CN209619439U - Target - Google Patents
Target Download PDFInfo
- Publication number
- CN209619439U CN209619439U CN201920364025.8U CN201920364025U CN209619439U CN 209619439 U CN209619439 U CN 209619439U CN 201920364025 U CN201920364025 U CN 201920364025U CN 209619439 U CN209619439 U CN 209619439U
- Authority
- CN
- China
- Prior art keywords
- target
- supporting body
- mounting post
- gear
- cooling liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model proposes a kind of targets, including tubular target body, tubular supporting body and mounting post, supporting body is set in mounting post, target body is arranged on the carrier, the inside of the supporting body is equipped with cooling cavities, and the supporting body is equipped with cooling liquid inlet and cooling liquid outlet, and cooling liquid inlet and cooling liquid outlet are connected to setting with cooling cavities respectively, the target body can be rotated around center axis thereof, and the target body can be moved along center axis thereof direction.
Description
Technical field
The utility model relates to a kind of targets.
Background technique
Target is it is to be understood that indicate the material being sputtered in cathodic sputtering system.Most of sputtering target used in past
It is constructed to so-called flat target rounded or in rectangle.However flat target has the drawback that and constitutes the flat target
Material only about 30% to 40% is effectively sputtered, and effective rate of utilization is low, and service life is short.
Utility model content
Aiming at the problem that pointing out in background technique, the utility model proposes a kind of targets, this is generally tubular, and can be carried out and turn
It is dynamic and mobile, and it is internal configured with cooling structure, improves the utilization rate of target, extends its service life.
The technical solution of the utility model is achieved in that
A kind of target is set in mounting post, target body including tubular target body, tubular supporting body and mounting post, supporting body
Be arranged on the carrier, the inside of the supporting body is equipped with cooling cavities, the supporting body be equipped with cooling liquid inlet and
Cooling liquid outlet, cooling liquid inlet and cooling liquid outlet are connected to setting with cooling cavities respectively.
The utility model is further arranged to, and the target body can be rotated around center axis thereof.
The utility model is further arranged to, and the supporting body is fixedly connected with mounting post, is connected in mounting post
The driving device one for driving it to rotate.
The utility model is further arranged to, and it further includes one that the supporting body is rotatably connected with mounting post formation
Drive the driving mechanism of supporting body rotation.
The utility model is further arranged to, and the driving mechanism includes gear one, gear two, driving device two,
The gear one is coaxial with supporting body and linkage setting, gear two are engaged with gear one, and driving device two is connect with gear two
For driving gear two to rotate.
The utility model is further arranged to, and the target body can be moved along center axis thereof direction.
The utility model is further arranged to, and the supporting body is fixedly connected with mounting post, is connected in mounting post
Draw its traction mechanism one moved along its axis direction.
The utility model is further arranged to, and the supporting body and mounting post are formed in mounting post axis direction and slided
Connection, further includes traction mechanism two, traction mechanism two is connect with supporting body to be slided in mounting post for drawing supporting body.
A kind of target, including tubular target body and mounting post, target body is set in mounting post, and the target body can be around its center
Axis is rotated, and the target body can be moved along center axis thereof direction.
The utility model has the beneficial effects that
Target provided by the utility model, structure be it is tubular, by carrying out rotation to tubular target and moving up and down when use
Adjusting, so that the surface of target is obtained etch effect more evenly, and the position etching area by adjusting target body can cover substantially
The surface of entire target is covered, and configures cooling structure on the carrier, the cooling for enabling the heat generated when etching to be read fastly mentions
The high utilization rate of target, extends its service life.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, before not making the creative labor property
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of the utility model；
Fig. 3 is the structural schematic diagram of the utility model；
Fig. 4 is the structural schematic diagram of the utility model；
Fig. 5 is the structural schematic diagram of the utility model；
Fig. 6 is the structural schematic diagram of the utility model.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
Every other embodiment obtained, fall within the protection scope of the utility model.
It is illustrated as follows with reference to Fig. 1-6 pairs of the utility model:
A kind of target as shown in Figure 1: is set in including tubular target body 1, tubular supporting body 2 and mounting post 3, supporting body 2
In mounting post 3, target body 1 is set on supporting body 2, and the inside of the supporting body 2 is equipped with cooling cavities, the supporting body 2
It is equipped with cooling liquid inlet 21 and cooling liquid outlet 22, cooling liquid inlet 21 and cooling liquid outlet 22 are connected to cooling cavities respectively
Setting.
Wherein, the target body 1 can be rotated around center axis thereof.
As shown in Fig. 2, the supporting body 2 is fixedly connected with mounting post 3, it is connected in mounting post 3 and drives its rotation
Driving device 1, driving device 1 can be motor.In actual use, mounting post 3 is connect with the frame body of equipment, and motor is also pacified
The suitable position on frame body.
As shown in figure 3, the supporting body 2 is rotatably connected with the formation of mounting post 3, lead between supporting body 2 and mounting post 3
Bearing connection is crossed, further includes the driving mechanism of a driving supporting body 2 rotation.
As shown in figure 3, the driving mechanism includes gear 1, gear 26, driving device 27 (motor), it is described
Gear 1 is coaxial with supporting body 2 and linkage setting, gear 26 are engaged with gear 1, and driving device 27 is connect with gear 26
For driving gear 26 to rotate.In actual use, mounting post 3 is connect with the frame body of equipment, and motor is also mounted on frame body properly
Position.
Wherein, the target body 1 can be moved along center axis thereof direction.
As shown in figure 4, the supporting body 2 is fixedly connected with mounting post 3, it is connected in mounting post 3 and draws it along its axis
The mobile traction mechanism 1 in line direction, traction mechanism 1 can be cylinder, in actual use, the frame body of mounting post 3 and equipment
Connection, cylinder are also mounted at suitable position on frame body.Cylinder can also the tethered sliding position to mounting post position it is solid
It is fixed.
As shown in figure 5, the supporting body 2 is slidably connected with mounting post 3 in the formation of 3 axis direction of mounting post, further include
Traction mechanism 29 (cylinder), traction mechanism 29 is connect with supporting body 2 to be slided in mounting post 3 for drawing supporting body 2.It is practical
In use, mounting post 3 is connect with the frame body of equipment, cylinder is also mounted at suitable position on frame body.
As shown in fig. 6, a kind of target, including tubular target body 1 and mounting post 3, target body 1 is set in mounting post 3, described
Target body 1 can be rotated around center axis thereof, and the target body 1 can be moved along center axis thereof direction.The rotation of target body 1
Corresponding technical solution above-mentioned is used with moving up and down.
The utility model has the beneficial effects that
Target provided by the utility model, structure be it is tubular, by carrying out rotation to tubular target and moving up and down when use
Adjusting, so that the surface of target is obtained etch effect more evenly, and the position etching area by adjusting target body 1 can cover substantially
The surface of entire target is covered, and configures cooling structure on supporting body 2, the cooling for enabling the heat generated when etching to be read fastly,
The utilization rate for improving target extends its service life.
It is above-described be only the utility model preferred embodiment, be not intended to limit the utility model, it is all
Within the spirit and principles of the utility model, it is practical new to should be included in this for any modification, equivalent replacement, improvement and so on
Within the protection scope of type.
Claims (9)
1. a kind of target, it is characterised in that: including tubular target body, tubular supporting body and mounting post, supporting body is set in installation
On column, target body is arranged on the carrier, and the inside of the supporting body is equipped with cooling cavities, and the supporting body is equipped with cooling
Liquid import and cooling liquid outlet, cooling liquid inlet and cooling liquid outlet are connected to setting with cooling cavities respectively.
2. a kind of target according to claim 1, it is characterised in that: the target body can be rotated around center axis thereof.
3. a kind of target according to claim 2, it is characterised in that: the supporting body is fixedly connected with mounting post, installation
The driving device one of its rotation of driving is connected on column.
4. a kind of target according to claim 2, it is characterised in that: the supporting body is formed with mounting post rotatably to be connected
It connects, further includes the driving mechanism of driving supporting body rotation.
5. a kind of target according to claim 4, it is characterised in that: the driving mechanism includes gear one, gear two, drives
Dynamic device two, the gear one is coaxial with supporting body and linkage setting, gear two are engaged with gear one, driving device two and tooth
Two connection of wheel is for driving gear two to rotate.
6. a kind of target according to claim 1-5, it is characterised in that: the target body can be along center axis thereof side
To being moved.
7. a kind of target according to claim 6, it is characterised in that: the supporting body is fixedly connected with mounting post, installation
It is connected on column and draws its traction mechanism one moved along its axis direction.
8. a kind of target according to claim 6, it is characterised in that: the supporting body and mounting post is in installation mast axis side
It is slidably connected to formation, further includes traction mechanism two, traction mechanism two is connect for drawing supporting body in mounting post with supporting body
Upper sliding.
9. a kind of target, it is characterised in that: including tubular target body and mounting post, target body is set in mounting post, the target body
It can be rotated around center axis thereof, the target body can be moved along center axis thereof direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920364025.8U CN209619439U (en) | 2019-03-21 | 2019-03-21 | Target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920364025.8U CN209619439U (en) | 2019-03-21 | 2019-03-21 | Target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209619439U true CN209619439U (en) | 2019-11-12 |
Family
ID=68457391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920364025.8U Active CN209619439U (en) | 2019-03-21 | 2019-03-21 | Target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209619439U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111155062A (en) * | 2019-12-31 | 2020-05-15 | 中山市博顿光电科技有限公司 | Target rotating structure, target mounting structure and ion source sputtering system |
| CN111719122A (en) * | 2019-03-21 | 2020-09-29 | 广东太微加速器有限公司 | Target |
-
2019
- 2019-03-21 CN CN201920364025.8U patent/CN209619439U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111719122A (en) * | 2019-03-21 | 2020-09-29 | 广东太微加速器有限公司 | Target |
| CN111155062A (en) * | 2019-12-31 | 2020-05-15 | 中山市博顿光电科技有限公司 | Target rotating structure, target mounting structure and ion source sputtering system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN209619439U (en) | Target | |
| CN211428650U (en) | Electric board mounting panel mounting structure that can overturn | |
| CN209248847U (en) | A kind of Economic Model sample multi-angle displaying device | |
| CN203926694U (en) | A kind of magnetron sputtering plating umbrella gear transmission rotating end | |
| CN206702531U (en) | A kind of equipment assembled automatically applied to TV liquid crystal display | |
| CN2796901Y (en) | Single slag rake rotating revolving dragveyer | |
| CN111719122A (en) | Target | |
| CN2543598Y (en) | Central support frame for periphery driven concentrator | |
| CN208365119U (en) | A kind of pin tooth turntable with angle regulating function | |
| CN207888231U (en) | A kind of automotive hub grips mechanism in rotary moving | |
| CN207141235U (en) | Telescopic electric car foot-supporting frame | |
| CN208157895U (en) | A kind of outdoor protection against electric shock electric power cabinet with warning function | |
| CN220668919U (en) | Mobile monitoring device for engineering cost | |
| CN207529475U (en) | It is a kind of it is novel nobody sell the automatic cup falling device of equipment | |
| CN208854556U (en) | The mounting device of large-sized numerical control fan impeller | |
| CN213576261U (en) | Information acquisition device based on big data | |
| CN107458502A (en) | A kind of electric car foot-supporting frame | |
| CN209322552U (en) | A kind of rotating circular disk for rotating disc reactor | |
| CN108479082A (en) | Aircraft | |
| CN218394483U (en) | Stainless steel hand wheel air door actuator for lithium battery coating machine | |
| CN220262885U (en) | Omnidirectional chassis structure | |
| CN218983099U (en) | Wire feeding spheroidizing bag for casting | |
| CN108644239A (en) | A kind of bearing block that may be height adjusted | |
| CN215758674U (en) | Traffic control pole setting with adjustable angle | |
| CN210256208U (en) | Novel intersecting line mechanical arm |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200120 Address after: 523808 room 310, building 1, No. 8, South Industrial Road, Songshanhu Park, Dongguan City, Guangdong Province Patentee after: Guangdong Taiwei accelerator Co., Ltd Address before: 101149 Beijing Tongzhou Canal Core Area IV-07 Block Greenbelt Building, 22 Floors 21389 Patentee before: Beijing Zhongbaiyuan International Science and Technology Innovation Research Co., Ltd. |