CN111876777A - 一种刻蚀设备约束环的制造工艺 - Google Patents
一种刻蚀设备约束环的制造工艺 Download PDFInfo
- Publication number
- CN111876777A CN111876777A CN202010720923.XA CN202010720923A CN111876777A CN 111876777 A CN111876777 A CN 111876777A CN 202010720923 A CN202010720923 A CN 202010720923A CN 111876777 A CN111876777 A CN 111876777A
- Authority
- CN
- China
- Prior art keywords
- ring
- precision
- ring groove
- cleaning
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 title claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000004140 cleaning Methods 0.000 claims abstract description 17
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000012545 processing Methods 0.000 claims abstract description 11
- 238000003754 machining Methods 0.000 claims abstract description 10
- 238000007514 turning Methods 0.000 claims abstract description 7
- 239000011248 coating agent Substances 0.000 claims abstract description 6
- 238000000576 coating method Methods 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 238000005406 washing Methods 0.000 claims description 19
- 238000005507 spraying Methods 0.000 claims description 13
- 239000002253 acid Substances 0.000 claims description 6
- 238000005488 sandblasting Methods 0.000 claims description 6
- 238000002791 soaking Methods 0.000 claims description 6
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000000861 blow drying Methods 0.000 claims description 2
- 229910052593 corundum Inorganic materials 0.000 claims description 2
- 239000010431 corundum Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 238000004321 preservation Methods 0.000 claims description 2
- 238000003801 milling Methods 0.000 abstract description 3
- 238000013461 design Methods 0.000 abstract description 2
- 238000012827 research and development Methods 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 3
- 239000003513 alkali Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
Abstract
本发明是一种刻蚀设备约束环的制造工艺，其特征在于，集精密加工，精密清洗，硬质阳极，氧化钇涂层多种先进工艺于一体的关键零部件制造工艺；其中在零件的机械加工过程，精密加工采用精车环槽；环槽的尺寸外径直径为φ500mm圆，环槽宽度2.5±0.01mm，共有10组环槽，层层相连，形成约束环；环槽的精密加工使用刀具为名古屋刀具。本发明工艺的成功研发，使精密机械零部件的加工工艺，巧妙的车铣配合，精密的特殊刀具的设计，使本发明效率和加工质量得到提高。
Description
技术领域
本发明涉及一种刻蚀设备精密零部件，是干法刻蚀设备中用于控制等离子体的均匀性和压强水平的关键核心零部件。
背景技术
气体与射频功率相互作用形成的等离子体通过约束环控制进而形成约束腔区域。本发明重点结介绍了一款约束环零件的机械加工，精密清洗，硬质阳极，氧化钇喷涂等多种制造工艺。
发明内容
本发明的目的是提供一种刻蚀设备约束环的制造工艺。
本发明采用的技术方案是：
一种刻蚀设备约束环的制造工艺，集精密加工，精密清洗，硬质阳极，氧化钇涂层多种先进工艺于一体的关键零部件制造工艺；
其中在零件的机械加工过程，精密加工采用精车环槽；环槽的尺寸外径直径为φ500mm圆，环槽宽度2.5±0.01mm，共有10组环槽，层层相连，形成约束环；环槽的精密加工使用刀具为名古屋刀具。
精密清洗具体要求为：
高压清洗40-60'，950-1050psi，保湿转入百级无尘室2-20'，超声波清洗，震荡15-20'，浸泡90-95'，8-12W/in2；
重复高压清洗40-60'，950-1050psi，超声波清洗，震荡15-20'，浸泡60-75'，8-12W/in2循环两次，备注：水温小于50℃。
硬质阳极工艺：
电流密度2.5A/dm2，升流20min，温度-1～1℃；
脱脂10-30'，70-75℃，水洗60-90"，碱咬10-80"，32-38℃；碱水洗60-90"，酸洗5-20"，酸水洗60-90"，硬阳，水洗60-90"，纯水封孔300’-360’，92-99℃，水洗60-90"，CDA吹干。
氧化钇涂层喷涂工艺：
喷砂：使用20#白刚玉，喷砂压力20-100PSI，角度25°，喷嘴距离工件5-10cm，移动速度3-7cm/秒，要求Ra为200-250μin3；
氧化钇喷涂转盘转速40-64r/min，进行喷涂，保证整体在150-250um。
本发明的有益效果是：
1、本发明工艺的成功研发，使精密机械零部件的加工工艺，巧妙的车铣配合，精密的特殊刀具的设计，使本发明效率和加工质量得到提高。
2、本发明工艺的成功研发，将精密清洗，硬质阳极，氧化钇喷涂等多种技术应用于同一款精密加工零件，实现精密零部件复杂表面处理。
具体实施方式
本发明涉及一种刻蚀设备精密零部件，集精密加工，精密清洗，硬质阳极，氧化钇涂层等多种先进工艺于一体的关键零部件，其中在零件的机械加工过程，主要加工工序为粗车加工，铣加工，精车环槽。环槽的尺寸外径直径为φ500mm圆，环槽宽度2.5±0.01mm，共有10组环槽，层层相连，形成约束环。环槽的精密加工使用刀具为特殊订制的名古屋刀具。
精密清洗，其具体要求为：高压清洗(40',40-60'，950-1050psi)-保湿转入百级无尘室(10',2-20'，)；超声波清洗(震荡15-20'，浸泡90-95'，8-12W/in2)-E2高压清洗(40',40-60'，950-1050psi)；超声波清洗(震荡15-20'，浸泡60-75'，8-12W/in2循环两次)备注：水温不得超过50℃
硬质阳极工艺：电流密度2.5A/dm2；升流20min；温度0℃(-1～1℃)；脱脂(20',10-30'，70℃，70-75℃)；水洗(60",60-90")；碱咬(50",10-80"，35℃，32-38℃)；碱水洗(60",60-90")；酸洗(5",5-20")；酸水洗(60",60-90")；硬阳(时间以实际膜厚为准)-A18水洗(60",60-90")；纯水封孔(300’，300’-360’，92-99℃)；水洗(60",60-90")-CDA吹干
氧化钇喷涂工艺：喷砂：使用20#白刚玉(AL2O3)，喷砂压力20-100PSI，角度25°，喷嘴距离工件5-10cm，移动速度3-7cm/秒，要求Ra为200-250μin3。
氧化钇喷涂转盘转速40-64r/min，选用对应编程路线，进行喷涂。保证整体在150-250um。
遮蔽采用的是硅胶进行遮蔽，避免遮蔽胶带或铝箔遮蔽，引起渗漏。ICPMS测试和PC测试，零件经过测试，满足客户图纸要求，无荧光。
Claims (4)
1.一种刻蚀设备约束环的制造工艺，其特征在于，集精密加工，精密清洗，硬质阳极，氧化钇涂层多种先进工艺于一体的关键零部件制造工艺；
其中在零件的机械加工过程，精密加工采用精车环槽；环槽的尺寸外径直径为φ500mm圆，环槽宽度2.5±0.01mm，共有10组环槽，层层相连，形成约束环；环槽的精密加工使用刀具为名古屋刀具。
2.按照权利要求1所述一种刻蚀设备约束环的制造工艺，其特征在于，精密清洗具体要求为：
高压清洗40-60'，950-1050psi，保湿转入百级无尘室2-20'，超声波清洗，震荡15-20'，浸泡90-95'，8-12W/in2；
重复高压清洗40-60'，950-1050psi，超声波清洗，震荡15-20'，浸泡60-75'，8-12W/in2循环两次，备注：水温小于50℃。
3.按照权利要求1所述一种刻蚀设备约束环的制造工艺，其特征在于，硬质阳极工艺：
电流密度2.5A/dm2，升流20min，温度-1～1℃；
脱脂10-30'，70-75℃，水洗60-90"，碱咬10-80"，32-38℃；碱水洗60-90"，酸洗5-20"，酸水洗60-90"，硬阳，水洗60-90"，纯水封孔300’-360’，92-99℃，水洗60-90"，CDA吹干。
4.按照权利要求1所述一种刻蚀设备约束环的制造工艺，其特征在于，氧化钇涂层喷涂工艺：
喷砂：使用20#白刚玉，喷砂压力20-100PSI，角度25°，喷嘴距离工件5-10cm，移动速度3-7cm/秒，要求Ra为200-250μin3；
氧化钇喷涂转盘转速40-64r/min，进行喷涂，保证整体在150-250um。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010720923.XA CN111876777A (zh) | 2020-07-24 | 2020-07-24 | 一种刻蚀设备约束环的制造工艺 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010720923.XA CN111876777A (zh) | 2020-07-24 | 2020-07-24 | 一种刻蚀设备约束环的制造工艺 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111876777A true CN111876777A (zh) | 2020-11-03 |
Family
ID=73201241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010720923.XA Pending CN111876777A (zh) | 2020-07-24 | 2020-07-24 | 一种刻蚀设备约束环的制造工艺 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111876777A (zh) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060207502A1 (en) * | 2005-03-18 | 2006-09-21 | Rajinder Dhindsa | Plasma confinement ring assemblies having reduced polymer deposition characteristics |
| CN102078969A (zh) * | 2010-12-09 | 2011-06-01 | 福州钜全汽车配件有限公司 | 一种活塞外径和端面及环沟沟槽倒角一次加工成型方法 |
| CN102091912A (zh) * | 2010-12-17 | 2011-06-15 | 贵阳险峰机床有限责任公司 | 精密锥套轴瓦加工方法 |
| CN105887151A (zh) * | 2016-05-23 | 2016-08-24 | 沈阳富创精密设备有限公司 | 耐腐蚀性硫酸硬质阳极氧化工艺 |
| CN108058001A (zh) * | 2017-12-18 | 2018-05-22 | 中国航发贵州黎阳航空动力有限公司 | 一种传动组件垂直相交精密内环槽加工方法 |
| CN109440052A (zh) * | 2018-11-29 | 2019-03-08 | 沈阳富创精密设备有限公司 | 一种大气等离子体喷涂氧化钇涂层的复合涂层制备方法 |
| CN111408830A (zh) * | 2020-03-30 | 2020-07-14 | 沈阳富创精密设备有限公司 | 一种cvd设备超精密零件的加工工艺 |
-
2020
- 2020-07-24 CN CN202010720923.XA patent/CN111876777A/zh active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060207502A1 (en) * | 2005-03-18 | 2006-09-21 | Rajinder Dhindsa | Plasma confinement ring assemblies having reduced polymer deposition characteristics |
| CN102078969A (zh) * | 2010-12-09 | 2011-06-01 | 福州钜全汽车配件有限公司 | 一种活塞外径和端面及环沟沟槽倒角一次加工成型方法 |
| CN102091912A (zh) * | 2010-12-17 | 2011-06-15 | 贵阳险峰机床有限责任公司 | 精密锥套轴瓦加工方法 |
| CN105887151A (zh) * | 2016-05-23 | 2016-08-24 | 沈阳富创精密设备有限公司 | 耐腐蚀性硫酸硬质阳极氧化工艺 |
| CN108058001A (zh) * | 2017-12-18 | 2018-05-22 | 中国航发贵州黎阳航空动力有限公司 | 一种传动组件垂直相交精密内环槽加工方法 |
| CN109440052A (zh) * | 2018-11-29 | 2019-03-08 | 沈阳富创精密设备有限公司 | 一种大气等离子体喷涂氧化钇涂层的复合涂层制备方法 |
| CN111408830A (zh) * | 2020-03-30 | 2020-07-14 | 沈阳富创精密设备有限公司 | 一种cvd设备超精密零件的加工工艺 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109092792A (zh) | 一种陶瓷基片表面处理方法 | |
| JP2009249741A (ja) | プラズマビームによる基体の被覆及び表面処理のための方法及び装置 | |
| CN105543760A (zh) | 高温高压氧阀密封面耐磨涂层的制备方法 | |
| CN111876777A (zh) | 一种刻蚀设备约束环的制造工艺 | |
| CN103212525A (zh) | 一种家具的油漆工艺方法 | |
| CN108081070A (zh) | 一种数控小工具抛光辅助大气等离子体加工方法 | |
| CN109082623B (zh) | 一种干法刻蚀下部电极表面凸点的制作方法 | |
| CN110655333A (zh) | 一种玻璃表面的磨砂处理工艺 | |
| CN110512253B (zh) | 一种用于加热基座阳极氧化前的表面处理工艺 | |
| TWI818950B (zh) | 用於抗電漿塗層塗布之表面選擇性圖案化方法 | |
| CN111778469A (zh) | 一种提高轻合金零件表面热喷涂涂层结合强度的方法 | |
| CN103132002B (zh) | 一种黑色y2o3陶瓷涂层的制备方法 | |
| CN113584421A (zh) | 一种增强氧化钇涂层与基材表面结合强度的方法 | |
| CN109055883A (zh) | 铝合金机匣带凸台内壁局部等离子喷涂NiCrAlY涂层的方法和应用 | |
| CN103132003B (zh) | 一种半导体设备中黑色y2o3陶瓷涂层制造方法 | |
| CN112203422A (zh) | 一种印制线路板覆盖膜的表面处理方法 | |
| CN110592577B (zh) | 一种在碳材料表面激光熔覆制备二氧化硅玻璃涂层的方法 | |
| CN113414022A (zh) | 一种用于喷涂粉末的喷管及喷涂装置 | |
| CN110947605A (zh) | 一种注塑件表面喷涂工艺 | |
| CN104152841A (zh) | 一种碳套辊辊芯的表面处理工艺 | |
| CN104907919A (zh) | 一种基于研磨盘表面自生长的连续研磨机构 | |
| CN108406229A (zh) | 一种锆基非晶局部高光的加工方法 | |
| KR102649715B1 (ko) | 표면 처리 장치 및 표면 처리 방법 | |
| CN116770386A (zh) | 一种腔室内壁的保护层制备方法 | |
| CN103132006B (zh) | 一种等离子氢处理制备黑色y2o3陶瓷涂层的方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: No.18a-1, Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang fuchuang precision equipment Co.,Ltd. Address before: No.18a-1, Feiyun Road, Dongling District, Shenyang, Liaoning Province, 110000 Applicant before: Shenyang Fortune Precision Equipment Co.,Ltd. |
|
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20201103 |