SG11202007902TA - Scale element for an optical measuring device - Google Patents

Scale element for an optical measuring device

Info

Publication number
SG11202007902TA
SG11202007902TA SG11202007902TA SG11202007902TA SG11202007902TA SG 11202007902T A SG11202007902T A SG 11202007902TA SG 11202007902T A SG11202007902T A SG 11202007902TA SG 11202007902T A SG11202007902T A SG 11202007902TA SG 11202007902T A SG11202007902T A SG 11202007902TA
Authority
SG
Singapore
Prior art keywords
measuring device
optical measuring
scale element
scale
optical
Prior art date
Application number
SG11202007902TA
Other languages
English (en)
Inventor
Rainer Glöss
Original Assignee
Phys Instrumente Pi Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phys Instrumente Pi Gmbh & Co Kg filed Critical Phys Instrumente Pi Gmbh & Co Kg
Publication of SG11202007902TA publication Critical patent/SG11202007902TA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/264—Mechanical constructional elements therefor ; Mechanical adjustment thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G01D5/34794—Optical encoders using the Vernier principle, i.e. incorporating two or more tracks having a (n, n+1, ...) relationship
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Tests Of Electronic Circuits (AREA)
SG11202007902TA 2018-02-21 2019-02-19 Scale element for an optical measuring device SG11202007902TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018103869.0A DE102018103869B3 (de) 2018-02-21 2018-02-21 Maßelement für eine optische Messvorrichtung
PCT/DE2019/100157 WO2019161843A1 (de) 2018-02-21 2019-02-19 MAßELEMENT FÜR EINE OPTISCHE MESSVORRICHTUNG

Publications (1)

Publication Number Publication Date
SG11202007902TA true SG11202007902TA (en) 2020-09-29

Family

ID=65685081

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202007902TA SG11202007902TA (en) 2018-02-21 2019-02-19 Scale element for an optical measuring device

Country Status (9)

Country Link
US (1) US20200386580A1 (zh)
EP (1) EP3755973B1 (zh)
JP (2) JP2021514471A (zh)
KR (1) KR20200121346A (zh)
CN (1) CN111868481A (zh)
DE (1) DE102018103869B3 (zh)
IL (1) IL276829B2 (zh)
SG (1) SG11202007902TA (zh)
WO (1) WO2019161843A1 (zh)

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19917950A1 (de) * 1999-04-21 2000-10-26 Heidenhain Gmbh Dr Johannes Integrierter optoelektronischer Dünnschichtsensor und Verfahren zu dessen Herstellung
US7289212B2 (en) 2000-08-24 2007-10-30 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufacturing thereby
JP2002122473A (ja) * 2000-10-13 2002-04-26 Hochiki Corp 赤外線検出器
US20070114370A1 (en) * 2003-10-10 2007-05-24 Smith Ronald H Fiber optic remote reading encoder
US7166833B2 (en) * 2003-10-10 2007-01-23 Optelecom-Nkf Fiber optic remote reading encoder
US7256871B2 (en) 2004-07-27 2007-08-14 Asml Netherlands B.V. Lithographic apparatus and method for calibrating the same
US7515281B2 (en) * 2005-04-08 2009-04-07 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
CN101479832B (zh) * 2006-06-09 2011-05-11 株式会社尼康 移动体装置、曝光装置和曝光方法以及元件制造方法
WO2008061186A2 (en) * 2006-11-15 2008-05-22 Zygo Corporation Distance measuring interferometer and encoder metrology systems for use in lithography tools
JP2009016412A (ja) * 2007-07-02 2009-01-22 Nikon Corp 計測方法、設定方法及びパターン形成方法、並びに移動体駆動システム及びパターン形成装置
SG185261A1 (en) 2007-12-11 2012-11-29 Nikon Corp Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method
US8115906B2 (en) * 2007-12-14 2012-02-14 Nikon Corporation Movable body system, pattern formation apparatus, exposure apparatus and measurement device, and device manufacturing method
EP2340148A4 (en) * 2008-09-09 2012-05-02 Univ Cornell OPTICAL GRID FOR A HIGH-PRECISION AND HIGH-RESOLUTION METHOD FOR NANO-PRODUCTION IN SEMICONDUCTOR SIZE
JP2010245087A (ja) * 2009-04-01 2010-10-28 Canon Inc ステージ装置及び露光装置
JP5434379B2 (ja) * 2009-08-28 2014-03-05 株式会社ニコン スケール体、位置検出装置、ステージ装置、及び露光装置
EP2367058A1 (en) * 2010-03-17 2011-09-21 Université Jean-Monnet Fabrication method of cylindrical gratings
WO2011126610A2 (en) * 2010-03-30 2011-10-13 Zygo Corporation Interferometric encoder systems
JP5936357B2 (ja) * 2012-01-06 2016-06-22 株式会社ミツトヨ 姿勢検出器、接触プローブ、および、マルチセンシングプローブ
US9529280B2 (en) * 2013-12-06 2016-12-27 Kla-Tencor Corporation Stage apparatus for semiconductor inspection and lithography systems
CN103791844B (zh) * 2014-01-20 2016-08-17 浙江大学 光学位移测量系统
JP2015200613A (ja) * 2014-04-10 2015-11-12 株式会社安川電機 エンコーダ、エンコーダ付きモータ、サーボシステム
US10024717B2 (en) * 2015-11-24 2018-07-17 Trutag Technologies, Inc. Tag reading using targeted spatial spectral detection
JP2017123271A (ja) * 2016-01-07 2017-07-13 株式会社荏原製作所 磁場レンズおよびこれを有する検査装置、ならびに、ホイルコイルの製造方法
EP3702736B1 (en) * 2019-02-26 2023-08-02 Melexis Technologies SA Sensor system for rotation angular detection and 3d joystick function

Also Published As

Publication number Publication date
US20200386580A1 (en) 2020-12-10
IL276829A (en) 2020-10-29
KR20200121346A (ko) 2020-10-23
IL276829B2 (en) 2023-05-01
EP3755973B1 (de) 2022-06-01
WO2019161843A1 (de) 2019-08-29
JP2021514471A (ja) 2021-06-10
IL276829B1 (en) 2023-01-01
JP3240411U (ja) 2023-01-06
CN111868481A (zh) 2020-10-30
EP3755973A1 (de) 2020-12-30
DE102018103869B3 (de) 2019-05-09

Similar Documents

Publication Publication Date Title
DE112019006017A5 (de) Optische Messeinrichtung
GB2539017B (en) An optical measuring device
HUE040364T2 (hu) Tartószerkezet optikai mérõkészülékhez
IL282351A (en) An optical instrument for measuring the optical properties of materials
SG11202012319VA (en) Calibration device for weighing system
EP3777678A4 (en) MEASUREMENT DEVICE
IL279412A (en) A device for measuring distances
LT4058756T (lt) Padėties nustatymo prietaisas
IL268695B1 (en) Method and device for measuring optical distance
IL268230A (en) Method and device for optical distance measurement
EP3663727C0 (de) Strömungsmessverfahren und strömungsmessvorrichtung zur optischen strömungsmessung
EP3859322A4 (en) MEASUREMENT DEVICE
CA193659S (en) Cover for measuring instruments
IL264948B (en) Method and device for optical measurement of distance
IL264947A (en) Method and device for optical measurement of distance
GB201806491D0 (en) Surgical-tool angular measurement device
GB202315028D0 (en) Optical measurement device
FR3051109B1 (fr) Dispositif numerique de mesure physiologique
PL3742144T3 (pl) Urządzenie pomiarowe
IL276829A (en) A scale element for an optical measuring instrument
EP3789790C0 (en) DISTANCE MEASUREMENT DEVICE
IL272355A (en) Method and device for optical measurement of distances
EP3875941A4 (en) MEASUREMENT DEVICE
AU201816219S (en) Measuring device other than for measuring time
GB201910856D0 (en) Liquid measurement device