CN111595531A - Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate - Google Patents
Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate Download PDFInfo
- Publication number
- CN111595531A CN111595531A CN202010424530.4A CN202010424530A CN111595531A CN 111595531 A CN111595531 A CN 111595531A CN 202010424530 A CN202010424530 A CN 202010424530A CN 111595531 A CN111595531 A CN 111595531A
- Authority
- CN
- China
- Prior art keywords
- multilayer ceramic
- ceramic substrate
- cavity
- vacuum
- air tightness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The invention discloses a method for detecting the air tightness of a non-cavity or multi-cavity multilayer ceramic substrate, which comprises the following steps of 1, assembling a vacuum joint; step 2, laying a vacuum rubber; step 3, positioning and sucking materials; step 4, feeding; step 5, in the synchronous opposite movement process of the positioning plate, the bottom of the positioning plate extrudes the top of the vacuum rubber positioned below the positioning plate, so that the vacuum rubber and the bottom of the vacuum joint form sealing; when the two positioning plates are in contact with the multilayer ceramic substrate, the multilayer ceramic substrate is centered, and the outer edges of the multilayer ceramic substrate form lap joints; step 6, sealing the multilayer ceramic substrate: the elastic pressing frame tightly presses the lap joint part on the surface of the vacuum rubber in a sealing way, so that the cavity window is a sealed cavity; and 7, detecting air tightness. The whole detection process is automatically finished, the automation degree is high, the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window can be accurately controlled, and the pressing position and the pressing force are kept consistent, so that the air tightness detection result is reliable and the accuracy is high.
Description
Technical Field
The invention relates to the technical field of ceramic substrate detection, in particular to a method for detecting the air tightness of a non-cavity or multi-cavity multilayer ceramic substrate.
Background
Modern microelectronic technology is developed very rapidly, and especially various optoelectronic devices are gradually developed in the direction of miniaturization, large-scale integration, high efficiency, high reliability and the like. However, as the integration of electronic systems increases, the power density increases, the heat generated by the operation of the electronic components and the system increases, the operating temperature of the system increases, which may cause the performance deterioration, device destruction, delamination, etc. of the semiconductor device, and even burn out the packaged chip.
The substrate used for electronic packaging is a base electronic element, and mainly provides mechanical bearing support and air tightness protection for electronic components and interconnection thereof, and can be used as a heat sink transition piece for heat dissipation of a chip.
The ceramic substrate has the advantages of high temperature resistance, high electrical insulation performance, low dielectric constant and dielectric loss, large thermal conductivity, good chemical stability, similar thermal expansion coefficient with elements and the like, and can play a stronger protection role for optoelectronic devices, thereby being widely applied in the fields of aviation, aerospace, military engineering and the like.
The high-reliability microelectronic device and the semiconductor device are hermetically packaged by adopting a ceramic shell and a ceramic-metal integrated shell. In the manufacturing process of the ceramic shell and the ceramic-metal integrated shell, for the consideration of cost and quality control, the airtightness of the multilayer ceramic substrate, which is the main part of the shell, needs to be detected and screened, and then metal parts need to be welded.
At present, the airtightness detection before capping of ceramic shells and ceramic-metal integrated shells is suitable for the airtightness of microelectronic devices and semiconductor device packages with inner cavities, and the airtightness detection of multi-layer ceramic substrates without cavities or with multiple cavities is still incomplete.
The invention discloses a Chinese patent application with the publication number of CN106768684A, and the invention name is 'a method for detecting the air tightness of a multilayer ceramic substrate', which comprises a mass spectrum leak detector for detecting and measuring the leak rate, wherein the mass spectrum leak detector comprises a vacuum joint, a vacuum pumping hole is arranged on the vacuum joint, and the position of a vacuum rubber is adjusted to align the center of a cavity window with the center of the vacuum pumping hole, so that the air tightness detection of the multilayer ceramic substrate without a cavity or multiple cavities is realized.
However, the above patent application, in use, has the following disadvantages to be improved:
1. the multilayer ceramic substrate needs to be manually placed above the cavity window and compressed, and after detection is completed, the multilayer ceramic substrate which needs to be manually detected is removed from the cavity window. The whole detection process has low automation degree and low detection efficiency.
2. In the detection process, the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window is not less than 0.5 mm; however, when the multilayer ceramic substrate is manually placed, it is difficult to grasp the size of the gap, so that the sealing detection effect is not good.
3. When the multilayer ceramic substrate is manually placed above the cavity window and is compressed, the compression position and the compression force are difficult to fix, so that the sealing effect between the multilayer ceramic substrate and the vacuum rubber is poor. In addition, if the pressure is applied to the middle of the multilayer ceramic substrate, the sealing performance between the multilayer ceramic substrate and the vacuum eraser cannot be increased, and the multilayer ceramic substrate may be damaged.
Disclosure of Invention
The technical problem to be solved by the invention is to provide a method for detecting the air tightness of a cavity-free or multi-cavity multilayer ceramic substrate, aiming at the defects of the prior art, the whole detection process of the method for detecting the air tightness of the cavity-free or multi-cavity multilayer ceramic substrate is automatically finished, the automation degree is high, the distance between the outer edge of the multilayer ceramic substrate and the edge of a cavity window can be accurately controlled, and the pressing position and the pressing force are kept consistent, so that the air tightness detection result is reliable and the accuracy is high.
In order to solve the technical problems, the invention adopts the technical scheme that:
a method for detecting the air tightness of a non-cavity or multi-cavity multilayer ceramic substrate comprises the following steps.
Step 1, assembling a vacuum joint: and connecting a vacuum pumping hole in the vacuum joint with a mass spectrometer leak detector.
Step 2, laying a vacuum rubber: and laying the vacuum rubber on the upper surface of the vacuum joint, and enabling the cavity window of the vacuum rubber to be coaxially positioned right above the vacuum pumping hole and communicated with the vacuum pumping hole.
Step 3, positioning and sucking: a plurality of multilayer ceramic substrates to be tested are vertically stacked on the top of the jacking plate. Through the high lift of control jacking board for the multilayer ceramic substrate that is located the top flushes mutually with last feed cylinder top, and then makes the manipulator can absorb multilayer ceramic substrate at fixed height position. And the mechanical arm moves to the position right above the feeding barrel, and the sucker at the bottom of the mechanical arm extends and is adsorbed at the center of the multilayer ceramic substrate at the top.
Step 4, feeding: the manipulator moves to transplant the adsorbed multilayer ceramic substrate and place the multilayer ceramic substrate above the cavity window, and the sucker still keeps an adsorption state.
Step 5, centering the multilayer ceramic substrate and sealing the multilayer ceramic substrate by a vacuum rubber: two positioning plates in the transverse centering assembly and the vertical centering assembly synchronously move in opposite directions. During the synchronous opposite movement, the bottom of the positioning plate will press the top of the vacuum rubber positioned below, so that the vacuum rubber forms a seal with the bottom of the vacuum joint. When the two positioning plates are both contacted with the multilayer ceramic substrate, the opposite movement is stopped. At the moment, the multilayer ceramic substrate is centered and coaxially positioned right above the cavity window, and the outer edge of the multilayer ceramic substrate is erected on the surface of the vacuum rubber outside the cavity window to form a lap joint part.
Step 6, sealing the multilayer ceramic substrate: the sucking disc deflates and contracts to release the adsorption with the multilayer ceramic substrate. The manipulator drives the elastic pressing frame to descend, the elastic pressing frame is in contact with the lap joint part of the multilayer ceramic substrate, and the positioning plate resets. The height of the elastic pressing frame is continuously reduced, and the lapping part of the multilayer ceramic substrate is tightly pressed on the surface of the vacuum rubber in a sealing way, so that the cavity window is a sealed cavity.
And 7, air sealing detection: and (4) vacuumizing the sealed cavity formed in the step (6), applying air pressure to the multilayer ceramic substrate by using a spray gun, and detecting the leakage rate of the multilayer ceramic substrate by using a mass spectrum leak detector.
And 8, after the air tightness detection is finished, placing the detected multilayer ceramic substrate in a qualified product area or an unqualified product area by the manipulator according to the air tightness detection result in the step 7. And resetting, and repeating the steps 3 to 8 to detect the air tightness of the next multilayer ceramic substrate.
When the multilayer ceramic substrate has multiple cavities, all the cavities of the multilayer ceramic substrate are positioned in the cavity window of the vacuum rubber after the multilayer ceramic substrate is centered in the step 5.
The width of the lap joint part formed in the step 5 is 0.5-1 mm.
The width of the lap joint formed in step 5 was 0.8 mm.
In step 2, before the vacuum eraser is laid, vacuum silicone grease is coated on the upper surface of the vacuum eraser positioned on the periphery of the vacuum extraction opening.
The invention has the following beneficial effects:
1. the whole detection process in the application is automatically finished, and the automation degree is high.
2. The application can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and the pressing position and the pressing force are kept consistent, so that the air tightness detection result is reliable and the accuracy is high.
Drawings
FIG. 1 is a schematic structural diagram of a device for detecting the airtightness of a multilayer ceramic substrate according to the present invention.
FIG. 2 is a schematic structural diagram showing the suction of the robot arm to the multilayer ceramic substrate in the positioning and feeding device according to the present invention.
Fig. 3 shows a schematic structural diagram of the robot arm after removing the elastic pressing frame.
Among them are:
10. positioning a feeding device; 11. feeding a material barrel; 111. an elastic abrasion resistant layer; 12. a jacking plate; 121. jacking a cylinder;
20. a manipulator; 21. a suction cup; 211. a telescopic rod;
30. centering and aligning devices; 31. positioning a plate;
40. a vacuum joint; 41. a vacuum pumping port;
50. a vacuum rubber; 51. a cavity window;
60. a multilayer ceramic substrate; 70. a spray gun; 80. a mass spectrometer leak detector.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific preferred embodiments.
In the description of the present invention, it is to be understood that the terms "left side", "right side", "upper part", "lower part", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and that "first", "second", etc., do not represent an important degree of the component parts, and thus are not to be construed as limiting the present invention. The specific dimensions used in the present example are only for illustrating the technical solution and do not limit the scope of protection of the present invention.
As shown in FIG. 1, the multilayer ceramic substrate airtightness detection device comprises a positioning feeding device 10, a manipulator 20, a centering positioning device 30, a vacuum joint 40, a vacuum rubber 50, a spray gun 70 and a mass spectrometer leak detector 80.
The positioning and feeding device is arranged on one side of the vacuum joint and comprises a feeding barrel and a lifting plate coaxially arranged in the feeding barrel, as shown in figure 2.
The inner wall surface of the upper cylinder is preferably provided with an elastic abrasion resistant layer 111 to prevent abrasion of the multilayer ceramic substrate.
The height of jacking board can go up and down, preferably carries out the jacking through jacking cylinder 121.
A plurality of multilayer ceramic substrates to be tested are vertically stacked on the top of the jacking plate.
And a vacuum pumping hole is formed in the vacuum joint and is connected with the mass spectrometer leak detector.
The vacuum rubber seal is laid on the upper surface of the vacuum joint and is provided with a cavity window 51 communicated with the vacuum pumping hole. The length of the cavity window is smaller than the length of the multilayer ceramic substrate by 1mm or more, and the width of the cavity window is smaller than the width of the multilayer ceramic substrate by 1mm or more.
The manipulator can be located the multilayer ceramic substrate that awaits measuring in the location loading attachment and transplant to cavity window top, and the manipulator is ripe prior art, can realize the degree of freedom of 6 directions.
The bottom of the manipulator is provided with a suction cup 21 and an elastic pressing frame 22. As shown in fig. 3, the suction cup is preferably arranged at the bottom center of the manipulator through a telescopic rod 211, and the height of the suction cup can be extended and contracted; the extension and retraction of the telescopic rod are preferably controlled by a telescopic motor arranged at the center of the bottom of the manipulator. The elastic pressing frame is coaxially sleeved at the bottom of the manipulator at the periphery of the sucker, and the section width of the elastic pressing frame (namely the width of a subsequent lap joint part) is not less than 0.5 mm.
The centering and positioning device comprises a transverse centering assembly and a vertical centering assembly which are perpendicular to each other. Horizontal centering subassembly and vertical centering subassembly all include two symmetries and set up the locating plate 31 in the cavity window both sides. The two positioning plates can synchronously move towards or away from each other. As shown in FIG. 1, the alignment plate is preferably mounted on a synchronous motor mounted on the vacuum attachment, and the bottom of the alignment plate is preferably in contact with the upper surface of the vacuum blanket.
Furthermore, an elastic wear-resistant layer is preferably arranged on the inner wall surface of each positioning plate.
The spray gun is disposed at one side of the cavity window for applying air pressure to the multilayer ceramic substrate located above the cavity window. The spray gun is preferably disposed between two adjacent aligning plates, i.e., directed to corner portions of the multilayer ceramic substrate, so as to avoid interference with the lateral or vertical movement of the aligning plates.
The elastic pressing frame is in a shape like a Chinese character 'hui', the size of an inner frame of the elastic pressing frame is the same as that of the cavity window, the size of an outer frame of the elastic pressing frame is the same as that of the outer shape of the multilayer ceramic substrate, and the cross section width of the elastic pressing frame is preferably 0.5-1 mm, and is further preferably 0.8 mm.
Further, it is preferable that a pressure sensor is built in the elastic pressing frame, so that the sealing pressure between the multi-layer ceramic substrate and the vacuum rubber having different thicknesses can be kept uniform.
A method for detecting the air tightness of a non-cavity or multi-cavity multilayer ceramic substrate comprises the following steps.
Step 1, assembling a vacuum joint: and connecting a vacuum pumping hole in the vacuum joint with a mass spectrometer leak detector.
And 2, paving the vacuum rubber.
Before the vacuum eraser is laid, vacuum silicone grease is preferably coated on the upper surface of the vacuum eraser positioned on the periphery of the vacuum extraction opening.
Then, the vacuum rubber is laid on the upper surface of the vacuum joint, and the cavity window of the vacuum rubber is coaxially positioned right above the vacuum pumping hole and communicated with the vacuum pumping hole.
Step 3, positioning and sucking: a plurality of multilayer ceramic substrates to be tested are vertically stacked on the top of the jacking plate. Through the high lift of control jacking board for the multilayer ceramic substrate that is located the top flushes mutually with last feed cylinder top, and then makes the manipulator can absorb multilayer ceramic substrate at fixed height position. And the mechanical arm moves to the position right above the feeding barrel, and the sucker at the bottom of the mechanical arm extends and is adsorbed at the center of the multilayer ceramic substrate at the top.
Step 4, feeding: the manipulator moves to transplant the adsorbed multilayer ceramic substrate and place the multilayer ceramic substrate above the cavity window, and the sucker still keeps an adsorption state.
Step 5, centering the multilayer ceramic substrate and sealing the multilayer ceramic substrate by a vacuum rubber: two positioning plates in the transverse centering assembly and the vertical centering assembly synchronously move in opposite directions. During the synchronous opposite movement, the bottom of the positioning plate will press the top of the vacuum rubber positioned below, so that the vacuum rubber forms a seal with the bottom of the vacuum joint. When the two positioning plates are both contacted with the multilayer ceramic substrate, the opposite movement is stopped. At the moment, the multilayer ceramic substrate is centered and coaxially positioned right above the cavity window, and the outer edge of the multilayer ceramic substrate is erected on the surface of the vacuum rubber outside the cavity window to form a lap joint part.
When the multilayer ceramic substrate has multiple cavities, all the cavities of the multilayer ceramic substrate are positioned in the cavity window of the vacuum rubber after the multilayer ceramic substrate is centered in the step 5.
Further, the width of the lap joint is preferably 0.5 to 1mm, and more preferably 0.8 mm.
Step 6, sealing the multilayer ceramic substrate: the sucking disc deflates and contracts to release the adsorption with the multilayer ceramic substrate. The manipulator drives the elastic pressing frame to descend, the elastic pressing frame is in contact with the lap joint part of the multilayer ceramic substrate, and the positioning plate resets. The height of the elastic pressing frame is continuously reduced, and the lapping part of the multilayer ceramic substrate is tightly pressed on the surface of the vacuum rubber in a sealing way, so that the cavity window is a sealed cavity.
And 7, air sealing detection: and (4) vacuumizing the sealed cavity formed in the step (6), applying air pressure to the multilayer ceramic substrate by using a spray gun, and detecting the leakage rate of the multilayer ceramic substrate by using a mass spectrum leak detector.
And 8, after the air tightness detection is finished, placing the detected multilayer ceramic substrate in a qualified product area or an unqualified product area by the manipulator according to the air tightness detection result in the step 7. And resetting, and repeating the steps 3 to 8 to detect the air tightness of the next multilayer ceramic substrate.
Although the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the details of the embodiments, and various equivalent modifications can be made within the technical spirit of the present invention, and the scope of the present invention is also within the scope of the present invention.
Claims (5)
1. A method for detecting the air tightness of a non-cavity or multi-cavity multilayer ceramic substrate is characterized by comprising the following steps: the method comprises the following steps:
step 1, assembling a vacuum joint: connecting a vacuum pumping hole in the vacuum joint with a mass spectrometer leak detector;
step 2, laying a vacuum rubber: laying the vacuum rubber on the upper surface of the vacuum joint, and enabling a cavity window of the vacuum rubber to be coaxially positioned right above the vacuum pumping hole and communicated with the vacuum pumping hole;
step 3, positioning and sucking: a plurality of multilayer ceramic substrates to be tested are vertically stacked and placed on the top of the jacking plate; the multilayer ceramic substrate positioned at the top is aligned with the top of the upper charging barrel by controlling the height lifting of the lifting plate, so that the manipulator can absorb the multilayer ceramic substrate at a fixed height position; the manipulator moves to the position right above the feeding cylinder, and a sucker at the bottom of the manipulator extends and is adsorbed at the center of the multilayer ceramic substrate at the top;
step 4, feeding: the manipulator moves, the adsorbed multilayer ceramic substrate is transplanted and placed above the cavity window, and the sucker still keeps an adsorption state;
step 5, centering the multilayer ceramic substrate and sealing the multilayer ceramic substrate by a vacuum rubber: the two positioning plates in the transverse centering assembly and the vertical centering assembly synchronously move in opposite directions; in the synchronous opposite movement process, the bottom of the positioning plate extrudes the top of the vacuum rubber positioned below the positioning plate, so that the vacuum rubber and the bottom of the vacuum joint form sealing; when the two positioning plates are both contacted with the multilayer ceramic substrate, the opposite movement is stopped; at the moment, the multilayer ceramic substrate is centered and coaxially positioned right above the cavity window, and the outer edge of the multilayer ceramic substrate is erected on the surface of the vacuum rubber outside the cavity window to form a lap joint part;
step 6, sealing the multilayer ceramic substrate: the sucker deflates and contracts to release the adsorption with the multilayer ceramic substrate; the manipulator drives the elastic pressing frame to descend, the elastic pressing frame is contacted with the lap joint part of the multilayer ceramic substrate, and the positioning plate is reset; the height of the elastic pressing frame is continuously reduced, and the lapping part of the multilayer ceramic substrate is tightly pressed on the surface of the vacuum rubber in a sealing way, so that the cavity window is a sealed cavity;
and 7, air sealing detection: vacuumizing the sealed cavity formed in the step 6, applying air pressure to the multilayer ceramic substrate by using a spray gun, and detecting the leakage rate of the multilayer ceramic substrate by using a mass spectrometer leak detector;
step 8, after the air tightness detection is finished, the manipulator places the detected multilayer ceramic substrate in a qualified product area or an unqualified product area according to the air tightness detection result in the step 7; and resetting, and repeating the steps 3 to 8 to detect the air tightness of the next multilayer ceramic substrate.
2. The method for detecting the airtightness of a non-cavity or multi-cavity multilayer ceramic substrate according to claim 1, wherein: when the multilayer ceramic substrate has multiple cavities, all the cavities of the multilayer ceramic substrate are positioned in the cavity window of the vacuum rubber after the multilayer ceramic substrate is centered in the step 5.
3. The method for detecting the airtightness of a non-cavity or multi-cavity multilayer ceramic substrate according to claim 2, wherein: the width of the lap joint part formed in the step 5 is 0.5-1 mm.
4. The method for detecting the airtightness of a non-cavity or multi-cavity multilayer ceramic substrate according to claim 3, wherein: the width of the lap joint formed in step 5 was 0.8 mm.
5. The method for detecting the airtightness of a non-cavity or multi-cavity multilayer ceramic substrate according to claim 1, wherein: in step 2, before the vacuum eraser is laid, vacuum silicone grease is coated on the upper surface of the vacuum eraser positioned on the periphery of the vacuum extraction opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010424530.4A CN111595531B (en) | 2020-05-19 | 2020-05-19 | Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010424530.4A CN111595531B (en) | 2020-05-19 | 2020-05-19 | Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111595531A true CN111595531A (en) | 2020-08-28 |
| CN111595531B CN111595531B (en) | 2022-03-25 |
Family
ID=72187427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010424530.4A Active CN111595531B (en) | 2020-05-19 | 2020-05-19 | Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111595531B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5220824A (en) * | 1991-08-20 | 1993-06-22 | The Pennsylvania Research Corporation | High temperature, tube burst test apparatus |
| CN106768684A (en) * | 2016-12-03 | 2017-05-31 | 中国电子科技集团公司第四十三研究所 | A kind of multilayer ceramic substrate air-tightness detection method |
| CN206248283U (en) * | 2016-12-16 | 2017-06-13 | 康文涛 | A kind of automobile ceramics clamp used for detecting air tightness |
| CN109186876A (en) * | 2018-09-07 | 2019-01-11 | 中国电子科技集团公司第十三研究所 | Ceramic shell air-leakage test test fixture |
| CN109361388A (en) * | 2018-11-14 | 2019-02-19 | 成都嘉纳海威科技有限责任公司 | A kind of miniaturization high-air-tightness frequency source and its packaging method |
| CN208672247U (en) * | 2018-09-17 | 2019-03-29 | 东莞金源五金机械有限公司 | A kind of air-leakage test jig |
-
2020
- 2020-05-19 CN CN202010424530.4A patent/CN111595531B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5220824A (en) * | 1991-08-20 | 1993-06-22 | The Pennsylvania Research Corporation | High temperature, tube burst test apparatus |
| CN106768684A (en) * | 2016-12-03 | 2017-05-31 | 中国电子科技集团公司第四十三研究所 | A kind of multilayer ceramic substrate air-tightness detection method |
| CN206248283U (en) * | 2016-12-16 | 2017-06-13 | 康文涛 | A kind of automobile ceramics clamp used for detecting air tightness |
| CN109186876A (en) * | 2018-09-07 | 2019-01-11 | 中国电子科技集团公司第十三研究所 | Ceramic shell air-leakage test test fixture |
| CN208672247U (en) * | 2018-09-17 | 2019-03-29 | 东莞金源五金机械有限公司 | A kind of air-leakage test jig |
| CN109361388A (en) * | 2018-11-14 | 2019-02-19 | 成都嘉纳海威科技有限责任公司 | A kind of miniaturization high-air-tightness frequency source and its packaging method |
Non-Patent Citations (2)
| Title |
|---|
| ZHAO HONG: "Rational construction of Au-Ag bimetallc island-shaped nanoplates for electrocatalysis", 《MATERIALS RESEARCH EXPRESS》 * |
| 曹培福: "电子陶瓷及其封接气密性测试方法", 《行业标准》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111595531B (en) | 2022-03-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3707990B2 (en) | Board assembly equipment | |
| CN101675498B (en) | Method and system for flip chip packaging of micro-mirror devices | |
| KR100844968B1 (en) | Substrate assembling apparatus and method | |
| US20160118362A1 (en) | Bonding apparatus and substrate manufacturing equipment including the same | |
| CN212363582U (en) | Tightness detecting instrument based on multilayer ceramic substrate | |
| CN111426431B (en) | Multilayer ceramic substrate gas tightness detection device | |
| CN111595531B (en) | Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate | |
| CN217361537U (en) | Positioning device for wafer | |
| CN113522796A (en) | Substrate detection system and detection method | |
| TWI613452B (en) | Electronic component conveying device and electronic component inspection device | |
| KR102355572B1 (en) | Inspection Devices, Inspection Systems, and Positioning Methods | |
| JP2004233473A (en) | Device and method for assembling large-sized substrate | |
| KR20040058067A (en) | Apparatus for bonding substrates and method for bonding substrates | |
| CN216271899U (en) | Carrying and abutting-pressing integrated equipment | |
| JP2003241157A (en) | Apparatus and method for sticking substrate together, and apparatus and method for manufacturing liquid crystal display panel | |
| JP4028348B2 (en) | Solid-state imaging device manufacturing method and manufacturing apparatus | |
| CN113262951A (en) | Substrate processing apparatus and substrate processing method | |
| JP2017167019A (en) | Electronic component conveyance device, and electronic component inspection apparatus | |
| CN219736730U (en) | Ceramic circuit board gas tightness testing arrangement and test system | |
| CN220821525U (en) | Get a structure and separator | |
| CN113421841B (en) | Wafer laminating machine | |
| CN116403928A (en) | Semiconductor device and method | |
| CN217946851U (en) | Get and put material device and get and put material system | |
| CN217691113U (en) | Bonding apparatus with movable adsorption module | |
| CN117219531B (en) | Bonding height detection method in heat dissipation cover bonding process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230724 Address after: 230000 b-1018, Woye Garden commercial office building, 81 Ganquan Road, Shushan District, Hefei City, Anhui Province Patentee after: HEFEI WISDOM DRAGON MACHINERY DESIGN Co.,Ltd. Address before: No. 285, Jiefang South Road, Chengnan New District, Yancheng City, Jiangsu Province, 224000 Patentee before: YANCHENG INSTITUTE OF INDUSTRY TECHNOLOGY |
|
| TR01 | Transfer of patent right |