CN112135707A - 薄膜结构的激光处理方法 - Google Patents

薄膜结构的激光处理方法 Download PDF

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Publication number
CN112135707A
CN112135707A CN201980021879.9A CN201980021879A CN112135707A CN 112135707 A CN112135707 A CN 112135707A CN 201980021879 A CN201980021879 A CN 201980021879A CN 112135707 A CN112135707 A CN 112135707A
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China
Prior art keywords
stack
laser
substrate
thin film
cut
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Pending
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CN201980021879.9A
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English (en)
Chinese (zh)
Inventor
B.海登
L.特纳
T.里斯布里杰
T.福利
N.里兹维
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Ilika Technology Co ltd
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Ilika Technology Co ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/04—Construction or manufacture in general
    • H01M10/0436—Small-sized flat cells or batteries for portable equipment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/06—Lead-acid accumulators
    • H01M10/12—Construction or manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/24—Alkaline accumulators
    • H01M10/28—Construction or manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/36—Accumulators not provided for in groups H01M10/05-H01M10/34
    • H01M10/38—Construction or manufacture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials
    • B23K2103/166—Multilayered materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/16—Composite materials
    • B23K2103/166—Multilayered materials
    • B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/18—Dissimilar materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic materials other than metals or composite materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Laser Beam Processing (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)
CN201980021879.9A 2018-04-03 2019-04-02 薄膜结构的激光处理方法 Pending CN112135707A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1805624.2A GB2572608A (en) 2018-04-03 2018-04-03 Laser processing method for thin film structures
GB1805624.2 2018-04-03
PCT/GB2019/050953 WO2019193330A1 (en) 2018-04-03 2019-04-02 Laser processing method for thin film structures

Publications (1)

Publication Number Publication Date
CN112135707A true CN112135707A (zh) 2020-12-25

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CN201980021879.9A Pending CN112135707A (zh) 2018-04-03 2019-04-02 薄膜结构的激光处理方法

Country Status (7)

Country Link
US (1) US12109651B2 (https=)
EP (1) EP3774161A1 (https=)
JP (1) JP7424641B2 (https=)
KR (1) KR102832158B1 (https=)
CN (1) CN112135707A (https=)
GB (1) GB2572608A (https=)
WO (1) WO2019193330A1 (https=)

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CN114740615A (zh) * 2022-04-11 2022-07-12 南京邮电大学 一种可调太赫兹衰减器及其制备方法
CN114953621A (zh) * 2022-05-26 2022-08-30 东莞市光钛科技有限公司 一种垂直丝状排列的薄膜型导热材料及其制备方法
CN115519259A (zh) * 2022-10-22 2022-12-27 长沙大科激光科技有限公司 一种高频电流辅助双光束激光切割方法

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DE102019216070A1 (de) * 2019-10-18 2021-04-22 Trumpf Laser- Und Systemtechnik Gmbh Verfahren zum Bearbeiten einer Lithiumfolie oder einer mit Lithium beschichteten Metallfolie mittels eines Laserstrahls
US11984599B2 (en) * 2019-11-27 2024-05-14 GM Global Technology Operations LLC Electrode components with laser induced surface modified current collectors and methods of making the same
KR20210141870A (ko) * 2020-05-14 2021-11-23 삼성전자주식회사 웨이퍼 처리 장치 및 이를 이용한 반도체 소자 제조 방법
CN112662864B (zh) * 2020-12-11 2022-06-21 浙江工业大学 一种薄钢板的水下淬火方法
WO2022203916A2 (en) 2021-03-23 2022-09-29 Clerio Vision, Inc. Coordinated scanning and power control of laser for forming structures in ophthalmic lenses
DE102021202964A1 (de) 2021-03-25 2022-09-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Verfahren und Vorrichtung zum Schneiden einer metallhaltigen Folie und Laser-geschnittene metallhaltige Folie
CN114290698B (zh) * 2021-12-24 2023-01-31 华中科技大学 高分子薄膜大深宽比激光加工方法
CN115360318B (zh) * 2022-09-14 2025-07-15 大连大学 硫化锌离子电池负极材料的改性方法
KR102759257B1 (ko) * 2023-01-06 2025-01-23 주식회사 에스에프에이 기판 레이저 커팅 장치 및 기판 레이저 커팅 방법
KR102926416B1 (ko) * 2023-02-16 2026-02-11 국립공주대학교 산학협력단 비전도성 패턴을 포함하는 이온교환막의 제조방법 및 이에 의해 제조된 이온교환막
EP4585354A1 (en) * 2024-01-10 2025-07-16 Toyota Jidosha Kabushiki Kaisha Method for cutting a stack of several layers
DE102024207809B3 (de) * 2024-08-15 2025-12-11 Volkswagen Aktiengesellschaft Verfahren zum Trennen einer Stoffschlussverbindung zwischen einem Zellverbinder und einer Batteriezelle
CN120164761A (zh) * 2025-03-12 2025-06-17 东莞市竞沃电子科技有限公司 一种表贴式厚膜熔断器及其制备方法

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CN101490819A (zh) * 2006-05-25 2009-07-22 伊雷克托科学工业股份有限公司 极短激光脉冲刻划
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114740615A (zh) * 2022-04-11 2022-07-12 南京邮电大学 一种可调太赫兹衰减器及其制备方法
CN114953621A (zh) * 2022-05-26 2022-08-30 东莞市光钛科技有限公司 一种垂直丝状排列的薄膜型导热材料及其制备方法
CN115519259A (zh) * 2022-10-22 2022-12-27 长沙大科激光科技有限公司 一种高频电流辅助双光束激光切割方法
CN115519259B (zh) * 2022-10-22 2024-05-24 长沙大科激光科技有限公司 一种高频电流辅助双光束激光切割方法

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Publication number Publication date
US20210101231A1 (en) 2021-04-08
WO2019193330A1 (en) 2019-10-10
KR102832158B1 (ko) 2025-07-09
EP3774161A1 (en) 2021-02-17
KR20200136391A (ko) 2020-12-07
US12109651B2 (en) 2024-10-08
GB2572608A (en) 2019-10-09
JP7424641B2 (ja) 2024-01-30
JP2021528249A (ja) 2021-10-21

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