CN111719122A - Target - Google Patents
Target Download PDFInfo
- Publication number
- CN111719122A CN111719122A CN201910218002.0A CN201910218002A CN111719122A CN 111719122 A CN111719122 A CN 111719122A CN 201910218002 A CN201910218002 A CN 201910218002A CN 111719122 A CN111719122 A CN 111719122A
- Authority
- CN
- China
- Prior art keywords
- target
- mounting column
- gear
- supporting body
- column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
The invention provides a target which comprises a tubular target body, a tubular supporting body and an installation column, wherein the supporting body is sleeved on the installation column, the target body is sleeved on the supporting body, a cooling cavity is arranged in the supporting body, a cooling liquid inlet and a cooling liquid outlet are arranged on the supporting body, the cooling liquid inlet and the cooling liquid outlet are respectively communicated with the cooling cavity, the target body can rotate around the central axis of the target body, and the target body can move along the direction of the central axis of the target body.
Description
Technical Field
The present invention relates to a target.
Background
A target is understood to mean the material being sputtered in a cathode sputtering system. Most sputtering targets used in the past are so-called planar targets which are configured in a circular or rectangular manner. However, planar targets have the following disadvantages: only about 30% to 40% of the material constituting the planar target is effectively sputtered, and its effective utilization rate is low and its service life is short.
Disclosure of Invention
In view of the problems noted in the background art, the present invention provides a target which is generally tubular and capable of rotating and moving, and in which a cooling structure is provided, thereby improving the utilization rate of the target and prolonging the service life thereof.
The technical scheme of the invention is realized as follows:
the utility model provides a target, includes tubular target body, tubular supporting body and erection column, the supporting body cover is established on the erection column, the target body cover is established on the supporting body, the inside of supporting body be equipped with the cooling cavity, the supporting body on be equipped with coolant liquid import and coolant liquid export, coolant liquid import and coolant liquid export respectively with cooling cavity intercommunication setting.
The invention is further configured such that the target body is rotatable about its central axis.
The invention is further provided that the supporting body is fixedly connected with the mounting column, and the mounting column is connected with a first driving device for driving the mounting column to rotate.
The invention is further provided that the supporting body is rotatably connected with the mounting column, and the invention also comprises a driving mechanism for driving the supporting body to rotate.
The invention is further provided that the driving mechanism comprises a first gear, a second gear and a second driving device, wherein the first gear is coaxial with the bearing body and is in linkage arrangement, the second gear is meshed with the first gear, and the second driving device is connected with the second gear and is used for driving the second gear to rotate.
The invention is further provided that the target body can move along the direction of the central axis thereof.
The invention is further provided that the supporting body is fixedly connected with the mounting column, and the mounting column is connected with a first traction mechanism for drawing the mounting column to move along the axis direction.
The invention is further provided that the bearing body and the mounting column form sliding connection in the axis direction of the mounting column, and the invention further comprises a second traction mechanism, wherein the second traction mechanism is connected with the bearing body and is used for drawing the bearing body to slide on the mounting column.
The utility model provides a target, includes tubular target body and erection column, the target body cover is established on the erection column, the target body can rotate around its central axis, the target body can remove along its central axis direction.
The invention has the beneficial effects that:
the target provided by the invention is tubular in structure, when in use, the surface of the target can obtain more uniform etching effect by adjusting the autorotation and the up-and-down movement of the tubular target, the etching area can basically cover the whole surface of the target by adjusting the position of the target body, and the cooling structure is arranged on the bearing body, so that the heat generated during etching can be cooled quickly, the utilization rate of the target material is improved, and the service life of the target material is prolonged.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the present invention;
FIG. 3 is a schematic structural view of the present invention;
FIG. 4 is a schematic structural view of the present invention;
FIG. 5 is a schematic structural view of the present invention;
fig. 6 is a schematic structural diagram of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention is described below with reference to fig. 1-6:
as shown in fig. 1: the utility model provides a target, includes tubular target body 1, tubular supporting body 2 and erection column 3, 2 covers of supporting body are established on erection column 3, and 1 covers of target body are established on supporting body 2, the inside of supporting body 2 be equipped with the cooling cavity, supporting body 2 on be equipped with coolant liquid import 21 and coolant liquid export 22, coolant liquid import 21 and coolant liquid export 22 respectively with the setting of cooling cavity intercommunication.
Wherein, the target body 1 can rotate around the central axis thereof.
As shown in fig. 2, the supporting body 2 is fixedly connected to the mounting column 3, a first driving device 4 for driving the mounting column 3 to rotate is connected to the mounting column 3, and the first driving device 4 may be a motor. During the in-service use, erection column 3 is connected with the support body of equipment, and the motor is also installed in suitable position on the support body.
As shown in fig. 3, the supporting body 2 is rotatably connected to the mounting column 3, the supporting body 2 is connected to the mounting column 3 through a bearing, and the driving mechanism drives the supporting body 2 to rotate.
As shown in fig. 3, the driving mechanism includes a first gear 5, a second gear 6, and a second driving device 7 (motor), the first gear 5 is coaxial with the carrier 2 and is linked with the carrier, the second gear 6 is engaged with the first gear 5, and the second driving device 7 is connected with the second gear 6 for driving the second gear 6 to rotate. During the in-service use, erection column 3 is connected with the support body of equipment, and the motor is also installed in suitable position on the support body.
Wherein the target body 1 can move along the central axis direction thereof.
As shown in fig. 4, the supporting body 2 is fixedly connected with the mounting column 3, the mounting column 3 is connected with a first traction mechanism 8 which can pull the mounting column to move along the axis direction, the first traction mechanism 8 can be an air cylinder, when in actual use, the mounting column 3 is connected with a frame body of the equipment, and the air cylinder is also mounted at a proper position on the frame body. The cylinder can also fix the traction moving position of the mounting column.
As shown in fig. 5, the supporting body 2 and the mounting column 3 are connected in a sliding manner in the axial direction of the mounting column 3, and the device further comprises a second traction mechanism 9 (air cylinder), wherein the second traction mechanism 9 is connected with the supporting body 2 and is used for drawing the supporting body 2 to slide on the mounting column 3. During the in-service use, erection column 3 is connected with the support body of equipment, and the cylinder is also installed in suitable position on the support body.
As shown in fig. 6, a target comprises a tubular target body 1 and a mounting column 3, the target body 1 is sleeved on the mounting column 3, the target body 1 can rotate around the central axis thereof, and the target body 1 can move along the central axis thereof. The rotation and up-and-down movement of the target 1 adopt the corresponding technical solutions mentioned above.
The invention has the beneficial effects that:
the target provided by the invention is tubular in structure, when in use, the surface of the target can obtain more uniform etching effect by adjusting the autorotation and the up-and-down movement of the tubular target, the etching area can basically cover the whole surface of the target by adjusting the position of the target body 1, and the cooling structure is arranged on the bearing body 2, so that the heat generated during etching can be cooled quickly, the utilization rate of the target material is improved, and the service life of the target material is prolonged.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (9)
1. A target, characterized by: including tubular target body, tubular supporting body and erection column, the supporting body cover is established on the erection column, the target body cover is established on the supporting body, the inside of supporting body be equipped with the cooling cavity, the supporting body on be equipped with coolant liquid import and coolant liquid export, coolant liquid import and coolant liquid export respectively with the setting of cooling cavity intercommunication.
2. A target according to claim 1, wherein: the target body can rotate around the central axis thereof.
3. A target according to claim 2, wherein: the bearing body is fixedly connected with the mounting column, and a first driving device for driving the mounting column to rotate is connected to the mounting column.
4. A target according to claim 2, wherein: the bearing body and the mounting column are rotatably connected, and the bearing device also comprises a driving mechanism for driving the bearing body to rotate.
5. A target according to claim 4, wherein: the driving mechanism comprises a first gear, a second gear and a second driving device, the first gear is coaxial with the bearing body and is in linkage arrangement, the second gear is meshed with the first gear, and the second driving device is connected with the second gear and is used for driving the second gear to rotate.
6. A target according to any one of claims 1 to 5, wherein: the target body can move along the direction of the central axis of the target body.
7. A target according to claim 6, wherein: the bearing body is fixedly connected with the mounting column, and a first traction mechanism for drawing the mounting column to move along the axis direction of the mounting column is connected to the mounting column.
8. A target according to claim 6, wherein: the bearing body and the mounting column form sliding connection in the axis direction of the mounting column, and the mounting column further comprises a second traction mechanism, and the second traction mechanism is connected with the bearing body and used for drawing the bearing body to slide on the mounting column.
9. A target, characterized by: including tubular target body and erection column, the target body cover is established on the erection column, the target body can rotate around its central axis, the target body can remove along its central axis direction.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910218002.0A CN111719122A (en) | 2019-03-21 | 2019-03-21 | Target |
| PCT/CN2019/079855 WO2020186545A1 (en) | 2019-03-21 | 2019-03-27 | Target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910218002.0A CN111719122A (en) | 2019-03-21 | 2019-03-21 | Target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111719122A true CN111719122A (en) | 2020-09-29 |
Family
ID=72518960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910218002.0A Pending CN111719122A (en) | 2019-03-21 | 2019-03-21 | Target |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN111719122A (en) |
| WO (1) | WO2020186545A1 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1053712C (en) * | 1997-04-30 | 2000-06-21 | 浙江大学 | Rotary target column type magnetic controlled sputtering device |
| DE10213049A1 (en) * | 2002-03-22 | 2003-10-02 | Dieter Wurczinger | Rotatable tubular cathode |
| CN201209166Y (en) * | 2008-06-06 | 2009-03-18 | 王佰忠 | Improved magnet sputtering cylinder target |
| CN201545907U (en) * | 2009-11-17 | 2010-08-11 | 深圳市振恒昌实业有限公司 | Novel target tube rotary magnetic control splashing cylindrical target |
| CN201614407U (en) * | 2009-12-25 | 2010-10-27 | 甘国工 | Magnetic fluid sealing and rotating target for magnetic control sputtering of vacuum coating |
| JP6734746B2 (en) * | 2016-09-26 | 2020-08-05 | 三井金属鉱業株式会社 | Manufacturing method of cylindrical sputtering target |
-
2019
- 2019-03-21 CN CN201910218002.0A patent/CN111719122A/en active Pending
- 2019-03-27 WO PCT/CN2019/079855 patent/WO2020186545A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2020186545A1 (en) | 2020-09-24 |
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| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |