CN111739786A - Laser sputtering ion source capable of translating and rotating - Google Patents
Laser sputtering ion source capable of translating and rotating Download PDFInfo
- Publication number
- CN111739786A CN111739786A CN202010633272.0A CN202010633272A CN111739786A CN 111739786 A CN111739786 A CN 111739786A CN 202010633272 A CN202010633272 A CN 202010633272A CN 111739786 A CN111739786 A CN 111739786A
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- target
- ion source
- laser sputtering
- translatable
- rotating
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- 238000004544 sputter deposition Methods 0.000 title claims abstract description 20
- 102000004310 Ion Channels Human genes 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 21
- 230000001133 acceleration Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 6
- 238000001816 cooling Methods 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 26
- 239000012159 carrier gas Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001819 mass spectrum Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The invention discloses a laser sputtering ion source capable of translating and rotating, which comprises a rotating mechanism, a translating mechanism, a target head and a reaction source, wherein the reaction source is arranged on a base, the target head is arranged on the rotating mechanism, the rotating mechanism is arranged on the translating mechanism, the translating mechanism is arranged on a fixing frame, a target sheet is arranged on the target head, and the target sheet is in contact with an ion channel of the reaction source. The device has novel and compact structural design, realizes the rotation and translation of the target plate, can fully utilize the target plate material, avoids the waste of the target plate material, reduces the cost investment, increases the air inflow by the double air inlet holes, improves the ion cooling speed, and can generate ion clusters with more abundant types.
Description
Technical Field
The invention relates to the technical field of ion sources, in particular to a laser sputtering ion source capable of translating and rotating.
Background
Laser sputtering ion sources are mass spectrometry ion sources commonly used today. In the prior art, a laser beam irradiates the surface of a rotating target plate to generate plasma, and is matched with carrier gas for cooling to generate various ions, and then the ions are transmitted to a mass spectrum detection part. The defects of the mode are that the laser is fixed, the target sheet rotates, only one annular pit of the target sheet can be ablated, other materials of the target sheet are wasted, the target sheet is penetrated for a period of time, stable ion supply cannot be provided for a long time, and the target sheet is frequently replaced, so that inconvenience is brought to use; the cooling effect of the reaction source of one inlet hole is limited by the air inflow and the gas composition, and more desired ions cannot be generated.
Although the existing device can realize the rotation and translation of the target plate, the existing device adopts double-motor drive, so that the structure of the ion source generating device is complex, and a large amount of ion source volume is occupied.
Disclosure of Invention
The invention aims to provide a laser sputtering ion source capable of translating and rotating, which solves the problems in the prior art, and enables an ion source generating device to have a compact structure and high target sheet use efficiency and to generate more abundant ions.
In order to achieve the purpose, the invention provides the following scheme:
the invention provides a laser sputtering ion source capable of translating and rotating, which comprises a rotating mechanism, a translating mechanism, a target head and a reaction source, wherein the reaction source is arranged on a base, the target head is arranged on the rotating mechanism, the rotating mechanism is arranged on the translating mechanism, the translating mechanism is arranged on a fixing frame, a target sheet is arranged on the target head, and the target sheet is in contact with an ion channel of the reaction source.
Preferably, the rotating mechanism comprises a stepping motor and a transmission rod, the stepping motor is connected with the transmission rod through a coupler, and the transmission rod penetrates through the fixing frame to be connected with the target head.
Preferably, a spring is arranged between the target head and the transmission rod, the stepping motor is electrically connected with a controller, and the controller can control the rotating speed and the acceleration of the stepping motor.
Preferably, the translation mechanism comprises a turbine, a worm, a stud and a translation block, a groove is formed in the translation block, the turbine is located in the groove and is arranged on the stud, the worm is arranged on the transmission rod, the turbine is matched with the worm, the stud penetrates through the translation block, and two ends of the stud are respectively in threaded connection with the fixing frame.
Preferably, four sliding rods are symmetrically arranged on the translation block and are arranged on the fixed frame in a sliding mode.
Preferably, the stud is a double-threaded rod, and two ends of the double-threaded rod are provided with limit baffles.
Preferably, a waist-shaped hole is formed in the fixing frame, limit switches are arranged at two ends of the waist-shaped hole, and the limit switches are electrically connected with the stepping motor.
Preferably, the reaction source is provided with an ion channel and two air inlet channels which are communicated with each other, one end of the ion channel is in contact with the target, the other end of the ion channel is provided with a conical nozzle, the conical nozzle is used for being matched with a laser beam emitted by a laser, and the air inlet channels are connected with the air bottle through electromagnetic pulse valves.
Compared with the prior art, the invention has the following technical effects:
the device has novel and compact structural design, realizes the rotation and translation of the target plate, can fully utilize the target plate material, avoids the waste of the target plate material, reduces the cost investment, increases the air inflow by the double air inlet holes, improves the ion cooling speed, and can generate ion groups with more abundant types.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a first schematic structural diagram of a laser sputtering ion source capable of translating and rotating according to the present invention;
FIG. 2 is a schematic structural diagram of a laser sputtering ion source capable of translating and rotating according to the present invention;
FIG. 3 is a schematic structural diagram III of a laser sputtering ion source capable of translating and rotating according to the present invention;
wherein: 1-a fixed frame, 2-a base, 3-a worm, 4-a turbine, 5-a double-threaded rod, 6-a limit baffle, 7-a slide rod, 8-a coupler, 9-a stepping motor, 10-a transmission rod, 11-a limit switch, 12-a target sheet, 13-a target head, 14-a reaction source, 15-a conical nozzle, 16-an ion channel, 17-an air inlet channel, 18-an electromagnetic pulse valve, 19-a spring and 20-a translation block.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive effort based on the embodiments of the present invention, are within the scope of the present invention.
The invention aims to provide a laser sputtering ion source capable of translating and rotating, which aims to solve the problems in the prior art, and has the advantages of compact structure of an ion source generating device, high target sheet use efficiency and capability of generating more abundant ions.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
As shown in fig. 1 to 3: the embodiment provides a laser sputtering ion source capable of translating and rotating, which comprises a rotating mechanism, a translating mechanism, a target head 13 and a reaction source 14, wherein the reaction source 14 is arranged on a base 2, the base 2 is connected with a fixing frame 1, the target head 13 is arranged on the rotating mechanism, the rotating mechanism is arranged on the translating mechanism, the translating mechanism is arranged on the fixing frame 1, a target sheet 12 is arranged on the target head 13, and the target sheet 12 is in contact with an ion channel 16 of the reaction source 14. The target 12 is a cylinder, and the target 12 may be gold, silver, copper, etc.
Specifically, the rotating mechanism comprises a stepping motor 9 and a transmission rod 10, the stepping motor 9 is connected with the transmission rod 10 through a coupler 8, and the transmission rod 10 penetrates through the fixed frame 1 to be connected with the target head 13. A spring 19 is arranged between the target head 13 and the transmission rod 10, wherein the target head 13 is connected with the transmission rod 10 through a positioning pin, two waist-shaped holes are symmetrically formed in two sides of the target head 13, the positioning pin penetrates through the transmission rod 10 and slides in the waist-shaped holes, and the popup window is in a compressed state, so that a pretightening force can be conveniently applied to the target sheet 12, and the target sheet 12 is enabled to be more attached to the ion channel 16. The stepping motor 9 is electrically connected to a controller, which is capable of controlling the rotational speed and acceleration of the stepping motor 9.
The translation mechanism comprises a worm wheel 4, a worm 3, a stud and a translation block 20, a groove is formed in the translation block 20, the worm wheel 4 is located in the groove and is arranged on the stud, the worm 3 is arranged on the transmission rod 10, the worm wheel 4 is matched with the worm 3, the stud penetrates through the translation block 20, and two ends of the stud are respectively in threaded connection with the fixing frame 1. The combination of different types of worm gears and worms can realize the matching of different rotating speeds and translation speeds. Four sliding rods 7 are symmetrically arranged on the translation block 20, and the sliding rods 7 are arranged on the fixed frame 1 in a sliding manner. The double-screw bolt is double threaded rod 5, and limit baffle 6 is provided with at the both ends of double threaded rod 5, prevents that double threaded rod 5 from breaking away from mount 1 and target 13 and reaction source 14 part to appear interfering. The fixing frame 1 is provided with a waist-shaped hole, the transmission rod 10 penetrates through the waist-shaped hole, the transmission rod 10 can be conveniently translated, the two ends of the waist-shaped hole are provided with limit switches 11, the limit switches 11 are electrically connected with a driver of the stepping motor 9, and when the transmission rod 10 touches the limit switches 11, the stepping motor 9 rotates reversely to perform translation motion. The stepping motor 9 drives the target head 13 to rotate and simultaneously drives the worm wheel 4 and the worm 3 to rotate, so that the reciprocating translation of the target head 13 on the slide bar 7 is realized, and the material of the target piece 12 can be fully and uniformly utilized.
The reaction source 14 is provided with an ion channel 16 and two air inlet channels 17 which are mutually communicated, one end of the ion channel 16 is contacted with the target 12, the other end of the ion channel 16 is provided with a conical nozzle 15 in a collinear way, the conical nozzle 15 is used for being matched with laser beams emitted by a laser, and the air inlet channels 17 are connected with an air bottle through an electromagnetic pulse valve 18.
The conical nozzle 15 is fixed on the outlet of the ion channel 16 through a bolt, a laser beam emitted by a laser passes through the conical nozzle 15 after being focused by a focusing mirror, the ion channel 16 is hit on the contact surface of the target sheet 12, then the electromagnetic pulse valve 18 sprays carrier gas to the air inlet according to the time sequence, the carrier gas and ions are fully collided and cooled in the ion channel 16, and the carrier gas is sprayed out from the conical nozzle 15 and enters the mass spectrum detection area behind the carrier gas and the ions.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. A laser sputtering ion source capable of translating and rotating is characterized in that: including slewing mechanism, translation mechanism, target head and reaction source, the reaction source sets up on the base, the target head set up in slewing mechanism is last, slewing mechanism set up in translation mechanism is last, translation mechanism sets up on the mount, be provided with the target piece on the target head, the target piece with the ion channel of reaction source contacts.
2. The translatable and rotatable laser sputtering ion source of claim 1, wherein: the rotating mechanism comprises a stepping motor and a transmission rod, the stepping motor is connected with the transmission rod through a coupler, and the transmission rod penetrates through the fixing frame and is connected with the target head.
3. The translatable and rotatable laser sputtering ion source of claim 2, wherein: the spring is arranged between the target head and the transmission rod, the stepping motor is electrically connected with a controller, and the controller can control the rotating speed and the acceleration of the stepping motor.
4. The translatable and rotatable laser sputtering ion source of claim 2, wherein: the translation mechanism comprises a turbine, a worm, a stud and a translation block, a groove is formed in the translation block, the turbine is located in the groove and is arranged on the stud, the worm is arranged on the transmission rod, the turbine is matched with the worm, the stud penetrates through the translation block, and two ends of the stud are respectively in threaded connection with the fixing frame.
5. The translatable and rotatable laser sputtering ion source of claim 4, wherein: four sliding rods are symmetrically arranged on the translation block and are arranged on the fixing frame in a sliding mode.
6. The translatable and rotatable laser sputtering ion source of claim 4, wherein: the double-screw bolt is double-end threaded rod, double-end threaded rod's both ends are provided with limit baffle.
7. The translatable and rotatable laser sputtering ion source of claim 4, wherein: the fixing frame is provided with a waist-shaped hole, two ends of the waist-shaped hole are provided with limit switches, and the limit switches are electrically connected with the stepping motor.
8. The translatable and rotatable laser sputtering ion source of claim 1, wherein: the reaction source is provided with an ion channel and two air inlet channels which are communicated with each other, one end of the ion channel is in contact with the target, the other end of the ion channel is provided with a conical nozzle, the conical nozzle is used for being matched with a laser beam emitted by a laser, and the air inlet channels are connected with an air bottle through an electromagnetic pulse valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010633272.0A CN111739786B (en) | 2020-07-02 | 2020-07-02 | Laser sputtering ion source capable of translating and rotating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010633272.0A CN111739786B (en) | 2020-07-02 | 2020-07-02 | Laser sputtering ion source capable of translating and rotating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111739786A true CN111739786A (en) | 2020-10-02 |
| CN111739786B CN111739786B (en) | 2024-02-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010633272.0A Active CN111739786B (en) | 2020-07-02 | 2020-07-02 | Laser sputtering ion source capable of translating and rotating |
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| Country | Link |
|---|---|
| CN (1) | CN111739786B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114967166A (en) * | 2022-06-17 | 2022-08-30 | 苏州铸正机器人有限公司 | Direction-adjustable indicating light unit and image corrector with same |
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2020
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| US20030080290A1 (en) * | 2001-09-17 | 2003-05-01 | Baranov Vladimir I. | Method and apparatus for cooling and focusing ions |
| US20050161597A1 (en) * | 2004-01-22 | 2005-07-28 | Ionalytics Corporation | Method and apparatus for FAIMS with a laser-based ionization source |
| CN101872708A (en) * | 2010-02-05 | 2010-10-27 | 厦门大学 | Ion source extraction device suitable for direct ionization of solid sample |
| CN205462908U (en) * | 2016-04-11 | 2016-08-17 | 广东工业大学 | Automatic spraying mechanical arm |
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| CN107738369A (en) * | 2017-10-24 | 2018-02-27 | 庞锦钊 | A kind of two-wheel precision LED substrate wafer cutter device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114967166A (en) * | 2022-06-17 | 2022-08-30 | 苏州铸正机器人有限公司 | Direction-adjustable indicating light unit and image corrector with same |
| CN114967166B (en) * | 2022-06-17 | 2023-11-21 | 苏州铸正机器人有限公司 | Direction-adjustable indicating light unit and image corrector with same |
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| Publication number | Publication date |
|---|---|
| CN111739786B (en) | 2024-02-06 |
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