为二硫化钼(MoS2)。
膜层制备过程中,轴承的预热温度为200℃,真空室的真空度保持为1×10-4Pa。耐磨膜层的微观结构为多层结构,其总厚度为4.4微米,如图1和图2所示。
如图3所示,所制备的耐磨膜层的平均摩擦系数为0.21,低于常规GCr15滚动轴承的摩擦系数。
通过上述步骤,在轴承的表面沉积的耐磨膜层不仅硬度高、结合力高,而且具有低摩擦系数,从而显著提高轴承的使用寿命。
实施例2
采用电子束物理气相沉积技术(EB-PVD)制备的膜层的耐磨材料化学成分为碳氮化钛(TiAlCN),自润滑材料为二硫化钼(MoS2)。
耐磨膜层的微观结构为多层结构,其总厚度为3.9微米,如图4所示。
膜层制备过程中,轴承的预热温度为300℃,真空室的真空度保持为1×10-5Pa。
通过上述步骤,在轴承的表面沉积的耐磨膜层不仅硬度高、结合力高,而且具有低摩擦系数,从而显著提高轴承的使用寿命。
实施例3
采用电子束物理气相沉积技术(EB-PVD)制备的膜层的耐磨材料化学成分为碳氮化钛(TiAlCN),自润滑材料为二硫化钼(MoS2)。
耐磨膜层的微观结构为多层结构,其总厚度为6.1微米,如图5所示。
膜层制备过程中,轴承的预热温度为500℃,真空室的真空度保持为1×10-5Pa。
通过上述步骤,在轴承的表面沉积的耐磨膜层不仅硬度高、结合力高,而且具有低摩擦系数,从而显著提高轴承的使用寿命。
实施例4
采用电子束物理气相沉积技术(EB-PVD)制备的膜层的耐磨材料化学成分为氮化铬(CrN),自润滑材料为二硫化钼(MoS2)。
耐磨膜层的微观结构为多层结构,其总厚度为10微米,如图6所示。
膜层制备过程中,轴承的预热温度为100℃,真空室的真空度保持为1×10-4Pa。
通过上述步骤,在轴承的表面沉积的耐磨膜层不仅硬度高、结合力高,而且具有低摩擦系数,从而显著提高轴承的使用寿命。
实施例5
采用电子束物理气相沉积技术(EB-PVD)制备的膜层的耐磨材料化学成分为碳氮化钛(TiAlCN),自润滑材料为类金刚石(DLC)。
耐磨膜层的微观结构为多层结构,其总厚度为1微米。
膜层制备过程中,轴承的预热温度为400℃,真空室的真空度保持为1×10-4Pa。
通过上述步骤,在轴承的表面沉积的耐磨膜层不仅硬度高、结合力高,而且具有低摩擦系数,从而显著提高轴承的使用寿命。
本发明采用电子束物理气相沉积技术制备膜层,不仅有利于提高膜层的结合力,而且能提高膜层的沉积速度和生产效率。同时,基于本发明所采取的多层膜层设计理念,以及高硬度材料和自润滑材料的特性,膜层不仅硬度高耐磨,而且摩擦系数又低,从而提高轴承的使用寿命,降低运转时的阻力和振动噪音。
本领域的技术人员容易理解的是,在不冲突的前提下,上述各优选方案自由地组合、叠加。
以上所述仅为本发明的优选实施例,但本发明的实施方式并不受上述实施例的限制,其他的任何未背离本发明的精神实质与原理下所作的改变、修饰、替代、组合、简化,均应为等效的置换方式,都包含在本发明的保护范围之内。
Claims (6)
1.一种滚动轴承耐磨膜层的制备方法,其特征在于:采用电子束物理气相沉积技术在滚动轴承的表面上制备耐磨膜层,其制备工艺步骤如下:
(1)轴承的固定:将轴承经过丙酮、超声波清洗后固定在夹具上,然后放入电子束物理气相沉积设备的真空室中;
(2)轴承预热:抽真空室到设定的真空度,开启电子束对轴承进行预热,到设定的预热温度后停止加热。
(3)沉积膜层:开启电子束对一种或两种靶材进行加热,并充入反应气体,将一种或两种靶材物质溅射沉积到轴承表面上,膜层达到设定厚度后关闭电子束。
(4)轴承冷却:在真空室内冷却后取出得到镀有耐磨膜层的轴承。
2.根据权利要求1所述的制备方法,其特征在于:耐磨膜层由耐磨材料和自润滑材料组成,其中耐磨材料的化学成分为氮化钛、氮化铬、碳氮化钛、碳氮铝钛的氮化物、碳氮化物的一种或几种组成,自润滑材料由二硫化钼、二硫化钨、类金刚石的一种或几种组成。
3.根据权利要求1所述的制备方法,其特征在于:耐磨膜层,其微观结构为多层结构。
4.根据权利要求1所述的制备方法,其特征在于:耐磨膜层,真空室的真空度为1×10- 4Pa至1×10-5Pa。
5.根据权利要求1所述的制备方法,其特征在于:耐磨膜层,轴承的预热温度为100-500℃。
6.根据权利要求1所述的制备方法,其特征在于:耐磨膜层,其总厚度为1-10微米。
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