CN111426431B - Multilayer ceramic substrate gas tightness detection device - Google Patents
Multilayer ceramic substrate gas tightness detection device Download PDFInfo
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- CN111426431B CN111426431B CN202010424528.7A CN202010424528A CN111426431B CN 111426431 B CN111426431 B CN 111426431B CN 202010424528 A CN202010424528 A CN 202010424528A CN 111426431 B CN111426431 B CN 111426431B
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- multilayer ceramic
- ceramic substrate
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- pressing frame
- positioning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The invention discloses a multilayer ceramic substrate air tightness detection device which comprises a positioning feeding device, a mechanical arm, a centering positioning device, a vacuum joint, a vacuum rubber, a spray gun and a mass spectrometer leak detector, wherein the positioning feeding device is arranged on the mechanical arm; the positioning feeding device comprises a feeding barrel and a jacking plate; vertically stacking a plurality of multilayer ceramic substrates to be tested on the top of the jacking plate; the vacuum rubber has a cavity window; the bottom of the manipulator is provided with a sucker and an elastic pressing frame; the elastic pressing frame is coaxially sleeved at the bottom of the manipulator on the periphery of the sucker, and the section width of the elastic pressing frame is not less than 0.5 mm; the centering and positioning device comprises a transverse centering assembly and a vertical centering assembly which are vertical to each other; horizontal centering subassembly and vertical centering subassembly all include two locating plates. The invention can automatically complete the whole detection process, has high automation degree, can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and keeps the consistent pressing position and pressing force, thereby ensuring reliable and high-accuracy air tightness detection result.
Description
Technical Field
The invention relates to the technical field of ceramic substrate detection, in particular to a multilayer ceramic substrate airtightness detection device.
Background
Modern microelectronic technology is developed very rapidly, and especially various optoelectronic devices are gradually developed in the direction of miniaturization, large-scale integration, high efficiency, high reliability and the like. However, as the integration of electronic systems increases, the power density increases, the heat generated by the operation of the electronic components and the system increases, the operating temperature of the system increases, which may cause the performance deterioration, device destruction, delamination, etc. of the semiconductor device, and even burn out the packaged chip.
The substrate used for electronic packaging is a base electronic element, and mainly provides mechanical bearing support and air tightness protection for electronic components and mutual connection thereof, and can be used as a heat sink transition piece for heat dissipation of a chip.
The ceramic substrate has the advantages of high temperature resistance, high electrical insulation performance, low dielectric constant and dielectric loss, large thermal conductivity, good chemical stability, similar thermal expansion coefficient with elements and the like, and can play a stronger protection role for optoelectronic devices, thereby being widely applied in the fields of aviation, aerospace, military engineering and the like.
The high-reliability microelectronic device and the semiconductor device are hermetically packaged by adopting a ceramic shell and a ceramic-metal integrated shell. In the manufacturing process of the ceramic shell and the ceramic-metal integrated shell, for the consideration of cost and quality control, the airtightness of the multilayer ceramic substrate, which is the main part of the shell, needs to be detected and screened, and then metal parts need to be welded.
At present, the airtightness detection before capping of ceramic shells and ceramic-metal integrated shells is suitable for the airtightness of microelectronic devices and semiconductor device packages with inner cavities, and the airtightness detection of multi-layer ceramic substrates without cavities or with multiple cavities is still incomplete.
The invention discloses a Chinese patent application with the publication number of CN106768684A, and the invention name is 'a method for detecting the air tightness of a multilayer ceramic substrate', which comprises a mass spectrum leak detector for detecting and measuring the leak rate, wherein the mass spectrum leak detector comprises a vacuum joint, a vacuum pumping hole is arranged on the vacuum joint, and the position of a vacuum rubber is adjusted to align the center of a cavity window with the center of the vacuum pumping hole, so that the air tightness detection of the multilayer ceramic substrate without a cavity or multiple cavities is realized.
However, the above patent application, in use, has the following disadvantages to be improved:
1. the multilayer ceramic substrate needs to be manually placed above the cavity window and compressed, and after detection is completed, the multilayer ceramic substrate which needs to be manually detected is removed from the cavity window. The whole detection process has low automation degree and low detection efficiency.
2. In the detection process, the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window is not less than 0.5 mm; however, when the multilayer ceramic substrate is manually placed, it is difficult to grasp the size of the gap, so that the sealing detection effect is not good.
3. When the multilayer ceramic substrate is manually placed above the cavity window and is compressed, the compression position and the compression force are difficult to fix, so that the sealing effect between the multilayer ceramic substrate and the vacuum rubber is poor. In addition, if the pressure is applied to the middle of the multilayer ceramic substrate, the sealing performance between the multilayer ceramic substrate and the vacuum eraser cannot be increased, and the multilayer ceramic substrate may be damaged.
Disclosure of Invention
The invention aims to solve the technical problem of the prior art and provides a multilayer ceramic substrate air tightness detection device, the whole detection process of the multilayer ceramic substrate air tightness detection device is automatically completed, the automation degree is high, the distance between the outer edge of the multilayer ceramic substrate and the edge of a cavity window can be accurately controlled, and the pressing position and the pressing force are kept consistent, so that the air tightness detection result is reliable and the accuracy is high.
In order to solve the technical problems, the invention adopts the technical scheme that:
the utility model provides a multilayer ceramic substrate gas tightness detection device, includes location loading attachment, manipulator, centering positioner, vacuum joint, vacuum rubber, spray gun and mass spectrum leak detector.
The positioning and feeding device is arranged on one side of the vacuum connector and comprises an upper charging barrel and a jacking plate coaxially arranged in the upper charging barrel. The height of the jacking plate can be lifted. A plurality of multilayer ceramic substrates to be tested are vertically stacked on the top of the jacking plate.
And a vacuum pumping hole is formed in the vacuum joint and is connected with the mass spectrometer leak detector.
The vacuum rubber seal is laid on the upper surface of the vacuum joint and is provided with a cavity window communicated with the vacuum pumping hole. The length of the cavity window is smaller than the length of the multilayer ceramic substrate by more than 1mm, and the width of the cavity window is smaller than the width of the multilayer ceramic substrate by more than 1 mm.
The manipulator can transplant the multilayer ceramic substrate to be tested in the positioning and feeding device to the upper part of the cavity window. The bottom of the manipulator is provided with a sucker and an elastic pressing frame. The sucking disc is located the bottom center of manipulator, and highly can stretch out and draw back. The elastic pressing frame is coaxially sleeved at the bottom of the manipulator at the periphery of the sucker, and the width of the section of the elastic pressing frame is not less than 0.5 mm.
The centering and positioning device comprises a transverse centering assembly and a vertical centering assembly which are perpendicular to each other. Horizontal centering subassembly and vertical centering subassembly all include two symmetries and set up the locating plate in cavity window both sides. The two positioning plates can synchronously move towards or away from each other.
The spray gun is disposed at one side of the cavity window for applying air pressure to the multilayer ceramic substrate located above the cavity window.
The elastic pressing frame is in a shape like a Chinese character 'hui', the size of an inner frame of the elastic pressing frame is the same as that of the cavity window, the size of an outer frame of the elastic pressing frame is the same as that of the outer shape of the multilayer ceramic substrate, and the width of the cross section of the elastic pressing frame is 0.5-1 mm.
The section width of the elastic pressing frame is 0.8 mm.
The elastic pressure frame is internally provided with a pressure sensor.
The telescopic link is connected at the sucking disc top, and flexible motor is connected at the telescopic link top, and flexible motor is installed at manipulator bottom center.
The inner wall surface of the charging barrel and the inner wall surface of each positioning plate are provided with elastic wear-resistant layers.
And the bottom of the jacking plate is provided with a jacking cylinder.
The invention has the following beneficial effects:
1. the setting of location loading attachment and manipulator etc. in this application for whole testing process is all accomplished automatically, and degree of automation is high.
2. The arrangement of the sucker at the bottom of the manipulator, the elastic pressing ring and the centering and positioning device can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and the pressing position and the pressing force are kept consistent, so that the air tightness detection result is reliable and the accuracy is high.
Drawings
FIG. 1 is a schematic structural diagram of a device for detecting the airtightness of a multilayer ceramic substrate according to the present invention.
FIG. 2 is a schematic structural diagram showing the suction of the robot arm to the multilayer ceramic substrate in the positioning and feeding device according to the present invention.
Fig. 3 shows a schematic structural diagram of the robot arm after removing the elastic pressing frame.
Among them are:
10. positioning a feeding device; 11. feeding a material barrel; 111. an elastic abrasion resistant layer; 12. a jacking plate; 121. jacking a cylinder;
20. a manipulator; 21. a suction cup; 211. a telescopic rod;
30. centering and aligning devices; 31. positioning a plate;
40. a vacuum joint; 41. a vacuum pumping port;
50. a vacuum rubber; 51. a cavity window;
60. a multilayer ceramic substrate; 70. a spray gun; 80. a mass spectrometer leak detector.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific preferred embodiments.
In the description of the present invention, it is to be understood that the terms "left side", "right side", "upper part", "lower part", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and that "first", "second", etc., do not represent an important degree of the component parts, and thus are not to be construed as limiting the present invention. The specific dimensions used in the present example are only for illustrating the technical solution and do not limit the scope of protection of the present invention.
As shown in FIG. 1, the multilayer ceramic substrate airtightness detection device comprises a positioning feeding device 10, a manipulator 20, a centering positioning device 30, a vacuum joint 40, a vacuum rubber 50, a spray gun 70 and a mass spectrometer leak detector 80.
The positioning and feeding device is arranged on one side of the vacuum joint and comprises a feeding barrel and a lifting plate coaxially arranged in the feeding barrel, as shown in figure 2.
The inner wall surface of the upper cylinder is preferably provided with an elastic abrasion resistant layer 111 to prevent abrasion of the multilayer ceramic substrate.
The height of jacking board can go up and down, preferably carries out the jacking through jacking cylinder 121.
A plurality of multilayer ceramic substrates to be tested are vertically stacked on the top of the jacking plate.
And a vacuum pumping hole is formed in the vacuum joint and is connected with the mass spectrometer leak detector.
The vacuum rubber seal is laid on the upper surface of the vacuum joint and is provided with a cavity window 51 communicated with the vacuum pumping hole. The length of the cavity window is smaller than the length of the multilayer ceramic substrate by more than 1mm, and the width of the cavity window is smaller than the width of the multilayer ceramic substrate by more than 1 mm.
The manipulator can transplant the multilayer ceramic substrate that is arranged in the location loading attachment and awaits measuring to cavity window top, and the manipulator is ripe prior art, can realize the degree of freedom of 6 orientations.
The bottom of the manipulator is provided with a suction cup 21 and an elastic pressing frame 22. As shown in fig. 3, the suction cup is preferably arranged at the bottom center of the manipulator through a telescopic rod 211, and the height of the suction cup can be extended and contracted; the extension and retraction of the telescopic rod are preferably controlled by a telescopic motor arranged at the center of the bottom of the manipulator. The elastic pressing frame is coaxially sleeved at the bottom of the manipulator at the periphery of the sucker, and the section width of the elastic pressing frame (namely the width of a subsequent lap joint part) is not less than 0.5 mm.
The centering and positioning device comprises a transverse centering assembly and a vertical centering assembly which are perpendicular to each other. Horizontal centering subassembly and vertical centering subassembly all include two symmetries and set up the locating plate 31 in the cavity window both sides. The two positioning plates can synchronously move towards or away from each other. As shown in FIG. 1, the alignment plate is preferably mounted on a synchronous motor mounted on the vacuum attachment, and the bottom of the alignment plate is preferably in contact with the upper surface of the vacuum blanket.
Furthermore, an elastic wear-resistant layer is preferably arranged on the inner wall surface of each positioning plate.
The spray gun is disposed at one side of the cavity window for applying air pressure to the multilayer ceramic substrate located above the cavity window. The spray gun is preferably disposed between two adjacent aligning plates, i.e., at a corner portion directed to the multilayer ceramic substrate, so as to avoid interference with lateral or vertical movement of the aligning plates.
The elastic pressing frame is in a shape like a Chinese character 'hui', the size of an inner frame of the elastic pressing frame is the same as that of the cavity window, the size of an outer frame of the elastic pressing frame is the same as that of the outer shape of the multilayer ceramic substrate, and the cross section width of the elastic pressing frame is preferably 0.5-1 mm, and is further preferably 0.8 mm.
Further, it is preferable that a pressure sensor is built in the elastic pressing frame, so that the sealing pressure between the multi-layer ceramic substrate and the vacuum rubber having different thicknesses can be kept uniform.
A method for detecting the air tightness of a non-cavity or multi-cavity multilayer ceramic substrate comprises the following steps.
Step 1, assembling a vacuum joint: and connecting a vacuum pumping hole in the vacuum joint with a mass spectrometer leak detector.
And 2, paving the vacuum rubber.
Before the vacuum eraser is laid, vacuum silicone grease is preferably coated on the upper surface of the vacuum eraser positioned on the periphery of the vacuum extraction opening.
Then, the vacuum rubber is laid on the upper surface of the vacuum joint, and the cavity window of the vacuum rubber is coaxially positioned right above the vacuum pumping hole and communicated with the vacuum pumping hole.
Step 3, positioning and sucking: and a plurality of multilayer ceramic substrates to be tested are vertically stacked on the top of the jacking plate. Through the high lift of control jacking board for the multilayer ceramic substrate that is located the top flushes mutually with last feed cylinder top, and then makes the manipulator can absorb multilayer ceramic substrate at fixed height position. And the mechanical arm moves to the position right above the feeding barrel, and the sucker at the bottom of the mechanical arm extends and is adsorbed at the center of the multilayer ceramic substrate at the top.
Step 4, feeding: the manipulator moves to transplant the adsorbed multilayer ceramic substrate and place the multilayer ceramic substrate above the cavity window, and the sucker still keeps an adsorption state.
Step 5, centering the multilayer ceramic substrate and sealing the multilayer ceramic substrate by a vacuum rubber: two positioning plates in the transverse centering assembly and the vertical centering assembly synchronously move in opposite directions. During the synchronous opposite movement, the bottom of the positioning plate presses the top of the vacuum rubber positioned below, so that the vacuum rubber forms a seal with the bottom of the vacuum joint. When the two positioning plates are both contacted with the multilayer ceramic substrate, the opposite movement is stopped. At the moment, the multilayer ceramic substrate is centered and coaxially positioned right above the cavity window, and the outer edge of the multilayer ceramic substrate is erected on the surface of the vacuum rubber outside the cavity window to form a lap joint part.
When the multilayer ceramic substrate has multiple cavities, all the cavities of the multilayer ceramic substrate are positioned in the cavity window of the vacuum rubber after the multilayer ceramic substrate is centered in the step 5.
Further, the width of the lap joint is preferably 0.5 to 1mm, and more preferably 0.8 mm.
Step 6, sealing the multilayer ceramic substrate: the sucking disc deflates and contracts to release the adsorption with the multilayer ceramic substrate. The manipulator drives the elastic pressing frame to descend, the elastic pressing frame is in contact with the lap joint part of the multilayer ceramic substrate, and the positioning plate resets. The height of the elastic pressing frame is continuously reduced, and the lap joint part of the multilayer ceramic substrate is tightly pressed on the surface of the vacuum rubber in a sealing way, so that the cavity window is a sealed cavity.
And 7, air sealing detection: and (4) vacuumizing the sealed cavity formed in the step (6), applying air pressure to the multilayer ceramic substrate by using a spray gun, and detecting the leakage rate of the multilayer ceramic substrate by using a mass spectrum leak detector.
And 8, after the air tightness detection is finished, placing the detected multilayer ceramic substrate in a qualified product area or an unqualified product area by the manipulator according to the air tightness detection result in the step 7. And resetting, and repeating the steps 3 to 8 to detect the air tightness of the next multilayer ceramic substrate.
Although the preferred embodiments of the present invention have been described in detail, the present invention is not limited to the details of the embodiments, and various equivalent modifications can be made within the technical spirit of the present invention, and the scope of the present invention is also within the scope of the present invention.
Claims (2)
1. The utility model provides a multilayer ceramic substrate gas tightness detection device which characterized in that: the device comprises a positioning feeding device, a mechanical arm, a centering positioning device, a vacuum joint, a vacuum rubber, a spray gun and a mass spectrometer leak detector;
the positioning and feeding device is arranged on one side of the vacuum joint and comprises a feeding barrel and a jacking plate coaxially arranged in the feeding barrel; the height of the jacking plate can be lifted; a plurality of multilayer ceramic substrates to be tested are vertically stacked and placed on the top of the jacking plate;
a vacuum pumping hole is formed in the vacuum joint and is connected with the mass spectrometer leak detector;
the vacuum rubber seal is laid on the upper surface of the vacuum joint and is provided with a cavity window communicated with the vacuum pumping hole; the length of the cavity window is smaller than that of the multilayer ceramic substrate by more than 1mm, and the width of the cavity window is smaller than that of the multilayer ceramic substrate by more than 1 mm;
the manipulator can transplant the multilayer ceramic substrate to be tested in the positioning feeding device to the upper part of the cavity window; the bottom of the manipulator is provided with a sucker and an elastic pressing frame; the sucker is positioned at the center of the bottom of the manipulator, and the height of the sucker can be extended and contracted; the elastic pressing frame is coaxially sleeved at the bottom of the manipulator at the periphery of the sucker, and the width of the section of the elastic pressing frame is not less than 0.5 mm;
the centering and positioning device comprises a transverse centering assembly and a vertical centering assembly which are vertical to each other; the transverse centering assembly and the vertical centering assembly respectively comprise two positioning plates which are symmetrically arranged at two sides of the cavity window; the two positioning plates can synchronously move towards or away from each other;
the spray gun is arranged on one side of the cavity window and used for applying air pressure to the multilayer ceramic substrate positioned above the cavity window;
the arrangement of the sucking disc, the elastic pressing frame and the centering and positioning device at the bottom of the manipulator can accurately control the distance between the outer edge of the multilayer ceramic substrate and the edge of the cavity window, and the pressing position and the pressing force are kept consistent;
the elastic pressing frame is in a shape of a Chinese character 'hui', the size of an inner frame of the elastic pressing frame is the same as that of the cavity window, the size of an outer frame of the elastic pressing frame is the same as that of the outer shape of the multilayer ceramic substrate, and the width of the section of the elastic pressing frame is 0.5-1 mm; the section width of the elastic pressing frame is 0.8 mm; a pressure sensor is arranged in the elastic pressing frame; the top of the sucker is connected with a telescopic rod, the top of the telescopic rod is connected with a telescopic motor, and the telescopic motor is arranged at the center of the bottom of the manipulator; the inner wall surface of the charging barrel and the inner wall surface of each positioning plate are provided with elastic wear-resistant layers.
2. The multilayer ceramic substrate airtightness detection apparatus according to claim 1, wherein: and the bottom of the jacking plate is provided with a jacking cylinder.
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| CN202010424528.7A CN111426431B (en) | 2020-05-19 | 2020-05-19 | Multilayer ceramic substrate gas tightness detection device |
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| CN202010424528.7A CN111426431B (en) | 2020-05-19 | 2020-05-19 | Multilayer ceramic substrate gas tightness detection device |
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| CN113237334B (en) * | 2021-03-31 | 2023-06-30 | 汪洋 | High-temperature sintering equipment and sintering method for ceramic substrate |
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