CN206819968U - The generating means of laser splash ion gun - Google Patents
The generating means of laser splash ion gun Download PDFInfo
- Publication number
- CN206819968U CN206819968U CN201720796026.0U CN201720796026U CN206819968U CN 206819968 U CN206819968 U CN 206819968U CN 201720796026 U CN201720796026 U CN 201720796026U CN 206819968 U CN206819968 U CN 206819968U
- Authority
- CN
- China
- Prior art keywords
- target body
- ion gun
- generating means
- sleeve pipe
- screw mandrel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a kind of novel in structural design, the generating means for the laser splash ion gun that compact, target body utilization rate is high；Target body including ion gun；Also include reaction source, the reaction source is provided with a through hole, in addition to is arranged at the pulse laser on rear side of reaction source, and the laser beam that the pulse laser projects is beaten on the A faces of target body front end after lens focus through through hole；The A faces of the target body front end and the B plane-plane contacts on front side of reaction source, the action that the B faces on front side of the target body relative response source are done rotation and up and down reciprocatingly slided.
Description
Technical field
It the utility model is related to ion gun generating means technical field, more particularly to a kind of generation of laser splash ion gun
Device.
Background technology
Ion gun is to make neutral atom or molecular ionization, and therefrom draws the device of ion beam current, and it is various types of
The indispensable part of the equipment such as the neutral-beam injector in the devices such as ion accelerator, mass spectrograph, spectrometer；Prior art
In the laser splash ion gun that is related to of the device such as mass spectrograph, the target body of rotation is radiated at using the pulse laser beam of focusing, is steamed
Plasma caused by sending out the target surface material of target body is reacted with pulse carrier gas, generates various charged ions.This mode is being answered
It is that its target body is constantly done rotation movement, and the direction of illumination of laser beam is fixed with middle sixty-four dollar question, it is therefore, long
Using for time can be so that the target surface of target body goes out an annular hole by laser beam irradiation ablation.The appearance in annular hole can cause ion
The working condition in source is very unstable；In addition, in this case the utilization rate of target body is extremely low, the material at only annular hole is by abundant profit
With and the material at other positions of target surface is then wasted, the target body done especially for noble metals such as some gold, caused by it
Waste greatly, its cost is also huge.
The content of the invention
The purpose of this utility model is overcome the deficiencies in the prior art, adapts to real needs, there is provided a kind of structure design
The generating means of the laser splash ion gun novel, compact, target body utilization rate is high.
In order to realize the purpose of this utility model, technical scheme is used by the utility model：
A kind of generating means of laser splash ion gun is designed, includes the target body of ion gun；Also include reaction source, it is described anti-
Ying Yuan is provided with a through hole, in addition to is arranged at the pulse laser on rear side of reaction source, the laser that the pulse laser projects
Beam is beaten in the A faces of target body front end after lens focus through through hole（That is target surface）On；The A faces of the target body front end and reaction source
The B plane-plane contacts of front side, the action that the B faces on front side of the target body relative response source are done rotation and up and down reciprocatingly slided.
Preferably, in addition to the first drive mechanism, first drive mechanism drives the target body to do rotation action, described
First drive mechanism includes first motor being fixed on installing plate, the output shaft and target body of first motor
It is coaxially connected.
Preferably, first drive mechanism also includes a guiding coaxially connected with the output shaft of the first motor
Post, the tail end of the lead are provided with a rear baffle, in addition to sleeve, and the inwall of described sleeve pipe is arranged with along sleeve pipe axial direction
The chute of setting, the outer wall of the lead are provided with the slide strips set along lead axis direction, and described sleeve pipe is enclosed on guiding
On post, for the slide strips Matching installation in chute, described sleeve pipe can be oppositely oriented post axial movement, be oppositely arranged with rear baffle
The end of sleeve pipe is arranged at intervals with rear baffle, and the front end of sleeve pipe is provided with a front apron, the set between front apron and rear baffle
Spring is cased with pipe, the spring applies thrust forward to described sleeve pipe；The target body is coaxially connected with the front end of sleeve pipe.
Preferably, the front end of described sleeve pipe is provided with a pipe fitting, and the tail end of the target body is provided with a bar, the side wall of the pipe fitting
Screwed hole is provided with, is provided with clamping screw in screwed hole, the bar is inserted in pipe fitting, and the end of the clamping screw withstands on bar
In side wall.
Preferably, a linear bearing is cased with the pipe fitting, the linear bearing is connected by bearing holder (housing, cover) with installing plate, and
The pipe fitting can the axial movement of relative rectilinear bearing.
Preferably, the lower surface of the installing plate is provided with two groups of screw mandrel sleeves, and every group of screw mandrel sleeve includes two screw mandrels
Sleeve is simultaneously front and rear to be coaxially disposed, and screw mandrel, the both ends difference of the screw mandrel are provided with two screw mandrel sleeves in every group of screw mandrel sleeve
Set by the bearing being fixed on bedplate, the second motor, the second driving are connected with the end of one of screw mandrel
Motor is installed on bedplate.
Preferably, in addition to the second drive mechanism, second drive mechanism include the line handspike being fixed on base
Motor, the push rod on the line handspike motor withstand on the middle part of bedplate longitudinally upward, are punished positioned at four angles of bedplate
Not She You a pilot hole, base below pilot hole is provided with the one-to-one guide rod in position with pilot hole, described
Guide rod is set through pilot hole, and the bedplate can move up and down along guide rod.
Preferably, the target body is in cylindrical shape.
Preferably, the target body includes iron, copper, gold, aluminium.
The beneficial effects of the utility model are：
It is the present apparatus its novel in structural design, compact, during use, by the motion on target body above-below direction and combine target
The spinning motion of body, the laser beam that position is fixed can be made to be radiated on each position of target surface, can be to the target surface material of target body
Material, which carries out more comprehensive ablation and utilization, this mode, can avoid the waste of target body material, can reduce the input of cost；Again
Person, the design by the cooperation of spring and sleeve pipe can ensure the front end face of target body remain with reaction source B plane-plane contacts, with
Improve the stability of ion gun work.
Brief description of the drawings
Fig. 1 is target body and reaction source matching relationship schematic diagram in the utility model；
Fig. 2 is the primary structure schematic diagram of the target body and reaction source in the utility model；
Fig. 3 is the primary structure schematic diagram of the present apparatus；
Fig. 4 is the cross section structure schematic diagram after the lead in the utility model coordinates with sleeve pipe；
Fig. 5 is the installing plate in the utility model and screw mandrel sleeve end face viewing angle constructions schematic diagram thereon；
In figure：1. target body;2. bar;3. reaction source;4. through hole;5. laser beam;6. pulse laser;7. pipe fitting;8. straight line
Bearing;9. clamping screw;10. installing plate;11. front apron;12. sleeve pipe;13. spring;14. lead;15. slide strips;Kept off after 16.
Plate;17. the first motor;18. chute;19. screw mandrel sleeve;20. screw mandrel;21. bearing;22. the second motor;23. bottom
Seat board;24th, 25. guide rod;26. line handspike motor；27. push rod；28. base.
Embodiment
The utility model is further illustrated with reference to the accompanying drawings and examples：
Embodiment 1：A kind of generating means of laser splash ion gun, referring to Fig. 1 to Fig. 5；The present apparatus it include ion gun
Target body 1, the target body 1 is in cylindrical shape, and target body can be the materials such as iron, copper, gold, aluminium.Also include being fixed on base 28
Reaction source 3, the reaction source 3 is provided with a through hole 4, in addition to is arranged at the pulse laser 6 of the rear side of reaction source 3, described
The laser beam 5 that pulse laser 6 projects is beaten on the A faces of the front end of target body 1 through through hole 4；The front end of the target body 1 in the design
A faces remain that face contacts with the B faces on front side of reaction source, and rotation is done in the B faces of the front side of described 1 relative response source of target body 3
The action up and down reciprocatingly slided.
To achieve the above object, the present apparatus also includes the first drive mechanism, and first drive mechanism drives the target body 1
Rotation action is done, specifically, first drive mechanism includes first motor 17 being fixed on installing plate（Stepping electricity
Machine）, in addition to a lead 14 coaxially connected with the output shaft of the first motor, the tail end of the lead 14 is provided with one
Rear baffle 16, in addition to sleeve 12, the inwall of described sleeve pipe 12 is arranged with along the axially arranged chute 18 of sleeve pipe, described to lead
The slide strips 15 set along lead axis direction are provided with to the outer wall of post 14, described sleeve pipe 12 is enclosed on lead 14, described
The Matching installation of slide strips 15 is in chute 18, and described sleeve pipe 12 can be oppositely oriented post 14 and move axially, in the design, with rear baffle
The end of 16 sleeve pipes 12 being oppositely arranged is arranged at intervals with rear baffle, and the front end of sleeve pipe 12 is provided with a front apron 11, positioned at front
Spring 13 is cased with sleeve pipe between plate 11 and rear baffle 16, the spring 13 applies thrust forward to described sleeve pipe 12, leads to
The front end face A faces of target body being withstood on B faces all the time for this spring is crossed, further, described sleeve pipe 12 in the design
Front end is provided with a pipe fitting 7, and the tail end of the target body 1 is provided with a bar 2, and the side wall of the pipe fitting 7 is provided with screwed hole, in screwed hole
Provided with clamping screw 9, the bar 2 is inserted in pipe fitting 7, and the end of the clamping screw 9 is withstood in the side wall of bar 2, passes through this side
Formula realizes fixation to target body and coaxially connected with the line shaft on the first motor.
Further, a linear bearing 8 is cased with the pipe fitting 7 in the design, the linear bearing 8 passes through bearing holder (housing, cover)
It is connected with installing plate, and the pipe fitting 7 can the axial movement of relative rectilinear bearing.
Further, the lower surface of the installing plate 10 is provided with two groups of screw mandrel sleeves, and every group of screw mandrel sleeve includes two
Screw mandrel sleeve 19 is simultaneously front and rear to be coaxially disposed, and screw mandrel 20, the screw mandrel 20 are provided with two screw mandrel sleeves in every group of screw mandrel sleeve
Both ends set respectively by the bearing 21 being fixed on bedplate 23, be connected with the second drive on the end of one of screw mandrel 20
Dynamic motor 22（Stepper motor）, the second motor 22 is installed on bedplate.Second motor 22 can be consolidated when not working
Dingan County's loading board 10, the second motor 22 can drive installing plate 10 to do horizontal translating movement to change the He of target body 1 when working
Bar 2.
It also includes the second drive mechanism to the present apparatus, and the second drive mechanism drives target body to do the reciprocal fortune on above-below direction
Dynamic, second drive mechanism includes the line handspike motor 26 being fixed on base 28, pushing away on the line handspike motor
Bar 27 withstands on the middle part of bedplate 23 longitudinally upward, and a pilot hole is respectively equipped with four angles of bedplate 23, positioned at leading
The one-to-one guide rod 24 in position with pilot hole is provided with to the base 28 below hole, the guide rod 24 runs through pilot hole
Set, and the bedplate 23 can move up and down along guide rod.
During the original state of the present apparatus, the A faces of its target body connect by spring top on reaction source and with the B faces face of reaction source
Touch.During work, the first motor（Stepper motor）Drive lead, sleeve pipe, pipe fitting and target body to rotate together, and control target body
Slewing rate.Meanwhile the driving push rod 27 of line handspike motor 26 is moved, with this by line handspike motor drive bedplate and
Target body thereon pumps（The stroke that target body moves back and forth up and down is equal to the diameter of target body front end face）, up and down reciprocatingly
The controllable-rate system of motion.By this mode and combine spring elastic force can keep the front end face of target body all the time with reaction source
B plane-plane contacts.Now, by the rotation of target body and the achievable laser beam that pumps of target body to target body front-end A face
Whole ablation, effective utilization to target body can be achieved, avoid the waste of target body material, the input of cost can be reduced.
What embodiment of the present utility model was announced is preferred embodiment, but is not limited thereto, the common skill of this area
Art personnel, easily according to above-described embodiment, understand spirit of the present utility model, and make different amplification and change, but as long as
Spirit of the present utility model is not departed from, all in the scope of protection of the utility model.
Claims (9)
1. a kind of generating means of laser splash ion gun, include the target body of ion gun；It is characterized in that：Also include reaction source,
The reaction source is provided with a through hole, in addition to is arranged at the pulse laser on rear side of reaction source, and the pulse laser projects
Laser beam beaten after lens focus through through hole on the A faces of target body front end；Before the A faces of the target body front end and reaction source
The B plane-plane contacts of side, the action that the B faces on front side of the target body relative response source are done rotation and up and down reciprocatingly slided.
2. the generating means of laser splash ion gun as claimed in claim 1, it is characterised in that：Also include the first driving machine
Structure, first drive mechanism drive the target body to do rotation action, and first drive mechanism is fixed on installing plate including one
On the first motor, the output shaft and target body of first motor be coaxially connected.
3. the generating means of laser splash ion gun as claimed in claim 2, it is characterised in that：First drive mechanism is also
Including a lead coaxially connected with the output shaft of the first motor, the tail end of the lead is provided with a rear baffle, also
Including sleeve, the inwall of described sleeve pipe, which is arranged with along the axially arranged chute of sleeve pipe, the outer wall of the lead, to be provided with
The slide strips set along lead axis direction, described sleeve pipe is enclosed on lead, and the slide strips Matching installation is described in chute
Sleeve pipe can be oppositely oriented post axial movement, and end and the rear baffle of the sleeve pipe being oppositely arranged with rear baffle are arranged at intervals, sleeve pipe
Front end is provided with a front apron, is cased with spring on the sleeve pipe between front apron and rear baffle, the spring is applied to described sleeve pipe
Add thrust forward；The target body is coaxially connected with the front end of sleeve pipe.
4. the generating means of laser splash ion gun as claimed in claim 3, it is characterised in that：The front end of described sleeve pipe is provided with
One pipe fitting, the tail end of the target body are provided with a bar, and the side wall of the pipe fitting is provided with screwed hole, locking screw is provided with screwed hole
Bolt, the bar are inserted in pipe fitting, and the end of the clamping screw is withstood in the side wall of bar.
5. the generating means of laser splash ion gun as claimed in claim 4, it is characterised in that：It is cased with always on the pipe fitting
Bobbin is held, and the linear bearing is connected by bearing holder (housing, cover) with installing plate, and the pipe fitting can the axial movement of relative rectilinear bearing.
6. the generating means of laser splash ion gun as claimed in claim 4, it is characterised in that：The lower surface of the installing plate
Two groups of screw mandrel sleeves are provided with, every group of screw mandrel sleeve is coaxially disposed before and after including two screw mandrel sleeves simultaneously, in every group of screw mandrel sleeve
Two screw mandrel sleeves in be provided with screw mandrel, the both ends of the screw mandrel are set by the bearing being fixed on bedplate respectively, wherein
The second motor is connected with the end of one screw mandrel, the second motor is installed on bedplate.
7. the generating means of laser splash ion gun as claimed in claim 4, it is characterised in that：Also include the second driving machine
Structure, second drive mechanism include the line handspike motor that is fixed on base, and the push rod on the line handspike motor is indulged
To the middle part for withstanding on bedplate upwards, a pilot hole is respectively equipped with four angles of bedplate, below pilot hole
Base is provided with the one-to-one guide rod in position with pilot hole, and the guide rod is set through pilot hole, and the base
Plate can move up and down along guide rod.
8. the generating means of laser splash ion gun as claimed in claim 1, it is characterised in that：The target body is in cylinder
Shape.
9. the generating means of laser splash ion gun as claimed in claim 1, it is characterised in that：The target body include iron, copper,
Gold, aluminium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720796026.0U CN206819968U (en) | 2017-07-04 | 2017-07-04 | The generating means of laser splash ion gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720796026.0U CN206819968U (en) | 2017-07-04 | 2017-07-04 | The generating means of laser splash ion gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206819968U true CN206819968U (en) | 2017-12-29 |
Family
ID=60762766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720796026.0U Expired - Fee Related CN206819968U (en) | 2017-07-04 | 2017-07-04 | The generating means of laser splash ion gun |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206819968U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111650760A (en) * | 2019-02-18 | 2020-09-11 | 利奥斯有限公司 | Method for producing coated lenses for spectacles and support for lens blanks |
| CN111739786A (en) * | 2020-07-02 | 2020-10-02 | 中国科学院上海应用物理研究所 | Laser sputtering ion source capable of translating and rotating |
-
2017
- 2017-07-04 CN CN201720796026.0U patent/CN206819968U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111650760A (en) * | 2019-02-18 | 2020-09-11 | 利奥斯有限公司 | Method for producing coated lenses for spectacles and support for lens blanks |
| CN111739786A (en) * | 2020-07-02 | 2020-10-02 | 中国科学院上海应用物理研究所 | Laser sputtering ion source capable of translating and rotating |
| CN111739786B (en) * | 2020-07-02 | 2024-02-06 | 中国科学院上海应用物理研究所 | Laser sputtering ion source capable of translating and rotating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171229 Termination date: 20180704 |