CN112279679A - 碳复合构件 - Google Patents

碳复合构件 Download PDF

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Publication number
CN112279679A
CN112279679A CN202010696774.8A CN202010696774A CN112279679A CN 112279679 A CN112279679 A CN 112279679A CN 202010696774 A CN202010696774 A CN 202010696774A CN 112279679 A CN112279679 A CN 112279679A
Authority
CN
China
Prior art keywords
pyrolytic carbon
carbon layer
graphite substrate
pores
composite member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010696774.8A
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English (en)
Chinese (zh)
Inventor
小林智也
北口比吕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Publication of CN112279679A publication Critical patent/CN112279679A/zh
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/20—Graphite
    • C01B32/21—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00—Physical properties of inorganic compounds
    • C01P2006/16—Pore diameter

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Carbon And Carbon Compounds (AREA)
CN202010696774.8A 2019-07-23 2020-07-20 碳复合构件 Pending CN112279679A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-135431 2019-07-23
JP2019135431A JP2021017391A (ja) 2019-07-23 2019-07-23 炭素複合部材

Publications (1)

Publication Number Publication Date
CN112279679A true CN112279679A (zh) 2021-01-29

Family

ID=74420221

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010696774.8A Pending CN112279679A (zh) 2019-07-23 2020-07-20 碳复合构件

Country Status (3)

Country Link
JP (1) JP2021017391A (ko)
KR (1) KR102420277B1 (ko)
CN (1) CN112279679A (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115894080B (zh) * 2022-09-09 2024-03-19 湖南博云新材料股份有限公司 一种在石墨表面制备抗氧化涂层的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05285735A (ja) * 1992-04-13 1993-11-02 Ibiden Co Ltd 黒鉛製電解加工用電極
JP2002003285A (ja) * 2000-06-20 2002-01-09 Tokai Carbon Co Ltd ＳｉＣ被覆黒鉛部材およびその製造方法
JP2007012933A (ja) * 2005-06-30 2007-01-18 Ibiden Co Ltd 半導体製造装置用部材及び半導体製造装置
KR20150074790A (ko) * 2013-12-24 2015-07-02 하나머티리얼즈(주) 응력 완충층을 포함하는 SiC 코팅 탄소 부재 및 그 제조 방법
CN106083192A (zh) * 2016-06-08 2016-11-09 中国人民解放军国防科学技术大学 具有SiC涂层的石墨材料及其制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06166568A (ja) * 1987-05-22 1994-06-14 Ibiden Co Ltd 黒鉛治具
JP4619036B2 (ja) * 2004-05-10 2011-01-26 イビデン株式会社 炭素複合部材
JP6363909B2 (ja) * 2014-08-11 2018-07-25 イビデン株式会社 マッフル、焼成炉、及び、マッフルの製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05285735A (ja) * 1992-04-13 1993-11-02 Ibiden Co Ltd 黒鉛製電解加工用電極
JP2002003285A (ja) * 2000-06-20 2002-01-09 Tokai Carbon Co Ltd ＳｉＣ被覆黒鉛部材およびその製造方法
JP2007012933A (ja) * 2005-06-30 2007-01-18 Ibiden Co Ltd 半導体製造装置用部材及び半導体製造装置
KR20150074790A (ko) * 2013-12-24 2015-07-02 하나머티리얼즈(주) 응력 완충층을 포함하는 SiC 코팅 탄소 부재 및 그 제조 방법
CN106083192A (zh) * 2016-06-08 2016-11-09 中国人民解放军国防科学技术大学 具有SiC涂层的石墨材料及其制备方法

Also Published As

Publication number Publication date
KR102420277B1 (ko) 2022-07-13
JP2021017391A (ja) 2021-02-15
KR20210011884A (ko) 2021-02-02

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Application publication date: 20210129