CN112358196A - 一种光学玻璃表面蒸镀工艺 - Google Patents

一种光学玻璃表面蒸镀工艺 Download PDF

Info

Publication number
CN112358196A
CN112358196A CN202011232411.5A CN202011232411A CN112358196A CN 112358196 A CN112358196 A CN 112358196A CN 202011232411 A CN202011232411 A CN 202011232411A CN 112358196 A CN112358196 A CN 112358196A
Authority
CN
China
Prior art keywords
optical glass
evaporation
plasma treatment
evaporation process
degrees
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011232411.5A
Other languages
English (en)
Inventor
郭勇
陈朝岚
卢礼灿
杨科
郭猛
刘健
王冬胜
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hunan Hipro New Materials Co ltd
Original Assignee
Hunan Hipro New Materials Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hunan Hipro New Materials Co ltd filed Critical Hunan Hipro New Materials Co ltd
Priority to CN202011232411.5A priority Critical patent/CN112358196A/zh
Publication of CN112358196A publication Critical patent/CN112358196A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/006—Other surface treatment of glass not in the form of fibres or filaments by irradiation by plasma or corona discharge
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5826—Treatment with charged particles
    • C23C14/5833—Ion beam bombardment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/31—Pre-treatment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Glass Compositions (AREA)

Abstract

本发明公开了一种光学玻璃表面蒸镀工艺，所述的工艺包含以下过程：在清洗光学玻璃表面后，对其表面进行等离子处理，使其表面水滴角值低于15°，然后在其表面蒸镀OC‑3001材料，再进一步进行等离子处理，继续蒸镀颜色膜或增透膜，本发明的成本仅为传统工艺的一半以下，通过蒸镀一次性制作得到产品，良率得到很大改善，工作程序减少，产能同时增加。

Description

一种光学玻璃表面蒸镀工艺
背景技术
现有的光学玻璃在制作颜色膜或者增透膜后，材料韧性下降明显，导致客户使用舒适性下降。所以在素材制作颜色或者增透膜前，会提前喷涂制作一层微米级OC0材料，该材料的主体组成成分为聚酯树脂。OC0是一种液态喷涂树脂材料，玻璃在显微镜放大观察下，可以看到有细密内裂纹(玻璃在钢化处理过程中产生)，喷涂OCO材料后，OC0材料能够起到填充作用，具有较大的吸附性和超低水滴角，喷涂OC0材料后再制作镀膜层，能够在很大程度上提高素材韧性。
喷涂OCO材料的工艺过程主要包括：产品表面纯水清洗+等离子清洗+喷涂OC0材料+高温烘烤(180℃/20min)+等离子处理+蒸镀颜色膜/增透膜+性能测试
但上述喷涂工艺及材料到存在以下问题：
1、需要两种不同工艺(喷涂+蒸镀)搭配制作，制作过程复杂，需要投入大量人员、设备、资金成本，且生产效率低；
2、制作工序较多，生产良率低，一般为75％左右；
3、所使用的OC0材料价格昂贵，需要专人跟进制作，喷涂过程中大概需要3个人，且需要专门的开机员进行操作；
4、需要在180℃左右的高温下烘烤20分钟左右。
发明内容
本发明通过工艺与材料结合的改进，提供了一种光学玻璃蒸镀工艺，通过单一的蒸镀工艺，结合材料的改进，不仅避免了多重工艺制作的繁琐，提高了产品良率，且在很大程度上降低了制作成本，相对现有技术，单片材料成本大概降低了10元。
本发明的技术方案
本发明提供了一种光学玻璃表面蒸镀工艺，具体的技术方案为：
在清洗光学玻璃表面后，对其表面进行等离子处理，使其表面水滴角值低于15°，然后在其表面蒸镀OC-3001材料，再进一步进行等离子处理，继续蒸镀颜色膜或增透膜，其中，所述OC-3001材料的分子结构式如下：
Figure BDA0002765643820000021
式I中，R1为CH3或CH2CH3；R2为CH3或CH2CH3；R3为CH3或CH2CH3。
本发明进一步包括以下优选的技术方案：
优选的方案中，所述OC-3001材料为固体颗粒或粉末。
优选的方案中，所述OC-3001材料的镀膜膜厚为30-80nm。
优选的方案中，蒸镀OC-3001材料后进行等离子处理时，处理时间为45-90S。
优选的方案中，蒸镀OC-3001材料过程中的腔体温度为30-35℃。本发明的有益效果对于普通的光学玻璃素材，在制作增透膜层或者颜色膜、滤光片等镀膜工艺后，对玻璃素材韧性影响较大，尤其是在落球测试，四点应力测试方面，都会有很大衰减。
本发明提供了一种全新的光学玻璃表面蒸镀工艺，能很大程度上提高光学镀膜后材料的韧性，落球、应力等测试结果和原素材基本无差别，通过使用本发明的工艺，不仅能够得到好的蒸发效果，蒸发温度较低；且本发明通过单涂制作，不需要采取其他打底材料过渡；适用于各类型玻璃素材；制备得到的光学玻璃表面透明度高，整个处理过程不会影响其透过率，且不会影响光学玻璃的其他综合性能，具有一定亲水性，水滴角极低；且能在一定范围内提高光学玻璃基材的韧性。
本发明的成本仅为传统工艺的一半以下，通过蒸镀一次性制作得到产品，良率得到很大改善，工作程序减少，产能同时增加。
通过本发明的工艺制备的光学玻璃具有以下性能优势：
1)超低水滴角，水滴角＜20°，不影响结合力；
2)干拉百格，水煮百格满足4B；
3)四点落球测试，32克钢珠满足60cm高度不开裂；
4)高温高湿、冷热冲击、盐雾、耐汗液测试等均满足基本要求。
具体实施例
对比例1：
在清洗光学玻璃表面后，对其表面进行等离子处理，使其表面水滴角值低于15°，然后在其表面蒸镀AF材料，再进一步进行等离子处理，继续蒸镀颜色膜或增透膜，结果：水滴角90-100°，百格，水煮均NG，未进行后续测试制作。
对比例2：
在清洗光学玻璃表面后，对其表面进行等离子处理，使其表面水滴角值低于15°，然后在其表面蒸镀IF材料，再进一步进行等离子处理，继续蒸镀颜色膜或增透膜，结果：水滴角90-100°，百格，水煮均NG，未进行后续测试制作。
对比例4：
在清洗光学玻璃表面后，对其表面进行等离子处理，使其表面水滴角值低于15°，然后在其表面蒸镀亲水材料防雾药材料，再进一步进行等离子处理，继续蒸镀颜色膜或增透膜，结果：水滴角20-30°，百格，水煮NG，未进行后续测试。
实施例1：
在清洗光学玻璃表面后，对其表面进行等离子处理，使其表面水滴角值低于15°，然后在其表面蒸镀OC-3001材料，再进一步进行等离子处理，继续蒸镀颜色膜或增透膜，结果：水滴角20-30°，百格，水煮NG，未进行后续测试。
结果：水滴角10-15°，百格，水煮OK，落球测试切边；
通过对使用OC0和与OC-3001材料的情况及效果进行对比，得到表1所述结果：
Figure BDA0002765643820000031
表1
从表1可以看出，使用本发明的工艺和材料的结合，不仅能在很大程度上降低成本，且能够获得更好的效果，工艺更加简单，所得到的产品的良率更高。

Claims (5)

1.一种光学玻璃表面蒸镀工艺，其特征在于，所述的工艺包含以下过程：在清洗光学玻璃表面后，对其表面进行等离子处理，使其表面水滴角值低于15°，然后在其表面蒸镀OC-3001材料，再进一步进行等离子处理，继续蒸镀颜色膜或增透膜，其中，所述OC-3001材料的分子结构式如下：
Figure FDA0002765643810000011
式I中，R1为CH3或CH2CH3；R2为CH3或CH2CH3；R3为CH3或CH2CH3。
2.根据权利要求1所述的光学玻璃表面蒸镀工艺，其特征在于，所述OC-3001材料为固体颗粒或粉末。
3.根据权利要求1所述的光学玻璃表面蒸镀工艺，其特征在于，所述OC-3001材料的镀膜膜厚为30-80nm。
4.根据权利要求1-3任一项所述的光学玻璃表面蒸镀工艺，其特征在于，蒸镀OC-3001材料后进行等离子处理时，处理时间为45-90S。
5.根据权利要求1-3任一项所述的光学玻璃表面蒸镀工艺，其特征在于，蒸镀OC-3001材料过程中的腔体温度为30-35℃。
CN202011232411.5A 2020-11-06 2020-11-06 一种光学玻璃表面蒸镀工艺 Pending CN112358196A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011232411.5A CN112358196A (zh) 2020-11-06 2020-11-06 一种光学玻璃表面蒸镀工艺

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011232411.5A CN112358196A (zh) 2020-11-06 2020-11-06 一种光学玻璃表面蒸镀工艺

Publications (1)

Publication Number Publication Date
CN112358196A true CN112358196A (zh) 2021-02-12

Family

ID=74509713

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011232411.5A Pending CN112358196A (zh) 2020-11-06 2020-11-06 一种光学玻璃表面蒸镀工艺

Country Status (1)

Country Link
CN (1) CN112358196A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113233787A (zh) * 2021-05-17 2021-08-10 蓝思科技(东莞)有限公司 Ncvm镀膜工艺

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0561016A1 (en) * 1992-03-17 1993-09-22 Tetsusaburo Taira Multilayer coating by vacuum vapor deposition
JP2001294446A (ja) * 2000-04-07 2001-10-23 Mitsuboshi Belting Ltd 表面コート剤及び表面コートされた着色ガラスの製造方法
US20100015439A1 (en) * 2006-12-20 2010-01-21 John Fredrick Buether Glass Substrates Coated or Laminated With Cured Silicone Resin Compositions
CN103146305A (zh) * 2011-11-30 2013-06-12 信越化学工业株式会社 用于气相沉积的氟基表面处理剂和使用该表面处理剂通过气相沉积进行修饰得到的制品
CN104024175A (zh) * 2011-12-28 2014-09-03 旭硝子株式会社 带防污膜的基体及其制造方法
JP2016011460A (ja) * 2014-06-02 2016-01-21 キヤノンオプトロン株式会社 蒸発源とそれを用いた蒸着方法
CN105621897A (zh) * 2016-02-02 2016-06-01 凯茂科技(深圳)有限公司 一种镀膜玻璃及其制备工艺
CN107188425A (zh) * 2017-06-16 2017-09-22 山东龙光天旭太阳能有限公司 一种改性二氧化硅增透膜的制备方法
CN110093587A (zh) * 2019-05-24 2019-08-06 湖南宏泰新材料有限公司 镜片光学镀膜表面处理工艺以及通过该工艺制备得到的镜片
CN110868830A (zh) * 2019-11-29 2020-03-06 Oppo广东移动通信有限公司 玻璃壳体及其制备方法和电子设备

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0561016A1 (en) * 1992-03-17 1993-09-22 Tetsusaburo Taira Multilayer coating by vacuum vapor deposition
JP2001294446A (ja) * 2000-04-07 2001-10-23 Mitsuboshi Belting Ltd 表面コート剤及び表面コートされた着色ガラスの製造方法
US20100015439A1 (en) * 2006-12-20 2010-01-21 John Fredrick Buether Glass Substrates Coated or Laminated With Cured Silicone Resin Compositions
CN103146305A (zh) * 2011-11-30 2013-06-12 信越化学工业株式会社 用于气相沉积的氟基表面处理剂和使用该表面处理剂通过气相沉积进行修饰得到的制品
CN104024175A (zh) * 2011-12-28 2014-09-03 旭硝子株式会社 带防污膜的基体及其制造方法
JP2016011460A (ja) * 2014-06-02 2016-01-21 キヤノンオプトロン株式会社 蒸発源とそれを用いた蒸着方法
CN105621897A (zh) * 2016-02-02 2016-06-01 凯茂科技(深圳)有限公司 一种镀膜玻璃及其制备工艺
CN107188425A (zh) * 2017-06-16 2017-09-22 山东龙光天旭太阳能有限公司 一种改性二氧化硅增透膜的制备方法
CN110093587A (zh) * 2019-05-24 2019-08-06 湖南宏泰新材料有限公司 镜片光学镀膜表面处理工艺以及通过该工艺制备得到的镜片
CN110868830A (zh) * 2019-11-29 2020-03-06 Oppo广东移动通信有限公司 玻璃壳体及其制备方法和电子设备

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113233787A (zh) * 2021-05-17 2021-08-10 蓝思科技(东莞)有限公司 Ncvm镀膜工艺

Similar Documents

Publication Publication Date Title
DE112015003283B4 (de) Abdeckglas
DE112016003678B4 (de) Glasplatte mit Antiverschmutzungsschicht
CN112358196A (zh) 一种光学玻璃表面蒸镀工艺
CN103753897A (zh) 一种宽角度宽带减反射镀膜玻璃
CN105866975A (zh) 变色树脂眼镜片及其制备方法
CN114153019B (zh) 一种红外隐身透波一体化超材料涂层及其制备方法
CN110591483A (zh) 一种高导电性水性汽车保险杠底漆及其制备方法
CN105859153A (zh) 一种防雾减反射可见光双功能镀膜玻璃及其制备方法
EP3463689A1 (en) 3c1b coating, method of applying the same and substrate coated therewith
CN111321380B (zh) 超疏水类金刚石复合层结构及其制备方法
CN105568227B (zh) 一种同质双层氧化铪减反膜及其制备方法
WO2023246119A1 (zh) 一种高熵合金粉末及其涂层和涂层的制备方法
CN112813391B (zh) 一种超宽波段红外长波通截止滤光膜制备方法
CN108149195A (zh) 一种超耐磨高透过率氧化锆薄膜的制备方法
CN108465700A (zh) 一种获得均匀组织和织构的溅射靶材用钽板轧制方法
CN111559151B (zh) 3d复合板材及其制备方法
CN106630660B (zh) 防雾玻璃及其制备方法
DE102004049996A1 (de) Aufdampfmaterial zur Herstellung hochbrechender Schichten
CN112030108A (zh) 一种有机-金属纳米复合薄膜及其制备方法和应用
CN110204203A (zh) 大理石玻璃制造工艺
CN113736357A (zh) 真空镀膜纳米白色浆中漆及其制备方法和应用
CN115542434A (zh) 一种增透复合薄膜及其制备方法
CN106191770B (zh) 多孔氮化硅基封孔涂层及其制备方法与应用
DE102016100914B4 (de) Verfahren zur Herstellung einer porösen Brechzahlgradientenschicht
CN109267034A (zh) 一种屏幕的制作方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20210212