CN111426431B - A multi-layer ceramic substrate air tightness detection device - Google Patents

Abstract

The invention discloses a multi-layer ceramic substrate air tightness detection device, comprising a positioning and feeding device, a manipulator, a centering and positioning device, a vacuum joint, a vacuum rubber, a spray gun and a mass spectrometer leak detector; the positioning and feeding device includes a feeding barrel several multi-layer ceramic substrates to be tested are vertically stacked and placed on the top of the lifting plate; the vacuum rubber has a cavity window; the bottom of the manipulator is provided with a suction cup and an elastic pressing frame; the elastic pressing frame is coaxially sleeved on the outer periphery of the suction cup The bottom of the manipulator, the cross-sectional width of the elastic pressing frame is not less than 0.5mm; the centering and positioning device includes a horizontal centering component and a vertical centering component that are perpendicular to each other; both the horizontal centering component and the vertical centering component include two positioning plates . The invention can automatically complete the whole detection process, and has a high degree of automation. At the same time, it can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and keep the pressing position and pressing force consistent, so that the airtightness is ensured. The test results are reliable and accurate.

Description

A kind of multi-layer ceramic substrate air tightness detection device

technical field

The invention relates to the technical field of ceramic substrate detection, in particular to a multi-layer ceramic substrate air tightness detection device.

Background technique

The development of modern microelectronics technology is extremely rapid, especially various optoelectronic devices are gradually developing in the direction of miniaturization, large-scale integration, high efficiency and high reliability. However, with the improvement of electronic system integration, its power density increases, the heat generated by the overall operation of electronic components and the system increases, and the increase of system operating temperature will cause the performance of semiconductor devices to deteriorate, device damage, delamination, etc., and even cause packaging. The chip burns out, so effective electronic packaging must solve the problem of heat dissipation of the electronic system.

The substrate used in electronic packaging is a base electronic component, which mainly provides mechanical bearing support, air tightness protection for electronic components and their interconnecting wires, and can be used as a heat sink transition piece to dissipate heat from the chip.

Ceramic substrates have the advantages of high temperature resistance, high electrical insulation performance, low dielectric constant and dielectric loss, high thermal conductivity, good chemical stability, and similar thermal expansion coefficients to components, and can play a strong role in protecting optoelectronic devices. Therefore, it has been widely used in the fields of aviation, aerospace and military engineering.

High-reliability microelectronic devices and semiconductor devices are mostly air-tightly packaged with ceramic shells and ceramic-metal integrated shells. In the manufacturing process of ceramic shells and ceramic-metal integrated shells, due to cost and quality control considerations, it is necessary to first test and screen the air tightness of the main part of the shell, the multilayer ceramic substrate, and then weld the metal pieces.

At present, the pre-sealing air tightness testing of ceramic housings and ceramic-metal integrated housings is suitable for the air tightness of microelectronic devices and semiconductor device packages with internal cavities. The airtightness detection of layered ceramic substrates is not perfect.

The Chinese invention patent application with the publication number CN106768684A, the name of the invention is "a method for detecting the air tightness of a multilayer ceramic substrate", which includes a mass spectrometer leak detector for detecting and measuring the leak rate, and the mass spectrometer leak detector includes a vacuum joint, a vacuum There is a vacuum suction port on the joint, and the position of the vacuum rubber is adjusted so that the center of the cavity window is aligned with the center of the vacuum suction port, so as to realize the air tightness detection of the multi-cavity multi-cavity ceramic substrate.

However, the above-mentioned patent application still has the following deficiencies in use, and needs to be improved:

1. It is necessary to manually place the multi-layer ceramic substrate above the cavity window and press it tightly. After the inspection is completed, the multi-layer ceramic substrate that has been inspected by the workpiece needs to be removed from the cavity window. In the whole detection process, the degree of automation is low, and the detection efficiency is low.

2. During the inspection process, the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window needs to be no less than 0.5mm; however, when placing the multilayer ceramic substrate manually, it is difficult to grasp this distance, resulting in poor sealing inspection results.

3. When the multi-layer ceramic substrate is manually placed above the cavity window and pressed, it is difficult to fix the pressing position and pressing force, which makes the sealing effect between the multi-layer ceramic substrate and the vacuum rubber poor. In addition, if it is pressed in the middle of the multi-layer ceramic substrate, it will not only fail to increase the sealing performance between the multi-layer ceramic substrate and the vacuum rubber, but will damage the multi-layer ceramic substrate.

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to aim at the deficiencies of the above-mentioned prior art, and to provide a multi-layer ceramic substrate air-tightness detection device, the entire detection process of the multi-layer ceramic substrate air-tightness detection device is automatically completed, and the degree of automation is high. At the same time, the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window can be accurately controlled, and the pressing position and pressing force are consistent, so that the air tightness detection result is reliable and accurate.

In order to solve the above-mentioned technical problems, the technical scheme adopted in the present invention is:

A multi-layer ceramic substrate air tightness detection device includes a positioning and feeding device, a manipulator, a centering and positioning device, a vacuum joint, a vacuum rubber, a spray gun and a mass spectrometer leak detector.

The positioning and feeding device is arranged on one side of the vacuum joint, and the positioning and feeding device includes a feeding barrel and a lifting plate coaxially arranged in the feeding barrel. The height of the lift plate can be raised and lowered. Several multi-layer ceramic substrates to be tested are vertically stacked and placed on top of the lift plate.

There is a vacuum suction port in the vacuum joint, and the vacuum suction port is connected with the mass spectrometer leak detector.

The vacuum rubber seal is laid on the upper surface of the vacuum joint, and has a cavity window communicated with the vacuum exhaust port. The length of the cavity window is smaller than the length of the multilayer ceramic substrate by 1 mm or more, and the width of the cavity window is smaller than the width of the multilayer ceramic substrate by 1 mm or more.

The manipulator can transfer the multi-layer ceramic substrate to be tested in the positioning and feeding device to the top of the cavity window. The bottom of the manipulator is provided with a suction cup and an elastic pressing frame. The suction cup is located at the bottom center of the manipulator and is highly retractable. The elastic pressing frame is coaxially sleeved on the bottom of the manipulator on the outer periphery of the suction cup, and the section width of the elastic pressing frame is not less than 0.5mm.

The centering and positioning device includes a horizontal centering component and a vertical centering component that are perpendicular to each other. Both the lateral centering assembly and the vertical centering assembly include two positioning plates symmetrically arranged on both sides of the cavity window. The two positioning plates can move towards or away from each other synchronously.

The spray gun is arranged on one side of the cavity window, and is used for applying air pressure to the multilayer ceramic substrate located above the cavity window.

The elastic pressing frame is in the shape of a back-shaped. The size of the inner frame of the elastic pressing frame is the same as that of the cavity window, and the outer frame size of the elastic pressing frame is the same as that of the multilayer ceramic substrate. The cross-sectional width of the elastic pressing frame is 0.5~1mm. .

The section width of the elastic pressing frame is 0.8mm.

A pressure sensor is built into the elastic pressing frame.

The top of the suction cup is connected with a telescopic rod, the top of the telescopic rod is connected with a telescopic motor, and the telescopic motor is installed at the bottom center of the manipulator.

The inner wall surface of the upper material cylinder and the inner wall surface of each positioning plate are provided with elastic anti-friction layers.

A jacking cylinder is installed at the bottom of the jacking plate.

The present invention has the following beneficial effects:

1. The setting of the positioning feeding device and the manipulator in this application enables the entire detection process to be completed automatically with a high degree of automation.

2. The setting of the suction cup, elastic pressing ring and centering and positioning device at the bottom of the above-mentioned manipulator can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and the pressing position and pressing force are consistent, so that The air tightness detection result is reliable and accurate.

Description of drawings

FIG. 1 shows a schematic structural diagram of a multi-layer ceramic substrate air tightness detection device of the present invention.

FIG. 2 shows a schematic structural diagram of the manipulator sucking the multilayer ceramic substrate in the positioning and feeding device according to the present invention.

FIG. 3 shows a schematic structural diagram of the manipulator in the present invention after the elastic pressing frame is removed.

Including:

10. Positioning and feeding device; 11. Feeding barrel; 111. Elastic wear-resistant layer; 12. Lifting plate; 121. Lifting cylinder;

20. Manipulator; 21. Suction cup; 211. Telescopic rod;

30. Alignment device; 31. Positioning plate;

40. Vacuum connector; 41. Vacuum exhaust port;

50. Vacuum rubber; 51. Cavity window;

60. Multilayer ceramic substrate; 70. Spray gun; 80. Mass spectrometer leak detector.

Detailed ways

The present invention will be described in further detail below with reference to the accompanying drawings and specific preferred embodiments.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "left side", "right side", "upper", "lower part", etc. are based on the orientation or positional relationship shown in the drawings, only For the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a particular orientation, be constructed and operate in a particular orientation, "first", "second", etc. importance, and therefore should not be construed as a limitation to the present invention. The specific dimensions used in this embodiment are only for illustrating the technical solution, and do not limit the protection scope of the present invention.

As shown in FIG. 1, a multi-layer ceramic substrate air tightness detection device includes a positioning and feeding device 10, a manipulator 20, a centering and positioning device 30, a vacuum joint 40, a vacuum rubber 50, a spray gun 70 and a mass spectrometer leak detector 80 .

The positioning and feeding device is arranged on one side of the vacuum joint. As shown in Figure 2, the positioning and feeding device includes a feeding cylinder and a lifting plate coaxially arranged in the feeding cylinder.

The inner wall surface of the upper barrel is preferably provided with an elastic anti-friction layer 111 to prevent abrasion of the multilayer ceramic substrate.

The height of the jacking plate can be raised and lowered, and the jacking is preferably performed by the jacking cylinder 121 .

Several multi-layer ceramic substrates to be tested are vertically stacked and placed on top of the lift plate.

There is a vacuum suction port in the vacuum joint, and the vacuum suction port is connected with the mass spectrometer leak detector.

The vacuum rubber seal is laid on the upper surface of the vacuum joint, and has a cavity window 51 that communicates with the vacuum exhaust port. The length of the cavity window is smaller than the length of the multilayer ceramic substrate by 1 mm or more, and the width of the cavity window is smaller than the width of the multilayer ceramic substrate by 1 mm or more.

The manipulator can transplant the multi-layer ceramic substrate to be tested in the positioning and feeding device to the top of the cavity window. The manipulator is a mature existing technology and can realize 6 degrees of freedom.

The bottom of the manipulator is provided with a suction cup 21 and an elastic pressing frame 22 . As shown in FIG. 3 , the suction cup is preferably arranged at the center of the bottom of the manipulator through a telescopic rod 211 and can be extended and retracted in height; the telescopic rod is preferably controlled by a telescopic motor installed in the center of the bottom of the manipulator. The elastic pressing frame is coaxially sleeved on the bottom of the manipulator on the outer periphery of the suction cup, and the cross-sectional width of the elastic pressing frame (ie, the width of the subsequent lap joint) is not less than 0.5mm.

The centering and positioning device includes a horizontal centering component and a vertical centering component that are perpendicular to each other. Both the lateral centering assembly and the vertical centering assembly include two positioning plates 31 symmetrically arranged on both sides of the cavity window. The two positioning plates can move towards or away from each other synchronously. As shown in FIG. 1 , the positioning plate is preferably installed on the synchronous motor, the synchronous motor is installed on the vacuum joint, and the bottom of the positioning plate is preferably in contact with the upper surface of the vacuum rubber.

Further, the inner wall surface of each positioning plate is preferably provided with an elastic anti-friction layer.

The spray gun is arranged on one side of the cavity window, and is used for applying air pressure to the multilayer ceramic substrate located above the cavity window. The spray gun is preferably arranged between two adjacent positioning plates, that is, directed to the corners of the multilayer ceramic substrate, so as to avoid hindering the lateral or vertical movement of the positioning plates.

The elastic pressing frame is in the shape of a back-shaped. The size of the inner frame of the elastic pressing frame is the same as that of the cavity window, and the outer frame size of the elastic pressing frame is the same as that of the multilayer ceramic substrate. The cross-sectional width of the elastic pressing frame is preferably 0.5~ 1 mm, more preferably 0.8 mm.

Further, a pressure sensor is preferably built into the elastic pressing frame, so that the sealing pressure between the multi-layer ceramic substrates of different thicknesses and the vacuum rubber can be kept consistent.

An air tightness detection method for a multi-cavity multi-cavity multilayer ceramic substrate, comprising the following steps.

Step 1, assemble the vacuum connector: connect the vacuum exhaust port in the vacuum connector to the mass spectrometer leak detector.

Step 2, laying the vacuum rubber.

Before laying the vacuum rubber, preferably apply vacuum silicone grease on the upper surface of the vacuum rubber on the outer periphery of the vacuum suction port.

Then, the vacuum rubber is laid on the upper surface of the vacuum joint, so that the cavity window of the vacuum rubber is coaxially located just above the vacuum suction port and communicated.

Step 3, positioning and sucking materials: several multi-layer ceramic substrates to be tested are vertically stacked and placed on the top of the lifting plate. By controlling the height of the lifting plate, the multi-layer ceramic substrate at the top is flush with the top of the upper cylinder, so that the manipulator can pick up the multi-layer ceramic substrate at a fixed height position. The manipulator is moved to the top of the upper barrel, and the suction cup at the bottom of the manipulator is extended and adsorbed on the center of the top multi-layer ceramic substrate.

Step 4, Loading: the manipulator moves, and the adsorbed multilayer ceramic substrate is transplanted and placed above the cavity window, and the suction cup remains in the adsorption state.

Step 5, centering and vacuum rubber sealing of the multilayer ceramic substrate: the two positioning plates in the horizontal centering assembly and the vertical centering assembly are moved toward each other synchronously. During the synchronous relative movement, the bottom of the positioning plate will squeeze the top of the vacuum rubber underneath, so that the vacuum rubber and the bottom of the vacuum joint form a seal. When both positioning plates are in contact with the multilayer ceramic substrate, the relative movement is stopped. At this point, the multilayer ceramic substrate is centered, coaxially positioned just above the cavity window, and the outer edge of the multilayer ceramic substrate is placed on the surface of the vacuum rubber outside the cavity window to form a lap joint.

When the multilayer ceramic substrate has multiple cavities, after the alignment of the multilayer ceramic substrate in step 5 is completed, all cavities of the multilayer ceramic substrate should be located in the cavity windows of the vacuum rubber.

Further, the width of the overlapping portion is preferably 0.5 to 1 mm, and more preferably 0.8 mm.

Step 6, multi-layer ceramic substrate sealing: the suction cup is deflated and contracted to release the adsorption with the multi-layer ceramic substrate. The manipulator drives the height of the elastic pressing frame to lower, the elastic pressing frame contacts the overlapping part of the multi-layer ceramic substrate, and the positioning plate is reset. The height of the elastic pressing frame continues to decrease, and the overlapping portion of the multilayer ceramic substrate is sealed and pressed against the surface of the vacuum rubber, so that the cavity window is a sealed cavity.

Step 7, air tightness detection: vacuumize the sealed cavity formed in step 6, and then apply air pressure to the multilayer ceramic substrate with a spray gun, and a mass spectrometer leak detector detects the leak rate of the multilayer ceramic substrate.

In step 8, after the air tightness detection is completed, the manipulator places the inspected multilayer ceramic substrate in the qualified product area or the unqualified product area according to the air tightness detection result in step 7. Then reset, repeat steps 3 to 8, and perform the air tightness detection of the next multilayer ceramic substrate.

The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details of the above-mentioned embodiments. Within the scope of the technical concept of the present invention, various equivalent transformations can be made to the technical solutions of the present invention. These equivalent transformations All belong to the protection scope of the present invention.

Claims (2)

1. The utility model provides a multilayer ceramic substrate gas tightness detection device which characterized in that: the device comprises a positioning feeding device, a mechanical arm, a centering positioning device, a vacuum joint, a vacuum rubber, a spray gun and a mass spectrometer leak detector;

the positioning and feeding device is arranged on one side of the vacuum joint and comprises a feeding barrel and a jacking plate coaxially arranged in the feeding barrel; the height of the jacking plate can be lifted; a plurality of multilayer ceramic substrates to be tested are vertically stacked and placed on the top of the jacking plate;

a vacuum pumping hole is formed in the vacuum joint and is connected with the mass spectrometer leak detector;

the vacuum rubber seal is laid on the upper surface of the vacuum joint and is provided with a cavity window communicated with the vacuum pumping hole; the length of the cavity window is smaller than that of the multilayer ceramic substrate by more than 1mm, and the width of the cavity window is smaller than that of the multilayer ceramic substrate by more than 1 mm;

the manipulator can transplant the multilayer ceramic substrate to be tested in the positioning feeding device to the upper part of the cavity window; the bottom of the manipulator is provided with a sucker and an elastic pressing frame; the sucker is positioned at the center of the bottom of the manipulator, and the height of the sucker can be extended and contracted; the elastic pressing frame is coaxially sleeved at the bottom of the manipulator at the periphery of the sucker, and the width of the section of the elastic pressing frame is not less than 0.5 mm;

the centering and positioning device comprises a transverse centering assembly and a vertical centering assembly which are vertical to each other; the transverse centering assembly and the vertical centering assembly respectively comprise two positioning plates which are symmetrically arranged at two sides of the cavity window; the two positioning plates can synchronously move towards or away from each other;

the spray gun is arranged on one side of the cavity window and used for applying air pressure to the multilayer ceramic substrate positioned above the cavity window;

the arrangement of the sucking disc, the elastic pressing frame and the centering and positioning device at the bottom of the manipulator can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and the pressing position and the pressing force are kept consistent;

the elastic pressing frame is in a shape of a Chinese character 'hui', the size of an inner frame of the elastic pressing frame is the same as that of the cavity window, the size of an outer frame of the elastic pressing frame is the same as that of the outer shape of the multilayer ceramic substrate, and the width of the section of the elastic pressing frame is 0.5-1 mm; the section width of the elastic pressing frame is 0.8 mm; a pressure sensor is arranged in the elastic pressing frame; the top of the sucker is connected with a telescopic rod, the top of the telescopic rod is connected with a telescopic motor, and the telescopic motor is arranged at the center of the bottom of the manipulator; the inner wall surface of the charging barrel and the inner wall surface of each positioning plate are provided with elastic wear-resistant layers.

2. The multilayer ceramic substrate airtightness detection apparatus according to claim 1, wherein: and the bottom of the jacking plate is provided with a jacking cylinder.

Images