CN109186876A - Ceramic shell air-leakage test test fixture - Google Patents
Ceramic shell air-leakage test test fixture Download PDFInfo
- Publication number
- CN109186876A CN109186876A CN201811044097.0A CN201811044097A CN109186876A CN 109186876 A CN109186876 A CN 109186876A CN 201811044097 A CN201811044097 A CN 201811044097A CN 109186876 A CN109186876 A CN 109186876A
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- CN
- China
- Prior art keywords
- ceramic shell
- pallet
- venthole
- air
- test
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The present invention provides a kind of ceramic shell air-leakage test test fixtures, belong to ceramic air tight test technical field, including pallet, the center of the pallet is equipped with venthole, and disk of the pallet for support ceramic shell is equipped with the partial pressure channel being connected to the venthole.Ceramic shell air-leakage test test fixture provided by the invention, channel is divided by setting, the air-flow passed through from center roof vent is distributed to partial pressure channel, increase the volume for accommodating air-flow, so that the gas of same traffic and the contact area of pallet increase, the pressure of tray center point is reduced, pressure is avoided to concentrate, and then reduce the problem of pressure undue concentration causes ceramic shell crackle, it avoids damaging ceramic shell.
Description
Technical field
The invention belongs to ceramic air tight test technical fields, are to be related to a kind of ceramic shell air-tightness more specifically
Detect test fixture.
Background technique
Ceramic shell can be used for system in package, the packing forms being related to include: ceramic pin grid array (CPGA type) outside
Shell, flat (CQFP type) shell in ceramic four sides, ceramic double-row straight cutting (CDIP type) shell, ceramic (MCP type) shell, pottery of multi-chip
Porcelain is without lead chip carrier (CLCC type) shell, ceramic small outline (CSOP type) shell, ceramic flat (CFP type) shell, ceramics
Pad array (CLGA type) shell etc..Ceramic shell and matching cap board group provide physical protection at seal cavity for internal circuit
And mechanical support.
Ceramic shell air-leakage test is hunted leak by search gas helium (He), and instrument is mass-spectrometer leak detector.
Conventional with leak detection fixture is stainless steel pallet, outer dimension 190.00mm (reference value), with a thickness of 12.00mm (reference value), in
The pressure channel of the heart is having a size of φ 5.00mm (reference value).
When being hunted leak, ceramic shell is placed on pallet by leak detection requirement, starting mass-spectrometer leak detector is evacuated, by
There was only a pressure channel in pallet, referring to Fig. 5, air pressure is concentrated on the intracorporal central point of 4 chamber of ceramic shell when pumping, is caused
The pressure that ceramic shell central point is subject to is excessive, and ceramic shell is easy to generation porcelain and splits, as shown in fig. 6, ceramic shell is because of pressure
Concentrate cracked 5.Porcelain occurs when ceramic shell is hunted leak using conventional leak detection fixture and splits phenomenon, when being due to leak detection pumping, greatly
Air pressure all concentrates on a pressure channel causes ceramics to split so that Ceramic shell internal stress point pressure is excessive, in turn
Cause ceramic product rate low, cost of manufacture increases.
Summary of the invention
The purpose of the present invention is to provide a kind of ceramic shell air-leakage test test fixtures, to solve to deposit in the prior art
Ceramic shell leak detection when be easy cracking the technical issues of.
To achieve the above object, the technical solution adopted by the present invention is that: a kind of test of ceramic shell air-leakage test is provided
Fixture, including pallet, the center of the pallet are equipped with venthole, and disk of the pallet for support ceramic shell is equipped with and institute
State the partial pressure channel of venthole connection.
Further, the partial pressure channel includes multiple radially extending a point gas along the pallet centered on the venthole
Groove, described that gas groove is divided to be connected to the venthole, the length for dividing gas groove is less than the radius of the pallet.
Further, described that gas groove is divided to be two, divide gas groove to be arranged described in two in "-" type.
Further, described that gas groove is divided to be three or more, it is each described to divide gas groove centered on the venthole in putting
Shape is penetrated to be uniformly distributed.
Further, the length for dividing gas groove is less than the half of the width of the cavity of the ceramic shell for detection.
Further, the pallet with a thickness of 10mm-14mm, the depth for dividing gas groove is the pallet thickness
1/4-1/3。
Further, the width for dividing gas groove is identical as the aperture of the venthole.
Further, the annular groove for being put into sealing ring, institute are equipped on the pallet centered on the venthole
Annular groove is stated the one side opposite with the partial pressure channel is arranged in and is located at except the partial pressure channel.
Further, the aperture of the venthole is 4mm-6mm.
Further, the pallet is stainless steel part.
The beneficial effect of ceramic shell air-leakage test test fixture provided by the invention is: compared with prior art,
Ceramic shell air-leakage test test fixture of the present invention divides channel by setting, by the air-flow passed through from center roof vent point
It is scattered to partial pressure channel, increases the volume for accommodating air-flow, so that the contact area of the gas of same traffic and pallet increases, reduces support
The pressure of disk center's point, avoids pressure from concentrating, and then reduces pressure undue concentration the problem of causing ceramic shell crackle, avoids pair
Ceramic shell damages.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only of the invention some
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the structural schematic diagram one of ceramic shell air-leakage test test fixture provided in an embodiment of the present invention；
Fig. 2 is the half sectional view of Fig. 1；
Fig. 3 is the structural schematic diagram two of ceramic shell air-leakage test test fixture provided in an embodiment of the present invention；
Fig. 4 is the structural schematic diagram three of ceramic shell air-leakage test test fixture provided in an embodiment of the present invention；
Fig. 5 is the structural schematic diagram for the ceramic shell air-leakage test test fixture that the prior art provides；
Fig. 6 is that porcelain occurs for ceramic shell when the ceramic shell air-leakage test test fixture that the prior art provides is detected
The structural schematic diagram split.
Wherein, each appended drawing reference in figure:
1- divides gas groove；2- pallet；3- venthole；4- ceramic shell；5- crackle；6- annular groove.
Specific embodiment
In order to which technical problems, technical solutions and advantages to be solved are more clearly understood, tie below
Accompanying drawings and embodiments are closed, the present invention will be described in further detail.It should be appreciated that specific embodiment described herein is only
To explain the present invention, it is not intended to limit the present invention.
It should be noted that it can be directly another when element is referred to as " being fixed on " or " being set to " another element
On one element or indirectly on another element.When an element is known as " being connected to " another element, it can
To be directly to another element or be indirectly connected on another element.
It is to be appreciated that term " length ", " width ", "upper", "lower", "front", "rear", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "top", "bottom" "inner", "outside" is that orientation based on the figure or position are closed
System, is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must have
Specific orientation is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In the description of the present invention, the meaning of " plurality " is two or more, unless otherwise specifically defined.
Also referring to Fig. 1 to Fig. 4, now ceramic shell air-leakage test test fixture provided by the invention is said
It is bright.Ceramic shell air-leakage test test fixture, including pallet 2, the center of pallet 2 are equipped with venthole 3, and pallet 2 is used for support
The disk of ceramic shell is equipped with the partial pressure channel being connected to venthole 3.
Ceramic shell air-leakage test test fixture provided by the invention, compared with prior art, ceramic shell of the present invention
Air-leakage test test fixture divides channel by setting, and the air-flow passed through from center roof vent 3 is distributed to partial pressure channel,
Increase the volume for accommodating air-flow, so that the contact area of the gas of same traffic and pallet 2 increases, reduces 2 central point of pallet
Pressure avoids pressure from concentrating, and then reduces the problem of pressure undue concentration causes ceramic shell crackle, avoids making ceramic shell
At damage, the yield rate of ceramic shell is improved, reduces cost of manufacture.
Further, also referring to Fig. 1 to Fig. 4, as ceramic shell air-leakage test test clamp provided by the invention
Tool a kind of specific embodiment, partial pressure channel include it is multiple radially extend a point gas groove 1 along pallet 2 centered on venthole 3,
Each point of gas groove 1 is radial centered on venthole 3 to be uniformly distributed, and is divided gas groove 1 to be connected to venthole 3, is divided gas groove 1
Length is less than the radius of pallet 2.The present invention passes through from point to surface, expands the accommodation space of gas, reduces the pressure of gas,
Enter the air-flow of ceramic shell cavity through venthole 3, air-flow is distributed in point gas groove 1, due to the increase of volume, so that gas
Increase with the contact area of ceramic shell, avoids pressure and concentrate the damage caused by ceramic shell.
Further, referring to Fig. 1, a kind of tool as ceramic shell air-leakage test test fixture provided by the invention
Body embodiment, being divided to gas groove 1 is two, and two points of gas grooves 1 are arranged in "-" type.Air-flow is after the evolution of center roof vent 3
Disperse to two sides, increases the contact area of gas and ceramic shell, can prevent stress from concentrating.
Further, refering to Fig. 3 and Fig. 4, as ceramic shell air-leakage test test fixture provided by the invention one
Kind specific embodiment, dividing gas groove 1 is three or more, and each point of gas groove 1 is radial centered on venthole 3 uniformly to be divided
Cloth.Wherein Fig. 3 is tool there are four gas groove 1 is divided in cross setting, and Fig. 4 is to divide gas recessed in rice set up of character patt ern with eight
Slot 1 divides gas groove more than 1, and the area that gas is contacted with ceramic shell is bigger, and the pressure of gas pressure to ceramic shell is smaller.
Further, referring to FIG. 1 to FIG. 4, as ceramic shell air-leakage test test fixture provided by the invention
A kind of specific embodiment divides the length of gas groove 1 to be less than the half for being used for the width of the cavity of ceramic shell of detection.Ceramics
Shell is placed on pallet 2, and surrounding divides gas groove 1 in the cavity of ceramic shell, to avoid gas completely without departing from pallet 2
Body escape.
Further, referring to Fig. 2, a kind of tool as ceramic shell air-leakage test test fixture provided by the invention
Body embodiment, pallet 2 with a thickness of 10mm-14mm, divide gas groove 1 depth be 2 thickness of pallet 1/4-1/3.When pallet 2
With a thickness of 12mm when, divide gas groove 1 depth be 4mm.
Further, refering to fig. 1 to Fig. 4, as ceramic shell air-leakage test test fixture provided by the invention one
Kind specific embodiment, divides the width of gas groove 1 identical as the aperture of the venthole 3.
Further, referring to Fig. 2, a kind of tool as ceramic shell air-leakage test test fixture provided by the invention
Body embodiment is equipped with the annular groove 6 for being put into sealing ring, annular groove 6 on pallet 2 centered on the venthole 3
Except the one side opposite with partial pressure channel and partial pressure channel.
Further, referring to Fig. 1, a kind of tool as ceramic shell air-leakage test test fixture provided by the invention
Body embodiment, the aperture of venthole 3 are 4mm-6mm.
Further, a kind of specific embodiment party as ceramic shell air-leakage test test fixture provided by the invention
Formula, pallet 2 are stainless steel part.Wherein in the present invention, the diameter of pallet is 190mm, and with a thickness of 12mm, 3 diameter of venthole is
5mm。
When carrying out leak test using the present invention, increases the outer dimension of pallet, that is, be suitable for the ruler of different ceramic shells
It is very little, change the number for dividing gas groove 1, that is, is suitable for the air pressure endurance of different ceramic shells, allows the invention to be provided as
Similar structures product shares.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. ceramic shell air-leakage test test fixture, it is characterised in that: including pallet, the center of the pallet is equipped with ventilation
Hole, disk of the pallet for support ceramic shell are equipped with the partial pressure channel being connected to the venthole.
2. ceramic shell air-leakage test test fixture as described in claim 1, it is characterised in that: the partial pressure channel includes
It is multiple to radially extend a point gas groove along the pallet centered on the venthole, it is described that gas groove and the venthole is divided to connect
Logical, the length for dividing gas groove is less than the radius of the pallet.
3. ceramic shell air-leakage test test fixture as claimed in claim 2, it is characterised in that: described that gas groove is divided to be two
It is a, divide gas groove to be arranged described in two in "-" type.
4. ceramic shell air-leakage test test fixture as claimed in claim 2, it is characterised in that: described that gas groove is divided to be three
It is each described to divide gas groove is radial centered on the venthole to be uniformly distributed more than a.
5. such as the described in any item ceramic shell air-leakage test test fixtures of claim 2-4, it is characterised in that: described to divide gas
The length of groove is less than the half of the width of the cavity of the ceramic shell for detection.
6. such as the described in any item ceramic shell air-leakage test test fixtures of claim 2-4, it is characterised in that: the pallet
With a thickness of 10mm-14mm, the depth for dividing gas groove is the 1/4-1/3 of the pallet thickness.
7. such as the described in any item ceramic shell air-leakage test test fixtures of claim 2-4, it is characterised in that: described to divide gas
The width of groove is identical as the aperture of the venthole.
8. ceramic shell air-leakage test test fixture as described in claim 1, it is characterised in that: with described on the pallet
The annular groove for being put into sealing ring is equipped with centered on venthole, the annular groove is arranged opposite with the partial pressure channel
One side and be located at the partial pressure channel except.
9. ceramic shell air-leakage test test fixture as described in claim 1, it is characterised in that: the aperture of the venthole
For 4mm-6mm.
10. ceramic shell air-leakage test test fixture as described in claim 1, it is characterised in that: the pallet is stainless
Steel part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811044097.0A CN109186876A (en) | 2018-09-07 | 2018-09-07 | Ceramic shell air-leakage test test fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811044097.0A CN109186876A (en) | 2018-09-07 | 2018-09-07 | Ceramic shell air-leakage test test fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109186876A true CN109186876A (en) | 2019-01-11 |
Family
ID=64915258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811044097.0A Pending CN109186876A (en) | 2018-09-07 | 2018-09-07 | Ceramic shell air-leakage test test fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109186876A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111412869A (en) * | 2020-04-17 | 2020-07-14 | 大连理工大学 | Detection device and method for crack size of pressure-bearing shell wall based on gas leakage rate measurement |
| CN111595531A (en) * | 2020-05-19 | 2020-08-28 | 盐城工业职业技术学院 | Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate |
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| WO2010032201A1 (en) * | 2008-09-18 | 2010-03-25 | Universita' Degli Studi Di Genova | Reference leakage device for leak calibra tion |
| CN103763845A (en) * | 2014-01-29 | 2014-04-30 | 刘斌 | Application of radiation source alpha to pick-and-place device |
| CN204439290U (en) * | 2015-01-06 | 2015-07-01 | 柳州博昌汽车部件有限公司 | Small-sized business car executor cap assembly clamp for detecting air tightness |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111412869A (en) * | 2020-04-17 | 2020-07-14 | 大连理工大学 | Detection device and method for crack size of pressure-bearing shell wall based on gas leakage rate measurement |
| CN111412869B (en) * | 2020-04-17 | 2021-04-20 | 大连理工大学 | Detection device and method for crack size of pressure-bearing shell wall based on gas leakage rate measurement |
| CN111595531A (en) * | 2020-05-19 | 2020-08-28 | 盐城工业职业技术学院 | Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate |
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Application publication date: 20190111 |