CN111868481A - 光学测量装置的标尺元件 - Google Patents

光学测量装置的标尺元件 Download PDF

Info

Publication number
CN111868481A
CN111868481A CN201980014437.1A CN201980014437A CN111868481A CN 111868481 A CN111868481 A CN 111868481A CN 201980014437 A CN201980014437 A CN 201980014437A CN 111868481 A CN111868481 A CN 111868481A
Authority
CN
China
Prior art keywords
scale element
reflective layer
sensor system
light
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980014437.1A
Other languages
English (en)
Inventor
赖纳·格洛斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Physik Instrumente PI GmbH and Co KG
Original Assignee
Physik Instrumente PI GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physik Instrumente PI GmbH and Co KG filed Critical Physik Instrumente PI GmbH and Co KG
Publication of CN111868481A publication Critical patent/CN111868481A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/264—Mechanical constructional elements therefor ; Mechanical adjustment thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G01D5/34794—Optical encoders using the Vernier principle, i.e. incorporating two or more tracks having a (n, n+1, ...) relationship
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

本发明涉及一种用于光学测量装置的标尺元件，所述光学测量装置包括增量式编码器和干涉型传感器系统，所述标尺元件在所述标尺元件的一个表面上具有反射层，所述反射层设置成与干涉型传感器系统配合，并且所述标尺元件还具有实物量具，所述实物量具在指向远离反射层的方向上并与反射层相距一距离布置，并且被设置为与增量式传感器系统配合，所述反射层被设计为使得反射层对于某些波长的光是透射的，而对于其他波长的光是反射的。

Description

光学测量装置的标尺元件
技术领域
本发明涉及根据权利要求1至4的用于光学测量装置的标尺元件，所述光学测量装置包括两个不同的传感器系统，即增量式编码器和干涉型传感器系统。此外，本发明涉及具有这种测量装置的定位装置。
背景技术
用于检测包括多个自由度的定位元件的位置和方位的测量装置，通常使用具有相关标尺元件的传感器系统。传感器系统可以根据电容、电感或光学原理工作。如果传感器系统的测量范围超出要求的分辨率超过100,000倍，则需要增量系统。对于纳米或皮米范围内的分辨率，通常使用光学增量传感器系统。
在用于相对于三个自由度(即在彼此垂直且在同一平面中的两个方向X和Y上的平移以及围绕垂直于X和Y的方向Z的旋转)检测定位元件的位置和方位的测量装置中，光学增量式编码器具有优势，因为它们容许高分辨率和大的行程范围。这种增量式编码器的传感器头能够设计成允许几毫米的大距离公差。因此，它们使得能够使用附加的增量传感器来确定例如三个点处的高度或距离，从而也确定定位元件围绕X和Y轴的倾斜度。这也称为对定位元件的翻倾位置或翻倾角度的检测或测量。
光学干涉型传感器系统优选地用于确定定位元件在Z方向上的平移和翻倾角度。这样的传感器系统可用于确定下至皮米范围的平移或距离变化或倾斜。
例如，通过将光学增量式编码器和光学干涉型传感器系统结合起来，可以检测6D定位装置的平台在三个空间方向(X，Y，Z)上的平移以及围绕三个空间轴X、Y和Z的旋转(即倾斜或翻倾角度和旋转角度)。
在光学增量式编码器中，标尺元件通常包括实物量具，该实物量具通常由布置在标尺元件的表面或定位元件的表面上的、呈多个点的形式的大致二维网格(也称为2D网格)形成。增量式编码器的光源的光在该网格或2D网格处反射，从而可以从如此反射的光的测量信号确定定位元件的位置变化。实物量具的第三个尺寸(即，其厚度或单个点的厚度)，对相应的位置测量没有影响或影响可以忽略不计。
在光学干涉型传感器系统中，标尺元件通常包括反射面，光学干涉型传感器系统的光源的光在该反射面上被反射，由此，除其他外，相应测量位置处的距离变化可以从不同引导的光束的传播时间差异中推断出。
US 7 292 312 B2描述了一种用于控制或调节衬底台的运动的光学测量装置，该光学测量装置具有至少三个干涉仪编码器系统的组合，并且这些干涉仪编码器系统中的每个包括一维或二维编码器网格、光学传感器和干涉仪。这三个干涉仪编码器系统的组合提供了至少六个位置值，借助它们可以确定衬底台的位置和方位。
US 2004/0263846 A1公开了一种用于检测掩模台在至少一个平面中的位置的测量装置，该测量装置包括至少一个光学编码器读取头，该光学编码器读取头与安装在掩模台上的相应衍射光栅相互作用。为了检测掩模台的其他位置数据，US 2004/0263846 A1提出了使用电容式或光学距离传感器。
在包括光学增量式编码器和光学干涉型传感器系统的组合传感器系统的情况下，可以想到的是，两个传感器系统中的每一个针对唯一并分配给它的尺寸元素进行操作或测量。但是，出于紧凑性和较低的复杂性的原因，两个传感器系统仅相对于一个共同的标尺元件工作或测量是更有利的。然而，如果两个传感器系统都针对标尺元件的同一表面(标尺元件和反射层都布置在该表面上)测量，则会导致某些缺点。这些主要是由于以下事实：光学干涉型传感器系统的测量受到增量式编码器的实物量具的负面影响。这是因为，即使是小厚度或沿着二维网格的排列的变动厚度也会影响高精度的光学干涉测量。例如，在二维网格或XY网格的反射点区域中，测量光学干涉型传感器系统的传感器头与测量或定位元件之间的距离，该距离根据点的高度而小于两个相邻或邻近点之间的区域中的距离。
US 8 760 622 B2通过如下建议来避免该问题：在定位元件的与用于反射干涉型传感器系统的光的表面不同的表面上设置增量式编码器的实物量具。然而，实物量具和反射表面之间的对应间隔的布置的缺点是违反了阿贝原则，并且必须为测量系统提供额外的空间。此外，该布置不适合与小型传感器头一起使用以测量增量式编码器范围内的距离。
发明内容
因此，本发明的目的是提供一种用于光学测量装置的标尺元件，所述光学测量装置包括增量式编码器和干涉型传感器系统的组合，其中增量式编码器和干涉型传感器系统都可以针对标尺元件的同一表面测量，而干涉型传感器系统的测量不受增量式编码器的实物量具的影响。
该目的通过根据权利要求1的标尺元件来解决，由此接下来的从属权利要求至少代表了有用的进一步发展。
根据本发明的标尺元件的特征在于，在其一个表面上具有反射层，所述反射层被设置用于与干涉型传感器系统相互作用，并且所述标尺元件还具有实物量具，所述实物量具在远离反射层的方向上并与反射层相距一距离布置并且被设置为与增量式编码器配合，所述反射层对于第一波长范围的某些波长的光基本上是透明的，而对于第二波长范围的其他波长的光是完全或部分透明的，所述第一波长范围和第二波长范围彼此不同。
因为实物量具不在反射层的同一平面上形成，而是在远离反射层的方向上相距一距离，所以增量式编码器的实物量具对通过干涉型传感器系统检测到的测量信号没有负面影响。但是，这只能与对光波长部分透明的反射层结合，以使第一波长范围的增量式编码器的波长几乎不受阻碍地穿过反射层，并且仅由其下方的实物量具反射，然而，第二波长范围的干涉型传感器系统的波长被反射层完全或几乎完全反射。
有利的是，将实物量具放置在标尺元件的与设有反射层的表面相反的表面上。这使得制造标尺元件相对容易。
标尺元件包括玻璃状材料的衬底也可以是有利的。这确保了穿透实物量具的增量式编码器的波长不会衰减或只会非常轻微地衰减。
此外，衬底由硬化的蓝宝石玻璃组成是有利的。可以以十分之几毫米的厚度生产同时具有相对大的尺寸，而在其使用过程中没有任何不利的变形。
还可以有利的是，标尺元件的布置有反射层的表面具有十分之几毫米至几微米的平坦度，因为该表面形成了干涉型传感器系统的基准。这使得原本对平面度误差的通常映射的工作最小化。
本发明还涉及一种光学测量装置，其尤其用于定位元件的高精度位置和/或方位检测，该光学测量装置具有增量式编码器、干涉型传感器系统以及根据前述权利要求之一所述的标尺元件。
在此有利的是，增量式编码器包括读取头、用于发射第一波长的光的第一光源以及与读取头相关联的标尺元件的实物量具，并且干涉型传感器系统包括：传感器头、用于发射第二波长的光的第二光源以及与传感器头相关联的标尺元件的反射层，所述反射层与读取头和标尺元件二者均相关联，并且还面向传感器头，并且所述反射层对于第一波长的光是透射的并且对于第二波长的光是反射的，其中，干涉型传感器系统使用由反射层反射并且由传感器头检测到的第二波长的光进行测量，并且增量式编码器使用由实物量具反射并由读取头检测到的第一波长的光进行测量。
标尺元件优选是板形的，并且增量式编码器适合于检测标尺元件在其限定的平面内的位置和方位。此外，干涉型传感器系统优选地适于检测垂直于由该标尺元件限定的平面的标尺元件的位置，以及由于绕彼此垂直延伸并且在标尺元件的平面中的两个轴之一的旋转而引起的标尺元件的位置。
可以证明干涉型传感器系统具有至少三个传感器头是有利的。这使得可以测量距离和翻倾/倾斜角度。
最后，本发明涉及一种具有定位元件和根据前述权利要求中的一项所述的光学测量装置的定位装置，所述标尺元件布置在所述定位元件上或作为所述定位元件的主要部分，并且定位元件的位置或方位或者定位元件的位置和方位能够借助于光学测量装置来推断。
附图说明
下面根据所附的单个附图1描述本发明的实施例。该附图示出了根据本发明的具有板状几何形状的标尺元件1。
具体实施方式
衬底2由硬化的蓝宝石玻璃组成。在图1中的衬底2的面向上的表面上，在整个表面上布置有二维网格或2D网格3形式的标尺元件3。反射层4布置在衬底2的与2D网格3相反的表面上。反射层4在1550nm的光波长下具有高的光学反射并且在640nm的光波长下具有高的透射率。

Claims (9)

1.一种用于光学测量装置的标尺元件(1)，所述光学测量装置包括增量式编码器和干涉型传感器系统，其中，所述标尺元件(1)在其一个表面上具有反射层(4)，所述反射层被设置用于与所述干涉型传感器系统配合，并且所述标尺元件(1)还具有实物量具(3)，所述实物量具(3)在远离反射层(4)的方向上并与反射层(4)隔开布置，并设置为与所述增量式编码器配合，所述反射层(4)对于某些波长的光是透明的，而对于其他波长的光是反射的。
2.根据权利要求1所述的标尺元件，其特征在于，所述实物量具(3)布置在所述标尺元件(1)的与设有所述反射层(4)的表面相反的表面上。
3.根据权利要求1或2所述的标尺元件，其特征在于，所述标尺元件(1)包括玻璃状材料的衬底(2)。
4.根据权利要求3所述的标尺元件，其特征在于，所述衬底(2)由硬化的蓝宝石玻璃组成。
5.一种测量装置，尤其用于定位元件的高精度位置和/或方位检测，其包括增量式编码器、干涉型传感器系统和根据前述权利要求中的一项所述的标尺元件。
6.根据权利要求5所述的测量装置，其特征在于，所述增量式编码器包括读取头、用于发射第一波长的光的第一光源以及与所述读取头相关联的所述标尺元件(1)的实物量具(3)，并且所述干涉型传感器系统包括传感器头、用于发射第二波长的光的第二光源以及与传感器头相关联的所述标尺元件(1)的反射层(4)，所述反射层(4)面对读取头和传感器头两者，并且所述反射层(4)对于第一波长的光是透射的而对于第二波长的光是反射的，其中所述干涉型传感器系统使用由所述反射层(4)反射并由所述传感器头检测的第二波长的光进行测量，并且所述增量式编码器使用由测量体(3)反射并由读取头检测的第一波长的光进行测量。
7.根据权利要求6所述的测量装置，其特征在于，所述标尺元件(1)是板状的，并且所述增量式编码器被布置为检测所述标尺元件(1)在由所述标尺元件(1)限定的平面内的位置和方位，并且所述干涉型传感器系统设置为检测垂直于由所述标尺元件(1)限定的平面的所述标尺元件(1)的位置以及由于绕彼此垂直延伸并且在标尺元件的平面中的两个轴之一的旋转而引起的标尺元件的方位。
8.根据权利要求5至7中的一项所述的测量装置，其特征在于，所述干涉型传感器系统具有至少三个传感器头。
9.一种具有定位元件和根据前述权利要求5至8中的一项所述的测量装置的定位装置，其中，所述标尺元件(1)布置在所述定位元件上或者是所述定位元件的主要部分，并且借助于所述测量装置，能够推断出所述定位元件的位置或方位或者所述定位元件的位置和方位。
CN201980014437.1A 2018-02-21 2019-02-19 光学测量装置的标尺元件 Pending CN111868481A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102018103869.0 2018-02-21
DE102018103869.0A DE102018103869B3 (de) 2018-02-21 2018-02-21 Maßelement für eine optische Messvorrichtung
PCT/DE2019/100157 WO2019161843A1 (de) 2018-02-21 2019-02-19 MAßELEMENT FÜR EINE OPTISCHE MESSVORRICHTUNG

Publications (1)

Publication Number Publication Date
CN111868481A true CN111868481A (zh) 2020-10-30

Family

ID=65685081

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980014437.1A Pending CN111868481A (zh) 2018-02-21 2019-02-19 光学测量装置的标尺元件

Country Status (9)

Country Link
US (1) US20200386580A1 (zh)
EP (1) EP3755973B1 (zh)
JP (2) JP2021514471A (zh)
KR (1) KR20200121346A (zh)
CN (1) CN111868481A (zh)
DE (1) DE102018103869B3 (zh)
IL (1) IL276829B2 (zh)
SG (1) SG11202007902TA (zh)
WO (1) WO2019161843A1 (zh)

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002122473A (ja) * 2000-10-13 2002-04-26 Hochiki Corp 赤外線検出器
JP2002542616A (ja) * 1999-04-21 2002-12-10 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 集積されたオプトロニック薄膜センサ及びその製造方法
US20040263846A1 (en) * 2000-08-24 2004-12-30 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufacturing thereby
US20070114370A1 (en) * 2003-10-10 2007-05-24 Smith Ronald H Fiber optic remote reading encoder
US7292312B2 (en) * 2004-07-27 2007-11-06 Asml Netherlands B.V. Lithographic apparatus and method for calibrating the same
JP2009016412A (ja) * 2007-07-02 2009-01-22 Nikon Corp 計測方法、設定方法及びパターン形成方法、並びに移動体駆動システム及びパターン形成装置
JP2010245087A (ja) * 2009-04-01 2010-10-28 Canon Inc ステージ装置及び露光装置
JP2011047867A (ja) * 2009-08-28 2011-03-10 Nikon Corp スケール体、位置検出装置、ステージ装置、及び露光装置
EP2367058A1 (en) * 2010-03-17 2011-09-21 Université Jean-Monnet Fabrication method of cylindrical gratings
CN103791844A (zh) * 2014-01-20 2014-05-14 浙江大学 光学位移测量系统
US8760622B2 (en) * 2007-12-11 2014-06-24 Nikon Corporation Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method
EP2930472A1 (en) * 2014-04-10 2015-10-14 Kabushiki Kaisha Yaskawa Denki Encoder, encoder-equipped motor, and servo system
US20170146402A1 (en) * 2015-11-24 2017-05-25 Trutag Technologies, Inc. Tag reading using targeted spatial spectral detection
JP2017123271A (ja) * 2016-01-07 2017-07-13 株式会社荏原製作所 磁場レンズおよびこれを有する検査装置、ならびに、ホイルコイルの製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7166833B2 (en) * 2003-10-10 2007-01-23 Optelecom-Nkf Fiber optic remote reading encoder
US7515281B2 (en) * 2005-04-08 2009-04-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
TWI425318B (zh) * 2006-06-09 2014-02-01 尼康股份有限公司 移動體裝置、曝光裝置和曝光方法以及元件製造方法
EP2095065A4 (en) * 2006-11-15 2010-11-24 Zygo Corp MEASURING SYSTEMS FOR DISTANCE MEASUREMENT INTERFEROMETER AND COORDINATOR FOR LITHOGRAPHY TOOL
US8115906B2 (en) * 2007-12-14 2012-02-14 Nikon Corporation Movable body system, pattern formation apparatus, exposure apparatus and measurement device, and device manufacturing method
US8456650B2 (en) * 2008-09-09 2013-06-04 Cornell University Optical grid for high precision and high resolution method of wafer-scale nanofabrication
KR101725529B1 (ko) * 2010-03-30 2017-04-10 지고 코포레이션 간섭계 인코더 시스템
JP5936357B2 (ja) * 2012-01-06 2016-06-22 株式会社ミツトヨ 姿勢検出器、接触プローブ、および、マルチセンシングプローブ
US9529280B2 (en) * 2013-12-06 2016-12-27 Kla-Tencor Corporation Stage apparatus for semiconductor inspection and lithography systems
CN111609872B (zh) * 2019-02-26 2022-04-15 迈来芯电子科技有限公司 用于旋转角度检测和3d操纵杆功能的传感器系统

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002542616A (ja) * 1999-04-21 2002-12-10 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 集積されたオプトロニック薄膜センサ及びその製造方法
US20040263846A1 (en) * 2000-08-24 2004-12-30 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufacturing thereby
JP2002122473A (ja) * 2000-10-13 2002-04-26 Hochiki Corp 赤外線検出器
US20070114370A1 (en) * 2003-10-10 2007-05-24 Smith Ronald H Fiber optic remote reading encoder
US7292312B2 (en) * 2004-07-27 2007-11-06 Asml Netherlands B.V. Lithographic apparatus and method for calibrating the same
JP2009016412A (ja) * 2007-07-02 2009-01-22 Nikon Corp 計測方法、設定方法及びパターン形成方法、並びに移動体駆動システム及びパターン形成装置
US8760622B2 (en) * 2007-12-11 2014-06-24 Nikon Corporation Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method
JP2010245087A (ja) * 2009-04-01 2010-10-28 Canon Inc ステージ装置及び露光装置
JP2011047867A (ja) * 2009-08-28 2011-03-10 Nikon Corp スケール体、位置検出装置、ステージ装置、及び露光装置
EP2367058A1 (en) * 2010-03-17 2011-09-21 Université Jean-Monnet Fabrication method of cylindrical gratings
CN103791844A (zh) * 2014-01-20 2014-05-14 浙江大学 光学位移测量系统
EP2930472A1 (en) * 2014-04-10 2015-10-14 Kabushiki Kaisha Yaskawa Denki Encoder, encoder-equipped motor, and servo system
US20170146402A1 (en) * 2015-11-24 2017-05-25 Trutag Technologies, Inc. Tag reading using targeted spatial spectral detection
JP2017123271A (ja) * 2016-01-07 2017-07-13 株式会社荏原製作所 磁場レンズおよびこれを有する検査装置、ならびに、ホイルコイルの製造方法

Also Published As

Publication number Publication date
EP3755973A1 (de) 2020-12-30
US20200386580A1 (en) 2020-12-10
IL276829B2 (en) 2023-05-01
JP2021514471A (ja) 2021-06-10
EP3755973B1 (de) 2022-06-01
SG11202007902TA (en) 2020-09-29
KR20200121346A (ko) 2020-10-23
JP3240411U (ja) 2023-01-06
WO2019161843A1 (de) 2019-08-29
IL276829A (en) 2020-10-29
IL276829B1 (en) 2023-01-01
DE102018103869B3 (de) 2019-05-09

Similar Documents

Publication Publication Date Title
JP4800730B2 (ja) 変位測定のための干渉計システム及びこれを利用した露光装置
US7388674B2 (en) Laser tracking interferometer
US9080857B2 (en) Device for interferential distance measurement
US7858922B2 (en) Position-measuring device
JP6329456B2 (ja) 光学式位置測定装置
US9400168B2 (en) Device for distance measurement
US9677874B2 (en) Position-measuring device
JP6485992B2 (ja) 複数の位置測定装置を備えた装置
US9068811B2 (en) Device for determining distance interferometrically
US9291481B2 (en) Optical position-measuring device
IL271175A (en) Quick-tilt mirror calibration system and method
US20170160104A1 (en) Reflective encoder
JP3240411U (ja) 測定装置および位置決め装置
US11644348B2 (en) Optical position measuring device
JP6289609B2 (ja) 干渉式間隔測定装置
US11946782B2 (en) Optical position-measuring device for suppressing disturbing higher diffraction orders
JP5868058B2 (ja) 位置計測装置、光学部品の製造方法、および型の製造方法
KR100631821B1 (ko) 쐐기판의 이송을 이용한 가로 층밀리기 간섭계 및 그측정방법
JP5135183B2 (ja) 三次元形状測定装置
JP6005506B2 (ja) 光学的測定装置
JPH02184704A (ja) 測長装置
Thalmann 17 Straightness and Alignment

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20201030

WD01 Invention patent application deemed withdrawn after publication