CN111426431B - A multi-layer ceramic substrate air tightness detection device - Google Patents

A multi-layer ceramic substrate air tightness detection device Download PDF

Info

Publication number
CN111426431B
CN111426431B CN202010424528.7A CN202010424528A CN111426431B CN 111426431 B CN111426431 B CN 111426431B CN 202010424528 A CN202010424528 A CN 202010424528A CN 111426431 B CN111426431 B CN 111426431B
Authority
CN
China
Prior art keywords
ceramic substrate
positioning
elastic pressing
pressing frame
manipulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010424528.7A
Other languages
Chinese (zh)
Other versions
CN111426431A (en
Inventor
王明艳
方美清
姜为青
李明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hefei Wisdom Dragon Machinery Design Co ltd
Original Assignee
Yancheng Vocational Institute of Industry Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yancheng Vocational Institute of Industry Technology filed Critical Yancheng Vocational Institute of Industry Technology
Priority to CN202010424528.7A priority Critical patent/CN111426431B/en
Publication of CN111426431A publication Critical patent/CN111426431A/en
Application granted granted Critical
Publication of CN111426431B publication Critical patent/CN111426431B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00Manipulators not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/06Gripping heads and other end effectors with vacuum or magnetic holding means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

本发明公开了一种多层陶瓷基板气密性检测装置,包括定位上料装置、机械手、对中定位装置、真空接头、真空橡皮、喷枪和质谱检漏仪;定位上料装置包括上料筒和顶升板;若干块待测的多层陶瓷基板垂直堆叠放置在顶升板顶部;真空橡皮具有空腔窗;机械手底部设有吸盘和弹性压框;弹性压框同轴套设在吸盘外周的机械手底部,弹性压框的截面宽度不小于0.5mm;对中定位装置包括相互垂直的横向对中组件和竖向对中组件;横向对中组件和竖向对中组件均包括两块定位板。本发明能使整个检测过程均自动完成,自动化程度高,同时能准确控制多层陶瓷基板外边缘与空腔窗边缘之间的间距,且压紧位置和压紧力保持一致,从而使得气密性检测结果可靠、准确度高。

Figure 202010424528

The invention discloses a multi-layer ceramic substrate air tightness detection device, comprising a positioning and feeding device, a manipulator, a centering and positioning device, a vacuum joint, a vacuum rubber, a spray gun and a mass spectrometer leak detector; the positioning and feeding device includes a feeding barrel several multi-layer ceramic substrates to be tested are vertically stacked and placed on the top of the lifting plate; the vacuum rubber has a cavity window; the bottom of the manipulator is provided with a suction cup and an elastic pressing frame; the elastic pressing frame is coaxially sleeved on the outer periphery of the suction cup The bottom of the manipulator, the cross-sectional width of the elastic pressing frame is not less than 0.5mm; the centering and positioning device includes a horizontal centering component and a vertical centering component that are perpendicular to each other; both the horizontal centering component and the vertical centering component include two positioning plates . The invention can automatically complete the whole detection process, and has a high degree of automation. At the same time, it can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and keep the pressing position and pressing force consistent, so that the airtightness is ensured. The test results are reliable and accurate.

Figure 202010424528

Description

一种多层陶瓷基板气密性检测装置A kind of multi-layer ceramic substrate air tightness detection device

技术领域technical field

本发明涉及陶瓷基板检测技术领域,特别是一种多层陶瓷基板气密性检测装置。The invention relates to the technical field of ceramic substrate detection, in particular to a multi-layer ceramic substrate air tightness detection device.

背景技术Background technique

现代微电子技术发展异常迅猛,特别是各种光电子器件逐渐在向微型化、大规模集成化、高效率、高可靠性等方向发展。但随着电子系统集成度的提高,其功率密度随之增加,电子元件及系统整体工作产生热量上升、系统工作温度升高会引起半导体器件性能恶化、器件破坏、分层等,甚至会使封装的芯片烧毁,因此有效的电子封装必须解决电子系统的散热问题。The development of modern microelectronics technology is extremely rapid, especially various optoelectronic devices are gradually developing in the direction of miniaturization, large-scale integration, high efficiency and high reliability. However, with the improvement of electronic system integration, its power density increases, the heat generated by the overall operation of electronic components and the system increases, and the increase of system operating temperature will cause the performance of semiconductor devices to deteriorate, device damage, delamination, etc., and even cause packaging. The chip burns out, so effective electronic packaging must solve the problem of heat dissipation of the electronic system.

电子封装所用的基片是一种底座电子元件,主要为电子元器件及其相互联线提供机械承载支撑、气密性保护并可作为热沉过渡片给芯片散热。The substrate used in electronic packaging is a base electronic component, which mainly provides mechanical bearing support, air tightness protection for electronic components and their interconnecting wires, and can be used as a heat sink transition piece to dissipate heat from the chip.

陶瓷基板具有耐高温、电绝缘性能高、介电常数和介质损耗低、热导率大、化学稳定性好、与元件的热膨胀系数相近等优点,并可对光电子器件起到较强的保护作用,因而在航空、航天和军事工程等领域都得到了非常广泛的应用。Ceramic substrates have the advantages of high temperature resistance, high electrical insulation performance, low dielectric constant and dielectric loss, high thermal conductivity, good chemical stability, and similar thermal expansion coefficients to components, and can play a strong role in protecting optoelectronic devices. Therefore, it has been widely used in the fields of aviation, aerospace and military engineering.

高可靠微电子器件和半导体器件多采用陶瓷外壳、陶瓷-金属一体化外壳进行气密性封装。在陶瓷外壳、陶瓷-金属一体化外壳的制造过程中,出于成本和质量控制考虑,需要先对构成外壳的主要部分---多层陶瓷基板的气密性进行检测筛选,然后再焊接金属件。High-reliability microelectronic devices and semiconductor devices are mostly air-tightly packaged with ceramic shells and ceramic-metal integrated shells. In the manufacturing process of ceramic shells and ceramic-metal integrated shells, due to cost and quality control considerations, it is necessary to first test and screen the air tightness of the main part of the shell, the multilayer ceramic substrate, and then weld the metal pieces.

目前,对于陶瓷外壳、陶瓷-金属一体化外壳进行封盖前气密性检测适用于具有内空腔的微电子器件和半导体器件封装的气密性,对于无空腔的或多空腔的多层陶瓷基板的气密性检测还不完善。At present, the pre-sealing air tightness testing of ceramic housings and ceramic-metal integrated housings is suitable for the air tightness of microelectronic devices and semiconductor device packages with internal cavities. The airtightness detection of layered ceramic substrates is not perfect.

公开号为CN106768684A 的中国发明专利申请,发明名称为“一种多层陶瓷基板气密性检测方法” ,其包括用于检测测量漏率的质谱检漏仪,质谱检漏仪包括真空接头,真空接头上设有真空抽气口,调整真空橡皮的位置,使空腔窗的中心与真空抽气口的中心对准,从而实现无空腔或多空腔的多层陶瓷基板的气密性检测。The Chinese invention patent application with the publication number CN106768684A, the name of the invention is "a method for detecting the air tightness of a multilayer ceramic substrate", which includes a mass spectrometer leak detector for detecting and measuring the leak rate, and the mass spectrometer leak detector includes a vacuum joint, a vacuum There is a vacuum suction port on the joint, and the position of the vacuum rubber is adjusted so that the center of the cavity window is aligned with the center of the vacuum suction port, so as to realize the air tightness detection of the multi-cavity multi-cavity ceramic substrate.

然而,上述专利申请,在使用中,还存在着如下不足,有待进行改进:However, the above-mentioned patent application still has the following deficiencies in use, and needs to be improved:

1、需要人工将多层陶瓷基板放置在空腔窗上方并压紧,检测完成后,还需人工件检测完成的多层陶瓷基板从空腔窗上方移除。整个检测过程,自动化程度低,检测效率低下。1. It is necessary to manually place the multi-layer ceramic substrate above the cavity window and press it tightly. After the inspection is completed, the multi-layer ceramic substrate that has been inspected by the workpiece needs to be removed from the cavity window. In the whole detection process, the degree of automation is low, and the detection efficiency is low.

2、检测过程中,多层陶瓷基板外边缘需要与空腔窗边缘间距不低于0.5mm;然而,人工放置多层陶瓷基板时,很难把握这个间距尺寸,从而使得密封检测效果不佳。2. During the inspection process, the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window needs to be no less than 0.5mm; however, when placing the multilayer ceramic substrate manually, it is difficult to grasp this distance, resulting in poor sealing inspection results.

3、人工将多层陶瓷基板放置在空腔窗上方并压紧时,压紧位置和压紧力均难以固定,因而使得多层陶瓷基板与真空橡皮之间的密封效果不佳。另外,若压紧在多层陶瓷基板的中部位置,不但不能增加多层陶瓷基板与真空橡皮之间的密封性能,反而会损伤多层陶瓷基板。3. When the multi-layer ceramic substrate is manually placed above the cavity window and pressed, it is difficult to fix the pressing position and pressing force, which makes the sealing effect between the multi-layer ceramic substrate and the vacuum rubber poor. In addition, if it is pressed in the middle of the multi-layer ceramic substrate, it will not only fail to increase the sealing performance between the multi-layer ceramic substrate and the vacuum rubber, but will damage the multi-layer ceramic substrate.

发明内容SUMMARY OF THE INVENTION

本发明要解决的技术问题是针对上述现有技术的不足,而提供一种多层陶瓷基板气密性检测装置,该多层陶瓷基板气密性检测装置整个检测过程均自动完成,自动化程度高,同时能准确控制多层陶瓷基板外边缘与空腔窗边缘之间的间距,且压紧位置和压紧力保持一致,从而使得气密性检测结果可靠、准确度高。The technical problem to be solved by the present invention is to aim at the deficiencies of the above-mentioned prior art, and to provide a multi-layer ceramic substrate air-tightness detection device, the entire detection process of the multi-layer ceramic substrate air-tightness detection device is automatically completed, and the degree of automation is high. At the same time, the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window can be accurately controlled, and the pressing position and pressing force are consistent, so that the air tightness detection result is reliable and accurate.

为解决上述技术问题,本发明采用的技术方案是:In order to solve the above-mentioned technical problems, the technical scheme adopted in the present invention is:

一种多层陶瓷基板气密性检测装置,包括定位上料装置、机械手、对中定位装置、真空接头、真空橡皮、喷枪和质谱检漏仪。A multi-layer ceramic substrate air tightness detection device includes a positioning and feeding device, a manipulator, a centering and positioning device, a vacuum joint, a vacuum rubber, a spray gun and a mass spectrometer leak detector.

定位上料装置设置在真空接头的一侧,定位上料装置包括上料筒和同轴设置在上料筒内的顶升板。顶升板的高度能够升降。若干块待测的多层陶瓷基板垂直堆叠放置在顶升板顶部。The positioning and feeding device is arranged on one side of the vacuum joint, and the positioning and feeding device includes a feeding barrel and a lifting plate coaxially arranged in the feeding barrel. The height of the lift plate can be raised and lowered. Several multi-layer ceramic substrates to be tested are vertically stacked and placed on top of the lift plate.

真空接头内具有真空抽气口,该真空抽气口与质谱检漏仪相连接。There is a vacuum suction port in the vacuum joint, and the vacuum suction port is connected with the mass spectrometer leak detector.

真空橡皮密封铺设在真空接头的上表面,且具有与真空抽气口相连通的空腔窗。该空腔窗的长度比多层陶瓷基板的长度小1mm以上,空腔窗的宽度比多层陶瓷基板的宽度小1mm以上。The vacuum rubber seal is laid on the upper surface of the vacuum joint, and has a cavity window communicated with the vacuum exhaust port. The length of the cavity window is smaller than the length of the multilayer ceramic substrate by 1 mm or more, and the width of the cavity window is smaller than the width of the multilayer ceramic substrate by 1 mm or more.

机械手能将位于定位上料装置中待测的多层陶瓷基板移栽至空腔窗上方。机械手底部设置有吸盘和弹性压框。吸盘位于机械手的底部中心,且高度能够伸缩。弹性压框同轴套设在吸盘外周的机械手底部,弹性压框的截面宽度不小于0.5mm。The manipulator can transfer the multi-layer ceramic substrate to be tested in the positioning and feeding device to the top of the cavity window. The bottom of the manipulator is provided with a suction cup and an elastic pressing frame. The suction cup is located at the bottom center of the manipulator and is highly retractable. The elastic pressing frame is coaxially sleeved on the bottom of the manipulator on the outer periphery of the suction cup, and the section width of the elastic pressing frame is not less than 0.5mm.

对中定位装置包括相互垂直的横向对中组件和竖向对中组件。横向对中组件和竖向对中组件均包括两块对称设置在空腔窗两侧的定位板。两块定位板能同步相向或相背运动。The centering and positioning device includes a horizontal centering component and a vertical centering component that are perpendicular to each other. Both the lateral centering assembly and the vertical centering assembly include two positioning plates symmetrically arranged on both sides of the cavity window. The two positioning plates can move towards or away from each other synchronously.

喷枪设置在空腔窗的一侧,用于向位于空腔窗上方的多层陶瓷基板施加气压。The spray gun is arranged on one side of the cavity window, and is used for applying air pressure to the multilayer ceramic substrate located above the cavity window.

弹性压框呈回字型,弹性压框的内框尺寸与空腔窗的尺寸相同,弹性压框的外框尺寸与多层陶瓷基板的外形尺寸相同,弹性压框的截面宽度为0.5~1mm。The elastic pressing frame is in the shape of a back-shaped. The size of the inner frame of the elastic pressing frame is the same as that of the cavity window, and the outer frame size of the elastic pressing frame is the same as that of the multilayer ceramic substrate. The cross-sectional width of the elastic pressing frame is 0.5~1mm. .

弹性压框的截面宽度为0.8mm。The section width of the elastic pressing frame is 0.8mm.

弹性压框中内置有压力传感器。A pressure sensor is built into the elastic pressing frame.

吸盘顶部连接伸缩杆,伸缩杆顶部连接伸缩电机,伸缩电机安装在机械手底部中心。The top of the suction cup is connected with a telescopic rod, the top of the telescopic rod is connected with a telescopic motor, and the telescopic motor is installed at the bottom center of the manipulator.

上料筒内壁面和每块定位板内壁面均设置有弹性耐摩层。The inner wall surface of the upper material cylinder and the inner wall surface of each positioning plate are provided with elastic anti-friction layers.

顶升板底部安装有顶升气缸。A jacking cylinder is installed at the bottom of the jacking plate.

本发明具有如下有益效果:The present invention has the following beneficial effects:

1、本申请中定位上料装置和机械手等的设置,使得整个检测过程均自动完成,自动化程度高。1. The setting of the positioning feeding device and the manipulator in this application enables the entire detection process to be completed automatically with a high degree of automation.

2、上述机械手底部的吸盘、弹性压环以及对中定位装置的设置,能准确控制多层陶瓷基板外边缘与空腔窗边缘之间的间距,且压紧位置和压紧力保持一致,从而使得气密性检测结果可靠、准确度高。2. The setting of the suction cup, elastic pressing ring and centering and positioning device at the bottom of the above-mentioned manipulator can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and the pressing position and pressing force are consistent, so that The air tightness detection result is reliable and accurate.

附图说明Description of drawings

图1显示了本发明一种多层陶瓷基板气密性检测装置的结构示意图。FIG. 1 shows a schematic structural diagram of a multi-layer ceramic substrate air tightness detection device of the present invention.

图2显示了本发明中机械手对定位上料装置中多层陶瓷基板进行吸取的结构示意图。FIG. 2 shows a schematic structural diagram of the manipulator sucking the multilayer ceramic substrate in the positioning and feeding device according to the present invention.

图3显示了本发明中机械手去除弹性压框后的结构示意图。FIG. 3 shows a schematic structural diagram of the manipulator in the present invention after the elastic pressing frame is removed.

其中有:Including:

10.定位上料装置;11.上料筒;111.弹性耐摩层;12.顶升板;121.顶升气缸;10. Positioning and feeding device; 11. Feeding barrel; 111. Elastic wear-resistant layer; 12. Lifting plate; 121. Lifting cylinder;

20.机械手;21.吸盘;211.伸缩杆;20. Manipulator; 21. Suction cup; 211. Telescopic rod;

30.对中对位装置;31.定位板;30. Alignment device; 31. Positioning plate;

40.真空接头;41.真空抽气口;40. Vacuum connector; 41. Vacuum exhaust port;

50.真空橡皮;51.空腔窗;50. Vacuum rubber; 51. Cavity window;

60.多层陶瓷基板;70.喷枪;80.质谱仪检漏仪。60. Multilayer ceramic substrate; 70. Spray gun; 80. Mass spectrometer leak detector.

具体实施方式Detailed ways

下面结合附图和具体较佳实施方式对本发明作进一步详细的说明。The present invention will be described in further detail below with reference to the accompanying drawings and specific preferred embodiments.

本发明的描述中,需要理解的是,术语“左侧”、“右侧”、“上部”、“下部”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,“第一”、“第二”等并不表示零部件的重要程度,因此不能理解为对本发明的限制。本实施例中采用的具体尺寸只是为了举例说明技术方案,并不限制本发明的保护范围。In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "left side", "right side", "upper", "lower part", etc. are based on the orientation or positional relationship shown in the drawings, only For the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a particular orientation, be constructed and operate in a particular orientation, "first", "second", etc. importance, and therefore should not be construed as a limitation to the present invention. The specific dimensions used in this embodiment are only for illustrating the technical solution, and do not limit the protection scope of the present invention.

如图1所示,一种多层陶瓷基板气密性检测装置,包括定位上料装置10、机械手20、对中定位装置30、真空接头40、真空橡皮50、喷枪70和质谱检漏仪80。As shown in FIG. 1, a multi-layer ceramic substrate air tightness detection device includes a positioning and feeding device 10, a manipulator 20, a centering and positioning device 30, a vacuum joint 40, a vacuum rubber 50, a spray gun 70 and a mass spectrometer leak detector 80 .

定位上料装置设置在真空接头的一侧,如图2所示,定位上料装置包括上料筒和同轴设置在上料筒内的顶升板。The positioning and feeding device is arranged on one side of the vacuum joint. As shown in Figure 2, the positioning and feeding device includes a feeding cylinder and a lifting plate coaxially arranged in the feeding cylinder.

上料筒的内壁面优选设置有弹性耐摩层111,防止对多层陶瓷基板造成磨损。The inner wall surface of the upper barrel is preferably provided with an elastic anti-friction layer 111 to prevent abrasion of the multilayer ceramic substrate.

顶升板的高度能够升降,优选通过顶升气缸121进行顶升。The height of the jacking plate can be raised and lowered, and the jacking is preferably performed by the jacking cylinder 121 .

若干块待测的多层陶瓷基板垂直堆叠放置在顶升板顶部。Several multi-layer ceramic substrates to be tested are vertically stacked and placed on top of the lift plate.

真空接头内具有真空抽气口,该真空抽气口与质谱检漏仪相连接。There is a vacuum suction port in the vacuum joint, and the vacuum suction port is connected with the mass spectrometer leak detector.

真空橡皮密封铺设在真空接头的上表面,且具有与真空抽气口相连通的空腔窗51。该空腔窗的长度比多层陶瓷基板的长度小1mm以上,空腔窗的宽度比多层陶瓷基板的宽度小1mm以上。The vacuum rubber seal is laid on the upper surface of the vacuum joint, and has a cavity window 51 that communicates with the vacuum exhaust port. The length of the cavity window is smaller than the length of the multilayer ceramic substrate by 1 mm or more, and the width of the cavity window is smaller than the width of the multilayer ceramic substrate by 1 mm or more.

机械手能将位于定位上料装置中待测的多层陶瓷基板移栽至空腔窗上方,机械手为成熟的现有技术,能实现6个方向的自由度。The manipulator can transplant the multi-layer ceramic substrate to be tested in the positioning and feeding device to the top of the cavity window. The manipulator is a mature existing technology and can realize 6 degrees of freedom.

机械手底部设置有吸盘21和弹性压框22。如图3所示,吸盘优选通过伸缩杆211设置在机械手的底部中心,且高度能够伸缩;伸缩杆的伸缩优选由安装在机械手底部中心的伸缩电机控制。弹性压框同轴套设在吸盘外周的机械手底部,弹性压框的截面宽度(也即后续的搭接部宽度)不小于0.5mm。The bottom of the manipulator is provided with a suction cup 21 and an elastic pressing frame 22 . As shown in FIG. 3 , the suction cup is preferably arranged at the center of the bottom of the manipulator through a telescopic rod 211 and can be extended and retracted in height; the telescopic rod is preferably controlled by a telescopic motor installed in the center of the bottom of the manipulator. The elastic pressing frame is coaxially sleeved on the bottom of the manipulator on the outer periphery of the suction cup, and the cross-sectional width of the elastic pressing frame (ie, the width of the subsequent lap joint) is not less than 0.5mm.

对中定位装置包括相互垂直的横向对中组件和竖向对中组件。横向对中组件和竖向对中组件均包括两块对称设置在空腔窗两侧的定位板31。两块定位板能同步相向或相背运动。如图1所示,定位板优选安装在同步电机上,同步电机安装在真空接头上,定位板底部优选与真空橡皮上表面相接触。The centering and positioning device includes a horizontal centering component and a vertical centering component that are perpendicular to each other. Both the lateral centering assembly and the vertical centering assembly include two positioning plates 31 symmetrically arranged on both sides of the cavity window. The two positioning plates can move towards or away from each other synchronously. As shown in FIG. 1 , the positioning plate is preferably installed on the synchronous motor, the synchronous motor is installed on the vacuum joint, and the bottom of the positioning plate is preferably in contact with the upper surface of the vacuum rubber.

进一步,每块定位板内壁面均优选设置有弹性耐摩层。Further, the inner wall surface of each positioning plate is preferably provided with an elastic anti-friction layer.

喷枪设置在空腔窗的一侧,用于向位于空腔窗上方的多层陶瓷基板施加气压。喷枪优选设置在相邻两块定位板之间,也即指向多层陶瓷基板的拐角部位,从而避免妨碍定位板的横向或竖向移动。The spray gun is arranged on one side of the cavity window, and is used for applying air pressure to the multilayer ceramic substrate located above the cavity window. The spray gun is preferably arranged between two adjacent positioning plates, that is, directed to the corners of the multilayer ceramic substrate, so as to avoid hindering the lateral or vertical movement of the positioning plates.

弹性压框呈回字型,弹性压框的内框尺寸与空腔窗的尺寸相同,弹性压框的外框尺寸与多层陶瓷基板的外形尺寸相同,弹性压框的截面宽度优选为0.5~1mm,进一步优选为0.8mm。The elastic pressing frame is in the shape of a back-shaped. The size of the inner frame of the elastic pressing frame is the same as that of the cavity window, and the outer frame size of the elastic pressing frame is the same as that of the multilayer ceramic substrate. The cross-sectional width of the elastic pressing frame is preferably 0.5~ 1 mm, more preferably 0.8 mm.

进一步,弹性压框中优选内置有压力传感器,从而能使得不同厚度的多层陶瓷基板与真空橡皮之间的密封压力保持一致。Further, a pressure sensor is preferably built into the elastic pressing frame, so that the sealing pressure between the multi-layer ceramic substrates of different thicknesses and the vacuum rubber can be kept consistent.

一种无空腔或多空腔多层陶瓷基板的气密性检测方法,包括如下步骤。An air tightness detection method for a multi-cavity multi-cavity multilayer ceramic substrate, comprising the following steps.

步骤1,组装真空接头:将真空接头中的真空抽气口与质谱检漏仪相连接。Step 1, assemble the vacuum connector: connect the vacuum exhaust port in the vacuum connector to the mass spectrometer leak detector.

步骤2,铺设真空橡皮。Step 2, laying the vacuum rubber.

真空橡皮铺设前,先在位于真空抽气口外周的真空橡皮上表面优选涂抹真空硅脂。Before laying the vacuum rubber, preferably apply vacuum silicone grease on the upper surface of the vacuum rubber on the outer periphery of the vacuum suction port.

然后,将真空橡皮铺设在真空接头的上表面,并使得真空橡皮的空腔窗同轴位于真空抽气口的正上方,且相连通。Then, the vacuum rubber is laid on the upper surface of the vacuum joint, so that the cavity window of the vacuum rubber is coaxially located just above the vacuum suction port and communicated.

步骤3,定位吸料:若干块待测的多层陶瓷基板垂直堆叠放置在顶升板顶部。通过控制顶升板的高度升降,使得位于顶部的多层陶瓷基板与上料筒顶部相齐平,进而使得机械手能在固定高度位置吸取多层陶瓷基板。机械手移至上料筒正上方,机械手底部的吸盘伸长,并吸附在顶部多层陶瓷基板的中心。Step 3, positioning and sucking materials: several multi-layer ceramic substrates to be tested are vertically stacked and placed on the top of the lifting plate. By controlling the height of the lifting plate, the multi-layer ceramic substrate at the top is flush with the top of the upper cylinder, so that the manipulator can pick up the multi-layer ceramic substrate at a fixed height position. The manipulator is moved to the top of the upper barrel, and the suction cup at the bottom of the manipulator is extended and adsorbed on the center of the top multi-layer ceramic substrate.

步骤4,上料:机械手移动,将吸附的多层陶瓷基板移栽并放置在空腔窗的上方,吸盘仍保持吸附状态。Step 4, Loading: the manipulator moves, and the adsorbed multilayer ceramic substrate is transplanted and placed above the cavity window, and the suction cup remains in the adsorption state.

步骤5,多层陶瓷基板对中及真空橡皮密封:横向对中组件和竖向对中组件中的两块定位板均同步相向运动。在同步相向运动过程中,定位板底部将挤压位于下方的真空橡皮顶部,使得真空橡皮与真空接头底部形成密封。当两块定位板均与多层陶瓷基板相接触时,停止相向运动。此时,多层陶瓷基板完成对中,同轴位于空腔窗的正上方,多层陶瓷基板外侧边缘搭设在空腔窗外侧的真空橡皮表面,形成搭接部。Step 5, centering and vacuum rubber sealing of the multilayer ceramic substrate: the two positioning plates in the horizontal centering assembly and the vertical centering assembly are moved toward each other synchronously. During the synchronous relative movement, the bottom of the positioning plate will squeeze the top of the vacuum rubber underneath, so that the vacuum rubber and the bottom of the vacuum joint form a seal. When both positioning plates are in contact with the multilayer ceramic substrate, the relative movement is stopped. At this point, the multilayer ceramic substrate is centered, coaxially positioned just above the cavity window, and the outer edge of the multilayer ceramic substrate is placed on the surface of the vacuum rubber outside the cavity window to form a lap joint.

当多层陶瓷基板具有多空腔时,步骤5中多层陶瓷基板完成对中后,应使多层陶瓷基板的所有空腔均位于真空橡皮的空腔窗内。When the multilayer ceramic substrate has multiple cavities, after the alignment of the multilayer ceramic substrate in step 5 is completed, all cavities of the multilayer ceramic substrate should be located in the cavity windows of the vacuum rubber.

进一步,上述搭接部宽度优选为0.5~1mm,进一步优选为0.8mm。Further, the width of the overlapping portion is preferably 0.5 to 1 mm, and more preferably 0.8 mm.

步骤6,多层陶瓷基板密封:吸盘放气、收缩,解除与多层陶瓷基板的吸附。机械手带动弹性压框高度下降,弹性压框与多层陶瓷基板的搭接部相接触,定位板复位。弹性压框高度继续下降,将多层陶瓷基板的搭接部密封压紧在真空橡皮表面,从而使得空腔窗为一个密封空腔。Step 6, multi-layer ceramic substrate sealing: the suction cup is deflated and contracted to release the adsorption with the multi-layer ceramic substrate. The manipulator drives the height of the elastic pressing frame to lower, the elastic pressing frame contacts the overlapping part of the multi-layer ceramic substrate, and the positioning plate is reset. The height of the elastic pressing frame continues to decrease, and the overlapping portion of the multilayer ceramic substrate is sealed and pressed against the surface of the vacuum rubber, so that the cavity window is a sealed cavity.

步骤7,气密封检测:对步骤6形成的密封空腔抽真空,接着采用喷枪对多层陶瓷基板施加气压,质谱检漏仪检测多层陶瓷基板的漏率。Step 7, air tightness detection: vacuumize the sealed cavity formed in step 6, and then apply air pressure to the multilayer ceramic substrate with a spray gun, and a mass spectrometer leak detector detects the leak rate of the multilayer ceramic substrate.

步骤8,气密封检测完成后,机械手根据步骤7气密性检测结果,将检测完成的多层陶瓷基板放置在合格品区或不合格品区。然后复位,重复步骤3至步骤8,进行下一个多层陶瓷基板的气密性检测。In step 8, after the air tightness detection is completed, the manipulator places the inspected multilayer ceramic substrate in the qualified product area or the unqualified product area according to the air tightness detection result in step 7. Then reset, repeat steps 3 to 8, and perform the air tightness detection of the next multilayer ceramic substrate.

以上详细描述了本发明的优选实施方式,但是,本发明并不限于上述实施方式中的具体细节,在本发明的技术构思范围内,可以对本发明的技术方案进行多种等同变换,这些等同变换均属于本发明的保护范围。The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details of the above-mentioned embodiments. Within the scope of the technical concept of the present invention, various equivalent transformations can be made to the technical solutions of the present invention. These equivalent transformations All belong to the protection scope of the present invention.

Claims (2)

1. The utility model provides a multilayer ceramic substrate gas tightness detection device which characterized in that: the device comprises a positioning feeding device, a mechanical arm, a centering positioning device, a vacuum joint, a vacuum rubber, a spray gun and a mass spectrometer leak detector;
the positioning and feeding device is arranged on one side of the vacuum joint and comprises a feeding barrel and a jacking plate coaxially arranged in the feeding barrel; the height of the jacking plate can be lifted; a plurality of multilayer ceramic substrates to be tested are vertically stacked and placed on the top of the jacking plate;
a vacuum pumping hole is formed in the vacuum joint and is connected with the mass spectrometer leak detector;
the vacuum rubber seal is laid on the upper surface of the vacuum joint and is provided with a cavity window communicated with the vacuum pumping hole; the length of the cavity window is smaller than that of the multilayer ceramic substrate by more than 1mm, and the width of the cavity window is smaller than that of the multilayer ceramic substrate by more than 1 mm;
the manipulator can transplant the multilayer ceramic substrate to be tested in the positioning feeding device to the upper part of the cavity window; the bottom of the manipulator is provided with a sucker and an elastic pressing frame; the sucker is positioned at the center of the bottom of the manipulator, and the height of the sucker can be extended and contracted; the elastic pressing frame is coaxially sleeved at the bottom of the manipulator at the periphery of the sucker, and the width of the section of the elastic pressing frame is not less than 0.5 mm;
the centering and positioning device comprises a transverse centering assembly and a vertical centering assembly which are vertical to each other; the transverse centering assembly and the vertical centering assembly respectively comprise two positioning plates which are symmetrically arranged at two sides of the cavity window; the two positioning plates can synchronously move towards or away from each other;
the spray gun is arranged on one side of the cavity window and used for applying air pressure to the multilayer ceramic substrate positioned above the cavity window;
the arrangement of the sucking disc, the elastic pressing frame and the centering and positioning device at the bottom of the manipulator can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and the pressing position and the pressing force are kept consistent;
the elastic pressing frame is in a shape of a Chinese character 'hui', the size of an inner frame of the elastic pressing frame is the same as that of the cavity window, the size of an outer frame of the elastic pressing frame is the same as that of the outer shape of the multilayer ceramic substrate, and the width of the section of the elastic pressing frame is 0.5-1 mm; the section width of the elastic pressing frame is 0.8 mm; a pressure sensor is arranged in the elastic pressing frame; the top of the sucker is connected with a telescopic rod, the top of the telescopic rod is connected with a telescopic motor, and the telescopic motor is arranged at the center of the bottom of the manipulator; the inner wall surface of the charging barrel and the inner wall surface of each positioning plate are provided with elastic wear-resistant layers.
2. The multilayer ceramic substrate airtightness detection apparatus according to claim 1, wherein: and the bottom of the jacking plate is provided with a jacking cylinder.
CN202010424528.7A 2020-05-19 2020-05-19 A multi-layer ceramic substrate air tightness detection device Active CN111426431B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010424528.7A CN111426431B (en) 2020-05-19 2020-05-19 A multi-layer ceramic substrate air tightness detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010424528.7A CN111426431B (en) 2020-05-19 2020-05-19 A multi-layer ceramic substrate air tightness detection device

Publications (2)

Publication Number Publication Date
CN111426431A CN111426431A (en) 2020-07-17
CN111426431B true CN111426431B (en) 2022-06-17

Family

ID=71558843

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010424528.7A Active CN111426431B (en) 2020-05-19 2020-05-19 A multi-layer ceramic substrate air tightness detection device

Country Status (1)

Country Link
CN (1) CN111426431B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113237334B (en) * 2021-03-31 2023-06-30 汪洋 High-temperature sintering equipment and sintering method for ceramic substrate

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998039642A1 (en) * 1997-03-03 1998-09-11 Sze Spezial Elektronik Hagenuk Gmbh Liquid sensor for liquid and gaseous organic compounds and method for the production thereof
CN102749178A (en) * 2012-07-10 2012-10-24 潮州三环(集团)股份有限公司 Automatic ceramic base body microleakage detector and detection method thereof
CN202910976U (en) * 2012-11-23 2013-05-01 中国电子科技集团公司第三十八研究所 Isostatic pressing die used for low-temperature and high-temperature cofiring ceramic substrate cavity body
CN106768684A (en) * 2016-12-03 2017-05-31 中国电子科技集团公司第四十三研究所 A kind of multilayer ceramic substrate air-tightness detection method
CN208043353U (en) * 2018-03-27 2018-11-02 天津市宇龙昊天汽车滤清器有限公司 A kind of dry-type encapsulated property detection device of fuel filter
CN208043359U (en) * 2018-03-27 2018-11-02 天津市宇龙昊天汽车滤清器有限公司 A kind of air cleaner device for detecting sealability of multistation
CN209841374U (en) * 2019-03-05 2019-12-24 南通市力沛流体阀业有限公司 Ultra-large valve pressure test tool
CN212363582U (en) * 2020-05-19 2021-01-15 盐城工业职业技术学院 Hermeticity Testing Instrument Based on Multilayer Ceramic Substrate

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN211626838U (en) * 2020-01-21 2020-10-02 天津市通达广源科技发展有限公司 Ceramic vacuum air tightness testing device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998039642A1 (en) * 1997-03-03 1998-09-11 Sze Spezial Elektronik Hagenuk Gmbh Liquid sensor for liquid and gaseous organic compounds and method for the production thereof
CN102749178A (en) * 2012-07-10 2012-10-24 潮州三环(集团)股份有限公司 Automatic ceramic base body microleakage detector and detection method thereof
CN202910976U (en) * 2012-11-23 2013-05-01 中国电子科技集团公司第三十八研究所 Isostatic pressing die used for low-temperature and high-temperature cofiring ceramic substrate cavity body
CN106768684A (en) * 2016-12-03 2017-05-31 中国电子科技集团公司第四十三研究所 A kind of multilayer ceramic substrate air-tightness detection method
CN208043353U (en) * 2018-03-27 2018-11-02 天津市宇龙昊天汽车滤清器有限公司 A kind of dry-type encapsulated property detection device of fuel filter
CN208043359U (en) * 2018-03-27 2018-11-02 天津市宇龙昊天汽车滤清器有限公司 A kind of air cleaner device for detecting sealability of multistation
CN209841374U (en) * 2019-03-05 2019-12-24 南通市力沛流体阀业有限公司 Ultra-large valve pressure test tool
CN212363582U (en) * 2020-05-19 2021-01-15 盐城工业职业技术学院 Hermeticity Testing Instrument Based on Multilayer Ceramic Substrate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
电子陶瓷及其封接气密性测试方法;曹培福;《行业标准》;20160115;全文 *

Also Published As

Publication number Publication date
CN111426431A (en) 2020-07-17

Similar Documents

Publication Publication Date Title
CN217361537U (en) Positioning device for wafer
CN109533957B (en) Battery positive and negative plate transfer mechanism
KR102355572B1 (en) Inspection Devices, Inspection Systems, and Positioning Methods
CN111426431B (en) A multi-layer ceramic substrate air tightness detection device
CN115078400A (en) Ceramic substrate defect detection device and defect detection method
TWI455244B (en) Clamping tool and equipment for rework process
CN113262951A (en) Substrate processing apparatus and substrate processing method
CN212363582U (en) Hermeticity Testing Instrument Based on Multilayer Ceramic Substrate
CN106768684A (en) A kind of multilayer ceramic substrate air-tightness detection method
CN111595531B (en) Air tightness detection method for non-cavity or multi-cavity multilayer ceramic substrate
CN118737931A (en) Wafer temporary bonding equipment
CN118737932A (en) Wafer temporary bonding equipment
JP4773938B2 (en) Solar cell module laminating equipment.
CN103204462B (en) Low-temperature ultrasonic anodic bonding device for silicon wafers and glass pieces
CN115468697A (en) Piston-type piezoresistor, Dewar, manufacturing method and vacuum degree testing method
CN115441003A (en) Production equipment of fuel cell stack
CN111137850B (en) Method for Realizing Low Stress Sensitive Structural Chip Technology
CN115236564A (en) Sheet inserting mechanism and magnetic property measuring system for silicon steel sheet sample
CN110634777A (en) A device and method for realizing gas-tight packaging of electronic components with atmosphere protection
CN111578889A (en) Circular or square ceramic substrate parallelism detection method
CN222336696U (en) Ceramic substrate air tightness testing device
CN222124652U (en) A high airtightness testing fixture for metal dam carrier
TWI818552B (en) Bonding machine for improving alignment accuracy
CN222460967U (en) Airtightness test device for automobile steering mechanism
CN222049461U (en) A sealing structure for testing the sealing performance of a battery liquid cooling plate

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20230720

Address after: 230000 b-1018, Woye Garden commercial office building, 81 Ganquan Road, Shushan District, Hefei City, Anhui Province

Patentee after: HEFEI WISDOM DRAGON MACHINERY DESIGN Co.,Ltd.

Address before: No. 285, Jiefang South Road, Chengnan New District, Yancheng City, Jiangsu Province, 224000

Patentee before: YANCHENG INSTITUTE OF INDUSTRY TECHNOLOGY